Thickness-controllable deposition method and application

Abstract

The invention belongs to the technical field of composite material forming, and relates to a thickness-controllable deposition method, which comprises the following steps: firstly, obtaining calibrated actual morphology data of a ceramic matrix composite material component, the calibrated actual morphology data at least comprising deformation, profile tolerance and thickness uniformity; the coating thickness deviation value is determined according to the calibrated actual morphology data, deposition flow field iterative analysis is conducted on the basis of the coating thickness deviation value, the coating deposition process conditions are determined according to the iterative analysis result, and the process conditions at least comprise the deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time; and coating deposition is completed according to the process conditions. The invention further provides a thickness-controllable deposition system and a ceramic matrix composite component. According to the method, data acquisition is conducted on the component before deposition through the three-dimensional scanning technology, the deposition process is optimized in the mode that deposition flow field analysis and size data are matched, and the thickness and profile tolerance size precision of the component after deposition is effectively improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of composite material forming. In particular, it relates to a controllable thickness deposition method and applications. BACKGROUND

[0002] Due to its excellent properties such as high strength, high temperature resistance, and designability, ceramic matrix composites have gradually been applied to high-temperature thermal structural components in the field of aerospace. Since ceramic matrix composites are generally located in the key aerodynamic and thermal structural parts of an aircraft or an engine, their manufacturing precision is extremely critical. After high-precision machining, ceramic matrix composite components need to be prepared with oxidation-resistant and corrosion-resistant coatings. Commonly used coatings include silicon carbide (SiC) coatings, SiC + environmental barrier (EBC) coatings, SiC + thermal barrier / environmental barrier (T / EBC) coatings, etc. How to ensure that the dimensional accuracy and profile of ceramic matrix composites after coating preparation meet the design requirements is a key technology that needs to be broken through in the component preparation process.

[0003] Currently, SiC / SiC composites face two major challenges when applied to hot-end components of an aero-engine: (1) Thermal stress release deformation: Due to the high preparation temperature of the ceramic matrix composite substrate, which is generally above 1100°C, it is prone to generate thermal stress during preparation. When using a forming mold for shaping, the residual thermal stress accumulated inside will be constrained by the mold at high temperature and difficult to release. In the machining process, it will be released, causing the component to have uneven thickness and profile after machining, which may not be consistent with the original design stage allowance. The thermal stress release deformation caused by the release of high-temperature densification thermal stress during fiber and substrate grinding process needs to be monitored and coordinated with the process to meet the subsequent manufacturing precision.

[0004] (2) Coating thickness unevenness problem: During the CVD / PVD process of coating preparation, due to the aerodynamic structural design of the ceramic matrix composite component, the gas flow field will be uneven, resulting in differences in thickness between the edge and the center, which will ultimately affect the dimensional and profile accuracy of the component. Due to the large size of the component, it is difficult to achieve uniformization of the flow field by designing a deposition tooling, and thus it is difficult to achieve uniform deposition flow field design of the flat plate test piece; The final manufacturing precision of ceramic matrix composite components directly affects the aerodynamic effect during the subsequent use of the components, so how to control the deposition thickness as much as possible through flow field control to meet the dimensional tolerance and improve the manufacturing precision is a key problem that needs to be solved to improve the preparation stability of ceramic matrix composite hot-end components. SUMMARY

[0005] The present application aims at the problem that the thickness and profile size accuracy of SiC / SiC composite component after deposition is difficult to guarantee, and proposes a controllable thickness deposition method and application.

[0006] To achieve the above-mentioned purpose, the present application adopts the following technical solutions: In the first aspect, the present application proposes a controllable thickness deposition method, which is applied to the coating deposition of ceramic matrix composite components, and includes the following steps: S10. Obtain the calibrated actual topography data of the ceramic matrix composite component, and the calibrated actual topography data at least includes the deformation, profile and thickness uniformity; S11. Determine the coating thickness deviation based on the calibrated actual topography data, perform iterative analysis of the deposition flow field based on the coating thickness deviation, and determine the process conditions of coating deposition according to the iterative analysis results, and the process conditions at least include the deposition height, deposition angle, ceramic matrix composite component direction and deposition time; S12. Complete the coating deposition according to the process conditions determined in S11.

