A purification furnace for hafnium tetrachloride

Abstract

The application discloses a purification furnace for tetrachlorohafnium, and relates to the technical field of purification furnaces for tetrachlorohafnium, which comprises a shaft rod installed at the bottom end of the inner cavity of a furnace body through bearings, an impurity accumulation preventing paddle is annularly welded to the outer side of the shaft rod, and a second flow guide ring for annularly dispersing and discharging impurities is welded to the middle part of the inner cavity of the furnace body. The purification furnace for tetrachlorohafnium can timely adjust the reaction conditions in the furnace by dynamically adjusting the opening and closing states of the opening and closing plate, has certain influence on the temperature and pressure in the purification furnace, and can maintain the stability and efficiency of the reaction and purification. The cooperation of the paddle and the opening and closing plate can better separate tetrachlorohafnium gas and impurity particles, a series of flow guide structures facilitate rapid discharge of the impurities in the furnace, reduce the cleaning operation difficulty of workers, buffer the impurities with small particles, prevent a large amount of dust from being generated due to large impact force during discharge, improve the working environment, and protect the health of the operators.

Description

Technical Field

[0001] This invention relates to the field of hafnium tetrachloride purification furnace technology, specifically to a purification furnace for hafnium tetrachloride. Background Technology

[0002] Hafnium tetrachloride purification furnace is a specialized piece of equipment for the production of high-purity hafnium tetrachloride. It is widely used in the semiconductor and optoelectronic industries. Its working principle is based on the boiling point difference between ferric fluoride and hafnium tetrachloride. Through high-temperature vaporization and gas reduction technologies, impurities are effectively removed. Through the synergistic effect of gas reduction and sublimation, hafnium tetrachloride is converted into a gaseous state, and impurities are effectively removed, thus improving purification efficiency. Overall, this equipment plays a key role in the manufacture of high-purity materials.

[0003] The hafnium tetrachloride purification device, patent publication number CN203998991U, includes upper and lower furnace chambers connected as one unit. A partition with through holes is provided at the connection between the upper and lower furnace chambers. A recess is provided in the middle of the resistance furnace, and the lower furnace chamber is installed in the recess, containing a volatilization tank. A cooling water jacket is installed around the outer periphery of the upper furnace chamber, which contains a condensation hanging cylinder. A furnace chamber cover is installed at the opening of the upper furnace chamber, and a needle valve, a furnace tube heater, and an internal temperature measuring thermocouple are fixedly installed on the furnace chamber cover. The furnace tube heater and the internal temperature measuring thermocouple are both connected to the inner cavity of the condensation hanging cylinder. This equipment is designed based on the different boiling points of crude hafnium tetrachloride and its impurities. It has a high metal recovery rate, and the gas discharged during the degassing process is recovered through pipelines and a recovery tank, so the solid chloride can be recycled and reused, avoiding resource waste.

[0004] According to the aforementioned patent, the gas produced by the reaction in the existing hafnium tetrachloride purification furnace rises along the furnace wall and eventually enters the gas collection channel for further condensation and purification. However, during the gas rise process inside the furnace, due to the single gas rise channel in the furnace cavity, the gas is prone to local eddies or stagnation phenomena in the furnace. Furthermore, the gas loses a lot of heat when rising in a large area channel for a long time, which affects the gasification process of hafnium tetrachloride. This results in some hafnium tetrachloride not being fully gasified and depositing, leading to a large accumulation of impurities, which reduces the reaction rate and increases the difficulty of cleaning operations. Therefore, we propose a purification furnace for hafnium tetrachloride. Summary of the Invention

[0005] The purpose of this invention is to provide a purification furnace for hafnium tetrachloride to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a purification furnace for hafnium tetrachloride, comprising a shaft mounted on the bottom of the furnace cavity via a bearing, a paddle plate welded annularly on the outer side of the shaft to prevent impurity accumulation, a second guide ring welded in the middle of the furnace cavity to disperse and discharge impurities annularly, and a conical dispersion disc with sharp corners at both ends fixedly sleeved on the outer side of the shaft away from the paddle plate.

