Semiconductor welding gas shielding protection device

Abstract

The invention discloses a semiconductor welding gas shielding protection device, and relates to the technical field of welding process, the semiconductor welding gas shielding protection device comprises a bottom plate, a cover body is fixedly connected to the bottom plate, two parallel rotating discs are rotatably connected in the cover body, and the cover body is filled with helium; a plurality of clamping mechanisms distributed in a circumferential array are arranged on the turntable, and the clamping mechanisms are used for clamping semiconductor welding parts; a welding head is mounted on the upper side in the cover body; the cover body is provided with a driving mechanism, and the driving mechanism is used for driving the semiconductor components clamped by the clamping mechanism on the two turntables to be attached to each other when the semiconductor components rotate to the upper sides of the turntables; the feeding assembly fixes the two assemblies to be welded to the clamping mechanisms of the two rotating discs correspondingly. According to the invention, the supplement demand and the dissipation loss of the inert gas can be effectively reduced, and the welding cost in batch production is effectively reduced.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of a welding process, in particular to a semiconductor welding gas shielding protection device. BACKGROUND

[0002] In a semiconductor device manufacturing process, welding is one of the key process links. Since the semiconductor material is extremely sensitive to oxygen, if exposed to air during high-temperature welding, oxidation reaction is prone to occur, resulting in a decrease in welding quality, damage to device performance, and even failure.

[0003] In the existing semiconductor device welding process, the workers usually spray inert protective gases such as helium and argon on the welding position. The inert gas can effectively improve the welding quality by wrapping the welding position. However, the sprayed inert gas cannot be recycled, which greatly increases the welding cost in batch semiconductor device welding work. In addition, the sprayed protective gas has poor stability and is easily affected by air flow, which weakens its protection effect. SUMMARY

[0004] The application aims to provide a semiconductor welding gas shielding protection device to solve the problems in the background art.

[0005] To achieve the above-mentioned purpose, the application provides the following technical scheme: a semiconductor welding gas shielding protection device, comprising a bottom plate, a cover body fixedly connected to the bottom plate, two rotating discs arranged in parallel with each other and rotatably connected in the cover body, and helium filled in the cover body.

[0006] A plurality of clamping mechanisms arranged in a circumferential array are arranged on the rotating disc, and the clamping mechanism is used for clamping the components for semiconductor welding.

[0007] A welding head is installed at an upper position in the cover body.

[0008] A driving mechanism is arranged on the cover body, and the driving mechanism is used for driving the semiconductor components clamped by the clamping mechanisms on the two rotating discs to be attached to each other when rotating to an upper position of the rotating disc.

[0009] A fixing frame is fixedly connected to the bottom plate at a lower position of the rotating disc, and a material withdrawing assembly and a material feeding assembly are arranged on the left and right sides of the fixing frame, respectively. The material withdrawing assembly is used for separating the two components after welding from the clamping mechanisms. The material feeding assembly is used for fixing the two components to be welded to the clamping mechanisms of the two rotating discs, respectively.

[0010] Preferably, the clamping mechanism comprises a sliding rod I in sliding connection with the rotating disc, a fixed seat is fixedly connected to one end of the sliding rod I close to the inner wall of the cover, and a spring I is sleeved on the sliding rod I; two clamping plates are symmetrically arranged on the fixed seat; a fastening assembly for keeping the two clamping plates clamped is arranged on the fixed seat; and a distance adjusting assembly is arranged on the fixed seat, which is used to adjust the clamping width of the two clamping plates.

[0011] Preferably, the fastening assembly comprises a sliding rod II in sliding connection with the clamping plate, the sliding rod II is fixedly connected with the fixed seat, and a spring II is sleeved on the sliding rod II, one end of the spring II is fixedly connected with the clamping plate, and the other end is fixedly connected with the sliding rod II.

[0012] Preferably, the sliding rod II is fixedly connected with an elastic sheet made of metal on the side away from the clamping plate, and a triangular-shaped clamping block is fixedly connected to one end of the elastic sheet close to the clamping plate; a push rod I and a push rod II are respectively fixedly connected to the clamping plate and the elastic sheet.

