Quartz nozzle grinder

Abstract

The application discloses a quartz nozzle grinder, and belongs to the field of precise grinding equipment. The device is provided with a main rotating table, a microscope measuring frame, a reciprocating mechanism and a grinding arm assembly on a rack. The core improvement is that a vacuum detection system is additionally arranged. The system is connected in series with a vacuum pump, an electric contact negative pressure gauge and a gas guide slip ring through a gas pipe, and is in sealed communication with a cavity for clamping a workpiece in the main rotating table. During work, the system first evacuates the workpiece. When the micro-hole is penetrated by grinding, the internal pressure is suddenly changed from vacuum to normal pressure. The electric contact negative pressure gauge detects the signal in real time and immediately feeds back. The power supply of the rotating motor and the reciprocating mechanism is automatically cut off through interlocking control. The application automatically judges the micro-hole penetration moment through a physical signal, effectively overcomes the disadvantages of affecting the precision and efficiency caused by manual observation, and can shorten the processing time of a single quartz nozzle to about 2 hours. The application has the advantages of accurate judgment, high processing efficiency and high product qualification rate.

Description

Technical Field

[0001] This invention belongs to the field of precision grinding equipment, specifically relating to a special equipment for grinding micropores on quartz workpieces, and in particular a quartz nozzle grinding machine with automatic detection and control functions. Background Technology

[0002] Quartz materials, due to their excellent chemical inertness, thermal stability, and insulation properties, are widely used in scientific instruments and industrial equipment, such as quartz nozzles, a core component in mass spectrometers and catalytic reaction devices. The key technical characteristic of these nozzles lies in the need to machine an extremely tiny hole at their tip, typically on the order of tens of micrometers in diameter. The machining precision directly determines the instrument's performance and sensitivity. Traditional quartz nozzle grinding methods rely heavily on manual skills, resulting in inherent problems such as low efficiency, poor consistency, and low yield.

[0003] To improve processing accuracy and efficiency, Chinese patent CN113146462B discloses a positioning rotary fixture for precision grinding of quartz nozzles. This technical solution, through the setting of a clamping and rotating mechanism, a self-aligning mechanism, and microscopic observation, achieves mechanical clamping and concentricity adjustment of the quartz nozzle, significantly superior to purely manual operation. This patent document details the selection of grinding oilstones, the setting of process parameters for rough grinding and fine grinding, and other basic operational methods, providing important reference for grinding operations in this field. The prior art also describes a specific method for judging the initial appearance of micropores: during grinding, centrifugal force is used to throw surface oil into the initially appearing nozzle orifice, and the presence of oil droplets inside the orifice is observed to determine whether to stop rough grinding. Although this method provides a basis for judgment, it is essentially still an indirect judgment method relying on the operator's naked eye. This method requires the operator to have extensive experience, and repeated stops for cleaning and observation are necessary during the grinding process; otherwise, oil stains will interfere with the judgment. The entire process is not only cumbersome but also makes it difficult to accurately grasp the moment when the micropores are formed. For the micropore grinding process, accurately determining the moment of penetration is a crucial step in controlling the final pore diameter accuracy. For micropores that ultimately require a diameter of 20 micrometers, this visual-based judgment method, which involves subjective factors, has limitations in terms of accuracy, consistency, and efficiency. It is prone to over-grinding due to delayed judgment or under-grinding due to premature judgment, thereby affecting the yield and prolonging the processing time.

[0004] Therefore, based on existing technologies such as CN113146462B, those skilled in the art are still continuously exploring how to achieve more precise and automated detection and control at the key process node of micro-hole penetration, in order to further improve the processing quality and efficiency of quartz nozzles. Summary of the Invention

[0005] This invention improves upon existing quartz nozzle grinding processes (such as those disclosed in CN113146462B), focusing on the precise and automatic determination of micro-hole penetration points. The core technical problem to be solved is how to automatically and accurately detect when a quartz nozzle micro-hole has been ground through without relying on manual visual observation, and immediately stop the grinding process, thereby achieving precise control over micron-level apertures and improving processing efficiency and product yield.

