Vacuum adsorption workbench mechanism and cutting equipment

Abstract

The invention relates to the technical field of semiconductor cutting equipment, in particular to a vacuum adsorption workbench mechanism and cutting device.The vacuum adsorption workbench mechanism comprises a vacuum suction cup assembly, a motor, a rotary sealing structure and a vacuum pipeline, and the vacuum suction cup assembly is provided with a first vacuum channel; the vacuum chuck assembly is mounted on the body of the motor; the rotary sealing structure is located in the through cavity and comprises a first cylinder part and a second cylinder part, the first cylinder part and the second cylinder part are rotatably and hermetically connected, and the first cylinder part is connected with the vacuum suction cup assembly and communicates with a first vacuum channel located on the vacuum suction cup assembly; one end of the vacuum pipeline is connected with the second cylinder part, and the other end of the vacuum pipeline is connected with the vacuum pump set; and the first cylinder part, the second cylinder part and the vacuum pipeline form a second vacuum channel for communicating the first vacuum channel with the vacuum pump set. The vacuum suction cup assembly is driven by the machine body of the motor to rotate by 360 degrees in the axial direction, and the machining efficiency of the cutting equipment on a to-be-cut workpiece is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor cutting equipment technology, and in particular to a vacuum adsorption worktable mechanism and cutting equipment. Background Technology

[0002] In the semiconductor packaging industry, it is necessary to perform non-film-coated dicing of whole semiconductor products using dicing equipment. When dicing whole semiconductor products using dicing equipment, the semiconductor product with film coating is placed on the worktable and fixed on the worktable by vacuum adsorption so that the dicing components on the dicing equipment can dice the semiconductor product.

[0003] However, during the dicing process of semiconductor products, the vacuum pipelines used in the vacuum structure of the dicing equipment are prone to entanglement as the vacuum suction cups on the worktable rotate, causing the worktable to be unable to rotate 360°. Therefore, it is impossible to guarantee continuous processing of semiconductor products from multiple angles and in all directions, which affects the processing efficiency of the dicing equipment for semiconductor products. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0005] Therefore, the present invention provides a vacuum adsorption worktable mechanism and a cutting device. The vacuum adsorption worktable mechanism enables the vacuum suction cup assembly to rotate 360° axially under the drive of the motor body, ensuring that the cutting device equipped with the vacuum adsorption worktable mechanism can perform continuous processing of the workpiece to be cut from multiple angles and in all directions, thereby improving the processing efficiency of the cutting device for the workpiece to be cut.

[0006] In a first aspect, the present invention provides a vacuum adsorption worktable mechanism, applied to cutting equipment, comprising: The vacuum suction cup assembly is equipped with a first vacuum channel; The motor and vacuum suction cup assembly are mounted on the motor body, and the motor is used to drive the vacuum suction cup assembly to rotate axially. The rotary sealing structure is located in the cavity of the motor body and includes a first cylindrical part and a second cylindrical part. The first cylindrical part and the second cylindrical part are rotatable and sealed together. The first cylindrical part is connected to the vacuum suction cup assembly and communicates with the first vacuum channel located on the vacuum suction cup assembly. The vacuum line is connected at one end to the second cylinder and at the other end to the vacuum pump assembly; the first cylinder, the second cylinder and the vacuum line form a second vacuum channel for connecting the first vacuum channel with the vacuum pump assembly, so that the workpiece to be cut is vacuum-adsorbed onto the vacuum suction cup assembly under the control of the vacuum pump assembly.

[0007] Optionally, at least a portion of the second cylindrical section is coaxially sealed to the outside of the first cylindrical section, and the first and second cylindrical sections are axially rotatably connected by a bearing assembly.

[0008] Optionally, a first mounting groove is provided at the end of the second cylindrical section near the vacuum suction cup assembly; the bearing assembly includes: The bearing portion is sleeved on the outside of the first cylindrical portion and located in the first mounting groove; the outer side wall of the bearing portion abuts against the inner side wall of the first mounting groove. Two snap-fit ​​components are fixed to the outer wall of the first cylindrical part and respectively contact and connect with the top and bottom of the bearing part to restrict the bearing part to be installed in the first mounting groove.

