High efficiency transmission mechanism for wafers

Abstract

The application relates to the technical field of semiconductor equipment, and discloses a high-efficiency transmission mechanism for a wafer, which comprises a CST carrier unit, the CST carrier unit comprises a fixed base plate and a moving assembly installed on the fixed base plate, the moving assembly is limited to slide on the fixed base plate, a positioning assembly is fixedly installed on the fixed base plate, the positioning assembly is connected in sliding fit with the moving assembly, a power assembly is fixedly installed on the moving assembly, and an execution assembly is connected to one side of the power assembly; the fixed base plate is fixed in position, the fixed connection of the fixed base plate and the positioning assembly and the sliding fit between the moving assembly and the positioning assembly enable the power assembly to drive the moving assembly to move in limitation along the fixed base plate during operation; the high-efficiency transmission mechanism solves the problems of insufficient stroke and space mutual exclusion in the prior art, the internal structure of the device is complex, the space utilization rate of the equipment is low, the WPH is improved, and the working efficiency is higher.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, and particularly relates to a high-efficiency transmission mechanism for a wafer. BACKGROUND

[0002] In the semiconductor field, with the maturity of automation technology and the increasing requirement for cleanliness due to the reduction of feature size in the wafer production process, the wafer transmission of a modern integrated circuit production line widely adopts a VGA or OHT system to cooperate with a Mini Stocker device for automatic transmission. Especially in today's high integration, many different processing technologies of semiconductors basically realize the full-automatic flow transmission of a VGA / OHT-Mini Stocker-process device. Herein, the Mini-Stocker based on the OHT plays a key role in connecting the front-end fab and the back-end process device. A typical cooperation is that the front-end transmission OHT system is transmitted to the Mini Stocker, and then the Mini Stocker is transmitted to the vertical furnace. That is, the single-box CST body POD is placed on the multi-layer Shelf platform of the storage warehouse (Stocker) by the cooperation of the transmission mechanism (SMIF, Loader, etc.) and the Robot, and then the Robot transmits the CST body to the back-end process device through the Finger / Wrist Block. Generally, the process device is mass-produced, so the Stocker realizes the storage transmission-single piece to batch conversion function. At the same time, when the back-end process device is mass-produced, the Stocker can continue to store and transmit the CST body, greatly improving the production efficiency of the flow line. However, the addition of the OHT system also puts forward higher requirements for the transmission mechanism design of the Mini Stocker machine. Many problems need to be solved by using an updated perspective design, such as the space adaptation of the OHT system, the insufficient space volume rate, the limited space of the Loader, and the low production efficiency.

[0003] At present, the common 200mm wafer transmission carrier is mainly the SMIF POD. The OHT overhead crane system of the semiconductor chip production workshop is usually planned and set, and the space of the workshop is designed according to the process. In order to accommodate as many devices as possible, it is required that the floor area of the Stocker machine of the workshop device is as small as possible. At the same time, considering the space utilization and avoidance, the Stocker-Robot that transmits the CST body is usually realized based on the Z-axis motion + Arm-Wrist taking and placing motion. The Robot body has no X-axis stroke, which makes it necessary to have a transfer stroke transmission mechanism for linking the OHT to the X-axis of the Robot. At the same time, the long-stroke and short-space requirement needs to be considered. The traditional slide table single-axis motor drive design is difficult to meet the demand.

[0004] The most concerned index of the semiconductor production line is WPH (wafer transfer efficiency per unit time), and the long stroke, stable high speed (efficiency) and small space need to be considered, and a new transmission mechanism needs to be designed to meet the requirements.

[0005] In order to solve the above problems, the industry has been developing more efficient and reliable wafer transfer solutions. The ideal transmission mechanism should be able to realize efficient transmission in the limited space of the Mini Stocker, while having high stability, reliability and efficiency. SUMMARY

[0006] In order to solve the above problems, the industry has been developing more efficient and reliable wafer transfer solutions. The ideal transmission mechanism should be able to realize efficient transmission in the limited space of the Mini Stocker, while having high stability, reliability and efficiency.

