Ethercat slave gateway for semiconductor temperature control equipment

Abstract

The application provides an EtherCAT slave station gateway for a semiconductor temperature control device, comprising a hardware layer and a software layer: the hardware layer is an embedded semiconductor industrial device communication gateway, integrating a power supply module, a main control module, an Ethernet communication module, an EtherCAT slave station module and a 24V input / output port module; the software layer is an embedded software system with a layered architecture, divided into an application layer, a protocol layer and a hardware abstraction layer, realizing business logic processing, communication protocol conversion and software / hardware interaction decoupling. Through the cooperative work of hardware and software, the application can realize data transmission between a semiconductor production device host and a Chiller based on the EtherCAT protocol, improve the real-time performance, accuracy and system maintainability of data transmission, and adapt to the high-precision and high-stability requirements of temperature control in semiconductor production.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of automation control, and particularly relates to an EtherCAT slave station gateway for a semiconductor temperature control device. BACKGROUND

[0002] In a semiconductor manufacturing process, temperature control precision directly affects product quality and production yield. As a key auxiliary device, a semiconductor temperature control device (such as a Chiller) needs to interact with main production equipment in real time to achieve precise temperature regulation. With the development of industrial automation technology, the EtherCAT protocol has become one of the mainstream standards of industrial Ethernet communication due to its high real-time performance, high bandwidth and distributed control capability, and is widely used in the interconnection of devices in the precision manufacturing field of semiconductors.

[0003] However, the existing semiconductor temperature control device mostly uses traditional Modbus and other protocols for communication, and there is a protocol compatibility problem between the main production equipment based on the EtherCAT protocol. Data interaction needs to be realized through complex intermediate conversion equipment, which not only increases the system deployment cost, but also causes data transmission delay and reduces reliability due to multi-link conversion, and it is difficult to meet the microsecond-level response requirement of semiconductor production on temperature control. At the same time, the traditional conversion equipment mostly adopts single function design, and has low hardware integration and poor software extensibility, which cannot adapt to the individual communication needs of different types of temperature control devices, and brings inconvenience to system maintenance and upgrading. Therefore, it is an urgent need in the industry to develop an EtherCAT slave station gateway specially designed for semiconductor temperature control devices to solve the protocol compatibility problem and improve the communication efficiency and flexibility. SUMMARY

[0004] Therefore, the embodiments of the present application provide an EtherCAT slave station gateway for a semiconductor temperature control device, which can realize data transmission between a semiconductor production equipment host and a Chiller based on the EtherCAT protocol, improve the real-time performance, accuracy and system maintainability of data transmission, and adapt to the high-precision and high-stability requirement of semiconductor production on temperature control.

[0005] The technical scheme of the embodiments of the present application is implemented as follows:

[0006] The embodiment of the present application provides an EtherCAT slave station gateway for a semiconductor temperature control device, the gateway comprises: a hardware layer and a software layer; the hardware layer is an embedded semiconductor industrial device communication gateway, the embedded semiconductor industrial device communication gateway comprises a power supply module, a main control module, an Ethernet communication module, an EtherCAT slave station module and a 24V input and output port module; the software layer is an embedded software system adopting a layered architecture, the embedded software system comprises an application layer, a protocol layer and a hardware abstraction layer; the hardware layer and the software layer work cooperatively to realize data transmission based on an EtherCAT protocol between a semiconductor production device host and a semiconductor temperature control device Chiller.

[0007] The embodiment of the present application has the following beneficial effects:

[0008] Through the cooperative architecture design of the hardware layer and the software layer, efficient data interaction based on the EtherCAT protocol between the semiconductor production device host and the temperature control device (Chiller) is realized. The hardware layer integrates core modules such as power supply, main control, Ethernet communication, EtherCAT slave station and 24V input and output port, and meets the stable operation requirement in an industrial environment; the software layer adopts the layered design of the application layer, the protocol layer and the hardware abstraction layer, and realizes function decoupling and flexible expansion. The architecture effectively solves the problem of insufficient compatibility between the traditional temperature control device and the industrial Ethernet system, provides reliable communication support for real-time temperature monitoring and accurate control in the semiconductor production process, not only improves the real-time performance and accuracy of data transmission between devices, but also enhances the stability and maintainability of the system, and lays a key foundation for improving the production quality and efficiency of semiconductor products. BRIEF DESCRIPTION OF DRAWINGS

[0009] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0010] Figure 1 is a hardware structure diagram provided by the embodiment of the present application;

[0011] Figure 2 is a software structure diagram provided by the embodiment of the present application;

[0012] Figure 3 is a data transmission flow direction schematic diagram provided by the embodiment of the present application. DETAILED DESCRIPTION

[0013] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. It should be understood that the drawings in the present application are only intended to illustrate and describe the present application, and are not intended to limit the protection scope of the present application. In addition, it should be understood that the schematic drawings are not drawn according to the actual proportions. The flowcharts used in the present application show the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowcharts can not be implemented in sequence, and the steps without logical context relationship can be reversed in sequence or implemented simultaneously. In addition, one or more other operations can be added to the flowcharts or one or more operations can be removed from the flowcharts under the guidance of the content of the present application.

