MOF-based derived carbon material as well as preparation method and application thereof
By preparing MOF-based derived carbon materials, the problem of poor adsorption effect of existing adsorbent materials on low concentration ammonia under high humidity was solved, achieving efficient adsorption of low concentration ammonia, which is suitable for the purification needs of semiconductor plants.
Patent Information
- Application Number
- CN202511189959.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-25
- Publication Date
- 2025-11-28
AI Technical Summary
Existing ammonia adsorption materials are not effective at adsorbing low concentrations of ammonia in high humidity environments, and cannot meet the continuous operation requirements of semiconductor plants.
Using MOF-derived carbon materials, ZrO2/Fe3O4@porous carbon materials were prepared by impregnating short-cut carbon fiber cloth with zirconium/iron bimetallic salt and terephthalic acid precursor solution, combined with vacuum-assisted transfer molding and step-curing process, thereby enhancing chemical adsorption capacity and hierarchical pore structure.
It achieves high specific surface area and high pore volume, and can effectively adsorb low concentrations of ammonia gas, with an adsorption capacity of 346 mg/g, exhibiting excellent adsorption performance for 10 ppm ammonia gas.
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Abstract
Description
Technical Field
[0001] This invention relates to the field of composite adsorption materials technology, and in particular to a MOF-based derived carbon material, its preparation method and application. Background Technology
[0002] In advanced ultra-large-scale integrated circuit (ULSI) manufacturing processes, controlling trace amounts of gaseous contaminants in the wafer fabrication environment has become a core factor determining device reliability. Ammonia (NH3), due to its highly polar molecular properties and high reactivity with silicon-based materials, can trigger a chain reaction of failures in multiple critical process stages. In extreme ultraviolet (EUV) lithography, NH3 reacts with acidic components in the photoresist to form ammonium salt crystals, causing contamination of the projection optics system and increased linewidth roughness. In atomic layer deposition (ALD), NH3 competes with transition metal precursors for coordination, leading to the formation of an amorphous defect layer at the metal gate interface, increasing the transistor threshold voltage drift. Therefore, effectively removing ammonia from the wafer fabrication environment is crucial.
[0003] Currently, methods for purifying ammonia include adsorption, low-temperature plasma technology, and catalytic decomposition. Low-temperature plasma, rich in electrons, ions, free radicals, and excited-state molecules, breaks gas molecular bonds while simultaneously generating free radicals such as ·OH and highly oxidizing O3, thus removing harmful pollutants. However, this technology cannot completely degrade pollutants and often produces other byproducts and ozone, causing secondary pollution. Photocatalysis is another method for eliminating ammonia; however, this technology requires a long residence time, and catalyst activity decreases significantly at high relative humidity. Adsorption utilizes adsorbents such as activated carbon, Al2O3, silica gel, and molecular sieves to adsorb harmful components in the air, thereby eliminating harmful pollutants.
[0004] Activated carbon, as a traditional adsorbent in adsorption methods, possesses a high specific surface area of 1000–3000 m² / g. However, its micropore distribution is discrete and its surface functional groups are randomly distributed, resulting in insufficient adsorption capacity for NH3. Furthermore, it exhibits significant competitive adsorption effects under high relative humidity (RH) conditions. Ion exchange resins, through sulfonic acid groups, interact with NH3... 4+ While the charge-dependent adsorption of ammonia can achieve chemical adsorption, its effective specific surface area is typically less than 300 m² / g due to the rigid structure of the resin skeleton (such as the styrene-divinylbenzene crosslinking system). The dynamic adsorption breakthrough time for sub-ppb NH3 is less than a few minutes, which cannot meet the continuous operation requirements of semiconductor plants. Therefore, an ammonia adsorption material with a high specific surface area, capable of effectively adsorbing low concentrations of ammonia, and suitable for wafer processing environments is needed. Summary of the Invention
[0005] In view of this, the purpose of this invention is to provide a MOF-based derived carbon material, its preparation method and application, so as to at least solve the problem that existing ammonia adsorption materials cannot effectively adsorb low concentrations of ammonia.
[0006] The present invention solves the above-mentioned technical problems through the following technical means:
[0007] The first aspect of this application provides a method for preparing MOF-based derived carbon materials, comprising the following steps:
[0008] Zirconium tetrachloride, ferric chloride, terephthalic acid and polyethylene glycol were weighed separately, added to ethanol, and ultrasonically dissolved and mixed to obtain MOF precursor solution. Carbon fiber cloth was immersed in MOF precursor solution and ultrasonically treated for 15-30 min. After removal, carbon fiber cloth loaded with MOF precursor was obtained.
