Method for capturing fluorine-containing greenhouse gases

Abstract

The present application belongs to the technical field of gas capture, and particularly relates to a method for capturing fluorine-containing greenhouse gas. In a dark environment, an adsorbent is used to adsorb fluorine-containing greenhouse gas. The adsorbent is a polymer containing cuprous ions and iodine ions, and the chemical formula is CuI(L), wherein L is a weak bridging nitrogen-containing ligand. After the adsorption of the adsorbent reaches saturation or the adsorption time reaches a set time, the adsorbent is irradiated, the adsorbent releases the absorbed fluorine-containing greenhouse gas, and the regeneration of the adsorbent is completed. The present application can absorb fluorine-containing greenhouse gas in waste gas at normal temperature and pressure, and can desorb fluorine-containing greenhouse gas by irradiation at normal temperature and pressure to realize the regeneration of the adsorbent. The regeneration energy consumption is low, the implementation is convenient, and the operation cost is reduced.

Description

Technical Field

[0001] This invention belongs to the field of gas capture technology, and in particular to a method for capturing fluorine-containing greenhouse gases. Background Technology

[0002] Industries such as semiconductor manufacturing, fluorochemical production, and refrigerant production generate fluorinated greenhouse gases including HFCs, SF6, NF3, and PFCs. These gases have a far stronger greenhouse effect than carbon dioxide and are major components of the six types of greenhouse gases explicitly targeted for control under the Kyoto Protocol. Large-scale emissions of these gases exacerbate global warming and damage the ozone layer. Therefore, it is necessary to reduce emissions of fluorinated greenhouse gases.

[0003] Currently, the most common method for capturing fluorine-containing greenhouse gases is adsorption. For example, patent application CN202311270432.X discloses a method for capturing fluorine-containing greenhouse gases with an adsorption time of 100–3000 h⁻¹. -1 Industrial exhaust gas containing fluorinated greenhouse gases is introduced at air velocity into a trap containing a modified adsorbent, wherein the fluorinated greenhouse gases include at least carbon tetrafluoride gas; the modified adsorbent adsorbs the fluorinated greenhouse gases in the incoming industrial exhaust gas at an adsorption temperature of 10–90°C, and adsorption stops when the concentration of carbon tetrafluoride in the outgoing industrial exhaust gas drops to 0.1–1000 ppm; the modified adsorbent is a metal cation modified molecular sieve.

[0004] Metal cation modified molecular sieves can effectively adsorb fluorine-containing greenhouse gases, but during regeneration, the modified adsorbent needs to be heated to 100-400°C and vacuumed, which consumes a lot of energy and can easily lead to the destruction of the modified adsorbent structure. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a method for capturing fluorine-containing greenhouse gases, which facilitates the regeneration of adsorbents.

[0006] To solve the above problems, the technical solution adopted by the present invention is: a method for capturing fluorine-containing greenhouse gases, wherein an adsorbent is used to adsorb the fluorine-containing greenhouse gases in a dark environment, and the adsorbent is a polymer including cuprous ions and iodide ions, with the chemical formula CuI(L), wherein L is a weakly bridging nitrogen-containing ligand.

[0007] Once the adsorbent reaches saturation or the adsorption time reaches the set time, it is exposed to light, causing it to release the absorbed fluorine-containing greenhouse gases, thus completing the adsorbent regeneration.

[0008] Furthermore, the weakly bridging nitrogen-containing ligand is a pyrazine.

[0009] Furthermore, the preparation process of the adsorbent is as follows:

[0010] In an inert atmosphere, cuprous iodide is dissolved in acetonitrile to obtain solution A;

[0011] Pyrazine was dissolved in another portion of acetonitrile to obtain solution B, in which cuprous iodide and pyrazine had the same molar concentration.

[0012] Mix equal volumes of solution A and solution B and stir at room temperature for at least 10 hours.

[0013] The crystals were obtained by filtration, washed with acetonitrile, and then activated by heating under vacuum for 5-7 hours at a temperature of 75-90℃ to obtain the adsorbent.