[0014] In the following description, "some embodiments" are related to a subset of all possible embodiments, but it can be understood that "some embodiments" can be the same subset or different subsets of all possible embodiments, and can be combined with each other without conflict.

[0015] In addition, the described embodiments are only some of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative labor are within the scope of protection of the present application.

[0016] In the following description, the terms "first\second\third" are only used to distinguish similar objects, and do not represent a specific order of the objects. It can be understood that "first\second\third" can be interchanged in a specific order or sequence as allowed, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0017] It should be noted that the term "comprising" will be used in the embodiments of the present application to indicate the presence of the features declared thereafter, but does not exclude the addition of other features.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used herein are for the purpose of describing the embodiments of the present application, not for limiting the present application.

[0019] Referring to Figure 1 and Figure 2 , Figure 1is a hardware structure diagram provided by an embodiment of the present application, Figure 2 is a software structure diagram provided by an embodiment of the present application, as shown in Figure 1 and Figure 2 An EtherCAT slave station gateway for a semiconductor temperature control device is provided by an embodiment of the present application, and the gateway comprises a hardware layer and a software layer. The hardware layer is an embedded semiconductor industrial device communication gateway, which comprises a power supply module, a master control module, an Ethernet communication module, an EtherCAT slave station module, and a 24V input / output port module. The software layer is an embedded software system adopting a layered architecture, which comprises an application layer, a protocol layer, and a hardware abstraction layer. The hardware layer and the software layer work cooperatively to realize data transmission between a semiconductor production device host and a semiconductor temperature control device Chiller based on an EtherCAT protocol.

[0020] The above embodiment defines the basic structure and core functions of an EtherCAT slave station gateway for a semiconductor temperature control device. The gateway serves as a communication bridge between a semiconductor production device host and a semiconductor temperature control device (Chiller) and adopts an architecture design in which hardware and software work cooperatively.

[0021] The hardware layer adopts the form of an embedded semiconductor industrial device communication gateway, which integrates a power supply module for ensuring device operation, a master control module for data processing, an Ethernet communication module for network connection, an EtherCAT protocol supported slave station module, and a 24V input / output port module for meeting industrial control requirements.

[0022] The software layer adopts a layered architecture design, realizes business logic processing through the application layer, realizes communication protocol conversion through the protocol layer, and realizes software and hardware interaction through the hardware abstraction layer, so as to ensure that the functions of each layer are clear and easy to maintain.

[0023] The above-mentioned mode solves the problem of efficient data transmission between a semiconductor temperature control device and a host based on an EtherCAT protocol and provides reliable communication guarantee for temperature control in the semiconductor production process.

[0024] In some embodiments, the power supply module is a DC 24V power supply module, which is used to provide 24V direct current power for the entire hardware system and convert it into 3.3V power required by chips on the board; the master control module comprises a system clock unit, a storage unit, a communication interface unit, and a GPIO control unit, the system clock unit is used to provide a system clock signal, the storage unit comprises a Flash and a RAM memory, the communication interface unit is used to process various communication protocols, and the GPIO control unit is used to control general input / output ports.

[0025] Here, the power supply module adopts DC 24V power supply design, which meets the general power supply standard of industrial equipment and can provide stable 24V DC power supply for the entire hardware system. At the same time, the module has power conversion function, which can convert 24V power supply into 3.3V power supply required by the chip on the board, meeting the power supply needs of different components.

[0026] The master control module is the core processing unit of the gateway, which integrates system clock unit, storage unit, communication interface unit and GPIO control unit. Among them, the system clock unit provides stable clock signal for the whole system, ensuring the cooperative work of each module; the storage unit includes Flash and RAM memory, which are used for program storage and temporary data processing respectively; the communication interface unit is responsible for processing various communication protocols and realizing data format conversion; the GPIO control unit is used to control general input and output ports to meet the control needs of external devices.

