Gallium nitride chip automatic pickup device
By designing the guiding mechanism and alignment components, and combining vacuum adsorption and corona discharge ion bars, the problems of chip damage and static electricity accumulation during the pick-up process of gallium nitride chip pick-up devices have been solved, achieving stable pick-up and static electricity elimination.
Patent Information
- Application Number
- CN202511147254.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-15
- Publication Date
- 2025-12-12
AI Technical Summary
Existing gallium nitride chip pickup devices are prone to chip damage and static electricity buildup during the pickup process, making it impossible to achieve a balance between stable pickup and static electricity removal.
By employing a guiding mechanism and alignment components, and combining vacuum adsorption and corona discharge ion bars, non-mechanical stable pickup and static electricity elimination are achieved. A drive motor and lead screw drive the displacement bracket to avoid stress concentration, and photoelectric sensors and industrial cameras are used for detection and static electricity removal.
Stable pickup and electrostatic discharge of gallium nitride chips were achieved, avoiding chip damage and ensuring the accuracy and safety of the pickup process.
Smart Images
Figure CN121123099A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of gallium nitride chip technology, specifically to an automatic gallium nitride chip picking device. Background Technology
[0002] Gallium nitride (GaN) chips are electronic devices based on gallium nitride, a third-generation semiconductor material. They possess excellent characteristics such as high frequency, high efficiency, high power density, and high temperature resistance, and are widely used in power electronics, radio frequency communication, optoelectronics, and other fields.
[0003] Gallium nitride (GaN) chip pick-up devices are key equipment in the semiconductor packaging and manufacturing process. They are used to precisely pick up, transfer, and place micron-sized GaN chips. Due to the high hardness and brittleness of GaN materials, and the fact that chip thickness can be extremely thin (tens of microns), the requirements for the accuracy, stability, and adaptability of the pick-up devices are extremely high.
[0004] Currently, existing gallium nitride (GaN) chip pickup devices on the market use mechanical pickup, and GaN chips are quite sensitive to static electricity. During the pickup process, friction or separation can easily accumulate charge, leading to gate breakdown and loss of withstand voltage. As a result, existing GaN chip pickup devices cannot perform non-mechanical stable chip pickup and static electricity removal in one integrated operation. Therefore, an improved device is needed to address the above problems. Summary of the Invention
[0005] To address the problems in the prior art, the present invention provides an automatic gallium nitride chip picking device.
[0006] The technical solution adopted by this invention to solve its technical problem is: an automatic gallium nitride chip picking device, including a guiding mechanism, a drive motor fixedly installed at the front end of the guiding mechanism, a lead screw fixedly installed at the rear end of the drive motor, a gallium nitride chip placed inside the bottom end of the guiding mechanism, the guiding mechanism including a support device and an alignment component, the alignment component fixedly installed at the bottom end of the support device, the support device including a support rod, a contact pressure plate, a lower edge bracket, a displacement cross plate, a guide frame, a support top frame, a displacement bracket, and a sliding block, the guide frame symmetrically fixedly installed at the bottom end of the support top frame, the displacement bracket slidably inserted into the interior of the support top frame, the lower edge bracket symmetrically fixedly installed at the bottom end of the displacement bracket, the sliding block slidably inserted into the opposite side end of the lower edge bracket, the displacement cross plate fixedly installed at the bottom end of the sliding block, the contact pressure plate symmetrically fixedly installed at the bottom end of the displacement cross plate, and the support rod rotatably installed at the center of both sides of the displacement cross plate.
[0007] Specifically, the alignment component includes a contact device and an auxiliary protective device, the auxiliary protective device being symmetrically rotated and mounted on the top of the contact device.
