Substrate transfer apparatus and substrate processing apparatus including the same

Abstract

The invention provides a substrate conveying apparatus capable of simultaneously conveying a plurality of substrates in horizontal postures and a substrate processing apparatus including the same. The first manipulator includes a first pusher for holding a substrate located at the base end of the branch leaf plate and disposed at a position sandwiched between the pair of first base end guides, and the second manipulator includes a second pusher for holding a substrate disposed at a position sandwiched between the pair of second base end guides. In addition, the first pusher includes a first member and a second member that are respectively in contact with the substrate, and the second pusher is located at a position sandwiched between the first member and the second member.

Description

Technical Field

[0001] The present invention relates to a substrate conveying apparatus capable of simultaneously conveying multiple substrates in a horizontal orientation, and a substrate processing apparatus including the same. Background Technology

[0002] Patent Document 1 describes a robot for transporting substrates. The robot includes multiple blades capable of holding substrates in a horizontal position. The blades are arranged vertically, allowing simultaneous acquisition of horizontally positioned substrates spaced apart in the vertical direction. Each blade has a movable abutment (hereinafter referred to as a "pusher" in this specification) at its base for gripping the substrate. The pushers are stacked and arranged vertically.

[0003] <List of existing technical documents>

[0004] International Open No. 2010 / 103876

[0005] However, in the aforementioned structure, situations arise where the substrate cannot be reliably held. In recent years, the substrates transported by substrate transport devices have become increasingly diverse. Therefore, a substrate transport device capable of transporting warped substrates or thick substrates with multiple substrates bonded together is desired. In existing pushers, the insufficient thickness in the vertical direction may lead to an inability to reliably hold the substrate. Because the pushers are stacked vertically, there is a limit to how thickening the pushers in the vertical direction can be achieved.

[0006] The present invention was made in view of this situation, and its object is to provide a substrate conveying apparatus capable of reliably holding a substrate and a substrate processing apparatus including the same. Summary of the Invention

[0007] To solve the aforementioned problem, the present invention adopts the following structure.

[0008] That is, the substrate conveying device of the present invention conveys the substrate.

[0009] The substrate conveying device includes:

[0010] The first robotic arm is capable of holding a substrate in a horizontal position;

[0011] The second robotic arm is capable of holding a substrate with a different horizontal orientation than the substrate.

[0012] The holding unit arranges and holds the first robotic arm and the second robotic arm in the vertical direction;

[0013] A robotic arm supports the retaining part in a movable manner; and

[0014] The base component supports the robotic arm.

[0015] The first robotic arm includes: a first blade; a pair of first base end guides disposed at the base end of the first blade and in contact with the lower surface of the substrate to support the substrate; a pair of first front end guides disposed at the front end of the first blade and in contact with the lower surface of the substrate to support the substrate; and a first pusher for holding the substrate, located at the base end of the first blade and positioned between the pair of first base end guides.

[0016] The second robotic arm includes: a second blade; a pair of second base-end guides disposed at the base end of the second blade and in contact with the lower surface of the substrate to support the substrate; a pair of second front-end guides disposed at the front end of the second blade and in contact with the lower surface of the substrate to support the substrate; and a second pusher for holding the substrate, located at the base end of the second blade and positioned between the pair of second base-end guides.

[0017] The first pusher includes a first component and a second component that abut against the substrate and press the substrate forward, respectively. The second pusher includes a third component that abuts against the substrate and presses the substrate forward. The third component is located in a position where it is sandwiched between the first component and the second component when viewed from above.

[0018] [Function and Effect] The first manipulator of the present invention includes a first pusher for holding a substrate, located at the base end of a first blade and disposed in a position clamped by a pair of first base end guides. The second manipulator includes a second pusher for holding a substrate, disposed in a position clamped by a pair of second base end guides. Furthermore, the first pusher includes a first member and a second member that respectively abut against the substrate, and a third member of the second pusher is located in a position clamped by the first member and the second member. With this configuration, the positions of the first pusher and the second pusher are different. Therefore, even if the first and second pushers are thick-walled in the vertical direction, the pushers will not interfere with each other. The present invention provides a substrate transport device that reliably holds and transports warped substrates or substrates with thickness using thick-walled pushers.

[0019] Furthermore, in the substrate conveying device, the following is preferred:

[0020] The second robotic arm is positioned so as not to overlap with the first robotic arm when viewed from above.

[0021] The holding part includes a lifting mechanism that enables the first robotic arm and the second robotic arm to move relative to each other in the vertical direction.

[0022] The lifting mechanism can be configured to be either coplanar, where the first robotic arm and the second robotic arm are located on the same plane, or separated, where the first robotic arm and the second robotic arm are separated in the vertical direction.

[0023] [Function and Effect] According to the structure described, the second robotic arm is positioned so as not to overlap with the first robotic arm when viewed from above. The holding part includes a lifting mechanism capable of moving the first and second robotic arms relative to each other in the vertical direction. The lifting mechanism can be configured to be either coplanar, where the first and second robotic arms are on the same plane, or separated, where they are vertically separated. This invention can also be applied to substrate transport devices where the number of substrates transported can be changed by moving the first and second robotic arms relative to each other in the vertical direction.

[0024] Furthermore, in the substrate conveying device, the following is preferred:

[0025] The pair of first base end guides are linearly symmetrical to each other, with an imaginary line that bisects the circular substrate when viewed from above as a reference.

[0026] The pair of first front-end guides are symmetrical about each other with the imaginary line as the reference.

[0027] The pair of second base end guides are symmetrical about each other with respect to the imaginary line.

[0028] The pair of second front-end guides are symmetrical about each other with the imaginary line as the reference.

[0029] The first component and the second component in the first thruster are linearly symmetrical about the imaginary line.

[0030] The third component of the second thruster is located on the imaginary line.

[0031] [Function and Effect] According to the structure described, the first base end guides are symmetrical to each other based on an imaginary line that bisects the circular substrate when viewed from above; the first front end guides are symmetrical to each other based on the imaginary line; the second base end guides are symmetrical to each other based on the imaginary line; the second front end guides are symmetrical to each other based on the imaginary line; the first and second components of the first pusher are symmetrical to each other based on the imaginary line; and the second pusher is located on the imaginary line. With this configuration, the first pusher pushes the substrate from the left and right, pushing the substrate against the first front end guides that are symmetrical to each other based on the imaginary line. Furthermore, the third component of the second pusher pushes the substrate from the center, pushing the substrate against a pair of second front end guides that are symmetrical to each other based on the imaginary line. With this configuration, the substrate will not shift position when held with an adhesive substrate.

[0032] Furthermore, in the substrate conveying device, the following is preferred:

[0033] The shape of the front end of the first component and the second component of the first thruster that is abutted by the substrate is modeled after the shape of the substrate.

[0034] The shape of the front end of the third component of the second thruster that is abutted by the substrate is modeled after the shape of the substrate.

[0035] [Function / Effect] According to the structure described, the shapes of the front ends of the first and second components of the first thruster that are for contact with the substrate mimic the shape of the substrate, and the shapes of the front ends of the second thruster that are for contact with the substrate mimic the shape of the substrate. With this configuration, the first and second components of the first thruster can hold the substrate with a wide contact surface. Therefore, the holding of the substrate by the first thruster becomes more reliable. Similarly, the front end of the third component of the second thruster can hold the substrate with a wide contact surface. Therefore, the holding of the substrate by the second thruster becomes more reliable.

[0036] Furthermore, in the substrate conveying device, the following is preferred:

[0037] The front end of the first component protrudes in a direction orthogonal to the direction of movement of the first component, and the front end of the second component protrudes in a direction orthogonal to the direction of movement of the second component.