[0014] Furthermore, the adsorbent regeneration process includes:

[0015] The adsorbent was irradiated with ultraviolet light with a wavelength of 250 to 450 nm and an energy of 4.96 to 2.75 eV for 5 to 8 minutes.

[0016] The adsorbent is then irradiated with visible light of wavelength 500-700 nm and energy 2.48-1.77 eV for 2-6 minutes.

[0017] Furthermore, after the adsorbent is prepared, a microporous packing plate is prepared. The preparation process is as follows:

[0018] S1. An array of micropores with a diameter of 100-1000μm is formed on a quartz glass plate with a thickness of 1-3mm.

[0019] S2. Immerse the quartz glass plate in a toluene solution of aminosilane or epoxysilane to form a silane coupling agent on the inner wall of the micropores.

[0020] S3. Mix the adsorbent powder, binder and solvent, and then grind the mixture into a slurry;

[0021] S4. Coat one side of the slurry with the slurry, and draw a vacuum on the other side of the quartz glass plate to use negative pressure to force the slurry through the micropores.

[0022] S5. Remove excess slurry from both sides of the quartz glass plate;

[0023] S6. Heating the quartz glass plate under a vacuum or inert atmosphere promotes the curing of the adhesive in the micropores and the evaporation of the solvent.

[0024] Further, in step S3, the binder is silica sol with a solid content of 30%, the solvent is ethanol, and the weight ratio of adsorbent powder, binder and solvent is (5-15):(1-5):(80-94).

[0025] Furthermore, in step S6, the quartz glass plate is first kept at 80℃±10℃ for 1-2 hours, then kept at 120℃±10℃ for 2-4 hours, and finally kept at 150℃±10℃ for 1-2 hours.

[0026] Furthermore, multiple microporous packing plates are installed inside the shell, with the multiple microporous packing plates parallel to each other, and ultraviolet lamps and visible light lamps are placed between the microporous packing plates; the waste gas containing fluorine greenhouse gas is passed through the micropores of each microporous packing plate in sequence to achieve the adsorption and capture of the fluorine greenhouse gas.

[0027] Furthermore, the shell is cylindrical, with an air inlet and an air outlet at both ends, and a rotating shaft at the center of the shell, which is connected to a rotation drive mechanism; the microporous packing plate is annular, and the outer edge of the microporous packing plate is fixedly installed on the inner wall of the shell, with the inner circle of the microporous packing plate and the rotating shaft in a sealed fit; one end of the ultraviolet lamp and the visible light lamp are fixedly installed on the rotating shaft, and the other end is located between two adjacent microporous packing plates.

[0028] Furthermore, the housing is connected to a gas collection mechanism.

[0029] The beneficial effects of this invention are: this invention can absorb fluorine-containing greenhouse gases in waste gas at normal temperature and pressure, and desorb the fluorine-containing greenhouse gases by light at normal temperature and pressure, thereby regenerating the adsorbent. The regeneration energy consumption is low, it is easy to implement, and it reduces operating costs. Attached Figure Description

[0030] Figure 1 This is a flowchart of the capture process for fluorine-containing greenhouse gases according to the present invention;

[0031] Figure 2 This is a flowchart illustrating the preparation process of the adsorbent of this invention;

[0032] Figure 3 This is a flowchart illustrating the preparation process of the microporous packing plate of the present invention;

[0033] Figure 4 This is a cross-sectional schematic diagram of the adsorption device of the present invention;

[0034] Reference numerals: 100—microporous packing plate; 200—shell; 201—ultraviolet lamp; 202—visible light lamp; 203—air outlet; 204—rotating shaft; 205—rotation drive mechanism; 206—air collection mechanism; 207—air inlet. Detailed Implementation

[0035] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0036] The method for capturing fluorine-containing greenhouse gases of the present invention, such as Figure 1As shown, in a dark environment, an adsorbent is used to adsorb fluorine-containing greenhouse gases. The adsorbent is a polymer including cuprous ions and iodide ions, with the chemical formula CuI(L), where L is a weakly bridging nitrogen-containing ligand.

