Collecting electrical energy from gate valve motion during wafer transfer

Abstract

A substrate processing system having a gate valve assembly is provided. A substrate processing system includes a gate valve body defining a gate valve passage, a valve member movable to open and close the gate valve passage, an actuator coupled to the valve member, and a generator coupled to the movable member of the actuator. Mechanical movement of the movable member controls movement of the valve member to open and close the gate valve passage. When the movable component is in motion, the generator is configured to convert mechanical motion of the movable component into electrical energy, which can be stored and reused.

Description

[0001] Cross-references to related applications

[0002] This application claims priority and benefit to U.S. Provisional Patent Application Serial No. 63 / 654,669, filed May 31, 2024, the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] This disclosure generally relates to the manufacture of semiconductor devices, and more specifically to the harvesting of energy from a gate valve during substrate transfer for the manufacture of semiconductor devices. Background Technology

[0004] Material layers are typically deposited onto a substrate during the fabrication of semiconductor devices, such as integrated circuits and electronic devices. Material layer deposition is typically achieved by supporting the substrate within a substrate processing chamber apparatus, heating the substrate to a desired deposition temperature, and allowing one or more material layer precursors to flow through the chamber apparatus and across the substrate. As the precursors flow across the substrate, the material layer typically develops gradually onto the surface of the substrate, depending on the substrate temperature and the environmental conditions within the chamber apparatus.

[0005] In clustered semiconductor vacuum processing tools, multiple substrate processing chambers can be coupled to a single substrate transport chamber, which moves substrates in and out of the substrate processing chamber and the entire substrate processing system. The multiple substrate processing chambers are typically rigidly attached to the substrate transport chamber via gate valves. The gate valves hermetically connect the substrate processing chambers to the substrate transport chamber and provide a window through which substrates can be transferred in and out of the substrate processing chambers.

[0006] In conventional systems, the window of a gate valve is sealed to isolate the substrate from one or more chambers. Once conditions such as temperature, pressure, and atmosphere concentration are suitable, the gate valve can open to transfer the substrate into the desired chamber. Typically, the gate valve is coupled to an actuator that can move to open and close the window. A certain amount of energy is generated each time a single gate valve is opened or closed. Given the number of gate valves in a single substrate processing system and the number of times they are opened or closed, a significant amount of energy is wasted. Therefore, there is a need in the art for systems and methods to collect and store this wasted energy for later use.

[0007] Any discussion set forth in this section (including discussions of problems and solutions) is included in this disclosure merely for the purpose of providing background to this disclosure and should not be construed as an admission that any or all of the discussions were known at the time the invention was made or otherwise constituted prior art. Summary of the Invention

[0008] A substrate processing system with a gate valve assembly is provided. The substrate processing system includes a gate valve body defining a gate valve passage. The substrate processing system also includes a valve component movable to open and close the gate valve passage. The substrate processing system further includes an actuator coupled to the valve component. The actuator includes a movable part such that mechanical movement of the movable part controls movement of the valve component to open and close the gate valve passage. The substrate processing system includes a generator coupled to the movable part. The generator is configured to convert mechanical movement into electrical energy.

[0009] A method is provided for storing energy generated by the movement of an actuator in a gate valve of a semiconductor processing system. The method includes providing a magnetic component. The method also includes providing an electrical component. The electrical component is electrically connected to the magnetic component. When a movable part of the actuator is in motion and the electrical component is in the magnetic field of the magnetic component, the method includes generating electrical energy. Finally, the method includes storing the electrical energy generated by the electrical component.

[0010] An actuator is provided. The actuator includes a movable part. The actuator also includes one or more sets of electrical coils coupled to the movable part. The actuator also includes one or more magnets coupled to the one or more sets of electrical coils. When the movable part is in motion, the one or more magnets and the one or more electrical coils are electrically connected to convert the mechanical motion of the actuator into electrical energy.

[0011] This summary is provided to present the chosen concepts in a simplified form. These concepts are further described in detail in the following exemplary embodiments of this disclosure. This summary is not intended to identify key or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter. Attached Figure Description

[0012] These and other features, aspects, and advantages of the invention disclosed herein are described below with reference to the accompanying drawings of certain embodiments, which are intended to illustrate rather than limit the invention.

