Clamping assembly and electron microscope

Abstract

The invention relates to a clamping assembly which is used for clamping a detection sample, the clamping assembly comprises a base, a first clamping part and a second clamping part, and the base is used for being placed on a cooling table; one end of the first clamping part is connected with the base; one end of the second clamping part is connected with the base, the second clamping part and the first clamping part are oppositely arranged, a clamping area is arranged between the second clamping part and the first clamping part, and the clamping area is used for containing a detection sample; under the condition that the detection sample is detected, the detection sample is positioned in the clamping area and is in contact with the base.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of microscope technology, and in particular, to a clamping assembly and an electron microscope. BACKGROUND

[0002] At present, in the related art, the sample table used in the electron microscope for placing the detection sample, the surface of the sample table is usually uneven, due to such shape, after placing the detection sample, the distance between the detection sample and the bottom of the sample table is far, the detection sample cannot contact the bottom of the sample table, when cooling the detection sample in such a way, the cooling time of the detection sample is long.

[0003] Figure 1 、 Figure 2 、 Figure 3 and Figure 4 respectively show the cooling effect diagram of the sample table in the related art at different time periods.

[0004] Specifically, Figure 1 shows one of the cooling effect diagrams of the sample table according to the related art; Figure 2 shows the second cooling effect diagram of the sample table according to the related art; Figure 3 shows the third cooling effect diagram of the sample table according to the related art; Figure 4 shows the fourth cooling effect diagram of the sample table according to the related art. SUMMARY

[0005] The present application aims to at least solve one of the technical problems existing in the prior art or related art.

[0006] Therefore, the first aspect of the present application provides a clamping assembly.

[0007] The second aspect of the present application provides an electron microscope.

[0008] Specifically, the present application is realized by the following technical solutions:

[0009] According to the first aspect of the present application, a clamping assembly for clamping a detection sample is provided, the clamping assembly comprising a base, a first clamping part and a second clamping part, the base being used to be placed on a cooling table; one end of the first clamping part is connected with the base; one end of the second clamping part is connected with the base, the second clamping part is oppositely arranged with the first clamping part, and the second clamping part has a clamping area with the first clamping part, the clamping area being used to accommodate the detection sample; in the case of detecting the detection sample, the detection sample is located in the clamping area and contacts the base.

[0010] In the embodiment, the clamping assembly is arranged in an electron microscope, and is used for clamping a detection sample, so that the electron microscope can observe the detection sample clamped by the clamping assembly. The clamping assembly comprises a base, a first clamping part and a second clamping part. The base is used for being placed on a cooling table, so that the cooling table can cool the detection sample clamped by the clamping assembly, so that the electron microscope can accurately observe and analyze. One end of the first clamping part is connected with the base, so as to realize installation and fixation of the first clamping part. One end of the second clamping part is connected with the base, and the second clamping part is arranged opposite to the first clamping part, so as to realize installation and fixation of the second clamping part. The second clamping part and the first clamping part have a clamping area therebetween, and the clamping area is used for accommodating the detection sample, so that the first clamping part and the second clamping part can clamp the detection sample when the detection sample is in the clamping area. In the case of detecting the detection sample, the detection sample is located in the clamping area and in contact with the base. Since the base is placed on the cooling table, the cooling speed of the base in contact with the cooling table is the fastest when the cooling table is cooled. Therefore, the mode of contacting the detection sample with the base can improve the heat transfer speed of the clamping assembly, and thus the cooling time of the detection sample can be shortened, more samples can be prepared in the same experimental time, and research funds can be saved.

[0011] In some embodiments of the present application, the distance between the second clamping part and the first clamping part is a first distance, and the first distance is greater than the length of the detection sample.

[0012] In the embodiment, the distance between the second clamping part and the first clamping part is a first distance, that is, the length of the clamping area. By setting the first distance to be greater than the length of the detection sample, the detection sample can be placed in the detection area when the detection sample is detected. After the detection sample is placed in the detection area, the side of the detection sample facing the base can be completely in contact with the surface of the base, so that the base can cool the detection sample when the detection sample is cooled, thereby ensuring the cooling speed of the base to the detection sample.

[0013] In some embodiments of the present application, the clamping assembly further comprises an adjusting part, the adjusting part is arranged in the second clamping part, the adjusting part can move relative to the second clamping part, and one end of the adjusting part can approach or move away from the first clamping part to clamp or release the detection sample.

[0014] In the embodiment, the clamping assembly further comprises an adjusting part, the adjusting part is arranged in the second clamping part to realize the installation of the adjusting part. The adjusting part is movable relative to the second clamping part, by controlling one end of the adjusting part to move towards the first clamping part, so that the one end of the adjusting part can be placed on the detection sample in the clamping area, so that the adjusting part can fix the detection sample, after the detection is completed, the one end of the adjusting part is controlled to move away from the first clamping part to release the detection sample. Therefore, the fixing mode of the detection sample by the adjusting part can avoid the displacement of the sample surface of the detection sample, and ensure the accuracy of observation.

[0015] In some embodiments of the present application, the second clamping part is provided with a mounting hole, and the adjusting part is arranged in the mounting hole.

[0016] In the embodiment, the mounting hole is arranged on the second clamping part, and the adjusting part is arranged in the mounting hole, and then the adjusting part is moved in the mounting hole to realize the clamping and releasing of the detection sample, and then the adjusting part is driven.