[0009] The carbon fiber cloth loaded with MOF precursor was completely immersed in the resin solution, and then cured at 75~90℃ for 2~4 hours, at 100~120℃ for 1~3 hours, and at 130~150℃ for 4~6 hours. After naturally cooling to room temperature, it was demolded to obtain MOF@carbon fiber composite material.
[0010] The MOF@carbon fiber composite material was calcined at 300~600℃, cooled to room temperature in the furnace, and then immersed in anhydrous ethanol for 1~6 hours. After drying, the MOF-based derived carbon material was obtained.
[0011] Furthermore, in the preparation of the MOF precursor solution, the molar ratio of ZrCl4, FeCl3·6H2O, H2BDC and PEG-2000 is (1~3):1:(4~16):0.2.
[0012] Furthermore, the resin solution is prepared as follows: the epoxy resin and curing agent are mixed evenly and degassed in a vacuum drying oven at 50~80℃ for 1.5~6 h to obtain the resin solution, wherein the volume ratio of the epoxy resin to the curing agent is 1:(0.8~1).
[0013] Furthermore, the curing agent is any one of methyltetrahydrophthalic anhydride, methylnadic anhydride, hexahydrophthalic anhydride, 4,4'-diaminodiphenyl sulfone, and m-phenylenediamine.
[0014] Furthermore, the step of immersing the carbon fiber cloth loaded with the MOF precursor in the resin solution includes:
[0015] The carbon fiber cloth loaded with MOF precursor is sealed with a mold with a release cloth, a vacuum bag, and a sealing strip. The mold is then evacuated to a vacuum using a vacuum pump.
[0016] In an environment of 50~80℃, connect the mold to a vacuum pump and use the negative pressure of the vacuum bag to inject the resin solution into the mold until the carbon fiber cloth is completely impregnated.
[0017] Furthermore, the step of calcining the MOF@carbon fiber composite material at 300~600℃ includes: placing the MOF@carbon fiber composite material in a calcination furnace, raising the temperature to 300~400℃ at 2~5℃ / min and holding it for 1~3h, and then continuing to calcine at 400~600℃ at 2~6℃ / min and holding it for 3~6h.
[0018] Furthermore, the drying conditions are as follows: drying at 60~80℃ for 6~12 hours.
[0019] The second aspect of this application provides a MOF-based derived carbon material, which is prepared using the preparation method described in the first aspect above.
[0020] The third aspect of this application provides the application of the MOF-based derived carbon materials described in the second aspect above in ammonia adsorption materials.
[0021] Furthermore, the MOF-based derived carbon material can be applied to the adsorption of low-concentration ammonia gas, wherein the concentration of the low-concentration ammonia gas is less than 10 ppm.
[0022] The method for preparing MOF-based derived carbon materials of the present invention uses short-cut carbon fiber cloth as a substrate. After ultrasonic cleaning with ethanol, it is impregnated with a zirconium / iron bimetallic salt and terephthalic acid precursor solution. Epoxy resin is injected into the fiber pores of the carbon fiber cloth loaded with the MOF precursor using a vacuum-assisted transfer molding process. Stepwise curing is used to achieve epoxy resin crosslinking and in-situ coordination growth of MOF crystals. Finally, gradient calcination yields ZrO2 / Fe3O4@porous carbon material, i.e., MOF-based derived carbon material. This technical solution enhances NH3 chemisorption through bimetallic Lewis acid sites, improves trace molecule mass transfer efficiency through hierarchical pore structure, and ensures the mechanical strength of the material through carbon fiber skeleton. Experimental testing shows that the MOF-based derived carbon material prepared by this invention has a specific surface area as high as 1278 m². 2 / g, with a pore volume as high as 0.86 cm³ 3 / g, with an adsorption capacity of 346mg / g for low-concentration ammonia gas at a concentration of 10ppm. Attached Figure Description
[0023] Figure 1 The graphs show the dynamic adsorption curves of NH3 on the MOF-based derived carbon materials prepared in Examples 1-3.
[0024] Figure 2 This is a graph showing the adsorption capacity of NH3 for the MOF-based derived carbon materials prepared in Examples 1-3. Detailed Implementation
[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0026] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.