[0006] To solve the above problems, the present invention adopts the following technical solution:

[0007] A quartz nozzle grinding machine includes a frame, a main rotary table, a microscope measuring frame, a reciprocating mechanism, and a grinding arm assembly mounted on the frame;

[0008] The main rotary table is connected to a vacuum detection system, which is connected in sequence to a gas guide slip ring, an electrical contact negative pressure gauge and a vacuum pump via a gas pipe. The rotating end of the gas guide slip ring is sealed and connected to the cavity inside the quartz cone clamp used to clamp the workpiece.

[0009] The electrical contact negative pressure gauge is electrically connected to the rotary motor of the main rotary table and the drive motor of the reciprocating mechanism, so as to control the rotary motor and the drive motor to stop working when the vacuum inside the quartz cone clamp is broken.

[0010] Furthermore, the main rotary table includes the rotary motor, the driving synchronous pulley, the synchronous belt, the driven synchronous pulley, the bearing housing, the rotary table, and the quartz cone clamp; the output shaft of the rotary motor is connected to the driving synchronous pulley, the driven synchronous pulley is connected to the driving synchronous pulley through the synchronous belt, and the driven synchronous pulley is fixedly installed below the rotary table, and the rotary table is supported on the frame through the bearing housing.

[0011] Furthermore, the quartz cone clamp includes a quartz cone pressure plate for clamping the workpiece and a vacuum fixing plate, the vacuum fixing plate being mounted on a rotary table by a plurality of circumferentially distributed self-aligning bolts.

[0012] Furthermore, the driven synchronous wheel has a hollow structure, and the air tube passes through the central cavity of the driven synchronous wheel and is connected to the stationary end of the air guide slip ring.

[0013] Furthermore, the reciprocating mechanism includes a geared motor fixed to the frame and two linear guide rails. A linear slider is slidably mounted on the linear guide rails, and a carbon steel platform is fixedly mounted on the linear slider. The output shaft of the geared motor is connected to a crank, and an eccentric shaft on the crank extends into a waist-shaped hole in a crank groove. The crank groove is fixedly mounted on the bottom of the carbon steel platform.

[0014] Furthermore, the reciprocating mechanism also includes a main body base fixed to the frame, and the geared motor and linear guide rail are both fixedly mounted on the main body base.

[0015] Furthermore, the grinding arm assembly includes a swing arm seat that is magnetically attached to the carbon steel platform of the reciprocating mechanism. The swing arm seat is hinged to a swing arm via a swing arm rotation pin. The swing arm seat is connected to one end of a connecting corner piece via a two-dimensional fine-tuning seat. The other end of the connecting corner piece is fixedly connected to the magnetic seat. The end of the swing arm is equipped with a grinding oilstone.

[0016] Furthermore, the grinding arm assembly also includes a pull ring indexing pin. After the swing arm rotates around the swing arm rotation pin to make way for the observation position, the swing arm is reset and positioned by the pull ring indexing pin.

[0017] Furthermore, the microscope measuring frame includes a slide bar fixed to the frame, a large joint arm slidably sleeved on the slide bar via a locking handle, a small joint arm connected to the large joint arm via a pin, and a measuring microscope mounted at the end of the small joint arm.

[0018] Furthermore, the microscope measuring frame also includes a concentric support ring, which is fitted onto the lens of the measuring microscope.

[0019] This invention, by introducing a closed-loop control system centered on vacuum pressure monitoring, fundamentally solves the problem of instability in precision caused by the reliance on manual visual judgment of the endpoint in traditional grinding methods. It achieves automatic shutdown the instant the micropores are penetrated, thus ensuring the consistency and accuracy of the pore size. This not only directly leads to a significant improvement in product quality and a substantial reduction in the scrap rate, but also greatly liberates manpower and reduces labor intensity and reliance on highly skilled technicians, as it eliminates the need for continuous, focused microscopic observation by the operator. Simultaneously, this automated control mechanism avoids over-grinding and rework caused by delays or errors in manual judgment, effectively shortening the average grinding time per product and resulting in a significant leap in overall processing efficiency.

[0020] Furthermore, this invention ingeniously integrates a vacuum detection system into the rotating spindle, working in conjunction with a precision self-aligning mechanism, stable reciprocating motion components, and a finely adjustable and rapidly switchable grinding arm to form a highly integrated and highly reliable complete technical solution. Its judgment method based on physical signals (pressure mutations) is more sensitive and reliable than the human eye, laying a solid technical foundation for the standardized and precise production of micron-level micropores in quartz nozzles.