[0017] In some embodiments of the present application, a first screw thread is arranged on the outer wall of the adjusting part, a second screw thread is arranged on the inner wall of the mounting hole, and the first screw thread cooperates with the second screw thread to move the adjusting part relative to the second clamping part.

[0018] In the embodiment, a first screw thread is arranged on the outer wall of the adjusting part, a second screw thread is arranged on the inner wall of the mounting hole, and the first screw thread cooperates with the second screw thread to move the adjusting part relative to the second clamping part. By arranging screw threads on the clamping part and the inner wall of the mounting hole respectively, the adjusting part is driven by rotating the adjusting part during clamping or releasing the detection sample. In the case that the adjusting part clamps the detection sample, the adjusting part is prevented from moving away from the detection sample, thereby achieving sufficient fixation of the detection sample.

[0019] In some embodiments of the present application, the other end of the adjusting part has an open cavity, and the cavity comprises a limiting part for limiting cooperation with an adjusting piece inserted into the cavity to drive the adjusting part to move relative to the second clamping part.

[0020] In the embodiment, the other end of the adjusting part has an open cavity, and the cavity comprises a limiting part for limiting cooperation with an adjusting piece inserted into the cavity. When the adjusting part needs to be driven, the one end of the adjusting piece is inserted into the cavity to cooperate with the limiting part to drive the adjusting part to move relative to the second clamping part, thereby achieving the driving of the adjusting part. Since the size of the adjusting part is small, the limiting part is arranged on the adjusting piece to facilitate the driving of the adjusting part.

[0021] In some embodiments of the present application, the clamping assembly further comprises an anti-skid part, which is arranged at one end of the adjusting part and used to contact the detection sample.

[0022] In this embodiment, by arranging the anti-skid part at the end of the adjusting part capable of contacting the detection sample, the anti-skid part can contact the detection sample when the adjusting part clamps the detection sample, thereby further preventing the position of the detection sample from moving when the adjusting part fixes the detection sample, and achieving sufficient fixation of the detection sample to ensure the stability of observation and analysis of the detection sample.

[0023] In some embodiments of the present application, the adjusting part is an elastic member.

[0024] In this embodiment, since the elastic member has elasticity, arranging the adjusting part as an elastic member can avoid damage to the detection sample caused by excessive clamping force of the adjusting part on the detection sample when the adjusting part fixes the detection sample, so that arranging the adjusting part as an elastic member can ensure the integrity of the detection sample.

[0025] In some embodiments of the present application, the base, the first clamping part and the second clamping part are of an integrated structure.

[0026] In this embodiment, by arranging the base, the first clamping part and the second clamping part as an integrated structure, the installation process between the base, the first clamping part and the second clamping part can be reduced, the installation time of the base, the first clamping part and the second clamping part can be saved, and the structural strength of the supporting assembly can be improved.

[0027] In some embodiments of the present application, the first clamping part has an anti-skid surface on the side facing the adjusting part, which can contact the detection sample.

[0028] In this embodiment, by arranging the anti-skid surface on the side of the first clamping part facing the adjusting part, the anti-skid surface can contact the detection sample when the detection sample is clamped, thereby further preventing the detection sample from moving when the detection sample is vacuumized, which can affect the accuracy of detection, so that the detection sample can be further fixed by arranging the anti-skid surface on the first clamping part.

[0029] In some embodiments of the present application, the number of adjusting parts is multiple, and the multiple adjusting parts are arranged at intervals.

[0030] In this embodiment, during the detection of the detection sample, the detection sample can be of different shapes or irregular shapes, and in the case of only one adjusting portion, the clamping of the detection sample can be unstable, therefore, by setting the number of adjusting portions to be multiple and spacing the multiple adjusting portions, the detection sample is fixed by the multiple adjusting portions, so that sufficient fixation of the detection sample can be achieved.

[0031] In some embodiments of the present application, the clamping area corresponds to the refrigeration area of the cooling table.

[0032] In this embodiment, during the cooling of the detection sample, the refrigeration amount generated by the cooling table is mainly transmitted to the base, thereby cooling the detection sample placed on the base, therefore, by setting the clamping area to correspond to the refrigeration area of the cooling table, the detection sample can be cooled faster when the base is placed on the cooling table, thereby accelerating the cooling of the detection sample by the base and shortening the cooling time of the detection sample.

[0033] In some embodiments of the present application, the distance between the mounting hole and the side of the base away from the second clamping portion is greater than or equal to 2.5 mm and less than or equal to 3.5 mm.

[0034] In this embodiment, by setting the distance between the mounting hole and the side of the base away from the second clamping portion to be greater than or equal to 2.5 mm and less than or equal to 3.5 mm, the adjusting portion can be adjusted to the position of the detection sample, and by setting the distance between the mounting hole and the side of the base away from the second clamping portion to be 2.5 mm to 3.5 mm, the adjusting portion can be in the middle position of the side of the detection sample when clamping the detection sample, so as to facilitate the fixation of the detection sample.

[0035] In some embodiments of the present application, the first clamping portion and the second clamping portion are correspondingly arranged.