[0007] A high-efficiency transmission mechanism for wafer includes a CST carrier unit, the CST carrier unit includes a fixed base plate and a moving assembly mounted on the fixed base plate, and the moving assembly is limited to slide on the fixed base plate, the fixed base plate is fixedly installed with a positioning assembly, and the positioning assembly is connected with the moving assembly through sliding fit, the moving assembly is fixedly installed with a power assembly, and the power assembly is connected with an execution assembly on one side;

[0008] The fixed base plate is fixedly installed, and the fixed base plate is fixedly connected with the positioning assembly, and the moving assembly is connected with the positioning assembly through sliding fit, so that the power assembly can drive the moving assembly to move along the fixed base plate during operation; at the same time, the moving assembly is fixedly connected with the power assembly, and the power assembly is fixedly connected with the execution assembly, and the execution assembly is slidably installed on the moving assembly, so that the operation of the power assembly further drives the execution assembly to produce corresponding displacement along the moving assembly.

[0009] As a preferred scheme of the present application, the power assembly includes a first fixed seat and a driving motor fixedly connected to the first fixed seat, the first fixed seat is connected with a synchronous part, and the other side of the synchronous part is connected with a second fixed seat.

[0010] As a preferred scheme of the present application, the positioning assembly and the execution assembly are fixedly connected to the power assembly, and the positioning assembly and the execution assembly are respectively located on both sides of the power assembly.

[0011] As a preferred scheme of the present application, the moving assembly comprises a moving base plate and a first sliding rail fixedly installed on one side of the moving base plate, and a second sliding rail is fixedly installed on the other side of the moving base plate, a third sliding rail is fixedly connected to the moving base plate, and the third sliding rail is located on the side close to the first sliding rail.

[0012] As a preferred scheme of the present application, the positioning assembly comprises a positioning fixed plate and a first sliding block connected to the lower side of the positioning fixed plate, and a first connecting piece is fixedly connected to the positioning fixed plate.

[0013] As a preferred scheme of the present application, the executing assembly comprises an executing seat and a second connecting piece fixedly installed on one side of the executing seat, and a second sliding block is connected to the lower end of the executing seat; the second sliding block is cooperatively and slidably arranged on the third sliding rail.

[0014] As a preferred scheme of the present application, the first connecting piece comprises a first mounting plate and a connecting plate fixedly connected to the first mounting plate, a first fixed plate is fixedly installed on one side of the connecting plate, and a first connecting groove is formed in the first fixed plate.

[0015] As a preferred scheme of the present application, the synchronous piece comprises a synchronous belt and a first synchronous shaft installed on one side of the synchronous belt, and a second synchronous shaft is arranged on the other side of the synchronous belt.

[0016] As a preferred scheme of the present application, the second connecting piece comprises a second mounting plate and a second fixed plate fixedly connected to one side of the second mounting plate, and a second connecting groove is formed in the second fixed plate.

[0017] As a preferred scheme of the present application, the first synchronous shaft and the second synchronous shaft are respectively installed on the first fixed seat and the driving motor.

[0018] The present application has the following advantages:

[0019] 1. By arranging the CST carrier unit, the positioning assembly and the executing assembly are fixedly connected to the power assembly, and the movement of the power assembly can make the moving assembly slide on the fixed base plate, because the positioning assembly is fixedly installed on the fixed base plate and the power assembly is fixedly installed on the moving assembly; at the same time, the movement of the power assembly can also drive the executing assembly to move, because the executing assembly is fixedly connected to the power assembly; by means of the simple single-shaft mechanism design, the limitations of insufficient stroke and space exclusion are solved, the complex stroke accumulation mechanism is replaced, the space is more compact, and more equipment volume is provided for the workshop.

[0020] 2、Through the setting of the CST carrier unit, the stroke of the moving assembly and the executing assembly can be enlarged by synchronous movement, the stroke interference of the mechanism can be avoided; the stroke of the executing assembly and the moving pulley is synchronous, that is, in the same time, the stroke can be run 1 times more than the same slide rail design, the transmission speed of the wafer can be greatly improved; at the same time, because of the front exploration design, the mechanism is also doubled back, the recovery time is reduced by half, based on this, when the WristBlock successfully takes the CST body, the Z-axis transmission mechanism SMIF can simultaneously transport the next CST body, avoid the process of "on duty" transportation due to stroke interference, and effectively improve the WPH.