[0008] Specifically, the contact device includes a vacuum valve, an alignment plate, a top main plate, an extension frame, a rack, a first piston rod, a first disc, a second disc, a second piston rod, a first spring, an L-shaped air cylinder, a photoelectric sensor, a limiting block, a limiting vertical rod, a second spring, a connecting pipe, and an alignment pipe. The extension frame is symmetrically fixedly installed on both sides of the top of the top main plate, and the L-shaped air cylinder is symmetrically fixedly installed on both sides of the top of the top main plate, with the L-shaped air cylinder located inside the extension frame. The first piston rod is slidably inserted into the bottom end of the L-shaped air cylinder. The rack is fixedly installed at the end of the first piston rod away from the L-shaped air cylinder. The second piston rod is slidably inserted into the top end of the L-shaped air cylinder. The second disc is fixedly installed on... The top of the second piston rod, the first disc is fixedly installed on the outer ring of the L-shaped air cylinder, the first spring is fixedly installed between the first disc and the second disc, the limiting support block is symmetrically fixedly installed on both sides of the top main board, the photoelectric sensor is fixedly installed on the side of the limiting support block away from the top main board, the limiting vertical rod is slidably inserted into the four corners inside the top main board, the alignment plate is fixedly installed at the bottom end of the limiting vertical rod, the second spring is fixedly installed between the alignment plate and the top main board, and the second spring is located on the outer ring of the limiting vertical rod, the vacuum valve is fixedly installed at the top of the alignment plate, the connecting pipe is fixedly installed at equal intervals inside the alignment plate, and the alignment tube is fixedly installed at equal intervals at the bottom end of the alignment plate.
[0009] Specifically, the auxiliary protective device includes a transmission gear, a support shaft, a special-shaped support arm, an industrial camera, and a protective cover. The industrial camera is fixedly installed at the bottom inside the protective cover. The special-shaped support arm is symmetrically fixedly installed at the top of the side end of the protective cover. The support shaft is fixedly installed at the top of the opposite side end of the special-shaped support arm. The transmission gear is fixedly installed at the center of the end of the support shaft opposite to the transmission gear.
[0010] Specifically, the drive motor is fixedly installed inside the front end of the support top frame, the displacement bracket is threaded onto the outer ring of the lead screw, the gallium nitride chip is adsorbed onto the bottom end of the alignment tube, the top main board is fixedly installed at the bottom end of the lower edge bracket, the rack meshes with the transmission gear, and the support shaft is slidably inserted into the top end of the extension frame.
[0011] Specifically, the displacement bracket has a threaded top, the support bracket has slots on both sides, the displacement bracket has keyed ends, the sliding block has keyed ends, and the lower edge bracket has a slot on the side near the sliding block.
[0012] Specifically, an anti-detachment plate is fixedly installed on the side end of the support rod, and the vacuum valve is interconnected with the connecting pipe.
[0013] Specifically, the L-shaped air cylinder is hollow inside, and a sealed cavity is formed between the second piston rod, the L-shaped air cylinder, and the first piston rod. The second disc is vertically aligned with the contact pressure plate, and the photoelectric sensor is electrically connected to the industrial camera.
[0014] Specifically, a corona discharge ion rod is fixedly installed on the inner side of the protective cover, and the photoelectric sensor is electrically connected to the corona discharge ion rod. A plastic gasket is fixedly installed at the bottom end of the alignment tube. The connecting tube is interconnected with the alignment tube. The surface of the limiting block is inclined at 45°.
[0015] Specifically, the guide frame also includes an L-shaped support plate, a hydraulic cylinder, and a contact pad. The L-shaped support plate is fixedly installed at the bottom front end of the guide frame, the hydraulic cylinder is fixedly installed at the inner bottom end of the L-shaped support plate, and the contact pad is fixedly installed at the top end of the hydraulic cylinder.
[0016] The beneficial effects of this invention are:
[0017] First, this invention uses a distributed mounting of alignment tubes at the bottom of the alignment disk, allowing for adsorption at multiple points on the top of the gallium nitride (GaN) chip, thus avoiding stress concentration that could damage the GaN chip. Simultaneously, the second spring prevents excessive pressure between the alignment disk and the GaN chip when the disk moves downwards. Furthermore, the drive motor, upon startup, can displace the displacement bracket via a lead screw, thereby moving the GaN chip and completing the non-mechanical, stable pickup of the GaN chip.