[0037] Once the adsorbent reaches saturation or the adsorption time reaches the set time, it is exposed to light, causing it to release the absorbed fluorine-containing greenhouse gases, thus completing the adsorbent regeneration.

[0038] Cuprous iodide has d¹ 0 The electronic configuration (the d subshell is completely filled, possessing exactly 10 electrons) allows for flexible coordination geometry (such as tetrahedron), and the coordination bonds with specific ligands (such as halogens) may break or recombine under light irradiation, i.e., photoinduced coordination bond isomerism. The adsorbent of this invention is an infinitely chain-like or layered coordination polymer formed by cuprous ions and iodide ions. In this structure, cuprous ions form strong bonds with iodide ions, while simultaneously forming weaker coordination bonds with ligand L.

[0039] In a dark environment, cuprous iodide exists in a stable coordination environment, and its electron-rich d¹ 0 The orbital can interact with carbon atoms of fluorine-containing greenhouse gases (such as the CF bond in HFC-134a) through σ-hole interactions, thereby achieving strong adsorption. In this state, the adsorbent system belongs to the low-energy ground state.

[0040] In a light-illuminating environment, the adsorbent absorbs photon energy sufficient to excite an electron. This causes photoinduced electron transfer in the coordination polymer; specifically, an electron transfers from an iodide ion to a cuprous ion, generating copper and iodine atoms. This change leads to the breaking of the coordinate bond (the weaker copper-nitrogen bond), causing local structural distortion or expansion. The original strong adsorption sites (cuprous iodide) temporarily disappear. At this point, the affinity between the adsorbed fluorine-containing greenhouse gas molecules and the changed metal center decreases sharply, resulting in their release and regeneration of the adsorbent. During regeneration, the adsorbent system is in an excited state.

[0041] The excited state is energetically unstable and has a strong tendency to return to the stable ground state. After the light exposure stops, the excess energy is released into the surrounding environment as heat through the thermal vibrations (phonons) of the atomic nuclei. Electrons can then transfer from copper to iodine atoms, regenerating cuprous iodide. The local structure returns to its geometry and electronic state before the light exposure, regaining its strong adsorption capacity. This process can occur spontaneously.

[0042] It is evident that the adsorbent used in this invention not only has a good adsorption effect on fluorine-containing greenhouse gases, but can also be regenerated by light. The regeneration conditions are simple, and both adsorption and regeneration can be carried out at normal temperature and pressure. It has low energy consumption and low maintenance costs, and does not require high-temperature heating, thus preventing the adsorbent structure from being damaged by high temperatures and helping to extend the service life of the adsorbent.

[0043] The weakly bridging nitrogen-containing ligand is either pyrazine or 4,4'-bipyridine.

[0044] When pyrazine is used as the weakly bridging nitrogen-containing ligand, the adsorbent preparation process is as follows: Figure 2 As shown, it specifically includes:

[0045] In an inert atmosphere, cuprous iodide is dissolved in acetonitrile to obtain solution A.

[0046] Dissolve pyrazine in another portion of acetonitrile to obtain solution B. The molar concentrations of cuprous iodide and pyrazine are the same to ensure that the molar ratio of cuprous iodide to pyrazine is close to 1:1; or the molar concentration of pyrazine is slightly greater than that of cuprous iodide to ensure that cuprous iodide can react completely and to avoid residual cuprous iodide clogging the adsorbent channels.

[0047] Mix equal volumes of solution A and solution B and stir at room temperature for at least 10 hours, preferably 12 hours. Colorless or pale yellow microcrystalline precipitates will gradually precipitate in the solution.

[0048] The precipitate was filtered to obtain crystals. The crystals were washed with acetonitrile and then activated under vacuum at a temperature of 75-90°C for 5-7 hours to remove solvent molecules from the pores of the crystals, thus obtaining an adsorbent with open pores.