[0007] As a possible implementation manner, S10 specifically includes the following steps: S100. Obtain the original three-dimensional point cloud data of the ceramic matrix composite component by applying the laser three-dimensional scanning method; S101. Perform denoising and reference alignment on the original three-dimensional point cloud data to obtain the pre-processed three-dimensional point cloud data; S102. Configure the theoretical model data of the ceramic matrix composite component; S103. Determine the original actual topography data based on the pre-processed three-dimensional point cloud data and the theoretical model data; S104. Calibrate the original actual topography data based on the thickness values of multiple measurement regions of the ceramic matrix composite component for multiple times until the calibration error is less than the preset error value to obtain the calibrated actual topography data.

[0008] As a possible implementation manner, the preset error value is 0.05mm.

[0009] As a possible implementation manner, the deposition flow field iterative analysis is specifically: in each iteration, a fixed deposition gas and a fixed deposition temperature are adopted, the deposition thickness controllable in the coating thickness deviation range is realized by regulating the deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time, and after multiple iterations, the optimal deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time are finally determined.

[0010] As a possible implementation manner, after each iteration, the thickness prediction after deposition is carried out in the following manner, and the predicted thickness is denoted as : wherein, is a constant, related to the deposition cavity, the rectifier disc structure and the deposition equipment parameters, the empirical value of is 0.003~0.05h 2 ; is the deposition time; is the deposition coefficient, related to the deposition angle and the ceramic matrix composite component direction, when the deposition angle is 0~90°, the empirical value of is 1~1.4; is the deposition height of the i th deposition point; is the gas flow rate of the i th deposition point.

[0011] In the second aspect, the application provides an application of the controllable thickness deposition method, and the controllable thickness deposition system is used for coating deposition on the ceramic matrix composite component; wherein the controllable thickness deposition system is used for executing the controllable thickness deposition method in the first aspect.

[0012] As a possible implementation manner, the controllable thickness deposition system comprises: a data acquisition module, used for acquiring the calibrated actual topography data of the ceramic matrix composite component, and the calibrated actual topography data at least includes the deformation, the profile and the thickness uniformity; a process condition determination module, used for determining the coating thickness deviation based on the calibrated actual topography data, performing the deposition flow field iterative analysis based on the coating thickness deviation, determining the process condition of the coating deposition based on the iterative analysis result, and the process condition at least includes the deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time; a deposition equipment, used for completing the coating deposition according to the determined process condition.

[0013] As a possible implementation manner, the data acquisition module comprises a laser three-dimensional scanner, a data processing unit, a theoretical model data configuration unit, an original actual topography data determination unit and a calibration unit; The laser three-dimensional scanner is used to acquire original three-dimensional point cloud data of the ceramic matrix composite component; The data processing unit denoises and aligns the original three-dimensional point cloud data to obtain preprocessed three-dimensional point cloud data; The theoretical model data configuration unit is configured with theoretical model data of the ceramic matrix composite component; The original actual topography data determination unit determines original actual topography data based on the preprocessed three-dimensional point cloud data and the theoretical model data; The calibration unit calibrates the original actual topography data multiple times based on thickness values of multiple measurement regions of the ceramic matrix composite component until the calibrated actual topography data is obtained when the calibration error is less than a preset error value.

[0014] As a possible implementation manner, the deposition flow field iterative analysis is specifically: in each iteration, a fixed deposition gas and a fixed deposition temperature are adopted, and the deposition thickness controllable in the coating thickness deviation range is realized by adjusting the deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time, and finally the optimal deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time are determined after multiple iterations.

[0015] As a possible implementation manner, after each iteration, the following method is used for thickness prediction after deposition, and the predicted thickness is denoted as : wherein, is a constant, related to the deposition cavity, the rectifier disc structure and the deposition equipment parameters, The empirical value of is 0.003~0.05h 2 ; is the deposition time; is the deposition coefficient, related to the deposition angle and the ceramic matrix composite component direction, when the deposition angle is 0~90°, The empirical value of is 1~1.4; is the deposition height of the i th deposition point; is the gas flow rate of the i th deposition point.

