Crystal silicon wafer coating equipment

Abstract

The invention belongs to the field of coating equipment, and particularly relates to crystal silicon wafer coating equipment. The crystal silicon wafer coating equipment comprises a graphite boat; the graphite boat comprises at least one graphite boat page string group, and the graphite boat page string group comprises a plurality of graphite boat pages, a plurality of conductive blocks and a plurality of insulating blocks. The plurality of graphite boat pages are arranged at intervals in the first direction; the plurality of conductive blocks are arranged between the two ends of the adjacent graphite boat pages in the second direction, and the plurality of adjacent graphite boat pages are connected in parallel to form a plurality of graphite boat page assemblies; an insulating block is clamped at one end of each of two adjacent graphite boat page assemblies in the second direction, and a conductive block is clamped at the other end of each of the two adjacent graphite boat page assemblies in the second direction, so that the graphite boat page assemblies are electrically connected end to end in sequence. According to the graphite boat provided by the invention, self-heating and rapid heating can be realized, the heating time is shortened, the cooling time can be shortened under the condition that a heating wire in a furnace body of crystal silicon wafer coating equipment is omitted, the coating process time is greatly shortened, the efficiency is improved, and the cost is reduced.

Description

Technical Field

[0001] This application belongs to the field of coating equipment, and in particular relates to equipment for coating silicon wafers. Background Technology

[0002] Graphite boats are used in coating equipment. A graphite boat consists of multiple graphite boat sheets arranged side by side at intervals, and each graphite boat sheet can hold multiple silicon wafers. Existing coating equipment includes a furnace body, which can be sealed to form a sealed chamber for housing the graphite boat. Heating wires are installed inside the outer peripheral wall of the furnace body. When energized, the heating wires raise the temperature inside the sealed chamber, so that the ambient temperature of the graphite boat is at the suitable temperature required for coating.

[0003] However, the heat generated by the heating wire needs to be transferred to the graphite boat, which causes some energy loss and results in a longer heating time. Moreover, due to the heat preservation effect of the heating wire on the outer wall, the cooling time for the graphite boat to reach the temperature required for exiting the furnace is also longer, which in turn prolongs the entire coating process, resulting in lower efficiency and increased cost. Summary of the Invention

[0004] This application provides a silicon wafer coating apparatus to solve the technical problems raised in the prior art.

[0005] This application provides a silicon wafer coating apparatus, including a graphite boat; the graphite boat includes at least one graphite boat sheet assembly, the graphite boat sheet assembly including multiple graphite boat sheets, multiple conductive blocks, and multiple insulating blocks. The multiple graphite boat sheets are arranged at intervals in a first direction; the multiple conductive blocks are disposed between the two ends of adjacent graphite boat sheets in a second direction, and several adjacent graphite boat sheets are connected in parallel to form a graphite boat sheet assembly, the number of which is multiple; two adjacent graphite boat sheet assemblies clamp an insulating block at one end in the second direction and a conductive block at the other end in the second direction, so that the multiple graphite boat sheet assemblies are electrically connected end-to-end; wherein, the first direction is perpendicular to the second direction.

[0006] In an optional embodiment of this application, the graphite boat sheet includes a boat sheet body, and ear plates extending from both ends of the boat sheet body along the second direction are provided. The ear plates on the same side between two adjacent graphite boat sheets hold the conductive block or the insulating block.

[0007] In an optional embodiment of this application, the ear plates on both sides of the graphite boat sheet are a first ear plate and a second ear plate, respectively, and the first ear plate and the second ear plate are located diagonally opposite each other on the main body of the boat sheet.

[0008] In an optional embodiment of this application, the main body of the boat page is provided with multiple silicon wafer loading areas, and the thickness of each silicon wafer loading area is smaller than that of the non-loading area.

[0009] In an optional embodiment of this application, each conductive block includes a gradient block segment and a rectangular block segment. The cross-section of the gradient block segment increases from one end closer to the rectangular block segment to the other end farther away from the rectangular block segment along the distribution direction from the gradient block segment to the rectangular block segment.

[0010] In an optional embodiment of this application, the number of graphite boat sheets in each graphite boat sheet assembly is equal.

[0011] In an optional embodiment of this application, the graphite boat includes a first graphite boat page string group and a second graphite boat page string group; each graphite boat page component in the first graphite boat page string group is a first graphite boat page component, and each graphite boat page in the first graphite boat page component is a first graphite boat page; each graphite boat page component in the second graphite boat page string group is a second graphite boat page component, and each graphite boat page in the second graphite boat page component is a second graphite boat page; wherein, the first graphite boat pages in the first graphite boat page string group and the second graphite boat pages in the second graphite boat page string group are arranged alternately at intervals in the first direction.

[0012] In an optional embodiment of this application, in the graphite boat, the graphite boat leaf assemblies arranged at both ends in the first direction are outer graphite boat leaf assemblies, and the multiple conductive blocks arranged side by side on one side of the outer graphite boat leaf assemblies in the second direction serve as heating electrodes; when the number of graphite boat leaf assemblies in the first graphite boat leaf string group and the second graphite boat leaf string group are equal and both are 2, both graphite boat leaf assemblies in the same graphite boat leaf string group are outer graphite boat leaf assemblies, and the conductive block between the two graphite boat leaf assemblies serves as a coating electrode.

[0013] In an optional embodiment of this application, the number of graphite boat components in the first graphite boat string group and the second graphite boat string group is equal; for the same graphite boat string group, the outermost graphite boat component in the first direction is the outer graphite boat component, and the graphite boat component between the outer graphite boat components on both sides is the inner graphite boat component; the multiple conductive blocks arranged side by side on one side of the outer graphite boat component in the second direction serve as heating electrodes; when there is only one inner graphite boat component, the conductive block between the inner graphite boat component and the outer graphite boat component on one side serves as a coating electrode; when there are multiple inner graphite boat components, the conductive block between two adjacent inner graphite boat components located in the middle serves as the coating electrode.

[0014] In an optional embodiment of this application, the first ear plate of each first graphite boat page and the second ear plate of each second graphite boat page are located on the same side, and the second ear plate of each first graphite boat page and the first ear plate of each second graphite boat page are located on the same side.

[0015] In an optional embodiment of this application, the heating electrode and coating electrode in the first graphite boat sheet assembly are located on the same side of the second direction as the heating electrode and coating electrode in the second graphite boat sheet assembly.

