Polishing device and polishing method for silicon carbide suction cup machining

Abstract

The invention relates to the technical field of grinding, and discloses a grinding device and method for silicon carbide sucker machining, the device comprises a box body, a sucker body and a box door hinged to one side of the front face of the box body, a placing plate is fixedly connected to the lower portion of the interior of the box body, and a collecting box is slidably mounted on the inner bottom face of the box body; the grinding device comprises a box body and further comprises a grinding assembly arranged in the middle of the inner top face of the box body, spraying assemblies are arranged on the two sides of the inner top face of the box body, the grinding assembly comprises a servo motor fixedly installed in the middle of the top of the box body, the output end of the servo motor is fixedly connected with a rotating shaft, and a lead screw is fixedly installed at the bottom of the rotating shaft; the outer side of the lead screw is in threaded connection with an extrusion sleeve, one side of the top of the box body is rotationally connected with a side shaft, and the problems that according to existing grinding and polishing equipment, the equipment usually needs to be shut down to replace different grinding tools to achieve respective machining of rough grinding and fine grinding, and the grinding and polishing efficiency of the silicon carbide suction cup is affected are solved.

Description

Technical Field

[0001] This invention relates to the field of transformer technology, specifically to a grinding device and grinding method for processing silicon carbide chucks. Background Technology

[0002] In wafer manufacturing equipment, vacuum chucks are used to firmly fix the wafers to ensure that the wafers do not slip during processing. After the blank is manufactured, the vacuum chucks need to be ground, polished and cleaned.

[0003] For example, a polishing and grinding device for producing silicon carbide seals, as disclosed in announcement number CN112318299A, includes a base. A first support plate is fixedly installed on the front side of the top of the base, and the rear side of the first support plate is fixedly connected to a fan unit. A clamping unit is fixedly installed at the center of the top of the base. A water flow polishing unit is provided on one side of the clamping unit, and a movable grinding unit is provided on the rear side of the clamping unit. The rear side of the movable grinding unit is fixedly connected to a second support plate, and the bottom end of the second support plate is fixedly connected to the base. In the water flow polishing unit, a water pump box sprays high-pressure water through a water flow polishing nozzle to perform water flow polishing on the silicon carbide seals, which is less likely to damage the polished surface. At the same time, a motor drives a second gear to rotate, which in turn drives a second external gear ring to rotate, thereby making the water flow polishing nozzle rotate and enhancing the polishing effect.

[0004] However, existing technologies for polishing silicon carbide materials require a process from coarse to fine grinding. First, coarse-grit grinding wheels are used to remove larger protrusions and uneven areas on the surface. Then, fine-grit grinding wheels are gradually used to achieve a smoother surface. Existing polishing equipment usually requires stopping the machine to change different abrasive tools to achieve separate coarse and fine grinding, which is inconvenient and affects the processing efficiency of silicon carbide chuck polishing.

[0005] Therefore, a grinding device and grinding method for processing silicon carbide chucks are proposed to solve the problems mentioned above. Summary of the Invention

[0006] The purpose of this invention is to provide a grinding device and grinding method for processing silicon carbide chucks, so as to solve the problem that existing grinding and polishing equipment usually requires stopping the machine to change different abrasive tools in order to achieve separate processing of coarse grinding and fine grinding, which affects the grinding and polishing efficiency of silicon carbide chucks.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a grinding device for processing silicon carbide suction cups, comprising a box, a suction cup body and a door hinged to one side of the front of the box, a placement plate fixedly connected to the lower interior of the box, and a collection box slidably installed on the inner bottom surface of the box; Also includes: A grinding assembly is provided in the middle of the inner top surface of the box, and spraying assemblies are provided on both sides of the inner top surface of the box. The grinding assembly includes a servo motor fixedly installed in the middle of the top of the box. A rotating shaft is fixedly connected to the output end of the servo motor. A lead screw is fixedly installed at the bottom of the rotating shaft. A compression sleeve is threaded to the outer side of the lead screw. A side shaft is rotatably connected to the top side of the housing. A belt drive is fixedly installed between the side shaft and the rotating shaft. A side gear is fixedly connected to the bottom of the side shaft. An internal gear ring is meshed with the outer side of the side gear. Mounting covers are symmetrically fixedly installed at the bottom of the internal gear ring. A push block is slidably mounted laterally inside the mounting cover, a vertical rod is slidably mounted vertically at the bottom of the mounting cover, a contact wedge is fixedly connected to the top of the vertical rod, and a grinding head is mounted at the bottom of the vertical rod.