[0016] Compared with the prior art, the present application has the following beneficial effects: 1. The present application adopts a laser scanning method to acquire three-dimensional point cloud data of a ceramic matrix composite component, solves the problem of size measurement before and after deposition of a variable curved surface component of a pneumatic structure, and realizes high-precision and accurate measurement of three-dimensional size of the component by combining a caliper for local region size calibration verification.

[0017] 2. This invention, through a closed-loop control of "scanning-design-deposition-verification", can improve the accuracy of coating thickness control for ceramic matrix composite components, thus solving the problem of high-precision deposition preparation of ceramic matrix composites.

[0018] 3. Compared with conventional chemical vapor deposition coating preparation processes, this invention introduces thickness and profile constraints before and after deposition, and solves the design goals of deposition process for aerodynamic components and the challenges of deposition verification through iterative analysis of the deposition flow field. Attached Figure Description

[0019] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings: Figure 1 This is a flowchart of a controllable thickness deposition method provided in an embodiment of the present invention; Figure 2 This is an analysis diagram of the deformation (a), profile (b), and thickness uniformity (c) of the ceramic matrix composite component before deposition in an embodiment of the present invention; Figure 3 This is a schematic diagram of the deposition thickness control method in an embodiment of the present invention; Figure 4 This is a deposition flow field evaluation diagram of the ceramic matrix composite component in the embodiment of the present invention; Figure 5 This is an analysis diagram of the deformation (a), profile (b), and thickness uniformity (c) of the ceramic matrix composite component after deposition in an embodiment of the present invention. Detailed Implementation

[0020] To facilitate a clear description of the technical solutions in the embodiments of the present invention, the terms "first" and "second" are used to distinguish identical or similar items with essentially the same function and effect. For example, the first threshold and the second threshold are merely used to distinguish different thresholds and do not limit their order. Those skilled in the art will understand that the terms "first" and "second" do not limit the quantity or execution order, and the terms "first" and "second" are not necessarily different.

[0021] It should be noted that in this invention, the terms "exemplary" or "for example" are used to indicate examples, illustrations, or descriptions. Any embodiment or design described as "exemplary" or "for example" in this invention should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of terms such as "exemplary" or "for example" is intended to present the relevant concepts in a concrete manner.

[0022] In this invention, "at least one" refers to one or more, and "more than one" refers to two or more. "And / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of singular or plural items. For example, "at least one of a, b, or c" can represent: a, b, c, a combination of a and b, a combination of a and c, a combination of b and c, or a, b, and c, where a, b, and c can be single or multiple.

[0023] The present invention aims to provide a controllable thickness deposition method, system, and ceramic matrix composite component. By acquiring data of the component before deposition using three-dimensional scanning technology, and by combining deposition flow field analysis and dimensional data, the deposition process is optimized to improve the thickness and contour dimensional accuracy of the component after deposition.

[0024] In a first aspect, embodiments of the present invention propose a controllable thickness deposition method, applied to coating deposition of ceramic matrix composite components, see [link to relevant documentation]. Figure 1 This includes the following steps: S10. Obtain the actual morphological data of the calibrated ceramic matrix composite component. The actual morphological data after calibration shall include at least the deformation, profile, and thickness uniformity. As one possible implementation, S10 specifically includes the following steps: S100. Obtain the original three-dimensional point cloud data of ceramic matrix composite components using laser three-dimensional scanning method; S101. Denoise and align the original 3D point cloud data to obtain preprocessed 3D point cloud data; S102. Theoretical model data for configuring ceramic matrix composite components; S103. Determine the original actual topographic data based on the preprocessed 3D point cloud data and theoretical model data; S104. Based on the thickness values ​​of multiple measurement areas of the ceramic matrix composite component, the original actual morphology data is calibrated multiple times until the calibration error is less than the preset error value to obtain the calibrated actual morphology data.

[0025] As one possible implementation method, the preset error value is 0.05mm.