[0027] The above-mentioned mode ensures the stability and reliability of the gateway hardware system, providing basic guarantee for the normal operation of the whole gateway.

[0028] In some embodiments, the Ethernet communication module is provided with an RJ45 physical interface and an Ethernet chip, the RJ45 physical interface is used to realize network connection, and the Ethernet chip is used to process Ethernet communication protocol; the EtherCAT slave module is provided with an RJ45 physical interface, an EtherCAT slave chip, an EEPROM chip and a slave ID unit, the RJ45 physical interface is used for network connection, the EtherCAT slave chip is used to realize EtherCAT slave function, the EEPROM chip is used to store configuration information, and the slave ID unit is used to manage slave identification; the 24V input and output port module includes 16 input ports and 8 output ports, the 16 input ports are used to receive 16 24V digital input signals, and the 8 output ports are used to provide 8 24V digital output control.

[0029] Here, the Ethernet communication module is equipped with an RJ45 physical interface and an Ethernet chip, the RJ45 interface realizes network connection at the physical layer, and the Ethernet chip is responsible for processing Ethernet communication protocol, ensuring that the gateway can transmit data through Ethernet.

[0030] The EtherCAT slave module is the core component of the EtherCAT communication function, which contains an RJ45 physical interface for EtherCAT network connection, an EtherCAT slave chip for slave function, an EEPROM chip for storing device configuration information, and a slave ID unit for managing slave identification, ensuring accurate identification and communication in a multi-device network.

[0031] The 24V input and output port module provides 16 input ports and 8 output ports, which can meet the general control requirements of semiconductor temperature control equipment. The 16 input ports are used to receive 24V digital input signals from external devices, and the 8 output ports are used to provide 24V digital output control signals to external devices.

[0032] The above method enables the gateway to adapt to communication and control requirements in industrial environments, ensuring the accuracy and real-time performance of data transmission.

[0033] In some embodiments, the application layer includes a device management module, a data processing module, and a communication management module. The device management module is responsible for hardware ID management, device configuration, and state monitoring. The data processing module is used for unit conversion, data verification, and cache management. The communication management module is used to manage object dictionaries, PDO mapping, and SDO instruction control. The protocol layer includes EtherCAT slave protocol and Modbus TCP protocol. The EtherCAT slave protocol is used to implement industrial Ethernet communication, including state machine management, CoE service, and data exchange control functions. The Modbus TCP protocol is used to provide standard industrial communication protocol support and is responsible for message encoding and parsing. The hardware abstraction layer includes STM32 HAL driver, peripheral driver, and interrupt management. The STM32 HAL driver is a hardware abstraction interface based on STM32 microcontroller. The peripheral driver is used to drive GPIO and timer. The interrupt management is used to handle hardware interrupts and event responses.

[0034] Here, the application layer is the top layer of the software system, which includes a device management module, a data processing module, and a communication management module. The device management module is responsible for hardware ID management, device configuration, and state monitoring to ensure normal operation of the device. The data processing module handles unit conversion, data verification, and cache management to ensure the accuracy and effectiveness of the data. The communication management module manages object dictionaries, PDO mapping, and SDO instruction control to achieve efficient communication data processing.

[0035] The protocol layer implements the processing function of the communication protocol, including EtherCAT slave protocol and Modbus TCP protocol. The EtherCAT slave protocol implements industrial Ethernet communication, including state machine management, CoE service, and data exchange control functions. The Modbus TCP protocol provides standard industrial communication protocol support and is responsible for message encoding and parsing, enabling the gateway to communicate with devices that support the Modbus protocol.

[0036] The hardware abstraction layer realizes the interaction between software and hardware, including STM32 HAL driver, peripheral driver and interrupt management. The STM32 HAL driver is a hardware abstraction interface based on STM32 microcontroller, which simplifies the hardware operation; the peripheral driver is used to drive GPIO, timer and other peripherals; the interrupt management is used to handle hardware interrupts and event responses, and improve the real-time performance of the system.

[0037] The layered architecture design of the above software layer makes the functions of each layer independent, facilitates software development, maintenance and upgrading, and improves the reliability and scalability of the system.