[0008] Preferably, the servo motor is fixedly installed to the housing via a mounting plate, the rotating shaft is rotatably connected to the housing, a main gear is fixedly connected to the bottom of the rotating shaft, a gear ring is meshed with the outer side of the main gear, the gear ring is rotatably connected to the inner top surface of the housing, the bottom of the gear ring is fixedly connected to a lead screw, a guide rod is fixedly connected to the outside of the extrusion sleeve, the guide rod is slidably connected to the top of the housing, and extrusion wedges are symmetrically fixedly connected to the outside of the extrusion sleeve.

[0009] By adopting the above technical solution, the drive motor drives the grinding head to rotate, the servo motor drives the rotating shaft and the main gear to rotate, the main gear drives the gear ring to rotate, the gear ring drives the lead screw to rotate, the guide rod slides up and down to limit the extrusion sleeve, the lead screw rotates to make the extrusion sleeve descend, and at the same time the rotating shaft drives the side shaft to rotate through the belt drive, so that the grinding head rotates on its own axis and revolves around the sun.

[0010] Preferably, the rotating shaft drives the side shaft to rotate via a belt drive unit, the inner top surface of the housing is symmetrically and fixedly connected to a limit rod, the internal gear ring is rotatably connected to the limit rod, the inner wall of the mounting cover is symmetrically provided with inner grooves, and the outer two sides of the push block are symmetrically and fixedly connected with side blocks.

[0011] By adopting the above technical solution, the side shaft drives the side gear to rotate, the side gear drives the internal gear ring to rotate, the limiting rod is used to assist the stable rotation of the internal gear ring, and the internal gear ring drives the mounting cover to rotate.

[0012] Preferably, the side block is slidably connected to the inner groove, a spring is fixedly connected to one side of the inner groove, the side block is fixedly connected to the spring, a magnetic block is fixedly installed on the other side of the inner groove, the magnetic block is magnetically connected to the side block, and the inclined surface direction of the left contact inclined block is opposite to that of the right contact inclined block.

[0013] By adopting the above technical solution, the extrusion sleeve descends and extrudes the push blocks on both sides. The push blocks are extruded and drive the side blocks to move. The side blocks slide inside the inner groove and separate from the magnetic block. The side blocks will compress the spring one, and the push blocks move and extrude the contact inclined block.

[0014] Preferably, a second spring is fixedly connected to the bottom of the contact inclined block, the bottom end of the second spring is fixedly connected to the inner bottom surface of the mounting cover, there are no fewer than two second springs, a U-shaped rod is fixedly connected to one side of the top of the contact inclined block, and an inclined groove is opened on the top of the push block.

[0015] By adopting the above technical solution, the right contact inclined block rises and the left contact inclined block falls. The rise and fall of the contact inclined block will act on the second spring. The movement of the contact inclined block will drive the U-shaped rod to move inside the inclined groove, so that the left contact inclined block will only drive the left U-shaped rod to fall, and the right contact inclined block will only drive the U-shaped rod to rise.

[0016] Preferably, the inner bottom surface of the inclined groove is inclined, the U-shaped rod abuts against the inclined surface of the inclined groove, the bottom of the vertical rod is fixedly connected to a lower plate, the lower plate is located below the outer side of the mounting cover, the inner side of the lower plate is fixedly installed with a drive motor, and the output end of the drive motor is fixedly connected to the grinding head.

[0017] By adopting the above technical solution, the grinding head on the right side grinds first, and the grinding head on the left side grinds later. The grinding head on the right side uses a coarse grinding head, and the grinding head on the left side uses a fine grinding head. The squeezing inclined block limits and blocks the push block, maintaining the stable pressing and grinding of the left grinding head.

[0018] Preferably, the spray assembly includes two connecting pipes symmetrically fixedly installed on the top of the housing, the bottom of the two connecting pipes being rotatably mounted with the same annular cylinder, the bottom of the annular cylinder being symmetrically fixedly mounted with spray pipes, the inner side of the annular cylinder being fixedly connected with a connecting block, and the bottom of the internal gear ring being fixedly connected with a push rod, the push rod abutting against the connecting block.

