Semiconductor silicon crystal bar transferring and transporting device

Abstract

The invention relates to the technical field of intelligent industrial robots, in particular to a semiconductor silicon crystal bar transferring and transporting device which comprises a supporting base, a first rotating structure, a height structure, a second rotating structure, an angle adjusting structure, a control structure, an adsorption structure, a clamping structure, a silicon crystal bar, a butt joint frame and a visual camera. The arrangement of the angle adjusting structure facilitates the adjustment of the angle of the silicon crystal bar, facilitates the placement of the silicon crystal bar at the corresponding position according to the actual situation, is high in operation convenience, is fixedly provided with the visual camera, facilitates the automatic capturing of the clamping position of the silicon crystal bar, improves the stability, and improves the working efficiency. An adsorption structure and a clamping structure are arranged at the bottom end of the butt joint frame, the adsorption structure is arranged to conveniently adsorb the side wall of the silicon crystal bar and position the silicon crystal bar, meanwhile, waste chips on the silicon crystal bar are conveniently cleaned, the silicon crystal bar is prevented from being scratched, and the situation that the silicon crystal bar generates circumferential rotation due to deviation of the corresponding positions of the clamping tool and the silicon crystal bar is prevented; and the clamping effect of the silicon crystal bar is improved.

Description

Technical Field

[0001] This invention relates to the field of intelligent industrial robot technology, specifically to a semiconductor silicon crystal rod transfer and transportation device. Background Technology

[0002] Existing technologies require the use of silicon ingots as raw materials in the semiconductor wafer fabrication process. Before being made into wafers, silicon ingots need to undergo multiple processing steps, and rigid-arm assisted robotic arms are required to handle the silicon ingots in each of these processing steps.

[0003] However, existing rigid-arm assisted manipulators mostly use clamping fixtures to hold silicon ingots from the sidewall. The clamping position is determined visually during the process. When there is a large deviation between the clamping fixture and the corresponding position of the silicon ingot, the silicon ingot will rotate circumferentially, affecting the clamping effect. Furthermore, when the clamping fixture is not clamped in the middle of the silicon ingot, the weight difference between the two ends of the fixture affects the stability of the entire device. For example, patent CN220807376U also proposes a rigid-arm assisted manipulator, which makes it difficult to adjust the angle of the clamped silicon ingot. During the clamping process, if there are debris between the silicon ingot and the clamping fixture, the silicon ingot is easily damaged. Therefore, a semiconductor silicon ingot transfer and transportation device is needed to solve the above problems. Summary of the Invention

[0004] To address the problems in the prior art, the present invention provides a semiconductor silicon crystal rod transfer and transport device.

[0005] The technical solution adopted by the present invention to solve its technical problem is: a semiconductor silicon crystal rod transfer and transport device, including a support base, a rotating structure one installed at the top of the support base, a height structure provided on the rotating structure one, a rotating structure two provided on the height structure, an angle adjustment structure provided at the bottom of the rotating structure two, a docking frame installed at the bottom of the angle adjustment structure, and an adsorption structure and a clamping structure provided at the bottom of the docking frame.

[0006] The adsorption structure includes a sliding vane pump. The top of the docking frame is fixed with the sliding vane pump, and the bottom of the docking frame is fixed with a connecting frame. A vision camera is fixed on the connecting frame, and adsorption fixtures are fixed at both ends of the connecting frame. The sealing ring at the bottom of the adsorption fixture is in contact with the silicon crystal rod. An air pipe is fixed on the clamping block in the clamping structure. An air port is provided on the side of the air pipe facing the silicon crystal rod. The air pipe is connected to the exhaust port of the sliding vane pump through a second pipe. The adsorption fixture is provided with an air hole, and the air inlet of the sliding vane pump is connected to the air hole through a first pipe.

[0007] Specifically, the rotating structure includes a support sleeve, the top of the support base is fixed with the support sleeve, a rotating shaft is rotatably mounted on the support sleeve, and a support frame and a limiting plate are fixed on the rotating shaft.