[0038] In some embodiments, an object dictionary is further included, which includes object data and dictionary addresses corresponding to station basic information, equipment identification information, a timestamp, a PDO index address, an input type Chiller data list, an output type Chiller data list, Chiller configuration data, Chiller operation information, Chiller alarm information, vendor custom information and Chiller instructions;

[0039] The dictionary address of the slave station basic information is 0x1000-0x100F, which is used to describe the device basic attribute and version information; the dictionary address of the device identification information is 0x1018, which is a standard Identity object and includes the manufacturer ID, product code, version number and serial number; the dictionary address of the timestamp is 0x10F8, which is used to record the device local time or synchronization timestamp; the PDO index address includes RxPDO Mapping and TxPDO Mapping, the dictionary address of the RxPDO Mapping is 0x1600-0x19FF, which is used to define the slave station receiving process data mapping, and the dictionary address of the TxPDO Mapping is 0x1A00-0x1BFF, which is used to define the slave station sending process data mapping; the dictionary address of the input type Chiller data list is 0x6000-0x6FFF, which is the process mapping source of the Chiller measurement and state read-only data; the dictionary address of the output type Chiller data list is 0x7000-0x7FFF, which is the control setting and command process data source issued to the Chiller; the dictionary address of the Chiller configuration data is 0x8000-0x8FFF, which is used to store the device configuration and parameters and has the backup and power failure retention function; the dictionary address of the Chiller running information is 0x9000-0x9FFF, which is used to store the running statistics and diagnosis information; the dictionary address of the Chiller alarm information is 0xF380-0xF3FF, which is the semiconductor SDP alarm and error object family; the dictionary address of the manufacturer self-defined information is 0xF500-0xF9F, which is used to store the manufacturer and firmware identification, serial number, device name and module list; and the dictionary address of the Chiller instruction is 0xFBF0-0xFFFF, which is the management and maintenance command object and has the read-write callback to guarantee the process and verification.

[0040] Here, the object dictionary includes multiple types of object data and corresponding dictionary addresses such as the slave station basic information, the device identification information, the timestamp, the PDO index address, the input type Chiller data list, the output type Chiller data list, the Chiller configuration data, the Chiller running information, the Chiller alarm information, the manufacturer self-defined information and the Chiller instruction.

[0041] The slave basic information (0x1000-0x100F) is used to describe the device basic attributes and version information; the device identification information (0x1018) is a standard Identity object, containing the manufacturer ID, product code, version number and serial number, used for device identification; the timestamp (0x10F8) is used to record the device local time or synchronization timestamp; the PDO index address includes RxPDO Mapping (0x1600-0x19FF) and TxPDO Mapping (0x1A00-0x1BFF), respectively used to define the slave receiving and sending process data mapping; the input type Chiller data list (0x6000-0x6FFF) is the process mapping source of Chiller measurement, state read-only data; the output type Chiller data list (0x7000-0x7FFF) is the control setting, command process data source issued to the Chiller; the Chiller configuration data (0x8000-0x8FFF) is used to store the device configuration and parameters, and has the backup and power failure retention function; the Chiller running information (0x9000-0x9FFF) is used to store the running statistics and diagnosis information; the Chiller alarm information (0xF380-0xF3FF) is a semiconductor SDP alarm, error object family; the manufacturer self-defined information (0xF500-0xF9F) is used to store the manufacturer and firmware identification and other information; and the Chiller instruction (0xFBF0-0xFFFF) is a management, maintenance command object.

[0042] The above object dictionary realizes the standardized management and efficient interaction of device data, so that different devices can accurately understand and process data, and improves the compatibility and communication efficiency of the system.

[0043] In some embodiments, the EtherCAT slave gateway of the semiconductor temperature control device adopts dynamic resource configuration, the EtherCAT slave gateway of the semiconductor temperature control device adopts dynamic resource configuration, the dynamic resource configuration is based on module index dynamic binding and mapping configuration reading and caching implementation, and when starting, the RxPDO, TxPDO and process data objects of each module are automatically calculated and bound according to the module quantity and a predefined index rule, so as to realize zero-copy access of homogeneous multi-modules; in the running period, the currently effective PDO distribution and mapping are read, the index, sub-index and bit width of each mapping item are parsed into a unified structure and cached; when TxPDO combination is used for input data reporting, the mapping items are traversed according to the current TxPDO distribution order, bit-level accumulation and byte alignment packaging are performed on Boolean / state bits, offset-based fast copying is performed on analog quantities and fixed-length fields, and priority packaging is provided for abnormality, latching abnormality and key health states; when RxPDO resolution is used for output command issuing, the input frame is parsed according to the current RxPDO distribution order, Boolean / bit-controlled quantities are accurately written back according to bit masks, analog quantities and fixed-length fields are written back according to object dictionary offsets; based on bit-level packaging compression, the pre-parsing cache of the mapping structure is used to reduce the calculation overhead in the loop, and high-frequency / critical fields are preferentially processed through sequential layout; after the master station modifies the PDO distribution and mapping through SDO, the cache is automatically refreshed and combination and resolution are immediately performed according to the new mapping, and the default TxPDO mapping is compatible.