[0019] By adopting the above technical solution, the external coolant is input through the connecting pipe and flows into the annular cylinder, and then sprayed out by multiple spray pipes. At the same time as the internal gear ring rotates, the internal gear ring will also drive the push rod to rotate. The push rod drives the connecting block to rotate, and the connecting block drives the annular cylinder and the spray pipes to rotate, which facilitates the rotation and spraying of the spray pipes.

[0020] Preferably, a filter screen is fixedly installed inside the collection box, and a fixing plate is symmetrically fixedly installed on the top of the placement plate. A screw is threadedly connected inside the fixing plate, and a pressure block is rotatably connected to one end of the screw. The pressure block fits into the negative pressure suction cup. Circular holes are evenly opened on the top of the placement plate.

[0021] By adopting the above technical solution, the suction cup body is placed on top of the negative pressure suction cup part. Rotating the screws on both sides causes the screws to move the pressure blocks, pressing the two pressure blocks against the suction cup body. Then, the negative pressure suction cup part is activated to hold the suction cup body in place, thus fixing the suction cup body. Liquid and debris flow into the collection box through the round hole.

[0022] A grinding method for a grinding device used in the processing of silicon carbide chucks includes the following steps: Step 1: First, fix the suction cup body. The operator places the suction cup body on top of the negative pressure suction cup part, rotates the screws on both sides, and the two pressure blocks press against the suction cup body. The negative pressure suction cup part is then activated to suction the suction cup body, thus completing the fixation of the suction cup body. Step 2: The operator places the suction cup body on top of the negative pressure suction cup unit, rotates the screws on both sides, the screws drive the pressure blocks to move, press the two pressure blocks against the suction cup body, and then starts the negative pressure suction cup unit to suck up the suction cup body, thus completing the fixation of the suction cup body. The external coolant is input through the connecting pipe and flows into the annular cylinder, and then sprayed out by multiple spray pipes. Step 3: During polishing, start the servo motor and the drive motor of the polishing head. The drive motor drives the polishing head to rotate, the servo motor drives the rotating shaft and the main gear to rotate, the main gear drives the gear ring to rotate, the gear ring drives the lead screw to rotate, and the rotation of the lead screw causes the extrusion sleeve to descend, so that the right polishing head polishes first, and the left polishing head polishes later. The right polishing head uses a coarse polishing head, and the left polishing head uses a fine polishing head, until the extrusion sleeve is pressed tightly against the bottom of the lead screw, and stop the rotation of the servo motor to complete one polishing cycle; Step 4: While the suction cup body is being polished, the polished surface of the suction cup body is sprayed with water to cool and wash away debris. Liquid and debris flow into the collection box through the round hole and are filtered by the filter screen to achieve separation and collection of debris and liquid.