[0008] Specifically, a driving component is fixed on the support sleeve, an L-shaped stop is fixed on the driving component, and the driving component drives the anti-sliding block pair to clamp the limiting disc.

[0009] Specifically, the height structure includes a drive rod and a transmission rod. The drive rod and the transmission rod are rotatably mounted on the support frame via a connecting shaft. The drive rod and the transmission rod are arranged in parallel. The drive rod is rotatably connected to a second drive component. The second drive component is rotatably connected to the support frame. The end of the drive rod and the transmission rod that is away from the support frame is rotatably connected to a connecting terminal via a connecting shaft.

[0010] Specifically, the second rotating structure includes a second rotating shaft, which is rotatably mounted on the connecting terminal, and a connecting rod is fixed at the bottom end of the second rotating shaft.

[0011] Specifically, a limiting disk 2 is fixed on the rotating shaft 2, a driving component 3 is fixed on the side wall of the connecting terminal, a stop block 2 is fixed on the driving component 3, and the driving component 3 drives the anti-slip block 2 to move up and down to clamp the limiting disk 2.

[0012] Specifically, the angle adjustment structure includes a rotating seat, the bottom end of the docking rod is fixed with a rotating seat, a rotating shaft three is rotatably mounted on the rotating seat, the rotating shaft three is fixed to the connector, the bottom end of the connector is fixed with a rotating shaft four, the rotating shaft four is rotatably connected to the rotating sleeve, and the bottom end of the rotating sleeve is fixed with a docking frame.

[0013] Specifically, a gear is fixed on the rotating shaft three, a driving component four is fixed on the rotating seat, and a rack is fixed to the bottom end of the driving component four, with the rack meshing with the gear.

[0014] Specifically, a control structure is fixed on the rotating sleeve, the control structure includes a control box, the control box is fixed on the rotating sleeve, the control box is equipped with a display screen and buttons, and the control box is electrically connected to the control cabinet on one side of the support frame.

[0015] Specifically, the clamping structure includes a driving component five. Two driving components five are rotatably provided at the bottom end of the docking frame. The driving component five is rotatably connected to the guide shaft two. Linkage rods are fixed on both sides of the guide shaft two. The linkage rods are rotatably connected to the docking frame through a guide shaft one. Air pipes and connecting rods are fixed on the two linkage rods on the same side of the docking frame. Clamping blocks are fixed at the opposite ends of the two connecting rods. Rubber pads are fixed on the clamping blocks.

[0016] The beneficial effects of this invention are:

[0017] (1) The semiconductor silicon crystal rod transfer and transportation device of the present invention has a rotating structure one installed at the top of the support base, a height structure on the rotating structure one, and a rotating structure two on the height structure. The combination of rotating structure one and rotating structure two facilitates the adjustment of the distance between the silicon crystal rod and the support base in the horizontal direction. At the same time, both rotating structure one and rotating structure two have a limiting function, which improves the stability performance. The height adjustment structure facilitates the lifting of the silicon crystal rod, which improves the conveying effect of the silicon crystal rod.

[0018] (2) The semiconductor silicon crystal rod transfer and transportation device of the present invention has an angle adjustment structure at the bottom of the rotating structure two. The angle adjustment structure is convenient to adjust the angle of the silicon crystal rod, and it is convenient to place the silicon crystal rod in the corresponding position according to the actual situation. The operation is highly convenient. A vision camera is fixed on the connecting frame. The vision camera is convenient to automatically capture the clamping position of the silicon crystal rod, which improves the stability performance.

[0019] (3) The semiconductor silicon crystal rod transfer and transportation device of the present invention has an adsorption structure and a clamping structure at the bottom of the docking frame. The adsorption structure is convenient for adsorbing the side wall of the silicon crystal rod and positioning the silicon crystal rod. At the same time, it is convenient for cleaning the waste on the silicon crystal rod, preventing scratching the silicon crystal rod, and preventing the silicon crystal rod from rotating circumferentially due to the deviation between the clamping fixture and the corresponding position of the silicon crystal rod, thereby improving the clamping effect of the silicon crystal rod. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Figure 1 A schematic diagram of the overall structure of the rear part of the sub-instrument panel of a semiconductor silicon crystal rod transfer and transport device provided by the present invention;

[0022] Figure 2 This is a schematic diagram of the connection structure between the support frame and the drive rod of the present invention;

[0023] Figure 3 for Figure 2 The diagram shown is an enlarged view of the structure of part A.

