Detection equipment for chip processing

By automatically adjusting the tray position through a correction mechanism and integrated testing equipment, precise chip positioning and synchronous testing are achieved, solving the problems of inaccurate positioning and limited functionality in chip testing equipment, and improving testing efficiency and the authenticity and security of results.

CN121027790APending Publication Date: 2025-11-28苏州中芯长宏半导体科技有限公司
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Patent Information

Application Number
CN202511231505.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-31
Publication Date
2025-11-28

AI Technical Summary

Technical Problem

Existing chip testing equipment suffers from inaccurate chip positioning, limited functionality, and difficulty in conducting comprehensive performance testing under simulated thermal environments, which affects testing efficiency and reliability.

Method used

The device employs a correction mechanism to automatically identify and adjust the tray's orientation, integrates strength and conductivity detection mechanisms, and uses a heating plate to simulate a thermal environment for testing. It also incorporates a pressure sensor and a resilient connection structure to protect the chip.

Benefits of technology

It enables precise chip positioning and synchronous detection, improving detection efficiency and the authenticity of results, and ensuring the safety and stability of the detection process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention is suitable for the technical field of chip processing, and provides a detection device for chip processing, which comprises a support top plate arranged right above a chip production line conveyor, and the bottom of the support top plate is fixedly provided with a plurality of support columns fixed with the tops of two support frames of the production line conveyor; wherein the supporting top plate is provided with a correcting mechanism used for correcting the direction of a tray on a conveying belt of a production line conveyor, and the tray is used for placing a chip to be detected; the supporting top plate is also provided with a detection mechanism used for carrying out strength detection on the chip and carrying out conduction detection on a pin of the chip. The detection equipment for chip processing provided by the scheme can automatically identify and adjust the orientation of the tray, ensures the accurate positioning of the chip, realizes the synchronous detection of the strength of a chip shell and the on-off property of a chip pin through the simultaneous arrangement of the strength detection mechanism and the conductivity detection mechanism, and improves the detection efficiency.
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Description

Technical Field

[0001] This invention belongs to the field of chip processing technology, and in particular relates to a testing device for chip processing. Background Technology

[0002] Currently, in chip manufacturing, conveyors are commonly used to continuously transport trays carrying chips, and the chips are tested for properties such as casing strength and electrical performance during transport. Existing testing equipment often directly tests the chips on the conveyor belt, but because workers often place the trays arbitrarily on the conveyor belt, chip positioning is inaccurate, affecting testing reliability. Furthermore, conventional testing equipment typically performs only strength or continuity tests, offering limited functionality and lacking the ability to conduct comprehensive performance tests under simulated thermal environments, making it difficult to accurately reflect the chip's reliability under actual operating conditions.

[0003] Therefore, there is an urgent need for a chip processing inspection device to solve the above problems and improve inspection efficiency and accuracy. Summary of the Invention

[0004] To address the technical problems of inaccurate positioning and difficulty in simultaneously detecting casing strength and pin continuity during chip testing, which reduces testing efficiency, this invention provides a testing device for chip processing.

[0005] This invention is implemented as follows: a chip processing inspection device includes: a support top plate disposed directly above a chip production line conveyor, wherein a plurality of pillars fixedly installed at the bottom of the support top plate and fixed to the top of two support frames of the production line conveyor; wherein, a correction mechanism is installed on the support top plate for correcting the orientation of a tray on the conveyor belt of the production line conveyor, the tray being used to place the chip to be inspected; and a detection mechanism is also installed on the support top plate for performing strength testing on the chip and conductivity testing on the chip's pins.

[0006] Preferably, an industrial camera is fixedly installed at the bottom of the supporting top plate to monitor the orientation of the pallet conveyed on the conveyor belt, so that the correction mechanism can adjust the orientation of the pallet.

[0007] Preferably, the top of the tray has multiple placement slots, and multiple chips to be tested are placed in the multiple placement slots respectively, and the placement slots are adapted to the chips.

[0008] Preferably, the correction mechanism includes a lifting assembly, a rotating mechanism assembly, a lateral clamping assembly, and a longitudinal clamping assembly. The lifting assembly includes two first cylinders fixedly installed at the bottom of the support top plate and a lifting seat fixedly installed at the bottom of the output rods of the two first cylinders. The two first cylinders are arranged vertically and are used to lift the rotating assembly installed on the lifting seat and the rotating assembly thereon.

[0009] Preferably, the rotating assembly comprises a rotating motor fixedly installed on the top of the lifting seat, an output shaft of the rotating motor is fixedly installed with a vertical connecting shaft through a shaft coupling, and the connecting shaft is rotationally connected with the lifting seat; a connecting circular plate is fixedly installed on the bottom end of the connecting shaft and below the lifting seat, and the lateral clamping mechanism and the longitudinal clamping mechanism are both fixedly installed on the bottom of the connecting circular plate.