[0013] Figure 1A A top view of a substrate processing system according to an exemplary embodiment of the present disclosure is shown;

[0014] Figure 1B and Figure 1C Exemplary embodiments according to this disclosure are shown. Figure 1A Perspective view and exploded view of the gate valve assembly in the substrate processing system;

[0015] Figures 2A to 2E Exemplary embodiments according to this disclosure are shown. Figure 1B and Figure 1C Perspective views of various embodiments of the actuator in a gate valve assembly; and

[0016] Figure 3 The storage shown is provided by an actuator (e.g., according to an exemplary embodiment of the present disclosure). Figures 2A to 2E A flowchart of a method for generating energy from the motion of one of the components.

[0017] It should be understood that the elements in the accompanying drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the relative dimensions of some elements in the drawings may be exaggerated relative to other elements to help improve the understanding of the embodiments illustrated in this disclosure. Detailed Implementation

[0018] Reference will now be made to the accompanying drawings, wherein like reference numerals identify similar structural features or aspects disclosed herein. The systems and methods of the present invention can be used in semiconductor processing systems for manufacturing semiconductor devices, such as those used to deposit material layers during the manufacture of logic and memory devices using chemical vapor deposition (CVD) and atomic layer deposition (ALD) techniques; however, the invention is generally not limited to any semiconductor processing operation or the manufacture of any particular semiconductor device.

[0019] As used herein, the term "substrate" can refer to any one or more underlying materials, including any one or more underlying materials that can be modified or on which devices, circuits, or films can be formed. A "substrate" can be continuous or discontinuous; rigid or flexible; solid or porous; and combinations thereof. A substrate can be in any form, such as powder, plate, or workpiece. Plate-type substrates can include wafers of various shapes and sizes. Wafer diameters can be 200 mm, 300 mm, or even 450 mm. A substrate can be formed from one or more semiconductor materials, including, by way of non-limiting example, silicon, silicon germanium, silicon oxide, gallium arsenide, gallium nitride, and silicon carbide.

[0020] Figure 1A A top view of a substrate processing system 10 according to an embodiment described herein is shown. Figure 1A In the illustrated embodiment, the substrate processing system 10 includes a five-faceted substrate transport chamber (SHC) 50 (although more or fewer facets may be provided in other examples of this technology). Four of these facets are coupled to a corresponding substrate processing chamber (SPC) 20 via one or more gate valves 100. In an exemplary embodiment, each SPC 20 is coupled to the SHC 50 via two gate valves 100. Furthermore, each SPC 20 is configured to receive and process at least four substrates (substrate supports 22 are disposed in the SPC 20). In an exemplary embodiment, more than two gate valves 100 may be used to connect the SPC 20 to the SHC 50.

[0021] SHC50 includes at least one robotic arm 52 for moving substrates into and out of various SPC20s. In use, gate valve 100 is opened, and the end effector of robotic arm 52 extends through the open gate valve 100 to insert or remove a substrate into or from the internal chamber of the SPC20 (e.g., placing or removing a substrate onto or from one of the substrate supports 22). Once robotic arm 52 is retracted from the SPC20, gate valve 100 closes, thereby sealing the SPC20 with gate valve 100.

[0022] The substrate processing system 10 also includes a load locking (LL) module 30. The LL module 30 is connected to the fifth facet of the SHC 50 via one or more gate valves 100B. In an exemplary embodiment, the gate valve 100B has the same structure as the gate valve 100. Figure 1A In the exemplary embodiment shown, two gate valves 100B are used to connect the LL module 30 to the SHC 50. The LL module 30 includes one or more substrate holding members 32 for holding the substrate during entry into the SHC 50 for further processing and during exit from the SHC 50 after processing. The end effector of the robotic arm 52 moves through the gate valves 100B (when open) to move the substrate into the SHC 50 (for layer deposition and other processing) and out of the SHC 50 (after processing). The LL module 30 (and the gate valves 100B) keep the substrate isolated from the environment of the SHC 50 until the conditions within the SHC 50 (e.g., temperature, pressure, atmosphere content, etc.) are ready for substrate insertion.