[0024] Figure 4 for Figure 2 The diagram shown is an enlarged view of the structure of section B.

[0025] Figure 5 for Figure 2 The diagram shows an enlarged view of section C.

[0026] Figure 6 A schematic diagram of the connection structure between the control cabinet and the support frame of the oxygen generating component of a semiconductor silicon crystal rod transfer and transport device provided by the present invention;

[0027] Figure 7for Figure 6 The diagram shown is an enlarged view of the structure of part D.

[0028] Figure 8 This is a schematic diagram of the connection structure between the adsorption fixture and the connecting frame of the present invention;

[0029] Figure 9 This is a schematic diagram of the connection structure between the clamping block and the trachea of ​​the present invention;

[0030] Figure 10 This is a schematic diagram of the connection structure between the clamping structure and the silicon crystal rod of the present invention;

[0031] Figure 11 for Figure 10 The diagram shows an enlarged view of the E-section structure.

[0032] In the diagram: 1. Support base; 2. Rotating structure one; 201. Support sleeve; 202. Rotating shaft one; 203. Support frame; 204. Limiting plate one; 205. Stop block one; 206. Anti-slip block one; 207. Driving component one; 3. Height structure; 301. Driving component two; 302. Connecting terminal; 303. Driving rod; 304. Transmission rod; 4. Rotating structure two; 401. Connecting rod; 402. Rotating shaft two; 403. Limiting plate two; 404. Stop block two; 405. Anti-slip block two; 406. Driving component three; 5. Angle adjustment structure; 501. Rotating base; 502. Rotating shaft three; 503. Gear; 504. Connector; 505. 506. Rotating shaft 4; 507. Rotating sleeve; 508. Rack; 509. Drive component 4; 6. Control structure; 601. Control box; 602. Display screen; 603. Button; 7. Adsorption structure; 701. Vane pump; 702. Pipeline 1; 703. Connecting frame; 704. Adsorption fixture; 705. Air hole; 706. Air pipe; 707. Pipeline 2; 708. Sealing ring; 8. Clamping structure; 801. Rubber pad; 802. Clamping block; 803. Connecting rod; 804. Linkage rod; 805. Guide shaft 1; 806. Guide shaft 2; 807. Drive component 5; 9. Silicon crystal rod; 10. Docking frame; 11. Vision camera; 12. Control cabinet. Detailed Implementation

[0033] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0034] like Figure 1 , Figure 2 , Figures 5-9 and Figure 11As shown, the semiconductor silicon crystal rod transfer and transport device of the present invention includes a support base 1, a rotating structure 2 is installed at the top of the support base 1, a height structure 3 is provided on the rotating structure 2, a rotating structure 4 is provided on the height structure 3, an angle adjustment structure 5 is provided at the bottom of the rotating structure 4, a docking frame 10 is installed at the bottom of the angle adjustment structure 5, and an adsorption structure 7 and a clamping structure 8 are provided at the bottom of the docking frame 10.

[0035] The adsorption structure 7 includes a sliding vane pump 701. The top of the docking frame 10 is fixed with the sliding vane pump 701, and the bottom of the docking frame 10 is fixed with a connecting frame 703. A vision camera 11 is fixed on the connecting frame 703, and adsorption fixtures 704 are fixed at both ends of the connecting frame 703. The sealing ring 708 at the bottom of the adsorption fixture 704 is in contact with the silicon crystal rod 9. An air pipe 706 is fixed on the clamping block 802 in the clamping structure 8. An air port is provided on the side of the air pipe 706 facing the silicon crystal rod 9. The air pipe 706 is connected to the exhaust port of the sliding vane pump 701 through a second pipe 707. An air hole 705 is provided on the adsorption fixture 704, and the air inlet of the sliding vane pump 701 is connected to the air hole 705 through a first pipe 702.