[0038] [Function / Effect] According to the structure described, the front end of the first member protrudes in a direction orthogonal to the direction of movement of the first member, and the front end of the second member protrudes in a direction orthogonal to the direction of movement of the second member. With this configuration, the first and second members in the first actuator can grip the substrate with a wide contact surface. Therefore, the gripping of the substrate by the first actuator becomes more reliable.

[0039] Furthermore, in the substrate conveying device, the following is preferred:

[0040] It includes: a first holding part having the first robotic arm and the second robotic arm; and

[0041] The second holding part has two robotic arms identical to the first robotic arm and the second robotic arm, and is disposed separately from the first holding part in the vertical direction.

[0042] [Function and Effect] The structure includes: a first holding portion having a first robotic arm and a second robotic arm; and a second holding portion having the first robotic arm and the second robotic arm and disposed separately from the first holding portion in the vertical direction. With this configuration, the number of substrates that can be simultaneously transported can be increased.

[0043] Furthermore, in the substrate conveying device, the following is preferred:

[0044] The first robotic arm includes a first driving mechanism, which enables the first component and the second component to move forward and backward toward the substrate while maintaining their relative positions.

[0045] The second robotic arm includes a second drive mechanism capable of moving the third component toward the substrate.

[0046] [Function and Effect] According to the structure described, the first robotic arm includes a first drive mechanism capable of bringing the first and second components close to the substrate while maintaining their relative positions, and the second robotic arm includes a second drive mechanism capable of bringing the third component close to the substrate. With this configuration, the first drive mechanism causes the first robotic arm to grasp the substrate by simultaneously bringing the first and second components close to it. Thus, the substrate is grasped by forces of equal strength on both sides. This structure enables reliable holding of the substrate.

[0047] Furthermore, in the substrate conveying device, the following is preferred:

[0048] The first drive mechanism includes a first power unit that generates power, and a first thruster robotic arm that transmits the power from the first power unit to the first and second components of the first thruster.

[0049] The second drive mechanism includes a second power unit that generates power at a position separated from the first power unit in the vertical direction.

[0050] The second drive mechanism, in a position that avoids the first thruster arm, includes a second thruster arm that transmits power from the second power unit to a third component of the second thruster.

[0051] [Function and Effect] According to the structure described, the first drive mechanism includes a first power unit that generates power, and a first propeller arm that transmits the power of the first power unit to a first propeller and a second propeller arm that transmits the power of the first power unit to a first propeller. The second drive mechanism includes a second power unit that generates power at a position separated from the first power unit in the vertical direction, and a second propeller arm that transmits the power of the second power unit to a third propeller arm at a position avoiding the first propeller arm. With this configuration, the power units can be stacked in the vertical direction to form a substrate conveying device, and the structure of the present invention can be realized even without making major design changes to existing devices.

[0052] In addition, this specification also discloses a substrate processing apparatus, which includes the substrate conveying device and the substrate processing apparatus includes a single-sheet processing chamber for performing a specified processing on the substrate.

[0053] The present invention provides a substrate conveying device capable of reliably holding a substrate and a substrate processing device including the same. Attached Figure Description

[0054] Figure 1 This is a perspective view illustrating the overall structure of the substrate conveying device of Embodiment 1.

[0055] Figure 2 This is a perspective view illustrating the overall structure of the gripping mechanism in Embodiment 1.

[0056] Figure 3 This is a perspective view illustrating the vertical movement of the branch blade plate in Embodiment 1.

[0057] Figure 4 This is a perspective view illustrating the vertical movement of the branch blade plate in Embodiment 1.

[0058] Figure 5 This is a plan view illustrating the guide component of Embodiment 1.

[0059] Figure 6 This is a plan view illustrating the guide component of Embodiment 1.

[0060] Figure 7 This is a plan view illustrating the guide component of Embodiment 1.

[0061] Figure 8 This is a perspective view illustrating the thruster of Embodiment 1.

[0062] Figure 9 This is a plan view illustrating the thruster of Embodiment 1.

[0063] Figure 10This is a cross-sectional view illustrating the drive mechanism of the thruster in Embodiment 1.

[0064] Figure 11 This is a perspective view illustrating the thruster robotic arm of Embodiment 1.

[0065] Figure 12 This is a cross-sectional view illustrating the drive mechanism of the thruster in Embodiment 1.

[0066] Figure 13 This is a plan view illustrating the substrate processing apparatus of Embodiment 2.

[0067] Figure 14 This is a plan view illustrating a variation of the present invention.

[0068] Figure 15 This is a plan view illustrating a variation of the present invention.

[0069] Explanation of icon numbers

[0070] 1: Substrate processing device

[0071] 1A: Block frame

[0072] 3: Indexer Block

[0073] 4: Processing Blocks

[0074] 8: Mechanical chuck

[0075] 10: Nozzle

[0076] 11: Loading Port

[0077] 34: Path

[0078] 41: Drug processing chamber

[0079] 42: Frame

[0080] 46: Robotic Arm

[0081] 50: Holding mechanism

[0082] 51a, 51b: Robotic arms

[0083] 52: Spindle

[0084] 53: Robot Base

[0085] 55a, 55b: First robotic arm

[0086] 56a, 56b: Second robotic arm

[0087] 61a: Holding part / First holding part

[0088] 61b: Holding part / Second holding part

[0089] 63a, 63b: Lifting mechanism

[0090] 71a, 71b: First thruster

[0091] 72a, 72b: Second thrusters

[0092] 73a, 73b: Connecting components

[0093] 81a: First Power Unit

[0094] 81b: Power Unit / First Power Unit

[0095] 82a, 82b: Power Unit / Second Power Unit

[0096] 91a, 91b: First thruster robotic arm

[0097] 92a, 92b: Second thruster robotic arm

[0098] 100: Substrate transfer device

[0099] 101a, 101b: First drive mechanism

[0100] 102a, 102b: Second drive mechanism

[0101] 110a, 110b: Branch blades

[0102] 113a: First base terminal guide

[0103] 114a, 114b: First front-end bootloader

[0104] 121a, 121b: First leaf plate

[0105] 122a, 122b: Second leaf plate

[0106] 123a: Second base end guide

[0107] 124a, 124b: Second front-end guide

[0108] 131: Control Department

[0109] 711a, 711b: First component

[0110] 712a, 712b: Second component

[0111] 721, 722: Third component

[0112] C: Carrier

[0113] CL1: First column

[0114] CL2: Second column

[0115] CL3: Third column

[0116] CR: Central Robot

[0117] IL: Imaginary Line

[0118] IR: Indexing Robot

[0119] L1, L2, L3: Vertical axis

[0120] W: substrate

[0121] X, Y: Direction

[0122] Z: Direction / Vertical direction Detailed Implementation

[0123] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The substrate conveying apparatus of the present invention is a structure capable of simultaneously acquiring and conveying four substrates arranged horizontally in the vertical direction.

[0124] [Example 1]

[0125] <1. Overall Structure>

[0126] Figure 1 The substrate transport apparatus 100 of this example will be described. The substrate transport apparatus 100 of this example includes a gripping mechanism 50 capable of individually gripping four substrates W in a horizontal position. The gripping mechanism 50 is supported by an elongated robotic arm 51a extending in the horizontal direction. The gripping mechanism 50 and the robotic arm 51a are connected by a joint. Through the joint, the gripping mechanism 50 can rotate relative to the robotic arm 51a about a vertical axis L1. The robotic arm 51a supports the holding portions 61a and 61b of the gripping mechanism 50, which will be described later, in a movable manner.

[0127] The robotic arm 51a has a gripping mechanism 50 at its front end. The base of the robotic arm 51a is connected to an elongated robotic arm 51b extending horizontally. The robotic arms 51a and 51b are connected by a joint. Through the joint, the robotic arm 51a can rotate relative to the robotic arm 51b about a vertical axis L2.