[0009] Optionally, a second mounting groove is provided on the inner side wall of the second cylinder, and a sealing ring is installed in the second mounting groove. The sealing ring is used to seal and rotatably connect the first cylinder and the second cylinder.

[0010] Optionally, a third mounting groove is provided on the inner sidewall of the second cylinder, and a conductive element is installed in the third mounting groove, and the conductive element is in contact with both the first and second cylinders; the conductive element is used to make the first and second cylinders conductive; the second cylinder can be connected to a distance sensor on the cutting equipment through a wire, and the distance sensor is used to detect the height of the cutting assembly located above the vacuum suction cup assembly; wherein, both the first and second cylinders are made of conductive metal.

[0011] Optionally, both the first and second cylindrical sections are coaxially arranged with the motor body.

[0012] Optionally, the second cylindrical part is sleeved on the outside of the connecting tube, which is used to connect to one end of the vacuum line extending into the cavity, and the connecting tube and / or the second cylindrical part is fixed in the cavity.

[0013] Secondly, the present invention provides a cutting device comprising: Vacuum pump set; As in the first aspect or its various implementations, the vacuum adsorption stage mechanism has a vacuum pipeline connected to a vacuum pump unit.

[0014] Optionally, the vacuum pump assembly includes two water ring vacuum pumps connected in parallel, both of which are connected to the rotary seal structure via vacuum pipelines.

[0015] Optionally, it also includes a control valve, installed on the vacuum line, for controlling the opening and closing of the vacuum line.

[0016] One of the above technical solutions has at least the following advantages or beneficial effects: The vacuum adsorption worktable mechanism provided by this invention, by installing a rotary sealing structure in the cavity of the motor body, and selecting a first cylindrical part and a second cylindrical part that can rotate relative to each other and are sealed together, ensures that when the motor body drives the vacuum suction cup assembly to rotate, the first cylindrical part rotates with the vacuum suction cup assembly, while the second cylindrical part does not rotate with the first cylindrical part. This prevents the vacuum pipeline connected to the second cylindrical part from rotating with the first cylindrical part, thus avoiding the situation where the vacuum pipeline becomes entangled when the vacuum suction cup assembly rotates. This allows the vacuum suction cup assembly to rotate 360° axially under the drive of the motor body, ensuring that the cutting equipment equipped with this vacuum adsorption worktable mechanism can perform continuous processing of the workpiece to be cut from multiple angles and all directions, thereby improving the processing efficiency of the cutting equipment.

[0017] The cutting equipment provided by the present invention can be realized based on the vacuum adsorption worktable mechanism described above. Since the vacuum adsorption worktable mechanism described above has the above-mentioned technical effects, the cutting equipment realized based on the vacuum adsorption worktable mechanism should also have the corresponding technical effects. Attached Figure Description

[0018] Figure 1 A schematic diagram of the structure of a vacuum adsorption stage mechanism according to an embodiment of the present invention is shown; Figure 2 A front view of a vacuum adsorption stage mechanism according to an embodiment of the present invention is shown; Figure 3 A cross-sectional view of a vacuum adsorption stage mechanism according to an embodiment of the present invention is shown; Figure 4 A schematic diagram of a rotary sealing structure according to an embodiment of the present invention is shown; Figure 5 A front view of a rotary sealing structure according to an embodiment of the present invention is shown; Figure 6 A cross-sectional view of a rotary sealing structure according to an embodiment of the present invention is shown; Figure 7 A schematic diagram of the structure of a cutting device according to an embodiment of the present invention is shown; Figure 8 A top view of a cutting device according to an embodiment of the present invention is shown.

[0019] Explanation of reference numerals in the attached figures 1-Vacuum suction cup assembly, 101-First vacuum channel, 102-Worktable, 103-Vacuum suction cup 2-Motor, 201-Body, 202-Cavity; 3-Rotary sealing structure, 301-First cylindrical section, 302-Second cylindrical section, 3021-First mounting groove, 3022-Second mounting groove, 3023-Third mounting groove; 4-Vacuum tubing, 401-First tubing, 402-Second tubing; 5-Vacuum pump set; 6-Bearing section; 7-Card connector; 8-Sealing ring; 9-Conductive components; 10-Connecting pipe; 11-Control valve; 12-Mounting base. Detailed Implementation

