A lateral multi-laser and water jet coupling device

Abstract

The application discloses a lateral multi-laser and water jet coupling device, which comprises a water inlet cavity and a light coupling cavity, the light coupling cavity is communicated with the water inlet cavity and has an inner diameter larger than that of the water inlet cavity, water flows into the water inlet cavity and is discharged from the light coupling cavity to form a micro water column; a laser beam is injected into the light coupling cavity from the outer side of the light coupling cavity and is totally reflected at the interface of the micro water column until falling on the surface of a workpiece to be processed. The application increases the laser incidence coupling area range and the number of couplable laser beams, reduces the coupling adjustment difficulty, improves the coupling water guide laser power, has the advantages of wide tuning range, low requirement on the incidence laser coupling adjustment precision and convenient operation.

Description

Technical Field

[0001] This application belongs to the field of water-guided laser technology, specifically relating to a lateral multi-laser coupling device with a water jet. Background Technology

[0002] Water-guided lasers utilize the principle of total internal reflection, enabling laser light to propagate through an extremely fine micro-jet of water. Based on this characteristic, water-guided lasers combine the thermal effects of laser processing with the cooling effect of water, achieving high-quality, low-damage processing results. This advanced composite processing technology is widely used in various advanced manufacturing and precision machining fields.

[0003] Currently, the diameter of the water jet used in water-guided lasers has generally been reduced to 100 micrometers. To achieve higher power density, the diameter of the water jet will become increasingly finer in the future, reaching a standard of less than 50 micrometers. The coupling method between the laser and the micro-water jet in current water-guided lasers is very simple and can be summarized as end-face coupling. End-face coupling means that a micro-water jet is emitted from the water cavity from top to bottom, and the laser enters the micro-water jet from the upper end of the water cavity. The water inlet of the water cavity is located on the side of the water cavity.

[0004] This end-face coupling method has several drawbacks: First, the laser incident surface has a single location and a limited length of only tens of micrometers, which is not conducive to achieving high-power water-guided lasers. Moreover, due to the single incident surface location, increasing the power of the water-guided laser can only be achieved by increasing the power of the single laser beam, which inevitably leads to an increase in the laser beam diameter and reduces coupling efficiency. Second, end-face coupling results in a small laser incident surface length, increasing the difficulty of coupling adjustment. Third, to improve coupling accuracy, a coaxial vision device is often required to observe the state at the coupling point. Since the laser is incident from above the end face, a 45-degree beam splitter must be introduced. The optical path offset caused by the difference in refractive index between the lens and air will affect the accuracy of coaxial observation by the vision device.

[0005] Therefore, it is necessary to improve the existing end-face coupling method in order to find the next generation of new coupling methods, especially to provide a basis for the next generation of new high-power water-guided lasers. Summary of the Invention

[0006] The main objective of this application is to provide a lateral multi-laser and water jet coupling device using a side-coupling method.

[0007] To achieve the aforementioned objectives, the technical solution adopted in this application includes: a lateral multi-laser and water jet coupling device, comprising:

[0008] Water inlet chamber;

[0009] The optical coupling cavity is connected to the water inlet cavity and its inner diameter is larger than that of the water inlet cavity. Water flows in from the water inlet cavity and exits from the optical coupling cavity to form a micro water column.

[0010] A laser beam is emitted from the outer side of the optical coupling cavity and undergoes total internal reflection at the micro water column interface until it falls onto the surface of the workpiece to be processed.

[0011] The optical coupling cavity includes a light-inlet plate and a beam expander wall for transmitting laser light. The light-inlet plate is disposed between the water inlet cavity and the optical coupling cavity, and the light-inlet plate is inclined outward. The laser beam is transmitted into the optical coupling cavity through the light-inlet plate, and the inner diameter of the optical coupling cavity and the inner diameter of the water inlet cavity satisfy the following relationship:

[0012] Φ2 = Φ1 + 2 × L × sin(θ);

[0013] sin(θ) ≥ 1 / n;

[0014] Where Φ2 is the inner diameter of the optical coupling cavity, Φ1 is the inner diameter of the water inlet cavity, L is the length of the light inlet plate, θ is the angle between the light inlet plate and the vertical direction, and n is the comprehensive refractive index of the micro water column.