[0128] The front end of robotic arm 51b is connected to robotic arm 51a. The base end of robotic arm 51b is connected to a main shaft 52 extending vertically. The main shaft 52 is retractable. The height of the gripping mechanism 50 in the vertical direction is changed by extending or retracting the main shaft 52. Robotic arm 51b and main shaft 52 are connected by a joint. Through the joint, robotic arm 51b can rotate relative to the main shaft 52 about the vertical axis L3.

[0129] The robot base 53 is a structure that supports the main spindle 52. The robot base 53 forms the bottom of the substrate conveying device 100. The robot base 53 is a base component that supports the robotic arms 51a and 51b.

[0130] <2. Overview of the gripping components>

[0131] Figure 2 This is a perspective view illustrating the outline of the gripping mechanism 50 in this example. The gripping mechanism 50 is equipped with four robotic arms that grip a substrate W in a horizontal position. The gripping mechanism 50 has two holding portions 61a and 61b arranged vertically. The upper holding portion 61a holds a first robotic arm 55a and a second robotic arm 56a. The lower holding portion 61b holds a first robotic arm 55b and a second robotic arm 56b. The upper first robotic arm 55a and the second robotic arm 56a are used, for example, for transporting a substrate that has been processed. The lower first robotic arm 55b and the second robotic arm 56b are used, for example, for transporting a substrate before processing. Thus, in this example, contamination between substrates is prevented by using robotic arms separately according to the transport purpose (before processing and after processing). Processing efficiency is improved by using two robotic arms to transport two substrates simultaneously for the same purpose.

[0132] By making the first robotic arm 55a and the second robotic arm 56a coplanar in the vertical direction, the holding part 61a can be adapted to handle only one substrate W before processing. When holding one substrate W, if either the first robotic arm 55a or the second robotic arm 56a is folded, the robotic arm will not collide with the holder (e.g., the carrier C described later) that holds the substrate W. Similarly, by making the first robotic arm 55b and the second robotic arm 56b coplanar, the holding part 61b can be adapted to handle only one substrate W after processing. Thus, the holding part 61b has the same effect as the holding part 61a.

[0133] The first robotic arm 55a will be described. For example... Figure 2 As shown, the first robotic arm 55a includes a first branch blade 110a, a pair of first base end guides 113a, a pair of first front end guides 114a, and a first thruster 71a. The front end of the first branch blade 110a has two branches. The first robotic arm 55a is structured to hold the substrate W by pressing it against the upper surface of the first branch blade 110a using the first thruster 71a.

[0134] like Figure 2As shown, the second robotic arm 56a has a first blade 121a, a second blade 122a extending in a horizontal direction, a pair of second base end guides 123a, a pair of second front end guides 124a, and a second thruster 72a. The second robotic arm 56a is structured to press a substrate W supported by the upper surfaces of the first blade 121a and the second blade 122a using the second thruster 72a.

[0135] The first robotic arm 55b, like the first robotic arm 55a, includes a branch blade 110b, a pair of first base end guides 113b, a pair of first front end guides 114b, and a first pusher 71b. The first robotic arm 55b is structured to hold the substrate W by pressing it against the upper surface of the branch blade 110b using the first pusher 71b.

[0136] The second robotic arm 56b, like the second robotic arm 56a, has a first blade plate 121b, a second blade plate 122b, a pair of second base end guides 123b, a pair of second front end guides 124b, and a second thruster 72b. The second robotic arm 56b is structured to press the substrate W supported by the upper surfaces of the first blade plate 121b and the second blade plate 122b using the second thruster 72b.

[0137] The holding part 61a is a support part for the blade connected to the base ends of the branch blade 110a, the first blade 121a, and the second blade 122a. On the other hand, the holding part 61b is a support part for the blade connected to the base ends of the branch blade 110b, the first blade 121b, and the second blade 122b, described later. The holding parts 61a and 61b are stacked vertically in the gripping mechanism 50. The holding part 61a arranges and holds the first robotic arm 55a and the second robotic arm 56a in the vertical direction Z. Similarly, the holding part 61b arranges and holds the first robotic arm 55b and the second robotic arm 56b in the vertical direction Z. The holding part 61b is provided separately from the holding part 61a in the vertical direction.

[0138] Viewed from above, the base ends of branch blade 110a and branch blade 110b are located at the same position. Branch blades 110a and 110b extend in the same direction with the same shape. Moreover, branch blade 110a is located above branch blade 110b. Therefore, when viewed from above, branch blade 110b is hidden behind branch blade 110a. Branch blade 110a has a shape that is symmetrical about the imaginary line IL passing through its base ends. The same applies to branch blade 110b.

[0139] Viewed from above, the base end of the first blade 121a is located at the same position as the base end of the first blade 121b. The first blades 121a and 121b extend in the same direction with the same shape. Furthermore, the first blade 121a is located above the first blade 121b. Therefore, viewed from above, the first blade 121b is hidden behind the first blade 121a.

[0140] Viewed from above, the base end of the second blade 122a is located at the same position as the base end of the second blade 122b. The second blades 122a and 122b extend in the same direction with the same shape. Furthermore, the second blade 122a is positioned above the second blade 122b. Therefore, viewed from above, the second blade 122b is concealed behind the second blade 122a.

[0141] The first blade 121a and the second blade 122a are each mirror-symmetrical about the imaginary line IL. The same applies to the first blade 121b and the second blade 122b.

[0142] <3. Regarding the four stacked robotic arms>

[0143] As described above, the gripping mechanism 50 in this example is designed to grip four substrates W simultaneously. That is, the gripping mechanism 50 consists of four different robotic arms arranged vertically. First, the branch plate 110a of the first robotic arm 55a is located at the top of the gripping mechanism 50. The branch plate 110a can hold the substrates W in a horizontal position.

[0144] Furthermore, the first blade 121a and the second blade 122a are located above the middle layer that is touched by the branch blade 110a. The first blade 121a and the second blade 122a are located at the same position in the vertical direction. Moreover, by holding one side of the substrate W by the first blade 121a and the second blade 122a respectively, the substrate W in a horizontal position can be held.

[0145] The first blade 121b and the second blade 122b of the second robotic arm 56b are located on the lower middle layer below the first blade 121a and the second blade 122a of the second robotic arm 56a on the upper middle layer. The first blade 121b and the second blade 122b are located at the same position in the vertical direction. Moreover, by holding one side of the substrate W by the first blade 121b and the second blade 122b respectively, the substrate W in a horizontal position can be held.

[0146] The branch blade 110b of the first robotic arm 55b is located at the bottom of the gripping mechanism 50 and below the first blade 121b and the second blade 122b in the middle layer below it. The branch blade 110b can hold the substrate W in a horizontal position.

[0147] The lifting and lowering movement of the uppermost branch blade 110a will be described. The branch blade 110a can move vertically relative to the first blade 121a and the second blade 122a of the upper intermediate layer. That is, the branch blade 110a can be displaced between a position above the first blade 121a and the second blade 122a, and a position in the vertical direction that is the same as that of the first blade 121a and the second blade 122a.

[0148] The lowest branch blade 110b can also move vertically relative to the first blade 121b and the second blade 122b of the lower intermediate layer. That is, the branch blade 110b can be displaced between a position below the first blade 121b and the second blade 122b, and a position corresponding to the first blade 121b and the second blade 122b in the vertical direction.

[0149] Figure 3 This is a perspective view of the uppermost branch blade 110a separating from the first blade 121a and the second blade 122a of the upper middle layer. Figure 3 In the middle, the lowest branch blade 110b also separates from the first blade 121b and the second blade 122b of the lower middle layer.

[0150] Figure 4 This is a perspective view of the branch blade 110a located on the same plane as the first blade 121a and the second blade 122a of the upper intermediate layer. Figure 4 In the middle, the branch blade 110b is also located on the same plane as the first blade 121b and the second blade 122b of the lower intermediate layer.