[0016] In an optional embodiment of this application, the first graphite boat string group includes four first graphite boat assemblies, and the second graphite boat string group includes four second graphite boat assemblies; the two outermost first graphite boat assemblies in the first direction are the outer first graphite boat assemblies, and the two first graphite boat assemblies between the two outer first graphite boat assemblies are the inner first graphite boat assemblies; the conductive blocks on the first side of the two outer first graphite boat assemblies in the second direction serve as first heating electrodes, and the conductive blocks between the two inner first graphite boat assemblies on the first side of the second direction serve as first coating electrodes; a first insulating block is provided between the two outer first graphite boat assemblies and the corresponding adjacent inner first graphite boat assemblies on the first side of the second direction. The first graphite boat assembly has a second insulating block between its second sides in the second direction; the two outermost of the four second graphite boat assemblies in the first direction are outer second graphite boat assemblies, the two second graphite boat assemblies between the two outer second graphite boat assemblies are inner second graphite boat assemblies, the conductive blocks on the first side of the two outer second graphite boat assemblies in the second direction are used as second heating electrodes, the conductive block between the two inner second graphite boat assemblies on the first side of the second direction is used as a second coating electrode, a third insulating block is provided between the two outer second graphite boat assemblies and their corresponding adjacent inner second graphite boat assemblies on the first side of the second direction, and a fourth insulating block is provided between the two inner second graphite boat assemblies on the second side of the second direction.

[0017] In an optional embodiment of this application, a first heating power supply, a second heating power supply, and a coating power supply are also included; the first heating power supply is connected to the first heating electrode, the second heating power supply is connected to the second heating electrode, and the coating power supply is connected to both the first coating electrode and the second coating electrode.

[0018] In an optional embodiment of this application, a first switch, a second switch, and a third switch are also included. The first heating power supply is connected to the first heating electrode via the first switch, the second heating power supply is connected to the second heating electrode via the second switch, and the coating power supply is connected to the first coating electrode and the second coating electrode via the third switch. The first switch, the second switch, and the third switch are configured to open and close according to a preset duty cycle so that the heating power supply and the coating power supply operate in staggered phases.

[0019] In an optional embodiment of this application, a furnace body is further included, wherein a chamber is formed within the furnace body; the graphite boat is located within the chamber, and the first heating power supply, the second heating power supply, and the coating power supply are located outside the chamber.

[0020] In an optional embodiment of this application, the peripheral wall of the furnace body is provided with heating wires to heat the chamber.

[0021] Compared with the prior art, this application has the following beneficial effects: In the scheme disclosed in this application, a certain number of graphite leaf blades are connected in parallel to form multiple graphite leaf blade assemblies, and multiple graphite leaf blade assemblies are connected in series to form a graphite leaf blade string group. By connecting a DC power supply to the conductive blocks at the beginning and end of the series-connected graphite leaf blade assemblies, the entire graphite leaf blade string group can be heated.

[0022] Specifically, a single graphite boat component can act as a heating resistor, with the heating resistance being the sum of the resistances of multiple graphite boat components connected in series. This facilitates the large-scale heating of the graphite boat formed by the series of graphite boat components. Because the graphite boat can self-heat and rapidly rise in temperature, the heating time is shortened. By eliminating the heating wires inside the furnace of the silicon wafer coating equipment, the cooling time can also be reduced, greatly shortening the coating process time, improving efficiency, and reducing costs. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the specific embodiments of this application, the drawings used in the specific embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 A schematic diagram of a graphite boat provided according to one embodiment of this application; Figure 2 for Figure 1 A schematic diagram of a graphite boat page string assembly connected to a DC power supply inside a graphite boat; Figure 3 for Figure 1 A schematic diagram showing the first and second graphite boat page strings unfolded in the second direction and connected to an AC power source. Figure 4a for Figure 3 A schematic diagram showing a graphite boat connected to a heating power source; Figure 4b for Figure 3 A schematic diagram showing a graphite boat connected to a coating power source; Figure 5aThis is a wiring diagram of a graphite boat according to one embodiment of this application; Figure 5b This is a schematic diagram showing the duty cycles of the heating power supply and the coating power supply according to one embodiment of this application; Figure 6 This is a schematic diagram of a graphite boat page provided according to one embodiment of this application; Figure 7 This is a schematic diagram of a conductive block provided according to one embodiment of this application; Figure 8a for Figure 1 A partial schematic diagram of the graphite boat in the second direction at one end (the bow end); Figure 8b for Figure 1 A partial schematic diagram of the graphite boat at the other end (tail end) in the second direction; Figure 9 This is a partial schematic diagram of a wafer coating apparatus according to one embodiment of the present application.

[0025] Figure Labels 1000, Graphite Boat; 100. Graphite boat page series; 110. First graphite boat page series; 120. Second graphite boat page series; 10. Graphite boat page; 101. First graphite boat page; 102. Second graphite boat page; 1001. Graphite boat page No. 1; 1002. Graphite boat page No. 2; 1003. Graphite boat page No. 3; 1004. Graphite boat page No. 4; 1005. Graphite boat page No. 5; 1006. Graphite boat page No. 6; 1007. Graphite boat page No. 7; 1008. Graphite boat page No. 8; 10a. First ear plate; 10b. Second ear plate; 10c. Boat body; S. Loading area; 11. Graphite boat page assembly; 1101, No. 1 graphite boat page assembly; 1102, No. 2 graphite boat page assembly; 1103, No. 3 graphite boat page assembly; 1104, No. 4 graphite boat page assembly; 111, First Graphite Boat Page Component; 1111, First Graphite Boat Page Component No. 1; 1112, First Graphite Boat Page Component No. 2; 1113, First Graphite Boat Page Component No. 3; 1114, First Graphite Boat Page Component No. 4; 112. Second graphite boat page assembly; 1121. Second graphite boat page assembly No. 1; 1122. Second graphite boat page assembly No. 2; 1123. Second graphite boat page assembly No. 3; 1124. Second graphite boat page assembly No. 4; 20. Conductive block; 21. Heating electrode; 211. First heating electrode; 212. Second heating electrode; 22. Coating electrode; 221. First coating electrode; 222. Second coating electrode; 201. Gradient block segment; 202. Rectangular block segment; 30. Insulating block; 31. First insulating block; 32. Second insulating block; 33. Third insulating block; 34. Fourth insulating block; 400, First heating power supply; 500, Second heating power supply; 600, Coating power supply; 700, First switch; 800, Second switch; 900, Third switch; 2000, Furnace body; 2001, Heating wire; D, Chamber; L1, First row; L2, Second row; L3, Third row; L4, Fourth row. Detailed Implementation

[0026] To make the above and other features and advantages of this application clearer, the application is further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explanation to those skilled in the art and are exemplary only, not restrictive.

[0027] Figure 1 A schematic diagram of a graphite boat 1000 provided according to one embodiment of this application is shown. Figure 2 for Figure 1 A schematic diagram of a graphite boat page string group 100 connected to a DC power supply within the graphite boat 1000. Please refer to [link / reference]. Figure 1 and Figure 2 This application provides a silicon wafer coating apparatus, which includes a graphite boat 1000.

[0028] The graphite boat 1000 includes at least one graphite boat sheet assembly 100, which includes multiple graphite boat sheets 10, multiple conductive blocks 20, and multiple insulating blocks 30.

[0029] Multiple graphite boats 10 are arranged at intervals in a first direction, and multiple conductive blocks 20 are disposed between the two ends of adjacent graphite boats 10 in a second direction, and several adjacent graphite boats 10 are connected in parallel to form a graphite boat assembly 11, and the number of graphite boat assemblies 11 is multiple.