[0023] Compared with the prior art, the beneficial effects of the present invention are: By setting up the grinding components, the operator starts the servo motor and the grinding head drive motor. The drive motor drives the grinding head to rotate, the servo motor drives the rotating shaft and main gear to rotate, the main gear drives the gear ring to rotate, the gear ring drives the lead screw to rotate, and the guide rod slides up and down to limit the extrusion sleeve. The rotation of the lead screw causes the extrusion sleeve to descend. At the same time, the rotating shaft drives the side shaft to rotate through the belt drive, the side shaft drives the side gear to rotate, and the side gear drives the internal gear ring to rotate. The limit rod is used to assist the stable rotation of the internal gear ring. The internal gear ring drives the mounting cover to rotate, so that the grinding head rotates on its own axis and revolves around the center, which facilitates the overall grinding of the top surface of the suction cup body. The descent of the extrusion sleeve will squeeze the push blocks on both sides. The push blocks are squeezed and drive the side blocks to move. The side blocks slide inside the inner groove and separate from the magnetic block. The side blocks will compress the spring. The push blocks move and squeeze the contact inclined blocks. The inclined surfaces of the two contact inclined blocks are in opposite directions, so the right contact inclined block rises and the left contact inclined block descends. The rising and falling of the contact inclined blocks will... The action of the second spring causes the contact inclined block to move, driving the U-shaped rod to move inside the inclined groove. The left contact inclined block only drives the left U-shaped rod to descend, while the right contact inclined block only drives the U-shaped rod to rise. There is a certain time between the extrusion sleeve descending to the position of the push block, allowing the right grinding head to grind first, followed by the left grinding head. The right grinding head uses a coarse grinding head, while the left grinding head uses a fine grinding head. The extrusion inclined block limits and blocks the push block, maintaining the stable pressing and grinding of the left grinding head until the extrusion sleeve is pressed against the bottom of the screw, stopping the rotation of the servo motor and completing one cycle of grinding. This achieves the initial height limit of the extrusion sleeve on the coarse grinding head and the height limit of the extrusion inclined block on the fine grinding head at the lowest point. It also ensures that when the extrusion sleeve descends, the coarse grinding head can only rise and the fine grinding head can only descend. This solves the problem that existing grinding and polishing equipment usually requires stopping the machine to change different abrasive tools to achieve separate processing of coarse and fine grinding, which affects the grinding and polishing efficiency of silicon carbide chucks. By setting up the spray assembly, the operator places the suction cup body on top of the negative pressure suction cup unit, rotates the screws on both sides, and the screws drive the pressure blocks to move, pressing the two pressure blocks against the suction cup body. Then, the negative pressure suction cup unit is activated to suction the suction cup body, thus fixing the suction cup body. External coolant is input through the connecting pipe and flows into the annular cylinder, and then sprayed out by multiple spray pipes. At the same time as the internal gear ring rotates, the internal gear ring also drives the push rod to rotate, and the push rod drives the connecting block to rotate. The connecting block drives the annular cylinder and the spray pipes to rotate, which facilitates the rotation and spraying of the spray pipes. While grinding the suction cup body, it is convenient to spray and cool the grinding surface of the suction cup body and wash away the debris. The liquid and debris flow into the collection box through the round hole and are filtered by the filter screen to achieve separation and collection of debris and liquid. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the collection box structure of the present invention; Figure 2This is a schematic diagram of the overall three-dimensional structure of the present invention; Figure 3 This is a schematic cross-sectional view of the box structure of the present invention; Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A in the middle; Figure 5 For the present invention Figure 3 Enlarged structural diagram at point B; Figure 6 This is a schematic cross-sectional view of the internal gear ring of the present invention; Figure 7 For the present invention Figure 6 Enlarged structural diagram at point C; Figure 8 This is a schematic cross-sectional view of the mounting cover structure of the present invention; Figure 9 For the present invention Figure 8 Enlarged structural diagram at point D; Figure 10 This is a schematic diagram of the grinding head structure of the present invention; Figure 11 This is a schematic diagram of the grinding head lifting mechanism of the present invention; Figure 12 This is a schematic diagram of the placement plate structure of the present invention; Figure 13 This is a schematic diagram of the connecting pipe structure of the present invention; Figure 14 This is a schematic diagram of the connecting block structure of the present invention.

[0025] In the diagram: 1. Box body; 2. Box door; 3. Placement plate; 4. Collection box; 5. Filter screen; 6. Suction cup body; 7. Grinding assembly; 71. Servo motor; 72. Rotating shaft; 73. Main gear; 74. Gear ring; 75. Lead screw; 76. Extrusion sleeve; 77. Guide rod; 78. Extrusion wedge; 79. Belt drive; 710. Side shaft; 711. Side gear; 712. Limiting rod; 713. Internal gear ring; 714. Mounting cover; 715. Inner groove; 71 6. Push block; 717. Side block; 718. Spring 1; 719. Magnetic block; 720. Vertical rod; 721. Contact inclined block; 722. Spring 2; 723. U-shaped rod; 724. Inclined groove; 725. Lower plate; 726. Grinding head; 8. Spray assembly; 81. Connecting pipe; 82. Annular cylinder; 83. Spray pipe; 84. Connecting block; 85. Push rod; 9. Negative pressure suction cup part; 10. Fixing plate; 11. Screw; 12. Pressure block; 13. Round hole. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Please see Figure 1 - Figure 3 The present invention provides a technical solution: a grinding device for processing silicon carbide suction cups, including a box 1, a suction cup body 6 and a door 2 hinged to one side of the front of the box 1, a placement plate 3 fixedly connected to the lower interior of the box 1, and a collection box 4 slidably installed on the inner bottom surface of the box 1.

[0028] A grinding assembly 7 is provided in the middle of the inner top surface of the housing 1. The grinding assembly 7 includes a servo motor 71 fixedly installed in the middle of the top of the housing 1. A rotating shaft 72 is fixedly connected to the output end of the servo motor 71. A lead screw 75 is fixedly installed at the bottom of the rotating shaft 72. A compression sleeve 76 is threadedly connected to the outer side of the lead screw 75.