[0007] A support ring is welded to the inner wall of the furnace body above the second guide ring. An opening and closing mechanism for adjusting the gas rising rate is installed above the support ring. A transmission mechanism for adjusting the opening and closing state of the opening and closing mechanism is provided in the middle of the opening and closing mechanism.

[0008] The combination of the transmission mechanism, the ball, and the rotating groove drives the shaft to rotate the paddle, breaking up the accumulated impurities. The combination of the opening and closing mechanism, the transmission mechanism, and the paddle accelerates the reaction rate and the cleaning operation.

[0009] Furthermore, a heating cylinder for continuous high-temperature heating is bolted to the outside of the furnace body, and a sealed furnace cover is connected to the upper end of the furnace body by a ring of bolts. An integrally formed No. 1 shaft tube for gas flow is welded to the opening at one end of the furnace body, and an integrally formed No. 2 shaft tube for conveying reducing gas is welded to the opening at the other end of the furnace body.

[0010] Both the No. 1 and No. 2 shaft tubes are connected to brackets via bearings, and the brackets are distributed at both ends of the furnace body. A base is fixedly welded to the bottom of the brackets. A gas collection pipe is movably sleeved at the end of the No. 1 shaft tube away from the furnace body, and a gas supply sleeve is movably sleeved at the end of the No. 2 shaft tube away from the furnace body.

[0011] Furthermore, a driven gear for driving the furnace body to rotate and tilt is fixedly sleeved on the outer side of the first shaft tube. A driving gear is meshed with one side of the driven gear, and the driving gear passes through the inner side of the bracket via a bearing. A motor connected to the driving gear via a coupling is installed on one side of the bracket.

[0012] Furthermore, a flow guide ring is welded to the top of the furnace inner cavity, and the opening and closing mechanism includes a rotating seat fixed on the support ring and arranged in a ring. An intermittently opening and closing plate is movably sleeved on the outer side of the rotating seat, and an inclined connecting rod is fixed to the opening and closing plate near the middle of the rotating seat.

[0013] Furthermore, a strip groove is provided on the inner side of the connecting rod, and a reciprocating slider is slidably sleeved inside the strip groove. A traction rod for pulling the connecting rod to tilt is fixedly welded to the outer side of the slider. A triangular folding plate is provided at the narrower end of the opening and closing plate near the center of the furnace body. Both the opening and closing plate and the folding plate have mesh holes for filtering large particles of impurities on their inner sides.

[0014] Furthermore, a rotating block with a movable sleeve structure is fixed to the middle of the side of the folding plate near the opening and closing plate, and a protrusion is fixed to the outer side of the rotating block. Arc-shaped plates are fixed to the surfaces of the folding plate on both sides of the rotating block.

[0015] Furthermore, the opening and closing plate has an arc-shaped groove inside for the arc plate to slide, and the surface of the second guide ring is fixed with annularly distributed compressible protrusions that drive the rotating block to rotate and form an arc-shaped stop.

[0016] Furthermore, an electric push rod is installed in the middle of the furnace cover to drive the transmission mechanism to rise and fall. The transmission mechanism includes a lifting block connected to a ring-shaped distribution of traction rods, and the outer wall of the top end of the lifting block is provided with a threaded portion.

[0017] Furthermore, a sleeve block is threaded onto the outer side of the threaded portion, and the sleeve block is connected to the output end of the electric push rod. Guide rods fixed to the inner wall of the furnace are slidably sleeved on both sides of the lifting block.