[0013] Preferably, the distance adjusting assembly comprises a limiting frame fixedly connected to the fixed seat, a sliding block I is symmetrically arranged in sliding connection on both sides of the limiting frame, a stop block is fixedly connected to the sliding block I, and the two stop blocks are respectively attached to one end of the inner side of the two clamping plates; a fastening screw is threadedly connected to the sliding block I, and the fastening screw is attached to the limiting frame.

[0014] Preferably, the driving mechanism comprises a motor fixed to the cover, a driving shaft is fixedly connected to the rear end of the output shaft of the motor, and the driving shaft is coaxially fixedly connected with the two rotating discs; fixed rings are symmetrically fixedly connected to the inner walls on the front and rear sides of the cover, and the fixed rings close to the upper side are convex towards the other fixed ring.

[0015] Preferably, the material returning assembly comprises a sliding frame I in sliding connection with the fixed frame, a cylinder I is arranged between the sliding frame I and the bottom plate, the cylinder I is fixedly connected with the bottom plate, and the extension end of the cylinder I is fixedly connected with the sliding frame I; two push rods III are symmetrically fixedly connected to the front and rear sides of the sliding frame I, the two push rods III are inclined towards each other along the extension direction of the cylinder I, and the distance between the roots of the two push rods III is greater than the distance between the two push rods I.

[0016] Preferably, the feeding assembly comprises a sliding frame II in sliding connection with the fixed frame, two push rods IV are symmetrically fixedly connected to the front and rear sides of the sliding frame II, and the distance between the two push rods IV is equal to the distance between the two push rods II; a cylinder II is arranged between the sliding frame II and the bottom plate, the cylinder II is fixedly connected with the bottom plate, and the extension end of the cylinder II is fixedly connected with the sliding frame II; a feeding plate is arranged between the two push rods IV on the front and rear sides, and the feeding plate is fixedly connected with the fixed frame.

[0017] Preferably, the upper part of the cover body is fixedly connected with a helium cylinder, the helium cylinder is connected with the cover body through an electromagnetic valve; the inner wall of the cover body is fixedly connected with a helium concentration sensor at the top and the bottom.

[0018] Compared with the prior art, the present application has the following advantages:

[0019] 1. The present application adopts a reverse-docking cover body and a rotating disc continuous operation design, cooperates with the natural stratification characteristics of helium and the local stability of the welding heat field on the gas, and constructs a recyclable protective gas environment, which significantly reduces the replenishment demand and the loss of inert gas, and effectively reduces the welding cost in batch production.

[0020] 2. The present application designs an automatic material feeding and automatic material feeding structure, which can automatically clamp two parts to be welded, automatically take down the welded parts after welding, effectively improves the automation of the whole equipment, effectively saves manpower, and improves the efficiency of semiconductor part welding. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0022] Figure 2 It is a schematic diagram of the rear view structure of the present application;

[0023] Figure 3 It is a schematic diagram of the split structure of the present application;

[0024] Figure 4 It is a schematic diagram of the split structure of the driving mechanism in the present application;

[0025] Figure 5 It is a schematic diagram of the structure of the rotating disc in the present application;

[0026] Figure 6 It is a schematic diagram of the further split structure of the driving mechanism in the present application;

[0027] Figure 7 It is a schematic diagram of the structure of the clamping mechanism in the present application;

[0028] Figure 8 It is a schematic diagram of the second perspective structure of the clamping mechanism in the present application;

[0029] Figure 9 It is a schematic diagram of the structure of the material feeding assembly and the material feeding assembly in the present application;

[0030] Figure 10 It is a schematic diagram of the cross-sectional structure of the cover body in the present application.