[0049] In this invention, the adsorbent regeneration process includes:

[0050] The adsorbent is irradiated with ultraviolet light of wavelength 250 to 450 nm and energy 4.96 to 2.75 eV for 5-8 minutes. Preferably, the adsorbent is irradiated with ultraviolet light of wavelength 300 to 380 nm and energy 4.13 to 3.26 eV. Ultraviolet light within this wavelength and energy range can effectively excite the outermost electrons of iodide ions, causing them to jump to the orbital of cuprous ions, thereby initiating a photo-oxidation-reduction reaction to generate copper and iodine atoms. The structural changes of the adsorbent promote the release of fluorine-containing greenhouse gases.

[0051] The adsorbent is then irradiated with visible light at a wavelength of 500-700 nm and an energy of 2.48-1.77 eV for 2-6 minutes. Preferably, the adsorbent is irradiated with visible light at a wavelength of 550-650 nm and an energy of 2.25-1.91 eV. After the release of the fluorine-containing greenhouse gas is complete, the ultraviolet irradiation is stopped. At this point, the copper and iodine atoms are in a metastable state (i.e., a state between the ground state and the excited state). The energy of this state is between the ground state and the excited state. Irradiating the adsorbent again with visible light of a longer wavelength and lower energy can provide the activation energy required for reverse electron transfer, causing electrons to return from the copper to the iodine atom and regenerate cuprous iodide.

[0052] The adsorbent of this invention only needs about 10 minutes to regenerate, and has high regeneration efficiency.

[0053] use Figure 2 The adsorbent prepared by the method shown is in powder form. In use, the adsorbent needs to be formulated into an adsorption packing material that is easy to install into the adsorption device and easy to disassemble and maintain. Currently, a common method is to mix the adsorbent powder with a porous polymer (such as polyvinylidene fluoride) solution to form a viscous slurry. This slurry is then formed into spherical or cylindrical particles and dried to obtain granular adsorbent material, which is then supported by mesh boxes, mesh plates, etc. Alternatively, the adsorbent powder can be mixed with an adhesive and coated onto a thin substrate (such as a metal mesh or fiberglass cloth), then dried. In use, the substrate can be rolled onto the outer wall of a cylinder for installation.

[0054] These commonly used adsorption packing structures generally suffer from the problem of insufficient contact between waste gas and adsorbent, and insufficient light penetration depth. During regeneration, ultraviolet light can only irradiate the surface of the adsorbent and cannot reach the interior of the adsorbent.

[0055] In this invention, to ensure sufficient contact between the waste gas and the adsorbent and to guarantee the regeneration effect of the adsorbent, after the adsorbent is prepared, it is fabricated into a microporous packing plate 100, such as... Figure 3 As shown, the preparation process is as follows:

[0056] S1. An array of micropores with a diameter of 100-1000 μm is created on a quartz glass plate with a thickness of 1-3 mm. The quartz glass plate has high transmittance to ultraviolet and visible light, which is beneficial for adsorbent regeneration, and it also has good chemical stability. Its shape can be rectangular, circular, or other shapes; the thickness of 1-3 mm ensures that the quartz glass plate has sufficient strength while maintaining good light transmittance. Laser-driven micropores can be used to create the micropores, with the spacing between adjacent micropores approximately 2.5 times the micropore diameter. With a micropore diameter of 100-1000 μm, a smaller pore size results in a larger total pore wall area per unit volume of the plate, leading to a larger adsorption capacity, but also greater gas diffusion resistance, making gas flow in the micropores more difficult and increasing processing complexity. Conversely, a larger pore size results in a smaller total pore wall area per unit volume of the plate, leading to a smaller adsorption capacity. The optimal micropore diameter range is 200-300 μm.