[0018] Furthermore, a sleeve is fixedly connected to the end of the lifting block away from the sleeve block, and spheres are fixed on both sides of the top of the shaft. The rotation of the spheres drives the shaft to rotate the paddle. The sleeve has a rotating groove inside that causes the spheres to rotate once in a spiral trajectory.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] 1. This hafnium tetrachloride purification furnace uses an opening and closing mechanism to drive an opening and closing plate to intermittently open or close. When the opening and closing plate is open, the gas produced by the reaction of hafnium tetrachloride rises concentratedly from the opening formed by the plate. At the same time, the plate disperses the opening into multiple areas, allowing the gas to rise in a dispersed manner, avoiding the formation of a single upward channel within the furnace, and reducing local eddies and stagnation. When the opening and closing plate is closed, the area of ​​the upward gas flow channel decreases, the gas rising rate decreases, heat loss is limited, hafnium tetrachloride vaporization is promoted, gas concentration is increased, and the reaction rate is further improved. By dynamically adjusting the opening and closing state of the plate, the reaction conditions within the furnace can be adjusted in a timely manner, influencing the temperature and pressure within the purification furnace. This prevents hafnium tetrachloride from failing to fully vaporize and accumulating a large amount of impurities, thus maintaining the stability and efficiency of the reaction purification process.

[0021] 2. In this hafnium tetrachloride purification furnace, when the opening and closing plate is opened, the transmission mechanism drives the paddle to rotate, which disturbs the accumulated and adhered impurities and improves the fluidity of the sediment. After the opening and closing plate is closed, the resulting rising airflow will carry large particles of impurities away from the bottom, preventing large particles of impurities from accumulating for a long time. The mesh of the opening and closing plate blocks some of the large particles of impurities carried by the airflow, allowing large particles of impurities to settle faster without adhering. It also prevents a large number of large particles of impurities from entering the gas collection pipe, and can better separate hafnium tetrachloride gas and impurity particles.

[0022] 3. This hafnium tetrachloride purification furnace, when cleaning impurities inside the furnace, features an openable plate that tilts the baffles. Simultaneously, the rotating paddle, in conjunction with the second guide ring and dispersing disc, disperses and re-concentrates impurity particles before they are discharged from the furnace. This effectively reduces dead zones and stagnation during discharge, facilitating rapid removal of impurities and simplifying the cleaning process. Furthermore, the annularly distributed baffles reduce the falling speed of large impurities, minimizing their impact on the furnace opening. They also further disperse agglomerated or adhered large and small impurities, buffering smaller particles to prevent excessive dust generation from the impact of the discharge. This improves the working environment and protects the health of operators. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the furnace body structure of the present invention;

[0025] Figure 3 This is a schematic diagram of the internal structure of the furnace body of the present invention;

[0026] Figure 4 This is a schematic diagram of the opening and closing mechanism of the present invention;

[0027] Figure 5 This is a schematic diagram of the opening and closing plate structure of the present invention;

[0028] Figure 6 This is a schematic diagram of the folded plate structure of the present invention;

[0029] Figure 7 This is a schematic diagram of the rotating block structure of the present invention;

[0030] Figure 8 This is a schematic diagram of the arc-shaped plate structure of the present invention;

[0031] Figure 9 This is a schematic diagram of the cross-sectional structure of the No. 1 guide ring of the present invention;

[0032] Figure 10 This is a schematic diagram of the threaded part structure of the present invention;

[0033] Figure 11 This is a schematic diagram of the spherical structure of the present invention;

[0034] Figure 12 This is a schematic diagram of the rotating groove structure of the present invention;

[0035] Figure 13 This is a schematic diagram of the dispersion disk structure of the present invention.

