A method for pre-conveying management of a nitrogen-filled carrier storage cabinet of a semiconductor 12-inch mes system

Abstract

The application provides a pre-conveying management method of a nitrogen-filled carrier storage cabinet of a semiconductor 12-inch MES system, wherein an RTD module and a GTM module are configured in the MES system, the RTD module is responsible for management and calculation, after a carrier is out of a device after a work is finished, the RTD module responds to a request of conveying the carrier to an N2STK initiated by an EAP system, if there is no free position in the N2STK or the loading port of the N2STK is abnormal, the RTD module sends a conveying task of conveying the carrier to an STB to an MCS system and generates a pre-conveying task, and the GTM module interacts with the MCS to issue a conveying instruction for the carrier. After the pre-conveying management method is adopted, 100% automation conveying standard can be achieved. A 12-inch semiconductor production clean room can achieve a "light-off" effect, and no operator is needed in the clean room.

Description

Technical Field

[0001] This invention relates to the field of semiconductor production management technology, and in particular to a pre-transfer management method for nitrogen-filled carrier storage cabinets based on a 12-inch semiconductor MES (Manufacturing Execution System). Background Technology

[0002] In current 12-inch semiconductor MES systems, after a carrier completes its work on the equipment, certain steps require the carrier to be placed into an N2STK (nitrogen-filled carrier storage cabinet). However, sometimes when the carrier arrives at the designated N2STK, there is insufficient space. This is because the space is occupied by another carrier that arrived earlier during the current carrier transfer process, or an E84 error (load port abnormality) occurs at the upper storage cabinet's Load Port, preventing the carrier from being placed into the N2STK. In this situation, the MCS (Material Control System) will move the carrier to a temporary carrier storage cabinet. The inability of the carrier to reach the designated N2STK at this time may pose some production risks.

[0003] Figure 1 This illustrates the current process of moving wafers off the equipment. The MES system tracks production progress using Lot numbers; in the diagram, Lot a represents a group of wafers stored on the carrier. Figure 1 In the Lot a production process shown, after process step 100 is completed, Lot a needs to be moved to N2STK (see dashed line ① in the figure). First, the carrier is unloaded from the production equipment (see arrow ② in the figure), and is expected to be moved to port 1 of N2STK (see dashed arrow ③ in the figure). However, the following abnormality occurs: there is no available space in N2STK or an E84 error occurs at port 1. At this time, the MCS system dispatches the carrier to the temporary storage tank STB (see arrow ④ in the figure). At this point, the moving process ends, and there are no subsequent actions. However, the carrier, which should have been stored in the nitrogen-filled storage tank N2STK, is actually stored in the temporary storage tank STB, which poses some production risks. Summary of the Invention

[0004] In view of the problem that the carrier in the current MES system cannot reach the expected N2STK, resulting in production risks, the present invention aims to solve this problem and provide a pre-transfer management method, system and medium for nitrogen-filled carrier storage cabinets in a 12-inch semiconductor MES system.

[0005] The technical problem to be solved by the present invention is achieved through the following technical solution:

[0006] This invention provides a pre-transfer management method for nitrogen-filled carrier storage cabinets in a 12-inch semiconductor MES system, specifically as follows: An RTD module and a GTM module are configured in the MES system. The RTD module is responsible for management and calculation. When the carrier finishes its work on the equipment and leaves the station, the RTD module responds to the request initiated by the EAP system to move the carrier to the N2STK. If there is no available space in the N2STK or the N2STK loading port is abnormal, the RTD module sends a transfer task to the MCS system to move the carrier to the STB and generates a pre-transfer task. The GTM module interacts with the MCS to issue transfer instructions to the carrier.