[0029] The servo motor 71 is fixedly installed to the housing 1 via a mounting plate. The rotating shaft 72 is rotatably connected to the housing 1. The bottom of the rotating shaft 72 is fixedly connected to the main gear 73. The outer side of the main gear 73 is meshed with the gear ring part 74. The gear ring part 74 is rotatably connected to the inner top surface of the housing 1. The bottom of the gear ring part 74 is fixedly connected to the lead screw 75. The outer side of the extrusion sleeve 76 is fixedly connected to the guide rod 77. The guide rod 77 is slidably connected to the top of the housing 1. The outer side of the extrusion sleeve 76 is symmetrically fixedly connected to the extrusion wedge 78.

[0030] A side shaft 710 is rotatably connected to the top side of the housing 1. A belt drive 79 is fixedly installed between the side shaft 710 and the rotating shaft 72. A side gear 711 is fixedly connected to the bottom of the side shaft 710. An internal gear ring 713 is meshed with the outer side of the side gear 711. A mounting cover 714 is symmetrically fixedly installed at the bottom of the internal gear ring 713.

[0031] The rotating shaft 72 drives the side shaft 710 to rotate through the belt drive unit 79. The inner top surface of the housing 1 is symmetrically and fixedly connected to the limit rod 712. The internal gear ring 713 is rotatably connected to the limit rod 712. The inner wall of the mounting cover 714 is symmetrically provided with inner grooves 715. The outer sides of the push block 716 are symmetrically and fixedly connected with side blocks 717.

[0032] Inside the mounting cover 714, a push block 716 is horizontally slidably installed. A vertical rod 720 is vertically slidably installed at the bottom of the mounting cover 714. A contact inclined block 721 is fixedly connected to the top of the vertical rod 720. A grinding head 726 is installed at the bottom of the vertical rod 720.

[0033] The side block 717 is slidably connected to the inner groove 715. A spring 718 is fixedly connected to one side of the inner groove 715. The side block 717 is fixedly connected to the spring 718. A magnetic block 719 is fixedly installed on the other side of the inner groove 715. The magnetic block 719 is magnetically connected to the side block 717. The inclined surfaces of the left contact inclined block 721 and the right contact inclined block 721 are in opposite directions.

[0034] A second spring 722 is fixedly connected to the bottom of the contact inclined block 721. The bottom end of the second spring 722 is fixedly connected to the inner bottom surface of the mounting cover 714. There are at least two second springs 722. A U-shaped rod 723 is fixedly connected to one side of the top of the contact inclined block 721. A groove 724 is opened on the top of the push block 716.

[0035] The inner bottom surface of the inclined groove 724 is inclined, the U-shaped rod 723 abuts against the inclined surface of the inclined groove 724, the bottom of the vertical rod 720 is fixedly connected to the lower plate 725, the lower plate 725 is located below the outer side of the mounting cover 714, the inner side of the lower plate 725 is fixedly installed with a drive motor, and the output end of the drive motor is fixedly connected to the grinding head 726.

[0036] Example 1: As Figure 4 - Figure 11 As shown, the operator starts the servo motor 71 and the drive motor of the grinding head 726. The drive motor drives the grinding head 726 to rotate, the servo motor 71 drives the rotating shaft 72 and the main gear 73 to rotate, the main gear 73 drives the gear ring part 74 to rotate, the gear ring part 74 drives the lead screw 75 to rotate, and the guide rod 77 slides up and down to limit the extrusion sleeve 76. The rotation of the lead screw 75 causes the extrusion sleeve 76 to descend. At the same time, the rotating shaft 72 drives the side shaft 710 to rotate through the belt drive part 79. The side shaft 710 drives the side gear 711 to rotate, and the side gear 711 drives the internal gear ring 713 to rotate. The limiting rod 712 is used to assist the stable rotation of the internal gear ring 713. The internal gear ring 713 drives the mounting cover 714 to rotate, so that the grinding head 726 rotates on its own axis and revolves around the center, which facilitates the overall grinding treatment of the top surface of the suction cup body 6.