[0151] The lifting and lowering movement of this branch blade 110a is achieved by a lifting mechanism 63a provided in the holding part 61a and a lifting mechanism 63b provided in the holding part 61b. Thus, the holding part 61a includes a lifting mechanism 63a capable of moving the first robotic arm 55a and the second robotic arm 56a relative to each other in the vertical direction Z. The lifting mechanism 63a enables the first robotic arm 55a and the second robotic arm 56a to be located in the same plane. Furthermore, the lifting mechanism 63a also enables the first robotic arm 55a and the second robotic arm 56a to separate in the vertical direction Z. The holding part 61b also includes a lifting mechanism 63b with the same function.

[0152] The lifting mechanism 63a allows for switching between a state where the first robotic arm 55a and the second robotic arm 56a are coplanar and hold only one substrate W, and a state where the first robotic arm 55a and the second robotic arm 56a are separated vertically and hold two substrates W.

[0153] Lifting mechanisms 63a and 63b synchronize the operation of branch blades 110a and 110b, thereby maximizing the separation between them. Figure 3 The state shown is closest to that of branch blade 110a and branch blade 110b. Figure 4 The two states shown are... (Becoming...) Figure 3 The holding mechanism 50, in its current state, can simultaneously hold four horizontally positioned substrates W, thus becoming... Figure 4 The holding mechanism 50 is capable of simultaneously holding two horizontally oriented substrates W.

[0154] The lifting mechanism 63b allows for switching between a state where the first robotic arm 55b and the second robotic arm 56b are coplanar and hold only one substrate W, and a state where the first robotic arm 55b and the second robotic arm 56b are separated vertically and hold two substrates W.

[0155] To achieve this lifting and lowering action, the uppermost branch blade 110a has a distinctive shape. That is, as shown in reference... Figure 5 As can be seen from the plan view, the branch blade 110a and the first blade 121a of the upper intermediate layer are positioned so as not to overlap when viewed from above. The same applies to the branch blade 110a and the second blade 122a. With this configuration, when the branch blade 110a is placed in the upper intermediate layer, it will not collide with the first blade 121a. The same applies to the second blade 122a. The second robotic arm 56a is positioned so as not to overlap with the first robotic arm 55a when viewed from above.

[0156] Similarly, the lowest branch blade 110b and the first blade 121b of the lower intermediate layer are positioned so as not to overlap when viewed from above. The same applies to the branch blade 110b and the second blade 122b. That is, the second robotic arm 56b is positioned so as not to overlap with the first robotic arm 55b when viewed from above. With this configuration, the branch blade 110b achieves the same effect as the branch blade 110a.

[0157] <4. About the guide>

[0158] Next, the guide members of the uppermost branch blade 110a will be described. Four guide members are provided on the upper surface of the branch blade 110a. Specifically, a pair of first base end guide members 113a are provided at the base end of the branch blade 110a. On the other hand, a pair of first front end guide members 114a are provided at the front end of the branch blade 110a. The branch blade 110a has two branches facing the front end, and the first front end guide members 114a are respectively provided on these branches. The pair of first base end guide members 113a and the pair of first front end guide members 114a abut against the lower surface of the substrate W. The pair of first base end guide members 113a and the pair of first front end guide members 114a are protrusions provided on the upper surface of the branch blade 110a. Therefore, the substrate W is supported by these four portions: the pair of first base end guide members 113a and the pair of first front end guide members 114a.

[0159] If reference Figure 5 As can be seen from the plan view, the pair of first base end guides 113a provided on the branch blade plate 110a are positioned symmetrically about the imaginary line IL. That is, the pair of first base end guides 113a are linearly symmetrical about each other about the imaginary line IL. Similarly, the pair of first front end guides 114a provided on the branch blade plate 110a are positioned symmetrically about the imaginary line IL. That is, the pair of first front end guides 114a are linearly symmetrical about each other about the imaginary line IL. Thus, the branch blade plate 110a can support one side and the other side when the substrate W is divided into two parts by the imaginary line IL under the same conditions, and the substrate W pressed by the first pusher 71a described later will not rotate.

[0160] The lowest branch blade 110b also has four guide members, the same as the branch blade 110a. Specifically, a pair of first base end guide members 113b are provided at the base end of the branch blade 110b, and a pair of first front end guide members 114b are provided at the front end of the branch blade 110b. The pair of first base end guide members 113b and the pair of first front end guide members 114b are symmetrically arranged about the imaginary line IL, just as they are in the branch blade 110a. That is, the pair of first base end guide members 113b are linearly symmetrical about the imaginary line IL. Similarly, the pair of first front end guide members 114b are linearly symmetrical about the imaginary line IL.

[0161] The first robotic arm 55a includes a pair of first base end guides 113a that bring the lower surface of the substrate W into contact with the base end, and a pair of first front end guides 114a that bring the lower surface of the substrate W into contact with the front end. Similarly, the first robotic arm 55b includes a pair of first base end guides 113b that bring the lower surface of the substrate W into contact with the base end, and a pair of first front end guides 114b that bring the lower surface of the substrate W into contact with the front end.

[0162] Next, the guides of the first leaf plate 121a and the second leaf plate 122a of the upper intermediate layer will be described. For example... Figure 2 As shown, a total of four guide members are provided on the upper surfaces of the first blade 121a and the second blade 122a. Specifically, a second base end guide member 123a is provided at the base end of the first blade 121a and the second blade 122a, respectively. A second front end guide member 124a is provided at the front end of the first blade 121a and the second blade 122a, respectively.

[0163] If reference Figure 5 As can be seen from the plan view, the pair of second base end guides 123a provided on the first blade 121a and the second blade 122a are positioned symmetrically about the imaginary line IL. That is, the pair of second base end guides 123a are linearly symmetrical about each other about the imaginary line IL. Similarly, the pair of second front end guides 124a provided on the first blade 121a and the second blade 122a are positioned symmetrically about the imaginary line IL. That is, the pair of second front end guides 124a are linearly symmetrical about each other about the imaginary line IL. Thus, the first blade 121a and the second blade 122a can support one side and the other side when the substrate W is divided into two parts by the imaginary line IL under the same conditions, and the substrate W pressed by the second pusher 72a (described later) will not rotate.

[0164] Four guide members are also provided on the first blade 121b and the second blade 122b of the lower intermediate layer, the same as on the first blade 121a and the second blade 122a of the upper intermediate layer. Specifically, a pair of second base end guide members 123b are provided at the base end of the first blade 121b and the second blade 122b, and a pair of second front end guide members 124b are provided at the front end of the first blade 121b and the second blade 122b. The pair of second base end guide members 123b and the pair of second front end guide members 124b are symmetrically arranged about the imaginary line IL, just as the first blade 121a and the second blade 122a are. That is, the pair of second base end guide members 123b are linearly symmetrical about the imaginary line IL. Similarly, the pair of second front end guide members 124b are linearly symmetrical about the imaginary line IL.

[0165] The second robotic arm 56a includes a pair of second base end guides 123a that bring the lower surface of the substrate W into contact with the base end, and a pair of second front end guides 124a that bring the lower surface of the substrate W into contact with the front end. Similarly, the second robotic arm 56b includes a pair of second base end guides 123b that bring the lower surface of the substrate W into contact with the base end, and a pair of second front end guides 124b that bring the lower surface of the substrate W into contact with the front end.

[0166] Since the guide that contacts the substrate W varies depending on the position of the branch leaf plate 110a, this aspect will be explained. Figure 6 The plan view shows the uppermost branch blade 110a holding the substrate W using four guides: a pair of first base end guides 113a and a pair of first front end guides 114a. Since the second base end guides 123a and the second front end guides 124a of the upper intermediate blade 121a and the second blade 122a are all located below the branch blade 110a, they do not abut against the substrate W supported by the branch blade 110a.