[0010] Preferably, the bottom of the lifting seat is fixedly installed with a cylindrical barrel, the top of the cylindrical barrel is open, the bottom is provided with a circular hole with a smaller diameter than the top opening, the connecting circular plate is located in the cylindrical barrel, and an annular groove is provided on the inner wall of the bottom of the cylindrical barrel and the bottom of the connecting circular plate, and a plurality of balls are arranged in the annular groove of the cylindrical barrel and are in rolling connection with the inner wall of the annular groove of the bottom of the connecting circular plate.

[0011] Preferably, the lateral clamping assembly comprises two connecting short columns fixedly installed on the bottom of the connecting circular plate, and the bottom ends of the two connecting short columns are fixedly installed with a lateral mounting seat; a first bidirectional screw rod rotationally installed on the inner walls on both sides of the lateral mounting seat and a first limiting rod fixedly installed on the inner walls on both sides of the lateral mounting seat, the first bidirectional screw rod and the first limiting rod are both arranged in parallel, and two sections of threads with opposite rotation directions are arranged on the first bidirectional screw rod; two first clamping blocks are symmetrically arranged on the first bidirectional screw rod in a threaded manner, and the two first clamping blocks are both slidably sleeved on the first limiting rod; a lateral motor is fixedly installed on one side of the lateral mounting seat, and an output shaft of the lateral motor is fixedly connected with one end of the first bidirectional screw rod through a shaft coupling.

[0012] Preferably, the longitudinal clamping mechanism comprises two connecting long columns fixedly installed on the bottom of the connecting circular plate, and the bottom ends of the two connecting long columns are fixedly installed with a longitudinal mounting seat; a second bidirectional screw rod rotationally installed on the inner walls on both sides of the longitudinal mounting seat and a second limiting rod fixedly installed on the inner walls on both sides of the longitudinal mounting seat, the second bidirectional screw rod and the second limiting rod are both arranged in parallel, and two sections of threads with opposite rotation directions are arranged on the second bidirectional screw rod; two second clamping blocks are symmetrically arranged on the second bidirectional screw rod in a threaded manner, and the two second clamping blocks are both slidably sleeved on the second limiting rod; a longitudinal motor is fixedly installed on one side of the longitudinal mounting seat, and an output shaft of the longitudinal motor is fixedly connected with one end of the second bidirectional screw rod through a shaft coupling.

[0013] The tray is transported to the lower part of the correction mechanism, the rotating assembly rotates the lower part of the component to the corresponding position of the tray, then the lifting assembly lowers the rotating assembly, the transverse clamping assembly and the longitudinal clamping assembly, then the two clamping mechanisms clamp the four edges of the tray respectively, and are rotated to the set position through the rotating mechanism, and then are released and reset. At this time, the tray is moved to the detection mechanism by the conveying belt, and then the production line conveyor is stopped, so that the detection mechanism can be operated.

[0014] Preferably, the side close to each other of the two first clamping blocks and the side close to each other of the two second clamping blocks are provided with patch pressure sensors for monitoring the clamping pressure on the tray to avoid excessive pressure.

[0015] Preferably, the detection mechanism comprises a strength detection assembly and an on-off detection assembly, the strength detection assembly comprises a second air cylinder fixedly installed at the bottom of the support top plate, a first mounting plate fixedly installed at the bottom end of the output rod of the second air cylinder, a second mounting plate provided below the first mounting plate through a plurality of first connecting assemblies, a third mounting plate installed below the second mounting plate through a plurality of second connecting assemblies, a plurality of mounting rods fixedly installed at the bottom of the third mounting plate, and a same pressing plate fixedly installed at the bottom end of the plurality of mounting rods for pressing the top surface of the chip in the tray to detect the strength of the shell; a plurality of mounting holes are provided on the pressing plate, a heating plate is installed on the inner wall at the bottom of the mounting hole, and the pressing plate is heated through the heating plate, the chip is heated through the metal pressing plate to simulate the heat environment of the chip working scene, and a temperature sensor is installed on the top of the pressing plate, which is a patch temperature sensor.

[0016] Preferably, the first connecting assembly comprises a first sliding rod fixedly installed at the top of the second mounting plate, a second spring sleeved on the first sliding rod, and a first stopper fixedly installed at the top end of the first sliding rod, the first sliding rod penetrates through the sliding hole provided on the first mounting plate and is vertically and slidingly connected with the inner wall of the sliding hole, the second spring is located between the first mounting plate and the second mounting plate, and the first stopper is located above the first mounting plate.

[0017] Preferably, the second connecting assembly comprises a second sliding rod fixedly installed at the top of the third mounting plate and a second stopper fixedly installed at the top end of the second sliding rod, the second sliding rod penetrates through the sliding hole provided on the second mounting plate and is vertically and slidingly connected with the sliding hole, the second stopper is located at the top of the second mounting plate, and a strain pressure sensor is fixedly installed at the bottom of the second mounting plate, the stress surface of the strain pressure sensor is in contact with the top of the third mounting plate, and the strain pressure sensor is used for detecting the downward pressure, so that the set pressure value can be reached and the downward pressure on the chip can be avoided.

