Ultrasonic phased array surface wave transducer and use method

By designing an ultrasonic phased array surface wave transducer, energy loss is reduced by using wedge-shaped inclined surfaces and wafer adhesion, and the array-distributed ultrasonic transducer holes and cable transmission ensure signal accuracy. This solves the problems of multi-angle and sound path compensation in existing technologies, and achieves high flexibility and accurate detection results.

CN121049397APending Publication Date: 2025-12-02XIAN THERMAL POWER RES INST CO LTD
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Patent Information

Application Number
CN202511210770.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-27
Publication Date
2025-12-02

AI Technical Summary

Technical Problem

Existing ultrasonic phased array testing technology is difficult to meet the testing requirements of workpieces with high surface quality and smoothness, such as turbine generator blades. In particular, it cannot achieve multi-angle and sound path compensation, and existing technology is difficult to generate surface wave deflection angles of approximately 90°.

Method used

An ultrasonic phased array surface wave transducer is designed, comprising a transducer body, ultrasonic transducer wedges, transducer wafers, and ultrasonic wave transmission components. Energy loss is reduced by the inclined surface of the wedges and the adhesion of the wafers. The array of ultrasonic transducer apertures enables multi-angle scanning. Combined with cables and connectors, the accuracy and integrity of signal transmission are ensured.

Benefits of technology

This invention enables ultrasonic phased array surface wave detection with multi-angle and path compensation, improving detection flexibility and adaptability. It can perform comprehensive detection on the surface of samples of different shapes and sizes, discovering smaller defects and enhancing the strength and accuracy of the detection signal.

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Abstract

The invention relates to the technical field of transducers, and discloses an ultrasonic phased array surface wave transducer and a use method thereof. The transducer body is placed on a detected sample, the transducer body is connected with an external ultrasonic phased array detector, and ultrasonic waves emitted by the external ultrasonic phased array detector through the transducer body pass through the transducer body to form ultrasonic surface waves capable of being scanned in a fan shape or a line shape on the detected sample. The ultrasonic surface wave is used for detecting the detected sample. According to the invention, the ultrasonic surface wave capable of being scanned in a fan-shaped manner or a line manner can be formed on the detected sample.
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Description

Technical Field

[0001] This invention relates to the field of transducer technology, specifically to an ultrasonic phased array surface wave transducer and its usage method. Background Technology

[0002] Ultrasonic phased array imaging technology, as an advanced multi-beam scanning imaging technique, exhibits unique advantages in the field of non-destructive testing. This technology uses an ultrasonic testing probe composed of a transducer array of multiple wafers. Under the excitation of the transmitting circuit, the array units excite ultrasound with a controllable phase, and the resulting spherical waves superimpose on each other during propagation to form different sound beams.

[0003] Compared to conventional testing techniques, ultrasonic phased array testing technology can generate ultrasonic beams with different directional properties by controlling the delay of each independent element, producing diverse sound beam effects. It not only simulates the operation of various oblique focusing probes but also features electronic scanning and dynamic focusing capabilities, enabling rapid detection with little or no probe movement. A complete image of the object being inspected can be generated from a fixed probe position, achieving automatic scanning, making it particularly suitable for detecting objects with complex shapes. Furthermore, ultrasonic phased array probes are compact and flexible, well-suited to meet the needs of on-site working conditions. Currently, ultrasonic phased array transducers are widely used for inspecting welded joints, bolts, and blade roots, often utilizing transverse waves, longitudinal waves, and their combinations for detection.

[0004] However, conventional ultrasonic testing has significant limitations when performing ultrasonic testing on workpieces with high surface quality requirements and smoothness, such as turbine generator blades. Conventional ultrasonic testing requires the use of surface wave probes for segmented scanning, and the blade defects are determined by the A-scan waveform. This method is not intuitive enough and cannot record the test results, which adversely affects the reproduction of quality and the interpretation of defects.