[0020] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] As mentioned above, the vacuum structure in existing cutting equipment often uses multiple small-diameter pipes arranged at the center of the motor below the worktable. This can easily cause the pipes to become entangled during the rotation of the vacuum chuck. As a result, the vacuum chuck cannot rotate 360°, and when the vacuum chuck rotates at a large angle, the pipes are also prone to entanglement, leading to pipe breakage and damage. This not only affects the processing efficiency of the cutting equipment for semiconductor products, but also affects the vacuum adsorption effect of the vacuum chuck on semiconductor products. The vacuum chuck cannot stably adsorb semiconductor products, which can easily lead to the semiconductor products being displaced or falling off the vacuum chuck during the cutting process.

[0022] To at least address one of the technical problems existing in the prior art or related technologies, the present invention provides a vacuum adsorption worktable mechanism, which includes a vacuum suction cup assembly, a motor, a rotary sealing structure, and a vacuum pipeline. The vacuum suction cup assembly is provided with a first vacuum channel. The vacuum suction cup assembly is mounted on the body of the motor, and the motor is used to drive the vacuum suction cup assembly to rotate axially. The rotary sealing structure is located in a cavity on the body of the motor and includes a first cylindrical part and a second cylindrical part, which are rotatable and sealed together. The first cylindrical part is connected to the vacuum suction cup assembly and communicates with the first vacuum channel located on the vacuum suction cup assembly. One end of the vacuum pipeline is connected to the second cylindrical part, and the other end of the vacuum pipeline is connected to a vacuum pump assembly. The first cylindrical part, the second cylindrical part, and the vacuum pipeline form a second vacuum channel for communicating the first vacuum channel with the vacuum pump assembly, so that the workpiece to be cut is vacuum-adsorbed onto the vacuum suction cup assembly under the control of the vacuum pump assembly. The vacuum suction cup assembly can rotate 360° axially under the drive of the motor body, ensuring that the cutting equipment equipped with this vacuum suction worktable mechanism can perform continuous processing of the workpiece to be cut from multiple angles and all directions, thereby improving the processing efficiency of the cutting equipment for the workpiece to be cut.

[0023] The following describes, with reference to the accompanying drawings, some embodiments of the vacuum adsorption workbench mechanism and cutting equipment provided according to the present invention.

[0024] See Figures 1 to 8 This invention provides a vacuum adsorption worktable mechanism, applied to a cutting device. The vacuum adsorption worktable mechanism includes a vacuum suction cup assembly 1, a motor 2, a rotary sealing structure 3, and a vacuum pipeline 4. The vacuum suction cup assembly 1 has a first vacuum channel 101. The vacuum suction cup assembly 1 is mounted on the motor body 201, and the motor 2 drives the vacuum suction cup assembly 1 to rotate axially. The rotary sealing structure 3 is located within a cavity 202 on the motor body 201. The rotary sealing structure 3 includes a first cylindrical portion 301 and a second cylindrical portion 302. The first cylindrical part 301 and the second cylindrical part 302 are rotatably and sealed together. The first cylindrical part 301 is connected to the vacuum suction cup assembly 1 and communicates with the first vacuum channel 101 located on the vacuum suction cup assembly 1. One end of the vacuum pipe 4 is connected to the second cylindrical part 302, and the other end of the vacuum pipe 4 is connected to the vacuum pump assembly 5. The first cylindrical part 301, the second cylindrical part 302 and the vacuum pipe 4 form a second vacuum channel for communicating the first vacuum channel 101 with the vacuum pump assembly 5, so that the workpiece to be cut is vacuum-adsorbed onto the vacuum suction cup assembly 1 under the control of the vacuum pump assembly 5.

[0025] Here, the motor 2 can be a DD direct drive motor, and the axial rotation of the motor 2 body 201 causes the vacuum suction cup assembly 1 connected to the body 201 to rotate accordingly, thereby realizing the axial rotation of the vacuum suction cup assembly 1 driven by the motor 2. The body 201 and the through cavity 202 are coaxially arranged.