[0018] Preferably, the on-off detection mechanism comprises a fourth mounting plate movably sleeved on the plurality of mounting rods (i.e., the fourth mounting plate is not in contact with the mounting rods), a plurality of rows of conductive probes corresponding to the pins of the chips on the tray are fixedly installed on the fourth mounting plate, the bottom end of the conductive probes is movably sleeved with a conductive cylinder, and a spring is movably sleeved on the conductive probes, and the first spring is located between the fourth mounting plate and the conductive cylinder, a circuit board is installed on the top of the fourth mounting plate and is electrically connected with the top end of the conductive probes, and the circuit board is electrically connected with the chip pin on-off detection equipment (such as a probe test table) through a wire, which is a prior art and can be easily implemented by those skilled in the art, and thus will not be described here. A pull rope is fixedly connected in the conductive cylinder, the top end of the pull rope is fixedly connected with the bottom end of the conductive probe, so as to avoid the conductive cylinder from being separated from the conductive probe due to gravity, and ensure that the conductive probe and the conductive cylinder are in good contact. In addition, a plurality of adjustable connection assemblies are arranged on the fourth mounting plate, the adjustable connection assembly comprises an L-shaped connecting plate fixedly installed on the top of the fourth mounting plate and a lead screw fixedly installed on the bottom of the first mounting plate, the lead screw penetrates through the through hole formed in the L-shaped connecting plate, two nuts are threadedly sleeved on the lead screw and abut against the upper and lower surfaces of the L-shaped connecting plate, respectively, and a scale rod penetrating through the L-shaped connecting plate is further installed on the bottom of the first mounting plate and is used for indicating the installation position of the L-shaped connecting plate. The installation height of the on-off detection mechanism can be adjusted through the adjustable connection assembly, so that the on-off detection mechanism can not only apply pressure to a certain range of the top surface of the chip, but also ensure that the conductive cylinder is in good contact with the pins of the chip.

[0019] Preferably, the production line conveyor is fixedly installed with a support seat between the two support frames, and the top of the support seat is in contact with the bottom surface of the upper conveying belt, so as to avoid the detection mechanism from pressing down the conveying belt and causing the conveying belt to sink.

[0020] Compared with the related art, the chip processing detection equipment provided by the application has the following beneficial effects: The correction mechanism can automatically identify and adjust the position of the tray, ensure the accurate positioning of the chip, and improve the detection accuracy. The integrated strength detection and continuity detection mechanism can realize synchronous detection of the strength of the chip shell and the continuity of the chip pins, and improve the detection efficiency. The heating plate and the temperature sensor simulate the thermal environment of the chip during work, and enhance the authenticity and reliability of the detection results. At the same time, the pressure sensor and the elastic connection structure are used to avoid overpressure damage to the chip during the detection process, and ensure the safety and stability of the detection process. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 The side view structure schematic diagram of the chip processing detection equipment provided by the application is shown in the figure; Figure 2 The side view structure schematic diagram of the correction mechanism in the application is shown in the figure; Figure 3 A front view of the correction mechanism according to the present application; Figure 4 A side view of the detection mechanism according to the present application; Figure 5 A front view of the correction mechanism according to the present application; Figure 3 A front view of the correction mechanism according to the present application; Figure 6 A front view of the detection mechanism according to the present application; Figure 4 A front view of the detection mechanism according to the present application; Figure 7 A front view of the detection mechanism according to the present application; Figure 4 A front view of the detection mechanism according to the present application; Figure 8 A front view of the detection mechanism according to the present application; Figure 4 A front view of the detection mechanism according to the present application; Figure 9 A front view of the detection mechanism according to the present application; Figure 8 A front view of the detection mechanism according to the present application; Figure 10 A front view of the detection mechanism according to the present application; Figure 11 A front view of the detection mechanism according to the present application;

[0022] The drawings show: 1, production line conveyor; 101, conveying belt; 102, support frame; 103, support base; 2, support top plate; 3, correction mechanism; 6, detection mechanism; 11, tray; 12, placement groove; 13, chip; 14, pin; 21, support column; 22, industrial camera; 31, rotary motor; 32, connecting shaft; 33, connecting disc; 34, cylindrical barrel; 35, annular groove; 36, ball; 37, first air cylinder; 38, lifting base; 41, connecting stub; 42, transverse mounting base; 43, first bidirectional screw; 44, first limiting rod; 45, first clamping block; 46, transverse motor; 51, connecting column; 52, longitudinal mounting base; 53, second bidirectional screw; 54, second limiting rod; 55, second clamping block; 56, longitudinal motor; 57, surface mount pressure sensor; 61, second air cylinder; 62, first mounting plate; 63, second mounting plate; 64, third mounting plate; 65, mounting rod; 66, pressing plate; 67, mounting hole; 68, heating plate; 69, temperature sensor; 70, nut; 71, fourth mounting plate; 72, conductive probe; 73, conductive cylinder; 74, first spring; 75, circuit board; 76, pull rope; 77, L-shaped connecting plate; 78, lead screw; 79, scale rod; 80, first sliding rod; 81, second spring; 83, first stop block; 84, second sliding rod; 85, second stop block; 86, strain pressure sensor. DETAILED DESCRIPTION

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising," "including," and "having," and variations thereof, are intended to cover a non-exclusive inclusion; the terms "first," "second," and the like, are used merely to distinguish one element from another, and do not require a particular order.