[0031] In the drawings, the components represented by each reference numeral are as follows:

[0032] 1. Base plate; 2. Cover body; 3. Welding head; 4. Fixing frame; 5. Slide rod one; 6. Fixing seat; 7. Spring one; 8. Clamping plate; 9. Slide rod two; 10. Spring two; 11. Elastic sheet; 12. Locking block; 13. Push rod one; 14. Push rod two; 15. Limiting frame; 16. Slider one; 17. Stop block; 18. Fastening screw; 19. Motor; 20. Drive shaft; 21. Fixing ring; 22. Slide frame one; 23. Cylinder one; 24. Push rod three; 25. Slide frame two; 26. Push rod four; 27. Cylinder two; 28. Feeding plate; 29. ​​Helium cylinder; 30. Helium concentration sensor; 31. Turntable. Detailed Implementation

[0033] Please see Figures 1-10 The present invention provides a technical solution: a semiconductor welding gas shielding protection device, including a base plate 1, a cover 2 fixedly connected to the base plate 1, two mutually parallel turntables 31 rotatably connected inside the cover 2, and the cover 2 being filled with helium gas.

[0034] The turntable 31 is provided with several clamping mechanisms arranged in a circular array. The clamping mechanisms are used to clamp the components for semiconductor welding.

[0035] A welding head 3 is installed on the upper side inside the cover 2;

[0036] The cover 2 is provided with a drive mechanism, which is used to drive the semiconductor components held by the clamping mechanism on the two turntables 31 to fit together when they rotate to the upper position of the turntables 31.

[0037] A fixing frame 4 is fixedly connected to the base plate 1 at the lower side of the turntable 31. The left and right sides of the fixing frame 4 are respectively provided with a material ejection component and a material feeding component. The material ejection component is used to detach the two parts that have been welded from the clamping mechanism. The material feeding component fixes the two parts to be welded to the clamping mechanisms of the two turntables 31 respectively.

[0038] During operation, when welding two semiconductor components together, the clamping mechanisms on the front and rear turntables 31 simultaneously clamp the two components to be welded. At this time, the drive mechanism can be activated to drive the turntables 31 to rotate. When the front and rear turntables 31 rotate, the components clamped by the clamping mechanisms are moved from bottom to top by the turntables 31. Since the mass of helium is less than that of air, a high concentration of helium is accumulated inside the housing 2. When the component to be welded moves to the upper part of the housing 2, the component to be welded is basically isolated from oxygen and is in a safe welding environment. When the component to be welded moves to the welding range of the welding head 3, the drive mechanism drives the two clamped components to stick together, and the welding device is activated to weld the sticking part of the two components.

[0039] After the two parts are welded, they gradually exit the cover 2 under the action of the turntable 31. When the turntable 31 moves the welded parts to the position of the unloading assembly, the unloading assembly can be activated to remove the welded parts from the clamping mechanism.

[0040] When the empty clamping mechanism rotates with the turntable 31 to the position of the feeding component, the feeding component can once again clamp the two parts to be welded by the empty clamping mechanism for a new round of welding.

[0041] The device can continuously weld semiconductor components by rotating the turntable 31, which improves welding efficiency. At the same time, setting the welding position in the high-concentration helium gas inside the cover 2 can effectively improve welding safety. In addition, the temperature generated by welding heats the helium gas, which can effectively reduce the escape of helium gas from the cover 2 and achieve the effect of reusing helium gas.

[0042] See Figures 7-8 As a further embodiment of the present invention, the clamping mechanism includes a slide rod 5 slidably connected to the turntable 31, a fixed seat 6 fixedly connected to one end of the slide rod 5 near the inner wall of the cover 2, and a spring 7 sleeved on the slide rod 5; clamping plates 8 are symmetrically arranged on both sides of the fixed seat 6; a fastening assembly for keeping the two clamping plates 8 clamped together is provided on the fixed seat 6; an adjusting assembly is provided on the fixed seat 6 for adjusting the clamping width of the two clamping plates 8.

[0043] The fastening assembly includes a slide rod 2 9 that is slidably connected to the clamping plate 8. The slide rod 2 9 is fixedly connected to the fixing seat 6 and a spring 2 10 is sleeved on the slide rod 2 9. One end of the spring 2 10 is fixedly connected to the clamping plate 8 and the other end is fixedly connected to the slide rod 2 9.

[0044] A metal elastic sheet 11 is fixedly connected to the side of the slide bar 2 9 away from the clamping plate 8, and a triangular-shaped locking block 12 is fixedly connected to the end of the elastic sheet 11 near the clamping plate 8; push rod 1 13 and push rod 2 14 are fixedly connected to the clamping plate 8 and the elastic sheet 11 respectively.