[0030] Two adjacent graphite boat blade assemblies 11 are clamped at one end of the second direction and an insulating block 30 is clamped at the other end of the second direction, so that multiple graphite boat blade assemblies 11 are electrically connected end to end; wherein, the first direction is perpendicular to the second direction.

[0031] It should be noted that the first direction here can refer to the thickness direction of the graphite boat 10 or graphite boat 1000, and the second direction can refer to the length direction of the graphite boat 10 or graphite boat 1000. Additionally, "multiple" and "several" refer to a quantity of no less than two.

[0032] In this embodiment, the graphite boat 1000 is used to load silicon wafers. The graphite boat 1000 has at least one graphite boat page string group 100, which includes a plurality of graphite boat page assemblies 11 connected end to end. It should be noted that the beginning and end ends here can refer to the two ends of the graphite boat 1000 in the second direction. Similarly, it also refers to the two ends of the graphite boat page string group 100 in the second direction, the two ends of the graphite boat page assembly 11 in the second direction, and the two ends of the graphite boat page 10 in the second direction.

[0033] Please combine Figure 2 In the embodiment shown, the graphite boat assembly 100 contains four graphite boat components 11, which are arranged at intervals in the first direction and are respectively referred to as graphite boat component 1101, graphite boat component 1102, graphite boat component 1103, and graphite boat component 4.

[0034] An insulating block 30 is clamped between the first end of graphite leaf assembly 1101 and the first end of graphite leaf assembly 1102; a conductive block 20 is clamped between the last end of graphite leaf assembly 1101 and the last end of graphite leaf assembly 1102; a conductive block 20 is clamped between the first end of graphite leaf assembly 1102 and the first end of graphite leaf assembly 1103; and a conductive block 20 is clamped between the last end of graphite leaf assembly 1102 and the first end of graphite leaf assembly 1103. An insulating block 30 is clamped between the tail ends of graphite leaf assembly 1103, a conductive block 20 is clamped between the tail ends of graphite leaf assembly 1103 and 1104, and an insulating block 30 is clamped between the tail ends of graphite leaf assembly 1103 and 1104. In this way, graphite leaf assemblies 1101 to 4104 are electrically connected end to end.

[0035] As can be seen from the above, for any two adjacent graphite boat blade components 11, if the first end of each component holds a conductive block 20, then the second end of each component holds an insulating block 30; or, if the first end of each component holds an insulating block 30, then the second end of each component holds a conductive block 20, thereby achieving sequential electrical connection of all graphite boat blade components 11.

[0036] It should be noted that the number of graphite boat leaf components 11 is not limited to the four shown in the illustrated embodiment, and the number can be adjusted according to design requirements. In specific applications, the conductive block 20 can be, for example, a graphite block, and the insulating block 30 can be, for example, a ceramic block.

[0037] Furthermore, the graphite boat assembly 11 includes multiple graphite boats 10. For any graphite boat assembly 11, a conductive block 20 is sandwiched between the head end and the tail end of any two adjacent graphite boats 10, so that the head and tail ends of all graphite boats 10 in the graphite boat assembly 11 are electrically connected. That is, multiple graphite boats 10 and multiple conductive blocks 20 are connected in parallel to form the graphite boat assembly 11.

[0038] Please see Figure 2 In the embodiment shown, the graphite boat assembly 11 contains four graphite boats 10, and a conductive block 20 is sandwiched between the beginning and end ends of any one of the graphite boats 10 and the beginning and end ends of an adjacent graphite boat 10 to achieve parallel connection. It should be noted that the number of graphite boats 10 in the graphite boat assembly 11 is not limited to four, and the number can be adjusted according to design requirements.

[0039] In the scheme disclosed in this application, a certain number of graphite leaf sheets 10 are connected in parallel to form multiple graphite leaf sheet assemblies 11, and the multiple graphite leaf sheet assemblies 11 are connected in series to form a graphite leaf sheet string group 100. A DC power supply is connected to the conductive blocks 20 in the starting and ending of the multiple graphite leaf sheet assemblies 11 connected in series, which causes the entire graphite leaf sheet string group 100 to heat up. That is, the graphite boat 1000 equipped with this graphite leaf sheet string group 100 has a self-heating function when connected to a DC power supply.

[0040] To better understand this solution, please refer to... Figure 2 In the illustrated embodiment, a positive DC power supply is connected to the conductive block 20 at the beginning of graphite leaf assembly 1101 (the initiator), and a negative DC power supply is connected to the conductive block 20 at the beginning of graphite leaf assembly 1104 (the ender). This will create a current flowing from the positive to the negative in each graphite leaf assembly 11 (e.g., ...). Figure 2 As indicated by the arrows in the diagram, each graphite boat leaf assembly 11 has its own resistance, which in turn allows it to generate heat.

[0041] As can be seen, the graphite boat 1000 provided in this application can generate heat on its own when connected to a DC power supply. Secondly, a single graphite boat leaf assembly 11 can act as a heating resistor. The heating resistance of the graphite boat 1000 is the sum of the resistances of multiple graphite boat leaf assemblies 11 connected in series. This facilitates the large-scale heating of the graphite boat 1000 formed by the graphite boat leaf string assembly 100. Since the graphite boat 1000 can generate heat quickly on its own, the heating time is shortened. In the case of eliminating the heating wire in the furnace of the silicon wafer coating equipment, the cooling time can also be reduced, which greatly shortens the coating process time, improves efficiency, and reduces costs.

[0042] Figure 3 for Figure 1The graphite boat 1000 is shown in the diagram, where the first graphite boat page string group 110 and the second graphite boat page string group 120 are unfolded in a second direction and connected to an AC power source. Please refer to... Figure 3 In some alternative embodiments, the graphite boat 1000 includes a first graphite boat page string group 110 and a second graphite boat page string group 120.

[0043] Each graphite boat component 11 in the first graphite boat string group 110 is a first graphite boat component 111, and each graphite boat 10 in the first graphite boat component 111 is a first graphite boat 101.

[0044] Each graphite boat component 11 in the second graphite boat string group 120 is a second graphite boat component 112, and each graphite boat 10 in the second graphite boat component 112 is a second graphite boat 102.

[0045] In this arrangement, the first graphite boat page 101 in the first graphite boat page group 110 and the second graphite boat page 102 in the second graphite boat page group 120 are arranged alternately in the first direction.

[0046] In this embodiment, the graphite boat 1000 has two graphite boat page string groups 100, which are respectively the first graphite boat page string group 110 and the second graphite boat page string group 120.

[0047] In one optional embodiment, the first graphite boat sheet string group 110 is formed by connecting the first graphite boat sheet assembly 111 composed of the graphite boat sheets 10 with odd numbers in the graphite boat 1000, and the second graphite boat sheet string group 120 is formed by connecting the second graphite boat sheet assembly 112 composed of the graphite boat sheets 10 with even numbers in the graphite boat 1000. Accordingly, each graphite boat sheet 10 with an odd number corresponds to the first graphite boat sheet 101, and each graphite boat sheet 10 with an even number corresponds to the second graphite boat sheet 102.

