Workpiece rotating fixing frame and magnetron sputtering coating equipment comprising same

Abstract

The invention relates to the technical field of magnetron sputtering coating machines, in particular to a workpiece rotating fixing frame and magnetron sputtering coating equipment comprising the fixing frame, the workpiece rotating fixing frame comprises a coating chamber, a workpiece is located in the coating chamber for coating, and the workpiece rotating fixing frame further comprises a rotating disc, a supporting column and a fixing frame; the rotating disc is rotatably mounted in the coating chamber and is driven by the motor to rotate, the supporting column is vertically and fixedly mounted on the rotating disc, the fixing frame is mounted at the top end of the supporting column, the connecting position of the elastic telescopic rod is attached to the inner wall of a workpiece by adopting the fixing frame and utilizing compression and rotation of the elastic telescopic rod, and the center of the workpiece is determined; and the inner wall of the workpiece is fixed through cooperation with the suction cup, the position of the workpiece is fixed, and the stability of the workpiece in the rotating process is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of magnetron sputtering coating machine, in particular to a workpiece rotating fixing frame and a magnetron sputtering coating equipment containing the same. BACKGROUND

[0002] The magnetron sputtering coating machine is mainly composed of a vacuum chamber, a vacuum system, a sputtering system, a control system and an auxiliary system. The vacuum chamber is made of stainless steel or aluminum material and is provided with an observation window. The sputtering process is controlled by a magnetic field to deposit a functional thin film on a substrate. The magnetron sputtering coating machine has a full-automatic control system, an ultra-high vacuum environment and multiple sputtering modes (DC, RF, pulse DC, etc.).

[0003] When the magnetron sputtering coating machine is used for coating cup-shaped or bowl-shaped workpieces, multiple workpieces are usually installed in the coating chamber, and the workpieces are driven to rotate in the coating chamber to help ensure uniform coating. However, due to the weight of the workpieces or the uncertainty of the center, the workpieces may shake to some extent during rotation, which may cause uneven coating in some areas or prolong the coating time. SUMMARY

[0004] In view of the above-mentioned shortcomings of the prior art, the present application provides a workpiece rotating fixing frame and a magnetron sputtering coating equipment containing the same, which can effectively solve the problem of how to fix cup-shaped, bowl-shaped and similar-shaped workpieces in the prior art.

[0005] To achieve the above-mentioned purposes, the present application is implemented by the following technical solutions: The present application provides a workpiece rotating fixing frame and a magnetron sputtering coating equipment containing the same, which includes a coating chamber, a workpiece in the coating chamber for coating, a rotating disc, a support and a fixing frame. The rotating disc is rotatably installed in the coating chamber and is driven to rotate by a motor. The support is vertically fixedly installed on the rotating disc, and the fixing frame is installed at the top of the support. The fixing frame includes multiple elastic retracting rods installed at the top of the support. Two of the elastic retracting rods are connected in each group, and the two elastic retracting rods in each group are rotatably connected. The top ends of the multiple elastic retracting rods at the upper part are rotatably connected with a connecting disc.

[0006] Further, the top of the support is fixedly connected with a fixing cylinder, the fixing cylinder is rotatably installed with a rotating cylinder, the bottom of the rotating cylinder is an open structure, and the elastic retracting rod is rotatably installed at the top of the rotating cylinder.

[0007] Further, the bottom of the connecting disc is fixedly connected with a plug tube, and the bottom of the plug tube is fixedly connected with a piston disc.

[0008] Further, a through hole is formed in the bottom end of the insertion tube, the insertion tube communicates the space inside the suction disc with the space in the upper part of the rotating cylinder, and the circumferential side bottom end of the rotating cylinder and the fixed cylinder is provided with a gas outlet groove, and when the suction disc moves downward, the gas outlet grooves on the rotating cylinder and the fixed cylinder overlap.

[0009] Further, the top of the connecting disc is fixedly connected with a suction disc, a through hole is formed in the bottom end of the insertion tube, the insertion tube communicates the space inside the suction disc with the space in the upper part of the rotating cylinder, and the circumferential side bottom end of the rotating cylinder and the fixed cylinder is provided with a gas outlet groove, and when the suction disc moves downward, the gas outlet grooves on the rotating cylinder and the fixed cylinder overlap.

