High-temperature SPM automatic acid mixing nozzle for square substrate process

Abstract

The invention belongs to the technical field of semiconductor cleaning processes, and particularly relates to a high-temperature SPM automatic acid mixing nozzle for a square substrate process, which comprises an acid mixer and a nozzle main body. A first-stage acid mixing chamber, a second-stage acid mixing chamber, a third-stage acid mixing chamber, a liquid guide channel A and a liquid guide channel B are respectively formed in the acid mixer, and a liquid inlet A and a liquid inlet B are respectively formed in the acid mixer. The spray head main body is connected with the spray head main body connecting port of the acid mixer; each liquid spraying hole of the spray head main body is used for directly spraying mixed liquid medicine to the square substrate. Through cooperative arrangement of the first-stage acid mixing chamber, the second-stage acid mixing chamber, the third-stage acid mixing chamber, the liquid guide channel A and the liquid guide channel B, a multiple acid mixing channel form can be integrally formed, the liquid medicine mixing degree is fully improved, it is guaranteed that two kinds of liquid medicine are evenly distributed after being sprayed out, and the cleaning effect is guaranteed; and through the arrangement of the spray head main body, the spraying uniformity of the liquid medicine on the surface of the square base plate can be effectively ensured.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor cleaning process, in particular to a high-temperature SPM automatic acid mixing nozzle for square substrate process. BACKGROUND

[0002] The semiconductor SPM (Sulfuric Peroxide Mixture) generally refers to a sulfuric acid / hydrogen peroxide mixture cleaning process, which is a key wet cleaning technology for removing organic and inorganic contaminants on the surface of a wafer in semiconductor manufacturing. At present, for square substrates, the existing nozzle usually has the problems of insufficient mixing degree of two kinds of liquid in the nozzle and uneven spraying. SUMMARY

[0003] In view of the above problems, the purpose of the present application is to provide a high-temperature SPM automatic acid mixing nozzle for square substrate process.

[0004] The purpose of the present application is achieved by the following technical solutions: A high-temperature SPM automatic acid mixing nozzle for square substrate process, comprising an acid mixer and a nozzle main body. The acid mixer is internally provided with a first-stage acid mixing chamber, a second-stage acid mixing chamber, a third-stage acid mixing chamber, a liquid guide channel A and a liquid guide channel B. The acid mixer is further provided with a liquid inlet A and a liquid inlet B. The liquid inlet A and the liquid inlet B are respectively connected to the first-stage acid mixing chamber. The first-stage acid mixing chamber is directly connected to the second-stage acid mixing chamber. The second-stage acid mixing chamber and the third-stage acid mixing chamber are connected by a plurality of liquid guide channels A. The lower end of the acid mixer is provided with a nozzle main body connecting port. The nozzle main body connecting port and the third-stage acid mixing chamber are connected by the liquid guide channel B. The liquid inlet A is connected to an external sulfuric acid source. The liquid inlet B is connected to an external hydrogen peroxide source. The nozzle main body is connected to the nozzle main body connecting port of the acid mixer. The nozzle main body is internally provided with a nozzle liquid channel. A plurality of liquid injection holes are provided on the nozzle main body. After the nozzle main body is connected to the nozzle main body connecting port of the acid mixer, the nozzle liquid channel is connected to the liquid guide channel B and each liquid injection hole. Each liquid injection hole of the nozzle main body is used to directly spray mixed liquid onto a square substrate.

[0005] The first-stage acid mixing chamber, the second-stage acid mixing chamber and the third-stage acid mixing chamber are sequentially arranged from top to bottom in the acid mixer.

[0006] The inner cavity space shape of the first mixed acid chamber, the inner cavity space shape of the second mixed acid chamber, and the inner cavity space shape of the third mixed acid chamber are all cylindrical, the axial center lines of the inner cavity spaces of the second mixed acid chamber and the third mixed acid chamber are parallel to each other and parallel to the horizontal plane, the axial center line of the inner cavity space of the first mixed acid chamber is perpendicular to the horizontal plane and the axial center line of the inner cavity space of the second mixed acid chamber, and the projections of the axial center lines of the liquid inlet A and the liquid inlet B on the vertical plane are both perpendicular to the axial center line of the inner cavity space of the first mixed acid chamber.