[0026] Among them, see Figures 1 to 3 The vacuum suction cup assembly 1 includes a worktable 102 and a vacuum suction cup 103. The worktable 102 is connected to the body 201 of the motor 2. The vacuum suction cup 103 is mounted on the worktable 102. The worktable 102 is provided with a first vacuum channel 101, which communicates with a through hole located on the vacuum suction cup 103. One end of the through hole located on the vacuum suction cup 103 is located on the upper surface of the vacuum suction cup 103.

[0027] In this embodiment, by installing the rotary sealing structure 3 within the cavity 202 of the motor 2's body 201, where the cavity 202 is coaxially arranged with the motor 2's body 201, the complex rotary seal and vacuum pipeline 4 connection outside the motor 2 can be avoided, making the entire vacuum worktable structure simpler and more compact. Simultaneously, selecting the rotary sealing structure 3 as a first cylindrical portion 301 and a second cylindrical portion 302 that can rotate relative to each other and are sealed together ensures that when the motor 2's body 201 drives the vacuum suction cup assembly 1 to rotate, the first cylindrical portion 301 rotates with the vacuum suction cup assembly 1, while the second cylindrical portion 302 does not rotate with the first cylindrical portion 301. This prevents the vacuum pipeline 4 connected to the second cylindrical portion 302 from rotating with the first cylindrical portion 301, thus avoiding entanglement of the vacuum pipeline 4 when the vacuum suction cup assembly 1 rotates, and ensuring the vacuum pipeline 4 operates smoothly and efficiently in vacuum conditions. During the 360° rotation of the vacuum suction cup assembly 1, no entanglement occurs, enabling the vacuum suction cup assembly 1 to rotate 360° axially under the drive of the motor body 201. At the same time, the second vacuum channel, composed of the first cylinder 301, the second cylinder 302, and the vacuum pipeline 4, maintains reliable sealing, preventing vacuum leakage in the second vacuum channel caused by the rotation of the vacuum suction cup assembly 1. This ensures the stability of the suction force of the vacuum suction cup assembly 1 on the workpiece to be cut, improving the processing accuracy and safety of the cutting equipment.

[0028] In some possible implementations, see [link to relevant documentation]. Figures 4 to 6 At least a portion of the second cylindrical portion 302 is coaxially sealed on the outside of the first cylindrical portion 301, and the first cylindrical portion 301 and the second cylindrical portion 302 are axially rotatably connected by a bearing assembly.

[0029] Here, by coaxially sealing at least a portion of the second cylindrical portion 302 to the outside of the first cylindrical portion 301, and making the first cylindrical portion 301 and the second cylindrical portion 302 rotatably connected through a bearing assembly, an axially rotatable connection between the first cylindrical portion 301 and the second cylindrical portion 302 can be achieved. This ensures that when the first cylindrical portion 301 rotates with the vacuum suction cup assembly 1, the second cylindrical portion 302 does not rotate with the first cylindrical portion 301, thereby preventing the vacuum pipeline 4 connected to the second cylindrical portion 302 from rotating with the first cylindrical portion 301, thus avoiding the vacuum pipeline 4 from becoming entangled when the vacuum suction cup assembly 1 rotates.

[0030] In some possible embodiments, the second cylindrical portion 302 has a first mounting groove 3021 at one end near the vacuum suction cup assembly 1; the bearing assembly includes a bearing portion 6 and a snap-fit ​​member 7, the bearing portion 6 is sleeved on the outside of the first cylindrical portion 301 and located in the first mounting groove 3021; ​​the outer side wall of the bearing portion 6 abuts against the inner side wall of the first mounting groove 3021; ​​both snap-fit ​​members 7 are fixed on the outer wall of the first cylindrical portion 301 and respectively contact and connect with the top and bottom of the bearing portion 6 to restrict the bearing portion 6 to be installed in the first mounting groove 3021.

[0031] Here, the snap-fit ​​component 7 can be a snap ring; the bearing part 6 can be a ball bearing.

[0032] In this embodiment, by sleeved bearing portion 6 on the outside of first cylindrical portion 301 and installed bearing portion 6 in first mounting groove 3021 by two snap fasteners 7, and abutting the outer side wall of bearing portion 6 with the inner side wall of first mounting groove 3021, axial rotational connection between first cylindrical portion 301 and second cylindrical portion 302 can be achieved by the arrangement of bearing portion 6.