[0010] Further, the outer wall of the rotating cylinder is fixedly connected with a connecting plate, and the two side walls of the connecting plate are fixedly installed with symmetrically distributed elastic limiting pieces.

[0011] Further, the connecting portions of the elastic contraction rods in the same group are jointly connected with an adapter block, and the adapter block is fixedly connected with a friction contact block.

[0012] Further, the friction contact block comprises a fixed block fixedly connected in the adapter block, the end of the fixed block is fixedly connected with a gas guide chamber, and the gas guide chamber is slidably sleeved with a contact sleeve block.

[0013] Further, the bottom plate of the fixed cylinder is fixedly connected with a fixed plate, the inner side wall of the rotating cylinder is fixedly connected with two extrusion plates, and the two extrusion plates and the fixed plate are jointly fixedly connected with two air bags, the bottom of the fixed cylinder is fixedly connected with a gas pipe penetrating through, one end of the gas pipe is in communication with the inside of the air bag, the other end of the gas pipe is fixedly installed at the bottom of the gas guide chamber, and the gas guide chambers are connected in communication with a gas guide pipe.

[0014] The magnetic control sputtering coating equipment with the workpiece rotating fixing frame comprises a coating chamber, a sealing door and an electric control cabinet, the sealing door is rotationally connected to the coating chamber, and the electric control cabinet controls the operation of the electrical components.

[0015] Compared with the known prior art, the technical scheme provided by the application has the following beneficial effects: 1. By adopting the fixing frame, the compression and rotation of the elastic contraction rods are used to make the connecting portions of the elastic contraction rods adhere to the inner wall of the workpiece and determine the center of the workpiece, so that the workpiece does not shake due to the shift of the center of gravity during rotation, and the inner wall of the workpiece is fixed by the suction disc to help fix the position of the workpiece and increase the stability of the workpiece during rotation.

[0016] 2、By adopting the fixing frame, the position of the workpiece is fixed by the limiting function of each component, so as to cope with the rotating movement in the coating chamber, improve the stability of the coating process, cooperate with the telescopic friction contact block, increase the friction force between the workpiece inner side wall, and further limit the shaking range of the workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0018] Figure 1 is a schematic diagram of the overall structure of the present application; Figure 2 is a schematic diagram of the internal structure of the coating chamber of the present application; Figure 3 is a schematic diagram of the sectional view of the fixing frame of the present application; Figure 4 is a schematic diagram of the Figure 3 is an enlarged view of A in the figure; Figure 5 is a schematic diagram of the fixing frame of the present application; Figure 6 is a schematic diagram of the suction cup and the insertion tube of the present application; Figure 7 is a schematic diagram of the rotating cylinder and the fixed cylinder of the present application; Figure 8 is a schematic diagram of the sectional view of the rotating cylinder and the fixed cylinder of the present application; Figure 9 is a schematic diagram of the friction contact block of the present application.

[0019] The numbers in the figure represent: 1, coating chamber; 2, sealing door; 3, electric control cabinet; 4, rotating disc; 5, support column; 6, fixing frame; 601, elastic contraction rod; 602, friction contact block; 6021, fixed block; 6022, air guide chamber; 6023, contact sleeve block; 603, insertion tube; 604, rotating cylinder; 605, fixed cylinder; 606, suction cup; 607, through hole; 608, piston disc; 609, fixed plate; 610, extrusion plate; 611, air bag; 612, air pipe; 613, air guide pipe; 614, notch disc; 615, limiting disc; 616, insertion slot; 617, adapter block; 618, connecting disc; 619, air outlet groove; 620, connecting plate; 621, elastic limiting sheet; 622, fixed frame. DETAILED DESCRIPTION

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0021] The present invention will be further described below with reference to embodiments.

[0022] Reference Figures 1 to 9 Example: A workpiece rotating fixture includes a coating chamber 1, in which the workpiece is coated, and also includes a rotating disk 4, a support column 5 and a fixture 6. The rotating disk 4 is rotatably installed inside the coating chamber 1 and is driven to rotate by a motor. The support column 5 is vertically fixed on the rotating disk 4, and the fixing bracket 6 is installed on the top of the support column 5. The fixing frame 6 includes multiple elastic retractable rods 601 installed on the top of the support column 5. The multiple elastic retractable rods 601 are in pairs, and the two elastic retractable rods 601 in each pair are rotatably connected. The top of the multiple elastic retractable rods 601 at the top are rotatably connected to a connecting plate 618.