[0021] 3、Through the setting of the auxiliary unit, the third slide rail can be replaced by the auxiliary unit, the dynamic balance stability of the auxiliary unit is increased, the possible movement difficulty caused by the unbalanced force of the third slide rail can be prevented, and the dustproof function is also considered. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the present application, the drawings needed in the following specific embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0023] Figure 1 The overall structure diagram in the present application;

[0024] Figure 2 The overall structure diagram of the CST carrier unit in the present application;

[0025] Figure 3 The front exploration structure diagram of the CST carrier unit in the present application;

[0026] Figure 4 The connection structure diagram of the moving assembly and the positioning assembly in the present application;

[0027] Figure 5 The explosion structure diagram of the positioning fixed plate and the first connecting piece in the present application;

[0028] Figure 6 The structure diagram of the power assembly in the present application;

[0029] Figure 7 The structure diagram of the synchronous piece in the present application;

[0030] Figure 8 The structure diagram of the connection between the first connecting piece, the synchronous belt and the second connecting piece in the present application;

[0031] Figure 9 : The schematic view of the explosion structure of the executing assembly in the application;

[0032] Figure 10 : The schematic view of the structure of the auxiliary unit in the application.

[0033] The reference signs are as follows:

[0034] 10, work device main unit; 11, wafer container CST Pod; 12, CST body; 13, CST base; 14, Z-axis conveying mechanism SMIF; 15, X-axis conveying transfer mechanism Loader;

[0035] 20, CST carrier unit; 21, fixed base plate; 22, moving assembly; 221, moving base plate; 222, first sliding rail; 223, second sliding rail; 224, third sliding rail; 23, positioning assembly; 231, positioning fixed plate; 232, first sliding block; 233, first connecting piece; 2331, first mounting plate; 2332, connecting plate; 2333, first fixed plate; 2334, first connecting groove; 24, power assembly; 241, first fixed seat; 242, driving motor; 243, synchronous piece; 2431, synchronous belt; 2432, first synchronous shaft; 2433, second synchronous shaft; 244, second fixed seat; 25, executing assembly; 251, executing seat; 252, second connecting piece; 2521, second mounting plate; 2522, second fixed plate; 2523, second connecting groove; 253, second sliding block;

[0036] 30, auxiliary unit; 31, connecting seat; 32, sliding assembly; 321, connecting belt; 322, intermediate connecting table; 323, first connecting shaft; 324, second connecting shaft; 33, intermediate connecting block. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the application.

[0038] Embodiment 1

[0039] Reference Figures 1-9As shown, this is the first embodiment of the present invention, providing a high-efficiency transmission mechanism for a wafer, including a main working unit 10, a CST carrier unit 20, and an auxiliary unit 30. The main working unit 10 includes a wafer container CST Pod 11 and a CST body 12 connected to its lower end. A CST base 13 is provided on the outside of the CST body 12, and a Z-axis transmission mechanism SMIF 14 is provided below the CST base 13. An X-axis transmission transfer mechanism Loader 15 is arranged on one side of the Z-axis transmission mechanism SMIF 14.

[0040] The wafer container CST Pod 11, CST body 12, and CST base 13 are assembled into one unit and mounted on the Z-axis transmission mechanism SMIF 14. Through the lifting and lowering movement of the Z-axis transmission mechanism SMIF 14, the CST body 12 is moved to the side of the X-axis transmission transfer mechanism Loader 15, and then the X-axis transmission transfer mechanism Loader 15 completes the transmission and reception of the CST body 12.

[0041] The CST carrier unit 20 includes a fixed base plate 21 and a movable component 22 mounted thereon, which can slide and limit its movement on the fixed base plate 21. A positioning component 23 is mounted on the fixed base plate 21, and the positioning component 23 and the movable component 22 are slidably connected. A power component 24 is mounted on the movable component 22, and an actuation component 25 is connected to one side of the power component 24.

[0042] The fixed base plate 21 provides fixed support for the overall mechanism, and has a slot on its side to facilitate the sliding movement of the moving component 22. The moving component 22 is disposed on the fixed base plate 21 and is guided and limited by sliding cooperation with the positioning component 23. The positioning component 23 is fixed to both sides of the fixed base plate 21 by bolts to ensure the smooth movement of the moving component 22.