[0044] Here, the dynamic resource configuration adopts a "module index dynamic binding + mapping configuration reading and caching" architecture, automatically calculates and binds the RxPDO, TxPDO and process data objects of each module according to the module quantity and a predefined index rule when starting, realizes zero-copy access of homogeneous multi-modules, and reduces the overhead of data transmission.

[0045] In the running period, the currently effective PDO distribution and mapping are read, the index, sub-index and bit width of each mapping item are parsed into a unified structure and cached, and the data processing speed is improved. When TxPDO combination (input data reporting) is performed, the mapping items are traversed according to the current TxPDO distribution order, bit-level accumulation and byte alignment packaging are performed on Boolean / state bits, offset-based fast copying is performed on analog quantities and fixed-length fields, and priority packaging is provided for abnormality, latching abnormality and other key health states, so as to ensure that important data is reported in time. When RxPDO resolution (output command issuing) is performed, the input frame is parsed according to the current RxPDO distribution order, Boolean / bit-controlled quantities are accurately written back according to bit masks, analog quantities and fixed-length fields are written back according to object dictionary offsets, and accurate command execution is ensured.

[0046] Meanwhile, bit-level packing compression is introduced, the pre-parsing cache of the mapping structure is used to reduce the calculation overhead in the loop, and the sequential layout is used to give priority to the high-frequency / critical fields, so that the efficiency is further improved. When the master station modifies the PDO allocation and mapping through SDO, the algorithm can automatically refresh the cache and perform the combination and parsing according to the new mapping in real time, and is compatible with the default TxPDO mapping, thereby improving the flexibility and adaptability of the system.

[0047] The application of the dynamic resource configuration enables the gateway to flexibly configure resources according to actual needs, and improves the data transmission efficiency and the response speed of the system.

[0048] In some embodiments, a hardware ID lock is further included, the underlying hardware ID secure storage area provides a device unique identifier, and has a read-only or one-time programmable attribute; the intermediate layer identity authentication and key negotiation logic triggers the identity authentication process when the master station establishes a connection or switches to a critical state, the slave station reads the device ID and authentication material of the hardware security area, participates in the random challenge issued by the master station, generates a one-time response, so that the master station checks the response according to the agreed verification rule and key material; the upper layer session-level security binding and access control establishes a master-slave security binding relationship after the identity authentication is passed, the binding content includes the master station identifier, the session key derivation parameter, the binding validity period and the session policy, the object access and state migration are controlled during the binding period, the session needs to be verified for renewal when it expires, and the binding is revoked and falls back to a restricted state when abnormal disconnection or tampering is detected.

[0049] Here, the hardware ID lock builds a three-layer security architecture of “hardware ID secure storage area-identity authentication and key negotiation logic-session-level security binding and access control”. The underlying hardware ID secure storage area provides a device unique identifier, and has a read-only or one-time programmable attribute, ensuring the uniqueness and non-tamperability of the device identity.

[0050] The intermediate layer identity authentication and key negotiation logic triggers the identity authentication process when the master station establishes a connection or switches to a critical state. The slave station reads the device ID and authentication material of the hardware security area, participates in the random challenge issued by the master station, generates a one-time response, and the master station checks the response according to the agreed verification rule and key material, ensuring the legality of the connection.

[0051] The upper layer session-level security binding and access control establishes a “master-slave security binding relationship” after the identity authentication is passed, the binding content includes the master station identifier, the session key derivation parameter, the binding validity period and the session policy. The object access and state migration are controlled during the binding period, only authorized operations can be executed; the session needs to be verified for renewal when it expires, and the binding is revoked and falls back to a restricted state when abnormal disconnection or tampering is detected, preventing unauthorized access and data leakage.

[0052] The hardware ID lock effectively guarantees the security of communication between the gateway and the host station, prevents unauthorized access of devices and illegal access of data, and improves the security of the entire system.

[0053] In some embodiments, the data transmission process includes: the EtherCAT master station sends control commands to the gateway, the gateway receives and parses the EtherCAT PDO data, converts it into Modbus TCP function codes, IO signal quantities, and then sends it to the Modbus TCP device and the Chiller sensor through a TCP connection; the gateway periodically polls the Modbus TCP device and the IO signal quantity, reads the device state and parameter data, converts it into EtherCAT PDO format, and responds to the data request of the EtherCAT master station.