[0023] The LL module 30 is also coupled to the Equipment Front End Module (EFEM) 60 via one or more additional gate valves 100C. In an exemplary embodiment, the gate valve 100C has the same structure as gate valves 100 and / or 100B as described above. The EFEM 60 also includes a robotic arm 62. The end effector of the robotic arm 62 moves through the gate valve 100C (when open) to move a substrate into the LL module 30 (for final delivery to the processing chamber 20 for layer deposition and other processing) and out of the LL module 30 (after processing is complete). The robotic arm 62 of the EFEM 60 is also configured to pick up a new substrate for processing from one or more front-opening wafer transfer cassettes (FOUPs) 70 and return the processed substrate to the FOUP 70. In an exemplary embodiment, at least four FOUPs 70-1 to 70-4 are coupled to the EFEM 60.

[0024] Therefore, in Figure 1AIn the substrate processing system 10, multiple SPCs 20 are coupled to a single SHC 50, which moves substrates into and out of each SPC 20 and into and out of the entire substrate processing system 10 (along with the assistance of LL modules 30, EFEM 60, and FOUP 70). The multiple SPCs 20 are rigidly attached to the SHC 50 via gate valves 100. Gate valve 100 hermetically connects the SPCs 20 to the SHC 50 and provides a window that can be selectively opened and closed (and sealed), through which substrates can be transferred in and out of the SPCs 20. Similarly, gate valve 100B hermetically connects LL module 30 to the SHC 50 and provides a window that can be selectively opened and closed (and sealed), through which substrates can be transferred in and out of the SHC 50. Furthermore, gate valve 100C hermetically connects EFEM 60 and LL module 30 and provides a window that can be selectively opened and closed (and sealed), through which substrates can be transferred in and out of EFEM 60. Therefore, in an exemplary embodiment, EFEM60, LL module 30, SHC50 and SPC20 may have different environmental zones (e.g., temperature zone, pressure zone, etc.), and gate valves 100C, 100B and 100 remain sealed and do not allow the substrate to pass from one chamber to another until the environmental zones between the two chambers are balanced.

[0025] Figure 1B and Figure 1C Perspective and exploded views of a gate valve 100 according to exemplary embodiments described herein are provided. As shown herein, the gate valve 100 includes a gate valve body 130, a sealing plate 120, a sealing plate cover 110, and an actuator 200. The actuator 200 is movable to open and close a gate valve passage 132. The gate valve passage 132 is an opening that allows passage for conveying a substrate from one chamber to another. That is, when the passage 132 is open, the end effector of a robotic arm 52 and / or 62 carrying a substrate can be transferred from one chamber to another. In the exemplary embodiments shown herein, the sealing plate 120 is fitted inside the gate valve body 130 and engages with the actuator 200. The actuator 200 includes an actuator housing body 218. The actuator 200 also includes an actuator cover 160 that covers the actuator housing body 218.

[0026] Figures 2A-2E Perspective views of various embodiments of the actuator 200 are shown. Specifically, Figures 2A-2E A view of the actuator housing body 218 without the cover 160 is provided. (See image.) Figure 2A As shown, actuator 200 includes a rear section 240 (including sections 244 and 246). Actuator 200 also includes a movable component 212 fixed to shaft 210. Figures 2A-2EAs shown, in an exemplary embodiment, shaft 210 moves vertically up and down together with movable member 212. Furthermore, movable member 212 is also supported by side rods 220 and 230. In an exemplary embodiment, movable member 212 includes a first side hole and a second side hole on either side, such that side rod 220 extends through the first side hole and second side rod 230 extends through the second side hole. In an exemplary embodiment, movable member 212 is an "I"-shaped block (such as...). Figure 2A (As shown). In an exemplary embodiment, the "I"-shaped block is fixed to the shaft 210 at a narrow section of the "I"-shaped block and is further supported by side rods 220 and 230 along the wider end of the "I"-shaped block. In an exemplary embodiment, the movable member 212 is of a different shape (e.g., rectangular, cylindrical, etc.).