[0005] With the development of digital ultrasound, there is an urgent need for an ultrasonic phased array surface wave transducer capable of simultaneously achieving multi-angle and path compensation, coupled with encoder scanning, to realize functions such as surface wave recording, detection, and offline analysis. Although existing ultrasonic phased array technology can achieve sound field deflection through electronic scanning and sector scanning, the deflection angle is limited, generally not exceeding 70°, and there is currently no transducer capable of generating surface waves, while the surface wave deflection angle is approximately 90°. Existing technology is insufficient to meet such special detection requirements. Summary of the Invention

[0006] In order to overcome the defects of the prior art, the present invention aims to provide an ultrasonic phased array surface wave transducer and a method of using it, so as to solve the technical problem of how to design an ultrasonic phased array surface wave transducer that can simultaneously achieve multi-angle and sound path compensation.

[0007] This invention is achieved through the following technical solution: In a first aspect, the present invention provides an ultrasonic phased array surface wave transducer, including a transducer body; The transducer body is placed on the test sample. The transducer body is connected to an external ultrasonic phased array detector. The external ultrasonic phased array detector emits ultrasonic waves through the transducer body, which then pass through the transducer body to form ultrasonic surface waves on the test sample that can be scanned in a fan shape or in a line. The ultrasonic surface waves are used to detect the test sample.

[0008] Preferably, the transducer body includes an ultrasonic transducer wedge, a transducer wafer, and an ultrasonic wave transmission assembly; The ultrasonic transducer wedge is placed on the test sample, the transducer wafer is set on the ultrasonic transducer wedge, one end of the ultrasonic wave transmission assembly is connected to an external ultrasonic phased array detector, and the other end is inserted into the transducer wafer.

[0009] Furthermore, the ultrasonic transducer wedge has an inclined surface, and the transducer wafer is disposed on the inclined surface.

[0010] Furthermore, the transducer wafer is adhered to the inclined surface of the ultrasonic transducer wedge using silicone oil or machine oil.

[0011] Furthermore, the transducer wafer has several ultrasonic transducer holes, which are distributed in an array on the transducer wafer. The ultrasonic transmission components are all inserted into the ultrasonic transducer holes and form several ultrasonic beams on the test sample through the ultrasonic transducer wedges via the ultrasonic transducer holes. The ultrasonic beams form ultrasonic surface waves that can be scanned in a fan shape or in a line.

[0012] Furthermore, the ultrasonic transmission assembly includes connectors and several cables; Several cables are inserted into several ultrasonic transducer holes respectively. One end of the connector pin is connected to several cables, and the other end is connected to an external ultrasonic phased array detector.

[0013] Furthermore, several cables are fixedly connected to the connector pins and several ultrasonic transducer holes by soldering.

[0014] Preferably, in the external ultrasonic phased array detector, the ultrasonic waves emitted by the transducer body are set at an inclined angle on the surface of the sample being tested.

[0015] Preferably, the surface of the test sample can be a straight groove or a V-shaped groove, used to calibrate the ultrasonic surface waves formed by line scanning and sector scanning.

[0016] Secondly, the present invention also provides a method for using an ultrasonic phased array surface wave transducer, based on the aforementioned ultrasonic phased array surface wave transducer, characterized by comprising the following process: When the external ultrasonic phased array detector is activated, the excitation circuit of the external ultrasonic phased array detector generates ultrasonic longitudinal waves through the transducer body. The ultrasonic longitudinal waves undergo waveform conversion on the test sample, forming ultrasonic surface waves on the test sample that can be scanned in a fan shape or in a line. The ultrasonic surface waves are used to detect the test sample.

[0017] Compared with the prior art, the present invention has the following beneficial technical effects: This invention provides an ultrasonic phased array surface wave transducer capable of generating ultrasonic surface waves on the tested sample, allowing for either fan-shaped or line scanning. Fan-shaped scanning can cover a large detection area, and by adjusting the fan angle, it can flexibly and comprehensively inspect the surface of samples of different shapes and sizes, making it particularly suitable for irregularly shaped samples. Line scanning, on the other hand, can perform precise and detailed inspection of specific straight areas. The combination of these two scanning methods greatly improves the flexibility and adaptability of the inspection, meeting the needs of different testing scenarios.