[0027] The MOF-based derived carbon material of this application uses chopped carbon fiber cloth as a substrate. After ultrasonic cleaning with ethanol, it is impregnated with a zirconium / iron bimetallic salt and terephthalic acid precursor solution. Epoxy resin is injected into the fiber pores of the carbon fiber cloth loaded with the MOF precursor using a vacuum-assisted transfer molding process. Stepwise curing achieves epoxy resin crosslinking and in-situ coordination growth of MOF crystals. Finally, gradient calcination yields ZrO2 / Fe3O4@porous carbon material, i.e., MOF-based derived carbon material. This technical solution enhances NH3 chemisorption through bimetallic Lewis acid sites, improves trace molecule mass transfer efficiency through hierarchical pore structure, and ensures the mechanical strength of the material through a carbon fiber skeleton.
[0028] Specifically, the preparation method of a MOF-based derived carbon material according to this application includes the following steps:
[0029] (a) Preparation of carbon fiber cloth loaded with MOF precursor
[0030] According to the molar ratio of ZrCl4, FeCl3·6H2O, H2BDC and PEG-2000 as (1~3):1:(4~16):0.2, zirconium tetrachloride (ZrCl4), ferric chloride hexahydrate (FeCl3·6H2O), terephthalic acid (H2BDC) and polyethylene glycol (PEG-2000) were weighed and dissolved in ethanol, and then ultrasonically treated for 30~60 minutes to form a homogeneous suspension, i.e., MOF precursor solution. Cut 5~10 layers of 10×10cm short carbon fiber cloth, immerse the carbon fiber cloth in the MOF precursor solution, and continue to ultrasonically treat for 15~30 minutes to ensure that the fiber surface is uniformly loaded with MOF precursor. Remove it to obtain carbon fiber cloth loaded with MOF precursor.
[0031] (II) Preparation of MOF@carbon fiber composite materials
[0032] Epoxy resin and curing agent were mixed uniformly at a volume ratio of 1:(0.8~1) and degassed in a vacuum drying oven at 50~80℃ for 1.5~6 h to obtain a resin solution. Carbon fiber cloth loaded with MOF precursor was sealed with a mold, a vacuum bag, and sealing strips using a release cloth. The mold was evacuated to a vacuum level using a vacuum pump and left for 12~24 hours to check for air tightness. At 50~80℃, the mold was connected to the vacuum pump, and the resin solution was injected into the mold using the negative pressure of the vacuum bag until the carbon fiber cloth was completely impregnated. The mixture was then cured at 75~90℃ for 2~4 hours, at 100~120℃ for 1~3 hours, and at 130~150℃ for 4~6 hours. MOF crystals grew simultaneously during the curing process. After the mold cooled to room temperature, it was removed and demolded using alcohol and a blunt instrument to obtain the MOF@carbon fiber composite material.
[0033] The curing agent in this step is an acid anhydride or an aromatic amine. The acid anhydride is selected from any one of methyltetrahydrophthalic anhydride (MTHPA), methylnadic anhydride (MNA), and hexahydrophthalic anhydride (HHPA); the aromatic amine is selected from any one of 4,4'-diaminodiphenyl sulfone (DDS) and m-phenylenediamine (m-PDA).
[0034] (III) Preparation of MOF-based derived carbon materials
[0035] The MOF@carbon fiber composite material was placed in a calcination furnace and heated to 300-400℃ at a rate of 2-5℃ / min and held for 1-3 hours. Then, it was heated to 400-600℃ at a rate of 2-6℃ / min and held for 3-6 hours. After that, it was cooled to room temperature in the furnace and then immersed in anhydrous ethanol for 1-6 hours to remove impurities. Finally, it was dried at 60-80℃ for 6-12 hours to obtain the MOF-based derived carbon material.
[0036] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.
[0037] Example 1
[0038] The preparation method of the MOF-based derived carbon material in this embodiment is as follows:
[0039] (a) Preparation of carbon fiber cloth loaded with MOF precursor
[0040] 0.466g of zirconium tetrachloride (ZrCl4), 0.541g of ferric chloride (FeCl3·6H2O), 2.658g of terephthalic acid (H2BDC), and 0.8g of polyethylene glycol (PEG-2000) were weighed and dissolved in 50ml of ethanol. The solution was ultrasonically treated for 40 minutes to form a homogeneous suspension, i.e., the MOF precursor solution. Six 10×10cm short carbon fiber cloths were cut and immersed in the MOF precursor solution. The solution was ultrasonically treated for another 30 minutes to ensure that the MOF precursor was uniformly loaded on the fiber surface. The cloth was then removed to obtain the carbon fiber cloth loaded with the MOF precursor.