[0021] This invention achieves significant progress compared to existing technologies by introducing an interlocking control system centered on vacuum pressure monitoring. Firstly, this interlocking control mechanism automatically determines the moment of micro-hole penetration through physical signals, fundamentally solving the instability in precision caused by reliance on manual visual judgment in traditional grinding methods. It achieves objective and accurate identification of micro-hole penetration points and immediate automatic shutdown, thus ensuring the consistency and precision of the hole diameter. This not only directly leads to a significant improvement in product quality but also effectively reduces the scrap rate. Secondly, because automatic judgment and shutdown are implemented, over-grinding and rework caused by delays or errors in manual judgment are avoided, making the processing flow of individual products smoother, significantly shortening the average grinding time, and resulting in a substantial leap in overall processing efficiency.

[0022] Furthermore, this invention ingeniously integrates a vacuum detection and interlocking control system into the equipment, working in conjunction with a precision self-aligning mechanism and stable reciprocating motion components to form a highly integrated and reliable complete technical solution. This judgment method based on physical signals is more sensitive and reliable than human visual observation, laying a solid technical foundation for the standardized and precise production of micron-level micro-holes in quartz nozzles. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0024] Figure 1 This is a schematic diagram of the overall assembly structure of the quartz nozzle grinding machine of the present invention;

[0025] Figure 2 This is a schematic diagram of the assembly structure of the frame and the main rotary table of the present invention;

[0026] Figure 3 This is a schematic diagram of the assembly structure of the vacuum detection system and the main rotary table of the present invention;

[0027] Figure 4 This is a schematic diagram of the overall structure of the microscope measuring frame of the present invention;

[0028] Figure 5 This is a schematic diagram of the external structure of the reciprocating mechanism of the present invention;

[0029] Figure 6 This is an exploded view of the internal structure of the reciprocating mechanism of the present invention;

[0030] Figure 7 This is a schematic diagram of the overall structure of the grinding arm assembly of the present invention;

[0031] Figure 8 This is a schematic diagram showing the state of the grinding arm assembly during microscope observation according to the present invention;

[0032] Figure 9 This is a schematic diagram showing the state of the measuring microscope during microscope observation according to the present invention;

[0033] In the diagram above: 100. Main rotary table; 101. Workpiece; 102. Quartz cone pressure plate; 103. Rotary table; 104. Self-aligning bolt; 105. Bearing housing; 106. Driven synchronous pulley; 107. Synchronous belt; 108. Driving synchronous pulley; 109. Air guide slip ring; 110. Air valve; 111. Vacuum pump; 112. Electrical contact negative pressure gauge; 113. Rotary motor; 114. Vacuum fixing plate; 116. Motor speed controller; 117. Frame; 200. Microscope measuring stand; 201. Slide rod; 202. Locking handle; 203. Large joint arm; 204. Small joint arm; 205. Microscope; 206. Concentric support ring; 300. Reciprocating mechanism; 301. Carbon steel platform; 302. Linear slider; 303. Linear guide rail; 304. Crank groove; 305. Crank; 306. Gear motor; 307. Body base; 308. Dustproof plate; 309. Protective plate; 400. Grinding arm assembly; 401. Magnetic base; 402. Connecting corner piece; 403. Two-dimensional fine adjustment base; 404. Swing arm base; 405. Swing arm; 406. Swing arm rotating pin; 407. Pull ring indexing pin; 408. Oilstone; 409. Micrometer head. Detailed Implementation

[0034] This invention is a specific improvement on existing quartz nozzle grinding technology (the positioning rotary fixture and corresponding grinding method disclosed in CN113146462B). The following embodiments will focus on illustrating the core innovation of this invention—namely, the interlocking control system based on vacuum detection. Regarding basic operating methods such as the selection of oilstones and grinding processes, those skilled in the art can refer to existing technologies (such as CN113146462B) and will not elaborate further here.