[0018] Second, in this invention, during displacement, the support rod can move along the inside of the guide frame, causing the displacement plate to move downward and press the second disk. The rack drives the transmission gear to rotate, and then the protective cover can wrap the gallium nitride chip in the adsorption state. At the same time, the industrial camera can detect the gallium nitride chip. Furthermore, the corona discharge ion rod inside the protective cover can continuously neutralize the surface charge of the gallium nitride chip, preventing the accumulation of charge on the surface of the gallium nitride chip, thus completing the work of eliminating static electricity on the surface of the gallium nitride chip. Attached Figure Description
[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0020] Figure 1 This is a three-dimensional structural diagram of the main body from a frontal perspective in this invention;
[0021] Figure 2 This is a three-dimensional structural diagram of the guiding mechanism in this invention from a frontal perspective;
[0022] Figure 3 This is a three-dimensional structural diagram of the support device from the front view in this invention;
[0023] Figure 4 In this invention Figure 3 A magnified view of part A;
[0024] Figure 5 This is a three-dimensional structural diagram of the alignment component from the front view in this invention;
[0025] Figure 6 This is a partial cross-sectional schematic diagram of the contact device in this invention;
[0026] Figure 7 In this invention Figure 6 A magnified view of section B;
[0027] Figure 8 This is a three-dimensional structural diagram of the auxiliary protective device from the front view in this invention;
[0028] Figure 9 This is a frontal perspective three-dimensional structural diagram of the second embodiment of the guide frame in this invention.
[0029] In the diagram: 1-Guiding mechanism, 2-Drive motor, 3-Lead screw, 4-Gallium nitride chip, 5-Support device, 6-Alignment component, 7-Support rod, 8-Contact pressure plate, 9-Lower edge bracket, 10-Displacement cross plate, 11-Guide frame, 12-Support top frame, 13-Displacement bracket, 14-Sliding block, 15-Contact device, 16-Auxiliary protection device, 17-Vacuum valve, 18-Alignment plate, 19-Top main board, 20-Extension frame, 21-Rack and pinion. 22-First piston rod, 23-First disc, 24-Second disc, 25-Second piston rod, 26-First spring, 27-L-shaped air cylinder, 28-Photoelectric sensor, 29-Limiting support block, 30-Limiting vertical rod, 31-Second spring, 32-Connecting pipe, 33-Alignment pipe, 34-Transmission gear, 35-Support shaft, 36-Irregular support arm, 37-Industrial camera, 38-Protective cover, 39-L-shaped support plate, 40-Hydraulic cylinder, 41-Contact pad. Detailed Implementation
[0030] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.
[0031] The invention will be further described below with reference to the accompanying drawings.
[0032] Example 1
[0033] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, an automatic gallium nitride chip pickup device of the present invention includes a guiding mechanism 1. A drive motor 2 is fixedly installed at the front end of the guide mechanism 1, and a lead screw 3 is fixedly installed at the rear end of the drive motor 2. A gallium nitride chip 4 is placed inside the bottom end of the guide mechanism 1. The guide mechanism 1 includes a support device 5 and an alignment component 6. The alignment component 6 is fixedly installed at the bottom end of the support device 5. The support device 5 includes a support rod 7, a contact pressure plate 8, a lower edge bracket 9, a displacement cross plate 10, a guide frame 11, a support top frame 12, a displacement bracket 13, and a sliding block 14. The guide frame 11 is symmetrically fixedly installed at the bottom end of the support top frame 12. The displacement bracket 13 is slidably inserted into the interior of the support top frame 12. The lower edge bracket 9 is symmetrically fixedly installed at the bottom end of the displacement bracket 13. The sliding block 14 is slidably inserted into the opposite side end of the lower edge bracket 9. The displacement cross plate 10 is fixedly installed at the bottom end of the sliding block 14. The contact pressure plate 8 is symmetrically fixedly installed at the bottom end of the displacement cross plate 10. The support rod 7 is rotatably installed at the center of both sides of the displacement cross plate 10.
[0034] like Figure 5 The alignment component 6 includes a contact device 15 and an auxiliary protection device 16. The auxiliary protection device 16 is symmetrically rotated and installed on the top of the contact device 15, which can support the auxiliary protection device 16 to perform flipping operations.