[0054] Please refer to Figure 3 , Figure 3 is a data transmission flow diagram provided by the embodiments of the present application, as shown in Figure 3 in the data downlink direction (from the EtherCAT master station to the Modbus TCP device and the Chiller sensor), the EtherCAT master station sends control commands to the gateway, the gateway receives and parses these EtherCAT PDO data, converts it into Modbus TCP function codes, IO signal quantities, and other data formats suitable for target device processing, and then sends it to the Modbus TCP device and the Chiller sensor through a TCP connection, realizing the control of the target device.

[0055] In the data uplink direction (from the Modbus TCP device and the Chiller sensor to the EtherCAT master station), the gateway periodically polls the Modbus TCP device and the IO signal quantity, reads the state and parameter data of the device, and then converts these data into EtherCAT PDO format to respond to the data request of the EtherCAT master station, so that the master station can timely understand the running state of the device.

[0056] The above-mentioned bidirectional data transmission process realizes the data interaction between the EtherCAT master station and the Modbus TCP device and the Chiller sensor, ensures the accurate issuance of control commands and the timely feedback of device state, and provides a guarantee for the precise control of semiconductor temperature control devices.

[0057] In some embodiments, the dynamic resource configuration algorithm performs a neglect strategy on sub-index out-of-bound and invalid mapping items; when the bit width is not an integer byte, the residual bits are aligned and written back according to the rules; the writing order of the object dictionary offset is followed; only in the PRE-OP stage is the adjustment of allocation and mapping allowed, and in the OP stage only stable combination and analysis are performed.

[0058] Here, the algorithm ignores the out-of-bound sub-index and invalid mapping items, avoiding the impact of abnormal data on the system; when the bit width is not an integer byte, the residual bits are aligned and written back according to the rules, ensuring the integrity and accuracy of the data; and the writing order of the object dictionary offset is strictly followed to prevent data writing errors.

[0059] Meanwhile, the algorithm only allows allocation and mapping adjustment in the PRE-OP phase, and only performs stable combination and resolution in the OP phase, which ensures the stability and consistency of data processing in the normal operation phase (OP phase) of the device, and avoids interference of configuration adjustment on real-time data transmission.

[0060] The above reliability guarantee measures enable the dynamic resource configuration algorithm to work stably in complex industrial environments, improving the reliability of the gateway and the accuracy of data transmission.

[0061] In some embodiments, the hardware ID lock supports updating the binding strategy and key parameters of the master station under non-stop conditions; challenge-response failure, session replay, master station identifier change, and missing authentication material trigger alarm object reporting and access degradation; continuous failure enters a lock window; authentication material and session key are managed hierarchically, device-level root identifier is only used for identity authorization, and session-level dynamic key is only used for data integrity and access control of the current connection; key operations need to be performed in a context that has been bound and allowed by the policy.

[0062] Here, the hardware ID lock supports updating the binding strategy and key parameters of the master station under non-stop conditions, facilitating system maintenance and upgrading without affecting normal operation of the device.

[0063] When challenge-response failure, session replay, master station identifier change, and missing authentication material occur, the mechanism triggers alarm object reporting and access degradation, discovers and responds to security threats in a timely manner; and continuous failure enters a lock window to prevent malicious attacks.

[0064] Authentication material and session key are managed hierarchically, device-level root identifier is only used for identity authorization, and session-level dynamic key is only used for data integrity and access control of the current connection, which improves the security of the key. Key operations need to be performed in a context that has been bound and allowed by the policy, ensuring the legality and security of the operation.

[0065] The above-mentioned manner makes the hardware ID lock mechanism more perfect, further improves the security and applicability of the gateway, and can better cope with various security challenges.

[0066] In summary, the embodiments of the present application have the following beneficial effects:

[0067] Through the cooperative design of the hardware layer and the software layer, efficient data transmission between the host of the semiconductor production equipment and the temperature control equipment based on the EtherCAT protocol is realized, the layered architecture of the software and hardware design improves the stability and maintainability of the system, the object dictionary system realizes the standardized management of the device data, the dynamic resource configuration algorithm improves the communication efficiency and flexibility through zero-copy access, bit-level compression and other optimizations, the hardware ID lock mechanism builds a multi-level security protection to ensure the communication security; at the same time, the complete data transmission process ensures the accurate interaction of the control command and the state data, and various reliability protection measures further enhance the adaptability of the system in the industrial environment. In conclusion, the embodiment of the application solves the compatibility problem of the traditional temperature control equipment and the industrial Ethernet system, improves the precision, real-time performance and safety of temperature control in the semiconductor production process, helps to improve the production quality and efficiency of semiconductor products, and has significant industrial application value.