[0036] In the diagram: 1. Furnace body; 2. Heating cylinder; 3. Base; 4. Support; 5. Shaft tube No. 1; 6. Opening and closing mechanism; 601. Connecting rod; 602. Folding plate; 603. Strip groove; 604. Rotating seat; 605. Opening and closing plate; 606. Traction rod; 607. Sliding block; 7. Shaft tube No. 2; 8. Transmission mechanism; 801. Sleeve block; 802. Guide rod; 803. Lifting block; 804. Sleeve; 9. Gas collection. 10. Gas supply sleeve; 11. Furnace cover; 12. Electric push rod; 13. Drive gear; 14. Motor; 15. Driven gear; 16. No. 1 guide ring; 17. Support ring; 18. No. 2 guide ring; 19. Paddle plate; 20. Shaft; 21. Stop block; 22. Rotating block; 23. Protrusion; 24. Arc plate; 25. Arc groove; 26. Threaded part; 27. Sphere; 28. Rotating groove; 29. ​​Dispersion disc. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] Please see Figures 1-3 This invention provides a technical solution: a purification furnace for hafnium tetrachloride, comprising a furnace body 1 with a heating cylinder 2 for continuous high-temperature heating bolted to the outside. A sealed furnace cover 11 is connected to the upper end of the furnace body 1 via annularly distributed bolts. An integrally formed first shaft tube 5 for gas flow is welded to one end opening of the furnace body 1, and an integrally formed second shaft tube 7 for conveying reducing gas is welded to the other end opening of the furnace body 1. Both the first shaft tube 5 and the second shaft tube 7 are connected to supports 4 via bearings, and the supports 4 are distributed at both ends of the furnace body 1. A base 3 is fixedly welded below the supports 4. A gas collecting pipe 9 is movably sleeved at the end of the first shaft tube 5 away from the furnace body 1, and a gas supply sleeve 10 is movably sleeved at the end of the second shaft tube 7 away from the furnace body 1. A sealing ring can be added to the end of the first shaft tube 5 that sleeves the gas collecting pipe 9, and a sealing ring can be added to the end of the second shaft tube 7 that sleeves the gas supply sleeve 10.

[0039] In practice, the support bracket 4 supports the entire furnace body 1. The furnace cover 11 and the heating cylinder 2 are easy to disassemble and assemble. The solid raw material of hafnium tetrachloride is placed into the furnace body 1. The sealed furnace cover 11 ensures the stability of the atmosphere inside the furnace and prevents the mixing of outside air. The furnace body 1 is continuously heated at high temperature by the heating cylinder 2 to provide the required high temperature environment to promote the chemical reaction and purification process of hafnium tetrachloride. During the purification process, the gas supply sleeve 10 delivers reducing gas from the inside of the second shaft tube 7 into the inner cavity of the furnace body 1 to provide the reducing gas required for hafnium tetrachloride. Subsequently, the hafnium tetrachloride gas generated by the reaction is delivered into the gas collection pipe 9 through the first shaft tube 5 and then delivered to the external condensation equipment to condense into a solid, completing the purification process.

[0040] See Figures 1-3 It is known that a driven gear 15 for driving the furnace body 1 to rotate and tilt is fixedly sleeved on the outer side of the first shaft tube 5. A driving gear 13 is meshed with one side of the driven gear 15, and the driving gear 13 passes through the inner side of the bracket 4 through a bearing. A motor 14 connected to the driving gear 13 through a coupling is installed on one side of the bracket 4.

[0041] In practice, when emptying the impurity particles inside the furnace body 1, the motor 14 can be started, causing the motor 14 to drive the drive gear 13 to rotate. The drive gear 13 meshes with the driven gear 15, causing the drive gear 13 to drive the driven gear 15 to rotate. Subsequently, the driven gear 15 drives the first shaft tube 5 to rotate, causing the first shaft tube 5 to drive the furnace body 1 to rotate and tilt. At the same time, the furnace body 1 drives the second shaft tube 7 to rotate on the support 4. Since the first shaft tube 5 and the gas collection pipe 9 are movably connected, and the second shaft tube 7 and the gas supply sleeve 10 are movably connected, when the first shaft tube 5 and the second shaft tube 7 rotate, they will not cause the gas collection pipe 9 and the gas supply sleeve 10 to rotate significantly, and will not affect the connection of the external pipes. After the furnace body 1 rotates and tilts, the impurity particles in the inner cavity can be poured out and collected by gravity.