[0045] During operation, when the locking block 12 is engaged with the clamping plate 8, the distance between the two clamping plates 8 is greater than the width of the part to be welded. The part to be welded is placed between the two clamping plates 8, and the locking block 12 is disengaged from the clamping plate 8 by driving it. The two clamping plates 8 automatically hold the part to be welded under the action of the two springs 10.

[0046] When it is necessary to loosen the component, the two clamping plates 8 can be moved away from each other. After the clamping plates 8 have moved to a certain extent, they will automatically engage with the locking block 12.

[0047] See Figures 7-8As a further embodiment of the present invention, the distance adjustment assembly includes a limiting frame 15 fixedly connected to the fixed base 6, with sliders 16 symmetrically slidably connected to both sides of the limiting frame 15, and stops 17 fixedly connected to sliders 16. The two stops 17 respectively fit against one end of the inner side of the two clamping plates 8; fastening screws 18 are threadedly connected to sliders 16, and the fastening screws 18 fit against the limiting frame 15.

[0048] During operation, after the drive block 12 disengages from the clamping plate 8, the clamping plate 8, driven by the spring 10, exerts a certain impact force when it clamps the component, which can easily damage the component. Adjust the distance between the two stops 17 according to the width of the component to be welded. After adjusting the distance between the two stops 17 to be equal to the width of the component to be welded, tighten the fastening screw 18. The fastening screw 18 will then lock the slider 16 onto the limit frame 15. At this time, after the drive block 12 disengages from the clamping plate 8, the impact force of the drive block 12 will act directly on the stop 17, which can effectively prevent the drive block 12 from directly hitting the component to be welded.

[0049] See Figures 2-3 , Figure 6 As a further embodiment of the present invention, the driving mechanism includes a motor 19 fixed on the cover 2, a drive shaft 20 fixedly connected to the rear end of the output shaft of the motor 19, and the drive shaft 20 being coaxially fixedly connected to two turntables 31; and fixed rings 21 are symmetrically fixedly connected to the inner walls of the front and rear sides of the cover 2, with the upper part of the fixed ring 21 being a protrusion towards the other fixed ring 21.

[0050] During operation, starting the motor 19 drives the drive shaft 20 to rotate. The drive shaft 20 simultaneously drives the turntables 31 on both the front and rear sides to rotate. When the turntables 31 rotate, they drive the multiple sliding rods 5 and the fixed seats 6 connected to them to rotate. When the fixed seat 6 moves to the position where it is in contact with the protrusion of the fixed ring 21, as the turntable 31 continues to rotate, the fixed seat 6 is continuously pressed closer to the turntable 31 by the protrusion of the fixed ring 21. The fixed seats 6 on both the front and rear sides move closer to each other at the same time. When the fixed seat 6 is pressed to the limit position by the fixed ring 21, the corresponding parts to be welded on the fixed seats 6 on both the front and rear sides are just in contact with each other.

[0051] See Figures 7-9 As a further embodiment of the present invention, the unloading assembly includes a sliding frame 22 slidably connected to the fixed frame 4, a cylinder 23 is provided between the sliding frame 22 and the base plate 1, the cylinder 23 is fixedly connected to the base plate 1 and the telescopic end of the cylinder 23 is fixedly connected to the sliding frame 22; two push rods 24 are symmetrically fixedly connected to the front and rear sides of the sliding frame 22, the two push rods 24 are inclined and gradually approach each other along the extension direction of the cylinder 23, and the distance between the roots of the two push rods 24 is greater than the distance between the two push rods 13;

[0052] During operation, when the welded component is moved by the turntable 31 to a position close to the sliding frame 22, the motor 19 is stopped and the cylinder 23 is activated. The cylinder 23 then moves the sliding frame 22 closer to the turntable 31. The sliding frame 22 then moves the two push rods 24 on the front and rear sides to positions that are in contact with the two push rods 13 on the front and rear sides of the turntable. As the cylinder 23 moves the sliding frame 22 further, the two push rods 24 push the two push rods 13 to move. The two push rods 13 then move the two clamping plates 8 in a direction away from each other. At this time, the welded component held by the two clamping plates 8 will fall off. When the clamping plates 8 move to the position where they engage with the locking block 12, the cylinder 23 can be activated to reset the sliding frame 22.