[0035] like Figure 6 and Figure 7The contact device 15 includes a vacuum valve 17, an alignment plate 18, a top main plate 19, an extension frame 20, a rack 21, a first piston rod 22, a first disc 23, a second disc 24, a second piston rod 25, a first spring 26, an L-shaped air cylinder 27, a photoelectric sensor 28, a limiting block 29, a limiting vertical rod 30, a second spring 31, a connecting pipe 32, and an alignment pipe 33. The extension frame 20 is symmetrically fixedly installed on both sides of the top of the top main plate 19. The L-shaped air cylinder 27 is symmetrically fixedly installed on both sides of the top of the top main plate 19, and the L-shaped air cylinder 27 is located inside the extension frame 20. The first piston rod 22 is slidably inserted into the bottom end of the L-shaped air cylinder 27. The rack 21 is fixedly installed at the end of the first piston rod 22 away from the L-shaped air cylinder 27. The second piston rod 25 is slidably inserted into the top end of the L-shaped air cylinder 27. The second disc 24 is fixedly installed at the top end of the second piston rod 25. A disc 23 is fixedly installed on the outer ring of an L-shaped air cylinder 27. A first spring 26 is fixedly installed between the first disc 23 and the second disc 24. A limiting support block 29 is symmetrically fixedly installed on both sides of the top main board 19. A photoelectric sensor 28 is fixedly installed on the side of the limiting support block 29 away from the top main board 19. A limiting vertical rod 30 is slidably inserted into the four corners inside the top main board 19. An alignment disc 18 is fixedly installed at the bottom of the limiting vertical rod 30. A second spring 31 is fixedly installed between the alignment disc 18 and the top main board 19, and the second spring 31 is located on the outer ring of the limiting vertical rod 30. A vacuum valve 17 is fixedly installed at the top of the alignment disc 18. A connecting pipe 32 is fixedly installed at equal intervals inside the alignment disc 18. An alignment pipe 33 is fixedly installed at equal intervals at the bottom of the alignment disc 18. By sliding the limiting vertical rod 30 inside the top main board 19, the alignment disc 18 can be guaranteed to move linearly up and down.
[0036] like Figure 8 The auxiliary protective device 16 includes a transmission gear 34, a support shaft 35, a special-shaped support arm 36, an industrial camera 37, and a protective cover 38. The industrial camera 37 is fixedly installed inside the bottom of the protective cover 38. The special-shaped support arm 36 is symmetrically fixedly installed on the top of the side end of the protective cover 38. The support shaft 35 is fixedly installed on the top of the opposite side end of the special-shaped support arm 36. The transmission gear 34 is fixedly installed on the center of the end of the support shaft 35 away from the transmission gear 34. The guide frame 11 has inclined grooves at both ends inside and a horizontal groove at the center of the top of the guide frame 11. The horizontal groove and the inclined groove are interconnected, so that when the support rod 7 moves along the inside of the guide frame 11, it can drive the displacement plate 10 to move up and down.
[0037] The drive motor 2 is fixedly installed inside the front end of the support top frame 12. The displacement bracket 13 is threaded onto the outer ring of the lead screw 3. The gallium nitride chip 4 is adsorbed onto the bottom end of the alignment tube 33. The top main board 19 is fixedly installed at the bottom end of the lower edge bracket 9. The rack 21 meshes with the transmission gear 34. The support shaft 35 is slidably inserted into the top end of the extension frame 20. The top end of the displacement bracket 13 is threaded. The two sides of the support top frame 12 are provided with slots. The two ends of the displacement bracket 13 are fixedly installed with keys. The side end of the sliding block 14 is fixedly installed with keys. The side end of the lower edge bracket 9 near the sliding block 14 is provided with a slot. The support rod 7 An anti-detachment plate is fixedly installed on the side end. The vacuum valve 17 is interconnected with the connecting pipe 32. The interior of the L-shaped air cylinder 27 is hollow, and a sealed cavity is formed between the second piston rod 25, the L-shaped air cylinder 27 and the first piston rod 22. The second disc 24 is vertically aligned with the contact pressure plate 8. The photoelectric sensor 28 is electrically connected to the industrial camera 37. A corona discharge ion rod is fixedly installed on the inner side of the protective cover 38, and the photoelectric sensor 28 is electrically connected to the corona discharge ion rod. A plastic gasket is fixedly installed at the bottom end of the alignment tube 33. The connecting pipe 32 is interconnected with the alignment tube 33. The surface of the limiting block 29 is inclined at 45°.
