Chemical vapor deposition reinforced dome and preparation method thereof

Abstract

The invention relates to a reinforced dome for chemical vapor deposition and a preparation method thereof, in particular to the technical field of vapor deposition, and the reinforced dome comprises a dome body and at least three reinforcing ribs arranged on the dome body; the distribution mode of the reinforcing ribs comprises one or a combination of at least two of radial distribution, concentric circle distribution and net-shaped distribution; and the ratio of the height to the width of the reinforcing rib is (1.5-2.5): 1. According to the dome provided by the invention, the use performance of the dome is improved by designing specifically distributed reinforcing ribs in the dome, so that the problem that the CVD epitaxial dome is in high temperature (gt; and the problems of stress concentration and structure cracking caused by temperature gradient under the conditions of high temperature (1000 DEG C) and rapid thermal cycle are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vapor deposition, in particular to a reinforced dome for chemical vapor deposition and a preparation method thereof. BACKGROUND

[0002] In a chemical vapor deposition device, the dome needs to withstand a high-temperature plasma environment and uniformly distribute the reaction gas, and therefore needs to have high thermal conductivity, corrosion resistance and mechanical strength.

[0003] CN118166341A discloses a shielding cover and a vapor deposition device, wherein the shielding cover is applied to the vapor deposition device, the vapor deposition device includes a reaction chamber, the reaction chamber includes a reaction cavity and a ceramic dome, the ceramic dome is located above the reaction cavity, a cavity cover plate is arranged between the reaction cavity and the ceramic dome, the reaction cavity and the ceramic dome are sealingly connected through the cavity cover plate, and the outer side wall of the ceramic dome is surrounded by a radio frequency coil.

[0004] The existing dome materials include: quartz dome: resistant to high temperature but easy to crack, poor thermal shock resistance. Ordinary graphite dome: high thermal conductivity but easy to oxidize, strength decay at high temperature. Graphite composite dome (such as SiC coating): good corrosion resistance, uneven thermal stress, easy to crack.

[0005] However, the current single material cannot have high thermal conductivity, corrosion resistance and low thermal expansion coefficient, and the difference in thermal expansion coefficient between the coating and the substrate leads to interface peeling, and the homogeneous thickness design leads to stress concentration under temperature gradient, dome deformation, insufficient strength causing cracks, thereby affecting the deposition quality.

[0006] In summary, the existing dome design has the defects of poor service life due to stress concentration and structure cracking caused by temperature gradient under high temperature (> 1000℃) and rapid thermal cycle conditions. SUMMARY

[0007] In view of the problems in the prior art, the purpose of the present application is to provide a reinforced dome for chemical vapor deposition and a preparation method thereof, to solve the problems of stress concentration and structure cracking caused by temperature gradient under high temperature (> 1000℃) and rapid thermal cycle conditions for traditional CVD epitaxial dome.

[0008] To achieve this purpose, the present application adopts the following technical solutions:

[0009] In a first aspect, the present application provides a reinforced dome for chemical vapor deposition, comprising:

[0010] a dome body, at least three reinforcing ribs arranged on the dome body,

[0011] The distribution of the reinforcing ribs comprises one of radial distribution, concentric circle distribution or net-like distribution, or a combination of at least two of them.

[0012] The ratio of the height to the width of the reinforcing rib is (1.5-2.5):1.

[0013] The dome provided by the application improves the performance of the dome by designing reinforcing ribs in a specific distribution, thereby solving the problem of stress concentration and structure cracking caused by temperature gradient under the condition of high temperature (>1000℃) and rapid thermal cycle of the CVD epitaxial dome.

[0014] As a preferred technical solution of the application, the reinforcing rib comprises a straight reinforcing rib and / or a wavy reinforcing rib.

[0015] As a preferred technical solution of the application, the cross-sectional shape of the reinforcing rib comprises one of a triangle, an arc or a polygon, or a combination of at least two of them.

[0016] Preferably, the material of the reinforcing rib comprises one of the dome body material, carbon fiber reinforced silicon carbide or carbon fiber reinforced graphite, or a combination of at least two of them.

[0017] As a preferred technical solution of the application, when the distribution of the reinforcing rib comprises radial distribution, the included angle between adjacent reinforcing ribs is 15-120°.

[0018] As a preferred technical solution of the application, when the distribution of the reinforcing rib comprises concentric circle distribution, the radial distance between adjacent reinforcing ribs is 20-50mm.

[0019] As a preferred technical solution of the application, when the distribution of the reinforcing rib comprises net-like distribution, the equivalent circle diameter of the grid in the net-like distribution is 10-30mm.