[0007] The diameter of the cylindrical inner cavity space of the first mixed acid chamber is greater than 1.2 times the sum of the diameters of the liquid inlet A and the liquid inlet B, the diameter of the cylindrical inner cavity space of the first mixed acid chamber is less than 3.5 times the sum of the diameters of the liquid inlet A and the liquid inlet B, and the diameter of the liquid inlet A is greater than the diameter of the liquid inlet B.

[0008] The liquid guide channel A is provided with at least two, and the axial center lines of the liquid guide channels A are all parallel to the axial center line of the inner cavity space of the first mixed acid chamber.

[0009] The axial center line of the liquid guide channel B is collinear with the axial center line of the inner cavity space of the first mixed acid chamber.

[0010] The length direction of the whole nozzle body is parallel to the horizontal plane, and the length of the whole nozzle body is greater than the length of the corresponding square substrate.

[0011] The inner side surface of the nozzle body connecting port of the mixed acid device is provided with an internal thread; the upper part of the nozzle body protrudes to form a nozzle body connecting part, the outer peripheral surface of the nozzle body connecting part is formed with an external thread matched with the internal thread of the nozzle body connecting port, the top surface of the nozzle body connecting part is provided with a liquid inlet C, the liquid inlet C is in communication with the nozzle liquid channel; after the nozzle body connecting part of the nozzle body is connected with the nozzle body connecting port of the mixed acid device, the liquid inlet C is in communication with the liquid guide channel B.

[0012] All the liquid ejection holes on the spray head body are divided into a main liquid ejection hole group and a plurality of side liquid ejection hole groups, the main liquid ejection hole group comprises a plurality of main liquid ejection holes arranged uniformly along the length direction of the spray head body, each of the side liquid ejection hole groups also comprises a plurality of side liquid ejection holes arranged uniformly along the length direction of the spray head body, the main liquid ejection hole group is located at the bottom of the spray head body, at least one side liquid ejection hole group is arranged on each side of the main liquid ejection hole group on the bottom surface of the spray head body, the side liquid ejection hole groups arranged on the two sides of the main liquid ejection hole group are the same in number and symmetrical to each other in position, the number of side liquid ejection holes in each side liquid ejection hole group is the same as that of main liquid ejection holes in the main liquid ejection hole group, and the arrangement positions of the side liquid ejection holes in each side liquid ejection hole group correspond to those of the main liquid ejection holes in the main liquid ejection hole group one by one in the width direction of the spray head body.

[0013] The cross-sectional shape of the bottom surface of the spray head body is in the shape of a circular arc, the sizes of the apertures of all the main liquid ejection holes in the main liquid ejection hole group are the same, the sizes of the apertures of all the side liquid ejection holes in the side liquid ejection hole groups are the same, and the size of the aperture of the side liquid ejection hole is larger than that of the main liquid ejection hole.

[0014] The advantages and positive effects of the present application are as follows: The cooperation of the primary mixed acid chamber, the secondary mixed acid chamber, the tertiary mixed acid chamber, the liquid guide channel A and the liquid guide channel B can form a multiple mixed acid channel form as a whole, sufficiently improve the mixing degree of the liquid medicine, ensure the uniform distribution of the two kinds of liquid medicine after being sprayed, and ensure the cleaning effect; and the arrangement of the spray head body can effectively ensure the uniformity of the spraying of the liquid medicine on the surface of the square substrate. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present application; Figure 2 It is a schematic diagram of the cross-sectional structure of the mixed acid device of the present application; Figure 3 It is a schematic diagram of the structure of the spray head body of the present application; Figure 4 It is a schematic diagram of the structure of the spray head body of the present application.

[0016] In the figure: 1 is a mixed acid device, 101 is a primary mixed acid chamber, 102 is a secondary mixed acid chamber, 103 is a tertiary mixed acid chamber, 104 is a liquid guide channel A, 105 is a liquid guide channel B, 106 is a liquid inlet A, 107 is a liquid inlet B, and 108 is a spray head body connecting port; 2 is a spray head body, 201 is a spray head liquid channel, 202 is a spray head body connecting part, 203 is a liquid inlet C, 204 is a main liquid ejection hole, and 205 is a side liquid ejection hole. DETAILED DESCRIPTION

[0017] The application will be further described below in conjunction with the accompanying drawings Figures 1-4 The application will be further described below in conjunction with the accompanying drawings

[0018] A high-temperature SPM automatic acid mixing nozzle for square substrate process, as shown in the embodiment, comprises an acid mixer 1 and a nozzle body 2. Figures 1-4