[0048] Here, the odd and even serial numbers can be determined based on the outermost graphite boat page 10 in the first direction of the graphite boat 1000. For example, if the outermost graphite boat page 10 in the first direction is graphite boat page 1001, then the next adjacent graphite boat page 10 in the first direction is graphite boat page 2, and so on.

[0049] Thus, graphite leaf 1001 is located on the outermost side in the first direction, graphite leaf 3 is located between graphite leaf 2 1002 and graphite leaf 4 1004 in the first direction, and graphite leaf 2 1002 is located between graphite leaf 1 1001 and graphite leaf 3 1003 in the first direction.

[0050] In other words, a second graphite boat 102 is arranged between two adjacent first graphite boats 101, and a first graphite boat 101 is arranged between two adjacent second graphite boats 102. That is, the first graphite boats 101 and the second graphite boats 102 are arranged alternately in the first direction.

[0051] In this way, two graphite boat pages 100 can be nested at intervals in the first direction, resulting in a more compact structure, saving space, and allowing for the loading of more silicon wafers at one time. Furthermore, due to the narrowing gap between the graphite boat pages 10, adjacent graphite boat pages 10 are more likely to transfer heat energy through thermal radiation, which is beneficial for the rapid heating of the entire graphite boat 1000.

[0052] Please continue reading. Figure 3 In one optional embodiment, the first graphite boat sheet group 110 includes four first graphite boat sheet assemblies 111, and the second graphite boat sheet group 120 includes four second graphite boat sheet assemblies 112.

[0053] Of the four first graphite boat assemblies 111, the two outermost ones in the first direction are the outer first graphite boat assemblies, and the two first graphite boat assemblies 111 between the two outer first graphite boat assemblies are the inner first graphite boat assemblies. The conductive blocks 20 on the first side of the two outer first graphite boat assemblies in the second direction are used as first heating electrodes 211, and the conductive blocks 20 between the two inner first graphite boat assemblies on the first side of the second direction are used as first coating electrodes 221. A first insulating block 31 is provided between the two outer first graphite boat assemblies and the corresponding adjacent inner first graphite boat assemblies on the first side of the second direction, and a second insulating block 32 is provided between the two inner first graphite boat assemblies on the second side of the second direction.

[0054] Of the four second graphite boat assemblies 112, the two outermost ones in the first direction are the outer second graphite boat assemblies, and the two second graphite boat assemblies 112 between the two outer second graphite boat assemblies are the inner second graphite boat assemblies. The conductive blocks 20 on the first side of the two outer second graphite boat assemblies in the second direction are used as second heating electrodes 212, and the conductive blocks 20 between the two inner second graphite boat assemblies on the first side of the second direction are used as second coating electrodes 222. A third insulating block 33 is provided between the two outer second graphite boat assemblies and the corresponding adjacent inner second graphite boat assemblies on the first side of the second direction, and a fourth insulating block 34 is provided between the two inner second graphite boat assemblies on the second side of the second direction.

[0055] In this embodiment, the number of first graphite boat page assemblies 111 in the first graphite boat page string group 110 is 4, and the number of second graphite boat page assemblies 112 in the second graphite boat page string group 120 is also 4. Here, the first side of the second direction can refer to the head end side of the second direction, and the second side of the second direction can refer to the tail end side of the second direction.

[0056] These four first graphite boat components 111 correspond to first graphite boat component 1111, first graphite boat component 1112, first graphite boat component 1113, and first graphite boat component 1114 arranged sequentially in the first direction. Among them, first graphite boat component 1111 and first graphite boat component 4 are outer first graphite boat components, and first graphite boat component 1112 and first graphite boat component 3 are inner first graphite boat components.

[0057] These four second graphite boat components 112 correspond to second graphite boat components 1121, 1122, 1123, and 1124 arranged sequentially in the first direction. Second graphite boat components 1121 and 1124 are outer second graphite boat components, while second graphite boat components 1122 and 1123 are inner second graphite boat components.

[0058] For the first graphite boat leaf string group 110, the conductive block 20 on the first end side of the first graphite boat leaf assembly 1111 and the first graphite boat leaf assembly 1114 is the first heating electrode 211, which can be connected to the positive and negative terminals of the DC power supply respectively.

[0059] A first insulating block 31 and a conductive block 20 are respectively sandwiched between the head end and tail end of the first graphite boat assembly 1111 and the first graphite boat assembly 1112. Another first insulating block 31 and a conductive block 20 are respectively sandwiched between the head end and tail end of the first graphite boat assembly 1114 and the first graphite boat assembly 1113.

[0060] A second insulating block 32 is sandwiched between the tail ends of the No. 2 first graphite boat assembly 1112 and the No. 3 first graphite boat assembly 1113, and a conductive block 20 is sandwiched between the head ends of the No. 2 first graphite boat assembly 1112 and the No. 3 first graphite boat assembly 1113. The conductive block 20 serves as the first coating electrode 221 and realizes the sequential electrical connection of the four first graphite boat assemblies 111 from head to tail.

[0061] For the second graphite boat assembly 120, the conductive blocks 20 on the first end side of the first second graphite boat assembly 1121 and the fourth second graphite boat assembly 1124 are the second heating electrodes 212, which can be connected to the positive and negative terminals of the power supply used for heating, respectively.

[0062] A third insulating block 33 and a conductive block 20 are respectively sandwiched between the first end side and the tail end side of the second graphite boat assembly 1121 and the second graphite boat assembly 1122. Another third insulating block 33 and a conductive block 20 are respectively sandwiched between the first end side and the tail end side of the second graphite boat assembly 1124 and the second graphite boat assembly 1123.

[0063] A fourth insulating block 34 is sandwiched between the tail ends of the second graphite boat assembly 1122 and the third graphite boat assembly 1123, and a conductive block 20 is sandwiched between the head ends of the second graphite boat assembly 1122 and the third graphite boat assembly 1123. The conductive block 20 serves as the second coating electrode 222, thus realizing the sequential electrical connection of the four second graphite boat assemblies 112.

[0064] exist Figure 3 In the illustrated embodiment, each graphite boat assembly 11 contains four graphite boats 10. The graphite boats in the first graphite boat assembly 1111 are graphite boat 1001, graphite boat 3, graphite boat 5, graphite boat 1005, and graphite boat 7, respectively. The graphite boats in the second graphite boat assembly 1121 are graphite boat 2, graphite boat 4, graphite boat 6, graphite boat 1006, and graphite boat 8, respectively.

[0065] Similarly, the remaining graphite boat page components 11 contain graphite boat pages 10 with corresponding serial numbers. In other words, each graphite boat page 10 in each first graphite boat page component 111 is an odd-numbered graphite boat page, and each graphite boat page 10 in each second graphite boat page component 112 is an even-numbered graphite boat page. Each odd-numbered graphite boat page is the first graphite boat page 101, and each even-numbered graphite boat page is the second graphite boat page 102.