[0020] Preferably, the shape of the grid comprises one of a triangular grid, a circular grid or a polygonal grid, or a combination of at least two of them.

[0021] As a preferred technical solution of the application, the width of the reinforcing rib is 2-6mm.

[0022] In a second aspect, the application provides a preparation method of the reinforced dome according to the first aspect, which comprises chemical vapor infiltration forming connection or separate bonding.

[0023] As a preferred technical solution of the application, the chemical vapor infiltration forming connection comprises placing the reinforcing rib in the rib groove on the dome base, and then performing chemical vapor infiltration connection to obtain the reinforced dome.

[0024] Preferably, the operation temperature of the chemical vapor infiltration connection is 1000-1200℃.

[0025] Preferably, the operation pressure of the chemical vapor infiltration connection is 8-15kPa.

[0026] Preferably, the time of the chemical vapor infiltration connection is 50-100h.

[0027] As a preferred technical scheme of the present application, the split bonding comprises: using ceramic glue to bond the reinforcing rib and the rib groove on the dome base.

[0028] Preferably, the thickness of the glue layer in the bonding is ≤0.1mm.

[0029] Compared with the prior art, the present application has the following beneficial effects:

[0030] The reinforcing dome provided by the present application optimizes the stress distribution of the dome (the maximum stress is ≤134MPa, and the maximum stress is ≤124MPa in the preferred scheme) by using the specific distribution of the reinforcing rib, and reduces the thermal deformation amount of the dome (the thermal deformation amount is ≤0.35mm, and the thermal deformation amount is ≤0.26mm in the preferred scheme) by means of the distribution connection of the reinforcing rib, thereby ensuring the thermal cycle service life of the dome. Further, due to the arrangement of the reinforcing rib, the bending strength of the dome is also significantly improved, and the bending strength is ≥135MPa, and the bending strength is ≥146MPa in the preferred scheme, thereby ensuring the stability of the dome during long-term use. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 is a schematic view of the reinforcing rib in the embodiment of the present application in a radial distribution;

[0032] Figure 2 is a schematic view of the reinforcing rib in the embodiment of the present application in a concentric circle distribution;

[0033] Figure 3 is a schematic view of the reinforcing rib in the embodiment of the present application in a mesh distribution;

[0034] Figure 4 is a schematic view of the reinforcing rib in the embodiment of the present application in a radial distribution, and the reinforcing rib is a wave-shaped reinforcing rib;

[0035] Figure 5 is a schematic view of the reinforcing rib in the embodiment of the present application in a concentric circle distribution, and the reinforcing rib is a wave-shaped reinforcing rib.

[0036] In the figure: 100-dome body, 200-reinforcing rib.

[0037] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0038] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0039] This embodiment provides a chemical vapor deposition reinforced dome, the reinforced dome comprising:

[0040] The dome body 100 has at least three reinforcing ribs 200 disposed on it.

[0041] The distribution of the reinforcing ribs 200 includes one or a combination of at least two of the following: radial distribution, concentric circle distribution, or mesh distribution;

[0042] The height to width ratio of the reinforcing rib 200 is (1.5-2.5):1.

[0043] In this invention, radial distribution refers to the fact that the reinforcing ribs 200 radiate outwards from the center of the top of the dome, such as... Figure 1 As shown.

[0044] In this invention, concentric circle distribution refers to the distribution of the reinforcing ribs 200 around the dome at certain intervals along its axial direction, such as... Figure 2 As shown.

[0045] In this invention, the mesh distribution refers to the interlacing distribution of multiple reinforcing ribs 200, such as... Figure 3 As shown.

[0046] In this invention, the height to width ratio of the reinforcing rib 200 is (1.5-2.5):1, for example, it can be 1.5:1, 1.6:1, 1.7:1, 1.8:1, 1.9:1, 2:1, 2.1:1, 2.2:1, 2.3:1, 2.4:1 or 2.5:1, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0047] The reinforcing rib 200 includes straight reinforcing ribs and / or wavy reinforcing ribs.

[0048] In this invention, the heights of the crests and troughs of the corrugated stiffener can be selected according to actual conditions, and the height of the crest or trough can be selected as 2-5 times the height of the stiffener 200. Using corrugated stiffeners can further optimize the stress distribution of the dome, thereby further reducing the thermal deformation of the reinforced dome. Figure 4 and Figure 5 As shown.

[0049] The cross-sectional shape of the reinforcing rib 200 comprises one of a triangle, an arc, or a polygon, or a combination of at least two thereof.

[0050] In the present application, the combination of the cross-sectional shape of the reinforcing rib 200 refers to the combination of different cross-sectional shapes of the reinforcing rib 200.