[0053] After the sliding frame 22 is reset, the starting motor 19 drives the turntable 31 to rotate again. At this time, the fixed seat 6 of this part just begins to separate from the protrusion on the fixed ring 21. Under the action of the spring 7, the distance between the front and rear fixed seats 6 gradually increases. When the fixed seat 6 is completely separated from the protrusion of the fixed ring 21, the distance between the front and rear fixed seats 6 returns to the initial level.

[0054] See Figures 7-9 As a further embodiment of the present invention, the feeding assembly includes a sliding frame 25 slidably connected to the fixed frame 4. Two push rods 26 are symmetrically fixedly connected to the front and rear sides of the sliding frame 25, and the distance between the two push rods 26 is exactly equal to the distance between the two push rods 14. A cylinder 27 is provided between the sliding frame 25 and the base plate 1. The cylinder 27 is fixedly connected to the base plate 1, and the telescopic end of the cylinder 27 is fixedly connected to the sliding frame 25. A feeding plate 28 is provided between the two push rods 26 on the front and rear sides, and the feeding plate 28 is fixedly connected to the fixed frame 4.

[0055] During operation, when the turntable 31 moves the clamping plate 8, which is engaged with the locking block 12, to a position close to the sliding frame 25, the motor 19 is stopped and the two parts to be welded are placed on the loading plate 28. Then, the cylinder 27 is started, which moves the sliding frame 25 towards the turntable 31. The sliding frame 25 moves the two push rods 26 on the front and rear sides to a position where they are engaged with the two push rods 14 on the front and rear sides. Under the action of the cylinder 27, the push rods 26 push the push rods 14, which in turn move the locking block 12 through the elastic plate 11, causing the locking block 12 to disengage from the clamping plate 8. After the locking block 12 disengages from the clamping plate 8, the two clamping plates 8 automatically hold the parts to be welded under the action of the spring 10.

[0056] After the two clamping plates 8 hold the parts to be welded, the second cylinder 27 is started to drive the second sliding frame 25 to reset. After the second sliding frame 25 is reset, the motor 19 is started to drive the turntable 31 to rotate again.

[0057] See Figure 1 , Figure 10 As a further embodiment of the present invention, a helium cylinder 29 is fixedly connected to the upper part of the cover 2, and the helium cylinder 29 is connected to the cover 2 through a solenoid valve; a helium concentration sensor 30 is fixedly connected to the inner wall of the cover 2 at the top and bottom positions.

[0058] During operation, the helium inside the enclosure 2 is in direct contact with the air, causing it to continuously diffuse into the air. When the helium concentration sensor 30 at the top of the enclosure 2 detects a low helium concentration, the solenoid valve automatically opens, and the helium cylinder 29 begins to replenish helium into the enclosure 2 to increase the helium concentration. When the helium concentration sensor 30 at the bottom of the enclosure 2 detects the preset helium concentration, it indicates that the helium concentration inside the enclosure 2 has reached the target, and the solenoid valve automatically closes.

Claims

1. A semiconductor welding gas shielding protection device, comprising a base plate (1), characterized in that: A cover (2) is fixedly connected to the base plate (1). Two rotating disks (31) arranged parallel to each other are rotatably connected inside the cover (2), and the cover (2) is filled with helium. The turntable (31) is provided with a plurality of clamping mechanisms arranged in a circular array, the clamping mechanisms being used to clamp the semiconductor welding components; A welding head (3) is installed on the upper side of the inner side of the cover (2); The cover (2) is provided with a driving mechanism, which is used to drive the semiconductor components held by the clamping mechanism on the two turntables (31) to fit together when they rotate to the upper position of the turntables (31); A fixing frame (4) is fixedly connected to the base plate (1) at the position below the turntable (31). The fixing frame (4) is provided with a material ejection component and a material feeding component on the left and right sides respectively. The material ejection component is used to remove the two parts that have been welded from the clamping mechanism. The material feeding component fixes the two parts to be welded to the clamping mechanisms of the two turntables (31) respectively.