[0057] S2. Immerse a quartz glass plate in a toluene solution of aminosilane or epoxysilane at a mass concentration of 2% for 2 hours to form a silane coupling agent on the inner wall of the micropores. The siloxane groups of the silane coupling agent will firmly bind to the hydroxyl groups on the surface of the quartz glass, while the amino or epoxy groups of the silane coupling agent will be exposed, providing strong chemical bonding sites for subsequent adsorbent adhesion. To ensure that the silane coupling agent is formed only on the inner wall of the micropores and avoids its formation on the sides of the quartz glass plate, three identical quartz glass plates can be stacked and pressure applied to ensure tight adhesion and interconnection of the micropores on the three plates, followed by immersion. After immersion, only the middle quartz glass plate is removed, and the other two quartz glass plates are stacked on the sides of the new quartz glass plate and immersed again. After immersion, remove the quartz glass plates, wash them thoroughly with toluene and ethanol, and then dry them.

[0058] S3. Mix the adsorbent powder, binder, and solvent, and then grind the mixture into a slurry. The binder is silica sol with a solid content of 30%, the solvent is ethanol, and the weight ratio of adsorbent powder, binder, and solvent is (5-15):(1-5):(80-94).

[0059] S4. The slurry is coated on one side of a quartz glass plate, and a vacuum is drawn on the other side of the quartz glass plate. The negative pressure forces the slurry through the micropores. As the adsorbent in the slurry flows in the micropores, it adheres firmly to the pore walls through the bridging effect of the silane coupling agent, thereby forming an adsorbent layer on the inner wall of the micropores.

[0060] S5. Remove excess paste from both sides of the quartz glass plate. Airflow can be used to blow away the excess paste.

[0061] S6. Heating the quartz glass plate under a vacuum or inert atmosphere promotes the curing of the adhesive in the micropores and the evaporation of the solvent.

[0062] Specifically, the quartz glass plate is first kept at 80℃±10℃ for 1-2 hours to gently remove most of the solvent (ethanol). If the temperature is too high during this stage, the ethanol will evaporate too quickly, which will cause cracks or bubbles in the coating.

[0063] If the quartz glass plate is then kept at 120℃±10℃ for 2-4 hours, the silanol groups (-Si-OH) of the silica sol will further condense to form a robust Si-O-Si three-dimensional network structure, thereby firmly bonding the adsorbent particles to the inner wall of the micropores.

[0064] Finally, the quartz glass plate is kept at 150℃±10℃ for 1-2 hours to completely remove residual solvent and ensure that the micropores are completely unobstructed.

[0065] When using this microporous packing plate 100, multiple microporous packing plates 100 are installed into the housing 200, such as... Figure 4 As shown, multiple microporous packing plates 100 are parallel to each other, and ultraviolet lamps 201 and visible light lamps 202 are arranged between the microporous packing plates 100 to form an adsorption device. Fluorine-containing greenhouse gas waste gas is introduced into the shell 200, and the waste gas passes sequentially through the micropores of each microporous packing plate 100, thereby achieving the adsorption and capture of the fluorine-containing greenhouse gas.

[0066] The waste gas carrying fluorine-containing greenhouse gases is passed through the microporous packing plate 100. The waste gas is dispersed through the micropores, and the contact area between the waste gas and the adsorbent is large, ensuring that all waste gas can fully contact the adsorbent on the inner wall of the micropores, thereby quickly and effectively adsorbing the fluorine-containing greenhouse gases in the waste gas.

[0067] Because the quartz glass plate is transparent and has excellent light transmission properties, during the regeneration of the adsorbent, some ultraviolet light can directly enter the micropores and irradiate the adsorbent, while some ultraviolet light can penetrate the quartz glass plate and irradiate the adsorbent. This allows the front and back sides of the adsorbent to be regenerated simultaneously, improving regeneration efficiency and ensuring that almost all adsorbents can be irradiated and regenerated. This solves the problem in conventional adsorption packing structures where ultraviolet light cannot irradiate the interior of the adsorbent, thus affecting the regeneration effect.