[0035] Please see Figure 1The entire quartz nozzle grinding machine adopts a modular layout, mainly including a frame 117 as the basic support structure, and a main rotary table 100, a microscope measuring frame 200, a reciprocating mechanism 300, and a grinding arm assembly 400 arranged in an orderly manner on the frame 117. The frame 117 can be a frame structure composed of an aluminum profile skeleton and sheet metal panels. The bottom of this frame structure is equipped with independently adjustable support feet. This design ensures the stable placement of the equipment on the worktable, providing a solid foundation for high-precision grinding. The main rotary table 100 is located in the central area of ​​the equipment and is its core rotational power source. A motor speed controller 116 is also installed in front of the frame 117. This motor speed controller 116 is electrically connected to the controller of the rotary motor 113 for precise control of the workpiece rotation speed. The reciprocating mechanism 300 is usually located on one side of the main rotary table 100, and the grinding arm assembly 400 is attached to the carbon steel platform 301 of the reciprocating mechanism 300 via a magnetic base 401. The microscope measuring stand 200 is positioned behind the main rotating stage 100, and its multi-degree-of-freedom adjustment capability allows the measuring microscope 205 to be precisely aligned with the grinding point during measurement. This clear layout not only makes the equipment structure reasonable and easy to maintain, but more importantly, it creates optimal conditions for the coordinated operation of various functional components.

[0036] Please see Figure 2 and Figure 3 The core function of the main rotary table 100 is to provide smooth and highly coaxial rotational motion, powered by a rotary motor 113 fixedly installed inside the frame 117. The speed of the rotary motor 113 can be easily adjusted by operating the knob on the motor speed controller 116, thus adapting to the speed requirements of different grinding stages. The upper end of the rotary table 103 has a mounting slot for installing a vacuum mounting plate 114. The middle part of the rotary table 103 is rotatably connected to the upper surface of the frame 117 via a bearing seat 105, thus stably mounting the rotary table 103 on the upper surface of the frame 117. The lower end of the rotary table 103 extends into the frame 117, and a driven synchronous pulley 106 is fixedly fitted onto its lower outer surface. A driving synchronous pulley 108 is fixedly installed on the output shaft of the rotary motor 113, and power is transmitted to the driven synchronous pulley 106 via a synchronous belt 107. This belt drive effectively isolates and attenuates vibrations that may be generated by the motor itself, thus ensuring smoother operation of the rotary table 103.

[0037] The quartz cone clamp for holding workpiece 101 specifically consists of a quartz cone pressure plate 102 and a vacuum fixing plate 114. Specifically, the quartz cone pressure plate 102 can be a ring-shaped structure. During installation, it is fitted from the top end of the workpiece 101 down to the bottom of the entire cone-shaped workpiece 101. Then, the bolt holes evenly distributed around the circumference of the surface of the quartz cone pressure plate 102 are aligned with the corresponding threaded holes on the vacuum fixing plate 114. Bolts are then inserted into each set of aligned threaded holes, pressing the entire workpiece 101 against the upper surface of the vacuum fixing plate 114 until all bolts are tightened. At this point, the quartz cone pressure plate 102 and the vacuum fixing plate 114 clamp the bottom of the workpiece 101, thus fixing the workpiece 101 on the vacuum fixing plate 114 and forming a whole. Since the quartz cone pressure plate 102 has a ring structure and the workpiece 101 has a cone structure, when the quartz cone pressure plate 102 presses the workpiece 101 against the vacuum fixing disk 114, the circumferential constraint of the quartz cone pressure plate 102 on the workpiece 101 will automatically adjust the workpiece 101 to a coaxial state with the quartz cone pressure plate 102, and finally achieve a coaxial state of the workpiece 101, the quartz cone pressure plate 102 and the vacuum fixing disk 114.

[0038] Please see Figure 3 The vacuum fixing plate 114 is flange-shaped, with its side near the workpiece 101 extending outward to form a flange. The surface of the flange also has multiple bolt holes evenly distributed around its circumference. During assembly, the lower end of the vacuum fixing plate 114 is first inserted into the mounting groove at the upper end of the rotary table 103, at which point the lower surface of the flange is in contact with the upper surface of the rotary table 103. Then, the axis of the vacuum fixing plate 114 is aligned using multiple self-aligning bolts 104 evenly distributed around the circumference of the mounting groove and penetrating its walls. Specifically, with the assistance of a dial indicator, these self-aligning bolts 104 are finely adjusted to precisely align the rotation center of the workpiece 101, ensuring it perfectly coincides with the theoretical rotation center of the spindle. This alignment process is a crucial pretreatment step to ensure high concentricity of the micropores subsequently ground. After alignment, the vacuum fixing plate 114 is then locked in place using the corresponding bolt holes at the upper end of the rotary table 103, the bolt holes on the flange, and the bolts.