[0024] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase "in an embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another.

[0025] The chip processing detection device provided by the embodiment of the application has the advantages of high efficiency, high precision, and high automation degree. Figures 1-11 As shown in the figure, the chip processing detection device comprises a support top plate 2 arranged above a chip production line conveyor 1, and a plurality of support columns 21 are fixedly installed at the top of two support frames 102 of the production line conveyor 1 at the bottom of the support top plate 2; wherein a correction mechanism 3 for correcting the orientation of a tray 11 on a conveying belt 101 of the production line conveyor 1 is installed on the support top plate 2, and the tray 11 is used for placing a chip 13 to be detected; and a detection mechanism 6 for detecting the strength of the chip 13 and the conductivity of a pin 14 of the chip 13 is also installed on the support top plate 2.

[0026] In the embodiment, the chip processing detection device comprises a support top plate 2 arranged above a chip production line conveyor 1, and the support top plate 2 is fixed to a support frame 102 through a support column 21, and a correction mechanism 3 installed thereon can correct the orientation of a tray 11 on a conveying belt 101, and the tray 11 is used for placing a chip 13 to be detected; and a detection mechanism is also arranged on the support top plate 2, and is used for detecting the strength of the chip 13 and the conductivity of a pin 14; the device can monitor the orientation of the tray through an industrial camera 22, automatically adjust the positioning through the correction mechanism 3, press through a pressing plate 66, simulate a hot environment through a heating plate 68 to test the strength of the chip, and complete the electrical test through a conductive probe 72, so that the integrated detection is efficient and accurate, and the automation degree and reliability of production detection are effectively improved.

[0027] The bottom of the support top plate 2 is fixedly provided with an industrial camera 22, which is used for monitoring the position of the tray 11 conveyed on the conveying belt 101, so that the correction mechanism operates to adjust the position of the tray 11.

[0028] In the embodiment, the bottom of the support top plate 2 is fixedly provided with an industrial camera 22, which is used for monitoring the position of the tray 11 conveyed on the conveying belt 101 in real time, and sending a signal to the correction mechanism 3 to trigger the operation of the correction mechanism 3, so as to automatically adjust and accurately position the position of the tray 11, thereby effectively ensuring the positioning accuracy of the chip 13 in the subsequent detection station.

[0029] In the further preferred embodiment of the present application, a plurality of placing grooves 12 are formed in the top of the tray 11, and a plurality of chips 13 to be detected are placed in the plurality of placing grooves 12, respectively.

[0030] In the embodiment, a plurality of placing grooves 12 matched with the chips 13 are formed in the top of the tray 11, and each chip 13 to be detected is placed in the placing groove 12. This structure can keep the chip stable and positioned during the conveying and detection process, effectively prevent the chip from deviating or shaking, and ensure the accuracy of the correction mechanism 3 and the reliability of the subsequent detection mechanism.

[0031] In the further preferred embodiment of the present application, the correction mechanism 3 comprises a lifting assembly, a rotating mechanism assembly, a transverse clamping assembly and a longitudinal clamping assembly. The lifting assembly comprises two first air cylinders 37 fixedly installed at the bottom of the support top plate 2 and a lifting seat 38 fixedly installed at the bottom end of the output rod of the two first air cylinders 37. The two first air cylinders 37 are arranged in a vertical direction and are used for lifting the rotating assembly installed on the lifting seat 38.

[0032] In the embodiment, the correction mechanism 3 comprises a lifting assembly, a rotating mechanism assembly, a transverse clamping assembly and a longitudinal clamping assembly. The lifting assembly drives the lifting seat 38 and the rotating assembly thereon to lift through the two first air cylinders 37. In the embodiment, the plurality of assemblies are cooperatively actuated to stably clamp and adjust the position of the tray 11, thereby ensuring the accurate positioning of the chip 13 before detection.

[0033] In the further preferred embodiment of the present application, the rotating mechanism assembly comprises a rotating motor 31 fixedly installed at the top of the lifting seat 38, a connecting shaft 32 in a vertical direction fixedly installed at the output shaft of the rotating motor 31 through a shaft coupling, and a connecting circular plate 33 fixedly installed at the bottom end of the connecting shaft 32 and below the lifting seat 38. The transverse clamping mechanism and the longitudinal clamping mechanism are both fixedly installed at the bottom of the connecting circular plate 33.

[0034] In the embodiment, the rotating assembly comprises a rotating motor 31 mounted on the top of the lifting seat 38, which drives the bottom connecting disc 33 to rotate through a connecting shaft 32, and the lateral and longitudinal clamping mechanisms are both fixed on the bottom of the connecting disc 33; the embodiment realizes angle adjustment through motor driving, so that the clamping mechanisms can be aligned and grasp the tray 11, effectively complete the orientation correction, and provide stable and reliable positioning basis for subsequent detection.