[0038] The working principle of Example 1 is as follows: In use, the support top frame 12 is first installed on an external robotic arm. The drive motor 2 is then started, causing the lead screw 3 to rotate. The displacement bracket 13 is threaded onto the outer ring of the lead screw 3, allowing the lead screw 3 to rotate and displace the displacement bracket 13. The key at both ends of the displacement bracket 13 moves within slots on both sides of the support top frame 12, supporting the movement of the displacement bracket 13 and the lower edge bracket 9. Furthermore, as the support rod 7 moves along the inclined groove inside the guide frame 11, it drives the displacement horizontal plate 10 to move up and down. When the displacement bracket 13 moves to its extreme position at the front end, the support rod 7 moves downwards along the inclined groove inside the guide frame 11 to its extreme position. At this time, when the displacement horizontal plate 10... When moving downwards, the sliding block 14 moves in the slot inside the lower edge bracket 9 via the key on its side, allowing the support plate 10 to move linearly. When the displacement plate 10 moves downwards, it can move the contact plate 8 to contact the second disc 24, thereby squeezing the second disc 24 downwards. This allows the second piston rod 25 to be inserted into the L-shaped air cylinder 27, and the first piston rod 22 to move away from the L-shaped air cylinder 27. At this time, the rack 21 can move at the top of the transmission gear 34, allowing the irregular support arm 36 to flip upwards, facilitating the upward flipping of the protective cover 38 and preventing interference between the top main plate 19 and the alignment plate 18 when they move downwards. When the displacement plate 10 moves downwards to its limit position, the rack 21 can move at the top of the transmission gear 34. When the top of gear 34 is moved to its limit position, the irregular support arm 36 can rotate and tilt upwards. At this time, the alignment tube 33 will also contact the top of the gallium nitride chip 4. A plastic gasket is fixedly installed at the bottom of the alignment tube 33 to prevent damage to the gallium nitride chip 4. At the same time, the vacuum valve 17 can be opened to create a negative pressure inside the alignment tube 33, which can absorb the gallium nitride chip 4. Multiple alignment tubes are set at the bottom of the alignment disk 18, so that the gallium nitride chip 4 can be adsorbed from different areas, avoiding stress concentration that could damage the gallium nitride chip 4. Meanwhile, a second spring 31 is installed between the alignment disk 18 and the top main board 19 to prevent the gallium nitride chip from being crushed when the alignment disk 18 moves downwards. 4. Extrusion damage. Subsequently, after the alignment tube 33 stably adsorbs the gallium nitride chip 4, the drive motor 2 is started, driving the lead screw 3 to rotate in the opposite direction, so that the displacement bracket 13 can be reset to the rear end. At this time, the support rod 7 can be moved upward along the inclined groove inside the guide frame 11, and when the displacement plate 10 is moved upward, it can drive the contact pressure plate 8 to disengage from the second disk 24. At this time, the elasticity of the first spring 26 will drive the second disk 24 to reset upward, so that the second piston rod 25 moves upward from the inside of the L-shaped air cylinder 27, and the first piston rod 22 moves into the inside of the L-shaped air cylinder 27. At this time, the rack 21 will drive the protective cover 38 to flip downward through the transmission gear 34, so that when the support rod 7 moves to the highest point along the inclined groove inside the guide frame 11...The protective cover 38 can enclose and cover the gallium nitride chip 4 in an adsorbed state. At this time, the irregular support arm 36 will also come into contact with the photoelectric sensor 28, thereby activating the corona discharge ion bar inside the protective cover 38, which can continuously neutralize the nearby charge and prevent static electricity from adhering to the surface of the gallium nitride chip 4. At the same time, the industrial camera 37 is electrically connected to the photoelectric sensor 28, which can be activated to perform visual inspection of the gallium nitride chip 4. At this time, the support rod 7 will move a certain distance along the transverse groove at the top of the guide frame 11, which facilitates the continuous static electricity removal and pick-up and transfer of the gallium nitride chip 4. When the displacement bracket 13 moves a certain distance to the rear end, the support rod 7 can be driven along the guide frame. The inclined groove inside the frame 11 moves downward, allowing the displacement plate 10 to move downward again. This causes the second disc 24 to move downward again, and the rack 21 can drive the transmission gear 34 to rotate again, allowing the protective cover 38 to flip upward, facilitating the release of the gallium nitride chip 4. Furthermore, when the displacement bracket 13 moves to its rearmost position, a storage tray is pre-installed at the bottom rear end of the guide frame 11. This ensures that the displacement plate 10 is vertically aligned with the storage tray when the displacement bracket 13 reaches its rearmost position. At this point, the vacuum valve 17 can be closed, allowing the alignment tube 33 to release the gallium nitride chip 4. The gallium nitride chip 4 falls onto the storage tray, completing the static electricity removal process for picking up the gallium nitride chip 4.