[0027] In an exemplary embodiment, the actuator 200 further includes a helical spring 214. The movable member 212 is guided vertically (i.e., in the up-down direction) by side rods 220 and 230 to open and close the gate valve passage 132. In an exemplary embodiment, the shaft 210 may be cylindrical. In an exemplary embodiment, one or more side rods 220 and / or 230 may be cylindrical. That is, the side rods 220 and / or 230 may be posts that guide the movement of the movable member 212 to open and close the gate valve passage 132. In an exemplary embodiment, the side rods 220 and / or 230 may have different shapes, provided they have sufficient length to guide the movable member 212 within the actuator body 218. Figures 2A to 2E In the exemplary embodiment shown, the gate valve passage 132 is closed (i.e., the gate valve passage is sealed and the substrate cannot pass from one chamber to another). As... Figures 2A-2E As shown, actuator 200 includes a pocket section 278 that accommodates shaft 210 when gate valve passage 132 is open. That is, when movable part 212 is in lower section 286, shaft 210 is accommodated in hollow portion 282 of pocket section 278 by allowing shaft 210 to pass through intermediate hole 284.

[0028] The movable part 212 generates energy as it moves vertically to open and close the gate valve passage 132. In conventional systems, this mechanical energy generated from the movement of the movable part 212 is wasted. Figure 2B-2E Various embodiments for storing this energy are provided, allowing it to be reused at different capacities. Specifically, Figure 2B-2E Various embodiments of generating electrical energy from the movement of a movable component are shown. This electrical energy can be further stored for use in the operation of different tools within the semiconductor processing system 10.

[0029] Figure 2BAn embodiment of a generator that generates electrical energy from the movement of a movable part 212 is illustrated. In an exemplary embodiment, one or more magnetic parts 232 may be coupled to a side rod 230. In one exemplary embodiment, the magnetic part 232 may be a strip or a set of magnets. In an exemplary embodiment, the magnetic part 232 may be wound around the side rod 230. In an exemplary embodiment, the side rod 230 is the magnetic part 232. In other words, in an exemplary embodiment, the side rod 230 may be formed of a magnetic material (e.g., including magnetic materials).

[0030] like Figure 2B As further shown, the actuator 200 may include a set of coils 234. In an exemplary embodiment, the set of coils 234 may be attached to the movable member 212 and thus move with respect to the movable member 212. In an exemplary embodiment, the set of coils 234 is attached to the bottom surface 264 of the movable member 212. In an exemplary embodiment, the set of coils 234 may be wound around the side rod 230, for example, wound vertically and / or horizontally relative to gravity. In an exemplary embodiment, when the movable member 212 moves (as shown with respect to the side rod 220), the set of coils 234 may not be wound around the side rod 230, but rather within the vicinity of the magnetic member 232. Therefore, when the movable member 212 is in motion, a magnetic field is generated by the magnetic member 232, and because the set of coils 234 is within this magnetic field, a voltage is induced in the set of coils 234 due to relative motion.

[0031] Although Figure 2B This generator is shown implemented on side rod 230, but in an exemplary embodiment, it can be implemented on side rod 220. For example, as Figure 2B As shown, the side rod 220 may include one or more magnetic components 222. In one exemplary embodiment, the magnetic component 222 may be a strip or a set of magnets. In an exemplary embodiment, the magnetic component 222 is attached to the side rod 220. In an exemplary embodiment, the magnetic component 222 may be wound around the side rod 220. In an exemplary embodiment, the side rod 220 is the magnetic component 222. In other words, in an exemplary embodiment, the side rod 220 may be formed of a magnetic material (e.g., including magnetic materials).

[0032] like Figure 2BAs further shown, the actuator 200 may include a set of coils 226. In an exemplary embodiment, the set of coils 226 is located near the magnetic member 222, but not wound around the side rod 220. For example, in an exemplary embodiment, the set of coils 226 may be attached to the bottom surface 264 of the movable member 212. In an exemplary embodiment, the set of coils 226 is attached horizontally along the bottom surface 264 (not shown). In an exemplary embodiment, the set of coils 226 is attached to the inner bottom surface 262 of the actuator body 218. In an exemplary embodiment, the set of coils 226 is attached horizontally along the inner bottom surface 262. In an exemplary embodiment, the set of coils 226 is attached to the inner rear surface 242 of the actuator 200. Therefore, when the movable member 212 is in motion, a magnetic field is generated by the magnetic member 222, and because the set of coils 226 is within this magnetic field, a voltage is induced in the set of coils 226.

[0033] Furthermore, a second set of coils 224 can also be implemented in a generator. In an exemplary embodiment, this set of coils 224 is located opposite coil 226. For example, in Figure 2B In the illustrated embodiment, the set of coils 226 is located on one side of the magnetic component 222, and the set of coils 224 is located on the other side of the magnetic component 222. The set of coils 224 has a similar structure to the set of coils 226 and functions in a similar manner.