[0035] In the further preferred embodiment of the application, the bottom of the lifting seat 38 is fixedly provided with a cylindrical barrel 34, the top of the cylindrical barrel 34 is open, the bottom is provided with a circular hole with a smaller diameter than the top opening, the connecting disc 33 is located in the cylindrical barrel 34, and the bottom inner wall of the cylindrical barrel 34 and the bottom of the connecting disc 33 are both provided with an annular groove 35, and a plurality of balls 36 are arranged in the annular groove 35 of the cylindrical barrel 34, and the balls 36 are in rolling connection with the inner wall of the annular groove 35 of the bottom of the connecting disc 33.

[0036] In the embodiment, the bottom of the lifting seat 38 is fixedly provided with the cylindrical barrel 34, and the inside of the cylindrical barrel 34 is matched with the balls 36 through the annular groove 35, so that the connecting disc 33 can be stably supported and smoothly rotated during rotation; the embodiment effectively reduces the rotating friction resistance through the ball structure, and guarantees the stable rotation of the connecting disc 33 and the clamping mechanism below.

[0037] In the further preferred embodiment of the application, the lateral clamping assembly comprises two connecting short columns 41 fixed on the bottom of the connecting disc 33, a lateral mounting seat 42 fixedly mounted on the bottom ends of the two connecting short columns 41, a first bidirectional screw rod 43 rotatably mounted on the inner walls on both sides of the lateral mounting seat 42 and a first limiting rod 44 fixedly mounted on the inner walls on both sides of the lateral mounting seat 42, the first bidirectional screw rod 43 and the first limiting rod 44 are both arranged in parallel, two sections of threads with opposite rotation directions are arranged on the first bidirectional screw rod 43, two first clamping blocks 45 are symmetrically arranged in threaded connection on the first bidirectional screw rod 43, and the two first clamping blocks 45 are both slidably arranged on the first limiting rod 44; a lateral motor 46 fixedly mounted on one side of the lateral mounting seat 42, and an output shaft of the lateral motor 46 is fixedly connected with one end of the first bidirectional screw rod 43 through a shaft coupling.

[0038] In the embodiment, the lateral clamping assembly is fixed on the bottom of the connecting disc 33 through the connecting short columns 41, the lateral motor 46 drives the first bidirectional screw rod 43 to rotate, and drives the two first clamping blocks 45 to move synchronously and oppositely or reversely along the first limiting rod 44; the embodiment realizes automatic and stable clamping and centering of the lateral position of the tray 11, and effectively guarantees the accuracy of the positioning of the tray during the correction process and the operation reliability.

[0039] The longitudinal clamping mechanism comprises two connecting long columns 51 fixed at the bottom of the connecting circular plate 33, longitudinal mounting seats 52 fixedly installed at the bottom ends of the two connecting long columns 51, a second bidirectional screw 53 rotatably installed on the inner walls on both sides of the longitudinal mounting seat 52 and a second limiting rod 54 fixedly installed on the inner walls on both sides of the longitudinal mounting seat 52, wherein the second bidirectional screw 53 and the second limiting rod 54 are arranged in parallel, and two sections of threads with opposite rotation directions are arranged on the second bidirectional screw 53, two second clamping blocks 55 are threadedly arranged on the second bidirectional screw 53 in a symmetrical manner, the two second clamping blocks 55 are slidably arranged on the second limiting rod 54, a longitudinal motor 56 is fixedly installed on one side of the longitudinal mounting seat 52, and an output shaft of the longitudinal motor 56 is fixedly connected with one end of the second bidirectional screw 53 through a shaft coupling.

[0040] After the orientation of the tray 11 is recognized by the industrial camera 22, the tray 11 is conveyed to below the correcting mechanism 3, the rotating assembly rotates the component below to the corresponding orientation of the tray, then the lifting assembly lowers the rotating assembly and the transverse clamping assembly and the longitudinal clamping assembly, then the two clamping mechanisms clamp the four edges of the tray 11 respectively, and rotate to the set orientation through the rotating mechanism, and then the clamping is released and reset. At this time, after the tray 11 on the conveying belt 101 moves to a set distance below the detection mechanism, the operation of the production line conveyor 1 is stopped, and the detection mechanism can be operated.

[0041] In the embodiment, the longitudinal clamping mechanism is connected with the connecting circular plate 33 through the connecting long column 51, the longitudinal motor 56 drives the second bidirectional screw 53 to rotate, and drives the two second clamping blocks 55 to move synchronously along the second limiting rod 54; combined with the recognition and positioning of the industrial camera 22, the lifting and rotating assembly is adjusted, the transverse and longitudinal clamping assemblies cooperatively clamp the four edges of the tray 11 and rotate to correct, and after the correction is completed, the tray 11 is conveyed to below the detection mechanism, thereby providing a stable and reliable reference for subsequent detection.

[0042] In the further preferred embodiment of the present application, the side, where the two first clamping blocks 45 are close to each other, and the side, where the two second clamping blocks 55 are close to each other, are both provided with a patch type pressure sensor 57, which is used for monitoring the clamping pressure on the tray 11, so as to avoid excessive pressure.