[0036] In this embodiment, by correspondingly arranging the first clamping portion and the second clamping portion, the first clamping portion and the second clamping portion are on both sides of the detection sample when the detection sample is fixed, thereby facilitating the clamping of the detection sample.

[0037] In some embodiments of the present application, the base is a cylinder.

[0038] In this embodiment, since the shape of the cooling table is circular, the base is set in the form of a cylinder, so that the base can match the cooling table, thereby facilitating the installation of the base on the cooling table, so that the cooling table can better cool the base, thereby achieving the cooling of the detection sample.

[0039] In some embodiments of the present application, the first clamping part is arc-shaped in cross section, and the second clamping part is arc-shaped in cross section.

[0040] In this embodiment, since the base is cylindrical, by making the first clamping part arc-shaped in cross section and the second clamping part arc-shaped in cross section, the first clamping part and the second clamping part are matched with the base.

[0041] In some embodiments of the present application, the first clamping part is located at the edge of the base, and the second clamping part is located at the edge of the base.

[0042] In this embodiment, by locating the first clamping part at the edge of the base and the second clamping part at the edge of the base, the range of the clamping area between the first clamping part and the second clamping part can be increased, and by increasing the range of the clamping area, the clamping area can accommodate larger detection samples, thereby improving the versatility of the clamping assembly.

[0043] In some embodiments of the present application, the distance between the first clamping part and the second clamping part is the same in the direction from one end of the first clamping part to the other end of the first clamping part.

[0044] In this embodiment, the distance between the first clamping part and the second clamping part is the same in the direction from one end of the first clamping part to the other end of the first clamping part, that is, the cross section of the clamping area in the direction from the base to the end away from the base is rectangular in shape, thereby enabling such a clamping area to cool the detection sample more quickly when accommodating the detection sample, thereby shortening the cooling time of the detection sample.

[0045] In some embodiments of the present application, an electron microscope is provided, which comprises the clamping assembly of any of the above embodiments. Therefore, the electron microscope has all the beneficial effects of the clamping assembly.

[0046] In some embodiments of the present application, the electron microscope further comprises a cooling platform, and the cooling platform and the base are connected to the first clamping part at the same time.

[0047] In this embodiment, the electron microscope further comprises a cooling platform, and the cooling platform and the base are connected to the first clamping part at the same time, so as to realize the installation of the cooling platform and the base, so that the cooling platform can cool the detection sample, thereby realizing the observation and analysis of the detection sample.

[0048] Additional aspects and advantages of the present application will be partially given in the following description, partially will become apparent from the following description, or will be understood by those skilled in the art through the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0049] The accompanying drawings, which are incorporated herein and constitute part of this specification, illustrate embodiments consistent with the application and serve to explain the principles of the application together with the description herein.

[0050] In order to more clearly demonstrate the technical solutions in the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the embodiments or the related technical description will be briefly introduced as follows. Obviously, those skilled in the art can obtain other drawings according to these drawings without any creative effort.

[0051] Figure 1 One of the cooling effect diagrams of the sample table in the related art is shown;

[0052] Figure 2 Another of the cooling effect diagrams of the sample table in the related art is shown;

[0053] Figure 3 Still another of the cooling effect diagrams of the sample table in the related art is shown;

[0054] Figure 4 Still another of the cooling effect diagrams of the sample table in the related art is shown;

[0055] Figure 5 One of the structural schematic diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0056] Figure 6 Another of the structural schematic diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0057] Figure 7 Still another of the structural schematic diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0058] Figure 8 One of the exploded diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0059] Figure 9 Another of the exploded diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0060] Figure 10 Still another of the exploded diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0061] Figure 11 Another of the structural schematic diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0062] Figure 12 Still another of the structural schematic diagrams of the clamping assembly according to one embodiment of the present application is shown;

[0063] Figure 13Fig. 1 shows one of the schematic diagrams of the adjusting part according to one embodiment of the present application;

[0064] Figure 14 Fig. 6 shows the structural schematic diagram of the clamping assembly according to one embodiment of the present application;

[0065] Figure 15 Fig. 2 shows the schematic diagram of the adjusting part according to one embodiment of the present application;

[0066] Figure 16 Fig. 1 shows one of the schematic diagrams of the adjusting part according to one embodiment of the present application;

[0067] Figure 17 Fig. 2 shows the schematic diagram of the adjusting part according to one embodiment of the present application;

[0068] Figure 18 Fig. 3 shows one of the schematic diagrams of the clamping assembly placed on the cooling table according to one embodiment of the present application;

[0069] Figure 19 Fig. 4 shows the schematic diagram of the clamping assembly placed on the cooling table according to one embodiment of the present application;

[0070] Figure 20 Fig. 3 shows one of the schematic diagrams of the clamping assembly placed on the cooling table according to one embodiment of the present application;

[0071] Figure 21 Fig. 4 shows the schematic diagram of the clamping assembly placed on the cooling table according to one embodiment of the present application;

[0072] Figure 22 Fig. 5 shows one of the schematic diagrams of the adjusting part according to one embodiment of the present application;

[0073] Figure 23 Fig. 6 shows the structural schematic diagram of the clamping assembly according to one embodiment of the present application;

[0074] Figure 24 Fig. 5 shows one of the schematic diagrams of the adjusting part according to one embodiment of the present application;

[0075] Figure 25 Fig. 6 shows the structural schematic diagram of the clamping assembly according to one embodiment of the present application;

[0076] Figure 26 Fig. 7 shows the cooling effect diagram of the clamping assembly according to one embodiment of the present application;

[0077] Figure 27 Fig. 8 shows the cooling effect diagram of the clamping assembly according to one embodiment of the present application.

