A perpendicularity adjusting mechanism for micro-jet laser processing

Abstract

The application discloses a perpendicularity adjusting mechanism for micro-jet laser processing, which comprises a supporting assembly, a mounting assembly, a steel ball, a plurality of elastic connecting pieces and a driving assembly, and a first mounting groove is arranged on one side of the supporting assembly; the mounting assembly and the supporting assembly are arranged in a stacking mode in a first direction and have a gap therebetween, and a second mounting groove is arranged on the side of the mounting assembly facing the supporting assembly; the steel ball is arranged in the first mounting groove and the second mounting groove, and the mounting assembly has a rotation freedom around the center of the steel ball; the plurality of elastic connecting pieces are arranged around the periphery of the steel ball to connect the mounting assembly and the supporting assembly; and the driving assembly is arranged on the mounting assembly and connected with the supporting assembly. The perpendicularity adjusting mechanism for micro-jet laser processing can adjust the water jet angle of an optical head, so that the water jet is perpendicular to a processing surface, and when the processing surface is turned over, the water jet cutting positions of two sides of a workpiece to be processed are aligned, and the processing effect is good.

Description

Technical Field

[0001] This application relates to the field of microfluidic laser processing technology, and in particular to a verticality adjustment mechanism for microfluidic laser processing. Background Technology

[0002] Microjet laser processing technology is a precision machining technology that uses a water jet to guide a laser beam to cut and drill holes in the workpiece.

[0003] Water and air have different refractive indices. When a laser beam strikes the water-air interface at a certain angle, if the incident angle is less than the critical angle for total internal reflection, the laser will undergo total internal reflection and will not be transmitted. This confines the laser energy within the water jet, causing it to propagate along the direction of the water jet. After passing through a focusing lens, the laser enters the coupling water cavity through a protective window. By adjusting the distance between the focusing lens and the nozzle, the laser focus is positioned precisely at the center of the upper surface of the nozzle. It then enters a stable water jet. Utilizing the difference in refractive indices between water and air, the laser undergoes total internal reflection within the water jet, similar to the propagation method of traditional glass optical fibers. During processing, the laser beam focused at the nozzle is guided by a high-pressure water jet to the workpiece surface for machining. Because the laser energy is guided to the workpiece surface by the high-pressure water jet to complete the machining, the resulting cut is nearly parallel.

[0004] However, during the processing, the water jet and the processing surface are at an angle due to the non-vertical installation of the micro-jet optical head, resulting in non-parallel cutting kerfs, high surface roughness of the cutting section, and poor processing effect when flipping the workpiece, as the water jet cutting positions on both sides cannot be completely aligned. Summary of the Invention

[0005] The main purpose of this application is to provide a verticality adjustment mechanism for micro-jet laser processing, which aims to solve the problem of poor processing effect caused by the non-vertical installation of traditional micro-jet optical heads.

[0006] To achieve the above objectives, this application provides a verticality adjustment mechanism for microfluidic laser processing. This mechanism includes a support component, a mounting component, a steel ball, multiple elastic connectors, and a drive component. A first mounting groove is provided on one side of the support component. The mounting component and the support component are stacked in a first direction with a gap between them. The first direction is the same as the thickness direction of the support component. A second mounting groove is provided on the side of the mounting component facing the support component. An optical head is mounted on the mounting component. The steel ball passes through the first and second mounting grooves. The mounting component has the freedom to rotate around the center of the steel ball. Multiple elastic connectors are arranged around the periphery of the steel ball to connect the mounting component and the support component. The drive component is disposed on the mounting component and connected to the support component. The drive component drives the mounting component to rotate around a second direction and a third direction, where the second direction, the third direction, and the first direction are perpendicular to each other.

[0007] Optionally, the driving assembly includes a first sliding pin, a second sliding pin, a first driving part, and a second driving part. The first sliding pin is slidably engaged with the mounting assembly and has a degree of freedom to slide along the first direction. The first sliding pin and the steel ball are spaced apart in the second direction, and the end of the first sliding pin abuts against the support assembly. The second sliding pin is slidably engaged with the mounting assembly and has a degree of freedom to slide along the first direction. The second sliding pin and the first sliding pin are spaced apart in the third direction, and the end of the second sliding pin abuts against the support assembly. The first driving part is connected to the first sliding pin and provides a sliding driving force to the first sliding pin. The second driving part is connected to the second sliding pin and provides a sliding driving force to the second sliding pin.