[0015] In a preferred embodiment, the device further includes an adjustment module disposed outside the water inlet cavity. The adjustment module includes an adjustable reflector with an adjustable pitch angle. The laser beam is incident from the side onto the adjustable reflector and reflected by the adjustable reflector into the optical coupling cavity.

[0016] In a preferred embodiment, the angle θ between the light-inlet plate and the vertical direction is in the range of 50° to 70°, and the relationship between the length L of the light-inlet plate and the inner diameter Φ1 of the water inlet cavity is set as: (3.724×Φ1)<L<(4.571×Φ1).

[0017] In a preferred embodiment, the vertical distance between the incident point where the laser beam intersects the light-gathering plate and the total reflection point where the laser beam undergoes its first total internal reflection at the interface with the micro water column is greater than the length of the beam expander wall in the vertical direction.

[0018] In a preferred embodiment, the vertical distance h between the incident point and the total internal reflection point satisfies the following relationship:

[0019] h = tan(θ) × Φ2 - L / cos(θ) / 2.

[0020] In a preferred embodiment, the angle θ between the light-inlet plate and the vertical direction is in the range of 50° to 70°, the relationship between the vertical distance h and the inner diameter Φ1 of the water inlet cavity is: (6.42×Φ1)<h<(10.46×Φ1), and / or, the incident angle between the laser beam and the light-inlet plate is 90°.

[0021] In a preferred embodiment, the laser beam includes a first laser beam and a second laser beam, the adjustment module includes a first adjustment module and a second adjustment module, the first adjustment module includes a first adjustable reflector, the second adjustment module includes a second adjustable reflector, and the light-inlet plate includes a first light-inlet plate and a second light-inlet plate; the first laser beam is incident laterally on the first adjustable reflector, reflected by the first adjustable reflector and incident on the first light-inlet plate, and transmitted through the first light-inlet plate into the optical coupling cavity; the second laser beam is incident laterally on the second adjustable reflector, reflected by the second adjustable reflector and incident on the second light-inlet plate, and transmitted through the second light-inlet plate into the optical coupling cavity.

[0022] In a preferred embodiment, the top of the water inlet cavity is further provided with an end face coupling port, which is a water inlet or a laser incident port.

[0023] Compared with the prior art, the beneficial effects of this application are at least as follows:

[0024] (1) In this application, the laser is incident from the outer side of the optical coupling cavity (i.e., side coupling). Utilizing the wide side range of the water column, the length of its incident area can be much greater than the length of the end face of the water inlet cavity. Therefore, compared with the end face coupling method, the side coupling method of this application can effectively solve the problems of low power of water-guided laser and single coupling method in existing end face coupling. It increases the range of laser incident coupling area and the number of laser beams that can be coupled, reduces the difficulty of coupling adjustment, and increases the power of coupled water-guided laser. It has the advantages of wide tuning range and low requirements for the precision of incident laser coupling adjustment, making it easy to operate and providing a methodological basis for the next generation of new high-power water-guided lasers. Moreover, compared with the existing end face coupling technology of water-guided lasers, it is not necessary to simply increase the power of a single laser to realize a high-power water-guided laser.

[0025] (2) This application adds an adjustment module with multi-dimensional spatial adjustment function to realize the adjustment of the incident angle and incident point position of the incident laser as needed.

[0026] (3) This application prevents the water inlet cavity from being enlarged too quickly by reasonably controlling the relationship between the inner diameter of the optical coupling cavity and the inner diameter of the water inlet cavity, which makes it difficult to guarantee the laminar flow stability of the output water-guided laser micro-water column. At the same time, it can also ensure that the water inlet cavity is not too thin, that is, to ensure the high power of the water-guided laser. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a cross-sectional view of the lateral multi-laser and water jet coupling device of this application;

[0029] Figure 2a and Figure 2b These are schematic diagrams of the traditional end-face coupling method and the side-face coupling method of this application, respectively;

[0030] Figure 3 This is a schematic diagram of the structure at the lateral coupling point in a specific embodiment of this application.