[0007] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention: when there is no available space in the N2STK, the workflow is as follows:

[0008] Step A1: The RTD module first generates a transport task for the current vehicle to be transported to the STB;

[0009] Step A2: The RTD module then generates a pre-transfer task for the current vehicle to be transferred to N2STK;

[0010] Step A3: The GTM module sends the transfer task to STB to the MCS system;

[0011] Step A4: The MCS system sends a transfer command to the AMHS system;

[0012] Step A5: The vehicle is moved to STB under the control of the AMHS system, and the transfer is completed;

[0013] Step A6: The MCS system receives feedback from the STB transfer completion event;

[0014] Step A7: The MCS system reports the transfer completion information to the GTM module;

[0015] Step A8: The pre-transfer task is triggered by the MES system's scheduled task.

[0016] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention, the workflow after triggering the pre-transfer task is as follows:

[0017] Step C1: The RTD module queries whether there are any N2STKs with spare bits and whether there are any pre-transfer tasks to be processed in the system. When it finds that there are N2STKs with spare bits and pre-transfer tasks to be processed, proceed to step C2.

[0018] Step C2: The RTD module will convert the pre-transfer task into a transfer task, and the GTM module will send the transfer task to the MCS system. The MCS system will then send the transfer command to the AMHS system.

[0019] Step C3: The AMHS system controls the vehicle to move to N2STK, and the move is complete;

[0020] Step C4: The MCS system receives feedback on the N2STK transfer completion event;

[0021] Step C5: The MCS system reports the transfer completion information to the GTM module.

[0022] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention: step C2, converting the pre-transfer task into a transfer task, specifically includes the following steps:

[0023] Step C2-1: The RTD module matches the destination type of the pre-transfer based on the N2STK type and filters out pre-transfer tasks of the same type;

[0024] Step C2-2: If the current vehicle is in a transportable state, the RTD module generates a transport task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK;

[0025] Step C2-3: The GTM module sends the transfer task to the MCS system;

[0026] Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transport task as scheduled;

[0027] Step C2-5: The RTD module deletes the pre-transfer task and records the history.

[0028] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention: the timed task is triggered once every 5 minutes.

[0029] Furthermore, this invention provides a pre-transfer management system for nitrogen-filled carrier storage cabinets, used to implement a pre-transfer management method for nitrogen-filled carrier storage cabinets in a 12-inch semiconductor MES system. The system includes: an MES system, an MCS system, an AMHS system, an N2STK, and an STB. The MES system is a semiconductor manufacturing execution system, equipped with an RTD module and a GTM module. The RTD module is a real-time dispatch module used to create transfer tasks and pre-transfer tasks. The GTM is a handling module that issues transfer instructions to the carrier. The MCS system is a semiconductor material control system that receives transfer tasks from the GTM module. The AMHS system is a crane management system that receives instructions from the MCS system to control the carrier for transfer operations. The N2STK is a nitrogen-filled carrier storage cabinet. The STB is a temporary storage cabinet.

[0030] Furthermore, in the pre-transfer management system for the nitrogen-filled carrier storage tank provided by the present invention: the MES system is provided with the following interfaces: LoadRequest interface, LoadComplete interface, UnloadRequest interface, and UnloadComplete interface.

[0031] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention:

[0032] The present invention also provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, are used to implement the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the aforementioned 12-inch semiconductor MES system.

[0033] Compared with the prior art, the pre-transfer management method of the present invention has the following advantages:

[0034] 1. When the vehicle finishes its work on the processing equipment and gets off the equipment, the RTD module will determine whether the current vehicle needs to be transported to the N2STK. If so, it will first find an available N2STK and dispatch the vehicle to the N2STK.

[0035] 2. When the RTD module does not find an available N2STK, it first dispatches the vehicle to a temporary vehicle storage container and generates a pre-transfer task to the N2STK for the vehicle. When the RTD module finds an available N2STK, it converts the pre-transfer task into a transfer task and sends the transfer task to the MCS system.

[0036] 3. If the vehicle arrives at the N2STK and there is no available storage space at the N2STK, the MCS system will first move the vehicle to the STB and then notify the RTD. At this time, the RTD will generate a pre-movement task for the current vehicle. When the RTD module finds an available N2STK, it will convert the pre-movement task into a delivery task and send the delivery task to the MCS system.