[0043] In the embodiment, the patch type pressure sensors 57 are arranged on the inner sides of the first clamping blocks 45 and the second clamping blocks 55, which are used for monitoring the pressure when the tray 11 is clamped in real time; through pressure feedback, it is effectively prevented that the clamping force is too large to cause damage to the tray 11 or the chip 13, thereby improving the safety of the operation of the equipment and the protection capability of the components.

[0044] In order to further improve the use effect of the device, in addition to the above-mentioned scheme, the present scheme also has the following embodiments: In another embodiment of the present application, the detection mechanism 6 comprises a strength detection assembly and an on-off detection assembly, the strength detection assembly comprising: a second air cylinder 61 fixedly installed at the bottom of the support top plate 2, a first mounting plate 62 fixedly installed at the bottom end of the output rod of the second air cylinder; a second mounting plate 63 arranged below the first mounting plate 62 through a plurality of first connecting assemblies, a third mounting plate 64 installed below the second mounting plate 63 through a plurality of second connecting assemblies; a plurality of mounting rods 65 fixedly installed at the bottom of the third mounting plate 64, the bottom ends of the plurality of mounting rods 65 being fixedly installed with the same pressing plate 66 for pressing the top surface of the chip 13 in the tray 11 to detect the shell strength thereof; wherein a plurality of mounting holes 67 are arranged on the pressing plate 66, a heating plate 68 is installed on the inner wall at the bottom of the mounting hole 67 for heating the pressing plate 66, the chip is heated through the pressing plate 66 made of metal to simulate the thermal environment of the working scene of the chip 13, and a temperature sensor 69 is further installed at the top of the pressing plate 66, which is a patch type temperature sensor with a model of MS5535C.

[0045] It should be noted that the heating plate 68 and the temperature sensor 69 are provided with a temperature controller, which is a mature product, and the control mode and circuit connection thereof are mature technologies, which will not be described here.

[0046] In the embodiment, the detection mechanism comprises the strength detection assembly and the on-off detection assembly, the strength detection assembly drives the first mounting plate 62 through the second air cylinder 61, transmits the pressure through the first connecting assembly and the second connecting assembly, and finally presses the chip 13 through the pressing plate 66 to test the shell strength thereof; the heating plate 68 and the temperature sensor 69 built-in the pressing plate 66 can accurately simulate the working thermal environment of the chip; the embodiment realizes the synchronous detection of the mechanical strength and the thermal stability of the chip under the simulation of the real working condition, and improves the accuracy and reliability of the test result.

[0047] In another embodiment of the present application, the first connecting assembly comprises a first sliding rod 80 fixedly installed at the top of the second mounting plate 63, a second spring 81 slidingly sleeved on the first sliding rod 80, and a first stop block 83 fixedly installed at the top end of the first sliding rod 80, the first sliding rod 80 penetrating the sliding hole formed in the first mounting plate 62 and being vertically and slidingly connected with the inner wall of the sliding hole, the second spring 81 being located between the first mounting plate 62 and the second mounting plate 63, and the first stop block 83 being located above the first mounting plate 62.

[0048] In the embodiment, the first connecting assembly penetrates the first mounting plate 62 through the first sliding rod 80 and is connected with the second mounting plate 63, the second spring 81 is used for providing buffering, and the first stop block 83 is used for limiting displacement; the embodiment realizes flexible buffering and overload protection in the pressure transmission process, effectively prevents the chip 13 from being damaged by overpressure of the pressing plate 66, and ensures the safety of the strength detection process and the accuracy of the test result.

[0049] In another embodiment of the present application, the second connecting assembly comprises a second sliding rod 84 fixedly installed on the top of the third mounting plate 64, the second sliding rod 84 penetrating through a sliding hole formed on the second mounting plate 63 and being in vertical sliding connection with the sliding hole, and a second stopper 85 fixedly installed on the top end of the second sliding rod 84, the second stopper 85 being located on the top of the second mounting plate 63, and the bottom of the second mounting plate 63 being fixedly installed with a strain pressure sensor 86, the force receiving surface of the strain pressure sensor 86 being in contact with the top of the third mounting plate 64, for detecting the downward pressure, so that the set pressure value can be reached and the downward pressure on the chip 13 can be prevented from being too large.

[0050] In the embodiment, the second connecting assembly realizes the sliding connection between the third mounting plate 64 and the second mounting plate 63 through the second sliding rod 84 and the second stopper 85, and the strain pressure sensor 86 arranged on the bottom of the second mounting plate 63 can monitor the downward pressure in real time, so that the accurate control of the pressure applied to the chip 13 and the overpressure protection are realized, the set test pressure value can be ensured to be reached, the chip can be effectively prevented from being damaged by too large pressure, and the safety and reliability of the strength detection are improved.