[0026] As an example, before preparing the ceramic matrix composite coating, a laser 3D scanner was used to identify the 3D morphology of the uncoated ceramic matrix composite component. Laser-mounted dots were used for 3D coordinate calibration, with the scanner dot pitch set to 0.02 mm, to obtain raw 3D point cloud data. Subsequently, the raw 3D point cloud data underwent denoising and benchmark alignment to remove redundant objects and noise. The theoretical model data of the ceramic matrix composite component was then imported to measure dimensional deviations, obtaining data on deformation, contour accuracy, and thickness uniformity. Figure 2 As shown, the average thickness deviation of the ceramic matrix composite component before deposition was measured to be -0.104 mm. The thickness of three easily measurable areas was measured using vernier calipers to calibrate the three-dimensional identification data. The average calibration error was 0.03 mm, which is less than the preset error value, indicating that the actual morphological data of the calibrated ceramic matrix composite component was obtained.

[0027] S11. Determine the coating thickness deviation based on the calibrated actual morphology data, perform iterative analysis of the deposition flow field based on the coating thickness deviation, and determine the coating deposition process conditions based on the iterative analysis results. The process conditions include at least the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time. As one possible approach, the iterative analysis of the deposition flow field involves using a fixed deposition gas and a fixed deposition temperature in each iteration. By adjusting the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time, the deposition thickness can be controlled within the range of coating thickness deviation. After multiple iterations, the optimal deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time are finally determined.

[0028] As one possible implementation, after each iteration, the post-deposition thickness is predicted using the following method, denoted as . : in, It is a constant and depends on the structure of the deposition chamber, the rectifier disk, and the parameters of the deposition equipment. The empirical value is 0.003~0.05h 2 ; Deposition time; This is the deposition coefficient, which is related to the deposition angle and the orientation of the ceramic matrix composite component. When the deposition angle is 0~90°, The empirical value is 1~1.4; For the first Deposition height at each deposition point; For the first Gas flow rate at each deposition point.

[0029] As an example, the process for determining coating deposition conditions is as follows: Figure 3 As shown, the coating thickness deviation was determined based on the calibrated actual morphology data. The results showed that the negative deviation of the left side of the component before deposition was greater than that of the right side. Subsequently, iterative analysis of the deposition flow field was performed, as follows: Figure 4 As shown, pre-simulation of process parameters such as deposition height and deposition angle was conducted based on contour uniformity and thickness to carry out controllable thickness deposition optimization design. The deposition thickness differences in different regions of the component were calculated by adjusting the deposition height, deposition angle, and orientation of the ceramic matrix composite component. After simulation iterations, the final placement process was determined as follows: the left-side deviation was placed at the top of the deposition area with an inclination angle of 90°, the bottom of the component was 40 cm above the rectifier disk, and the deposition time was 12 hours. Using the deposition flow thickness control formula for the chemical vapor deposition process, the final deposition thickness at each point on the component was achieved within the deposition index range. The estimated thickness of the left deposition area was 0.043–0.05 mm, and the estimated thickness of the right side was 0.033–0.036 mm on one side.

[0030] S12. Complete the coating deposition according to the process conditions determined in S11.

[0031] As an example, the component was secured with carbon rope and placed in a chemical vapor deposition furnace for coating deposition. The deposition process was performed according to the established parameters, with parameters such as deposition height, deposition time, and component placement consistent with the deposition process design. A laser 3D scanner was then used to perform 3D morphology identification on the coated ceramic matrix composite component, and laser-mounted dots were used for 3D coordinate calibration. The scanner dot pitch was set to 0.02 mm. Subsequently, the point cloud data acquired by the scanner underwent data denoising and benchmark alignment to remove redundant objects and noise. The theoretical model data of the ceramic matrix composite component was imported for dimensional deviation measurement, obtaining data on deformation, contour, and thickness uniformity. Figure 5 As shown, the average thickness deviation of the component after deposition was measured to be -0.073 mm. Dimensions were measured using vernier calipers at three easily measurable areas, and the three-dimensional identification data was calibrated with an average calibration error of 0.03 mm. Comparing the data before and after deposition, the coating thickness during the deposition process was basically consistent with the deposition process design, and the change in dimensional deviation before and after deposition was reduced, indicating that the deposition effect met design expectations. Following the component drawings, the surface was cleaned after deposition, and localized deposit nodules were removed to avoid high points caused by these nodules affecting thickness accuracy, ultimately yielding a ceramic matrix composite component.