[0167] The same applies to the lowest branch blade 110b. The lowest branch blade 110b holds the substrate W using four guides: a pair of first base end guides 113b and a pair of first front end guides 114b. Since the second base end guides 123b and the second front end guides 124b of the lower intermediate blade 121b and 122b are all located above the branch blade 110a, they do not abut against the substrate W supported by the branch blade 110b.

[0168] on the other hand, Figure 7The plan view shows the branch blade 110a positioned on the same plane as the upper intermediate layer. At this time, the branch blade 110a, together with the first blade 121a and the second blade 122a, supports a horizontally oriented substrate W. Therefore, the substrate W abuts against eight guides: a pair of first base end guides 113a, a pair of first front end guides 114a, a pair of second base end guides 123a, and a pair of second front end guides 124a.

[0169] The same applies to the branch blade 110b, which is located on the same plane as the lower intermediate layer. In this case, the branch blade 110b, together with the first blade 121b and the second blade 122b, supports a horizontally oriented substrate W. Therefore, the substrate W abuts against eight guides: a pair of first base end guides 113b, a pair of first front end guides 114b, a pair of second base end guides 123b, and a pair of second front end guides 124b.

[0170] The substrate W, which abuts against the eight guides in the branch blade plate 110a, is pressed and held by the first pusher 71a or the second pusher 72a, described later. Additionally, the substrate W, which abuts against the eight guides in the branch blade plate 110b, is pressed and held by the first pusher 71b or the second pusher 72b, described later.

[0171] <5. About the Thrusters>

[0172] Next, the thruster will be explained. Figure 8 The first thruster 71a of the first manipulator of the branch blade 110a and the second thruster 72a of the second manipulator of the first blade 121a and the second blade 122a will be described.

[0173] First, the first thruster 71a will be described. The first thruster 71a is a component for holding a substrate located at the base end of the first manipulator 55a and positioned between a pair of first base end guides 113a. The first thruster 71a includes a first component 711a, a second component 712a, and a connecting component 73a that cross-links the first component 711a and the second component 712a, both having a thickness in the vertical direction Z. The first component 711a and the second component 712a are integrated by the connecting component 73a. The first component 711a and the second component 712a are components with thicker walls in the vertical direction Z than their width in the direction from the first component 711a toward the second component 712a.

[0174] The first thruster 71a has a connecting member 73a disposed on its roof surface, and is further provided with a first member 711a and a second member 712a, which are sidewalls extending along the forward and backward direction of the first thruster 71a within the connecting member 73a. This creates a space surrounded by the connecting member 73a, the first member 711a, and the second member 712a. The third member 721 of the second thruster 72a, described later, is housed within this space.

[0175] The first pusher 71a can move forward and backward toward the substrate W, and can change between a closed state in which the front ends of the first member 711a and the front ends of the second member 712a simultaneously contact the substrate W, and an open state in which the front ends of the first member 711a and the front ends of the second member 712a separate from the substrate W.

[0176] Next, the second thruster 72a will be described. The third member 721 of the second thruster 72a is a substrate gripping member located at the base end of the second manipulator 56a and positioned between a pair of second base end guides 123a. The third member 721 of the second thruster 72a differs from the first member 711a and the second member 712a in that it is wider than its thickness in the vertical direction Z in the direction from the first member 711a toward the second member 712a. As described above, the third member 721 of the second thruster 72a is located in the space surrounded by the connecting member 73a, the first member 711a, and the second member 712a. That is, the third member 721 of the second thruster 72a is located between the first member 711a and the second member 712a of the first thruster 71a.

[0177] The third component 721 of the second thruster 72a can move forward and backward toward the substrate W, and can change its state between a closed state in which the front end contacts the substrate W and an open state in which the front end separates from the substrate W.

[0178] The first thruster 71a is attached to the first manipulator 55a, which is composed of the branch blade 110a, and is therefore configured to move in accordance with the up-and-down movement of the branch blade 110a. Figure 8 In this configuration, since the branch blade 110a is located on the same plane as the first blade 121a and the second blade 122a, the first thruster 71a is positioned vertically at the same location as the second thruster 72a. When the branch blade 110a is raised to its uppermost position, the first thruster 71a also rises and separates from the second thruster 72a. This situation is illustrated in... Figure 2 .

[0179] Figure 8The first thruster 71b of the first manipulator 55a of the branch blade 110b and the second thruster 72b of the second manipulator of the first blade 121b and the second blade 122b are also described.

[0180] The lowest-level first thruster 71b has the same structure as the highest-level first thruster 71a, but it is located below the first thruster 71a, thus forming a shape that reverses the vertical orientation of the first thruster 71a. The first thruster 71b has a connecting member 73b on its bottom surface, and is further provided with a first member 711b and a second member 712b, which serve as sidewalls extending along the forward and backward direction of the first thruster 71b within the connecting member 73b. The second thruster 72b, described later, is housed within the space enclosed by the connecting member 73b, the first member 711b, and the second member 712b.

[0181] Like the first pusher 71a, the first pusher 71b can move forward and backward toward the substrate W, and can change its state between the closed state and the open state. The first pusher 71b is a substrate gripping component located at the base end of the first manipulator 55b and positioned between a pair of first base end guides 113b.

[0182] The third component 722 of the second thruster 72b in the lower intermediate layer has the same structure as the second thruster 72a in the upper intermediate layer. The third component 722 of the second thruster 72b can be located in the space surrounded by the connecting component 73b, the first component 711b, and the second component 712b. That is, the third component 722 of the second thruster 72b is located in a position sandwiched between the first component 711b and the second component 712b of the first thruster 71b.

[0183] The second pusher 72b is also capable of moving forward and backward toward the substrate W, and can change state between the closed state and the open state. The second pusher 72b is a substrate gripping component located at the base end of the second manipulator 56b and positioned between a pair of second base end guides 123b.

[0184] The first thruster 71b is attached to a first manipulator consisting of a branch blade 110b, and is therefore configured to move in accordance with the up-and-down movement of the branch blade 110b. Figure 8 Since the branch blade 110b is located on the same plane as the first blade 121b and the second blade 122b, the first thruster 71b is located at the same position as the second thruster 72b in the vertical direction. When the branch blade 110b is lowered to the lowest level, the first thruster 71a also lowers and separates from the second thruster 72a.

[0185] If reference Figure 9As can be seen from the plan view, the first component 711a and the second component 712a of the first pusher 71a on the uppermost layer are positioned symmetrically about the imaginary line IL. That is, the first component 711a and the second component 712a are positioned symmetrically about each other about the imaginary line IL. Therefore, the first pusher 71a can press one side and the other side of the substrate W when it is divided into two parts by the imaginary line IL under the same conditions, so the substrate W will not rotate when pressed.

[0186] Figure 9 The second actuator 72a in the upper intermediate layer will also be described. The second actuator 72a is located on the imaginary line IL. Thus, the second actuator 72a can press one side and the other side of the substrate W when it is divided into two parts by the imaginary line IL under the same conditions, so the substrate W will not rotate when pressed.

[0187] The bottommost first thruster 71b, like the first thruster 71a, has its first component 711b and second component 712b positioned symmetrically about the imaginary line IL. That is, the first component 711b and second component 712b are positioned linearly symmetrical about each other about the imaginary line IL. Therefore, the first thruster 71b also functions as the first thruster 71a. On the other hand, the second thruster 72b in the lower middle layer is also located on the imaginary line IL, just like the second thruster 72a. Therefore, the second thruster 72b also functions as the second thruster 72a.

[0188] <6. Regarding the drive mechanism of the thruster>

[0189] Figure 10 The drive mechanism that realizes the opening and closing action of the thruster will be described. The drive mechanism of the thruster is housed inside the holding part 61a. The first drive mechanism 101a involved in the operation of the first thruster 71a includes a first power unit 81a that generates power and a first thruster robotic arm 91a that transmits the power of the first power unit 81a to the first thruster 71a.