2. The semiconductor welding gas shielding protection device according to claim 1, characterized in that: The clamping mechanism includes a slide rod (5) that is slidably connected to the turntable (31). A fixed seat (6) is fixedly connected to one end of the slide rod (5) near the inner wall of the cover (2), and a spring (7) is sleeved on the slide rod (5). Clamping plates (8) are symmetrically arranged on both sides of the fixed seat (6). A fastening component for keeping the two clamping plates (8) clamped is provided on the fixed seat (6). An adjustment component is provided on the fixed seat (6) for adjusting the clamping width of the two clamping plates (8).

3. The semiconductor welding gas shielding protection device according to claim 2, characterized in that: The fastening assembly includes a slide rod 2 (9) that is slidably connected to the clamping plate (8). The slide rod 2 (9) is fixedly connected to the fixing seat (6), and a spring 2 (10) is sleeved on the slide rod 2 (9). One end of the spring 2 (10) is fixedly connected to the clamping plate (8), and the other end is fixedly connected to the slide rod 2 (9).

4. The semiconductor welding gas shielding protection device according to claim 3, characterized in that: A metal elastic sheet (11) is fixedly connected to the side of the slide bar (9) away from the clamping plate (8), and a triangular-shaped locking block (12) is fixedly connected to the end of the elastic sheet (11) near the clamping plate (8); a push rod (13) and a push rod (14) are fixedly connected to the clamping plate (8) and the elastic sheet (11) respectively.

5. The semiconductor welding gas shielding protection device according to claim 2, characterized in that: The adjustable distance assembly includes a limiting frame (15) fixedly connected to a fixed base (6). Slider 1 (16) is symmetrically slidably connected to both sides of the limiting frame (15). Blocks (17) are fixedly connected to slider 1 (16). The two blocks (17) are respectively attached to one end of the inner side of the two clamps (8). Fastening screws (18) are threadedly connected to slider 1 (16). The fastening screws (18) are attached to the limiting frame (15).

6. The semiconductor welding gas shielding protection device according to claim 1, characterized in that: The driving mechanism includes a motor (19) fixed on the cover (2), and a drive shaft (20) is fixedly connected to the rear end of the output shaft of the motor (19). The drive shaft (20) is also fixedly connected to two turntables (31) on the same axis. Fixing rings (21) are symmetrically fixedly connected to the inner walls on the front and rear sides of the cover (2). The upper part of the fixing ring (21) is a protrusion towards the other fixing ring (21).

7. The semiconductor welding gas shielding protection device according to claim 4, characterized in that: The unloading assembly includes a sliding frame (22) that is slidably connected to the fixed frame (4). A cylinder (23) is provided between the sliding frame (22) and the base plate (1). The cylinder (23) is fixedly connected to the base plate (1) and the telescopic end of the cylinder (23) is fixedly connected to the sliding frame (22). Two push rods (24) are symmetrically fixedly connected on the front and rear sides of the sliding frame (22). The two push rods (24) are inclined and gradually approach each other along the extension direction of the cylinder (23). The distance between the roots of the two push rods (24) is greater than the distance between the two push rods (13).

8. The semiconductor welding gas shielding protection device according to claim 4, characterized in that: The feeding assembly includes a sliding frame two (25) that is slidably connected to the fixed frame (4). Two push rods four (26) are symmetrically fixedly connected on the front and rear sides of the sliding frame two (25). The distance between the two push rods four (26) is exactly equal to the distance between the two push rods two (14). A cylinder two (27) is provided between the sliding frame two (25) and the base plate (1). The cylinder two (27) is fixedly connected to the base plate (1) and the telescopic end of the cylinder two (27) is fixedly connected to the sliding frame two (25). A feeding plate (28) is provided between the two push rods four (26) on the front and rear sides. The feeding plate (28) is fixedly connected to the fixed frame (4).

9. The semiconductor welding gas shielding protection device according to claim 1, characterized in that: A helium cylinder (29) is fixedly connected to the upper part of the cover (2), and the helium cylinder (29) is connected to the cover (2) through a solenoid valve; a helium concentration sensor (30) is fixedly connected to the inner wall of the cover (2) at the top and bottom positions.

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