[0051] In another embodiment of the present application, the continuity detection mechanism comprises a fourth mounting plate 71 movably sleeved on the mounting rods 65 (i.e. the fourth mounting plate 71 is not in contact with the mounting rods 65), a plurality of rows of conductive probes 72 corresponding to the pins of the chips 13 on the tray 11 are fixedly mounted on the fourth mounting plate 71, a conductive cylinder 73 is sleeved at the bottom end of the conductive probes 72, and a spring 74 is sleeved on the conductive probes 72, the first spring 74 is located between the fourth mounting plate 71 and the conductive cylinder 73, a circuit board 75 is mounted on the top of the fourth mounting plate 71 and is electrically connected with the top end of the conductive probes, the circuit board 75 is electrically connected with a chip pin continuity detection device (such as a probe test table) through a wire, this aspect is prior art and can be easily implemented by those skilled in the art, and thus will not be described here, the conductive cylinder 73 is fixedly connected with a pull rope 76, the top end of the pull rope 76 is fixedly connected with the bottom end of the conductive probes 72, so as to avoid the conductive cylinder 73 from being separated from the conductive probes 72 due to gravity, and ensure that the conductive probes 72 and the conductive cylinder 73 are in good contact, in addition, a plurality of adjustable connection assemblies are arranged on the fourth mounting plate 71, the adjustable connection assembly comprises an L-shaped connecting plate 77 fixedly mounted on the top of the fourth mounting plate 71 and a lead screw 78 fixedly mounted on the bottom of the first mounting plate 62, the lead screw 78 penetrates through a through hole formed in the L-shaped connecting plate 77, two nuts 70 are threadedly sleeved on the lead screw 78 and abut against the upper and lower surfaces of the L-shaped connecting plate 77, respectively, a scale rod 79 penetrating through the L-shaped connecting plate 77 is further mounted on the bottom of the first mounting plate 62 and is used for indicating the mounting position of the L-shaped connecting plate 77, the mounting height of the continuity detection mechanism can be adjusted through the adjustable connection assembly, so that the continuity detection mechanism can not only apply pressure to the top surface of the chip 13 within a certain range but also ensure good contact between the conductive cylinder 73 and the pins 14 of the chip 13.

[0052] In the embodiment, the continuity detection mechanism is installed with a plurality of rows of conductive probes 72 and the conductive cylinder 73 through the fourth mounting plate 71, the first spring 74 and the pull rope 76 ensure stable conductive contact, and the adjustable connection assembly adjusts the height of the fourth mounting plate 71 through the lead screw 78 and the nuts 70; the embodiment realizes the strength detection and the pin continuity test at the same time.

[0053] In a further preferred embodiment of the present application, the support seat 103 is fixedly installed between the two support frames 102 of the production line conveyor 1, the top of the support seat 103 is in contact with the bottom surface of the upper conveying belt 101, so as to avoid the downward pressure of the detection mechanism on the conveying belt 101 and the sinking of the conveying belt 101.

[0054] In the embodiment, the support seat 103 is fixedly installed between the two support frames 102 of the production line conveyor 1, and the top of the support seat 103 is in contact with the bottom surface of the upper conveying belt 101. The embodiment effectively prevents the deformation or subsidence of the conveying belt 101 when the detection mechanism is pressed down, and ensures the positioning stability and test accuracy of the chip 13 during the detection process.

[0055] It should be noted that the circuits, electronic components and modules involved in the present application are all prior art, and can be implemented by those skilled in the art without further description. The present application does not involve improvements to software and methods. The controller is provided on the device, and each electrical equipment can be started to operate through the controller during use. The control circuit of the controller can be implemented by simple programming by those skilled in the art. The power connection mode of each electrical equipment is a mature technology known to those skilled in the art, and will not be described in detail.

[0056] In summary, compared with the related art, the present application can automatically identify and adjust the orientation of the tray 11 by setting the correction mechanism 3, ensure the accurate positioning of the chip 13, and improve the detection accuracy. By simultaneously setting the strength detection and conductivity detection mechanisms, the shell strength of the chip 13 and the continuity of the pin 14 of the chip 13 are synchronously detected, and the detection efficiency is improved. By using the heating plate 68 and the temperature sensor 69 to simulate the thermal environment of the chip during operation, the authenticity and reliability of the detection results are enhanced. At the same time, the pressure sensor and the elastic connection structure are used to avoid overpressure damage to the chip during the detection process, and to ensure the safety and stability of the detection process.

[0057] In several embodiments provided in the present application, it should be understood that the disclosed device can be implemented in other ways.

[0058] The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the protection scope of the application. Obviously, the described embodiments are only some of the embodiments of the present application, not all. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art can combine, delete or make other adjustments to the features of the embodiments of the present application according to the circumstances without creative labor, so as to obtain different other technical solutions which do not deviate from the concept of the present application in essence. These technical solutions also belong to the scope of the present application.

Claims

1. A testing device for chip processing, characterized in that, include: A support top plate (2) is set directly above the chip production line conveyor (1). Several pillars (21) are fixedly installed at the bottom of the support top plate (2) and fixed to the top of the two support frames (102) of the production line conveyor (1). The supporting top plate (2) is equipped with a correction mechanism (3) for correcting the orientation of the tray (11) on the conveyor belt (101) of the production line conveyor (1), and the tray (11) is used to place the chip (13) to be tested. The supporting top plate (2) is also equipped with a testing mechanism for strength testing of the chip (13) and conductivity testing of the pins (14) of the chip (13).