[0066] Figure 4a for Figure 3 A schematic diagram of the graphite boat 1000 connected to a heating power source. Figure 4b for Figure 3 A schematic diagram showing the graphite boat 1000 connected to a coating power supply 600.

[0067] In a further optional embodiment, the silicon wafer coating apparatus further includes a first heating power supply 400, a second heating power supply 500, and a coating power supply 600. It should be noted that the heating power supply is a DC power supply, and the coating power supply 600 is an AC power supply.

[0068] The first heating power supply 400 is connected to the first heating electrode 211, the second heating power supply 500 is connected to the second heating electrode 212, and the coating power supply 600 is connected to the first coating electrode 221 and the second coating electrode 222.

[0069] Please combine Figure 2 , Figure 3 and Figure 4a In the first graphite boat assembly 110, the first heating electrode 211 on the first graphite boat assembly 1111 and the first graphite boat assembly 1114 on the first end side is connected to the positive and negative terminals of the first heating power supply 400, respectively. In the second graphite boat assembly 120, the second heating electrode 212 on the first end side of the second graphite boat assembly 1121 and the second graphite boat assembly 1124 on the second end side is connected to the positive and negative terminals of the second heating power supply 500, respectively. In this way, the two graphite boat assembly 100 achieve self-heating.

[0070] If the resistance of each graphite boat assembly 11 is set to R, then the heating resistance of the first graphite boat string group 110 formed by four first graphite boat assemblies 111 connected in series and the second graphite boat string group 120 formed by four second graphite boat assemblies 112 connected in series are both 4R.

[0071] Please combine Figure 3 and Figure 4b The positive and negative terminals of the coating power supply 600 are connected to the first coating electrode 221 (the conductive block 20 at the middle position of the first graphite boat string 110 in the first direction) and the second coating electrode 222 (the conductive block 20 at the middle position of the second graphite boat string 120 in the first direction). Since the alternating current has a phase difference, there is a voltage difference between the adjacent first graphite boat 101 (odd-numbered graphite boat) and second graphite boat 102 (even-numbered graphite boat), so an electric field can be formed between them, which can be used as a capacitor to provide the electric field during coating.

[0072] Taking the first graphite boat sheet assembly 110 as an example, the first coated electrode 221 has a first graphite boat sheet assembly 1111 and a first graphite boat sheet assembly 1112 connected in series on both sides of the first direction, and a first graphite boat sheet assembly 1113 and a first graphite boat sheet assembly 1114 connected in series.

[0073] Obviously, due to the voltage drop, the voltage at the No. 2 first graphite boat assembly 1112 is lower than the voltage at the No. 1 first graphite boat assembly 1111, and the voltage at the No. 4 first graphite boat assembly 1114 is lower than the voltage at the No. 3 first graphite boat assembly 1113. If there are more first graphite boat assemblies 111, the voltage on the first graphite boat assembly 11 farther away from the first coating electrode 221 will be too low, which will affect the ionization electric field and reduce the coating effect.

[0074] In other words, while increasing the number of graphite boat assembly 11 in a single graphite boat string 100 improves the heating effect, it reduces the coating effect. Preferably, the number of graphite boats 10 in each graphite boat assembly 11 is equal. This ensures that the resistance of each graphite boat assembly 11 is not significantly different, and the resulting voltage drop is essentially equal, which helps to ensure that the coating effect of the silicon wafers on each graphite boat 10 is not significantly different.

[0075] It is evident that the graphite boat 1000 can generate its own heat and be used in, for example, low-pressure chemical vapor deposition (LPCVD) equipment. It can also form an electric field between two adjacent graphite boat pages 10 to ionize the reactive gas and be used in, for example, plasma-enhanced chemical vapor deposition (PECVD) equipment. The silicon wafer coating equipment mentioned in this application mainly refers to chemical vapor deposition equipment.

[0076] Figure 5a This is a wiring diagram of a graphite boat 1000 provided according to one embodiment of this application. Figure 5b This is a schematic diagram showing the duty cycles of the heating power supply and the coating power supply according to one embodiment of this application. In a further optional embodiment, the silicon wafer coating apparatus further includes a first switch 700, a second switch 800, and a third switch 900. The first heating power supply 400 is connected to the first heating electrode 211 via the first switch 700, the second heating power supply 500 is connected to the second heating electrode 212 via the second switch 800, and the coating power supply 600 is connected to the first coating electrode 221 and the second coating electrode 222 via the third switch 900.

[0077] The first switch 700, the second switch 800, and the third switch 900 are configured to open and close according to a preset duty cycle so that the heating power supply and the coating power supply 600 operate in a staggered manner.

[0078] In this embodiment, the first switch 700 is used to connect or disconnect the first heating power supply 400 and the first heating electrode 211, that is, to switch the first graphite boat sheet group 110 to a heating state or a non-heating state.

[0079] The second switch 800 is used to connect or disconnect the second heating power supply 500 and the second heating electrode 212, that is, to switch the second graphite boat leaf string group 120 to a heating state or a non-heating state.

[0080] The third switch 900 is used to connect or disconnect the coating power supply 600 from the first coating electrode 221 and the second coating electrode 222, that is, to switch the graphite boat 1000 to a coating state or a non-coating state.

[0081] It should be noted that the first switch 700 and the second switch 800 switch synchronously, that is, the first graphite boat leaf string group 110 and the second graphite boat leaf string group 120 are simultaneously in a heating state or a non-heating state. Of course, the first switch 700 and the second switch 800 can be two switching function modules in a switching function module to ensure that they operate synchronously.

[0082] It should be understood that the heating power supply and the coating power supply 600 need to be operated separately. Thus, when both the first switch 700 and the second switch 800 are in the connected state, both the first graphite boat page string group 110 and the second graphite boat page string group 120 are in the heating state. At this time, the third switch 900 is in the disconnected state, that is, the graphite boat 1000 is in the non-coating state.

[0083] When the third switch 900 is in the connected state, that is, when the graphite boat 1000 is in the coating state, when both the first switch 700 and the second switch 800 are in the disconnected state, both the first graphite boat page string group 110 and the second graphite boat page string group 120 are in the non-heating state.

[0084] Please see Figure 5b The preset duty cycle opening and closing refers to the percentage of time during which the first switch 700 and the second switch 800 are both in the connected state and the percentage of time during which the third switch 900 is in the connected state within one cycle, which is also the percentage of heating time and coating time within one cycle.

[0085] In specific applications, the heating power supply is in operation during the intervals when the coating power supply 600 is working. For example, when the coating power supply 600 is ionized, the heating power supply can be in operation during the deposition interval to maintain the graphite boat 1000 at a suitable temperature during the process.

[0086] In the above embodiments, the number of graphite boat components 11 in both the first graphite boat string group 110 and the second graphite boat string group 120 is described as four. Of course, the number of graphite boat components 11 in a single graphite boat string group 100 is not limited to four. Preferably, the number of graphite boat components 11 in the two graphite boat string groups 100 is equal.