[0042] See Figure 3 , Figure 6 , Figure 7 , Figure 9 , Figure 11 and Figure 13 It is known that a shaft 20 is installed at the bottom of the inner cavity of the furnace body 1 through a bearing. A paddle 19 is welded to the outer side of the shaft 20. A second guide ring 18 is welded to the middle of the inner cavity of the furnace body 1. A first guide ring 16 is welded to the top of the inner cavity of the furnace body 1. A conical dispersion disc 29 with sharp corners at both ends is fixedly sleeved on the outer side of the end of the shaft 20 away from the paddle 19. The dispersion disc 29 guides the poured-out debris, so that the debris is discharged in a ring.

[0043] In practice, during the purification process of hafnium tetrachloride, some impurities may precipitate or settle at high temperatures. As the solid hafnium tetrachloride continuously reacts to produce gas, the impurities accumulate at the bottom of the inner cavity of the furnace body 1 for a long time. When the furnace body 1 is tilted and turned over to pour out the impurities, the accumulated impurities are difficult to fall out quickly. The shaft 20 can be used to drive the paddle 19 to rotate, which can disturb the impurities accumulated at the bottom and improve the flowability of the deposits. The dispersion plate 29 guides the impurities to flow out in a ring shape. At the same time, the second guide ring 18 and the first guide ring 16 concentrate the impurities discharged in the ring shape and discharge them from the furnace opening. The combination of ring flow and concentrated flow effectively reduces dead corners and stagnation during the discharge of impurities, allowing them to flow out more smoothly when poured out. This avoids blockage caused by excessive tightness, facilitates the quick pouring out of the impurities in the furnace, and reduces the difficulty of cleaning operations for the staff.

[0044] See Figure 3 , Figure 4 and Figure 6 It is known that a support ring 17 is welded to the inner wall of the furnace body 1 above the second guide ring 18. An opening and closing mechanism 6 for adjusting the gas rising rate is installed above the support ring 17. A transmission mechanism 8 for adjusting the opening and closing state of the opening and closing mechanism 6 is provided in the middle of the opening and closing mechanism 6.

[0045] In practice, the support ring 17 is directly welded to the inner wall of the furnace body 1, and the opening and closing mechanism 6 is installed in a ring on the support ring 17. The opening and closing mechanism 6 can dynamically adjust the rising rate of the gas. The transmission mechanism 8 moves up and down, which can adjust the opening and closing state of the opening and closing mechanism 6, thereby affecting the rising state of the gas.

[0046] See Figures 3-8 It is known that the opening and closing mechanism 6 includes a rotating seat 604 fixed on the support ring 17 and arranged in a ring. An opening and closing plate 605 is movably sleeved on the outer side of the rotating seat 604. An inclined connecting rod 601 is fixed on the opening and closing plate 605 near the middle of the rotating seat 604. A strip groove 603 is opened on the inner side of the connecting rod 601. A reciprocating sliding slider 607 is slidably sleeved inside the strip groove 603. A traction rod 606 that pulls the connecting rod 601 to tilt is fixedly welded on the outer side of the slider 607. A folding plate 602 is provided at the narrower end of the opening and closing plate 605 near the center of the furnace body 1.

[0047] In practice, when the traction rod 606 moves downward, it will drive the slider 607 to move downward, which will exert a squeezing force on the connecting rod 601. At the same time, the slider 607 slides in the strip groove 603, causing the connecting rod 601 to tilt downward and drive the opening and closing plate 605 to rotate on the rotating seat 604. This causes the opening and closing plate 605, the folding plate 602, and the connecting rod 601 to tilt synchronously, so that the ring-shaped opening and closing plate 605 tilts and opens. When the traction rod 606 moves upward, it can drive the ring-shaped opening and closing plate 605 and the folding plate 602 to close.