[0023] A fixed cylinder 605 is fixedly connected to the top of the support column 5. A rotating cylinder 604 is rotatably installed inside the fixed cylinder 605. The bottom of the rotating cylinder 604 is an open structure. An elastic retractable rod 601 is rotatably installed on the top of the rotating cylinder 604.

[0024] When installing cup-shaped, bowl-shaped, or basin-shaped workpieces, they need to be inverted onto the connecting plate 618, and then the connecting plate 618 is pressed down, forcing the elastic contraction rods 601 to compress and rotate. Multiple elastic contraction rods 601 are connected in pairs and arranged in a horizontal V-shape below the connecting plate 618. When subjected to pressure from the connecting plate 618, the rotation of the elastic contraction rods 601 causes their rotating connections to move towards the inner wall of the workpiece. After the elastic contraction rods 601 rotate to a certain extent, the connections between them will press against the inside of the workpiece. Since the rotation of the elastic contraction rods 601 is synchronized, the distance and speed at which the connections between each elastic contraction rod 601 extend towards the workpiece are equal. Therefore, if the center of the inner wall of the workpiece is not aligned with the connecting plate... With the center of 618 aligned, as the elastic shrinking rods 601 extend outward from their connections, one or two of the connections will first contact the inner wall of the workpiece and exert pressure on it. Once all the connections between the elastic shrinking rods 601 are in contact with the inner wall of the workpiece, the center of the workpiece coincides with the center of the connecting plate 618. This prevents the workpiece from swaying due to a shift in its center of gravity when it rotates or revolves on the support column 5 and the fixing frame 6, or when both occur simultaneously. Furthermore, because all the elastic shrinking rods 601 contact the inner wall of the workpiece and the number of sets of elastic shrinking rods 601 is even, the forces in each contact direction are similar in magnitude and opposite in direction, preventing uneven pressure on the inner wall of the workpiece. This ensures the stability of the workpiece during the coating process and maintains the uniformity of the coating.

[0025] A cannula 603 is fixedly connected to the bottom of the connecting plate 618. A piston plate 608 is fixedly connected to the bottom of the cannula 603. A slot 616 for the cannula 603 to pass through is opened at the center of the connection between the fixed cylinder 605 and the support column 5. A limiting plate 615 is symmetrically fixedly connected to the port of the slot 616. A number of notched plates 614 with notches corresponding to the limiting plates 615 are fixedly connected to the bottom of the piston plate 608 by a round rod. The notched plates 614 are spaced apart and the spacing between the notched plates 614 can accommodate the limiting plates 615.

[0026] Once the connection points between each elastic retractable rod 601 are in contact with the inner wall of the workpiece, the rotating cylinder 604 can be rotated to allow the gaps between the notched discs 614 to pass through the limiting disc 615, and the notched discs 614 to be locked onto the limiting disc 615. In this way, the height position of the elastic retractable rod 601 will be locked by the notched discs 614 and the limiting disc 615, which can maintain the position of the elastic retractable rod 601 in contact with the inner wall of the workpiece. At the same time, under the transmission of the elastic force of the elastic retractable rod 601 itself, the notched discs 614 will be firmly attached to the limiting disc 615, and the pressure will increase the friction and reduce the displacement of the notched discs 614.

[0027] As the connecting plate 618 moves downward, the notch on the notched plate 614 will continuously pass through the limiting plate 615. After the rotating cylinder 604 rotates 90°, the height of the fixed connecting plate 618 is fixed, which determines the degree of compression and angle of the fixed elastic contraction rod 601.

[0028] A suction cup 606 is fixedly connected to the top of the connecting plate 618. A through hole 607 is opened at the bottom end of the insertion tube 603. The insertion tube 603 connects the internal space of the suction cup 606 with the space of the upper part of the rotating cylinder 604. Air outlet grooves 619 are opened at the bottom circumferential side of both the rotating cylinder 604 and the fixed cylinder 605. When the suction cup 606 moves down, the air outlet grooves 619 on the rotating cylinder 604 and the fixed cylinder 605 overlap. A connecting plate 620 is fixedly connected to the outer wall of the rotating cylinder 604. Symmetrically distributed elastic limiting pieces 621 are fixedly installed on both sides of the connecting plate 620. Two fixing frames 622 are fixedly installed on the outer side wall of the fixed cylinder 605. The angle between the two fixing frames 622 is 90°.