[0033] In some possible embodiments, a second mounting groove 3022 is provided on the inner sidewall of the second cylindrical portion 302, and a sealing ring 8 is installed in the second mounting groove 3022. The sealing ring 8 is used to seal and rotatably connect the first cylindrical portion 301 and the second cylindrical portion 302.

[0034] Here, there can be two second mounting slots 3022, and both second mounting slots 3022 are located below the first mounting slot 3021.

[0035] In this embodiment, by installing the sealing ring 8 in the second mounting groove 3022 opened in the inner sidewall of the second cylinder 302, the first cylinder 301 and the second cylinder 302 are rotatably connected by the sealing ring 8, so as to avoid the situation where the vacuum in the second vacuum channel is reduced due to the gap between the first cylinder 301 and the second cylinder 302.

[0036] In some possible embodiments, a third mounting groove 3023 is provided on the inner sidewall of the second cylindrical portion 302, and a conductive element 9 is installed in the third mounting groove 3023, and the conductive element 9 is in contact with both the first cylindrical portion 301 and the second cylindrical portion 302; the conductive element 9 is used to make the first cylindrical portion 301 and the second cylindrical portion 302 conductive; the second cylindrical portion 302 can be connected to a distance sensor on the cutting equipment through a wire, and the distance sensor is used to detect the height of the cutting component located above the vacuum suction cup assembly 1; wherein, both the first cylindrical portion 301 and the second cylindrical portion 302 are made of conductive metal.

[0037] The cutting assembly can be a cutting shaft, and the conductive element 9 can be made of a conductive metal. The conductive metal used to prepare the first cylindrical part 301, the second cylindrical part 302 and the conductive element 9 can be one of stainless steel, copper and iron.

[0038] Here, the distance sensor can be installed on the electrical cabinet of the cutting equipment.

[0039] It should be noted that when the cutting equipment cuts the workpiece, an electrical circuit can be formed between the cutting component for cutting the workpiece and the vacuum adsorption worktable mechanism. Therefore, by making both the first cylinder 301 and the second cylinder 302 conductive metals and making the conductive element 9 in contact with both the first cylinder 301 and the second cylinder 302, a conductor is formed between the first cylinder 301, the second cylinder 302 and the conductive element 9 after the cutting equipment is powered on. This allows the distance sensor connected to the second cylinder 302 via a wire to be powered on. Subsequently, after the distance sensor is powered on in the vacuum adsorption worktable mechanism of the cutting equipment, it can detect the height of the cutting component located above the vacuum suction cup assembly 1.

[0040] In this embodiment, by installing the conductive element 9 on the third mounting groove 3023 opened on the inner side wall of the second cylinder 302, and making the conductive element 9 in contact with both the first cylinder 301 and the second cylinder 302; and then connecting the second cylinder 302 to the distance sensor using a wire, it is possible to achieve a conductive electrical connection between the distance sensor, the first cylinder 301, the second cylinder 302 and the conductive element 9 after the vacuum adsorption worktable mechanism is powered on, that is, to power the height sensor, so that after the vacuum adsorption worktable mechanism is powered on, the distance sensor can start to detect the height of the cutting component located above the vacuum suction cup assembly 1.

[0041] Furthermore, by connecting the wire to the second cylinder 302, the wire can be prevented from getting tangled in the first cylinder 301 as it rotates. Therefore, connecting the wire to the second cylinder 302 can protect the wire.

[0042] In some possible embodiments, the first cylindrical portion 301 and the second cylindrical portion 302 are both coaxially arranged with the body 201 of the motor 2.

[0043] In this embodiment, by coaxially arranging the first cylindrical portion 301 and the second cylindrical portion 302 with the body 201 of the motor 2, the first cylindrical portion 301 can rotate axially when the motor 2 drives the vacuum suction cup assembly 1 to rotate, while the second cylindrical portion 302 does not move within the cavity 202 of the body 201. This ensures that while the installation position of the second cylindrical portion 302 remains unchanged, the first cylindrical portion 301 can also rotate axially under the drive of the vacuum suction cup assembly 1. This prevents the vacuum pipeline 4 connected to the second cylindrical portion 302 from becoming entangled with the first cylindrical portion 301 and / or the second cylindrical portion 302 during the 360° rotation of the vacuum suction cup assembly 1.