[0031] Figure label:

[0032] 1. Top cover; 11. End face coupling port; 2. Upper side wall; 21. First water inlet; 22. Second water inlet; 31. First light-inlet plate; 32. Second light-inlet plate; 4. Beam expander wall; 5. Adjustable reflector; 6. Connecting rod; 7. Water inlet cavity; 8. Optical coupling cavity; 9. Micro water column; 101. First laser beam; 102. Second laser beam; 12. Incident point; 13. Total reflection point. Detailed Implementation

[0033] This application will be more fully understood through the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of this application are disclosed herein; however, it should be understood that the disclosed embodiments are merely exemplary and that this application may be embodied in various forms. Therefore, the specific functional details disclosed herein should not be construed as limiting, but rather as the basis for the claims and as a representative basis for teaching those skilled in the art to employ this application differently in any suitable detailed embodiment.

[0034] like Figure 1 As shown in the embodiment of this application, a lateral multi-laser and water jet coupling device includes a water inlet cavity 7 and an optical coupling cavity 8. The optical coupling cavity 8 is connected to the water inlet cavity 7 and its inner diameter is larger than that of the water inlet cavity 7. Water flows in from the water inlet cavity 7 and exits from the optical coupling cavity 8 to form a micro water column 9. The laser beam enters the optical coupling cavity 8 from the outer side of the optical coupling cavity 8 and undergoes total internal reflection at the interface of the micro water column 9 until it falls onto the surface of the workpiece to be processed (not shown in the figure).

[0035] Specifically, in this embodiment, the water inlet cavity 7 includes an upper sidewall 2 and a top cover 1. The upper sidewall 2 is a hollow cylinder with an inner diameter of Φ1, and the top cover 1 seals the upper end face of the upper sidewall 2. A water inlet is provided on the upper sidewall 2 near the top cover 1, through which water flows into the water inlet cavity 7. In this embodiment, the upper sidewall 2 has two water inlets, namely a first water inlet 21 and a second water inlet 22, which are symmetrically distributed on the upper sidewall 2 about the central axis of the water inlet cavity 7. Of course, in other embodiments, the water inlet cavity 7 is not limited to the separate structure of the upper sidewall 2 and the top cover 1. For example, it can also be configured as an integral structure including the top cover 1 and the upper sidewall 2. The water inlets on the upper sidewall 2 are not limited to the two water inlets provided here; one or more water inlets can be provided as needed. This application does not impose any restrictions on this.

[0036] The lower end of the optical coupling cavity 8 is connected to the lower end of the water inlet cavity 7. In this embodiment, the optical coupling cavity 8 specifically includes a light-inlet plate and a beam expander wall 4. The light-inlet plate is disposed between the water inlet cavity 7 and the optical coupling cavity 8, and is preferably inclined outward to allow the laser beam to pass through into the optical coupling cavity 8. Its length L forms the coupling region for laser incident, combined with... Figure 2a and Figure 2b As shown, compared to the existing end-face incident scheme with a coupling area of ​​Φ1, this application can increase the coupling area of ​​laser incident by setting the length L of the light-inlet plate to be much larger than the inner diameter of the water inlet cavity 7. Compared to the existing end-face coupling method, the side coupling method of this application has the advantages of a wide tuning range and low requirements for the coupling adjustment accuracy of the incident laser, making it easier to operate. In addition, compared to the existing end-face coupling laser which is limited by the coupling area, the side coupling method of this application can increase the number of incident laser beams by increasing the range of the coupling area, thereby reducing the difficulty of coupling adjustment and significantly improving the power of the water-guided laser. In this embodiment, the light-inlet plate has a high transmittance to the incident laser beam, with a transmittance exceeding 99.0%. Specifically, it includes two light-inlet plates, namely a first light-inlet plate 31 and a second light-inlet plate 32. The first light-inlet plate 31 and the second light-inlet plate 32 are preferably symmetrically distributed on the optical coupling cavity 8 with the central axis of the optical coupling cavity 8 as the axis of symmetry.

[0037] The beam expander wall 4 is a hollow cylinder with an inner diameter of Φ2. Its upper end is connected to the water inlet cavity 7 via a light-gathering plate, and its lower end supplies water to form a micro water column 9. Specifically, water enters the water inlet cavity 7 through the water inlet on the upper side wall 2 until it fills the water inlet cavity 7 and the optical coupling cavity 8, and finally exits from the lower end of the beam expander wall 4 to form a micro water column 9. The inner diameter Φ2 of the beam expander wall 4, the inner diameter Φ1 of the upper side wall 2, and the length L of the light-gathering plate have the following relationship:

[0038] Φ2=Φ1+2×L×sin(θ).