[0041] (II) Preparation of MOF@carbon fiber composite materials
[0042] 100 mL of epoxy resin and 85 mL of methyltetrahydrophthalic anhydride were mixed evenly and degassed in a vacuum drying oven at 60 °C for 2 h to obtain a resin solution. The carbon fiber cloth loaded with the MOF precursor was sealed with a mold, a vacuum bag, and sealing strips using a release cloth. The mold was evacuated to a vacuum level using a vacuum pump and left for 16 hours to check for air tightness. At 60 °C, the mold was connected to the vacuum pump, and the resin solution was injected into the mold using the negative pressure of the vacuum bag until the carbon fiber cloth was completely impregnated. The mixture was then cured at 90 °C for 3 hours, 105 °C for 3 hours, and 135 °C for 5 hours. During the curing process, MOF crystals grew simultaneously. After the mold cooled to room temperature, it was removed and demolded using alcohol and a blunt instrument to obtain the MOF@carbon fiber composite material.
[0043] (III) Preparation of MOF-based derived carbon materials
[0044] The MOF@carbon fiber composite material was placed in a calcination furnace and heated to 350℃ at 3℃ / min and held for 2 h. Then, it was heated to 500℃ at 5℃ / min and held for 5 h. After that, it was cooled to room temperature in the furnace and then immersed in anhydrous ethanol for 4 h to remove impurities. Finally, it was dried at 60℃ for 12 h to obtain the MOF-based derived carbon material, denoted as ZrO2 / Fe3O4@porous carbon (1:1).
[0045] Example 2
[0046] The only difference between this embodiment and Example 1 is that the amount of zirconium tetrachloride is 0.466 g and the amount of FeCl3·6H2O is 0.270 g; all other steps and process conditions remain unchanged. The final MOF-based derived carbon material is denoted as ZrO2 / Fe3O4@porous carbon (2:1).
[0047] Example 3
[0048] The only difference between this embodiment and Example 1 is that the amount of zirconium tetrachloride is 0.699 g and the amount of FeCl3·6H2O is 0.270 g; all other steps and process conditions remain unchanged. The final MOF-based derived carbon material is denoted as ZrO2 / Fe3O4@porous carbon (3:1).
[0049] Example 4
[0050] The preparation method of the MOF-based derived carbon material in this embodiment is as follows:
[0051] (a) Preparation of carbon fiber cloth loaded with MOF precursor
[0052] 0.466g of zirconium tetrachloride (ZrCl4), 0.270g of ferric chloride (FeCl3·6H2O), 1.329g of terephthalic acid (H2BDC), and 0.8g of polyethylene glycol (PEG-2000) were weighed and dissolved in 50ml of ethanol. The solutions were ultrasonically treated for 30 minutes to form a homogeneous suspension, i.e., the MOF precursor solution. Five 10×10cm short carbon fiber cloths were cut and immersed in the MOF precursor solution. The solutions were ultrasonically treated for another 15 minutes to ensure that the fiber surface was uniformly loaded with MOF precursors. The cloths were then removed to obtain the carbon fiber cloth loaded with MOF precursors.
[0053] (II) Preparation of MOF@carbon fiber composite materials
[0054] 100 mL of epoxy resin and 80 mL of 4,4'-diaminodiphenyl sulfone were mixed evenly and degassed in a vacuum drying oven at 50 °C for 1.5 h to obtain a resin solution. The carbon fiber cloth loaded with the MOF precursor was sealed with a mold, a vacuum bag, and sealing strips using a release cloth. The mold was evacuated to a vacuum level using a vacuum pump and left for 12 hours to check for air tightness. At 50 °C, the mold was connected to the vacuum pump, and the resin solution was injected into the mold using the negative pressure of the vacuum bag until the carbon fiber cloth was completely impregnated. The mixture was then cured at 75 °C for 2 hours, 100 °C for 2 hours, and 130 °C for 6 hours. During the curing process, MOF crystals grew simultaneously. After the mold cooled to room temperature, it was removed and demolded using alcohol and a blunt instrument to obtain the MOF@carbon fiber composite material.
[0055] (III) Preparation of MOF-based derived carbon materials
[0056] MOF@carbon fiber composite material was placed in a calcination furnace and heated to 300℃ at 2℃ / min and held for 3 h. Then, it was heated to 400℃ at 6℃ / min and held for 3 h. After that, it was cooled to room temperature with the furnace and then immersed in anhydrous ethanol for 1 hour to remove impurities. Finally, it was dried at 80℃ for 6 h to obtain MOF-based derived carbon material.