[0036] The docking frame 10 drives the connecting frame 703, which in turn drives the adsorption fixture 704. The sealing ring 708 on the adsorption fixture 704 approaches the silicon crystal rod 9. At this time, the sealing ring 708 and the silicon crystal rod 9 are not in contact and there is a gap. At this time, the vane pump 701 works. The gas inside the adsorption fixture 704 enters the vane pump 701 through the air hole 705 from the first pipeline 702, and then enters the air pipe 706 from the second pipeline 707. The gas is blown onto the silicon crystal rod 9 from the air port of the air pipe 706 to prevent waste from sticking to the silicon crystal rod 9 and causing scratches, thus improving the clamping quality.

[0037] Specifically, such as Figure 1 , Figure 2 , Figure 4 and Figure 6 As shown, the rotating structure 2 includes a support sleeve 201. The top of the support base 1 is fixed with the support sleeve 201. A rotating shaft 202 is rotatably mounted on the support sleeve 201. A support frame 203 and a limiting disk 204 are fixed on the rotating shaft 202. A driving component 207 is fixed on the support sleeve 201. An L-shaped stop block 205 is fixed on the driving component 207. The driving component 207 drives the anti-sliding block 206 to clamp the limiting disk 204. The driving component 207 causes the anti-sliding block 206 to separate from the limiting disk 204, so that the rotating shaft 202 and the support sleeve 201 can rotate. After the limiting is released, the rotating sleeve 506 is driven, and the rotating shaft 202 and the support sleeve 201 rotate, thereby facilitating the quick adjustment of the horizontal position of the clamping structure 8 and facilitating the handling of silicon ingots 9 in different positions.

[0038] Specifically, such as Figure 1 , Figure 2 and Figure 6 As shown, the height structure 3 includes a drive rod 303 and a transmission rod 304. The drive rod 303 and the transmission rod 304 are rotatably mounted on the support frame 203 via a connecting shaft. The drive rod 303 and the transmission rod 304 are arranged in parallel. The drive rod 303 is rotatably connected to the second drive component 301, and the second drive component 301 is rotatably connected to the support frame 203. The ends of the drive rod 303 and the transmission rod 304 that are away from the support frame 203 are rotatably connected to the connecting terminal 302 via a connecting shaft. By changing the length of the second drive component 301, the second drive component 301 pushes the drive rod 303 to rotate, and the drive rod 303 drives the connecting terminal 302 to change its height, thereby causing the docking frame 10 to drive the adsorption structure 7 and the clamping structure 8 to change their height, thus adjusting the conveying height of the silicon crystal rod 9.

[0039] Specifically, such as Figure 1 , Figure 2 , Figure 3 and Figure 6 As shown, the rotating structure 4 includes a rotating shaft 402, which is rotatably mounted on the connecting terminal 302. A connecting rod 401 is fixed to the bottom end of the rotating shaft 402. A limiting disk 403 is fixed on the rotating shaft 402. A driving component 406 is fixed to the side wall of the connecting terminal 302. A stop block 404 is fixed on the driving component 406. The driving component 406 drives the anti-slip block 405 to move up and down to clamp the limiting disk 403. 06 drives the anti-slip block 2 405 to separate from the limit plate 2 403, allowing the rotating shaft 2 402 and the connecting terminal 302 to rotate. After the limit is released, the rotating shaft 2 402 and the connecting terminal 302 rotate, which facilitates quick adjustment of the horizontal position of the clamping structure 8 and facilitates the handling of silicon crystal rods 9 in different positions. When horizontal adjustment is not required, the control drive component 1 207 and drive component 3 406 are reset, so that the limit plate 1 204 and the limit plate 2 403 cannot rotate, realizing the self-locking function.