[0037] Furthermore, the compression sleeve 76 descends and compresses the push blocks 716 on both sides. The push blocks 716 are compressed, causing the side blocks 717 to move. The side blocks 717 slide inside the inner groove 715 and separate from the magnetic block 719. The side blocks 717 compress the first spring 718. The push blocks 716 move and compress the contact inclined blocks 721. The inclined surfaces of the two contact inclined blocks 721 are in opposite directions, causing the right contact inclined block 721 to rise and the left contact inclined block 721 to fall. The rise and fall of the contact inclined blocks 721 will act on the second spring 722. The movement of the contact inclined blocks 721 will cause the U-shaped rod 723 to move inside the inclined groove 724.

[0038] The left contact wedge 721 only drives the left U-shaped rod 723 to descend, and the right contact wedge 721 only drives the U-shaped rod 723 to rise. There is a certain time between the descent of the extrusion sleeve 76 to the position of the push block 716, so that the right grinding head 726 grinds first and the left grinding head 726 grinds later. The right grinding head 726 uses a coarse grinding head and the left grinding head 726 uses a fine grinding head. The extrusion wedge 78 limits and blocks the push block 716, keeping the left grinding head 726 stably pressed and ground until the extrusion sleeve 76 is pressed against the bottom of the lead screw 75, stopping the rotation of the servo motor 71 and completing one cycle of grinding. This achieves the initial height limit of the extrusion sleeve 76 on the coarse grinding head, and the height limit of the extrusion wedge 78 on the fine grinding head when it is at the lowest point. It also ensures that when the extrusion sleeve 76 descends, the coarse grinding head can only rise and the fine grinding head can only descend.

[0039] Spraying components 8 are provided on both sides of the inner top surface of the box 1. The spraying components 8 include two connecting pipes 81 symmetrically fixedly installed on the top of the box 1. The bottom of the two connecting pipes 81 is rotatably installed with the same annular cylinder 82. Spraying pipes 83 are symmetrically fixedly installed at the bottom of the annular cylinder 82. A connecting block 84 is fixedly connected to the inner side of the annular cylinder 82. A push rod 85 is fixedly connected to the bottom of the internal gear ring 713. The push rod 85 abuts against the connecting block 84.

[0040] A filter screen 5 is fixedly installed inside the collection box 4. A fixing plate 10 is symmetrically fixedly installed on the top of the placement plate 3. A screw 11 is threadedly connected inside the fixing plate 10. A pressure block 12 is rotatably connected to one end of the screw 11. The pressure block 12 fits into the negative pressure suction cup part 9. Circular holes 13 are evenly opened on the top of the placement plate 3.

[0041] Example 2: Figure 12 - Figure 14 As shown, the operator places the suction cup body 6 on top of the negative pressure suction cup part 9, rotates the screws 11 on both sides, and the screws 11 drive the pressure blocks 12 to move, pressing the two pressure blocks 12 against the suction cup body 6. Then, the negative pressure suction cup part 9 is activated to suction the suction cup body 6, thus completing the fixation of the suction cup body 6. The external coolant is input through the connecting pipe 81 and flows into the annular cylinder 82, and then sprayed out by multiple spray pipes 83.

[0042] Furthermore, while the internal gear ring 713 rotates, it also drives the push rod 85 to rotate. The push rod 85 drives the connecting block 84 to rotate, and the connecting block 84 drives the annular cylinder 82 and the spray pipe 83 to rotate, which facilitates the rotation and spraying of the spray pipe 83. While polishing the suction cup body 6, it is convenient to spray and cool the polished surface of the suction cup body 6 and wash away the debris. The liquid and debris flow into the collection box 4 through the round hole 13 and are filtered by the filter screen 5 to achieve the separation and collection of debris and liquid.