[0078] wherein, Figures 5 to 23 The correspondence between the reference signs and the component names in the drawings is as follows:

[0079] 100 clamping assembly, 110 base, 120 first clamping part, 130 second clamping part, 140 clamping area, 150 adjusting part, 160 first thread, 170 second thread, 180 cavity, 190 anti-skid part, 200 mounting hole, 210 limiting part, 220 adjusting piece, 230 detection sample, 240 cooling table. DETAILED DESCRIPTION

[0080] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below in connection with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of the present application.

[0081] Reference will be made to Figures 5 to 27 The clamping assembly 100 and the electron microscope according to some embodiments of the present application are described below.

[0082] A first aspect of the present application provides a clamping assembly 100 for clamping a detection sample 230, such as Figure 5 , Figure 6 and Figure 7 The clamping assembly 100 includes a base 110, a first clamping part 120 and a second clamping part 130. The base 110 is used to be placed on a cooling table 240. One end of the first clamping part 120 is connected to the base 110. One end of the second clamping part 130 is connected to the base 110. The second clamping part 130 is oppositely arranged to the first clamping part 120. The second clamping part 130 and the first clamping part 120 have a clamping area 140 therebetween. The clamping area 140 is used to accommodate the detection sample 230. In the case of detecting the detection sample 230, the detection sample 230 is located in the clamping area 140 and is in contact with the base 110.

[0083] In this embodiment, as Figure 16 , Figure 17 , Figure 18 , Figure 19 , Figure 20 and Figure 21As shown, the clamping assembly 100 is arranged in an electron microscope, and is used to clamp a detection sample 230, so that the electron microscope can observe the detection sample 230 clamped by the clamping assembly 100. The clamping assembly 100 comprises a base 110, a first clamping part 120 and a second clamping part 130. The base 110 is arranged on a cooling table 240, so that the cooling table 240 can cool the detection sample 230 clamped by the clamping assembly 100, so as to accurately observe and analyze the detection sample 230. One end of the first clamping part 120 is connected with the base 110, so as to realize installation and fixation of the first clamping part 120. One end of the second clamping part 130 is connected with the base 110, and the second clamping part 130 is arranged opposite to the first clamping part 120, so as to realize installation and fixation of the second clamping part 130. The second clamping part 130 and the first clamping part 120 have a clamping area 140, which is used to accommodate the detection sample 230, so that the first clamping part 120 and the second clamping part 130 can clamp the detection sample 230 when the detection sample 230 is in the clamping area 140. When the detection sample 230 is detected, the detection sample 230 is located in the clamping area 140 and is in contact with the base 110. Since the base 110 is arranged on the cooling table 240, the cooling speed of the base 110 in contact with the cooling table 240 is the fastest when the cooling table 240 is cooled. Therefore, the contact between the detection sample 230 and the base 110 can improve the heat transfer speed of the clamping assembly 100, and thus the cooling time of the detection sample 230 can be shortened, more samples can be detected in the same experimental time, and the research fund can be saved.

[0084] Specifically, the detection sample 230 is a rock sample.

[0085] Specifically, the environmental scanning electron microscope (ESEM) is a special type of scanning electron microscope (SEM) that allows observation of samples under relatively high pressure and humidity conditions. This microscope has the following functions: operating conditions: ESEM can work under low vacuum, and the pressure in the sample chamber can reach 2700 KPa, while the traditional electron microscope SEM needs a high vacuum environment, and the general chamber pressure is 10 -4 Pa to 10 -5Pa. This allows ESEM to study liquid and multiphase materials. ESEM can handle samples with high water content, which are naturally conductive and do not require special treatment such as fixation, dehydration, or gold coating. Compared to traditional SEM, ESEM provides high-resolution and deep scene imaging under high pressure and humidity conditions, allowing real-time observation of physical, chemical, and biological processes in samples, such as corrosion, hydration, and metabolic processes in biological samples. This makes ESEM widely used in the study of water-containing samples such as biological samples, plants, and soil. The original cooling stage is designed primarily for biological samples, as biological samples containing water would be damaged under vacuum. The cooling stage keeps biological samples at low temperature and relatively high pressure, ensuring that water remains in a liquid state, thus preserving the original structure of the sample for more accurate observation and analysis under an electron microscope. However, the cooling stage is not naturally suited for rock samples. Rock samples are mainly square in shape, with some cylindrical, and most require characterization and photography at the same location, thus requiring sample fixation. On the other hand, the surfaces of rock samples to be observed are usually polished and must be kept level. However, during the evacuation process after the sample is placed in the ESEM, the flow of gas and the boiling of moisture at the bottom can easily cause sample movement. Therefore, a clamping device is needed to fit the cooling stage below, achieving heat dissipation and securing the sample. The original sample stage surface is usually uneven, often with a small groove, designed to accommodate biological samples. However, rock samples require a flat surface to ensure accurate observation. Due to its shape, the original sample stage requires a long cooling time. The sample stage needs to cool to the cooling stage surface for at least 15 minutes before use. The clamping assembly 100 in this application has a heat transfer rate approximately four times that of the original, reducing the pre-cooling time to less than 5 minutes. This reduced pre-cooling time allows for the processing of more samples within the same experimental time, saving research funds.