[0039] Example 2
[0040] Based on Example 1, such as Figure 9 As shown, the guide frame 11 also includes an L-shaped support plate 39, a hydraulic cylinder 40, and a contact pad 41. The L-shaped support plate 39 is fixedly installed at the bottom front end of the guide frame 11, the hydraulic cylinder 40 is fixedly installed at the inner bottom end of the L-shaped support plate 39, and the contact pad 41 is fixedly installed at the top end of the hydraulic cylinder 40.
[0041] In implementing this embodiment, when the displacement plate 10 moves to be vertically aligned with the contact pad 41, the hydraulic cylinder 40 can be activated to move the contact pad 41 upward, so that the top of the contact pad 41 can move to be flush with the bottom of the gallium nitride chip 4, so that the contact pad 41 can accurately receive the gallium nitride chip 4. Subsequently, after the contact pad 41 receives the gallium nitride chip 4, the hydraulic cylinder 40 can be activated to move the contact pad 41 downward, so that the gallium nitride chip 4 can be transferred downward, completing the transfer of the gallium nitride chip 4 and avoiding the phenomenon of the gallium nitride chip 4 falling and being damaged.
[0042] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. An automatic gallium nitride chip picking device, comprising a guiding mechanism (1), wherein a drive motor (2) is fixedly installed at the front end of the guiding mechanism (1), a lead screw (3) is fixedly installed at the rear end of the drive motor (2), and a gallium nitride chip (4) is placed inside the bottom end of the guiding mechanism (1), characterized in that: The guiding mechanism (1) includes a support device (5) and an alignment component (6). The alignment component (6) is fixedly installed at the bottom end of the support device (5). The support device (5) includes a support rod (7), a contact pressure plate (8), a lower edge bracket (9), a displacement cross plate (10), a guide frame (11), a support top frame (12), a displacement bracket (13), and a sliding block (14). The guide frame (11) is symmetrically fixedly installed at the bottom end of the support top frame (12). The displacement bracket (13) is slidably inserted into the inside of the support top frame (12). The lower edge bracket (9) is symmetrically fixedly installed at the bottom end of the displacement bracket (13). The sliding block (14) is slidably inserted into the opposite side end of the lower edge bracket (9). The displacement cross plate (10) is fixedly installed at the bottom end of the sliding block (14). The contact pressure plate (8) is symmetrically fixedly installed at the bottom end of the displacement cross plate (10). The support rod (7) is rotatably installed at the center of both sides of the displacement cross plate (10).
2. The gallium nitride chip automatic pickup device according to claim 1, characterized in that: The alignment component (6) includes a contact device (15) and an auxiliary protection device (16), the auxiliary protection device (16) being symmetrically rotated and mounted on the top of the contact device (15).