[0018] Furthermore, the wedge can alter the propagation direction of the ultrasonic waves, allowing them to enter the sample at a suitable angle, thereby generating the desired ultrasonic surface waves within the sample. By precisely designing the wedge angle, the propagation range and focal point of the surface waves can be controlled, improving the targeting and accuracy of the detection and enabling better detection of defects on the sample surface.

[0019] Furthermore, the inclined plane helps to achieve the conversion between different wave modes of ultrasound.

[0020] Furthermore, when the transducer wafers adhere to the inclined surface of the wedge, the reflection and energy loss of ultrasonic waves at the interface between the wafer and the wedge can be effectively reduced, allowing more ultrasonic energy to be smoothly transmitted from the wafer to the wedge and then into the test sample. This improves the transmission efficiency of ultrasonic waves, enhances the intensity of the detection signal, and helps to detect smaller defects.

[0021] Furthermore, the array-distributed ultrasonic transducer apertures allow the ultrasonic beam to cover the surface of the test sample in a denser and more precise manner. By precisely controlling the excitation time and phase of each ultrasonic transducer aperture, accurate focusing and deflection of the ultrasonic beam can be achieved.

[0022] Furthermore, each cable is inserted into a corresponding ultrasonic transducer port, ensuring that the ultrasonic signal generated from the transducer chip is accurately transmitted to the connector pins, and then from the connector pins to the external ultrasonic phased array detector. During transmission, signal cross-interference and attenuation are minimized, guaranteeing signal integrity and accuracy.

[0023] This invention also provides a method for using an ultrasonic phased array surface wave transducer, enabling ultrasonic surface waves to form a fan-shaped or line-shaped scanning pattern on the tested sample. Fan-shaped scanning allows for rapid scanning of the sample surface over a wide angular range, suitable for preliminary screening of large areas and quickly identifying potential defect regions. Line scanning, on the other hand, allows for high-precision scanning along a specific direction, enabling more detailed inspection of areas already identified as potentially defective, accurately determining the location, size, and shape of the defects. This flexible selection of scanning modes meets the needs of different testing scenarios. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of the ultrasonic phased array surface wave transducer in this invention; Figure 2 This is a top view of the ultrasonic phased array surface wave transducer in this invention; Figure 3 This is a side view of the ultrasonic phased array surface wave transducer in this invention; In the figure: 1. Ultrasonic transducer wedge; 2. Transducer wafer; 3. Cable; 4. Connecting pin; 5. Ultrasonic surface wave; 6. Test sample. Detailed Implementation

[0025] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0026] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0027] The purpose of this invention is to provide an ultrasonic phased array surface wave transducer and a method of using it, so as to solve the technical problem of how to design an ultrasonic phased array surface wave transducer that can simultaneously achieve multi-angle and sound path compensation.

[0028] The present invention will now be described in further detail with reference to the accompanying drawings: Example 1 See Figure 1 , Figure 2 as well as Figure 3 In one embodiment of the present invention, an ultrasonic phased array surface wave transducer is provided, including a transducer body; the transducer body is placed on the test sample 6, the transducer body is connected to an external ultrasonic phased array detector, and ultrasonic waves emitted by the external ultrasonic phased array detector through the transducer body pass through the transducer body to form ultrasonic surface waves 5 on the test sample 6 that can be scanned in a fan-shaped or line-scanning manner, and the ultrasonic surface waves are used to detect the test sample 6.

[0029] Specifically, the transducer body includes an ultrasonic transducer wedge 1, a transducer wafer 2, and an ultrasonic transmission assembly; the ultrasonic transducer wedge 1 is placed on the test sample 6, the transducer wafer 2 is disposed on the ultrasonic transducer wedge 1, one end of the ultrasonic transmission assembly is connected to an external ultrasonic phased array detector, and the other end is inserted into the transducer wafer 2.