[0037] 4. If, when the vehicle arrives at the N2STK, the N2STK's Load Port sends an E84 error (load port error), preventing the vehicle from entering the N2STK, the MCS system will first move the vehicle to the STB and then notify the RTD. At this time, the RTD will generate a pre-movement task for the current vehicle. When the RTD module finds an available N2STK, it will convert the pre-movement task into a moving task and send the moving task to the MCS system.

[0038] 5. By adopting the pre-transfer management method of this invention, 100% automated transfer standards can be achieved. A 12-inch semiconductor manufacturing cleanroom can achieve a "lights-out" effect, eliminating the need for operators within the cleanroom. Attached Figure Description

[0039] Figure 1 This is a flowchart of the existing technology for handling and managing materials;

[0040] Figure 2 This is a flowchart of the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system of the present invention.

[0041] In the diagram: 10, production equipment; 20, carrier; 30, nitrogen-filled carrier storage tank; 40, overhead crane track; 50, temporary storage tank. Detailed Implementation

[0042] To make the technical means, creative features, objectives and effects of this invention easier to understand, the following embodiments, in conjunction with the accompanying drawings, will specifically illustrate the technical solution of this invention.

[0043] Based on modifications to existing vehicle management processes, this invention provides a pre-transfer management method and system for nitrogen-filled vehicle storage cabinets in a 12-inch semiconductor MES system.

[0044] This invention provides a pre-transfer management system for a nitrogen-filled carrier storage tank, including a MES system, an MCS system, an AMHS system, an N2STK system, and an STB system. The MES system is a semiconductor manufacturing execution system, equipped with an RTD module and a GTM module. The RTD module is a real-time dispatch module used to create transfer tasks and pre-transfer tasks. The GTM is a transport module that issues transfer instructions to the carrier. The MCS system is a semiconductor material control system that receives transfer tasks from the GTM module. The AMHS system is a crane management system that receives instructions from the MCS system to control the carrier for transfer operations. The N2STK is a nitrogen-filled carrier storage tank. The STB is a temporary storage tank. The MES system has the following interfaces: a LoadRequest interface for submitting load requests; a LoadComplete interface for reporting loading completion; an UnloadRequest interface for submitting unloading requests; and an UnloadComplete interface for reporting unloading completion.

[0045] See Figure 2This invention also provides a pre-transfer management method for nitrogen-filled carrier storage cabinets in a 12-inch semiconductor MES system using the above-described system. The RTD module in the MES system is responsible for management and calculation. When the carrier finishes its work on the equipment and leaves the station, the RTD module responds to the request initiated by the EAP system (Semiconductor Equipment Automated Process Control System) to move the carrier to the N2STK. If there is no available space in the N2STK or the N2STK loading port is abnormal, the RTD module sends a transfer task to the MCS system to move the carrier to the STB and generates a pre-transfer task. The GTM module interacts with the MCS to issue transfer instructions to the carrier.

[0046] (1) When there is no available N2STK: After the vehicle finishes its work on the equipment and leaves the station, the RTD module will check whether the current step needs to go to N2STK. If it does, the RTD module will find an available N2STK for the vehicle and send a transport command. If no available N2STK can be found, the subsequent workflow is as follows:

[0047] Step A1: The RTD module first generates a transport task for the current vehicle to be transported to the STB.

[0048] Step A2: The RTD module then generates a pre-transfer task for the current vehicle to be transferred to N2STK.

[0049] Step A3: The GTM module sends the transfer task to STB to the MCS system.

[0050] Step A4: The MCS system sends a transfer command to the AMHS system.

[0051] Step A5: The vehicle is moved to STB under the control of the AMHS system, and the transfer is completed.

[0052] Step A6: The MCS system receives feedback that the STB transfer is complete.

[0053] Step A7: The MCS system reports the transfer completion information to the GTM module.