[0051] When the distribution of the reinforcing rib 200 comprises a radial distribution, the included angle between adjacent reinforcing ribs 200 is 15-120°, for example, 15°, 20°, 30°, 40°, 50°, 60°, 70°, 80°, 90°, 100°, 110°, or 120°, etc., but not limited to the listed values, other values not listed in this range also meet the requirements.

[0052] When the distribution of the reinforcing rib 200 comprises a concentric distribution, the radial spacing between adjacent reinforcing ribs 200 is 20-50mm, for example, 20mm, 22mm, 24mm, 26mm, 28mm, 30mm, 32mm, 34mm, 36mm, 38mm, 40mm, 42mm, 44mm, 46mm, 48mm, or 50mm, etc., but not limited to the listed values, other values not listed in this range also meet the requirements.

[0053] When the distribution of the reinforcing rib 200 comprises a mesh distribution, the equivalent circle diameter of the mesh in the mesh distribution is 10-30mm, for example, 10mm, 12mm, 14mm, 16mm, 18mm, 20mm, 22mm, 24mm, 26mm, 28mm, or 30mm, etc., but not limited to the listed values, other values not listed in this range also meet the requirements.

[0054] The shape of the mesh comprises one of a triangular mesh, a circular mesh, or a polygonal mesh, or a combination of at least two thereof.

[0055] In the present application, the specific size parameters of the mesh can be reasonably confirmed according to the equivalent circle diameter.

[0056] The material of the reinforcing rib 200 comprises one of the material of the dome body 100, carbon fiber reinforced silicon carbide, or carbon fiber reinforced graphite, or a combination of at least two thereof.

[0057] In the present application, the material of the dome body 100 can be exemplarily selected as high-density graphite with a density ≥1.85g / cm 3 .

[0058] In the present application, the combination of the material of the reinforcing rib 200 refers to the mixed use of reinforcing ribs 200 of multiple materials.

[0059] The width of the reinforcing rib 200 is 2-6mm, for example, 2mm, 2.2mm, 2.4mm, 2.6mm, 2.8mm, 3mm, 3.2mm, 3.4mm, 3.6mm, 3.8mm, 4mm, 4.2mm, 4.4mm, 4.6mm, 4.8mm, 5mm, 5.2mm, 5.4mm, 5.6mm, 5.8mm or 6mm, etc., but not limited to the listed values, other unlisted values within the range are also acceptable.

[0060] Secondly, the application provides a preparation method of the reinforced dome, which comprises: chemical vapor infiltration forming connection or split bonding.

[0061] The chemical vapor infiltration forming connection comprises: placing the reinforcing rib 200 in the rib groove on the dome base, and then performing chemical vapor infiltration connection to obtain the reinforced dome.

[0062] The operation temperature of the chemical vapor infiltration connection is 1000-1200℃, for example, 1000℃, 1020℃, 1040℃, 1060℃, 1080℃, 1100℃, 1120℃, 1140℃, 1160℃, 1180℃ or 1200℃, etc., but not limited to the listed values, other unlisted values within the range are also acceptable.

[0063] The operation pressure of the chemical vapor infiltration connection is 8-15kPa, for example, 8kPa, 8.5kPa, 9kPa, 9.5kPa, 10kPa, 10.5kPa, 11kPa, 11.5kPa, 12kPa, 12.5kPa, 13kPa, 13.5kPa, 14kPa, 14.5kPa or 15kPa, etc., but not limited to the listed values, other unlisted values within the range are also acceptable.

[0064] The time of the chemical vapor infiltration connection is 50-100h, for example, 50h, 55h, 60h, 65h, 70h, 75h, 80h, 85h, 90h, 95h or 100h, etc., but not limited to the listed values, other unlisted values within the range are also acceptable.

[0065] The split bonding comprises: using ceramic glue to bond the reinforcing rib 200 and the rib groove on the dome base.

[0066] In the application, the ceramic glue used in the bonding can be selected as high-temperature ceramic glue (such as Al2O3-based glue) etc.

[0067] The thickness of the adhesive layer is ≤0.1 mm, for example, 0.1 mm, 0.08 mm, 0.06 mm, 0.04 mm, 0.02 mm or 0.01 mm, but is not limited to the listed values, and other values not listed in the range are also acceptable.