[0043] Working principle: When using this device, firstly, as... Figure 1 - Figure 14 As shown, the operator places the suction cup body 6 on top of the negative pressure suction cup part 9, with the pressure blocks 12 on both sides pressing against the suction cup body 6. Then, the negative pressure suction cup part 9 is activated to hold the suction cup body 6 in place. Next, the servo motor 71 and the drive motor of the grinding head 726 are activated. The servo motor 71 drives the rotating shaft 72 and the main gear 73 to rotate. The main gear 73 drives the gear ring part 74 to rotate. The gear ring part 74 drives the lead screw 75 to rotate. The rotation of the lead screw 75 causes the extrusion sleeve 76 to descend. At the same time, the rotating shaft 72 drives the side shaft 710 to rotate through the belt drive part 79. The side shaft 710 drives the side gear 711 to rotate, causing the grinding head 726 to rotate on its own axis and revolve around the central axis, facilitating the overall grinding of the top surface of the suction cup body 6. The descent of the extrusion sleeve 76 will press the push blocks 716 on both sides. The push blocks 716 are pressed, causing the side blocks 717 to move. The right contact inclined block 721 rises, and the left contact inclined block 721 descends. The rising and falling of the contact inclined blocks 721 will act on the spring. Spring 722, contacting the inclined block 721, moves the U-shaped rod 723 inside the inclined groove 724, and the extrusion sleeve 76 descends to the position of the push block 716 for a certain period of time, so that the right grinding head 726 grinds first, and the left grinding head 726 grinds later. The right grinding head 726 uses a coarse grinding head, and the left grinding head 726 uses a fine grinding head. The extrusion inclined block 78 limits and blocks the push block 716, keeping the left grinding head 726 stable and pressing and grinding until the extrusion sleeve 76 is pressed tightly at the bottom of the lead screw 75, stopping the rotation of the servo motor 71, completing one cycle of grinding. The external coolant is input through the connecting pipe 81 and flows into the annular cylinder 82, and then sprayed out by multiple spray pipes 83. The internal gear ring 713 also drives the push rod 85 to rotate, which facilitates the rotation and spraying of the spray pipes 83. The liquid and debris flow into the collection box 4 through the round hole 13 and are filtered by the filter screen 5 to achieve the separation and collection of debris and liquid.

[0044] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0045] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A grinding device for processing silicon carbide suction cups, comprising a box (1), a suction cup body (6) and a door (2) hinged to one side of the front of the box (1), wherein a placement plate (3) is fixedly connected to the lower interior of the box (1), and a collection box (4) is slidably installed on the inner bottom surface of the box (1). Its features are, Also includes: A grinding assembly (7) is provided in the middle of the inner top surface of the box (1), and spraying assemblies (8) are provided on both sides of the inner top surface of the box (1). The grinding assembly (7) includes a servo motor (71) fixedly installed in the middle of the top of the box (1). A rotating shaft (72) is fixedly connected to the output end of the servo motor (71). A lead screw (75) is fixedly installed at the bottom of the rotating shaft (72). A compression sleeve (76) is threadedly connected to the outer side of the lead screw (75). A side shaft (710) is rotatably connected to the top side of the housing (1). A belt drive (79) is fixedly installed between the side shaft (710) and the rotating shaft (72). A side gear (711) is fixedly connected to the bottom of the side shaft (710). An internal gear ring (713) is meshed with the outer side of the side gear (711). A mounting cover (714) is symmetrically fixedly installed on the bottom of the internal gear ring (713). A push block (716) is slidably mounted inside the mounting cover (714), a vertical rod (720) is slidably mounted on the bottom of the mounting cover (714), a contact inclined block (721) is fixedly connected to the top of the vertical rod (720), and a grinding head (726) is mounted on the bottom of the vertical rod (720).

2. The grinding device for processing silicon carbide chucks according to claim 1, characterized in that: The servo motor (71) is fixedly installed on the housing (1) via a mounting plate. The rotating shaft (72) is rotatably connected to the housing (1). A main gear (73) is fixedly connected to the bottom of the rotating shaft (72). A gear ring (74) is meshed with the outer side of the main gear (73). The gear ring (74) is rotatably connected to the inner top surface of the housing (1). The bottom of the gear ring (74) is fixedly connected to the lead screw (75). A guide rod (77) is fixedly connected to the outside of the extrusion sleeve (76). The guide rod (77) is slidably connected to the top of the housing (1). Extrusion wedges (78) are symmetrically fixedly connected to the outside of the extrusion sleeve (76).

3. The grinding device for processing silicon carbide chucks according to claim 2, characterized in that: The rotating shaft (72) drives the side shaft (710) to rotate through the belt drive (79). The inner top surface of the housing (1) is symmetrically and fixedly connected to the limiting rod (712). The internal gear ring (713) is rotatably connected to the limiting rod (712). The inner wall of the mounting cover (714) is symmetrically provided with inner grooves (715). The outer sides of the push block (716) are symmetrically and fixedly connected with side blocks (717).