[0087] For example, in the case where there are two graphite boat page assemblies 11 in a single graphite boat page string group 100 in the graphite boat 1000, the graphite boat page assemblies arranged at both ends in the first direction are the outer graphite boat page assemblies, and the multiple conductive blocks 20 arranged side by side on one side of the outer graphite boat page assemblies in the second direction are used as heating electrodes 21.

[0088] When the number of graphite boat components 11 in the first graphite boat string group 110 and the second graphite boat string group 120 is equal and there are two of each, both graphite boat components 11 in the same graphite boat string group 100 are outer graphite boat components, and the conductive block 20 between the two graphite boat components 11 is used as a coating electrode 22.

[0089] In this embodiment, both graphite boat components 11 in the first graphite boat string group 110 and the second graphite boat string group 120 are external graphite boat components, and the multiple conductive blocks 20 on the first end side in the second direction are all heating electrodes 21. Specifically, the heating electrode 21 in the first graphite boat string group 110 is the first heating electrode 211, and the heating electrode 21 in the second graphite boat string group 120 is the second heating electrode 212. As can be seen from the above, the first heating electrode 211 is connected to the first heating power supply 400, and the second heating electrode 212 is connected to the second heating power supply 500.

[0090] The conductive block 20 between the two graphite boat components 11 in the first graphite boat string group 110 is located at the tail end and serves as the first coating electrode 221. The conductive block 20 between the two graphite boat components 11 in the second graphite boat string group 120 is also located at the tail end and serves as the second coating electrode 222. As can be seen from the above, the first coating electrode 221 and the second coating electrode 222 can be connected to the positive and negative terminals of the coating power supply 600, respectively.

[0091] For example, when the number of graphite boat page components 11 in a single graphite boat page string group 100 is not less than 3, for the same graphite boat page string group 100, the outermost graphite boat page component 11 in the first direction of the graphite boat page 10 is the outer graphite boat page component, and the graphite boat page component 11 between the outer graphite boat page components on both sides is the inner graphite boat page component. The multiple conductive blocks 20 arranged side by side on one side of the outer graphite boat page component in the second direction are used as heating electrodes 21.

[0092] Furthermore, when there are three graphite boat assembly 11 within a single graphite boat string 100, the number of inner graphite boat assembly is one, and the conductive block 20 between the inner graphite boat assembly and the outer graphite boat assembly on one side serves as the coating electrode 22. That is, in this case, the conductive block between the inner graphite boat assembly and any one of the two outer graphite boat assemblies serves as the coating electrode 22. Furthermore, when there are four or more graphite boat page assemblies 11 in a single graphite boat page string 100, the number of inner graphite page assemblies is multiple, and the conductive block 20 located between two adjacent inner graphite page assemblies in the middle is used as a coating electrode 22.

[0093] It should be understood that, for the case where the number of graphite boat page components 11 in a single graphite boat page string group 100 in the graphite boat 1000 is not less than 3, the heating electrode 21 in the first graphite boat page string group 110 is the first heating electrode 211, which can be connected to the first heating power supply 400, the heating electrode 21 in the second graphite boat page string group 120 is the second heating electrode 212, which can be connected to the second heating power supply 500, and the coating electrode 22 in the first graphite boat page string group 110 and the coating electrode 22 in the second graphite boat page string group 120 are the first coating electrode 221 and the second coating electrode 222, respectively, which can be connected to the positive and negative terminals of the coating power supply 600.

[0094] Understandably, when the number of graphite boat page components 11 within a single graphite boat page string 100 is even, these graphite boat page components 11 can be arranged symmetrically based on the centerline extending in the second direction of the coated electrode 22. When the number of graphite boat page components 11 within a single graphite boat page string 100 is odd, these graphite boat page components 11 are arranged asymmetrically. Based on the above, it is preferable that the number of graphite boat page components 11 within a single graphite boat page string 100 is even, but not excessive; for example, it can be 4, 6, or 8.

[0095] Figure 6 This is a schematic diagram of a graphite boat page 10 according to one embodiment of this application. Please refer to... Figure 6 The graphite boat 10 includes a boat body 10c, and ear plates extending from both ends of the boat body 10c along the second direction are provided. The ear plates on the same side between two adjacent graphite boats 10 hold a conductive block 20 or an insulating block 30.

[0096] In this embodiment, the main body 10c of the graphite boat has ear plates extending from both sides in the second direction. The graphite boats 10 are arranged side by side with intervals in the first direction. Correspondingly, the ear plates on each graphite boat 10 are also arranged side by side with intervals in the first direction. A conductive block 20 or an insulating block 30 is sandwiched between two adjacent ear plates. That is, each conductive block 20 and each insulating block 30 is located on the outermost side of the graphite boat 1000 in the second direction.

[0097] Furthermore, the ear plates on both sides of the graphite boat 10 are a first ear plate 10a and a second ear plate 10b, respectively, which are located diagonally opposite each other on the boat body 10c. This diagonal arrangement of the ear plates on both sides of the graphite boat facilitates electrode installation, provides a larger working space for the protruding ear plates, and allows for AC coupling between the two graphite boat components. Furthermore, the boat body 10c has multiple silicon wafer loading areas S, each with a thickness less than the non-loading areas.

[0098] In this embodiment, the graphite boat 10 is a solid graphite boat, and it has been thinned at the silicon wafer loading region S. Figure 6 In the illustrated embodiment, the silicon wafer loading area S is roughly rectangular in shape, and the graphite boat 10 is a non-loading area except for the silicon wafer loading area S. For solid graphite boats, the ear plates are designed diagonally to ensure that the path lengths of current flowing through the solid graphite boat are as equal as possible, eliminating current dead zones and ensuring a uniform temperature distribution within the boat as much as possible.

[0099] exist Figure 6 In the illustrated embodiment, there are 5 silicon wafer loading areas S, and each graphite boat 10 can fix 5 silicon wafers, generally referred to as a 5-frame graphite boat. Of course, the number of silicon wafer loading areas S in a single graphite boat 10 should be appropriate; too many will result in an excessively long graphite boat 10, affecting the coating effect, while too few will reduce the number of silicon wafers that can be coated per cycle in the graphite boat 1000, affecting efficiency.

[0100] Figure 7 This is a schematic diagram of a conductive block 20 according to one embodiment of this application. Please refer to... Figure 7 In some optional embodiments, each conductive block 20 includes a gradient block segment 201 and a rectangular block segment 202. The cross-section of the gradient block segment 201 increases from one end closer to the rectangular block segment 202 to the other end further away from the rectangular block segment along the distribution direction of the gradient block segment 201 to the rectangular block segment 202.

[0101] It should be noted that the transition from the main body 10c of the boat leaf to the ear plate has a narrowing design. The resistance increases at this point, and as a concentrated current flow section during heating, the temperature will inevitably be too high. In this embodiment, the conductive block 20 is enhanced with a gradient block segment 201. The gradient block segment 201 adapts to the shape change of the graphite boat leaf 10 at the narrowing point of the ear plate, increasing the contact area between the conductive block 20 and the graphite boat leaf 10, and also compensating for the thickness of the narrowing point, thus preventing the temperature at the narrowing point from becoming too high.