[0044] In some possible embodiments, the second cylindrical portion 302 is sleeved on the outside of the connecting tube 10, which is used to connect to one end of the vacuum line 4 extending into the cavity 202, and the connecting tube 10 and / or the second cylindrical portion 302 are fixed inside the cavity 202.

[0045] Here, the portions of the connecting pipe 10 and the vacuum line 4 located within the cavity 202 can be connected via a steel wire hose.

[0046] In this embodiment, by fixing the connecting tube 10 and / or the second cylindrical part 302 inside the cavity 202, the second cylindrical part 302 can be prevented from rotating with the first cylindrical part 301 when the first cylindrical part 301 rotates with the vacuum suction cup assembly 1. Consequently, the vacuum pipeline 4 connected to the second cylindrical part 302 through the connecting tube 10 also does not rotate with the first cylindrical part 301, thus avoiding the situation where the vacuum suction cup assembly 1 cannot rotate 360° due to the entanglement of the vacuum pipeline 4.

[0047] like Figure 7 and Figure 8 As shown, another embodiment of this application provides a cutting device, including a vacuum pump group 5 and a vacuum adsorption worktable mechanism as described above, wherein the vacuum pipeline 4 in the vacuum adsorption worktable mechanism is connected to the vacuum pump group 5.

[0048] Here, the cutting equipment can be a film-free cutting device used for cutting semiconductors.

[0049] Since the cutting device of this embodiment includes any of the vacuum adsorption worktable mechanisms in the first aspect described above, it has the beneficial effects of any of the above embodiments, which will not be repeated here.

[0050] In some possible embodiments, the vacuum pump assembly 5 includes two water ring vacuum pumps connected in parallel, both of which are connected to the rotary seal structure 3 via vacuum lines 4.

[0051] In the prior art, during the non-film cutting process of the cutting equipment, water used for cleaning the workpiece is drawn into the vacuum pipe 4 located below the vacuum suction cup assembly 1. Therefore, in order to avoid the water entering the vacuum pipe 4 affecting the vacuum level of the vacuum pump group 5 connected to the vacuum pipe 4, and causing the workpiece to move or detach from the vacuum suction cup assembly 1, this embodiment selects the vacuum pump group 5 as a structure including two parallel water ring vacuum pumps. This not only generates a larger vacuum flow rate, but also utilizes the fact that the water ring vacuum pump is a structure that generates a vacuum by rotating the impeller with water as a medium through the rotation of the motor 2. Its vacuum level is not affected by water during the cutting process. Therefore, by selecting the vacuum pump group 5 as a structure including two parallel water ring vacuum pumps, it can be ensured that the workpiece to be cut is stably adsorbed on the vacuum suction cup assembly 1.

[0052] In some possible embodiments, the cutting device also includes a control valve 11, which is mounted on the vacuum line 4 and is used to control the opening and closing of the vacuum line 4.

[0053] The vacuum line 4 includes a first line 401 and a second line 402. One end of the first line 401 is connected to the vacuum pump group 5, and the other end of the first line 401 is connected to the control valve 11. One end of the second line 402 is connected to the control valve 11, and the other end of the second line 402 is connected to the rotary sealing structure 3.

[0054] It should be noted that the motor 2 in the vacuum adsorption worktable mechanism is mounted on the mounting base 12. A closed cavity can be formed between the mounting base 12 and the through cavity 202 of the motor 2. The control valve 11 is located outside the closed cavity and is mounted on the mounting base 12 so as to control the vacuum pressure in the vacuum pipeline 4 by adjusting the opening degree of the control valve 11.

[0055] Here, the cutting equipment also includes a control unit, which is connected to both the control valve 11 and the vacuum pump assembly 5. The control unit is used to control the control valve 11 to open after the workpiece to be cut is placed on the vacuum suction cup assembly 1, so that the vacuum line 4 is in an open state, and then control the vacuum pump assembly 5 to provide vacuum to the second vacuum channel. The control unit is also used to control the vacuum pump assembly 5 to stop providing vacuum to the second vacuum channel after the workpiece to be cut is completed on the vacuum suction cup assembly 1, and then control the control valve 11 to close, so that the vacuum line 4 is in a disconnected state.