[0043] Meanwhile, the power component 24 is fixedly connected to the moving component 22 by bolts, and the power component 24 is located on the upper side of the slot opened on the fixed base plate 21. The purpose of the slot on the fixed base plate 21 is to provide space for the power component 24 to move when the moving component 22 moves, so as to prevent it from affecting the sliding of the moving component 22. At the same time, one side of the power component 24 is connected to the positioning component 23, and the other side of the power component 24 is fixedly connected to the execution component 25.

[0044] Since the positioning component 23 is fixedly connected to the fixed base plate 21, when the power component 24 is operating, the moving component 22 can be moved on the fixed base plate 21 through the connection between the positioning component 23 and the power component 24. At the same time, due to the connection between the execution component 25 and the power component 24, and the sliding setting of the execution component 25 on the moving component 22, the execution component 25 moves synchronously on the moving component 22.

[0045] The power component 24 is bolted to the movable component 22 and positioned above the slot in the fixed base plate 21 to avoid interfering with the movement of the movable component 22. One side of the power component 24 is connected to the positioning component 23, and the other side is fixedly connected to the actuation component 25. Since the positioning component 23 is fixed to the fixed base plate 21, the power component 24 can drive the movable component 22 to slide along the fixed base plate 21 through its connection with the positioning component 23 during operation; at the same time, the actuation component 25 moves with the power component 24 and generates a corresponding sliding displacement on the movable component 22.

[0046] The movable component 22 includes a movable base plate 221 on which a first slide rail 222, a second slide rail 223, and a third slide rail 224 are fixed respectively. The first slide rail 222 and the second slide rail 223 are symmetrically arranged on both sides of the movable base plate 221, and the third slide rail 224 is located on the side closer to the first slide rail 222. Each slide rail is fixed to the movable base plate 221 by bolts.

[0047] The first slide rail 222, the second slide rail 223 and the third slide rail 224 are all fixed to the movable base plate 221 with bolts. The first slide rail 222 and the second slide rail 223 are symmetrically arranged on both sides of the movable base plate 221, so that the two positioning components 23 symmetrically connected to both sides of the fixed base plate 21 slide on the first slide rail 222 and the second slide rail 223 respectively. The first slide rail 222 is located on the side closer to the slot on the fixed base plate 21.

[0048] Meanwhile, the third slide rail 224 is connected to the side close to the first slide rail 222 and is connected to the actuation component 25. The power component 24 is connected between the first slide rail 222 and the third slide rail 224, so that the positioning component 23 and the actuation component 25 are both connected to the power component 24.

[0049] The positioning assembly 23 includes a positioning fixing plate 231 and a first slider 232 connected below it. A first connector 233 is fixed on the positioning fixing plate 231. The positioning fixing plate 231 is L-shaped, with one end fixed to the fixing base plate 21 and the other end slidingly engaged with the first slide rail 222 or the second slide rail 223 via the first slider 232. The first connector 233 is installed on the positioning fixing plate 231 located on the side of the first slide rail 222 for connecting to the power assembly 24.

[0050] The first connector 233 includes a first mounting plate 2331, a connecting plate 2332, and a first fixing plate 2333. The first mounting plate 2331 is fixed to the positioning fixing plate 231, the connecting plate 2332 is connected to the first fixing plate 2333, and the first fixing plate 2333 has a first connecting groove 2334 to form a fixing groove structure for connecting the power assembly 24.

[0051] Furthermore, one end of the first mounting plate 2331 is disposed on the positioning and fixing plate 231 and is fixedly connected by bolts. On the connecting plate 2332 integrally formed on one side of the first mounting plate 2331, it is bolted to the first fixing plate 2333. The first connecting groove 2334 is opened on the side of the first fixing plate 2333 near the connecting plate 2332. When the first fixing plate 2333 is connected to the first mounting plate 2331, the first connecting groove 2334 forms a fixing groove with the connecting plate 2332, which is used for installation connection with the power assembly 24.

[0052] The power assembly 24 includes a first fixed base 241, a drive motor 242, a synchronizing element 243, and a second fixed base 244. The first fixed base 241 and the second fixed base 244 are fixed to the movable base 221. The drive motor 242 is mounted on the first fixed base 241 and extends through a hole in the movable base 221 into a slot in the fixed base 21. The synchronizing element 243 is disposed between the first fixed base 241 and the second fixed base 244 and is connected to the positioning assembly 23 and the execution assembly 25.