[0048] When the hinged plate 605 is open, the gas from the hafnium tetrachloride reaction rises concentratedly from the opening formed by the hinged plate 605. Simultaneously, the hinged plate 605 disperses the opening into multiple areas, allowing the gas to rise in a dispersed manner, preventing the formation of a single upward channel within the furnace, reducing airflow impact, minimizing local eddies and stagnation, and accelerating the gas's upward velocity. However, the turbulence created by the rising airflow leads to the dispersion of impurity particles; heavier impurity particles have reduced suspension capacity and do not rise with the airflow. When the hinged plate 605 is closed, the area of ​​the upward airflow channel decreases, the gas upward velocity decreases, limiting heat loss and contributing to better heat dissipation within the furnace body. Maintaining a high temperature inside the furnace promotes the vaporization of hafnium tetrachloride, allowing more hafnium tetrachloride to exist in gaseous form, increasing the gas concentration, and further improving the reaction rate. During this process, the gas will accumulate in a smaller space, forming a stronger upward airflow. This upward airflow will carry large particulate impurities away from the bottom, preventing large particulate impurities from accumulating for a long time. The mesh of the opening and closing plate 605 blocks some of the large particulate impurities carried by the airflow, allowing large particulate impurities to settle faster without adhering. It also prevents a large number of large particulate impurities from entering the gas collection pipe 9, thus better separating hafnium tetrachloride gas and impurity particles.

[0049] By dynamically adjusting the opening and closing state of the opening and closing plate 605, the reaction conditions inside the furnace can be adjusted in a timely manner, which will have a certain impact on the temperature and pressure inside the purification furnace, thus avoiding the situation where hafnium tetrachloride fails to be fully vaporized and a large amount of impurities are deposited, so as to maintain the stability and efficiency of the reaction purification.

[0050] See Figures 2-7 It is known that a rotating block 22 with a movable sleeve structure is fixed to the middle of the side of the folding plate 602 near the opening and closing plate 605. A protrusion 23 is fixed to the outside of the rotating block 22. An arc plate 24 is fixed to the surface of the folding plate 602 on both sides of the rotating block 22. An arc groove 25 for the arc plate 24 to slide is opened inside the opening and closing plate 605. A stop block 21 with annularly distributed extrudable protrusions 23 is fixed to the surface of the second guide ring 18 to drive the rotating block 22 to rotate. The stop block 21 is arc-shaped. The folding plate 602 is triangular.

[0051] In specific implementation, when the opening and closing plate 605 tilts and opens to the stop 21 near the second guide ring 18, as the opening and closing plate 605 continues to tilt, the stop 21 squeezes the protrusion 23, causing the protrusion 23 to drive the rotating block 22 to rotate on the opening and closing plate 605, causing the sharp corner of the folding plate 602 to tilt upward. At the same time, the folding plate 602 drives the arc plate 24 to slide in the arc groove 25, guiding the rotation of the folding plate 602. The tilting of the folding plate 602 can tilt the furnace body 1 to pour material. When impurities fall from the bottom of the furnace, the impurities first collide with the ring-shaped folding plates 602, reducing the falling speed of large particles of impurities and reducing the impact force of large particles of impurities on the furnace opening. It can also disperse large particles of impurities and small particles that are agglomerated or adhered together, while buffering smaller particles of impurities to prevent the impact force of pouring out from generating a large amount of dust, improving the working environment and protecting the health of operators.

[0052] See Figures 3-6 and Figures 10-13 It is known that an electric push rod 12 for pushing the transmission mechanism 8 to rise and fall is installed in the middle of the furnace cover 11. The transmission mechanism 8 includes a lifting block 803 connected to a ring-shaped traction rod 606. The top outer wall of the lifting block 803 is provided with a threaded part 26. A sleeve block 801 is threadedly sleeved on the outer side of the threaded part 26, and the sleeve block 801 is connected to the output end of the electric push rod 12. Guide rods 802 fixed on the inner wall of the furnace body 1 are slidably sleeved on both sides of the lifting block 803.