[0068] Those skilled in the art can clearly understand that, for the convenience and brevity of the description, the specific working process of the system and device described above can refer to the corresponding process in the method embodiment, and will not be described herein. In the several embodiments provided in the present application, it should be understood that the disclosed system, device and method can be implemented by other means. The device embodiments described above are only schematic, for example, the division of the modules is only a logical function division, and actual implementation can have another division manner, for example, a plurality of modules or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the displayed or discussed each other can be through some communication interface, indirect coupling or communication connection between the devices or modules, which can be electrical, mechanical or other forms.

[0069] The modules described as separate components can or can not be physically separated, and the components shown as modules can or can not be physical units, i.e. they can be located in one place or distributed on multiple network units. Part or all of the units can be selected to achieve the purpose of the embodiment of the present application according to actual needs.

[0070] In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit.

[0071] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto, any skilled person in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An EtherCAT slave gateway for semiconductor temperature control equipment, characterized in that, The gateway comprises a hardware layer and a software layer. The hardware layer is an embedded semiconductor industrial equipment communication gateway, which includes a power supply module, a main control module, an Ethernet communication module, an EtherCAT slave module, and a 24V input / output port module. The software layer is an embedded software system with a layered architecture, which includes an application layer, a protocol layer, and a hardware abstraction layer. The hardware layer and the software layer work together to realize data transmission between the semiconductor production equipment host and the semiconductor temperature control equipment (Chiller) based on the EtherCAT protocol. The EtherCAT slave gateway of the semiconductor temperature control device adopts dynamic resource configuration. This dynamic resource configuration is based on dynamic binding and mapping configuration reading and caching of module indexes. At startup, based on the number of modules and predefined index rules, it automatically calculates and binds the RxPDOs, TxPDOs, and their process data objects for each module to achieve zero-copy access to homogeneous multi-modules. During runtime, it reads the currently effective PDO allocations and mappings, parses the index, sub-index, and bit width of each mapping item into a unified structure, and caches it. When TxPDO combinations are used for input data reporting, the mapping items are traversed according to the current TxPDO allocation order, and bit-level accumulation is performed on the status bits. Byte-aligned packing is used to quickly copy analog quantities and fixed-length fields by offset, and priority packing is provided for critical health states with abnormalities; RxPDO parsing is used to parse input frames according to the current RxPDO allocation order when output commands are issued, accurately write back Boolean / bit control quantities by bitmask, and write back analog quantities and fixed-length fields by object dictionary offset; based on bit-level packing compression, the pre-parsing cache of the mapping structure is used to reduce the computational overhead within the loop, and high-frequency / critical fields are processed first through sequential layout; after the master station modifies the PDO allocation and mapping through SDO, the cache is automatically refreshed and the combination and parsing are performed immediately according to the new mapping, while being compatible with the default TxPDO mapping; It also includes a hardware ID lock. The underlying hardware ID secure storage area provides a unique device identifier and has read-only or one-time programmable attributes. The authentication and key negotiation logic of the middle layer triggers the authentication process when the master station establishes a connection or switches to a critical state. The slave station reads the device ID and authentication materials from the hardware ID secure storage area, participates in the random challenge issued by the master station, and generates a one-time response so that the master station can verify the response according to the agreed verification rules and key materials. The upper-layer session-level security binding and access control establish a master-slave security binding relationship after successful authentication. The binding content includes the master station identifier, session key derivation parameters, binding validity period and session policy. During the binding period, object access and state transition are controlled. Session expiration requires renewal verification. Abnormal disconnection or tampering detection triggers binding revocation and fallback to a restricted state.

2. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, The power supply module is a DC24V power supply module, which provides 24V DC power to the entire hardware system and converts it to the 3.3V power required by the chips on the board. The main control module includes a system clock unit, a storage unit, a communication interface unit, and a GPIO control unit. The system clock unit provides the system clock signal, the storage unit includes Flash and RAM memories, the communication interface unit processes various communication protocols, and the GPIO control unit controls the general purpose input / output ports.

3. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, The Ethernet communication module is equipped with an RJ45 physical interface and an Ethernet chip. The RJ45 physical interface is used for network connection, and the Ethernet chip is used for processing Ethernet communication protocols. The EtherCAT slave module is equipped with an RJ45 physical interface, an EtherCAT slave chip, an EEPROM chip, and a slave ID unit. The RJ45 physical interface is used for network connection, the EtherCAT slave chip is used to implement EtherCAT slave functions, the EEPROM chip is used to store configuration information, and the slave ID unit is used to manage slave identifiers. The 24V input / output port module includes 16 input ports and 8 output ports. The 16 input ports are used to receive 16 24V digital input signals, and the 8 output ports are used to provide 8 24V digital output control.

4. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, The application layer includes a device management module, a data processing module, and a communication management module. The device management module is responsible for hardware ID management, device configuration, and status monitoring. The data processing module is used for unit conversion, data verification, and cache management. The communication management module is used for managing the object dictionary, PDO mapping, and SDO instruction control. The protocol layer includes the EtherCAT slave protocol and the Modbus TCP protocol. The EtherCAT slave protocol is used to implement industrial Ethernet communication, including state machine management, CoE service, and data exchange control functions. The Modbus TCP protocol is used to provide support for standard industrial communication protocols and is responsible for message encoding and parsing. The hardware abstraction layer includes the STM32 HAL driver, peripheral driver, and interrupt management. The STM32 HAL driver is a hardware abstraction interface based on the STM32 microcontroller. The peripheral driver is used to drive GPIO and timers. The interrupt management is used to handle hardware interrupts and event responses.

5. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, It also includes an object dictionary, which includes slave basic information, device identification information, timestamp, PDO index address, input Chiller data list, output Chiller data list, Chiller configuration data, Chiller operation information, Chiller alarm information, manufacturer-defined information, and object data and dictionary addresses corresponding to Chiller commands. The dictionary address for the slave station's basic information is 0x1000–0x100F, used to describe the device's basic attributes and version information; the dictionary address for the device identification information is 0x1018, which is a standard Identity object, including the manufacturer ID, product code, version number, and serial number; the dictionary address for the timestamp is 0x10F8, used to record the device's local time or synchronization timestamp; the PDO index address includes RxPDO Mapping and TxPDO Mapping, the dictionary address for RxPDO Mapping is 0x1600–0x19FF, used to define the slave station's received process data mapping, and TxPDO... The mapping dictionary addresses are 0x1A00–0x1BFF, used to define the slave station's data mapping process; the input Chiller data list dictionary addresses are 0x6000–0x6FFF, serving as the source of Chiller measurement and status read-only data mapping process; the output Chiller data list dictionary addresses are 0x7000–0x7FFF, serving as the source of control settings and command process data sent to Chiller; and the Chiller configuration data dictionary addresses are 0x8000–0x8FFF, used to store device configurations and parameters, and includes backup functionality. The system includes: power-off retention function; the dictionary address for the Chiller operation information is 0x9000–0x9FFF, used to store operation statistics and diagnostic information; the dictionary address for the Chiller alarm information is 0xF380–0xF3FF, representing semiconductor SDP alarms and error object families; the dictionary address for the manufacturer-defined information is 0xF500–0xF9FF, used to store manufacturer and firmware identifiers, serial numbers, device names, and module lists; and the dictionary address for the Chiller instructions is 0xFBF0–0xFFFF, representing management and maintenance command objects, with read / write callbacks to ensure process and verification.

6. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, The data transmission process includes: the EtherCAT master station sends control commands to the gateway; the gateway receives and parses the EtherCAT PDO data, converts it into Modbus TCP function codes and IO semaphores, and then sends it to the Modbus TCP device and the Chiller sensor via a TCP connection; the gateway periodically polls the Modbus TCP device and IO semaphores, reads the device status and parameter data, converts it into EtherCAT PDO format, and responds to the data requests from the EtherCAT master station.

7. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, The algorithm for dynamic resource allocation implements an ignore strategy for sub-index out-of-bounds and invalid mapping items; ensures that residual bits are aligned and written back according to rules when the bit width is not an integer byte; follows the writing order of object dictionary offsets; and allows adjustment of allocation and mapping only in the PRE-OP stage, while only stable combination and parsing are performed in the OP stage.

8. The EtherCAT slave gateway for semiconductor temperature control equipment according to claim 1, characterized in that, The hardware ID lock supports updating the binding policy and key parameters of the master station without downtime; challenge-response failure, session replay, master station identifier change, and missing authentication materials trigger alarm object reporting and access degradation; Continuous failures will result in a locked window; authentication materials and session keys are managed hierarchically, with the device-level root identifier used only for identity verification and the session-level dynamic key used only for data integrity and access control of the current connection; critical operations must be performed in a bound context that is permitted by the policy.

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