[0032] In a second aspect, the present invention provides a controllable thickness deposition system, comprising: The data acquisition module is used to acquire the actual morphological data of the calibrated ceramic matrix composite component. The actual morphological data after calibration includes at least the deformation, profile, and thickness uniformity. The process condition determination module determines the coating thickness deviation based on the calibrated actual morphology data, performs iterative analysis of the deposition flow field based on the coating thickness deviation, and determines the coating deposition process conditions based on the iterative analysis results. The process conditions include at least the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time. The deposition equipment completes the coating deposition according to the determined process conditions.

[0033] As one possible implementation, the data acquisition module includes a laser 3D scanner, a data processing unit, a theoretical model data configuration unit, a raw actual morphology data determination unit, and a calibration unit; Among them, the laser 3D scanner is used to acquire the original 3D point cloud data of ceramic matrix composite components; The data processing unit performs noise reduction and benchmark alignment on the original 3D point cloud data to obtain preprocessed 3D point cloud data. The theoretical model data configuration unit is configured with theoretical model data for ceramic matrix composite components; The original actual topography data determination unit determines the original actual topography data based on the preprocessed 3D point cloud data and theoretical model data; The calibration unit performs multiple calibrations on the original actual morphology data based on the thickness values ​​of multiple measurement areas of the ceramic matrix composite component until the calibration error is less than the preset error value, thus obtaining the calibrated actual morphology data.

[0034] As one possible approach, the iterative analysis of the deposition flow field involves using a fixed deposition gas and a fixed deposition temperature in each iteration. By adjusting the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time, the deposition thickness can be controlled within the range of coating thickness deviation. After multiple iterations, the optimal deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time are finally determined.

[0035] As one possible implementation, after each iteration, the post-deposition thickness is predicted using the following method, denoted as . : in, It is a constant and depends on the structure of the deposition chamber, the rectifier disk, and the parameters of the deposition equipment. The empirical value is 0.003~0.05h 2 ; Deposition time; This is the deposition coefficient, which is related to the deposition angle and the orientation of the ceramic matrix composite component. When the deposition angle is 0~90°, The empirical value is 1~1.4; For the first Deposition height at each deposition point; For the first Gas flow rate at each deposition point.

[0036] Thirdly, the present invention provides a ceramic matrix composite material component, wherein a coating is deposited using the controllable thickness deposition method provided in the first aspect.

[0037] Although the invention has been described herein in conjunction with various embodiments, those skilled in the art will understand and implement other variations of the disclosed embodiments by reviewing the accompanying drawings, disclosure, and other materials. In this specification, the word "comprising" does not exclude other components or steps, and "a" or "an" does not exclude multiple components. A single processor or other unit can implement several functions listed in the specification. While certain measures are described in different embodiments, this does not mean that these measures cannot be combined to produce good results.

[0038] Although the invention has been described in conjunction with specific features and embodiments, it is obvious that various modifications and combinations can be made therein without departing from the spirit and scope of the invention. Accordingly, this specification and drawings are merely illustrative of the invention and are considered to cover any and all modifications, variations, combinations, or equivalents within the scope of the invention. Clearly, those skilled in the art can make various alterations and modifications to the invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the invention and its equivalents, the invention is also intended to include such modifications and modifications.

Claims

1. A method for controlling thickness deposition, characterized in that, The controllable thickness deposition method is applied to coating deposition of ceramic matrix composite components, and includes the following steps: S10. Obtain the actual morphological data of the calibrated ceramic matrix composite component. The actual morphological data after calibration shall include at least the deformation, profile, and thickness uniformity. S11. Determine the coating thickness deviation based on the calibrated actual morphology data, perform iterative analysis of the deposition flow field based on the coating thickness deviation, and determine the coating deposition process conditions based on the iterative analysis results. The process conditions include at least the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time. S12. Complete the coating deposition according to the process conditions determined in S11.