[0054] Step A8: The pre-transfer task is triggered by the MES system's scheduled task.

[0055] The scheduled task is triggered every 5 minutes. The workflow after the pre-transfer task is triggered is as follows:

[0056] Step C1: The RTD module queries whether there are any N2STKs with spare bits and whether there are any pre-transfer tasks to be processed in the system. When it finds that there are N2STKs with spare bits and pre-transfer tasks to be processed, proceed to step C2.

[0057] Step C2: The RTD module converts the pre-transfer task into a transfer task, and the GTM module sends the transfer task to the MCS system. The MCS system then sends the transfer command to the AMHS system.

[0058] Step C2, which converts the pre-transfer task into a transfer task, specifically includes the following steps:

[0059] Step C2-1: The RTD module matches the destination type (toType field) of the pre-transfer based on the N2STK type (warehouseType field) and filters out pre-transfer tasks of the same type.

[0060] Step C2-2: If the current vehicle is in a transferable state (transferState = WAT), the RTD module generates a transfer task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK.

[0061] Step C2-3: The GTM module sends the transfer task to the MCS system.

[0062] Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transfer task as reserved (RESERVER).

[0063] Step C2-5: The RTD module deletes the pre-transfer task and records the history.

[0064] Step C3: The AMHS system controls the vehicle to move to N2STK, and the move is complete;

[0065] Step C4: The MCS system receives feedback on the N2STK transfer completion event;

[0066] Step C5: The MCS system reports the transfer completion information to the GTM module.

[0067] When an N2STK loading port malfunctions (an E84 error occurs): After a vehicle is moved to the N2STK, but the N2STK loading port malfunctions, preventing the vehicle from being properly stored, the MCS system needs to send the vehicle to the nearest STB (Site Bus Base), i.e., change its destination. The subsequent workflow is as follows:

[0068] Step B1: The MCS system requests a change of destination from the GTM module;

[0069] Step B2: The GTM module determines whether the original destination is N2STK;

[0070] Step B3: If the original destination is determined to be N2STK, the RTD module generates a pre-delivery task for the current vehicle;

[0071] Step B4: The GTM module successfully changed its destination and responded to the MCS system;

[0072] Step B5: The MCS system sends the transfer command to the STB to the AMHS system;

[0073] Step B6: The AMHS system controls the vehicle to move to the STB, and the move is complete;

[0074] Step B7: The MCS system receives the STB transfer completion event;

[0075] Step B8: The MCS system reports the transfer completion information to the GTM module;

[0076] Step B9: The pre-transfer task is triggered by the MES system's scheduled task.

[0077] The scheduled task is triggered every 5 minutes. The workflow after the pre-transfer task is triggered is as follows:

[0078] Step C1: The RTD module queries whether there are any N2STKs with spare bits and whether there are any pre-transfer tasks to be processed in the system. When it finds that there are N2STKs with spare bits and pre-transfer tasks to be processed, proceed to step C2.

[0079] Step C2: The RTD module converts the pre-transfer task into a transfer task, and the GTM module sends the transfer task to the MCS system. The MCS system then sends the transfer command to the AMHS system.

[0080] Step C2, which converts the pre-transfer task into a transfer task, specifically includes the following steps:

[0081] Step C2-1: The RTD module matches the destination type (toType field) of the pre-transfer based on the N2STK type (warehouseType field) and filters out pre-transfer tasks of the same type.

[0082] Step C2-2: If the current vehicle is in a transferable state (transferState = WAT), the RTD module generates a transfer task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK.

[0083] Step C2-3: The GTM module sends the transfer task to the MCS system.

[0084] Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transfer task as reserved (RESERVER).

[0085] Step C2-5: The RTD module deletes the pre-transfer task and records the history.

[0086] Step C3: The AMHS system controls the vehicle to move to N2STK, and the move is complete;

[0087] Step C4: The MCS system receives feedback on the N2STK transfer completion event;

[0088] Step C5: The MCS system reports the transfer completion information to the GTM module.