[0029] As the connecting disc 618 and the lower piston disc 608 move downwards together, the piston disc 608 compresses the air in the lower half of the rotating cylinder 604 and discharges this air outward through the air outlet groove 619. After the rotating cylinder 604 rotates 90°, the air outlet grooves 619 on the rotating cylinder 604 and the fixed cylinder 605 are staggered, so that the space below the piston disc 608 forms a sealed space. The air seal helps to fix the height of the piston disc 608, that is, fix the height of the connecting disc 618. After the rotating cylinder 604 rotates 90°, the elastic limiting piece 621 on the connecting plate 620 passes through the fixed frame 622. After returning to its shape, the elastic limiting piece 621 abuts against the side wall of the fixed frame 622, which has the effect of fixing the position of the rotating cylinder 604, further ensuring that the compression degree and angle of the elastic contraction rod 601 will not change under the conditions of rotation or revolution.

[0030] Meanwhile, during the downward movement of the workpiece, the inner wall of the bottom of the workpiece, that is, the inner wall of the top of the inverted workpiece, will adhere to the suction cup 606. As the piston disc 608 moves downward, a negative pressure will be generated in the upper part of the rotating cylinder 604, and transmitted to the insertion tube 603 through the through hole 607. This pressure acts on the suction cup 606, and by extracting the air from the suction cup 606, the suction cup 606 is firmly attached to the inner wall of the workpiece, which can fix the workpiece and help improve the stability of the workpiece during rotation.

[0031] When it is necessary to remove the workpiece, press the two vent pipes 612 that pass through the fixed frame 622 to allow the elastic limiting plate 621 to pass through the fixed frame 622. Then rotate the rotating cylinder 604. After the notch plate 614 and the limiting plate 615 are misaligned, the elastic potential energy of the elastic retraction rod 601 is released. The connecting plate 618 and the workpiece will rise rapidly. The elastic retraction rod 601 loses contact with the workpiece. The piston plate 608 rises with it, the negative pressure condition in the suction cup 606 is released, and the suction cup 606 loses its adsorption effect on the inner wall of the workpiece. The workpiece can then be removed smoothly.

[0032] A transition block 617 is rotatably connected between the joints of the elastic retractable rods 601 in the same group, and a friction contact block 602 is fixedly connected inside the transition block 617.

[0033] The adapter block 617, located at the connection of the elastic retraction rod 601, will move towards the inner wall of the workpiece side along with the friction contact block 602 as the suction cup 606 and the connecting plate 618 move downward. The friction contact block 602 increases the friction with the inner wall of the workpiece, thereby improving stability.

[0034] The friction contact block 602 includes a fixed block 6021 fixedly connected to the adapter block 617. An air guide chamber 6022 is fixedly connected to the end of the fixed block 6021. A contact sleeve block 6023 is slidably sleeved on the air guide chamber 6022. A fixed plate 609 is fixedly connected to the bottom plate of the fixed cylinder 605. Two extrusion plates 610 are fixedly connected to the inner side wall of the rotating cylinder 604. Two airbags 611 are fixedly connected together between the two extrusion plates 610 and the fixed plate 609. A vent pipe 612 is fixedly connected through the bottom of the fixed cylinder 605. One end of the vent pipe 612 communicates with the inside of the airbag 611. The other end of the vent pipe 612 is fixedly installed through the bottom of the air guide chamber 6022. A vent pipe 613 is connected between multiple air guide chambers 6022.

[0035] When the rotating cylinder 604 rotates, the two extrusion plates 610 on the inner wall of the rotating cylinder 604 will squeeze the airbag 611. The other side of the airbag 611 is restricted by the fixing plate 609 at the bottom of the fixing cylinder 605, so that the gas in the airbag 611 is transmitted to the chamber of the air guide chamber 6022 through the air pipe 612, and the air pressure between each air guide chamber 6022 is transmitted through the air guide pipe 613, so that all the contact sleeves 6023 will be pushed outward under the action of air pressure. With the increased air pressure, since the contact sleeves 6023 are in contact with the inner wall of the workpiece, the friction between the contact sleeves 6023 and the inner wall of the workpiece is increased, which further helps to reduce the swaying amplitude of the workpiece during rotation and increase the stability effect.