4. The grinding device for processing silicon carbide chucks according to claim 3, characterized in that: The side block (717) is slidably connected to the inner groove (715). A spring (718) is fixedly connected to one side of the inner groove (715). The side block (717) is fixedly connected to the spring (718). A magnetic block (719) is fixedly installed on the other side of the inner groove (715). The magnetic block (719) is magnetically connected to the side block (717). The inclined planes of the left contact inclined block (721) and the right contact inclined block (721) are opposite in direction.

5. The grinding device for processing silicon carbide chucks according to claim 4, characterized in that: The bottom of the contact inclined block (721) is fixedly connected to a second spring (722), the bottom end of the second spring (722) is fixedly connected to the inner bottom surface of the mounting cover (714), there are at least two second springs (722), a U-shaped rod (723) is fixedly connected to one side of the top of the contact inclined block (721), and a groove (724) is opened on the top of the push block (716).

6. The grinding device for processing silicon carbide chucks according to claim 5, characterized in that: The inner bottom surface of the inclined groove (724) is inclined, the U-shaped rod (723) abuts against the inclined surface of the inclined groove (724), the bottom of the vertical rod (720) is fixedly connected to the lower plate (725), the lower plate (725) is located below the outer side of the mounting cover (714), the inner side of the lower plate (725) is fixedly installed with a drive motor, and the output end of the drive motor is fixedly connected to the grinding head (726).

7. A grinding device for processing silicon carbide chucks according to claim 6, characterized in that: The spray assembly (8) includes two connecting pipes (81) symmetrically fixedly installed on the top of the housing (1). The bottom of the two connecting pipes (81) is rotatably installed with the same annular cylinder (82). Spray pipes (83) are symmetrically fixedly installed on the bottom of the annular cylinder (82). A connecting block (84) is fixedly connected to the inner side of the annular cylinder (82). A push rod (85) is fixedly connected to the bottom of the internal gear ring (713). The push rod (85) abuts against the connecting block (84).

8. A grinding device for processing silicon carbide chucks according to claim 7, characterized in that: The collection box (4) is fixedly installed with a filter screen (5), and a fixing plate (10) is symmetrically fixedly installed on the top of the placement plate (3). The fixing plate (10) is threadedly connected with a screw (11), and a pressure block (12) is rotatably connected to one end of the screw (11). The pressure block (12) is in contact with the negative pressure suction cup part (9), and round holes (13) are evenly opened on the top of the placement plate (3).

9. A grinding method for a grinding device used in processing silicon carbide chucks, characterized in that, The grinding device for processing silicon carbide chucks as described in claim 8 is used in the following steps: Step 1: First, fix the suction cup body (6). The operator places the suction cup body (6) on the top of the negative pressure suction cup part (9), rotates the screws (11) on both sides, and the two pressure blocks (12) press against the suction cup body (6). The negative pressure suction cup part (9) is activated to suck up the suction cup body (6) and complete the fixation of the suction cup body (6). Step 2: The operator places the suction cup body (6) on top of the negative pressure suction cup part (9), rotates the screws (11) on both sides, the screws (11) drive the pressure blocks (12) to move, press the two pressure blocks (12) against the suction cup body (6), and then starts the negative pressure suction cup part (9) to suck up the suction cup body (6), thus completing the fixation of the suction cup body (6). The external coolant is input through the connecting pipe (81) and flows into the annular cylinder (82), and then sprayed out by multiple spray pipes (83). Step 3: When polishing, start the servo motor (71) and the drive motor of the polishing head (726). The drive motor drives the polishing head (726) to rotate. The servo motor (71) drives the rotating shaft (72) and the main gear (73) to rotate. The main gear (73) drives the gear ring (74) to rotate. The gear ring (74) drives the lead screw (75) to rotate. The rotation of the lead screw (75) causes the extrusion sleeve (76) to drop, so that the right polishing head (726) polishes first and the left polishing head (726) polishes later. The right polishing head (726) uses a coarse polishing head and the left polishing head (726) uses a fine polishing head until the extrusion sleeve (76) is pressed against the bottom of the lead screw (75). Stop the rotation of the servo motor (71) to complete one cycle of polishing. Step 4: While polishing the suction cup body (6), the polished surface of the suction cup body (6) is sprayed with water to cool and wash away debris. Liquid and debris flow into the collection box (4) through the round hole (13) and are filtered by the filter screen (5) to achieve separation and collection of debris and liquid.

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