[0056] In this embodiment, by setting a control device on the vacuum line 4 to control its opening and closing, the vacuum control of the vacuum line 4 can be achieved not only by controlling the opening and closing of the vacuum pump group 5, but also by controlling the control valve 11, which can control the vacuum suction cup assembly 1 to vacuum adsorb the workpiece to be cut, so that the operator can control the vacuum pressure corresponding to the vacuum line 4.

[0057] In the description of this invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0058] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0059] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that they are in indirect contact through an intermediate medium. Furthermore, "above," "over," or "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," or "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0060] In the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "exemplary embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0061] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make modifications, alterations, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A vacuum adsorption worktable mechanism, applied to cutting equipment, characterized in that, include: The vacuum suction cup assembly is equipped with a first vacuum channel; The motor is mounted on the body of the vacuum suction cup assembly, and the motor is used to drive the vacuum suction cup assembly to rotate axially. A rotary sealing structure is located in a cavity on the body of the motor, including a first cylindrical part and a second cylindrical part. The first cylindrical part and the second cylindrical part are rotatable and sealed together. The first cylindrical part is connected to the vacuum suction cup assembly and communicates with a first vacuum channel located on the vacuum suction cup assembly. The vacuum line has one end connected to the second cylindrical section and the other end connected to the vacuum pump assembly; the first cylindrical section, the second cylindrical section, and the vacuum line form a second vacuum channel for communicating the first vacuum channel with the vacuum pump assembly, so that the workpiece to be cut is vacuum-adsorbed onto the vacuum suction cup assembly under the control of the vacuum pump assembly.

2. The vacuum adsorption worktable mechanism according to claim 1, characterized in that, At least a portion of the second cylindrical section is coaxially sealed to the outside of the first cylindrical section, and the first cylindrical section and the second cylindrical section are axially rotatably connected by a bearing assembly.

3. The vacuum adsorption stage mechanism according to claim 2, characterized in that, The second cylindrical portion has a first mounting groove at one end near the vacuum suction cup assembly; the bearing assembly includes: The bearing portion is sleeved on the outside of the first cylindrical portion and located in the first mounting groove; the outer side wall of the bearing portion abuts against the inner side wall of the first mounting groove. Two snap-fit ​​components are fixed to the outer wall of the first cylindrical part and respectively contact and connect with the top and bottom of the bearing part to restrict the bearing part to be installed in the first mounting groove.

4. The vacuum adsorption worktable mechanism according to claim 2, characterized in that, A second mounting groove is provided on the inner side wall of the second cylindrical part, and a sealing ring is installed in the second mounting groove. The sealing ring is used to seal and rotatably connect the first cylindrical part and the second cylindrical part.

5. The vacuum adsorption worktable mechanism according to claim 2, characterized in that, A third mounting groove is provided on the inner sidewall of the second cylindrical part, and a conductive element is installed in the third mounting groove. The conductive element is in contact with both the first cylindrical part and the second cylindrical part. The conductive element is used to make the first cylindrical part and the second cylindrical part conductive. The second cylindrical part can be connected to a distance sensor on the cutting equipment through a wire. The distance sensor is used to detect the height of the cutting assembly located above the vacuum suction cup assembly. The first cylindrical part and the second cylindrical part are both made of conductive metal.

6. The vacuum adsorption stage mechanism according to claim 1, characterized in that, Both the first cylindrical section and the second cylindrical section are coaxially arranged with the motor body.

7. The vacuum adsorption stage mechanism according to claim 1, characterized in that, The second cylindrical part is sleeved on the outside of the connecting tube, which is used to connect to one end of the vacuum pipeline extending into the cavity, and the connecting tube and / or the second cylindrical part is fixed inside the cavity.

8. A cutting device, characterized in that, include: Vacuum pump set; The vacuum adsorption workbench mechanism as described in any one of claims 1 to 7, wherein the vacuum pipeline in the vacuum adsorption workbench mechanism is connected to the vacuum pump assembly.

9. The cutting device according to claim 8, characterized in that, The vacuum pump assembly includes two water ring vacuum pumps connected in parallel, and both water ring vacuum pumps are connected to the rotary sealing structure through the vacuum pipeline.

10. The cutting device according to claim 8, characterized in that, It also includes a control valve, installed on the vacuum line, for controlling the opening and closing of the vacuum line.

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