[0030] In this embodiment, the external ultrasonic phased array detector is the control core of the entire system. It generates electrical signals with specific patterns based on preset detection parameters, such as frequency, pulse width, and array element excitation sequence. These electrical signals have precise timing and phase control, enabling functions such as focusing, deflection, and dynamic scanning of the ultrasonic beam.

[0031] One end of the ultrasonic transmission component is tightly connected to an external ultrasonic phased array detector, while the other end is inserted into the transducer chip 2. Through a transmission medium such as a cable, the electrical signal output by the detector is accurately transmitted to the transducer chip 2. This connection method ensures low-loss signal transmission, guaranteeing the quality and stability of the electrical signal.

[0032] The ultrasonic waves entering the test sample 6 propagate according to certain rules. In a homogeneous medium, ultrasonic waves propagate in a straight line; when they encounter interfaces between different materials, defects, or sample boundaries, ultrasonic waves undergo reflection, refraction, and scattering. If defects exist in the test sample 6, such as cracks, pores, or inclusions, the ultrasonic waves will be reflected when they reach the defects. Part of the reflected ultrasonic waves will propagate again through the ultrasonic transducer wedge 1 to the transducer crystal 2. At this time, the transducer crystal 2 uses the piezoelectric effect to convert the received ultrasonic mechanical vibrations into electrical signals. Since the reflected signals contain information about the internal defects of the test sample, these electrical signals are the key basis for defect detection.

[0033] The ultrasonic transducer wedge 1 has an inclined surface, and the transducer wafer 2 is disposed on the inclined surface.

[0034] The transducer chip 2 is adhered to the inclined surface of the ultrasonic transducer wedge 1 by silicone oil or machine oil.

[0035] In this embodiment, when the transducer wafers adhere to the inclined surface of the wedge, the reflection and energy loss of ultrasonic waves at the interface between the wafer and the wedge can be effectively reduced, allowing more ultrasonic energy to be smoothly transmitted from the wafer to the wedge and then into the sample under test. This improves the transmission efficiency of ultrasonic waves, enhances the intensity of the detection signal, and helps to detect smaller defects.

[0036] Specifically, the transducer wafer 2 has a plurality of ultrasonic transducer holes, which are distributed in an array on the transducer wafer 2. The ultrasonic transmission components are all inserted into the plurality of ultrasonic transducer holes, and through the ultrasonic transducer wedge 1, a plurality of ultrasonic beams are formed on the test sample 6. The plurality of ultrasonic beams form ultrasonic surface waves 5 that can be scanned in a fan shape or in a line.

[0037] Specifically, the ultrasonic transmission component includes a connector 4 and several cables 3; the cables 3 are respectively inserted into several ultrasonic transducer holes, one end of the connector 4 is connected to the cables 3, and the other end is connected to an external ultrasonic phased array detector.

[0038] In this embodiment, the connector 4 serves as the starting connection point for signal transmission, with one end tightly connected to several cables 3. When the detector outputs an electrical signal, the connector 4, with its excellent conductivity, accurately guides the signal to the connected cable 3, ensuring no leakage or distortion occurs during the initial transmission stage. Several cables 3 are respectively inserted into several ultrasonic transducer holes. The electrical signal transmitted from the connector 4 of each cable 3 is directionally transmitted to the corresponding ultrasonic transducer hole, and then to the transducer chip in the ultrasonic transducer. This one-to-one precise transmission method ensures that each transducer chip receives an electrical signal that meets its operating requirements, laying the foundation for the subsequent generation of specific ultrasonic modes.

[0039] Several cables 3 are fixedly connected to the connector pins 4 and several ultrasonic transducer holes by soldering.

[0040] Specifically, the external ultrasonic phased array detector sets the ultrasonic waves emitted by the transducer body at an inclined angle on the surface of the sample 6 under test.

[0041] Specifically, the surface of the test sample 6 can be a straight groove or a V-shaped groove, used to calibrate the ultrasonic surface wave 5 formed by line scanning and sector scanning.