[0039] Please see Figure 3The vacuum detection system is sequentially connected via air pipes to a vacuum pump 111, an air valve 110, an electrical contact negative pressure gauge 112, and a gas guide slip ring 109. The air valve 110 is located in the main air path at the outlet of the vacuum pump 111 and is used to control the opening and closing of the vacuum line. Specifically, both the rotary table 103 and the vacuum fixing plate 114 have hollow interiors, facilitating the installation of the vacuum fixing plate 114 onto the rotary table 103, the installation of the gas guide slip ring 109 between the rotary table 103 and the vacuum fixing plate 114, and the assembly of the air pipe from the outside of the rotary table 103 to the gas guide slip ring 109. It should be noted that the gas guide slip ring 109 is a commercially available standard part; its rotating end can rotate with the rotary table 103 and maintain a sealed connection with the cavity inside the vacuum fixing plate 114, while its stationary end, connected to the air pipe, remains stationary, preventing motion interference between the rotating rotary table 103 and the stationary air pipe. The electrical contact negative pressure gauge 112 is connected to the rotary motor 113 and the geared motor 306 of the reciprocating mechanism 300 through a control circuit, forming a complete interlocking control loop.

[0040] At the start of the operation, the vacuum pump 111 needs to be started to extract the air from the sealed cavity formed by the vacuum fixing plate 114 and the workpiece 101, reducing its internal pressure to an extremely low level. Once the required vacuum level is reached, the air valve 110 can be closed to isolate the system, and then the vacuum pump 111 can be turned off. At this time, the system relies on the seal of the air valve 110 to maintain the vacuum state. The electric contact negative pressure gauge 112 continuously monitors the pressure value in the cavity. When the grinding process reaches the point where the tip of the workpiece 101 is ground through to form a micropore, external air will rush into the sealed cavity through the micropore, causing the internal pressure to rise sharply from 0 Pa to atmospheric pressure. At this time, the electric contact negative pressure gauge 112 will immediately detect this pressure change signal. Since it has formed an interlocked control loop with the controller of the rotary motor 113 and the geared motor 306 of the reciprocating mechanism 300 through the circuit, it will immediately send a switching signal to automatically and synchronously cut off the power supply to the two motors through the loop, so that all grinding operations stop immediately. This interlocking control system based on vacuum pressure changes enables millisecond-level response and automatic judgment and shutdown at the moment of micro-hole penetration.

[0041] Please see Figure 5 and Figure 6 The function of the reciprocating mechanism 300 is to convert the rotational motion of the geared motor 306 into the precise reciprocating linear motion of the carbon steel platform 301. This reciprocating motion, through dynamic coordination with the rotational motion of the workpiece 101, enables the grinding stone 408 to form a linear friction trajectory on the surface of the workpiece 101. This not only ensures a more uniform and smooth grinding surface, but also transforms the wear of the grinding stone 408 from concentrated point wear to linear uniform wear along its length. At the same time, it effectively disperses grinding stress and prevents the quartz micropores from cracking due to uneven stress.

[0042] The geared motor 306 and two parallel linear guides 303 are securely mounted on a rigid body base 307, which is fixed to the upper surface of the frame 117. Linear guides 303 are equipped with linear sliders 302, and the carbon steel platform 301 is securely mounted on the upper surface of these linear sliders 302 by screws. The core of the power transmission is a crank-slide mechanism. The output shaft of the geared motor 306 drives the crank 305 to rotate. The eccentric shaft at the end of the crank 305 is inserted into the oblong hole of the crank slide 304, which is itself fixedly mounted on the bottom of the carbon steel platform 301. When the geared motor 306 drives the crank 305 in circular motion, the rotational motion is converted into continuous reciprocating linear motion of the carbon steel platform 301 along the linear guides 303. The stroke of the mechanism can be adjusted by selecting cranks 305 with different eccentricities. For example, the eccentricity of cranks 305 can be optionally set to 10mm, 15mm, or 20mm to correspond to different grinding stroke requirements. In addition, to protect the mechanism from dust contamination and ensure operational safety, a dustproof plate 308 and a protective plate 309 are also installed on the main body 307.