[0053] The guide rod 802 provides stable guidance for the up and down movement of the lifting block 803. The end of the lifting block 803 away from the sleeve block 801 is fixedly connected to the sleeve 804. Both sides of the top of the shaft 20 are fixed with spheres 27. The rotation of the spheres 27 drives the shaft 20 to drive the paddle plate 19 to rotate. The sleeve 804 has a rotating groove 28 inside that allows the spheres 27 to rotate one revolution in a spiral trajectory.

[0054] In practice, the sleeve block 801 and the threaded part 26 are threadedly connected, which facilitates the disassembly of the furnace cover 11 while also allowing the electric push rod 12 to disengage from the lifting block 803 without affecting the material feeding operation. The electric push rod 12 pushes the sleeve block 801 down, and the sleeve block 801 then drives the lifting block 803 down. At the same time, the two sides of the lifting block 803 slide longitudinally along the guide rod 802. While the lifting block 803 drives the traction rod 606 down, causing the opening and closing plate 605 to open, the lifting block 803 also drives the sleeve 804 down, and the sleeve 804 approaches... At the top of the shaft 20, the opening of the rotating groove 28 inside the sleeve 804 is aligned with the ball 27. As the sleeve 804 drives the rotating groove 28 to continue to descend, the rotating groove 28 squeezes the ball 27, causing the ball 27 to rotate along the spiral trajectory of the rotating groove 28. At the same time, the ball 27 drives the shaft 20 to rotate, which in turn drives the paddle plate 19 to rotate. The paddle plate 19 disperses the impurity particles deposited at the bottom of the furnace. The rotation of the paddle plate 19 is synchronized with the opening and closing of the opening and closing plate 605, which is beneficial for the rapid dispersion and discharge of impurities when tilting and pouring the impurities inside the furnace body 1.

[0055] In summary, when using this hafnium tetrachloride purification furnace, the furnace body 1 is continuously heated at high temperature by the heating cylinder 2 to provide the necessary high-temperature environment to promote the chemical reaction and purification process of hafnium tetrachloride. During the purification process, the gas supply sleeve 10 delivers reducing gas from inside the second shaft tube 7 into the inner cavity of the furnace body 1 to provide the reducing gas required for hafnium tetrachloride. At the same time, the opening and closing mechanism 6 is driven by the transmission mechanism 8 to dynamically adjust the opening and closing state of the opening and closing plate 605, which can adjust the reaction conditions inside the furnace in a timely manner, thus having a certain impact on the temperature and pressure inside the purification furnace. It also prevents large particulate impurities from rising, so as to maintain the stability and efficiency of the reaction purification. Furthermore, when tilting the furnace body 1 to pour material, the transmission mechanism 8 can open the opening and closing plate 605 synchronously with the rotation of the paddle 19, and the first guide ring 16, the second guide ring 18, and the baffle plate 602 buffer and disperse the poured impurities, thereby accelerating the material pouring and cleaning efficiency. The contents not described in detail in this specification are prior art known to those skilled in the art.