[0190] The first robotic arm 55a has a first drive mechanism 101a, which enables the first component 711a and the second component 712a to approach the substrate W while maintaining their relative positions. Furthermore, the first drive mechanism 101a includes a first power unit 81a that generates power, and a first thruster arm 91a that transmits the power from the first power unit 81a to the first thruster 71a. The first power unit 81a includes, for example, a cylinder. The other power units 82a, 81b, and 82b are similarly included.

[0191] The first power unit 81a enables the first thruster arm 91a to move forward and backward along the direction of the imaginary line IL. The first power unit 81a is a cuboid-shaped component extending along the imaginary line IL. The first power unit 81a has a base fixed to the holding part 61a and not moving, and a moving part supported on the base. The moving part can move forward and backward along the direction of the imaginary line IL by a power generation source provided on the base. The base end of the first thruster arm 91a is connected to the moving part and can move forward and backward together with the moving part. Since the front end of the first thruster arm 91a is connected to the connecting member 73a of the first thruster 71a, the first power unit 81a can move the connecting member 73a, the first member 711a, and the second member 712a forward and backward by moving the moving part. Based on this principle, the first thruster 71a can change its state between an open state and a closed state.

[0192] The second drive mechanism 102a involved in the operation of the second thruster 72a includes a second power unit 82a that generates power, and a second thruster arm 92a that transmits the power of the second power unit 82a to a third member 721 of the second thruster 72a. The second power unit 82a enables the third member 721 of the second thruster arm 92a to move forward and backward in a direction extending along the imaginary line IL. The second power unit 82a is a cuboid-shaped member extending along the imaginary line IL. Similar to the first power unit 81a, the second power unit 82a has a base fixed to the holding part 61a and not moving, and a moving part supported on the base. The moving part can move forward and backward in a direction extending along the imaginary line IL by a power generation source provided on the base. The base end of the second thruster arm 92a is connected to the moving part and can move forward and backward together with the moving part. Since the front end of the second thruster arm 92a is connected to the second thruster 72a, the second power unit 82a can move the second thruster 72a forward and backward by moving the moving part. Based on this principle, the second thruster 72a is able to change its state between an open state and a closed state.

[0193] The second robotic arm 56a has a second drive mechanism 102a capable of moving the third component 721 of the second thruster 72a forward and backward toward the substrate W. Furthermore, the second drive mechanism 102a includes a second power unit 82a that generates power at a position separated from the first power unit 81a in the vertical direction Z. The second drive mechanism 102a also includes a second thruster robotic arm 92a at a position that avoids the first thruster robotic arm 91a, transmitting the power of the second power unit 82a to the third component 721 of the second thruster 72a.

[0194] The first power unit 81a and the second power unit 82a are stacked in the vertical direction Z. That is, the first power unit 81a is located above the second power unit 82a.

[0195] Figure 10 The aspect that the drive mechanism of the thruster is also located inside the holding part 61b will also be described. The first drive mechanism 101b involved in the operation of the first thruster 71b includes a first power unit 81b that generates power and a first thruster arm 91b that transmits the power of the first power unit 81b to the first thruster 71b. The structure of the first power unit 81b is the same as that of the first power unit 81a, and the structure of the first thruster arm 91b is the same as that of the first thruster arm 91a. Therefore, the first power unit 81b can move the connecting member 73b, the first member 711b, and the second member 712b forward and backward by moving the moving part. Based on this principle, the first thruster 71b can change its state between an open state and a closed state.

[0196] The first robotic arm 55b has a first drive mechanism 101b, which is capable of bringing the first component 711b and the second component 712b close to the substrate W while maintaining their relative positions. Moreover, the first drive mechanism 101b includes a first power unit 81b that generates power and a first thruster robotic arm 91b that transmits the power of the first power unit 81b to the first thruster 71b.

[0197] The second drive mechanism 102b involved in the operation of the second thruster 72b includes a second power unit 82b that generates power, and a second thruster arm 92b that transmits the power from the second power unit 82b to the second thruster 72b. The structure of the second power unit 82b is the same as that of the second power unit 82a, and the structure of the second thruster arm 92b is the same as that of the second thruster arm 92a. Therefore, the second power unit 82b can move the second thruster 72b forward and backward by moving the moving part. Based on this principle, the second thruster 72b can change its state between an open state and a closed state.

[0198] The second manipulator 56b has a second drive mechanism 102b capable of bringing the second thruster 72b close to the substrate W. Furthermore, the second drive mechanism 102b includes a second power unit 82b that generates power at a position separated from the first power unit 81b in the vertical direction Z. The second drive mechanism 102b also includes a second thruster arm 92b that transmits power from the second power unit 82b to the second thruster 72b at a position that avoids the first thruster arm 91b.

[0199] The first power unit 81b and the second power unit 82b are stacked in the vertical direction Z. That is, the first power unit 81b is located below the second power unit 82b. Moreover, the second power unit 82b is located below the second power unit 82a. Therefore, the first power unit 81a, the second power unit 82a, the second power unit 82b, and the first power unit 81a are stacked sequentially.

[0200] Since the first thruster arm 91a and the second thruster arm 92a are arranged in a way that avoids each other, this aspect will be explained. Figure 11 This is a perspective view illustrating the positional relationship between the first thruster arm 91a and the second thruster arm 92a. The first thruster arm 91a, connected to the first thruster 71a, and the second thruster arm 92a, connected to the second thruster 72a, are positioned in a symmetrical relationship about an imaginary line IL. Therefore, when the first thruster arm 91a moves forward or backward, it will not collide with the second thruster arm 92a. Similarly, when the second thruster arm 92a moves forward or backward, it will not collide with the first thruster arm 91a.

[0201] Although the illustration is omitted, the first thruster arm 91b and the second thruster arm 92b of the holding unit 61b are positioned in a symmetrical relationship with respect to the imaginary line IL. Therefore, when the first thruster arm 91b moves forward or backward, it will not collide with the second thruster arm 92b. Similarly, when the second thruster arm 92b moves forward or backward, it will not collide with the first thruster arm 91b.

[0202] Furthermore, the first thruster arm 91a and the second thruster arm 92b are positioned differently in the vertical direction Z, so they will not collide even if either moves. The same applies to the relationships between the first thruster arms 91a and 91b, the second thruster arms 92a and 92b, and the first thruster arm 91b and 92a. Therefore, the first thruster arms 91a, 92a, 91b, and 92b can enable the four thrusters to move independently forward and backward.

[0203] Since the first drive mechanism 101a can move in the vertical direction relative to the second drive mechanism 102a, this aspect will be described. Figure 10 Show each blade as follows Figure 3 The first drive mechanism 101a is configured as shown. The first drive mechanism 101a moves in the vertical direction Z following the lifting and lowering movement of the branch vane 110a. The lifting and lowering action of the first drive mechanism 101a is realized by the lifting mechanism 63a.

[0204] exist Figure 10In this case, the uppermost first drive mechanism 101a is located away from the second drive mechanism 102a in the vertical direction Z. Therefore, a large gap exists between the first drive mechanism 101a and the second drive mechanism 102a. When from Figure 10 When the branch blade 110a descends, the first drive mechanism 101a also descends while maintaining its positional relationship with the branch blade 110a. At this time, the positions of the branch blade 110a and the first thruster 71a in the vertical direction Z are fixed. This is because the first thruster 71a, which is connected to the first drive mechanism 101a, moves up and down along with the first drive mechanism 101a.

[0205] Figure 12 This describes the situation where the branch blade 110a actually descends to the position where the first blade 121a is located. At this time, the gap between the first drive mechanism 101a and the second drive mechanism 102a is reduced to its minimum.

[0206] like Figure 11 As shown, since the first thruster arm 91a and the second thruster arm 92a are positioned in a symmetrical relationship with respect to the imaginary line IL, they will not collide even if, for example, the first drive mechanism 101a descends to the vicinity of the second drive mechanism 102a.