[0034] Although Figure 2B This generator is shown implemented on side rod 220, but in an exemplary embodiment, it can be implemented on side rod 230. Therefore, side rod 220 and / or side rod 230 can be used to implement this generator individually, or as... Figure 2B Various combinations are shown with respect to side bar 220 or side bar 230.

[0035] Figure 2C An embodiment of a generator that generates electrical energy from the movement of a movable part 212 is shown. In an exemplary embodiment, one or more magnetic parts 252 may be coupled to a portion of the rear section 240 (e.g., section 244). In one exemplary embodiment, the magnetic part 252 may be a strip or a set of magnets. Figure 2CAs further shown, in an exemplary embodiment, the actuator 200 may include a set of coils 256. In an exemplary embodiment, the set of coils 256 may be attached to and thus movable according to the movable member 212. In an exemplary embodiment, the set of coils 256 is attached to the bottom surface 264 of the movable member 212. In an exemplary embodiment, the coils 256 may be attached to the shaft 210 such that when the movable member 212 is in motion, the set of coils 256 is in the vicinity of the magnetic member 252. Therefore, when the movable member 212 is in motion, a magnetic field is generated by the magnetic member 252, and because the set of coils 256 is within this magnetic field, a voltage is induced in the set of coils 256 due to relative motion.

[0036] For ease of explanation, Figures 2B to 2C An embodiment of a generator constructed in the lower section 286 of actuator 200 is shown. However, Figures 2B to 2C Any of the embodiments shown can be implemented in the upper segment 288 of actuator 200. For example... Figure 2A As shown, the upper section 288 is the section of the actuator 200 located between the movable part 212 and the gate valve body 130. The lower section 286 is the remaining section of the actuator 200, but further away from the gate valve body 130. Therefore, when the gate valve passage 132 is as shown... Figures 2B to 2E When the condition is closed, the upper segment 288 is less than the lower segment 286, and vice versa.

[0037] Figure 2D An embodiment of a generator that generates electrical energy from the movement of a movable part 212 is illustrated. In an exemplary embodiment, one or more magnetic parts 272 may be coupled to the pocket section 278. In one exemplary embodiment, the magnetic part 272 may be a strip or a set of magnets. In an exemplary embodiment, the magnetic part 272 may be attached to at least one surface of the pocket section 278. In an exemplary embodiment, the magnetic part 272 may be attached to all surfaces of the pocket section 278. In an exemplary embodiment, the pocket section 278 may be constituted by the magnetic part 272. In other words, in an exemplary embodiment, the interior surface of the pocket section 278 may be magnetic.

[0038] like Figure 2DAs further shown, the actuator 200 may include a set of coils 274. In an exemplary embodiment, the set of coils 274 may be attached to the shaft 210 and thus movable according to the movable member 212 and the shaft 210. In an exemplary embodiment, the set of coils 274 is wound around the shaft 210. In an exemplary embodiment, the set of coils 274 may not be wound around the shaft 210, but may be coupled to the bottom surface 264 of the movable member 212 such that when the movable member 212 is in motion, the set of coils 274 is near the magnetic member 272. Therefore, when the movable member 212 is in motion, a magnetic field is generated by the magnetic member 272, and because the set of coils 274 is within this magnetic field, a voltage is induced in the set of coils 274 due to relative motion.

[0039] Figure 2E An embodiment of a generator that generates electrical energy from the movement of a movable member 212 is illustrated. In an exemplary embodiment, the actuator 200 may include a set of coils 294. In an exemplary embodiment, the set of coils 294 may be attached to the movable member 212 and thus move with respect to the movable member 212. In an exemplary embodiment, the set of coils 294 may be wound around the movable member 212. In an exemplary embodiment, the set of coils 294 may be coupled to the bottom or top surface of the movable member 212.