[0040] Specifically, such as Figure 1 , Figure 2 , Figure 5 , Figure 6 and Figure 7As shown, the angle adjustment structure 5 includes a rotating seat 501. The bottom end of the docking rod 401 is fixed to the rotating seat 501. A rotating shaft 502 is rotatably mounted on the rotating seat 501. The rotating shaft 502 is fixed to the connector 504. The bottom end of the connector 504 is fixed to a rotating shaft 505. The rotating shaft 505 is rotatably connected to a rotating sleeve 506. The bottom end of the rotating sleeve 506 is fixed to a docking frame 10. A gear 503 is fixed on the rotating shaft 502. The rotating seat 501... A driving component 4 508 is fixed on the top, and a rack 507 is fixed at the bottom end of the driving component 4 508. The rack 507 meshes with a gear 503. When it is necessary to adjust the vertical angle of the silicon crystal rod 9, the driving component 4 508 drives the rack 507 to move, the rack 507 drives the gear 503 to rotate, the gear 503 drives the rotating shaft 3 502 to rotate, and the rotating shaft 3 502 drives the connector 504 to rotate, thereby realizing the vertical angle adjustment of the silicon crystal rod 9 and facilitating the transfer and transportation of the silicon crystal rod 9 to various types of tooling.

[0041] Specifically, such as Figure 1 , Figure 2 , Figure 5 , Figure 6 and Figure 7 As shown, a control structure 6 is fixed on the rotating sleeve 506. The control structure 6 includes a control box 601. The control box 601 is fixed on the rotating sleeve 506. The control box 601 is equipped with a display screen 602 and buttons 603. The control box 601 is electrically connected to the control cabinet 12 on one side of the support frame 203. When the vision camera 11 is at the top of the silicon ingot 9 that needs to be moved, the angle of the clamping structure 8 can be adjusted slightly by rotating the rotating shaft 505 and the rotating sleeve 506. The vision camera 11 automatically collects the clamping position information of the silicon ingot 9. When the docking frame 10 moves to the corresponding position of the silicon ingot 9, the data information is displayed on the display screen 602, ensuring the standardization of the clamping position, so that the clamping structure 8 is in the middle position of the silicon ingot 9, so that the two ends of the clamping structure 8 are evenly stressed, and the stability performance is improved.

[0042] Specifically, such as Figure 1 , Figure 2 and Figures 5-11As shown, the clamping structure 8 includes a driving component 807. Two driving components 807 are rotatably mounted on the bottom end of the docking frame 10. The driving components 807 are rotatably connected to a guide shaft 806. Linkage rods 804 are fixed on both sides of the guide shaft 806. The linkage rods 804 are rotatably connected to the docking frame 10 via a guide shaft 805. An air pipe 706 and a connecting rod 803 are fixed on the two linkage rods 804 on the same side of the docking frame 10. The opposite ends of the two connecting rods 803 are fixed... A clamping block 802 is fixed, and a rubber pad 801 is fixed on the clamping block 802; the driving component 807 retracts and pulls the guide shaft 805, the guide shaft 805 drives the linkage rod 804 to rotate around the guide shaft 806, the linkage rod 804 drives the connecting rod 803, the two connecting rods 803 rotate relative to each other, and the connecting rod 803 drives the rubber pad 801 on the clamping block 802 to clamp the silicon crystal rod 9. Then, the height is adjusted by the height structure 3, and the horizontal position of the silicon crystal rod 9 is adjusted by the rotation structure 2 and the rotation structure 4.

[0043] In use, the support base 1 is installed on the base at a designated position using bolts. The control cabinet 12 is then connected to an external power supply. The control cabinet 12 contains a PLC controller (Siemens S7-1200). The vision camera 12 is electrically connected to the PLC controller. Drive components 1 (207), 3 (301), 4 (406), 508, and 807 are preferably hydraulic cylinders or pneumatic cylinders. When using pneumatic cylinders, corresponding air pipes and air pumps are configured; when using hydraulic cylinders, corresponding hydraulic systems are configured. When it is necessary to move the silicon ingot 9, the handle of the control box 601 is held, and the drive components 1 (207) and 3 (406) are controlled via button 603. Drive component 1 (207) drives the anti-slip block 1 (206) and the limit plate 1 (204). Separation allows rotation between the first rotating shaft 202 and the support sleeve 201. The third driving component 406 drives the second anti-sliding block 405 to separate from the second limiting plate 403, allowing rotation between the second rotating shaft 402 and the connecting terminal 302. After the limit is released, pulling the handle drives the control box 601, which in turn drives the rotating sleeve 506, causing rotation between the first rotating shaft 202 and the support sleeve 201, and between the second rotating shaft 402 and the connecting terminal 302. This facilitates quick adjustment of the horizontal position of the clamping structure 8, making it easier to handle silicon ingots 9 in different positions. When horizontal adjustment is not required, the button 603 controls the first driving component 207 and the third driving component 406 to reset, preventing the first limiting plate 204 and the second limiting plate 403 from rotating, thus achieving a self-locking function.