[0207] Next, the first drive mechanism 101b at the lowest level will be described. Figure 10 In this case, the first drive mechanism 101b is located away from the second drive mechanism 102b in the vertical direction Z. Therefore, a large gap exists between the first drive mechanism 101b and the second drive mechanism 102b. When from Figure 10 When the branch blade 110b rises, the first drive mechanism 101b also rises while maintaining its positional relationship with the branch blade 110b. At this time, the positions of the branch blade 110b and the first thruster 71b in the vertical direction Z are fixed. This is because the first thruster 71b, which is connected to the first drive mechanism 101b, rises and falls along with the rise and fall of the first drive mechanism 101b.

[0208] Figure 12 This describes the situation where the branch blade 110b is actually raised to the position where the first blade 121b is located. At this time, the gap between the first drive mechanism 101b and the second drive mechanism 102b is reduced to its minimum.

[0209] Since the first thruster arm 91b and the second thruster arm 92b are positioned in a symmetrical relationship with respect to the imaginary line IL as described above, they will not collide with each other even if, for example, the first drive mechanism 101b rises to the vicinity of the second drive mechanism 102b.

[0210] <7. Effects of the Example>

[0211] As described above, the first manipulator 55a in this example includes a first pusher 71a for holding a substrate, located at the base end of the branch blade 110a and positioned between a pair of first base end guides 113a. The second manipulator 56a includes a second pusher 72a for holding a substrate, positioned between a pair of second base end guides 123a. Furthermore, the first pusher 71a includes a first member 711a and a second member 712a that respectively abut against the substrate, and the third member 721 of the second pusher 72a is located between the first member 711a and the second member 712a. With this configuration, the positions of the first pusher 71a and the second pusher 72a are different. Therefore, even if the first pusher 71a and the second pusher 72a are thick-walled in the vertical direction, the pushers will not interfere with each other. Through this invention, a substrate transport device 100 is provided that reliably holds and transports a warped substrate W or a substrate W with thickness using thick-walled pushers.

[0212] According to the structure of this example, the second robotic arm 56a is positioned so as not to overlap with the first robotic arm 55a when viewed from above. The holding part 61a includes a lifting mechanism 63a that enables the first robotic arm 55a and the second robotic arm 56a to move relative to each other in the vertical direction. The lifting mechanism 63a enables the first robotic arm 55a and the second robotic arm 56a to be located on the same plane and to separate the first robotic arm 55a and the second robotic arm 56a in the vertical direction Z. The structure of this example can also be applied to a substrate transport device in which the number of substrates W can be changed by moving the first robotic arm 55a and the second robotic arm 56a relative to each other in the vertical direction Z.

[0213] According to the structure of this example, the first base end guides 113a are mutually symmetrical about an imaginary line IL that bisects the circular substrate W when viewed from above; the first front end guides 114a are mutually symmetrical about the imaginary line IL; the second base end guides 123a are mutually symmetrical about the imaginary line IL; the second front end guides 124a are mutually symmetrical about the imaginary line IL; the first component 711a and the second component 712a in the first pusher 71a are mutually symmetrical about the imaginary line IL; and the second pusher 72a is located on the imaginary line IL. With this configuration, the first pusher 71a pushes the substrate W from the left and right, pushing the substrate against the first front end guides 114a that are mutually symmetrical about the imaginary line IL. Furthermore, the second pusher 72a pushes the substrate W from the center, pushing the substrate W against a pair of second front end guides 124a that are mutually symmetrical about the imaginary line IL. If configured in this way, the substrate will not shift position when held with an adhesive substrate.

[0214] According to the structure of this example, it includes: a first holding part 61a having a first robotic arm 55a and a second robotic arm 56a; and a second holding part 61b having a first robotic arm 55a and a second robotic arm 56a, which is disposed separately from the first holding part 61a in the vertical direction. With such a configuration, the number of substrates that can be transported simultaneously can be increased.

[0215] According to the structure of this example, the first robotic arm 55a includes a first drive mechanism 101a, which is capable of bringing the first component 711a and the second component 712a close to the substrate W while maintaining their relative positions. The second robotic arm 56a includes a second drive mechanism 102a capable of bringing the second pusher 72a close to the substrate W. With this configuration, the first drive mechanism 101a causes the first robotic arm 55a to grasp the substrate W by simultaneously bringing the first component 711a and the second component 712a close to the substrate W. Thus, the substrate W is grasped by forces of equal strength on both sides. With this structure, the substrate W can be reliably grasped.

[0216] According to the structure of this example, the first drive mechanism 101a includes a first power unit 81a that generates power and a first propeller arm 91a that transmits the power of the first power unit 81a to the first propeller 71a. The second drive mechanism 102a includes a second power unit 82a that generates power at a position separated from the first power unit 81a in the vertical direction, and a second propeller arm 92a that transmits the power of the second power unit 82a to the second propeller 72a at a position avoiding the first propeller arm 91a. With this configuration, the power units can be stacked in the vertical direction to form a substrate conveying device, and the structure of the present invention can be realized even without making major design changes to existing devices.

[0217] [Example 2]

[0218] This example relates to a substrate processing apparatus 1 equipped with the substrate conveying device 100 described in Embodiment 1. Hereinafter, its details will be described.

[0219] <8. Overall Structure>

[0220] Figure 13 This is a plan view showing the overall structure of the substrate processing apparatus in this example. The substrate processing apparatus 1 in this example has a sorting block 3 and a processing block 4. The substrate processing apparatus 1 has a block frame 1A that houses each block. The block frame 1A is roughly rectangular in shape when viewed from above. A loading port 11 is provided protruding from the wall at one end of the block frame 1A.

[0221] In this example, for convenience, the direction in which the indexer block 3 and the processing block 4 in the substrate processing apparatus 1 are arranged is referred to as the front-back direction (X direction). The X direction extends horizontally. The direction from the processing block 4 in the substrate processing apparatus 1 toward the indexer block 3 is referred to as the front. The direction opposite to the front is referred to as the rear. The horizontal direction orthogonal to the X direction is referred to as the left-right direction (Y direction). The Y direction is also the direction in which the multiple loading ports 11 are arranged. For convenience, one side of the Y direction is referred to as the right, and the opposite direction is referred to as the left. The height direction (Z direction) is orthogonal to both the X and Y directions and is consistent with the vertical direction. In the figures, for reference, front, rear, right, left, up, and down are appropriately indicated.

[0222] <9. Indexer Block>

[0223] like Figure 13 As shown, the indexer block 3 includes a loading port 11, which is the inlet for loading a carrier C, which holds multiple substrates W at predetermined intervals in a horizontal orientation, into the block. The loading port 11 can hold the carrier C.

[0224] Multiple (e.g., 25) substrates W are stacked and stored in a carrier C. The carrier C, which holds the unprocessed substrates W that are brought into the substrate processing apparatus 1, is first placed at the loading port 11.

[0225] A sorting robot IR, capable of simultaneously transporting four horizontally oriented substrates W, is configured in sorting block 3. The sorting robot IR may include the substrate transport device 100. The sorting robot IR can be connected to... Figure 1 The path 34, which marks the boundary between the indexer block 3 and the processing block 4, and any one of the four loading ports 11, allows for the transfer of the substrate W between the path 34 and the carrier C located at the loading port 11. The transfer of the substrate W to the indexer robot IR is achieved by the gripping mechanism 50.

[0226] Path 34 can stack up to four substrates W in the vertical direction Z and provide support.

[0227] <10. Processing Blocks>

[0228] Processing block 4 is a structure primarily for removing the natural oxide film grown on the surface of substrate W. Processing block 4 has a second column CL2 located at the rear of path 34, a first column CL1 located to the left of the second column CL2, and a third column CL3 located to the right of the second column CL2. Therefore, the second column CL2 is positioned between the first column CL1 and the third column CL3 from the left and right.