[0086] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0087] The distance between the second clamping part 130 and the first clamping part 120 is the first distance, which is greater than the length of the test sample 230.

[0088] In this embodiment, the distance between the second clamping part 130 and the first clamping part 120 is a first distance, which is the length of the clamping area 140. By setting the first distance to be greater than the length of the test sample 230, when the test sample 230 is tested, it can be ensured that the test sample 230 is placed in the test area. After the test sample 230 is placed in the test area, the side of the test sample 230 facing the base 110 can be completely flush with the surface of the base 110. Thus, when the test sample 230 is cooled, the base 110 can cool the test sample 230, thereby ensuring the cooling speed of the test sample 230 by the base 110.

[0089] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0090] like Figure 8 , Figure 9 and Figure 10 As shown, the clamping assembly 100 also includes an adjustment part 150, which passes through the second clamping part 130. The adjustment part 150 is movable relative to the second clamping part 130, and one end of the adjustment part 150 can move closer to or further away from the first clamping part 120 to clamp or release the test sample 230.

[0091] In this embodiment, the clamping assembly 100 further includes an adjustment part 150, which passes through the second clamping part 130 to achieve the installation of the adjustment part 150. The adjustment part 150 is movable relative to the second clamping part 130. By controlling one end of the adjustment part 150 to move closer to the first clamping part 120, one end of the adjustment part 150 can rest against the test sample 230 in the clamping area 140, so that the adjustment part 150 can fix the test sample 230. After the test is completed, the adjustment part 150 is controlled to move away from the first clamping part 120 to release the test sample 230. Therefore, the method of fixing the test sample 230 by setting the adjustment part 150 can avoid the displacement of the sample surface of the test sample 230 and ensure the accuracy of observation.

[0092] Specifically, during the air removal process in ESEM, airflow and localized boiling of moisture are inevitably caused. This disturbance may lead to displacement of the rock sample surface, thereby affecting the sample characterization and positioning during the imaging process. Therefore, this application provides an adjustment part 150 on the second clamping part 130 to fully fix the test sample 230, thereby ensuring the accuracy of observation.

[0093] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0094] like Figure 9 and Figure 10 As shown, the second clamping part 130 is provided with a mounting hole 200, and the adjusting part 150 passes through the mounting hole 200.

[0095] In this embodiment, by providing a mounting hole 200 on the second clamping part 130 and passing the adjusting part 150 through the mounting hole 200, the adjusting part 150 can move within the mounting hole 200 to clamp and release the test sample 230, thereby facilitating the driving of the adjusting part 150.

[0096] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0097] like Figure 9 and Figure 10 As shown, the outer wall of the adjusting part 150 is provided with a first thread 160, and the inner wall of the mounting hole 200 is provided with a second thread 170. The first thread 160 and the second thread 170 cooperate to make the adjusting part 150 move relative to the second clamping part 130.

[0098] In this embodiment, a first thread 160 is provided on the outer wall of the adjusting part 150, and a second thread 170 is provided on the inner wall of the mounting hole 200. The first thread 160 and the second thread 170 cooperate to make the adjusting part 150 move relative to the second clamping part 130. By providing threads on the inner walls of the clamping part and the mounting hole 200 respectively, the adjusting part 150 can be driven by rotating it during the clamping or releasing of the test sample 230. Furthermore, when the adjusting part 150 clamps the test sample 230, it prevents the adjusting part 150 from moving away from the test sample 230, thereby achieving sufficient fixation of the test sample 230.

[0099] Specifically, from one end of the adjustment part 150 to the other end, the outer wall of the adjustment part 150 is provided with a first thread 160. By increasing the distance between the mounting hole 200 and the side of the base 110 away from the second clamping part 130, the distance that the adjustment part 150 can move can be increased.

[0100] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0101] like Figure 6 and Figure 9As shown, the other end of the adjustment part 150 has an open cavity 180. The cavity 180 includes a limiting part 210, which is used to limit and cooperate with the adjustment member 220 that extends into the cavity 180, so that the adjustment member 220 drives the adjustment part 150 to move relative to the second clamping part 130.

[0102] In this embodiment, the other end of the adjusting part 150 has an open cavity 180, and the cavity 180 includes a limiting part 210, such as... Figure 22 and Figure 23 As shown, the limiting part 210 is used to limit the engagement with the adjusting member 220 that extends into the cavity 180. By providing the limiting part 210 at one end of the adjusting part 150 away from the first clamping part 120, when it is necessary to drive the adjustment movement, the adjusting member 220 is inserted into the cavity 180 and engages with the limiting part 210 to drive the adjusting part 150 to move relative to the second clamping part 130. This can achieve the driving of the adjusting part 150. Since the size of the adjusting part 150 is small, the limiting part 210 is provided to engage with the adjusting member 220 to facilitate the driving of the adjusting part 150.

[0103] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0104] like Figure 5 As shown, the clamping assembly 100 also includes an anti-slip part 190, which is disposed at one end of the adjustment part 150 and is used to contact the test sample 230.