2. The chip processing inspection equipment as described in claim 1, characterized in that, An industrial camera (22) is fixedly installed at the bottom of the supporting top plate (2) to monitor the orientation of the pallet (11) conveyed on the conveyor belt (101) so that the correction mechanism can adjust the orientation of the pallet (11).

3. The chip processing inspection equipment as described in claim 1, characterized in that, The top of the tray (11) is provided with multiple placement slots (12), and multiple chips (13) to be tested are placed in the multiple placement slots (12), and the placement slots (12) are adapted to the chips (13).

4. The chip processing inspection equipment as described in claim 1, characterized in that, The correction mechanism includes a lifting assembly, a rotating mechanism assembly, a lateral clamping assembly, and a longitudinal clamping assembly. The lifting assembly includes two first cylinders (37) fixedly installed at the bottom of the support top plate (2) and a lifting seat (38) fixedly installed at the bottom of the output rods of the two first cylinders (37). The two first cylinders (37) are arranged in a vertical direction and are used to lift the rotating assembly installed on the lifting seat (38) and on it.

5. The chip processing inspection equipment as described in claim 4, characterized in that, The rotating component includes: A rotary motor (31) is fixedly installed on the top of the lifting seat (38). The output shaft of the rotary motor (31) is fixedly installed with a vertical connecting shaft (32) through a coupling. The connecting shaft (32) is rotatably connected to the lifting seat (38). A connecting circular plate (33) is fixedly installed at the bottom end of the connecting shaft (32) and located below the lifting seat (38). Both the horizontal clamping mechanism and the vertical clamping mechanism are fixedly installed at the bottom of the connecting circular plate (33).

6. The chip processing inspection equipment as described in claim 5, characterized in that, A cylindrical tube (34) is fixedly installed at the bottom of the lifting seat (38). The top of the cylindrical tube (34) is open, and a circular hole with a smaller diameter than the top opening is opened at the bottom. The connecting circular plate (33) is located inside the cylindrical tube (34), and an annular groove (35) is opened on the bottom inner wall of the cylindrical tube (34) and the bottom of the connecting circular plate (33). Multiple balls (36) are provided in the annular groove (35) of the cylindrical tube (34), and the balls (36) are in rolling connection with the inner wall of the annular groove (35) at the bottom of the connecting circular plate (33).

7. The chip processing inspection equipment as described in claim 5, characterized in that, The lateral clamping assembly includes: Two connecting short columns (41) are fixed to the bottom of the connecting circular plate (33), and a horizontal mounting seat (42) is fixedly installed at the bottom end of the two connecting short columns (41). The first bidirectional screw (43) is rotatably installed on the inner walls of both sides of the transverse mounting base (42) and the first limiting rod (44) is fixedly installed on the inner walls of both sides of the transverse mounting base (42). The first bidirectional screw (43) and the first limiting rod (44) are arranged in parallel. The first bidirectional screw (43) is provided with two threads with opposite directions. Two first clamping blocks (45) are threaded onto the first bidirectional screw (43) and symmetrically arranged. Both first clamping blocks (45) are slidably sleeved on the first limiting rod (44). A horizontal motor (46) is fixedly installed on one side of the horizontal mounting base (42), and the output shaft of the horizontal motor (46) is fixedly connected to one end of the first bidirectional screw (43) through a coupling.

8. The chip processing inspection equipment as described in claim 5, characterized in that, The longitudinal clamping mechanism includes: Two connecting columns (51) are fixed to the bottom of the connecting circular plate (33), and longitudinal mounting bases (52) are fixedly installed at the bottom ends of the two connecting columns (51). The second bidirectional screw (53) is rotatably installed on the inner walls of both sides of the longitudinal mounting base (52) and the second limiting rod (54) is fixedly installed on the inner walls of both sides of the longitudinal mounting base (52). The second bidirectional screw (53) and the second limiting rod (54) are arranged in parallel. The second bidirectional screw (53) is also provided with two threads with opposite directions. Two second clamping blocks (55) are threaded onto the second bidirectional screw (53) and symmetrically arranged. Both second clamping blocks (55) are slidably sleeved on the second limiting rod (54). A longitudinal motor (56) is fixedly installed on one side of the longitudinal mounting base (52), and the output shaft of the longitudinal motor (56) is fixedly connected to one end of the second bidirectional screw (53) through a coupling.

9. The chip processing inspection equipment as described in claim 8, characterized in that, A patch pressure sensor (57) is installed on the side of the two first clamping blocks (45) that are close to each other and on the side of the two second clamping blocks (55) that are close to each other, for monitoring the clamping pressure on the tray (11).

10. The chip processing inspection equipment as described in claim 1, characterized in that, A support base (103) is fixedly installed between the two support frames (102) of the production line conveyor (1), and the top of the support base (103) is in contact with the bottom surface of the conveyor belt (101) above.