[0057] Example 5
[0058] The preparation method of the MOF-based derived carbon material in this embodiment is as follows:
[0059] (a) Preparation of carbon fiber cloth loaded with MOF precursor
[0060] 0.466g of zirconium tetrachloride (ZrCl4), 0.270g of ferric chloride (FeCl3·6H2O), 5.3152g of terephthalic acid (H2BDC), and 0.8g of polyethylene glycol (PEG-2000) were weighed and dissolved in 80ml of ethanol. The solution was ultrasonically treated for 60 minutes to form a homogeneous suspension, i.e., the MOF precursor solution. Ten layers of 10×10cm short carbon fiber cloth were cut and immersed in the MOF precursor solution. The solution was ultrasonically treated for another 15 minutes to ensure that the fiber surface was uniformly loaded with MOF precursor. The cloth was then removed to obtain the carbon fiber cloth loaded with MOF precursor.
[0061] (II) Preparation of MOF@carbon fiber composite materials
[0062] 100 mL of epoxy resin and 100 mL of m-phenylenediamine were mixed evenly and degassed in a vacuum drying oven at 80 °C for 6 h to obtain a resin solution. Carbon fiber cloth loaded with the MOF precursor was sealed with a mold, a vacuum bag, and sealing strips using a release liner. The mold was evacuated to a vacuum level using a vacuum pump and left for 24 hours to check for air tightness. At 80 °C, the mold was connected to the vacuum pump, and the resin solution was injected into the mold using the negative pressure of the vacuum bag until the carbon fiber cloth was completely impregnated. The mixture was then cured at 75 °C for 2 hours, 120 °C for 1 hour, and 150 °C for 4 hours. During the curing process, MOF crystals grew simultaneously. After the mold cooled to room temperature, it was removed and demolded using alcohol and a blunt instrument to obtain the MOF@carbon fiber composite material.
[0063] (III) Preparation of MOF-based derived carbon materials
[0064] The MOF@carbon fiber composite material was placed in a calcination furnace and heated to 400℃ at 5℃ / min and held for 1 hour. Then, it was heated to 400℃ at 6℃ / min and held for 3 hours. After that, it was cooled to room temperature in the furnace and then immersed in anhydrous ethanol for 6 hours to remove impurities. Finally, it was dried at 80℃ for 6 hours to obtain the MOF-based derived carbon material.
[0065] The MOF-based derived carbon materials prepared in Examples 1-3 were used as test samples for structural characterization and performance testing, as follows:
[0066] (1) Specific surface area and pore size test analysis
[0067] Using a Belserp MAX II analyzer, the BET surface area and pore structure of the sample material were tested at -195°C using N2 adsorption and desorption. The total surface area was determined using the Brunol-Emmett-Taylor (BET) equation. The results are shown in Table 1.
[0068] sample <![CDATA[BET(m 2 / g)]]> <![CDATA[Pore volume (cm 3 / g)]]> <![CDATA[ZrO2 / Fe3O4@Porous Carbon (1:1)]]> 973 0.79 <![CDATA[ZrO2 / Fe3O4@Porous Carbon (2:1)]]> 1045 0.81 <![CDATA[ZrO2 / Fe3O4@Porous Carbon (3:1)]]> 1278 0.86
[0069] Table 1
[0070] The data in Table 1 show that the MOF-based derived carbon materials prepared by the method of the present invention have a large specific surface area and pore volume, and the specific surface area and pore volume of the materials increase with the increase of zirconium salt ratio.
[0071] (2) Dynamic adsorption performance test
[0072] NH3 adsorption tests were conducted on the material using a UTEST static adsorption apparatus. Initial efficiency: test airflow (12 L / min), test resistance (100 Pa), test concentration (600 ppb); Poisoning capacity: test airflow (15 L / min), test resistance (100 Pa), test concentration (10 ppm). The adsorption capacity was calculated using the integral of the breakthrough curve, as shown in the following formula:
[0073]
[0074] In the formula, q (g / g) is the maximum adsorption capacity, F (mL / min) is the total gas flow rate, and C0 and C (mg / m³) are also present. 3 The inlet and outlet concentrations of toluene are denoted as m(g) and t(t), respectively. s (min) represents the adsorption time.