[0019] The acid mixer 1 is internally provided with a first-stage acid mixing chamber 101, a second-stage acid mixing chamber 102, a third-stage acid mixing chamber 103, a liquid guide passage A 104 and a liquid guide passage B 105. The acid mixer 1 is further provided with a liquid inlet A 106 and a liquid inlet B 107. The liquid inlet A 106 and the liquid inlet B 107 are respectively connected to the first-stage acid mixing chamber 101. The first-stage acid mixing chamber 101 is directly connected to the second-stage acid mixing chamber 102. The second-stage acid mixing chamber 102 is connected to the third-stage acid mixing chamber 103 through the two liquid guide passage A 104. The acid mixer 1 is provided at a lower end with a nozzle body connecting port 108. The nozzle body connecting port 108 is connected to the third-stage acid mixing chamber 103 through the liquid guide passage B 105. The liquid inlet A 106 is used to be connected to an external sulfuric acid liquid source. The liquid inlet B 107 is used to be connected to an external hydrogen peroxide liquid source. In the embodiment, the connection structure of the liquid inlet A 106 and the external sulfuric acid liquid source and the connection structure of the liquid inlet B 107 and the external hydrogen peroxide liquid source are both of prior art. The diameter of the liquid inlet A 106 is larger than that of the liquid inlet B 107. Specifically, the diameter of the liquid inlet A 106 is 4 mm, and the diameter of the liquid inlet B 107 is 2 mm, so as to meet the acid mixing requirement.

[0020] The nozzle body 2 is connected to the nozzle body connecting port 108 of the acid mixer 1. The nozzle body 2 is internally provided with a nozzle liquid channel 201. The nozzle body 2 is provided with a plurality of liquid ejection holes. After the nozzle body 2 is connected to the nozzle body connecting port 108 of the acid mixer 1, the nozzle liquid channel 201 is connected to the liquid guide passage B 105 and the liquid ejection holes. The liquid ejection holes of the nozzle body 2 are used to directly spray the mixed liquid onto the square substrate.

[0021] Specifically, as shown in the embodiment, the diameter of the liquid inlet A 106 is 4 mm, and the diameter of the liquid inlet B 107 is 2 mm. Figure 2 ​As shown, the first-stage mixed acid chamber 101, the second-stage mixed acid chamber 102, and the third-stage mixed acid chamber 103 are sequentially arranged from top to bottom inside the mixed acid device 1. In this embodiment, the inner space of the first-stage mixed acid chamber 101, the inner space of the second-stage mixed acid chamber 102, and the inner space of the third-stage mixed acid chamber 103 are all cylindrical. The axial center lines of the inner spaces of the second-stage mixed acid chamber 102 and the third-stage mixed acid chamber 103 are parallel to each other and parallel to the horizontal plane. The axial center line of the inner space of the first-stage mixed acid chamber 101 is perpendicular to the horizontal plane and the axial center line of the inner space of the second-stage mixed acid chamber 102. The projections of the axial center lines of the liquid inlet A 106 and the liquid inlet B 107 on the vertical plane are perpendicular to the axial center line of the inner space of the first-stage mixed acid chamber 101. The diameter of the cylindrical inner space of the first-stage mixed acid chamber 101 is 1.2 times larger than the sum of the diameters of the liquid inlet A 106 and the liquid inlet B 107. The diameter of the cylindrical inner space of the first-stage mixed acid chamber 101 is 3.5 times smaller than the sum of the diameters of the liquid inlet A 106 and the liquid inlet B 107. The diameter of the liquid inlet A 106 is larger than the diameter of the liquid inlet B 107. Such arrangement can make the sulfuric acid liquid and the hydrogen peroxide liquid entering the first-stage mixed acid chamber 101 flow downward along the inner wall of the first-stage mixed acid chamber 101 in a spiral manner and mix, which can achieve the best mixing effect and shorten the mixing time. In this embodiment, the diameter of the cylindrical inner space of the first-stage mixed acid chamber 101 is 10 mm.

[0022] The axial center lines of the liquid guide channels A 104 are parallel to the axial center line of the inner space of the first-stage mixed acid chamber 101, and the axial center line of the liquid guide channel B 105 is collinear with the axial center line of the inner space of the first-stage mixed acid chamber 101. The openings of the liquid guide channels A 104 are staggered with respect to the first-stage mixed acid chamber 101 and the liquid guide channel B 105, which can further ensure that the liquid is fully mixed when flowing through the first-stage mixed acid chamber 101, the second-stage mixed acid chamber 102, and the third-stage mixed acid chamber 103 in sequence.