[0068] To ensure that the ultraviolet lamp 201 and visible light lamp 202 can uniformly irradiate the adsorbent, the housing 200 of this invention is cylindrical. An air inlet 207 and an air outlet 203 are provided at both ends of the housing 200. The air inlet 207 is used to introduce waste gas or tail gas carrying fluorine-containing greenhouse gases, and the air outlet 203 is used to discharge the treated waste gas or tail gas. Valves are provided at the air inlet 207 and the air outlet 203 to control the opening and closing of the channels. A rotating shaft 204 is provided at the center of the housing 200. The rotating shaft 204 is coaxial with the housing 200 and is connected to a rotation drive mechanism 205. The rotation drive mechanism 205 can be a motor, used to drive the rotating shaft 204 to rotate. The microporous packing plate 100 is annular, and its outer edge is fixedly installed on the inner wall of the housing 200. The inner circle of the microporous packing plate 100 is sealed to the rotating shaft 204 to prevent gas from passing between the microporous packing plate 100 and the rotating shaft 204. One end of the ultraviolet lamp 201 and the visible light lamp 202 are fixedly installed on the rotating shaft 204, and the other end is located between two adjacent microporous packing plates 100. The length direction of the ultraviolet lamp 201 and the visible light lamp 202 is consistent with the radial direction of the housing 200. During regeneration, the ultraviolet lamp 201 is first energized, and then the rotating shaft 204 is rotated by the rotation drive mechanism 205. The rotating shaft 204 drives the ultraviolet lamp 201 and the visible light lamp 202 to rotate slowly, ensuring that the ultraviolet light can be evenly irradiated onto the microporous packing plates 100 above and below the ultraviolet lamp 201. After the fluorine-containing greenhouse gas absorbed by the adsorbent is released, the ultraviolet lamp 201 is turned off and the visible light lamp 202 is turned on. The rotating shaft 204 continues to rotate, causing copper and iodine atoms to form cuprous iodide.

[0069] The housing 200 is connected to a gas collection mechanism 206. During regeneration, the inlet 207 and outlet 203 are closed, and the gas collection mechanism 206 collects the fluorine-containing greenhouse gases released by the adsorbent. The gas collection mechanism 206 can be a gas pump or a gas collection bottle.

[0070] Example

[0071] Weigh 0.47g of high-purity cuprous iodide powder, measure 20mL of anhydrous acetonitrile, add the cuprous iodide powder to the acetonitrile, and sonicate for 10-20 minutes under an inert atmosphere until a uniform suspension or a nearly clear solution is formed.

[0072] Weigh 0.20 g of pyrazine and measure 20 mL of anhydrous acetonitrile. Add the pyrazine to the acetonitrile and shake gently until completely dissolved to obtain a colorless and transparent solution.

[0073] The two solutions were slowly mixed using a dual-needle syringe pump with continuous stirring to obtain crystals. The crystals were washed with acetonitrile and then activated under vacuum at 80°C for 6 hours to obtain the adsorbent.

[0074] At 25°C, exhaust gas containing HFC-134a was passed through this adsorbent. After adsorption reached saturation, the adsorption capacity of the adsorbent for HFC-134a was measured to be 120 cm³ / g (approximately 15% by mass), which is much higher than that of activated carbon under the same conditions (approximately 40 cm³ / g).

[0075] The adsorbent was then irradiated with a 365 nm UV LED lamp (power density 50 mW / cm²). Within seconds of irradiation activation, a high concentration of HFC-134a desorption peak was detected online. The desorption rate exceeded 95% after one irradiation cycle (5 minutes).

[0076] After repeating the "adsorption-light desorption" cycle 20 times, the adsorption capacity retention rate of the adsorbent was over 98%, demonstrating its excellent regeneration cycle stability.