[0043] Please see Figure 7 The main function of the grinding arm assembly 400 is to hold the grinding tool and achieve fine feed adjustment. The base of the entire assembly is a magnetic base 401, which is fixed to the carbon steel platform 301 of the aforementioned reciprocating mechanism 300 by strong magnetic attraction. A swing arm base 404 is fixed above the magnetic base 401 via a connecting bracket 402. A swing arm 405 is hinged to the swing arm base 404 via a swing arm rotating pin 406. An oilstone 408 is fixedly installed at the end of the swing arm 405 away from the swing arm base 404. Thus, if it is necessary to observe the grinding state of the workpiece 101 during the grinding process, the space above the workpiece 101 can be made accessible by rotating the swing arm 405, such as... Figure 9 As shown, the entire swing arm 405 can rotate to one side around the swing arm pivot pin 406.

[0044] Furthermore, the swing arm seat 404 is connected to the connecting bracket 402 via a two-dimensional fine-tuning seat 403. This two-dimensional fine-tuning seat 403 is a standard part, and its model can be a manual XY-axis slide table manufactured by MISUMI. The swing arm seat 404 and the connecting bracket 402 are respectively fixedly installed on the left and right sides of the two-dimensional fine-tuning seat 403. The operator rotates the micrometer head 409 on the two-dimensional fine-tuning seat 403 to make a slight movement of the entire swing arm seat 404, thereby indirectly pressing the oilstone 408 against the rotating workpiece 101 to achieve feed grinding. The manual knob micrometer head, with each rotation of its dial corresponding to a feed amount of 1 micrometer or 5 micrometers, provides extremely precise control for the fine grinding stage. It should be noted that the two-dimensional fine-tuning seat 403 is a commercially available standard part, and its specific structure and fine-tuning principle are publicly known; therefore, they will not be described in detail in this embodiment.

[0045] Furthermore, to ensure that the swing arm 405 can accurately return to its original grinding position after observation, a pull ring indexing pin 407 is provided at the end of the swing arm 405 near the swing arm seat 404. When the swing arm 405 rotates to the working position, the pull ring indexing pin 407 is inserted into the corresponding pin hole on the swing arm seat 404 under the action of the spring, achieving precise positioning and locking. The pull ring indexing pin 407 is also a commercially available standard part.

[0046] Please see Figure 4 The microscope measuring stand 200 is designed to enable in-situ monitoring and measurement of the grinding process. Please refer to the documentation for the observation status. Figure 9 The support includes a vertical slide bar 201 securely fixed to the frame 117. A large articulated arm 203 is fitted onto the slide bar 201 via a locking handle 202. The end of the locking handle 202 near the large articulated arm is threaded. To secure the large articulated arm 203 to the slide bar 201, simply rotate the locking handle 202 until its end screws into the slide bar 201 until it presses against the surface of the slide bar 201, thus securing the large articulated arm 203. Conversely, rotating the locking handle 202 in the opposite direction releases the lock. This allows for coarse adjustment of the microscope's height.

[0047] The other end of the large articulated arm 203 is connected to the small articulated arm 204 via a pin, and the measuring microscope 205 is finally mounted at the end of the small articulated arm 204. This multi-articulated arm design allows the measuring microscope 205 to move and rotate in space with multiple degrees of freedom, thereby easily finding and aligning with the grinding tip of the workpiece 101. To further standardize the observation distance and improve observation repeatability, a concentric support ring 206 can be threaded into the lens of the measuring microscope 205. By rotating this concentric support ring 206, its forward extension length relative to the microscope lens can be changed, thus constraining the relative height and concentric position between the front end of the microscope lens and the tip of the workpiece 101, ensuring that the same focal length and angle of view are maintained during each observation.

[0048] In summary, the quartz nozzle grinding machine provided in this embodiment achieves automatic judgment and control of the instantaneous breakthrough of micro-holes through the introduction of a core innovation: a vacuum detection-based interlocking control system. This interlocking control mechanism not only ensures the consistency and accuracy of the hole diameter but also significantly improves processing efficiency by avoiding the lag and errors of manual judgment, while reducing reliance on operator experience. The entire system organically integrates a high-precision main rotary table, a stable reciprocating mechanism, a grinding arm assembly with precision fine-tuning function, and a multi-degree-of-freedom adjustable microscope measuring frame, forming a complete, efficient, and reliable precision machining solution.