[0039] Preferably, by reasonably controlling the relationship between the inner diameter of the optical coupling cavity and the inner diameter of the water inlet cavity, the water inlet cavity 7 is prevented from being enlarged too quickly, making it difficult to guarantee the laminar flow stability of the output water-guided laser micro-water column. At the same time, it is also ensured that the water inlet cavity is not too thin, thus ensuring the high power of the water-guided laser. As can be seen from the above formula, the relationship between the inner diameter Φ2 and the inner diameter Φ1 can be determined by reasonably setting the range of θ and the relationship between the length L of the light-inlet plate and the inner diameter Φ1 of the upper sidewall. Preferably, for the included angle θ, it is set to satisfy: sin(θ)≥1 / n, where n is the comprehensive refractive index of the micro-water column (which is known; if it is pure water, it is generally taken as 1.33), and θ is preferably set between 50° and 70°. For the relationship between the length L of the light-inlet plate and the inner diameter Φ1 of the upper sidewall, it is preferably set to (3.724×Φ1)<L<(4.571×Φ1), which expands the coupling range compared to the incident area range of Φ1, reduces the requirement for the incident laser coupling adjustment accuracy, and facilitates operation. In one specific embodiment, combined with Figure 3 As shown, the included angle θ can be set to 60 degrees, and the length L can be set to 4 times the inner diameter Φ1. Then the inner diameter Φ2 is approximately 8 times the inner diameter Φ1, i.e., Φ2≈8×Φ1. If the inner diameter Φ1 of the water inlet cavity is 100 micrometers, then the inner diameter Φ2 of the optical coupling cavity is 800 micrometers, and the length L of the light inlet plate is 400 micrometers.

[0040] A laser beam enters the optical coupling cavity 8 from the outer side of the light-inlet plate and undergoes total internal reflection at the interface of the micro water column 9 until it falls onto the surface of the workpiece to be processed. In practice, one or more laser beams can be provided, and each laser beam can be one or more as needed. Preferably, corresponding to the first light-inlet plate 31 and the second light-inlet plate 32, this embodiment includes a first laser beam 101 and a second laser beam 102. The first laser beam 101 and the second laser beam 102 are also preferably symmetrically positioned about the central axis of the optical coupling cavity 8, entering the optical coupling cavity 8 from the outer side of the optical coupling cavity 8.

[0041] Preferably, to make the incident angle and incident point position between the laser beam and the light-inlet plate adjustable, this application further includes an adjustment module disposed outside the water inlet cavity. In this embodiment, the adjustment module specifically includes a connecting rod 6 and an adjustable reflector 5. One end of the connecting rod 6 is fixedly connected to the upper side wall of the water inlet cavity 7, and the other end is connected to the adjustable reflector 5. The laser beam is incident laterally onto the adjustable reflector 5, and after being reflected by the adjustable reflector 5, it is incident into the optical coupling cavity 8. By adjusting the pitch angle of the adjustable reflector 5, the incident angle and incident point position between the laser beam and the light-inlet plate can be adjusted. Preferably, the incident angle between the laser beam and the light-inlet plate is preferably 90°, that is, they are set perpendicularly. At this time, the angle between the laser beam and the horizontal plane is θ. Of course, other angles are also possible, as long as the incident angle of the laser beam is tilted downwards, that is, the angle between the laser beam and the horizontal plane is ≥θ, then the vertical distance h between the incident point 12 and the total reflection point 13 of the first total reflection can be greater than the vertical length H of the beam expander wall 4, and at the same time, sin(β) ≥ 1 / n at the incident point 12 can occur, where β is the angle between the laser beam and the horizontal plane. Corresponding to the number of laser beams mentioned above, this embodiment also sets two adjustment modules, namely the first adjustment module and the second adjustment module. The two adjustment modules have the same structure, that is, both include the connecting rod 6 and the adjustable reflector 5. The first adjustment module and the second adjustment module are also symmetrically distributed outside the upper side wall 2 with the central axis of the water inlet cavity 7 as the axis of symmetry. Specifically, the first laser beam 101 is incident laterally onto the first adjustable reflector, reflected by the first adjustable reflector onto the first light-inlet plate 31, and transmitted through the first light-inlet plate 31 into the optical coupling cavity 8; similarly, the second laser beam 102 is incident laterally onto the second adjustable reflector, reflected by the second adjustable reflector onto the second light-inlet plate 32, and transmitted through the second light-inlet plate 32 into the optical coupling cavity 8.