[0089] The present invention also provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, are used to implement the steps of the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the above-described semiconductor 12-inch MES system.

[0090] The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. For those skilled in the art, the present invention can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.

Claims

1. A method for pre-conveyance management of a nitrogen-filled carrier storage cabinet of a semiconductor 12-inch MES system, characterized by: In the MES system, an RTD module and a GTM module are configured, the RTD module is responsible for management and calculation, after a carrier is out of the device after the end of the operation, the RTD module responds to the request of the EAP system to initiate the carrier to the N2STK, if there is no free position at this time or the N2STK loading port is abnormal, the RTD module sends a carrying task to the MCS system to carry the carrier to the STB and generates a pre-carrying task, the GTM module interacts with the MCS to issue a carrying instruction for the carrier; the pre-carrying task is triggered by the MES system timing task, and the working process after triggering the pre-carrying task is as follows: Step C1: the RTD module queries whether there is a free N2STK in the system and whether there is a pre-carrying task to be processed, when a free N2STK and a pre-carrying task to be processed are found, step C2 is entered; Step C2: the RTD module converts the pre-carrying task into a carrying task, and the GTM module sends the carrying task to the MCS system, and the MCS system sends a carrying instruction to the AMHS system; Step C3: the AMHS system controls the carrier to carry to the N2STK, and the carrying is completed; Step C4: the MCS system receives the feedback of the N2STK carrying completion event; Step C5: the MCS system reports the carrying completion information to the GTM module; The pre-carrying task is converted into a carrying task in step C2, which specifically includes the following steps: Step C2-1: the RTD module matches the destination type of the pre-carrying according to the N2STK type, and filters out the pre-carrying tasks of the same type; Step C2-2: if the current carrier is in a movable state, the RTD module generates a carrying task for the current carrier, the departure place is the position of the current carrier, and the destination is the current N2STK; Step C2-3: the GTM module sends the carrying task to the MCS system; Step C2-4: the RTD module marks the state of the carrying task as reserved based on the feedback of the GTM module; Step C2-5: the RTD module deletes the pre-carrying task and records the history.

2. The pre-carrying management method of the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system according to claim 1, characterized in that: When the N2STK has no free position, the working process is as follows: Step A1: the RTD module first generates a carrying task for the current carrier to the STB; Step A2: the RTD module generates a pre-carrying task for the current carrier to the N2STK; Step A3: the GTM module sends the carrying task to the STB to the MCS system; Step A4: the MCS system sends a carrying instruction to the AMHS system; Step A5: the AMHS system controls the carrier to carry to the STB, and the carrying is completed; Step A6: the MCS system receives the feedback of the STB carrying completion event; Step A7: the MCS system reports the carrying completion information to the GTM module; Step B9: The pre-conveyance task is triggered by the MES system timing task. 3.The pre-conveyance management method of the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system according to claim 1, wherein: When the N2STK loading port abnormality occurs, the workflow is as follows: Step B1: The MCS system to be sent to the nearest STB will request the GTM module to change the destination; Step B2: The GTM module determines whether the original destination is N2STK; Step B3: If it is determined that the original destination is N2STK, the RTD module generates a pre-conveyance task for the current carrier; Step B4: The GTM module successfully changes the destination and responds to the MCS system; Step B5: The MCS system sends the conveyance command to the STB to the AMHS system; Step B6: The AMHS system controls the carrier to be conveyed to the STB, and the conveyance is completed; Step B7: The MCS system receives the STB conveyance completion event; Step B8: The MCS system reports the conveyance completion information to the GTM module; Step B9: The pre-conveyance task is triggered by the MES system timing task. 4.The pre-conveyance management method of the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system according to claim 2 or 3, wherein: The timing task is triggered every 5 minutes.

5. A computer readable storage medium, characterized in that, The computer readable storage medium stores computer execution instructions, and the computer execution instructions are executed by the processor to implement the pre-conveyance management method of the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system.

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