[0040] In an exemplary embodiment, one or more magnetic components (such as component 292) may be coupled to the rear surface 248. Figures 2A-2E As shown, the rear surface 248 forms a curved surface to accommodate the shaft 210 in the actuator 200. In an exemplary embodiment, one or more magnetic components (such as component 296) may be coupled to the inner bottom surface 262 of the actuator body 218. In an exemplary embodiment, one or more magnetic components (such as component 298) may be coupled to the inner top surface 266 of the actuator body 218. In an exemplary embodiment, one or more magnetic components 292, 296, 298 may be strips or a set of magnets. In an exemplary embodiment, one or more of the inner bottom surface 262, inner top surface 266, and / or rear surface 248 may be made of a magnetic material. Therefore, when the movable component 212 is in motion, a magnetic field is generated by one or more magnetic components 292, 296, and / or 298, and because the set of coils 294 is within this magnetic field, a voltage is induced in the set of coils 294 due to relative motion.

[0041] Although Figures 2B to 2EA generator operating in a magnetic field is provided, but other generators (e.g., piezoelectric generators) can be implemented to convert the mechanical motion of the movable part 212 into electrical energy. For example, one or more piezoelectric generators may be positioned at the inner bottom surface 262 and / or the inner top surface 266 such that when the movable part 212 presses against the piezoelectric generator, the combined pressure on the piezoelectric generator results in electrical energy proportional to the mechanical force of the movable part 212. In some examples, the generator may include a piezoelectric ceramic (PZT) connected (e.g., carried) by a moving part of an actuator and a static mass coupled to the PZT, the movement of the actuator during the opening and / or closing of the gate valve causing the static mass to exert an inertial force on the PZT, the inertial force in turn exerting strain in the PZT and generating an electrical signal during actuator movement. As those skilled in the art will understand from this disclosure, it is possible to store data from… Figures 2B to 2D The exemplary generator implemented in actuator 200 generates electrical energy (e.g., stored in one or more capacitors, batteries, etc.). Therefore, the internal voltage source can then be used to power one or more tools of the substrate processing system 10. This built-in generator reduces the need to power components of the system 10 via external connections that may require additional wiring.

[0042] In addition, such as Figure 1A As shown, in a five-faceted system such as processing system 10, at least twelve gate valves 100 are included. In an exemplary embodiment, each engagement point includes a top gate valve and a bottom gate valve. Therefore, in, for example... Figure 1A In some of the examples shown, twenty-four gate valves 100 may be included. Thus, including a generator in each actuator 200 of each gate valve 100 results in the collection of a large amount of electrical energy that can be stored and reused.

[0043] Figure 3 A method 300 is illustrated for storing energy generated from the movement of an actuator (e.g., actuator 200) in a gate valve (e.g., gate valve 100) of a semiconductor processing system (e.g., semiconductor processing system 10). Method 300 includes providing magnetic components (e.g., magnetic components 222, 232, 252, 272, 292, 296, 298), as shown in block 302. The magnetic components are coupled to a movable part of the actuator (e.g., movable part 212).

[0044] Method 300 also includes providing electrical components (e.g., components 224, 226, 234, 256, 274, 294), as shown in block 304. The electrical components are electrically connected to the magnetic components. An exemplary embodiment of method 300 also includes providing at least one rod (e.g., rods 220, 230). The rod guides the movable component to move in a defined direction. In the example embodiment shown herein, the defined direction is vertical (i.e., up and down).

[0045] When the movable part is in motion and when the electrical part is in the magnetic field of the magnetic part, method 300 includes generating electrical energy to be stored for reuse. In an exemplary embodiment, electrical energy can be generated by electrically connecting the electrical part to the rod. Furthermore, in an exemplary embodiment, the rod may be composed of a magnetic part.

[0046] Finally, method 300 includes storing electrical energy generated by the electrical components. In an exemplary embodiment of method 300, the electrical components include one or more sets of coils. In an exemplary embodiment of method 300, the magnetic components include one or more magnets.

[0047] Although this disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that this disclosure extends beyond the specifically described embodiments to other alternative embodiments and / or uses of embodiments, as well as their obvious modifications and equivalents. Furthermore, while several variations of embodiments of this disclosure have been shown and described in detail, other modifications based on this disclosure will be apparent to those skilled in the art. Various combinations or sub-combinations of specific features and aspects of the embodiments are also contemplated and will still fall within the scope of this disclosure. It should be understood that various features and aspects of the disclosed embodiments can be combined or substituted with each other to form variations of embodiments of this disclosure. Therefore, it is intended that the scope of this disclosure should not be limited to the specific embodiments described above.