[0042] Preferably, the vertical distance h between the incident point 12 where the laser beam intersects the light-gathering plate and the total reflection point 13 where the laser beam undergoes its first total internal reflection at the interface with the micro water column 9 is greater than the vertical length H of the beam expander wall 4, ensuring that the laser beam undergoes total internal reflection transmission within the micro water column 9. The vertical distance h satisfies the following relationship with the included angle θ, inner diameter Φ2, inner diameter Φ1, and length L:

[0043] h = tan(θ) × Φ² - L / cos(θ) / 2;

[0044] Φ2=Φ1+2×L×sin(θ).

[0045] From the two formulas above, it can be seen that the relationship between the vertical distance h and the inner diameter Φ1 can be determined by reasonably setting the range of θ and the relationship between the length L of the light-incoming plate and the inner diameter Φ1 of the upper sidewall 2. The preferred setting of the included angle θ and the preferred relationship between the inner diameter Φ1 and the length L can be referred to the description above, and will not be repeated here. Therefore, the preferred relationship between the vertical distance h and the inner diameter Φ1 of the upper sidewall 4 is (6.42 × Φ1) < h < (10.46 × Φ1). It should be noted that a too short beam-expanding wall 4 is not conducive to laminar flow stability. Therefore, in a specific embodiment, combined with... Figure 3 As shown, the length H of the beam expander wall 4 in the vertical direction is set to be 5 times the inner diameter Φ1 of the inlet cavity, and less than one end value of the vertical distance h, which is 6.42×Φ1. If the inner diameter Φ1 of the inlet cavity is 100 micrometers, then the length H of the beam expander wall is 500 micrometers.

[0046] In addition, an end-face coupling port 11 is provided at the top of the water inlet cavity 7. In this embodiment, the end-face coupling port 11 is specifically provided on the top cover 1 of the water inlet cavity 7, preferably at the center of the top cover 1. In practice, the end-face coupling port 11 can serve as a water inlet or a laser injection port. In a specific embodiment, the diameter of the end-face coupling port 11 is 50 micrometers.

[0047] The lateral multi-laser and water jet coupling device disclosed in this application has at least the following advantages: 1. This application uses a side-coupled method where the laser is incident from the outer side of the optical coupling cavity. Utilizing the wide lateral range of the water jet, the length of its incident area can be much greater than the length of the end face of the water inlet cavity. Therefore, compared to the end-face coupling method, the side-coupled method of this application can effectively solve the problems of low water-guided laser power and single coupling method in existing end-face coupling methods. It increases the laser incident coupling area and the number of laser beams that can be coupled, reducing the difficulty of coupling adjustment while increasing the power of the coupled water-guided laser. It has the advantages of a wide tuning range and low requirements for incident laser coupling adjustment accuracy, making it easy to operate and providing a methodological basis for the next generation of high-power water-guided lasers. Furthermore, compared with existing end-face coupling technology for water-guided lasers, it does not require simply increasing the power of a single laser path to achieve high-power water-guided lasers. 2. This application adds an adjustment module with multi-dimensional spatial adjustment capabilities, allowing for adjustment of the incident laser's incident angle and incident point position as needed. 3. This application prevents the water inlet cavity from being enlarged too quickly by reasonably controlling the relationship between the inner diameter of the optical coupling cavity and the inner diameter of the water inlet cavity, which would make it difficult to guarantee the laminar flow stability of the output water-guided laser micro-water column. At the same time, it can also ensure that the water inlet cavity is not too small, thus ensuring the high power of the water-guided laser.

[0048] All aspects, embodiments, features, and examples of this application are to be regarded as illustrative in all respects and are not intended to limit the application; the scope of this application is defined only by the claims. Other embodiments, modifications, and uses will become apparent to those skilled in the art without departing from the spirit and scope of this application as claimed.

[0049] The use of headings and sections in this application is not intended to limit this application; each section may be applied to any aspect, embodiment or feature of this application.