Claims

1. A quartz nozzle grinding machine, comprising a frame (117), a main rotary table (100), a microscope measuring frame (200), a reciprocating mechanism (300), and a grinding arm assembly (400) disposed on the frame (117). Its features are: The main rotary table (100) is connected to a vacuum detection system, which is connected in sequence to a gas guide slip ring (109), an electrical contact negative pressure gauge (112) and a vacuum pump (111) via a gas pipe. The rotating end of the gas guide slip ring (109) is sealed and connected to the cavity inside the quartz cone clamp used to clamp the workpiece (101). The reciprocating mechanism (300) includes a geared motor (306) fixed on the frame (117) and two linear guide rails (303). A linear slider (302) is slidably mounted on the linear guide rails (303), and a carbon steel platform (301) is fixedly mounted on the linear slider (302). The output shaft of the geared motor (306) is connected to a crank (305). An eccentric shaft on the crank (305) extends into the waist-shaped hole of a crank groove (304), and the crank groove (304) is fixedly mounted on the bottom of the carbon steel platform (301). The grinding arm assembly (400) includes a swing arm seat (404) that is attached to the carbon steel platform (301) of the reciprocating mechanism (300) by a magnetic seat (401). The swing arm seat (404) is hinged to a swing arm (405) by a swing arm rotating pin (406). The swing arm seat (404) is connected to one end of a connecting corner piece (402) by a two-dimensional fine adjustment seat (403). The other end of the connecting corner piece (402) is fixedly connected to the magnetic seat (401). The end of the swing arm (405) is equipped with a grinding oilstone (408). The electrical contact negative pressure gauge (112) is electrically connected to the rotary motor (113) of the main rotary table (100) and the drive motor of the reciprocating mechanism (300) to control the rotary motor (113) and the drive motor to stop working when the vacuum inside the quartz cone clamp is broken.

2. The quartz nozzle grinding machine according to claim 1, characterized in that: The main rotary table (100) includes the rotary motor (113), the driving synchronous pulley (108), the synchronous belt (107), the driven synchronous pulley (106), the bearing seat (105), the rotary table (103), and the quartz cone clamp; the output shaft of the rotary motor (113) is connected to the driving synchronous pulley (108), the driven synchronous pulley (106) is connected to the driving synchronous pulley (108) through the synchronous belt (107), and the driven synchronous pulley (106) is fixedly installed below the rotary table (103), and the rotary table (103) is supported on the frame (117) through the bearing seat (105).

3. The quartz nozzle grinding machine according to claim 1, characterized in that: The quartz cone clamp includes a quartz cone pressure plate (102) for clamping the workpiece (101) and a vacuum fixing plate (114), which is mounted on a rotary table (103) by a plurality of circumferentially distributed self-aligning bolts (104).

4. The quartz nozzle grinding machine according to claim 2, characterized in that: The driven synchronous wheel (106) is a hollow structure, and the air tube passes through the central cavity of the driven synchronous wheel (106) and is connected to the stationary end of the air guide slip ring (109).

5. The quartz nozzle grinding machine according to claim 1, characterized in that: The reciprocating mechanism (300) also includes a body base (307) fixed on the frame (117), and the geared motor (306) and the linear guide rail (303) are both fixedly installed on the body base (307).

6. The quartz nozzle grinding machine according to claim 1, characterized in that: The grinding arm assembly (400) also includes a pull ring indexing pin (407). After the swing arm (405) rotates around the swing arm rotation pin (406) to make way for the observation position, the swing arm (405) is reset and positioned by the pull ring indexing pin (407).

7. The quartz nozzle grinding machine according to claim 1, characterized in that: The microscope measuring frame (200) includes a slide bar (201) fixed on the frame (117). A large joint arm (203) is slidably sleeved on the slide bar (201) via a locking handle (202). A small joint arm (204) is connected to the large joint arm (203) via a pin. A measuring microscope (205) is installed at the end of the small joint arm (204).

8. The quartz nozzle grinding machine according to claim 7, characterized in that: The microscope measuring frame (200) also includes a concentric support ring (206), which is fitted onto the lens of the measuring microscope (205).

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