[0008] Optionally, the support assembly has a U-shaped structure, comprising a first support leg, a second support leg, and a third support leg connected in sequence, with the first support leg and the third support leg both extending along the second direction; the mounting assembly has a U-shaped structure, comprising a first mounting leg, a second mounting leg, and a third mounting leg connected in sequence, with the first mounting leg and the third mounting leg both extending along the second direction; wherein, the steel ball is located between the first support leg and the first mounting leg.

[0009] Optionally, the steel ball is disposed in the region of the first mounting leg near the second mounting leg; the first sliding pin and the first driving part are both disposed at the end of the first mounting leg away from the second mounting leg; the second sliding pin and the second driving part are both disposed at the end of the third mounting leg away from the second mounting leg.

[0010] Optionally, the elastic connector is a spring and extends along the first direction; the support assembly and the mounting assembly have three connection areas, which are the areas where the two ends of the first mounting leg are located and the area where the end of the third mounting leg away from the second mounting leg is located; at least one spring is provided in each of the connection areas to connect the support assembly and the mounting assembly.

[0011] Optionally, on the first mounting leg, the steel ball is located between the two connecting areas.

[0012] Optionally, two springs are provided in the region where the first mounting leg is located away from the second mounting leg; two springs are provided in the region where the third mounting leg is located away from the second mounting leg.

[0013] Optionally, the verticality adjustment mechanism for micro-jets laser processing further includes a back plate and two legs. The back plate is bolted to an external machine tool. Both legs extend along the second direction and are fixed to the same side of the back plate. The two legs are spaced apart in the third direction. The first support leg and the third support leg are respectively fixed to one of the legs. The mounting assembly is located on the side of the support assembly away from the legs.

[0014] Optionally, a limiting groove is provided in the area where the support component abuts against the first sliding pin; the first sliding pin passes through the limiting groove and abuts against the support component; the limiting groove has a cross-section perpendicular to the second direction that is tapered with an upward opening.

[0015] Optionally, the verticality adjustment mechanism for micro-jets laser processing further includes two first cylinders and two second cylinders. The two first cylinders correspond to the first mounting leg and the third mounting leg, respectively. The first cylinder is located on the side of the corresponding mounting leg away from the support assembly. The first cylinder has a degree of freedom to extend and retract along the first direction and is fixed to the back plate. The first cylinder abuts against or separates from the mounting assembly in the first direction. The two second cylinders correspond to the first mounting leg and the third mounting leg, respectively. The second cylinder is fixed to the corresponding mounting leg and has a degree of freedom to extend and retract along the first direction. The second cylinder abuts against or separates from the support assembly in the first direction.

[0016] The verticality adjustment mechanism for micro-jet laser processing proposed in this application embodiment allows for the adjustment of the verticality of the mounting assembly by means of a first direction aligned with the direction of gravity, and a second direction perpendicular to the third direction. An optical head is vertically mounted on a mounting assembly, and a support assembly is mounted on a machine tool. With the water jet path of the optical head pointing downwards, adjusting the verticality of the optical head effectively adjusts the horizontality of the mounting assembly. This horizontality is achieved by driving the mounting assembly to rotate around the first and second directions via a drive assembly, ensuring that the water jet is perpendicular to the processing surface, resulting in a smooth and even cut. Furthermore, during flipping processing, the water jet cutting positions on both sides of the workpiece are aligned, leading to excellent processing results. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application;

[0018] Figure 2 for Figure 1 A structural schematic diagram from another perspective of the embodiment;

[0019] Figure 3 This is a schematic diagram of the main view structure of an embodiment of this application;

[0020] Figure 4 This is a top view of an embodiment of the present application.

[0021] Figure 5 This is a schematic diagram showing the structural breakdown of the sliding portion in an embodiment of this application;

[0022] Figure 6 This is a schematic diagram of the structure of the fixing part in an embodiment of this application (first view);

[0023] Figure 7 This is a schematic diagram of the structural breakdown of the fixing part in an embodiment of this application (second view);

[0024] Figure 8 This is a structurally disassembled schematic diagram (third view) of the fixing part in an embodiment of this application;

[0025] In the diagram: 1. Support assembly; 11. First mounting slot; 12. First support leg; 121. Limiting slot; 13. Second support leg; 14. Third support leg; 2. Mounting assembly; 21. Second mounting slot; 22. First mounting leg; 23. Second mounting leg; 24. Third mounting leg; 3. Steel ball; 4. Elastic connector; 5. Drive assembly; 51. First sliding pin; 52. Second sliding pin; 53. First drive unit; 54. Second drive unit; 61. Back plate; 62. Support leg; 71. First cylinder; 72. Second cylinder.