[0023] Specifically, the length direction of the entire spray head body 2 is parallel to the horizontal plane, and the length of the entire spray head body 2 is greater than the length of the corresponding square substrate. When the spray head body 2 is translated along the length direction of the substrate and performs liquid spraying, the liquid can cover the surface of the square substrate. Figure 3 and Figure 4As shown, the inner side of the spray head body connecting port 108 of the mixed acid device 1 in the embodiment is provided with internal threads, the upper part of the spray head body 2 is protruded to form a spray head body connecting part 202, the outer periphery of the spray head body connecting part 202 is formed with external threads matched with the internal threads of the spray head body connecting port 108, facilitating the dismounting and connecting between the spray head body 2 and the mixed acid device 1. The top surface of the spray head body connecting part 202 is provided with a liquid inlet C 203, which is communicated with the spray head liquid channel 201; after the spray head body connecting part 202 of the spray head body 2 is connected with the spray head body connecting port 108 of the mixed acid device 1, the liquid inlet C 203 is communicated with the liquid guide channel B 105.

[0024] As shown in Figure 3 and Figure 4 shown, in the embodiment, all the spray holes on the spray head body 2 are divided into one main spray hole group and two side spray hole groups, the main spray hole group includes a plurality of main spray holes 204 uniformly arranged along the length direction of the spray head body 2, each side spray hole group also includes a plurality of side spray holes 205 uniformly arranged along the length direction of the spray head body 2, the main spray hole group is located at the bottom of the spray head body 2, and each side spray hole group is arranged on the bottom surface of the spray head body 2 and on the two sides of the main spray hole group, the number of the side spray hole groups arranged on the two sides of the main spray hole group is the same and the positions are symmetrical to each other, the number of the side spray holes 205 of each side spray hole group is the same as that of the main spray holes 204 of the main spray hole group, the arrangement positions of the side spray holes 205 of each side spray hole group and the arrangement positions of the main spray holes 204 of the main spray hole group correspond to each other in the width direction of the spray head body 2, and the cross-sectional shape of the bottom surface of the spray head body 2 is arc-shaped, the sizes of the main spray holes 204 of all the main spray hole groups are the same, the sizes of the side spray holes 205 of all the side spray hole groups are the same, and the size of the side spray hole 205 is larger than that of the main spray hole 204, which can fully ensure that the mixed liquid is uniformly sprayed on the surface of the square substrate. In the embodiment, the size of the main spray hole 204 is 0.3 mm, and the size of the side spray hole 205 is 0.5 mm, which can ensure the cleaning effect.

[0025] Working principle: In use, the sulfuric acid liquid and the hydrogen peroxide liquid enter the first mixed acid chamber 101 through the liquid inlet A 106 and the liquid inlet B 107 respectively, and flow downward in a spiral manner along the inner periphery of the first mixed acid chamber 101 to mix the acid, then further mix in the second mixed acid chamber 102, finally split into the third mixed acid chamber 103 through the liquid guide channel A 104, mix in the spray head liquid channel 201 of the spray head body 2, and directly spray the mixed liquid on the square substrate from each spray hole of the spray head body 2; the whole spray head body is driven by the external horizontal driving device to translate along the direction of the substrate side length and perform liquid spraying, which can cover the surface of the square substrate with the liquid.

Claims

1. A high-temperature SPM automatic acid mixing nozzle for square substrate processing, characterized in that: Includes an acid mixer (1) and a nozzle body (2); The acid mixer (1) has a primary acid mixing chamber (101), a secondary acid mixing chamber (102), a tertiary acid mixing chamber (103), a liquid guiding channel A (104), and a liquid guiding channel B (105) respectively. The acid mixer (1) also has a liquid inlet A (106) and a liquid inlet B (107) respectively. The liquid inlet A (106) and the liquid inlet B (107) are respectively connected to the primary acid mixing chamber (101). The primary acid mixing chamber (101) and the secondary acid mixing chamber (102) are directly connected. The secondary mixed acid chamber (102) and the tertiary mixed acid chamber (103) are connected by several liquid guiding channels A (104). The lower end of the acid mixer (1) is provided with a nozzle body connection port (108). The nozzle body connection port (108) and the tertiary mixed acid chamber (103) are connected by the liquid guiding channel B (105). The liquid inlet A (106) is used to connect with an external sulfuric acid liquid source, and the liquid inlet B (107) is used to connect with an external hydrogen peroxide liquid source. The nozzle body (2) is connected to the nozzle body connection port (108) of the acid mixer (1). The nozzle body (2) has a nozzle liquid channel (201) inside and a plurality of spray holes are provided on the nozzle body (2). After the nozzle body (2) is connected to the nozzle body connection port (108) of the acid mixer (1), the nozzle liquid channel (201) is connected to the liquid guiding channel B (105) and each of the spray holes respectively. Each of the spray holes of the nozzle body (2) is used to directly spray the mixed liquid onto the square substrate.

2. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 1, characterized in that: The primary mixed acid chamber (101), the secondary mixed acid chamber (102), and the tertiary mixed acid chamber (103) are distributed from top to bottom inside the acid mixer (1).

3. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 1, characterized in that: The internal space shapes of the primary mixed acid chamber (101), the secondary mixed acid chamber (102), and the tertiary mixed acid chamber (103) are all cylindrical. The axial center line of the internal space of the secondary mixed acid chamber (102) is parallel to the axial center line of the internal space of the tertiary mixed acid chamber (103) and is parallel to the horizontal plane. The axial center line of the internal space of the primary mixed acid chamber (101) is perpendicular to the horizontal plane and the axial center line of the internal space of the secondary mixed acid chamber (102), respectively. The projection of the axial center line of the liquid inlet A (106) onto the vertical plane and the projection of the axial center line of the liquid inlet B (107) onto the vertical plane are perpendicular to the axial center line of the internal space of the primary mixed acid chamber (101), respectively.

4. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 3, characterized in that: The diameter of the cylindrical inner cavity of the primary mixed acid chamber (101) is greater than 1.2 times the sum of the diameters of the inlet A (106) and the inlet B (107). The diameter of the cylindrical inner cavity of the primary mixed acid chamber (101) is less than 3.5 times the sum of the diameters of the inlet A (106) and the inlet B (107). The diameter of the inlet A (106) is greater than the diameter of the inlet B (107).

5. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 3, characterized in that: At least two liquid guiding channels A (104) are provided, and the axial center line of each liquid guiding channel A (104) is parallel to the axial center line of the inner cavity space of the primary mixed acid chamber (101).

6. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 5, characterized in that: The axial centerline of the liquid guiding channel B (105) is collinear with the axial centerline of the inner cavity space of the primary mixed acid chamber (101).

7. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 1, characterized in that: The overall length of the nozzle body (2) is parallel to the horizontal plane, and the overall length of the nozzle body (2) is greater than the side length of the corresponding square substrate.

8. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 1, characterized in that: The inner side of the nozzle body connection port (108) of the acid mixer (1) is provided with an internal thread; the upper part of the nozzle body (2) protrudes to form a nozzle body connection part (202), and an external thread that matches the internal thread of the nozzle body connection port (108) is formed on the outer peripheral surface of the nozzle body connection part (202). An inlet C (203) is opened on the top surface of the nozzle body connection part (202), and the inlet C (203) is connected to the nozzle liquid channel (201); after the nozzle body connection part (202) of the nozzle body (2) is connected to the nozzle body connection port (108) of the acid mixer (1), the inlet C (203) is connected to the liquid guiding channel B (105).

9. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 1, characterized in that: All the spray holes on the nozzle body (2) are divided into a main spray hole group and several side spray hole groups. The main spray hole group includes several main spray holes (204) evenly arranged along the length direction of the nozzle body (2). Each side spray hole group also includes several side spray holes (205) evenly arranged along the length direction of the nozzle body (2). The main spray hole group is located at the bottom of the nozzle body (2), on the bottom surface of the nozzle body (2) and on both sides of the main spray hole group. Each of the main spray hole groups is provided with at least one set of the side spray hole groups. The number of side spray hole groups provided on both sides of the main spray hole group is the same and their positions are symmetrical. The number of side spray holes (205) in each side spray hole group is the same as the number of main spray holes (204) in the main spray hole group. The position of each side spray hole (205) in each side spray hole group corresponds one-to-one with the position of each main spray hole (204) in the main spray hole group in the width direction of the nozzle body (2).

10. The high-temperature SPM automatic acid mixing nozzle for square substrate processing according to claim 9, characterized in that: The bottom surface of the nozzle body (2) has an arc-shaped cross-section. The main spray holes (204) of all the main spray hole groups have the same diameter. The side spray holes (205) of all the side spray hole groups have the same diameter. The diameter of the side spray holes (205) is larger than that of the main spray holes (204).

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