[0105] In this embodiment, by providing an anti-slip part 190 at the end of the adjustment part 150 that can contact the test sample 230, the anti-slip part 190 can contact the test sample 230 when the adjustment part 150 clamps the test sample 230. This further prevents the position of the test sample 230 from moving when the adjustment part 150 fixes the test sample 230, thereby achieving sufficient fixation of the test sample 230 and ensuring the stability of the observation and analysis of the test sample 230.

[0106] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0107] Adjustment part 150 is an elastic element.

[0108] In this embodiment, since the elastic element is elastic, setting the adjustment part 150 as an elastic element can prevent the clamping force of the adjustment part 150 on the test sample 230 from being too large and causing damage to the test sample 230 when the test sample 230 is fixed. Therefore, setting the adjustment part 150 as an elastic element can ensure the integrity of the test sample 230.

[0109] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0110] like Figure 5 As shown, the base 110, the first clamping part 120, and the second clamping part 130 are an integral structure.

[0111] In this embodiment, by setting the base 110, the first clamping part 120 and the second clamping part 130 as an integral structure, the installation process between the base 110, the first clamping part 120 and the second clamping part 130 can be reduced, saving the installation time of the base 110, the first clamping part 120 and the second clamping part 130. Furthermore, the integral structure of the base 110, the first clamping part 120 and the second clamping part 130 can also improve the structural strength of the support component.

[0112] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0113] The first clamping part 120 has an anti-slip surface on the side facing the adjustment part 150, and the anti-slip surface can contact the test sample 230.

[0114] In this embodiment, by providing an anti-slip surface on the side of the first clamping part 120 facing the adjusting part 150, the anti-slip surface can contact the test sample 230 when the test sample 230 is clamped. This further prevents the test sample 230 from moving during vacuuming when it is clamped in the clamping area 140, thus avoiding affecting the accuracy of the test. Therefore, by providing an anti-slip surface on the first clamping part 120, the test sample 230 can be further fixed.

[0115] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0116] There are multiple adjustment units 150, and the multiple adjustment units 150 are arranged at intervals.

[0117] In this embodiment, during the testing of the test sample 230, the test sample 230 may have different shapes or irregular shapes. When there is only one adjustment part 150, the clamping of the test sample 230 may be unstable. Therefore, by setting the number of adjustment parts 150 to multiple and setting the multiple adjustment parts 150 at intervals, the test sample 230 can be fixed by the multiple adjustment parts 150, thus achieving sufficient fixation of the test sample 230.

[0118] Specifically, there are three adjustment parts 150, which are spaced apart, so that the three adjustment parts 150 can clamp different positions of the test sample 230, thereby effectively fixing the adjustment parts 150.

[0119] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0120] The clamping area 140 corresponds to the cooling area of ​​the cooling platform 240.

[0121] In this embodiment, during the cooling process of the test sample 230, the cooling capacity generated by the cooling stage 240 is mainly transferred to the base 110 to cool the test sample 230 placed on the base 110. Therefore, by setting the clamping area 140 to correspond to the cooling area of ​​the cooling stage 240, the test sample 230 can be cooled faster when the base 110 is placed on the cooling stage 240, thereby accelerating the cooling of the test sample 230 by the base 110 and shortening the cooling time of the test sample 230.

[0122] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0123] The distance between the mounting hole 200 and the side of the base 110 opposite to the second clamping part 130 is greater than or equal to 2.5 mm and less than or equal to 3.5 mm.

[0124] In this embodiment, the distance between the mounting hole 200 and the side of the base 110 away from the second clamping part 130 is greater than or equal to 2.5 mm and less than or equal to 3.5 mm, so as to facilitate the adjustment of the holding position of the adjustment part 150 on the test sample 230. By setting the distance between the mounting hole 200 and the side of the base 110 away from the second clamping part 130 to 2.5 mm to 3.5 mm, the adjustment part 150 can be in the middle position on the side of the test sample 230 when clamping the test sample 230, so as to facilitate the fixation of the test sample 230.

[0125] Specifically, the distance between the mounting hole 200 and the side of the base 110 away from the second clamping part 130 is 3mm. By opening the mounting hole 200 at this position, the adjustment part 150 can be clamped in the middle of the side of the test sample 230 after installation, which is convenient for fixing the test sample 230.

[0126] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0127] like Figure 5 As shown, the first clamping part 120 and the second clamping part 130 are respectively provided.

[0128] In this embodiment, by correspondingly providing the first clamping part 120 and the second clamping part 130, the first clamping part 120 and the second clamping part 130 are positioned on both sides of the test sample 230 when fixing the test sample 230, thereby facilitating the clamping of the test sample 230.

[0129] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0130] like Figure 5 As shown, the base 110 is a cylinder.

[0131] In this embodiment, since the cooling platform 240 is circular, the base 110 is set as a cylinder, so that the base 110 can be matched with the cooling platform 240, thereby facilitating the installation of the base 110 onto the cooling platform 240, so that the cooling platform 240 can better cool the base 110, thereby achieving the cooling of the test sample 230.

[0132] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0133] like Figure 5 As shown, the cross-section of the first clamping part 120 is arc-shaped, and the cross-section of the second clamping part 130 is arc-shaped.