2. The controllable thickness deposition method according to claim 1, characterized in that, S10 specifically includes the following steps: S100. Obtain the original three-dimensional point cloud data of ceramic matrix composite components using laser three-dimensional scanning method; S101. Denoise and align the original 3D point cloud data to obtain preprocessed 3D point cloud data; S102. Theoretical model data for configuring ceramic matrix composite components; S103. Determine the original actual topographic data based on the preprocessed 3D point cloud data and theoretical model data; S104. Based on the thickness values ​​of multiple measurement areas of the ceramic matrix composite component, the original actual morphology data is calibrated multiple times until the calibration error is less than the preset error value to obtain the calibrated actual morphology data.

3. The controllable thickness deposition method according to claim 2, characterized in that, The preset error value is 0.05mm.

4. The controllable thickness deposition method according to claim 1, characterized in that, The deposition flow field iterative analysis is as follows: each iteration uses a fixed deposition gas and a fixed deposition temperature. By adjusting the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time, the deposition thickness can be controlled within the range of coating thickness deviation. After multiple iterations, the optimal deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time are finally determined.

5. The controllable thickness deposition method according to claim 4, characterized in that, After each iteration, the post-deposition thickness is predicted using the following method, and the predicted thickness is denoted as . : in, It is a constant and depends on the structure of the deposition chamber, the rectifier disk, and the parameters of the deposition equipment. The empirical value is 0.003~0.05h 2 ; Deposition time; This is the deposition coefficient, which is related to the deposition angle and the orientation of the ceramic matrix composite component. When the deposition angle is 0~90°, The empirical value is 1~1.4; For the first Deposition height at each deposition point; For the first Gas flow rate at each deposition point.

6. An application of a controllable thickness deposition method, characterized in that, A controllable thickness deposition system is used to deposit a coating on a ceramic matrix composite component; wherein the controllable thickness deposition system is used to perform the controllable thickness deposition method according to any one of claims 1 to 5.

7. The application of the controllable thickness deposition method according to claim 6, characterized in that, Controllable thickness deposition systems include: The data acquisition module is used to acquire the actual morphological data of the calibrated ceramic matrix composite component. The actual morphological data after calibration includes at least the deformation, profile, and thickness uniformity. The process condition determination module determines the coating thickness deviation based on the calibrated actual morphology data, performs iterative analysis of the deposition flow field based on the coating thickness deviation, and determines the coating deposition process conditions based on the iterative analysis results. The process conditions include at least the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time. The deposition equipment completes the coating deposition according to the determined process conditions.

8. The application of the controllable thickness deposition method according to claim 7, characterized in that, The data acquisition module includes a laser 3D scanner, a data processing unit, a theoretical model data configuration unit, a raw actual morphology data determination unit, and a calibration unit; Among them, the laser 3D scanner is used to acquire the original 3D point cloud data of ceramic matrix composite components; The data processing unit performs noise reduction and benchmark alignment on the original 3D point cloud data to obtain preprocessed 3D point cloud data. The theoretical model data configuration unit is configured with theoretical model data for ceramic matrix composite components; The original actual topography data determination unit determines the original actual topography data based on the preprocessed 3D point cloud data and theoretical model data; The calibration unit performs multiple calibrations on the original actual morphology data based on the thickness values ​​of multiple measurement areas of the ceramic matrix composite component until the calibration error is less than the preset error value, thus obtaining the calibrated actual morphology data.

9. The application of the controllable thickness deposition method according to claim 7, characterized in that, The deposition flow field iterative analysis is as follows: each iteration uses a fixed deposition gas and a fixed deposition temperature. By adjusting the deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time, the deposition thickness can be controlled within the range of coating thickness deviation. After multiple iterations, the optimal deposition height, deposition angle, orientation of the ceramic matrix composite component, and deposition time are finally determined.

10. The application of the controllable thickness deposition method according to claim 9, characterized in that, After each iteration, the post-deposition thickness is predicted using the following method, and the predicted thickness is denoted as . : in, It is a constant and depends on the structure of the deposition chamber, the rectifier disk, and the parameters of the deposition equipment. The empirical value is 0.003~0.05h 2 ; Deposition time; This is the deposition coefficient, which is related to the deposition angle and the orientation of the ceramic matrix composite component. When the deposition angle is 0~90°, The empirical value is 1~1.4; For the first Deposition height at each deposition point; For the first Gas flow rate at each deposition point.

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