[0068] III. In order to illustrate the good use effect of the reinforced dome provided by the present application, the following actual examples are used for illustration, as follows:

[0069] Example 1

[0070] The present embodiment provides a chemical vapor deposition reinforced dome, comprising:

[0071] a dome body, 8 reinforcing ribs arranged on the dome body;

[0072] The reinforcing ribs are distributed in a radial distribution;

[0073] The reinforcing ribs are straight-line reinforcing ribs, the cross-sectional shape is triangular, and the material is carbon fiber reinforced silicon carbide;

[0074] The ratio of the height to the width of the reinforcing rib is 2:1, and the width of the reinforcing rib is 2 mm;

[0075] When the distribution of the reinforcing ribs includes radial distribution, the included angle between adjacent reinforcing ribs is 45°.

[0076] The preparation process is as follows:

[0077] The reinforcing rib is placed in the rib groove on the dome base, and then chemical vapor infiltration connection is performed to obtain a reinforced dome;

[0078] The operation temperature of the chemical vapor infiltration connection is 1100°C, the operation pressure is 10 kPa, and the time is 60 h.

[0079] Example 2

[0080] The present embodiment provides a chemical vapor deposition reinforced dome, comprising:

[0081] a dome body, 4 reinforcing ribs arranged on the dome body;

[0082] The reinforcing ribs are distributed in a concentric circular distribution, and share a common center with the dome body;

[0083] The reinforcing ribs are straight-line reinforcing ribs, the cross-sectional shape is semicircular, and the material is carbon fiber reinforced graphite;

[0084] The ratio of the height to the width of the reinforcing rib is 1.5:1, and the width of the reinforcing rib is 3 mm;

[0085] When the distribution of the reinforcing ribs is a concentric circle distribution, the radial distance between adjacent reinforcing ribs is 20 mm.

[0086] The preparation process is as follows:

[0087] The reinforcing rib is placed in the rib groove on the dome base, and then chemical vapor infiltration connection is performed to obtain a reinforced dome.

[0088] The operation temperature of the chemical vapor infiltration connection is 1100°C, the operation pressure is 12 kPa, and the time is 80 h.

[0089] Example 3

[0090] The embodiment provides a chemical vapor deposition reinforced dome, which comprises:

[0091] A dome body and reinforcing ribs arranged on the dome body.

[0092] The distribution of the reinforcing ribs is a mesh distribution.

[0093] The reinforcing rib is a straight reinforcing rib, the cross-sectional shape is a square, and the material is a dome body (high-density graphite, density 1.85 g / cm 3 );

[0094] The ratio of the height to the width of the reinforcing rib is 1.5:1, and the width of the reinforcing rib is 4 mm.

[0095] The distribution of the reinforcing ribs is a mesh distribution, the equivalent circle diameter of the mesh in the mesh distribution is 20 mm, and the number of reinforcing ribs is determined according to the size of the mesh and the diameter (300 mm) of the dome; and the shape of the mesh is a circular mesh.

[0096] The preparation process is as follows:

[0097] The reinforcing rib is placed in the rib groove on the dome base, and then chemical vapor infiltration connection is performed to obtain a reinforced dome.

[0098] The operation temperature of the chemical vapor infiltration connection is 1000°C, the operation pressure is 15 kPa, and the time is 100 h.

[0099] Example 4

[0100] The embodiment provides a chemical vapor deposition reinforced dome, which comprises:

[0101] A dome body and 12 reinforcing ribs arranged on the dome body.

[0102] The distribution of the reinforcing ribs comprises radial distribution and concentric circle distribution, wherein the reinforcing ribs in the radial distribution are 8, and the reinforcing ribs in the concentric circle distribution are 4;

[0103] The reinforcing rib is a wave-shaped reinforcing rib, the cross-sectional shape is a triangle, and the material is carbon fiber reinforced graphite;

[0104] The ratio of the height to the width of the reinforcing rib is 2.5:1, and the width of the reinforcing rib is 2 mm;

[0105] When the distribution of the reinforcing rib is radial distribution, the included angle between adjacent reinforcing ribs is 30°;

[0106] When the distribution of the reinforcing rib is concentric circle distribution, the radial spacing between adjacent reinforcing ribs is 50 mm.

[0107] The preparation process is as follows:

[0108] The reinforcing rib is placed in the rib groove on the dome base, and then chemical vapor infiltration connection is performed to obtain a reinforced dome;

[0109] The operation temperature of the chemical vapor infiltration connection is 1200℃, the operation pressure is 8kPa, and the time is 50h.

[0110] Example 5

[0111] The difference from Example 1 is that the straight reinforcing rib is replaced by a wave-shaped reinforcing rib.

[0112] Example 6

[0113] The difference from Example 2 is that the straight reinforcing rib is replaced by a wave-shaped reinforcing rib.

[0114] Example 7

[0115] The difference from Example 3 is that the straight reinforcing rib is replaced by a wave-shaped reinforcing rib.