[0229] In the first column CL1, liquid treatment chambers 41 are arranged in the X direction. Each liquid treatment chamber 41 has a mechanical chuck 8 that supports the substrate W in a rotatable manner, and a nozzle 10 that supplies liquid to the substrate W, thereby treating the substrate W with the liquid. The liquid treatment chamber 41 is configured to house the mechanical chuck 8 or the nozzle 10 within a cuboid-shaped frame 42. Figure 13 The following describes the configuration where two drug treatment chambers 41 are arranged in the first column CL1. The first column CL1 has a stacked body with drug treatment chambers 41 stacked on top of each other. The stacked body is constructed by stacking two or more drug treatment chambers 41.

[0230] The second column CL2 serves as a pathway for the central robot CR to move back and forth while transporting the horizontally oriented substrate W. In addition to accessing the path 34, the central robot CR can also access either the liquid treatment chamber 41 of the first column CL1 or the liquid treatment chamber 41 of the third column CL3, which will be described later.

[0231] The central robot CR can move freely forward and backward in the X direction and rise and fall freely in the Z direction, enabling it to transport the substrate W to various accessible positions. Furthermore, the central robot CR can orient the robotic arm 46 that holds the substrate W towards any of the following directions: forward, left, or right.

[0232] The third column CL3 has the same structure as the first column CL1. In the third column CL3, two drug treatment chambers 41 are arranged in the X direction. The third column CL3 has a stacked body with the drug treatment chambers 41 stacked on top of each other. The stacked body is constructed by stacking two or more layers of drug treatment chambers 41.

[0233] <11. Other Structures>

[0234] like Figure 13 As shown, the substrate processing apparatus 1 includes a control unit 131 related to the control of the apparatus. Additionally, although... Figure 13 Although not shown in the figure, a corresponding storage unit is provided in the control unit 131. The control unit 131 includes, for example, a central processing unit (CPU). The specific structure of the control unit is not limited; for example, each control involved in the board processing device 1 may be constituted by a single processor, or each control may be constituted by an independent processor.

[0235] As for the controls related to the control unit 131, there are, for example, controls related to the indexer robot IR and the center robot CR.

[0236] The storage unit stores programs or parameters related to control. The storage unit can be composed of a single component or independent components corresponding to each control. Furthermore, the substrate processing apparatus 1 in this example does not impose any particular limitation on the structure of the components implementing the storage unit.

[0237] Thus, the substrate conveying device 100 in this example can be used in the substrate processing device 1.

[0238] <12. Variations>

[0239] The present invention is not limited to the structure described herein, and can be implemented in variations as follows.

[0240] <Variation Example 1>

[0241] exist Figure 14In the illustrated modification, the shapes of the front ends of the first member 711a and the second member 712a of the first pusher 71a that are for contact with the substrate W mimic the shape of the substrate W, and the shape of the front end of the second pusher 72a that is for contact with the substrate W mimics the shape of the substrate W. With this configuration, the first member 711a and the second member 712a of the first pusher 71a can hold the substrate W with a wide contact surface. Therefore, the holding of the substrate W by the first pusher 71a becomes more reliable. Similarly, the front end of the second pusher 72a can hold the substrate W with a wide contact surface. Therefore, the holding of the substrate W by the second pusher 72a becomes more reliable.

[0242] <Variation Example 2>

[0243] exist Figure 15 In the modified example shown, the front end of the first member 711a protrudes in a direction orthogonal to the moving direction of the first member 711a (the extension direction of the imaginary line IL), and the front end of the second member 712a protrudes in a direction orthogonal to the moving direction of the second member 712a (the extension direction of the imaginary line IL). With this configuration, the first member 711a and the second member 712a in the first pusher 71a can grip the substrate W with a wide contact surface. Therefore, the gripping of the substrate by the first pusher 71a becomes more reliable.

Claims

1. A substrate conveying apparatus for conveying substrates, characterized in that it comprises: The first robotic arm is capable of holding a substrate in a horizontal position; The second robotic arm is capable of holding a substrate with a different horizontal orientation than the substrate. The holding unit arranges and holds the first robotic arm and the second robotic arm in the vertical direction; A robotic arm supports the retaining part in a movable manner; as well as The base component supports the robotic arm. The first robotic arm includes: a first blade; a pair of first base end guides disposed at the base end of the first blade and in contact with the lower surface of the substrate to support the substrate; a pair of first front end guides disposed at the front end of the first blade and in contact with the lower surface of the substrate to support the substrate; and a first pusher for holding the substrate, located at the base end of the first blade and positioned between the pair of first base end guides. The second robotic arm includes: a second blade; a pair of second base-end guides disposed at the base end of the second blade and in contact with the lower surface of the substrate to support the substrate; a pair of second front-end guides disposed at the front end of the second blade and in contact with the lower surface of the substrate to support the substrate; and a second pusher for holding the substrate, located at the base end of the second blade and positioned between the pair of second base-end guides. The first pusher includes a first component and a second component that abut against the substrate and press the substrate forward, respectively. The second pusher includes a third component that abuts against the substrate and presses the substrate forward. The third component is located in a position where it is sandwiched between the first component and the second component when viewed from above.

2. The substrate conveying device according to claim 1, characterized in that, The second robotic arm is positioned so as not to overlap with the first robotic arm when viewed from above. The holding part includes a lifting mechanism that enables the first robotic arm and the second robotic arm to move relative to each other in the vertical direction. The lifting mechanism can be configured to be either coplanar, where the first robotic arm and the second robotic arm are located on the same plane, or separated, where the first robotic arm and the second robotic arm are separated in the vertical direction.

3. The substrate conveying device according to claim 1, characterized in that, The pair of first base end guides are linearly symmetrical to each other, with an imaginary line that bisects the circular substrate when viewed from above as a reference. The pair of first front-end guides are symmetrical about each other with the imaginary line as the reference. The pair of second base end guides are symmetrical about each other with respect to the imaginary line. The pair of second front-end guides are symmetrical about each other with the imaginary line as the reference. The first component and the second component in the first thruster are linearly symmetrical about the imaginary line. The third component of the second thruster is located on the imaginary line.

4. The substrate conveying device according to claim 1, characterized in that, The shape of the front end of the first component and the second component of the first thruster that is abutted by the substrate is modeled after the shape of the substrate. The shape of the front end of the third component of the second thruster that is abutted by the substrate is modeled after the shape of the substrate.

5. The substrate conveying device according to claim 4, characterized in that, The front end of the first component protrudes in a direction orthogonal to the direction of movement of the first component. The front end of the second component protrudes in a direction orthogonal to the direction of movement of the second component.

6. The substrate conveying device according to claim 1, characterized in that, include: The first holding part has the first robotic arm and the second robotic arm; as well as The second holding part has two robotic arms identical to the first robotic arm and the second robotic arm, and is disposed separately from the first holding part in the vertical direction.

7. The substrate conveying device according to claim 1, characterized in that, The first robotic arm includes a first driving mechanism, which enables the first component and the second component to move forward and backward toward the substrate while maintaining their relative positions. The second robotic arm includes a second drive mechanism capable of moving the third component toward the substrate.

8. The substrate conveying device according to claim 7, characterized in that, The first drive mechanism includes a first power unit that generates power, and a first thruster robotic arm that transmits the power from the first power unit to the first and second components of the first thruster. The second drive mechanism includes a second power unit that generates power at a position separated from the first power unit in the vertical direction. The second drive mechanism, in a position that avoids the first thruster arm, includes a second thruster arm that transmits power from the second power unit to a third component of the second thruster.

9. A substrate processing apparatus, comprising the substrate conveying apparatus as described in claim 1, characterized in that, This includes a single-sheet processing chamber for performing specified treatments on the substrate.

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