[0036] The magnetron sputtering coating equipment using the above-mentioned workpiece rotating fixture includes a coating chamber 1, a sealing door 2, and an electrical control cabinet 3. The sealing door 2 is rotatably connected to the coating chamber 1, and the electrical control cabinet 3 controls the operation of the electrical components.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A workpiece rotating and fixing frame, comprising a coating chamber, wherein the workpiece is placed in the coating chamber for coating, characterized in that, Also includes: Rotating disk, support column, and mounting bracket; The rotating disk is installed in the coating chamber and is driven to rotate by a motor. The support column is vertically fixed on the rotating disk, and the fixing frame is installed on the top of the support column. The fixing frame includes multiple resilient retractable rods installed on the top of the support column. The multiple resilient retractable rods are grouped in pairs, and the two resilient retractable rods in each group are rotatably connected to each other. The top ends of the multiple resilient retractable rods at the top are rotatably connected to a connecting plate.

2. The workpiece rotation and fixing bracket according to claim 1, characterized in that, A fixed cylinder is fixedly connected to the top of the support column, and a rotating cylinder is rotatably installed inside the fixed cylinder. The bottom of the rotating cylinder is an open structure, and the elastic retractable rod is rotatably installed on the top of the rotating cylinder.

3. The workpiece rotation and fixing bracket according to claim 2, characterized in that, A tube is fixedly connected to the bottom of the connecting plate, and a piston plate is fixedly connected to the bottom of the tube.

4. The workpiece rotation and fixing bracket according to claim 3, characterized in that, At the center of the connection between the fixed cylinder and the support column, a slot is provided for the insertion tube to pass through. A limiting disc is symmetrically fixedly connected to the port of the slot. The bottom of the piston disc is fixedly connected by a round rod to a plurality of notched discs with notches corresponding to the limiting discs. The notched discs are spaced apart and the gaps between the notched discs can accommodate the limiting discs.

5. A workpiece rotation and fixing bracket according to claim 4, characterized in that, A suction cup is fixedly connected to the top of the connecting plate, and a through hole is opened at the bottom end of the insertion tube. The insertion tube connects the internal space of the suction cup with the space of the upper part of the rotating cylinder. Air outlet grooves are opened at the bottom circumferential sides of both the rotating cylinder and the fixed cylinder. When the suction cup moves down, the air outlet grooves on the rotating cylinder and the fixed cylinder overlap.

6. A workpiece rotation and fixing bracket according to claim 5, characterized in that, A connecting plate is fixedly connected to the outer wall of the rotating cylinder. Symmetrically distributed elastic limiting plates are fixedly installed on both sides of the connecting plate. Two fixing frames are fixedly installed on the outer side wall of the fixed cylinder, and the angle between the two fixing frames is 90°.

7. A workpiece rotation and fixing bracket according to claim 6, characterized in that, The joints of the elastic retractable rods in the same group are rotatably connected by an adapter block, and a friction contact block is fixedly connected inside the adapter block.

8. A workpiece rotation and fixing bracket according to claim 7, characterized in that, The friction contact block includes a fixed block fixedly connected within the adapter block, and an air guide chamber is fixedly connected to the end of the fixed block. A contact sleeve block is slidably sleeved on the air guide chamber.

9. A workpiece rotation and fixing bracket according to claim 8, characterized in that, A fixing plate is fixedly connected to the bottom plate of the fixed cylinder. Two extrusion plates are fixedly connected to the inner wall of the rotating cylinder. Two airbags are fixedly connected between the two extrusion plates and the fixing plate. A venting pipe is fixedly connected through the bottom of the fixed cylinder. One end of the venting pipe communicates with the inside of the airbag, and the other end of the venting pipe is fixedly installed through the bottom of the air guiding chamber. A venting pipe is connected between multiple air guiding chambers.

10. A magnetron sputtering coating apparatus using the workpiece rotating fixture as described in claim 9, characterized in that, It includes a coating chamber, a sealed door, and an electrical control cabinet. The sealed door is rotatably connected to the coating chamber, and the electrical control cabinet controls the operation of the electrical components.

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