[0053] The synchronizing component 243 includes a synchronizing belt 2431, a first synchronizing shaft 2432, and a second synchronizing shaft 2433. The first synchronizing shaft 2432 is mounted on a first fixed base 241, and the second synchronizing shaft 2433 is mounted on a second fixed base 244. The synchronizing belt 2431 is sleeved on both shafts. The drive motor 242 drives the first synchronizing shaft 2432 to rotate, thereby moving the synchronizing belt 2431. Through its connection with the positioning component 23 and the execution component 25, the moving component 22 and the execution component 25 move synchronously and in the same direction.

[0054] The actuation component 25 includes an actuation base 251, a second connector 252, and a second slider 253. The second connector 252 is fixed to the side of the actuation base 251 near the power component 24, and the second slider 253 is installed on the bottom of the actuation base 251 and slides in cooperation with the third slide rail 224.

[0055] The second connector 252 includes a second mounting plate 2521 and a second fixing plate 2522. The second fixing plate 2522 has a second connecting groove 2523 for connecting to the synchronous belt 2431. The first connector 233 and the second connector 252 are respectively connected to both sides of the synchronous belt 2431, and the synchronous displacement of the moving component 22 and the actuating component 25 is realized by the movement of the synchronous belt 2431.

[0056] Example 2

[0057] Combination Figures 2-4 and Figure 10As shown, this is the second embodiment of the present invention, which further adds an auxiliary unit 30 to the first embodiment to replace the original third slide rail 224 and second slider 253. The auxiliary unit 30 includes a connecting seat 31, a sliding component 32, and an intermediate connecting block 33. The connecting seat 31 is disposed on the movable base plate 221, the sliding component 32 is installed between the two connecting seats 31, and the intermediate connecting block 33 is fixed on the sliding component 32.

[0058] The sliding assembly 32 includes a connecting belt 321, an intermediate connecting platform 322, a first connecting shaft 323, and a second connecting shaft 324. The first connecting shaft 323 and the second connecting shaft 324 are rotatably mounted on two connecting seats 31, respectively. The connecting belt 321 is tensioned between the two shafts. The intermediate connecting platform 322 is fixed on the connecting belt 321 and connected to the intermediate connecting block 33.

[0059] The auxiliary unit 30 can replace the original third slide rail 224 and second slider 253, assisting the actuator 251 in movement. Its connecting belt 321 structure helps enhance dynamic balance stability and avoids movement problems caused by uneven force on a single slide rail. Furthermore, the connecting belt 321 can be made of dustproof material, thus also providing dustproof functionality.

[0060] Example 3

[0061] Reference Figure 1 - Figure 10 As shown, this is the third embodiment of the present invention. Based on embodiments 1 and 2, this embodiment provides the movement process of the device in its working state: First, the wafer container CST Pod 11, CST body 12, CST base 13 and Z-axis transfer mechanism SMIF 14 move downwards, so that CST body 12 is located on one side of X-axis transfer transfer mechanism Loader 15. Then, CST carrier unit 20 extends out and cooperates with CST body 12 to pick up CST body 12.

[0062] During the process of CST carrier unit 20 extending and picking up, firstly, the rotation of drive motor 242 drives the first synchronous shaft 2432 to rotate. Since the synchronous belt 2431 is sleeved on the first synchronous shaft 2432 and the second synchronous shaft 2433, the drive motor 242 drives the synchronous belt 2431 to rotate. At the same time, since the first connector 233 and the second connector 252 are respectively connected to both sides of the synchronous belt 2431, the movement of the synchronous belt 2431 tends to drive the positioning component 23 and the execution component 25 to move.

[0063] At this time, since the positioning plate 231 is fixedly connected to the fixed base plate 21, the movement of the power component 24 cannot drive the positioning component 23 to move. By moving the moving component 22 on the fixed base plate 21, the first slider 232 is slidably connected on the first slide rail 222 or the second slide rail 223, so that the moving component 22 moves on the fixed base plate 21.

[0064] At the same time, while the moving component 22 moves on the fixed base plate 21, since the execution component 25 is connected to the side of the timing belt 2431 opposite to the positioning component 23, the execution component 25 and the moving component 22 move synchronously and in the same direction; therefore, the distance that the execution component 25 moves on the fixed base plate 21 is twice the original distance.