[0134] In this embodiment, since the base 110 is cylindrical, the cross-section of the first clamping part 120 is arc-shaped and the cross-section of the second clamping part 130 is arc-shaped, so that the first clamping part 120 and the second clamping part 130 can be matched with the base 110.

[0135] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0136] like Figure 5 As shown, the first clamping part 120 is located at the edge of the base 110, and the second clamping part 130 is located at the edge of the base 110.

[0137] In this embodiment, by placing the first clamping part 120 at the edge of the base 110 and the second clamping part 130 at the edge of the base 110, the range of the clamping area 140 between the first clamping part 120 and the second clamping part 130 can be increased. By increasing the range of the clamping area 140, a larger size test sample 230 can be placed in the clamping area 140, thereby improving the versatility of the clamping assembly 100.

[0138] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0139] like Figure 5 As shown, the distance between the first clamping part 120 and the second clamping part 130 is the same along the direction from one end of the first clamping part 120 to the other end of the first clamping part 120.

[0140] In this embodiment, the distance between the first clamping portion 120 and the second clamping portion 130 is the same along the direction from one end of the first clamping portion 120 to the other end of the first clamping portion 120, that is, along the direction from the base 110 to the end away from the base 110. The clamping area 140 has a rectangular cross-section, which allows the clamping area 140 to cool the test sample 230 more quickly when accommodating the test sample 230, thereby shortening the cooling time of the test sample 230.

[0141] Specifically, such as Figure 11 , Figure 12 , Figure 13 , Figure 14 and Figure 15As shown, the clamping assembly 100 of this application is manufactured in the following manner: a cylindrical aluminum material with a diameter of 9.5 mm is machined on a lathe, and the cylindrical aluminum material is cut into 5 mm equal parts. Using a milling lathe, a 7.5 mm wide and 4 mm deep section is cut off from the cylindrical surface. The milling path is a 7.5 × 15 mm rectangle, and the depth is maintained at 4 mm, forming a first clamping part 120 and a second clamping part 130. A clamping area 140 is formed between the first clamping part 120 and the second clamping part 130. At a height of 3 mm on the side, an internal thread is made by drilling and tapping to complete an M2.5 metric thread, forming a mounting hole 200 for mounting an adjustment part 150. A hexagonal shaft bolt is selected as the adjustment part 150. The base 1 of the manufactured clamping assembly 100 is... The distance L4 from the side of the first clamping part 120 away from the first clamping part 120 to the end of the first clamping part 120 away from the base 110 is 5mm, the diameter L2 of the base 110 is 9.5mm, the length L1 of the first edge of the first clamping part 120 that contacts the base 110 is 5.83mm, the thickness of the base 110 is 1mm, the distance between the mounting hole 200 and the end of the second clamping part 130 away from the base 110 is 1mm, the length of the clamping area is 7.5mm, the length L5 of the adjusting part 150 is 8mm, the height L3 of the base is 1mm, and the thickness L6 of the first clamping part 120 from the side near the second clamping part 130 to the side away from the second clamping part 130 along the length direction of the first clamping part 120 is 1mm.

[0142] Specifically, all clamping components 100 of this application are placed on the cooling platform 240. In the initial state, as... Figure 24 As shown, the temperature of the clamping assembly 100 in this application is 25°C, and the temperature of the cooling stage 240 is 2.5°C, which is faster than the cooling speed of the sample stage in related technologies.

[0143] At time t=5, where t is the internal time of the simulation software and does not correspond to an absolute time such as seconds or minutes, this time is only used to compare heat transfer rates. Figure 25 As shown, the portion of the clamping assembly 100 in this application that contacts the sample is below 10°C, which is faster than the cooling rate of the sample stage in related technologies.

[0144] When t=10, as Figure 26 As shown, the bottom of the clamping assembly 100 in this application has reached 2.5°C, which can effectively cool the sample. Cooling is crucial to ensuring that the sample contains liquid water under low vacuum conditions, and the cooling rate is faster than that of the sample stage in related technologies.

[0145] When t=20, if Figure 27 The image shows the cooling performance of the clamping assembly 100 of this application at t=20, which is faster than the cooling rate of the sample stage in the related art.

[0146] In some embodiments of the present invention, an electron microscope is provided, including the clamping assembly 100 of any of the above embodiments. Therefore, the electron microscope possesses all the advantages of the clamping assembly 100.

[0147] Specifically, the electron microscope is an environmental scanning electron microscope.

[0148] This embodiment provides a clamping component 100, which, in addition to the technical features of the above embodiments, further includes the following technical features.

[0149] like Figures 18 to 21 As shown, the electron microscope also includes a cooling stage 240, and the cooling stage 240 and the base 10 are connected to the first clamping part 120.

[0150] In this embodiment, the electron microscope also includes a cooling stage 240. The cooling stage 240 and the base 110 are connected to the first clamping part 120 to realize the installation of the cooling stage 240 and the base 110, so that the cooling stage 240 can cool the test sample 230, thereby realizing the observation and analysis of the test sample 230.

[0151] While this specification contains numerous specific implementation details, these should not be construed as limiting the scope of any invention or the scope of the claims, but rather are primarily intended to describe features of specific embodiments of a particular invention. Certain features described in the various embodiments herein may also be implemented in combination in a single embodiment. Conversely, various features described in a single embodiment may also be implemented separately in various embodiments or in any suitable sub-combination. Furthermore, while features may function in certain combinations as described above and even initially claimed in this way, one or more features from a claimed combination may be removed from that combination in some cases, and a claimed combination may refer to a sub-combination or a variation thereof.