[0075] Figure 1 The graphs show the dynamic adsorption curves of NH3 on the MOF-based derived carbon materials prepared in Examples 1-3. Figure 2 This is a graph showing the adsorption capacity of NH3 for the MOF-based derived carbon materials prepared in Examples 1-3. Figure 1 and Figure 2 The data show that the ZrO2 / Fe3O4@porous carbon material prepared in the embodiments of the present invention exhibits high adsorption performance for NH3: the adsorption breakthrough time of NH3 in the three groups of samples in Examples 1, 2 and 3 is successively delayed, and the adsorption capacity for NH3 reaches 312 mg / g, 334 mg / g and 346 mg / g, respectively.
[0076] Therefore, the MOF-based derived carbon material (ZrO2 / Fe3O4@porous carbon material) prepared by this invention can be used as an adsorbent for the adsorption of ammonia, and is especially suitable for the adsorption of low concentration ammonia with a concentration of less than 10 ppm.
[0077] The above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the present invention, and all such modifications and substitutions should be covered within the scope of the claims of the present invention. Technical aspects, shapes, and structures not described in detail in this invention are all well-known technologies.
Claims
1. A method for preparing MOF-based derived carbon materials, characterized in that, Includes the following steps: Zirconium tetrachloride, ferric chloride, terephthalic acid and polyethylene glycol were weighed separately, added to ethanol, and ultrasonically dissolved and mixed to obtain MOF precursor solution. Carbon fiber cloth was immersed in MOF precursor solution and ultrasonically treated for 15-30 min. After removal, carbon fiber cloth loaded with MOF precursor was obtained. The carbon fiber cloth loaded with MOF precursor was completely immersed in the resin solution, and then cured at 75~90℃ for 2~4 hours, at 100~120℃ for 1~3 hours, and at 130~150℃ for 4~6 hours. After naturally cooling to room temperature, MOF@carbon fiber composite material was obtained. The MOF@carbon fiber composite material was calcined at 300~600℃, cooled to room temperature in the furnace, and then immersed in anhydrous ethanol for 1~6 hours. After drying, the MOF-based derived carbon material was obtained.
2. The method for preparing a MOF-based derived carbon material according to claim 1, characterized in that, In the preparation of the MOF precursor solution, the molar ratio of ZrCl4, FeCl3·6H2O, H2BDC and PEG-2000 is (1~3):1:(4~16):0.
2.
3. The method for preparing a MOF-based derived carbon material according to claim 1, characterized in that, The resin solution is prepared as follows: epoxy resin and curing agent are mixed evenly and degassed in a vacuum drying oven at 50~80℃ for 1.5~6h to obtain the resin solution. The volume ratio of epoxy resin to curing agent is 1:(0.8~1).
4. The method for preparing a MOF-based derived carbon material according to claim 3, characterized in that, The curing agent is any one of methyltetrahydrophthalic anhydride, methylnadic anhydride, hexahydrophthalic anhydride, 4,4'-diaminodiphenyl sulfone, and m-phenylenediamine.
5. The method for preparing a MOF-based derived carbon material according to claim 3, characterized in that, The process of immersing carbon fiber cloth loaded with MOF precursor in resin solution includes: The carbon fiber cloth loaded with MOF precursor is sealed with a mold with a release cloth, a vacuum bag, and a sealing strip. The mold is then evacuated to a vacuum using a vacuum pump. In an environment of 50~80℃, connect the mold to a vacuum pump and use the negative pressure of the vacuum bag to inject the resin solution into the mold until the carbon fiber cloth is completely impregnated.
6. The method for preparing a MOF-based derived carbon material according to claim 1, characterized in that, The step of calcining the MOF@carbon fiber composite material at 300~600℃ includes: The MOF@carbon fiber composite material was placed in a calcining furnace and heated to 300-400℃ at a rate of 2-5℃ / min and held for 1-3 hours. Then, it was calcined at 400-600℃ at a rate of 2-6℃ / min and held for 3-6 hours.
7. The method for preparing a MOF-based derived carbon material according to claim 1, characterized in that, The drying conditions are 60-80℃ for 6-12 hours.
8. A MOF-based derived carbon material, characterized in that, It is prepared by the preparation method described in any one of claims 1-7.
9. The application of the MOF-based derived carbon material according to claim 8 in ammonia adsorption materials.
10. The application according to claim 9, characterized in that, The MOF-based derived carbon material can be used for the adsorption of low-concentration ammonia gas, where the ammonia concentration is less than 10 ppm.