Claims

1. A purification furnace for hafnium tetrachloride, characterized in that: It includes a shaft (20) mounted on the bottom of the inner cavity of the furnace body (1) via a bearing. A paddle plate (19) is welded to the outer side of the shaft (20) to prevent the accumulation of impurities. A second guide ring (18) is welded to the middle of the inner cavity of the furnace body (1) to disperse and discharge impurities in a ring. A conical dispersion disc (29) with sharp corners at both ends is fixedly sleeved on the outer side of the end of the shaft (20) away from the paddle plate (19). The furnace body (1) has a support ring (17) welded on the inner wall above the second guide ring (18). An opening and closing mechanism (6) for adjusting the gas rising rate is installed above the support ring (17). A transmission mechanism (8) for adjusting the opening and closing state of the opening and closing mechanism (6) is provided in the middle of the opening and closing mechanism (6). The upper end of the furnace body (1) is connected to a sealed furnace cover (11) by a ring of bolts. A guide ring (16) is welded to the top of the inner cavity of the furnace body (1). The opening and closing mechanism (6) includes a rotating seat (604) fixed on the support ring (17) and arranged in a ring. An intermittent opening and closing plate (605) is movably sleeved on the outer side of the rotating seat (604). An inclined connecting rod (601) is fixed near the middle of the rotating seat (604) on the opening and closing plate (605). The inner side of the connecting rod (601) is provided with a strip groove (603), and a sliding block (607) that can slide back and forth is slidably sleeved inside the strip groove (603). A traction rod (606) that pulls the connecting rod (601) to tilt is fixedly welded to the outer side of the sliding block (607). The opening and closing plate (605) is provided with a triangular folding plate (602) at the narrow end near the center of the furnace body (1). The inner sides of the opening and closing plate (605) and the folding plate (602) are both provided with mesh holes for filtering large particles of impurities. An electric push rod (12) for pushing the transmission mechanism (8) to rise and fall is installed in the middle of the furnace cover (11). The transmission mechanism (8) includes a lifting block (803) connected to a ring-shaped traction rod (606). The top outer wall of the lifting block (803) is provided with a threaded part (26). The outer side of the threaded part (26) is threaded with a sleeve block (801), and the sleeve block (801) is connected to the output end of the electric push rod (12). The lifting block (803) is slidably sleeved with guide rods (802) fixed on the inner wall of the furnace body (1). The lifting block (803) is fixedly connected to a sleeve (804) at one end away from the sleeve block (801). Both sides of the top of the shaft (20) are fixed with spheres (27). The rotation of the spheres (27) drives the shaft (20) to rotate the paddle (19). The sleeve (804) has a rotating groove (28) inside that causes the spheres (27) to rotate once and has a spiral trajectory.

2. The purification furnace according to claim 1, characterized in that: The furnace body (1) is bolted to the outside of a heating cylinder (2) for continuous high-temperature heating. A first shaft tube (5) for gas flow is welded to one end of the furnace body (1), and a second shaft tube (7) for conveying reducing gas is welded to the other end of the furnace body (1). Both the first shaft tube (5) and the second shaft tube (7) are connected to the bracket (4) by bearings, and the bracket (4) is distributed at both ends of the furnace body (1). The base (3) is fixedly welded to the bottom of the bracket (4). The first shaft tube (5) is movably sleeved with a gas collection tube (9) at the end away from the furnace body (1), and the second shaft tube (7) is movably sleeved with a gas supply sleeve (10) at the end away from the furnace body (1).

3. The purification furnace according to claim 2, characterized in that: The outer side of the first shaft tube (5) is fixedly sleeved with a driven gear (15) that drives the furnace body (1) to rotate and tilt. One side of the driven gear (15) is meshed with a driving gear (13), and the driving gear (13) passes through the inner side of the bracket (4) through a bearing. One side of the bracket (4) is equipped with a motor (14) that is connected to the driving gear (13) through a coupling.

4. The purification furnace according to claim 1, characterized in that: The folding plate (602) has a rotating block (22) fixed in the middle of the side near the opening and closing plate (605), which is in a movable sleeve structure with the opening and closing plate (605). The outer side of the rotating block (22) has a protrusion (23), and the surfaces of the folding plate (602) located on both sides of the rotating block (22) have arc-shaped plates (24) fixed. The opening and closing plate (605) has an arc groove (25) for sliding of the arc plate (24), and the surface of the second guide ring (18) is fixed with annularly distributed compressible protrusions (23) that drive the rotating block (22) to rotate and form an arc-shaped stop (21).

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