[0077] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for capturing fluorine-containing greenhouse gases, characterized in that, In a dark environment, an adsorbent is used to adsorb fluorine-containing greenhouse gases. The adsorbent is a polymer comprising cuprous ions and iodide ions, with the chemical formula CuI(L), where L is a weakly bridging nitrogen-containing ligand. Once the adsorbent reaches saturation or the adsorption time reaches the set time, it is exposed to light, causing it to release the absorbed fluorine-containing greenhouse gases, thus completing the regeneration of the adsorbent. The weakly bridging nitrogen-containing ligand is pyrazine; The preparation process of the adsorbent is as follows: In an inert atmosphere, cuprous iodide is dissolved in acetonitrile to obtain solution A; Pyrazine was dissolved in another portion of acetonitrile to obtain solution B, in which cuprous iodide and pyrazine had the same molar concentration. Mix equal volumes of solution A and solution B and stir at room temperature for at least 10 hours. The crystals were obtained by filtration, washed with acetonitrile, and then activated by heating under vacuum for 5-7 hours at a temperature of 75-90℃ to obtain the adsorbent.

2. The method for capturing fluorine-containing greenhouse gases as described in claim 1, characterized in that, The adsorbent regeneration process includes: The adsorbent was irradiated with ultraviolet light with a wavelength of 250-450 nm and an energy of 4.96-2.75 eV for 5-8 minutes. The adsorbent is then irradiated with visible light of wavelength 500-700 nm and energy 2.48-1.77 eV for 2-6 minutes.

3. The method for capturing fluorine-containing greenhouse gases as described in claim 1 or 2, characterized in that, After the adsorbent is prepared, a microporous packing plate (100) is prepared. The preparation process is as follows: S1. An array of micropores with a diameter of 100-1000μm is formed on a quartz glass plate with a thickness of 1-3mm. S2. Immerse the quartz glass plate in a toluene solution of aminosilane or epoxysilane to form a silane coupling agent on the inner wall of the micropores. S3. Mix the adsorbent powder, binder and solvent, and then grind the mixture into a slurry; S4. Coat one side of the slurry with the slurry, and draw a vacuum on the other side of the quartz glass plate to use negative pressure to force the slurry through the micropores. S5. Remove excess slurry from both sides of the quartz glass plate; S6. Heating the quartz glass plate under a vacuum or inert atmosphere promotes the curing of the adhesive in the micropores and the evaporation of the solvent.

4. The method for capturing fluorine-containing greenhouse gases as described in claim 3, characterized in that, In step S3, the binder is silica sol with a solid content of 30%, the solvent is ethanol, and the weight ratio of adsorbent powder, binder and solvent is (5-15):(1-5):(80-94).

5. The method for capturing fluorine-containing greenhouse gases as described in claim 4, characterized in that, In step S6, the quartz glass plate is first kept at 80℃±10℃ for 1-2 hours, then kept at 120℃±10℃ for 2-4 hours, and finally kept at 150℃±10℃ for 1-2 hours.

6. The method for capturing fluorine-containing greenhouse gases as described in claim 3, characterized in that, Multiple microporous packing plates (100) are installed in the shell (200), with the multiple microporous packing plates (100) parallel to each other, and ultraviolet lamps (201) and visible light lamps (202) are set between the microporous packing plates (100); the waste gas containing fluorine greenhouse gas is passed through the micropores of each microporous packing plate (100) in sequence to achieve the adsorption and capture of fluorine greenhouse gas.

7. The method for capturing fluorine-containing greenhouse gases as described in claim 6, characterized in that, The housing (200) is cylindrical, with an air inlet (207) and an air outlet (203) at both ends. A rotating shaft (204) is located at the center of the housing (200), and the rotating shaft (204) is connected to a rotation drive mechanism (205). The microporous packing plate (100) is annular, and the outer edge of the microporous packing plate (100) is fixedly installed on the inner wall of the housing (200). The inner circle of the microporous packing plate (100) is sealed to the rotating shaft (204). One end of the ultraviolet lamp (201) and the visible light lamp (202) are fixedly installed on the rotating shaft (204), and the other end is located between two adjacent microporous packing plates (100).

8. The method for capturing fluorine-containing greenhouse gases as described in claim 7, characterized in that, The housing (200) is connected to an air collection mechanism (206).

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