[0102] Figure 8a for Figure 1 A partial schematic diagram of the graphite boat 1000 in the second direction at one end (head end). Figure 8b for Figure 1A partial schematic diagram of the graphite boat 1000 at the other end (tail end) in the second direction. In an optional embodiment, the first ear plate 10a of each first graphite boat 101 and the second ear plate 10b of each second graphite boat 102 are located on the same side, and the second ear plate 10b of each first graphite boat 101 and the first ear plate 10a of each second graphite boat 102 are located on the same side.

[0103] In this embodiment, for a graphite boat 1000 having a first graphite boat sheet group 110 and a second graphite boat sheet group 120, the first graphite boat sheet 101 refers to an odd-numbered graphite boat sheet, and the second graphite boat sheet 102 refers to an even-numbered graphite boat sheet. The first ear plate 10a of each first graphite boat sheet 101 and the second ear plate 10b of each second graphite boat sheet 102 can both be located at the head end, and the second ear plate 10b of each first graphite boat sheet 101 and the first ear plate 10a of each second graphite boat sheet 102 can both be located at the tail end.

[0104] Since the first ear plate 10a and the second ear plate 10b are located diagonally opposite each other to the main body 10c of the boat sheet, the first ear plate 10a and the second ear plate 10b are offset in a third direction. Here, the third direction is perpendicular to both the first direction and the second direction, which can refer to the height direction of the graphite boat sheet 10.

[0105] So, at the head end of the graphite boat 1000, the conductive blocks 20 and insulating blocks 30 located between the first ear plates 10a in two adjacent first graphite boat pages 101 form a first block column L1, and the conductive blocks 20 and insulating blocks 30 located between the second ear plates 10b in two adjacent second graphite boat pages 102 form a third block column L3. The first block column L1 is located below the third block column L3, that is, the two blocks at the head end are staggered in the third direction.

[0106] At the tail end of the graphite boat 1000, each conductive block 20 and each insulating block 30 located between the second ear plates 10b of two adjacent first graphite boat pages 101 form a second block column L2, and each conductive block 20 and each insulating block 30 located between the first ear plates 10a of two adjacent second graphite boat pages 102 form a fourth block column L4. The second block column L2 is located above the fourth block column L4, that is, the two blocks at the tail end are staggered in a third direction.

[0107] In this way, the conductive block 20 and insulating block 30 in the first graphite boat page string group 110 and the conductive block 20 and insulating block 30 in the second graphite boat page string group 120 are staggered in the third direction, thus ensuring that the first graphite boat page string group 110 and the second graphite boat page string group 120 are not connected and are independent of each other.

[0108] Furthermore, the heating electrode 21 and coating electrode 22 in the first graphite boat sheet assembly 110 are located on the same side in the second direction as the heating electrode 21 and coating electrode 22 in the second graphite boat sheet assembly 120.

[0109] In this embodiment, the heating electrode 21 and the coating electrode 22 in the first graphite boat sheet assembly 110 are respectively the first heating electrode 211 and the first coating electrode 221, and the heating electrode 21 and the coating electrode 22 in the second graphite boat sheet assembly 120 are respectively the second heating electrode 212 and the second coating electrode 222. Figure 8a In the illustrated embodiment, the first heating electrode 211, the first coating electrode 221, the second heating electrode 212, and the second coating electrode 222 are all located at the front end of the graphite boat 1000, which facilitates the wiring layout with the heating power supply and the coating power supply 600. Furthermore, the two first insulating blocks 31 at the front end of the graphite boat 1000 also serve as boat feet, and the two conductive blocks 20 at the rear end of the graphite boat 1000 also serve as boat feet, thus providing four-point support for the graphite boat 1000.

[0110] Figure 9 This is a partial schematic diagram of a wafer coating apparatus according to one embodiment of the present application. Referring to FIG8, in an optional embodiment, the wafer coating apparatus further includes a furnace body 2000, a chamber D formed within the furnace body 2000, a graphite boat 1000 located within the chamber D, and a first heating power supply 400, a second heating power supply 500, and a coating power supply 600 all located outside the chamber D.

[0111] In this embodiment, chamber D can form a sealed environment, and a vacuum environment can be formed after a vacuuming operation. Once the required vacuum environment is reached in chamber D, the reaction gas required for coating can be introduced into chamber D. Since the graphite boat 1000 can generate its own heat when powered by the first heating power supply 400 and the second heating power supply 500, the furnace body 2000 in the wafer coating equipment can eliminate the need for heating wires, reducing costs.

[0112] Moreover, the internal heating of the Graphite Boat 1000 is closer to the reaction source than the original external heating wire heating, resulting in less heat loss and energy saving.

[0113] Since it is not limited by the heat provided by the heating wire, the equipment only needs to provide a three-dimensional flow field sealed environment with suitable gas pressure and reaction gas flow rate to realize the coating process.

[0114] It should be noted that graphite materials exposed to the atmosphere at 500℃ are prone to reacting with oxygen, thus reducing the lifespan of the graphite boat. However, without heating wire insulation, the self-heating method via electricity provides rapid heating and cooling, significantly reducing the time it takes for the graphite boat to exit the furnace tube, thereby saving process time.

[0115] Furthermore, the furnace body 2000 has heating wires 2001 on its peripheral sidewalls to heat the chamber D. In other words, the graphite boat 1000 can also be used with a furnace body equipped with heating wires 2001.

[0116] In this case, the graphite boat 1000 and the heating wire 2001 can be heated simultaneously, and the dual heating results in a very fast heating rate, significantly shortening the heating time.

[0117] It should be noted that the graphite boat 1000 is not limited to self-heating in coating scenarios, such as drying after cleaning. The graphite boat 1000 can be applied to occasions that require heating.

[0118] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A silicon wafer coating equipment, characterized in that, Including the graphite boat (1000); The graphite boat (1000) includes at least one graphite boat page string group (100), the graphite boat page string group (100) comprising: Multiple graphite boats (10) are arranged at intervals in the first direction; and Multiple conductive blocks (20) and multiple insulating blocks (30) are arranged between adjacent graphite boats (10) at both ends in the second direction, and several adjacent graphite boats (10) are connected in parallel to form a graphite boat assembly (11), and the number of graphite boat assemblies (11) is multiple. Two adjacent graphite boat components (11) clamp the insulating block (30) at one end in the second direction and the conductive block (20) at the other end in the second direction, so that the multiple graphite boat components (11) are electrically connected end to end; wherein, the first direction is perpendicular to the second direction.

2. The silicon wafer coating equipment according to claim 1, characterized in that, The graphite boat (10) includes a boat body (10c), and ear plates extending from both ends of the boat body (10c) along the second direction are provided. The ear plates on the same side between two adjacent graphite boats (10) hold the conductive block (20) or the insulating block (30).