[0152] Similarly, although the operations are depicted in a specific order in the accompanying drawings, this should not be construed as requiring these operations to be performed in the specific order shown or sequentially, or requiring all illustrated operations to be performed to achieve the desired result. In some cases, multitasking and parallel processing may be advantageous. Furthermore, the separation of various system modules and components in the above embodiments should not be construed as requiring such separation in all embodiments, and it should be understood that the described program components and systems can generally be integrated together in a single software product or packaged into multiple software products.

[0153] Thus, specific embodiments of the subject matter have been described. Other embodiments are within the scope of the appended claims. In some cases, the actions recited in the claims may be performed in a different order and still achieve the desired result. Furthermore, the processes depicted in the drawings are not necessarily shown in a specific order or sequence to achieve the desired result. In some implementations, multitasking and parallel processing may be advantageous.

[0154] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0155] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A clamping assembly (100), characterized in that, For holding the test sample (230), the holding assembly (100) includes: A base (110) for placement on a cooling platform (240); A first clamping part (120) is provided, one end of which is connected to the base (110); A second clamping part (130) is provided, one end of which is connected to the base (110). The second clamping part (130) is disposed opposite to the first clamping part (120). A clamping area (140) is provided between the second clamping part (130) and the first clamping part (120), and the clamping area (140) is used to accommodate the test sample (230). When the test sample (230) is tested, the test sample (230) is located in the clamping area (140) and in contact with the base (110).

2. The clamping assembly (100) according to claim 1, characterized in that, The distance between the second clamping part (130) and the first clamping part (120) is a first distance, which is greater than the length of the test sample (230).

3. The clamping assembly (100) according to claim 1, characterized in that, The clamping assembly (100) further includes: An adjustment part (150) is provided through the second clamping part (130). The adjustment part (150) is movable relative to the second clamping part (130), and one end of the adjustment part (150) can move closer to or further away from the first clamping part (120) to clamp or release the test sample (230).

4. The clamping assembly (100) according to claim 3, characterized in that, The second clamping part (130) is provided with a mounting hole (200), and the adjusting part (150) passes through the mounting hole (200).

5. The clamping assembly (100) according to claim 4, characterized in that, The outer wall of the adjustment part (150) is provided with a first thread (160), and the inner wall of the mounting hole (200) is provided with a second thread (170). The first thread (160) and the second thread (170) cooperate to make the adjustment part (150) move relative to the second clamping part (130).

6. The clamping assembly (100) according to claim 3, characterized in that, The other end of the adjustment part (150) has an open cavity (180), the cavity (180) including a limiting part (210), the limiting part (210) is used to limit and cooperate with the adjustment member (220) extending into the cavity (180), so that the adjustment member (220) drives the adjustment part (150) to move relative to the second clamping part (130).

7. The clamping assembly (100) according to claim 3, characterized in that, The clamping assembly (100) further includes: An anti-slip part (190) is disposed at one end of the adjustment part (150) and is used to contact the test sample (230).

8. The clamping assembly (100) according to claim 3, characterized in that, The adjustment part (150) is an elastic element.

9. The clamping assembly (100) according to any one of claims 3 to 8, characterized in that, The base (110), the first clamping part (120) and the second clamping part (130) are an integral structure.

10. The clamping assembly (100) according to claim 3, characterized in that, The first clamping part (120) has an anti-slip surface on the side facing the adjustment part (150), and the anti-slip surface can contact the test sample (230).

11. The clamping assembly (100) according to claim 3, characterized in that, The number of adjustment parts (150) is multiple, and the multiple adjustment parts (150) are arranged at intervals.

12. The clamping assembly (100) according to claim 1, characterized in that, The clamping area (140) corresponds to the cooling area of ​​the cooling platform (240).

13. The clamping assembly (100) according to claim 4, characterized in that, The distance between the mounting hole (200) and the side of the base (110) away from the second clamping part (130) is greater than or equal to 2.5 mm and less than or equal to 3.5 mm.

14. The clamping assembly (100) according to any one of claims 1 to 13, characterized in that, The first clamping part (120) and the second clamping part (130) are respectively provided.

15. The clamping assembly (100) according to any one of claims 1 to 13, characterized in that, The base (110) is a cylinder.

16. The clamping assembly (100) according to any one of claims 1 to 13, characterized in that, The first clamping part (120) has an arc-shaped cross-section, and the second clamping part (130) has an arc-shaped cross-section.

17. The clamping assembly (100) according to any one of claims 1 to 13, characterized in that, The first clamping part (120) is located at the edge of the base (110), and the second clamping part (130) is located at the edge of the base (110).

18. The clamping assembly (100) according to any one of claims 1 to 13, characterized in that, Along the direction from one end of the first clamping part (120) to the other end of the first clamping part (120), the distance between the first clamping part (120) and the second clamping part (130) is the same.

19. An electron microscope, characterized in that, Includes the clamping assembly (100) as described in any one of claims 1 to 18.

20. The electron microscope according to claim 19, characterized in that, Also includes: Cooling platform (240), the cooling platform (240) and the base (110) are simultaneously connected to the first clamping part (120).

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