Claims

1. A lateral multi-laser and water jet coupling device, characterized in that: The device includes: Water inlet chamber; The optical coupling cavity is connected to the water inlet cavity and its inner diameter is larger than that of the water inlet cavity. Water flows in from the water inlet cavity and exits from the optical coupling cavity to form a micro water column. A laser beam is emitted from the outer side of the optical coupling cavity and undergoes total internal reflection at the micro water column interface until it falls onto the surface of the workpiece to be processed. The optical coupling cavity includes a light-inlet plate and a beam expander wall for transmitting laser light. The light-inlet plate is disposed between the water inlet cavity and the optical coupling cavity, and the light-inlet plate is inclined outward. The laser beam is transmitted into the optical coupling cavity through the light-inlet plate, and the inner diameter of the optical coupling cavity and the inner diameter of the water inlet cavity satisfy the following relationship: Φ2 = Φ1 + 2 × L × sin(θ); sin(θ) ≥ 1 / n; Where Φ2 is the inner diameter of the optical coupling cavity, Φ1 is the inner diameter of the water inlet cavity, L is the length of the light inlet plate, θ is the angle between the light inlet plate and the vertical direction, and n is the comprehensive refractive index of the micro water column.

2. The lateral multi-laser and water jet coupling device according to claim 1, characterized in that: The device also includes an adjustment module disposed outside the water inlet cavity. The adjustment module includes an adjustable reflector with an adjustable pitch angle. The laser beam is incident from the side onto the adjustable reflector and is reflected by the adjustable reflector into the optical coupling cavity.

3. The lateral multi-laser and water jet coupling device according to claim 1, characterized in that: The angle θ between the light-gathering plate and the vertical direction is 50°~70°.

4. The lateral multi-laser and water jet coupling device according to claim 1, characterized in that: The relationship between the length L of the light inlet plate and the inner diameter Φ1 of the water inlet cavity is set as: (3.724×Φ1)<L<(4.571×Φ1).

5. The lateral multi-laser and water jet coupling device according to claim 1, characterized in that: The vertical distance between the incident point where the laser beam intersects the light-gathering plate and the total reflection point where the laser beam undergoes its first total internal reflection at the interface with the micro water column is greater than the length of the beam expander wall in the vertical direction.

6. The lateral multi-laser and water jet coupling device according to claim 5, characterized in that: The vertical distance h between the incident point and the total reflection point satisfies the following relationship: h = tan(θ) × Φ² - L / cos(θ) / 2; Φ2 = Φ1 + 2 × L × sin(θ); sin(θ) ≥ 1 / n; Where Φ2 is the inner diameter of the optical coupling cavity, Φ1 is the inner diameter of the water inlet cavity, L is the length of the light inlet plate, θ is the angle between the light inlet plate and the vertical direction, and n is the comprehensive refractive index of the micro water column.

7. A lateral multi-laser and water jet coupling device according to claim 6, characterized in that: The angle θ between the light-inlet plate and the vertical direction is in the range of 50° to 70°. The relationship between the vertical distance h and the inner diameter Φ1 of the water inlet cavity is: (6.42×Φ1)<h<(10.46×Φ1).

8. A lateral multi-laser and water jet coupling device according to claim 6, characterized in that: The laser beam is incident perpendicularly to the surface of the light-incoming plate.

9. A lateral multi-laser and water jet coupling device according to claim 2, characterized in that: The laser beam includes a first laser beam and a second laser beam. The adjustment module includes a first adjustment module and a second adjustment module. The first adjustment module includes a first adjustable reflector, and the second adjustment module includes a second adjustable reflector. The light-inlet plate includes a first light-inlet plate and a second light-inlet plate. The first laser beam is incident laterally on the first adjustable reflector, reflected by the first adjustable reflector, and incident on the first light-inlet plate. It is then transmitted through the first light-inlet plate into the optical coupling cavity. The second laser beam is incident laterally on the second adjustable reflector, reflected by the second adjustable reflector, and incident on the second light-inlet plate. It is then transmitted through the second light-inlet plate into the optical coupling cavity.

10. A lateral multi-laser and water jet coupling device according to any one of claims 1 to 9, characterized in that: The top of the water inlet cavity is also provided with an end face coupling port, which can be a water inlet or a laser incident port.

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