[0042] In this embodiment, the excitation circuit of the external ultrasonic phased array detector can control the electronic scanning of the transducer chip 2, achieving line scanning and sector scanning without moving the transducer. In summary, the ultrasonic phased array surface wave transducer provided in this embodiment can generate ultrasonic surface waves on the tested sample that can be scanned in a fan-shaped or line-shaped manner. Fan-shaped scanning can cover a large detection area, and by adjusting the fan angle, it can flexibly and comprehensively detect the surface of samples of different shapes and sizes, making it particularly suitable for irregularly shaped samples. Line scanning, on the other hand, can perform precise and detailed detection on specific straight lines. The combination of these two scanning methods greatly improves the flexibility and adaptability of the detection, meeting different detection scenarios and needs.

[0043] Example 2 This embodiment also provides a method for using an ultrasonic phased array surface wave transducer, based on the ultrasonic phased array surface wave transducer described above, including the following process: When the external ultrasonic phased array detector is activated, the excitation circuit of the external ultrasonic phased array detector generates ultrasonic longitudinal waves through the transducer body. The ultrasonic longitudinal waves undergo waveform conversion on the test sample 6, forming ultrasonic surface waves 5 on the test sample 6 that can be scanned in a fan shape or in a line. The ultrasonic surface waves are used to detect the test sample 6.

[0044] In this embodiment, the incident angle α of the ultrasonic wave is related to the sound velocity of the ultrasonic transducer wedge 1 and the test sample 6, and the incident angle α should be greater than or equal to the second critical angle between the ultrasonic transducer wedge 1 and the test sample 6, and this value changes due to the change in the material of the ultrasonic transducer wedge 1 and the test sample (6).

[0045] The second critical angle is calculated based on the sound velocity of the ultrasonic transducer wedge 1 and the material of the test sample 6. The formula is α≥arcsin(C_wedge longitudinal wave / C_surface wave), where α is the physical angle of the ultrasonic transducer wedge 1, C_wedge longitudinal wave is the longitudinal wave velocity in the ultrasonic transducer wedge 1, and C_surface wave is the surface wave velocity in the test sample 6. Under electronic scanning control, ultrasonic phased array surface wave transducers can achieve ultrasonic phased array sector scanning and line scanning, and can achieve focusing within a certain depth or radius range by controlling the excitation delay law; In this embodiment, regular reflectors such as grooves can be processed on the surface of the test sample 6, and the delay laws such as fan-shaped scanning or line scanning formed by the transducer wafer 2 can be calibrated using the regular reflectors.

[0046] During line scanning, a portion of the ultrasonic transducer aperture 2 is excited at once, and all apertures are traversed sequentially. Without moving the transducer, a scanning range of a certain sound path is achieved by controlling the excitation time interval, and focusing is achieved in the direction of that sound path or radius.

[0047] During a sector scan, the entire ultrasonic transducer aperture 2 is scanned at once. Without moving the transducer, a certain angle θ is achieved by controlling the excitation time interval, while focusing in a certain sound path or radius direction is also achieved.

[0048] In summary, this invention also provides a method for using an ultrasonic phased array surface wave transducer, enabling ultrasonic surface waves to form either a fan-shaped scan or a line scan pattern on the tested sample. Fan-shaped scanning allows for rapid scanning of the sample surface over a wide angular range, suitable for preliminary screening of large areas and quickly identifying potential defect regions. Line scan, on the other hand, performs high-precision scanning along a specific direction, allowing for more detailed inspection of areas where suspected defects have been identified, accurately determining the location, size, and shape of the defects. This flexible selection of scanning modes meets the needs of different testing scenarios.

[0049] The ultrasonic surface wave 5, capable of both fan-shaped and line scanning, possesses unique propagation characteristics, enabling it to detect various types of surface defects. Fan-shaped scanning can cover a large inspection area, and by adjusting the scanning angle, cracks with different orientations can be detected. Line scanning, on the other hand, allows for detailed inspection in specific directions, showing good detection results for long, straight cracks. Simultaneously, surface waves can also detect near-surface defects beneath the surface, such as delamination and inclusions, providing strong support for a comprehensive assessment of the quality of the tested sample 6.