[0044] When the vision camera 11 is at the top of the silicon ingot 9 to be moved, the angle of the clamping structure 8 can be adjusted slightly by rotating the pivot 505 and the rotating sleeve 506. The vision camera 11 automatically collects the clamping position information of the silicon ingot 9. When the docking frame 10 moves to the corresponding position of the silicon ingot 9, the data information is displayed on the display screen 602, ensuring the standardization of the clamping position, so that the clamping structure 8 is in the middle position of the silicon ingot 9, and the force on both ends of the clamping structure 8 is even, improving the stability performance. At the same time, the control box 601 controls the extension of the drive component 301 through the control cabinet 12. The drive component 301 pushes the drive rod 303 to rotate, and the drive rod 303 and the transmission The rods 304 are arranged in parallel to form a parallelogram. The drive rod 303 drives the connection terminal 302 to change its height, so that the docking frame 10 drives the connection frame 703. The connection frame 703 drives the adsorption fixture 704. The sealing ring 708 on the adsorption fixture 704 is close to the silicon crystal rod 9. At this time, the sealing ring 708 and the silicon crystal rod 9 are not in contact and there is a gap. At this time, the vane pump 701 works. The gas inside the adsorption fixture 704 enters the vane pump 701 through the air hole 705 from the first pipeline 702, and then enters the air pipe 706 from the second pipeline 707. The gas is blown onto the silicon crystal rod 9 from the air port of the air pipe 706 to prevent waste from sticking to the silicon crystal rod 9 and causing scratches, thus improving the clamping quality.

[0045] Then, the second driving component 301 continues to extend, and the second driving component 301 pushes the driving rod 303 to rotate. The driving rod 303 drives the connection terminal 302 to change its height, so that the docking frame 10 drives the connecting frame 703. The connecting frame 703 drives the adsorption fixture 704. The sealing ring 708 on the adsorption fixture 704 contacts the silicon crystal rod 9. At this time, the sliding pump 701 works. The gas inside the adsorption fixture 704 enters the sliding pump 701 through the air hole 705 from the pipeline 1 702. The adsorption fixture 704 adsorbs onto the silicon crystal rod 9, so that the position of the clamping structure 8 is fixed, preventing the clamping structure 8 from shifting during operation and preventing the silicon crystal rod 9 from rotating during clamping.

[0046] Drive component 5 807 retracts and pulls guide shaft 1 805. Guide shaft 1 805 drives linkage rod 804 to rotate around guide shaft 2 806. Linkage rod 804 drives connecting rod 803. The two connecting rods 803 rotate relative to each other. Connecting rod 803 drives rubber pad 801 on clamping block 802 to clamp silicon ingot 9. Then, the height is adjusted by height structure 3, and the horizontal position of silicon ingot 9 can be adjusted by rotation structure 1 2 and rotation structure 2 4. When it is necessary to adjust the vertical angle of silicon ingot 9, drive component 4 508 drives rack 507 to move. Rack 507 drives gear 503 to rotate. Gear 503 drives rotating shaft 3 502 to rotate. Rotating shaft 3 502 drives connector 504 to rotate, realizing the vertical angle adjustment of silicon ingot 9, which facilitates the transfer and transportation of silicon ingot 9 to various types of tooling.