3. The silicon wafer coating equipment according to claim 2, characterized in that, The ear plates on both sides of the graphite boat sheet (10) are a first ear plate (10a) and a second ear plate (10b), and the first ear plate (10a) and the second ear plate (10b) are located diagonally opposite each other on the boat sheet body (10c).

4. The silicon wafer coating equipment according to claim 3, characterized in that, The main body of the boat (10c) is provided with a plurality of silicon wafer loading areas (S), and the thickness of each silicon wafer loading area (S) is smaller than that of the non-loading area.

5. The silicon wafer coating equipment according to claim 1, characterized in that, Each of the conductive blocks (20) includes a gradient block segment (201) and a rectangular block segment (202). The cross-section of the gradient block segment (201) increases from one end closer to the rectangular block segment (202) to the other end further away from the rectangular block segment (202) along the direction in which the gradient block segment (201) is distributed to the rectangular block segment (202).

6. The silicon wafer coating equipment according to claim 1, characterized in that, The number of graphite boats (10) in each of the graphite boat components (11) is equal.

7. The silicon wafer coating apparatus according to any one of claims 1 to 6, characterized in that, The graphite boat (1000) includes a first graphite boat page string group (110) and a second graphite boat page string group (120). Each of the graphite boat components (11) in the first graphite boat string group (110) is a first graphite boat component (111), and each of the graphite boats (10) in the first graphite boat component (111) is a first graphite boat (101). Each of the graphite boat components (11) in the second graphite boat string group (120) is a second graphite boat component (112), and each of the graphite boats (10) in the second graphite boat component (112) is a second graphite boat (102). The first graphite boat (101) in the first graphite boat string group (110) and the second graphite boat (102) in the second graphite boat string group (120) are arranged alternately in the first direction.

8. The silicon wafer coating equipment according to claim 7, characterized in that, In the graphite boat, the graphite boat leaf assembly arranged at both ends in the first direction is the outer graphite boat leaf assembly, and the multiple conductive blocks (20) arranged side by side on one side of the outer graphite boat leaf assembly in the second direction are used as heating electrodes (21). When the number of graphite boat components (11) in the first graphite boat string group (110) and the second graphite boat string group (120) is equal and there are two of each, the two graphite boat components (11) in the same graphite boat string group (100) are both outer graphite boat components, and the conductive block (20) between the two graphite boat components (11) is used as a coating electrode (22).

9. The silicon wafer coating equipment according to claim 7, characterized in that, The number of graphite boat sheet components (11) in the first graphite boat sheet group (110) is equal to the number of graphite boat sheet components (11) in the second graphite boat sheet group (120); For the same graphite boat string group (100), the outermost one of the multiple graphite boat assemblies (11) in the first direction of the graphite boat (10) is the outer graphite boat assembly, and the graphite boat assembly (11) between the two outer graphite boat assemblies is the inner graphite boat assembly. The multiple conductive blocks (20) arranged side by side on one side of the outer graphite boat assembly in the second direction are used as heating electrodes (21). When there is one inner graphite boat assembly, the conductive block (20) between the inner graphite boat assembly and the outer graphite boat assembly on one side is used as a coating electrode (22). When there are multiple inner graphite sheet assemblies, the conductive block (20) located between two adjacent inner graphite sheet assemblies in the middle is used as the coating electrode (22).

10. The silicon wafer coating equipment according to claim 7, characterized in that, The first ear plate (10a) of each of the first graphite boat sheets (101) and the second ear plate (10b) of each of the second graphite boat sheets (102) are located on the same side, and the second ear plate (10b) of each of the first graphite boat sheets (101) and the first ear plate (10a) of each of the second graphite boat sheets (12) are located on the same side.

11. The silicon wafer coating equipment according to claim 8 or 9, characterized in that, The heating electrode (21) and coating electrode (22) in the first graphite boat sheet assembly (110) are located on the same side of the second direction as the heating electrode (21) and coating electrode (22) in the second graphite boat sheet assembly (120).

12. The silicon wafer coating apparatus according to any one of claims 8 to 10, characterized in that, The first graphite boat page string group (110) includes four first graphite boat page components (111), and the second graphite boat page string group (120) includes four second graphite boat page components (112). Of the four first graphite boat assemblies (111), the two outermost ones in the first direction are the outer first graphite boat assemblies, and the two first graphite boat assemblies (111) between the two outer first graphite boat assemblies are the inner first graphite boat assemblies. The conductive blocks (20) on the first side of the two outer first graphite boat assemblies in the second direction are used as first heating electrodes (211). The conductive blocks (20) between the two inner first graphite boat assemblies on the first side of the second direction are used as first coating electrodes (221). A first insulating block (31) is provided between the two outer first graphite boat assemblies and the corresponding adjacent inner first graphite boat assemblies on the first side of the second direction. A second insulating block (32) is provided between the two inner first graphite boat assemblies on the second side of the second direction. Of the four second graphite boat assemblies (112), the two outermost ones in the first direction are outer second graphite boat assemblies, and the two second graphite boat assemblies (112) between the two outer second graphite boat assemblies are inner second graphite boat assemblies. The conductive blocks (20) on the first side of the two outer second graphite boat assemblies in the second direction are used as second heating electrodes (212). The conductive blocks (20) between the two inner second graphite boat assemblies on the first side of the second direction are used as second coating electrodes (222). A third insulating block (33) is provided between the two outer second graphite boat assemblies and the corresponding adjacent inner second graphite boat assemblies on the first side of the second direction. A fourth insulating block (34) is provided between the two inner second graphite boat assemblies on the second side of the second direction.

13. The silicon wafer coating equipment according to claim 12, characterized in that, It also includes a first heating power supply (400), a second heating power supply (500), and a coating power supply (600). The first heating power supply (400) is connected to the first heating electrode (211), the second heating power supply (500) is connected to the second heating electrode (212), and the coating power supply (600) is connected to the first coating electrode (221) and the second coating electrode (222).

14. The silicon wafer coating equipment according to claim 13, characterized in that, It also includes a first switch (700), a second switch (800) and a third switch (900), the first heating power supply (400) is connected to the first heating electrode (211) via the first switch (700), the second heating power supply (500) is connected to the second heating electrode (212) via the second switch (800), and the coating power supply (600) is connected to the first coating electrode (221) and the second coating electrode (222) via the third switch (900); The first switch (700), the second switch (800) and the third switch (900) are configured to open and close according to a preset duty cycle so that the heating power supply and the coating power supply (600) operate separately.

15. The silicon wafer coating equipment according to claim 14, characterized in that, It also includes a furnace body (2000) in which a chamber (D) is formed; The graphite boat (1000) is located inside the chamber (D), and the first heating power supply (400), the second heating power supply (500), and the coating power supply (600) are located outside the chamber (D).

16. The silicon wafer coating equipment according to claim 15, characterized in that, The furnace body (2000) has heating wires (2001) on its peripheral wall to heat the chamber (D).

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