3. The gallium nitride chip automatic pickup device according to claim 2, characterized in that: The contact device (15) includes a vacuum valve (17), an alignment plate (18), a top main plate (19), an extension frame (20), a rack (21), a first piston rod (22), a first disc (23), a second disc (24), a second piston rod (25), a first spring (26), an L-shaped air cylinder (27), a photoelectric sensor (28), a limiting block (29), a limiting vertical rod (30), a second spring (31), a connecting pipe (32), and an alignment pipe (33). The extension frame (20) is symmetrically fixed. The L-shaped air cylinders (27) are symmetrically fixedly installed on both sides of the top of the top main board (19), and the L-shaped air cylinders (27) are located inside the extension frame (20). The first piston rod (22) is slidably inserted into the bottom end of the L-shaped air cylinder (27). The rack (21) is fixedly installed at the end of the first piston rod (22) away from the L-shaped air cylinder (27). The second piston rod (25) is slidably inserted into the top end of the L-shaped air cylinder (27). The second circular... The disc (24) is fixedly installed on the top of the second piston rod (25), the first disc (23) is fixedly installed on the outer ring of the L-shaped air cylinder (27), the first spring (26) is fixedly installed between the first disc (23) and the second disc (24), the limiting support block (29) is symmetrically fixedly installed on both sides of the top main plate (19), the photoelectric sensor (28) is fixedly installed on the side end of the limiting support block (29) away from the top main plate (19), and the limiting vertical rod (30) is slidably inserted into the top main plate (25). The alignment plate (18) is fixedly installed at the bottom of the limiting vertical rod (30) at the four internal corners of 19). The second spring (31) is fixedly installed between the alignment plate (18) and the top main plate (19), and the second spring (31) is located on the outer ring of the limiting vertical rod (30). The vacuum valve (17) is fixedly installed at the top of the alignment plate (18). The connecting pipe (32) is fixedly installed at equal intervals inside the alignment plate (18). The alignment pipe (33) is fixedly installed at equal intervals at the bottom of the alignment plate (18).
4. The gallium nitride chip automatic pickup device according to claim 3, characterized in that: The auxiliary protective device (16) includes a transmission gear (34), a support shaft (35), a special-shaped support arm (36), an industrial camera (37), and a protective cover (38). The industrial camera (37) is fixedly installed inside the bottom of the protective cover (38). The special-shaped support arm (36) is symmetrically fixedly installed on the top of the side end of the protective cover (38). The support shaft (35) is fixedly installed on the top of the opposite side end of the special-shaped support arm (36). The transmission gear (34) is fixedly installed at the center of one end of the support shaft (35) away from the transmission gear (34).
5. The gallium nitride chip automatic pickup device according to claim 4, characterized in that: The drive motor (2) is fixedly installed inside the front end of the support top frame (12), the displacement bracket (13) is threaded onto the outer ring of the lead screw (3), the gallium nitride chip (4) is adsorbed onto the bottom end of the alignment tube (33), the top main board (19) is fixedly installed at the bottom end of the lower edge bracket (9), the rack (21) meshes with the transmission gear (34), and the support shaft (35) is slidably inserted into the top end of the extension frame (20).
6. The gallium nitride chip automatic pickup device according to claim 5, characterized in that: The displacement bracket (13) has a threaded top, the support bracket (12) has slots on both sides, the displacement bracket (13) has key fixedly installed at both ends, the sliding block (14) has key fixedly installed on the side end, and the lower edge bracket (9) has a slot inside the side end near the sliding block (14).
7. The gallium nitride chip automatic pickup device according to claim 6, characterized in that: The side end of the support rod (7) is fixedly installed with an anti-detachment plate, and the vacuum valve (17) is interconnected with the connecting pipe (32).
8. The gallium nitride chip automatic pickup device according to claim 7, characterized in that: The L-shaped air cylinder (27) is hollow inside, and a sealed cavity is formed between the second piston rod (25), the L-shaped air cylinder (27) and the first piston rod (22). The second disc (24) is vertically aligned with the contact pressure plate (8), and the photoelectric sensor (28) is electrically connected to the industrial camera (37).
9. The gallium nitride chip automatic pickup device according to claim 8, characterized in that: A corona discharge ion rod is fixedly installed on the inner side of the protective cover (38), and the photoelectric sensor (28) is electrically connected to the corona discharge ion rod. A plastic gasket is fixedly installed at the bottom end of the alignment tube (33). The connecting tube (32) is interconnected with the alignment tube (33). The surface of the limiting block (29) is inclined at 45°.
10. The gallium nitride chip automatic pickup device according to claim 9, characterized in that: The guide frame (11) also includes an L-shaped support plate (39), a hydraulic cylinder (40), and a contact pad (41). The L-shaped support plate (39) is fixedly installed at the bottom front end of the guide frame (11), the hydraulic cylinder (40) is fixedly installed at the inner bottom end of the L-shaped support plate (39), and the contact pad (41) is fixedly installed at the top end of the hydraulic cylinder (40).