[0048] The headings provided herein (if any) are for convenience only and do not necessarily affect the scope or meaning of the apparatus and methods disclosed herein.

Claims

1. A substrate processing system having a gate valve assembly, comprising: The gate valve body, which defines the gate valve passage; Valve components that are movable to open and close the gate valve passage; An actuator coupled to a valve assembly, wherein the actuator includes a movable part such that the mechanical movement of the movable part controls the movement of the valve assembly to open and close a gate valve passage. A generator connected to a movable part, wherein the generator is configured to convert mechanical motion into electrical energy.

2. The substrate processing system according to claim 1, wherein, The generator includes: One or more sets of coils; and One or more magnets electrically connected to one or more sets of coils, wherein at least one of the magnets or coils is connected to a movable part such that when the movable part is in motion, the magnets and coils are electrically connected to convert the mechanical motion of the movable part into electrical energy.

3. The substrate processing system according to claim 2, wherein, The actuator includes: At least one post is connected to the movable component, wherein the at least one post guides the movable component to move in a defined direction, wherein at least one of the one or more magnets or one or more sets of electric coils is connected to the at least one post, and wherein when the movable component is in motion, one or more sets of electric coils are electrically connected to one or more magnets to convert the mechanical motion of the movable component into electrical energy.

4. The substrate processing system according to claim 3, wherein, The one or more magnets are connected to the at least one post.

5. The substrate processing system according to claim 3, wherein, The at least one column is made of magnetic material.

6. The substrate processing system according to claim 2, wherein, The one or more sets of electric coils are connected to the movable part, and wherein the one or more magnets are connected to the immovable section of the actuator.

7. The substrate processing system according to claim 6, wherein, The immovable section of the actuator includes at least one of the rear section of the actuator, the inner bottom section of the actuator, or the inner top section of the actuator.

8. The substrate processing system according to claim 7, wherein, The rear section includes a bent rear section to accommodate the shaft of the movable component.

9. The substrate processing system according to claim 2, in, The movable component includes a shaft; The actuator further includes a bag section with a central hole; and The bag section can approach the shaft through the central hole, so that when the gate valve channel is opened, the bag section will accommodate the shaft in the inner bag section.

10. The substrate processing system according to claim 9, wherein, The one or more magnets are connected to the inner bag section, and the one or more sets of coils are connected to the shaft.

11. The substrate processing system according to claim 4, wherein, The one or more magnets are wound around the at least one post.

12. The substrate processing system according to claim 2, wherein, The movable part is made of magnetic material.

13. The substrate processing system according to claim 1, wherein, The actuator includes an upper section and a lower section, wherein the upper section is the section of the actuator between the gate valve body and the movable part, and wherein the lower section is the remaining section of the actuator, and wherein the generator is included in the lower section of the actuator.

14. The substrate processing system according to claim 1, wherein, The generator includes a piezoelectric generator.

15. The substrate processing system according to claim 1, further comprising: The first chamber has a first pressure zone; A second chamber having a second pressure zone, wherein the first pressure zone operates at a different pressure than the second pressure zone; and The gate valve assembly is connected to the first chamber and the second chamber.

16. A method for storing energy generated by the motion of an actuator in a gate valve of a semiconductor processing system, comprising: Provide magnetic components; Provide electrical components, wherein the electrical components are electrically connected to the magnetic components; Specifically, when the movable part of the actuator is in motion and the electrical part is in the magnetic field of the magnetic part, electrical energy is generated; and Stores electrical energy generated by electrical components.

17. The method of claim 16, further comprising: At least one post is provided, wherein the at least one post guides the movable component to move in a defined direction; The generation of electrical energy to be stored for reuse also includes: The electrical component is electrically connected to at least one column.

18. The method according to claim 17, wherein, The at least one column is made of magnetic material.

19. The method of claim 16, wherein, Providing electrical components includes connecting the electrical components to a movable part of the actuator.

20. An actuator comprising: Movable parts; One or more sets of electrical coils connected to a movable part; One or more magnets are connected to one or more sets of electrical coils, wherein when the movable part is in motion, the one or more magnets and the one or more sets of electrical coils are electrically connected to convert the mechanical motion of the actuator into electrical energy.

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