[0116] Example 8

[0117] The difference from Example 1 is that the width of the reinforcing rib is 1mm.

[0118] Example 9

[0119] The difference from Example 1 is that the width of the reinforcing rib is 8mm.

[0120] Comparative Example 1

[0121] The difference from Example 1 is that no reinforcing rib is provided.

[0122] Comparative Example 2

[0123] The difference from Example 1 is that the ratio of the height to the width of the reinforcing rib is 1:2.

[0124] Comparative Example 3

[0125] The difference from Example 1 is that the ratio of the height to the width of the reinforcing rib is 3.5:1.

[0126] The above reinforcing dome design is subjected to thermal-mechanical coupling simulation test by ANSYS, and the model parameters are as follows: temperature field: 1200℃ at the center of the top and 800℃ at the edge (gradient 500℃); load: air pressure difference 0.1 MPa + mechanical vibration load (5-50 Hz); the dome obtained in the example and the comparative example is subjected to three-point bending test to test the strength of the dome; and the thermal cycle test is also carried out (1000 times), and then the scanning electron microscope is used to observe whether there is crack on the surface of the dome, and the results are shown in Table 1 below.

[0127] Table 1

[0128]

[0129]

[0130] As shown in Table 1, the scheme provided by the present application improves the use performance of the dome by designing the reinforcing rib with specific distribution in the dome, thereby solving the problems of stress concentration and structure cracking of the CVD epitaxial dome caused by temperature gradient under the conditions of high temperature (>1000℃) and rapid thermal cycle.

[0131] The above describes the preferred embodiments of the present application, but the present application is not limited to the specific details in the above embodiments, and various simple modifications can be made to the technical scheme of the present application within the technical concept of the present application, and these simple modifications all belong to the protection scope of the present application.

[0132] In addition, it should be noted that each specific technical feature described in the above specific embodiments can be combined in any appropriate manner without contradiction, and in order to avoid unnecessary repetition, the present application will not further describe various possible combinations.

[0133] In addition, various different embodiments of the present application can also be combined in any manner, as long as it does not deviate from the technical concept of the present application, and it should be considered as the disclosed content of the present application.​

Claims

1. A chemical vapor deposition reinforced dome, characterized in that, The reinforced dome includes: The dome body has at least three reinforcing ribs. The distribution of the reinforcing ribs includes one or a combination of at least two of the following: radial distribution, concentric circle distribution, or mesh distribution; The height to width ratio of the reinforcing rib is (1.5-2.5):

1.

2. The reinforced dome as described in claim 1, characterized in that, The reinforcing ribs include straight reinforcing ribs and / or wavy reinforcing ribs.

3. The reinforced dome as described in claim 1 or 2, characterized in that, The cross-sectional shape of the reinforcing rib includes one or a combination of at least two of the following: triangle, arc, or polygon. Preferably, the material of the reinforcing rib includes: the dome body material, carbon fiber reinforced silicon carbide, or carbon fiber reinforced graphite, or a combination of at least two of these materials.

4. The reinforced dome as described in any one of claims 1-1, characterized in that, When the reinforcing ribs are distributed radially, the angle between adjacent reinforcing ribs is 15-120°.

5. The reinforced dome as described in any one of claims 1-4, characterized in that, When the reinforcing ribs are distributed in concentric circles, the radial spacing between adjacent reinforcing ribs is 20-50 mm.

6. The reinforced dome according to any one of claims 1-5, characterized in that, When the reinforcing ribs are distributed in a mesh pattern, the equivalent circle diameter of the mesh is 10-30 mm. Preferably, the shape of the grid includes one or a combination of at least two of the following: a triangular grid, a circular grid, or a polygonal grid.

7. The reinforced dome according to any one of claims 1-6, characterized in that, The width of the reinforcing rib is 2-6mm.

8. A method for preparing a reinforced dome as described in any one of claims 1-7, characterized in that, The preparation method includes: chemical vapor infiltration molding connection or split bonding.

9. The preparation method according to claim 8, characterized in that, The chemical vapor infiltration molding connection includes: placing the reinforcing ribs in the rib grooves on the dome substrate, and then performing chemical vapor infiltration connection to obtain a reinforced dome; Preferably, the operating temperature of the chemical vapor permeation connection is 1000-1200℃; Preferably, the operating pressure of the chemical vapor permeation connection is 8-15 kPa; Preferably, the chemical vapor permeation connection time is 50-100 hours.

10. The preparation method according to claim 8 or 9, characterized in that, The split bonding includes: using ceramic adhesive to bond the reinforcing ribs and the grooves on the dome base; Preferably, the thickness of the adhesive layer in the bonding process is ≤0.1mm.

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