[0047] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0048] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A semiconductor silicon crystal rod transfer and transport device, characterized in that, The system includes a support base, a rotating structure I installed at the top of the support base, a height structure provided on the rotating structure I, a rotating structure II provided on the height structure, an angle adjustment structure provided at the bottom of the rotating structure II, a docking frame installed at the bottom of the angle adjustment structure, and an adsorption structure and a clamping structure provided at the bottom of the docking frame. The adsorption structure includes a sliding vane pump. The top of the docking frame is fixed with the sliding vane pump, and the bottom of the docking frame is fixed with a connecting frame. A vision camera is fixed on the connecting frame, and adsorption fixtures are fixed at both ends of the connecting frame. The sealing ring at the bottom of the adsorption fixture is in contact with the silicon crystal rod. An air pipe is fixed on the clamping block in the clamping structure. An air port is provided on the side of the air pipe facing the silicon crystal rod. The air pipe is connected to the exhaust port of the sliding vane pump through a second pipe. The adsorption fixture is provided with an air hole, and the air inlet of the sliding vane pump is connected to the air hole through a first pipe.

2. The semiconductor silicon crystal rod transfer and transport device according to claim 1, characterized in that: The rotating structure includes a support sleeve, the top of the support base is fixed with the support sleeve, a rotating shaft is rotatably mounted on the support sleeve, and a support frame and a limiting plate are fixed on the rotating shaft.

3. The semiconductor silicon crystal rod transfer and transport device according to claim 2, characterized in that: A drive component is fixed on the support sleeve, and an L-shaped stop block is fixed on the drive component. The drive component drives the anti-slip block pair to clamp the limiting disc.

4. The semiconductor silicon crystal rod transfer and transport device according to claim 2, characterized in that: The height structure includes a drive rod and a transmission rod. The drive rod and the transmission rod are rotatably mounted on the support frame via a connecting shaft. The drive rod and the transmission rod are arranged in parallel. The drive rod is rotatably connected to a second drive component. The second drive component is rotatably connected to the support frame. The end of the drive rod and the transmission rod that is away from the support frame is rotatably connected to a connecting terminal via a connecting shaft.

5. The semiconductor silicon crystal rod transfer and transport device according to claim 4, characterized in that: The second rotating structure includes a second rotating shaft, which is rotatably mounted on the connecting terminal, and a connecting rod is fixed at the bottom end of the second rotating shaft.

6. The semiconductor silicon ingot transfer and transport device according to claim 5, characterized in that: A limiting disk 2 is fixed on the rotating shaft 2, and a driving component 3 is fixed on the side wall of the connecting terminal. A stop block 2 is fixed on the driving component 3, and the driving component 3 drives the anti-slip block 2 to move up and down to clamp the limiting disk 2.

7. The semiconductor silicon crystal rod transfer and transport device according to claim 5, characterized in that: The angle adjustment structure includes a rotating seat, the bottom end of the docking rod is fixed with a rotating seat, a rotating shaft three is rotatably mounted on the rotating seat, the rotating shaft three is fixed to the connector, the bottom end of the connector is fixed with a rotating shaft four, the rotating shaft four is rotatably connected to the rotating sleeve, and the bottom end of the rotating sleeve is fixed with a docking frame.

8. The semiconductor silicon crystal rod transfer and transport device according to claim 7, characterized in that: A gear is fixed on the rotating shaft three, a driving component four is fixed on the rotating seat, and a rack is fixed to the bottom end of the driving component four, with the rack meshing with the gear.

9. A semiconductor silicon crystal rod transfer and transport device according to claim 7, characterized in that: A control structure is fixed on the rotating sleeve. The control structure includes a control box. The control box is fixed on the rotating sleeve and has a display screen and buttons. The control box is electrically connected to the control cabinet on one side of the support frame.

10. A semiconductor silicon ingot transfer and transport device according to claim 7, characterized in that: The clamping structure includes a driving component five. Two driving components five are rotatably provided at the bottom end of the docking frame. The driving component five is rotatably connected to the guide shaft two. Linkage rods are fixed on both sides of the guide shaft two. The linkage rods are rotatably connected to the docking frame through a guide shaft one. Air pipes and connecting rods are fixed on the two linkage rods on the same side of the docking frame. Clamping blocks are fixed at the opposite ends of the two connecting rods. Rubber pads are fixed on the clamping blocks.

Images