[0050] Ultrasonic phased array technology, by controlling the excitation time and phase of each array element in the transducer body, can precisely control the propagation direction and focusing position of ultrasonic surface waves 5. During the inspection process, the detector can accurately calculate the position of the defect on the inspected sample 6 based on the time and angle information of the received reflected signal, achieving high-precision defect localization. This is of great significance for subsequent defect repair and quality assessment, avoiding blind repair and misjudgment, and improving work efficiency and quality.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of the present invention. Any modifications or equivalent substitutions that do not depart from the spirit and scope of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. An ultrasonic phased array surface wave transducer, characterized in that, Including the transducer body; The transducer body is placed on the test sample (6). The transducer body is connected to an external ultrasonic phased array detector. The external ultrasonic phased array detector emits ultrasonic waves through the transducer body, which then pass through the transducer body to form ultrasonic surface waves (5) on the test sample (6) that can be scanned in a fan shape or in a line. The ultrasonic surface waves are used to detect the test sample (6).

2. The ultrasonic phased array surface wave transducer according to claim 1, characterized in that, The transducer body includes an ultrasonic transducer wedge (1), a transducer wafer (2), and an ultrasonic transmission assembly. The ultrasonic transducer wedge (1) is placed on the test sample (6), the transducer wafer (2) is set on the ultrasonic transducer wedge (1), one end of the ultrasonic transmission assembly is connected to an external ultrasonic phased array detector, and the other end is inserted into the transducer wafer (2).

3. The ultrasonic phased array surface wave transducer according to claim 2, characterized in that, The ultrasonic transducer wedge (1) has an inclined surface, and the transducer wafer (2) is disposed on the inclined surface.

4. An ultrasonic phased array surface wave transducer according to claim 2, characterized in that, The transducer wafer (2) is adhered to the inclined surface of the ultrasonic transducer wedge (1) by means of silicone oil or machine oil.

5. An ultrasonic phased array surface wave transducer according to claim 2, characterized in that, The transducer wafer (2) has several ultrasonic transducer holes, which are distributed in an array on the transducer wafer (2). The ultrasonic transmission components are inserted into several ultrasonic transducer holes and form several ultrasonic beams on the test sample (6) through several ultrasonic transducer holes and ultrasonic transducer wedges (1). Several ultrasonic lines form ultrasonic surface waves (5) that can be scanned in a fan shape or in a line.

6. An ultrasonic phased array surface wave transducer according to claim 5, characterized in that, The ultrasonic transmission assembly includes a connector (4) and several cables (3). Several cables (3) are inserted into several ultrasonic transducer holes respectively. One end of the connector (4) is connected to several cables (3), and the other end is connected to an external ultrasonic phased array detector.

7. An ultrasonic phased array surface wave transducer according to claim 6, characterized in that, Several cables (3) are fixedly connected to the connectors (4) and several ultrasonic transducer holes by soldering.

8. An ultrasonic phased array surface wave transducer according to claim 1, characterized in that, The external ultrasonic phased array detector sets the ultrasonic waves emitted by the transducer body at an inclined angle on the surface of the test sample (6).

9. An ultrasonic phased array surface wave transducer according to claim 1, characterized in that, The surface of the test specimen (6) can be a straight groove or a V-shaped groove, used to calibrate the ultrasonic surface wave (5) formed by line scanning and sector scanning.

10. A method of using an ultrasonic phased array surface wave transducer, based on the ultrasonic phased array surface wave transducer according to any one of claims 1-9, characterized in that, The process includes the following: When the external ultrasonic phased array detector is started, the excitation circuit of the external ultrasonic phased array detector generates ultrasonic longitudinal waves through the transducer body. The ultrasonic longitudinal waves undergo waveform conversion on the test sample (6) and form ultrasonic surface waves (5) that can be scanned in a fan shape or in a line on the test sample (6). The ultrasonic surface waves are used to detect the test sample (6).