[0065] Finally, by setting up the CST carrier unit 20, the stroke is amplified, and the mechanism is matched with the movable pulley to make a forward-extending design, which solves the compatibility problems of space, stroke and WPH; and the setting of the auxiliary unit 30 increases the dynamic balance stability, which can prevent the third slide rail 224 from having the possibility of uneven movement due to uneven force.

[0066] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A high efficiency transmission mechanism for a wafer, characterized by: The application relates to a CST carrier unit (20) which comprises a fixed base plate (21) and a moving assembly (22) mounted on the fixed base plate (21) and capable of limited sliding movement on the fixed base plate (21), a positioning assembly (23) is fixedly mounted on the fixed base plate (21) and is in sliding fit connection with the moving assembly (22), a power assembly (24) is fixedly mounted on the moving assembly (22) and one side of the power assembly (24) is connected with an execution assembly (25). The fixed base plate (21) is fixed in position, the fixed base plate (21) is fixedly connected with the positioning assembly (23), and the moving assembly (22) and the positioning assembly (23) are in sliding fit connection, so that the power assembly (24) can drive the moving assembly (22) to move along the fixed base plate (21) during operation; meanwhile, the moving assembly (22) is fixedly connected with the power assembly (24), the power assembly (24) is fixedly connected with the execution assembly (25), and the execution assembly (25) is slidably mounted on the moving assembly (22), so that the operation of the power assembly (24) further drives the execution assembly (25) to produce corresponding displacement along the moving assembly (22). The positioning assembly (23) and the execution assembly (25) are fixedly connected on the power assembly (24), and the positioning assembly (23) and the execution assembly (25) are respectively located on two sides of the power assembly (24).

2. The high efficiency transmission mechanism for wafer as claimed in claim 1, wherein: The power assembly (24) comprises a first fixing seat (241) and a driving motor (242) fixedly connected on the first fixing seat (241), a synchronous piece (243) is connected on the first fixing seat (241), and the other side of the synchronous piece (243) is connected with a second fixing seat (244).

3. The high efficiency transmission mechanism for wafer as claimed in claim 1 wherein: The moving assembly (22) comprises a moving base plate (221) and a first sliding rail (222) fixedly mounted on one side of the moving base plate (221), and a second sliding rail (223) is fixedly mounted on the other side of the moving base plate (221), a third sliding rail (224) is fixedly connected on the moving base plate (221) and located on the side close to the first sliding rail (222).

4. The high efficiency transmission mechanism for wafer as claimed in claim 1, wherein: The positioning assembly (23) comprises a positioning fixed plate (231) and a first sliding block (232) connected on the lower side of the positioning fixed plate (231), and the positioning fixed plate (231) is fixedly connected with a first connecting piece (233).

5. The high efficiency transmission mechanism for wafer as claimed in claim 1, wherein: The execution assembly (25) comprises an execution seat (251) and a second connecting piece (252) fixed on one side of the execution seat (251), and a second sliding block (253) is connected on the lower end of the execution seat (251); the second sliding block (253) is in fit sliding movement on the third sliding rail (224).

6. The high efficiency transmission mechanism for wafer as claimed in claim 4 wherein: The first connecting piece (233) comprises a first mounting plate (2331) and a connecting plate (2332) fixedly connected to the first mounting plate (2331), one side of the connecting plate (2332) is fixedly provided with a first fixing plate (2333), and the first fixing plate (2333) is provided with a first connecting groove (2334).

7. The high efficiency transmission mechanism for wafer as claimed in claim 2, wherein: The synchronous piece (243) comprises a synchronous belt (2431) and a first synchronous shaft (2432) mounted on one side of the synchronous belt (2431), and the other side of the synchronous belt (2431) is provided with a second synchronous shaft (2433).

8. The high efficiency transmission mechanism for wafer as claimed in claim 5 wherein: The second connecting piece (252) comprises a second mounting plate (2521) and a second fixing plate (2522) fixedly connected to one side of the second mounting plate (2521), and the second fixing plate (2522) is provided with a second connecting groove (2523).

9. The high efficiency transmission mechanism for wafer as claimed in claim 7, wherein: The first synchronous shaft (2432) and the second synchronous shaft (2433) are respectively mounted on the first fixing seat (241) and the driving motor (242).

Images