[0026] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0028] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0029] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0030] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0031] refer to Figures 1 to 8This application provides a verticality adjustment mechanism for micro-jets laser processing. The verticality adjustment mechanism may include a support component 1, a mounting component 2, a steel ball 3, multiple elastic connectors 4, and a drive component 5. The support component 1 has a first mounting groove 11 on one side. The mounting component 2 and the support component 1 are stacked in a first direction with a gap between them. The first direction is the same as the thickness direction of the support component 1. The mounting component 2 has a second mounting groove 21 on the side facing the support component 1, wherein an optical head is mounted on the mounting component 2. The steel ball 3 passes through the first mounting groove 11 and the second mounting groove 21, and the mounting component 2 has the freedom to rotate around the center of the steel ball 3. Multiple elastic connectors 4 are arranged around the periphery of the steel ball 3 to connect the mounting component 2 and the support component 1. The drive component 5 is disposed on the mounting component 2 and connected to the support component 1. The drive component 5 is used to drive the mounting component 2 to rotate around a second direction and a third direction, wherein the second direction, the third direction, and the first direction are perpendicular to each other.

[0032] The verticality adjustment mechanism for micro-jet laser processing proposed in this application embodiment allows for the adjustment of the verticality of the optical head by aligning the first direction with the direction of gravity and the second and third directions with a horizontal orientation perpendicular to each other. The optical head is vertically mounted on the mounting assembly 2, and the support assembly 1 is mounted on the machine tool. With the water jet path of the optical head pointing downwards, adjusting the verticality of the optical head is equivalent to adjusting the horizontality of the mounting assembly 2. The horizontality of the mounting assembly 2 can be adjusted by driving the mounting assembly 2 to rotate around the first and second directions via the drive assembly 5. This ensures that the water jet is perpendicular to the processing surface, resulting in a smooth and even cut. Furthermore, during flipping processing, the water jet cutting positions on both sides of the workpiece are aligned, leading to a good processing effect.

[0033] It should be noted that, as Figure 1 As shown, the first direction is the X direction, the second direction is the Y direction, and the third direction is the Z direction. In actual use, the first direction is the same as the direction of gravity. For ease of understanding, the following explanation will take the first direction as the direction of gravity as the example.

[0034] It should be understood that when observing whether the mounting component 2 is level, two levels can be set on the mounting component 2 for observation. One level extends along the second direction, and the other level extends along the third direction. When the bubbles of both levels are at the center position of their respective levels, it indicates that the mounting component 2 is level.

[0035] Of course, due to the assembly error between the optical head and the mounting component 2, the water jet from the optical head may not be perpendicular to the workpiece when the mounting component 2 is horizontal. In this case, the mounting component 2 can be adjusted by the drive component 5.

[0036] The mounting component 2 and the support component 1 are spherically fitted by steel balls 3, and the elastic connector 4 connects the mounting component 2 and the support component 1 to ensure that the mounting component 2 and the support component 1 will not separate.

[0037] When the drive component 5 drives the mounting component 2 to rotate around the first direction or the second direction, the mounting component 2 rotates around the center of the steel ball 3.

[0038] In addition, since the optical head requires a small adjustment angle and a low adjustment frequency, the amplitude and frequency of the rotation of the mounting component 2 around the steel ball 3 are both low, and there is no need to apply lubricating oil or other lubricating substances to the steel ball 3.

[0039] It should be noted that, taking the first mounting groove 11 as an example, since there is a gap between the mounting component 2 and the support component 1 to facilitate the rotation of the mounting component 2, and the steel ball 3 needs to cooperate with the first mounting groove 11, the first mounting groove 11 is not hemispherical, and the inner wall of the first mounting groove 11 can be one-third of the spherical shape.

[0040] The elastic connector 4 is always in a stretched state to provide a driving force for the mounting component 2 and the support component 1 to move closer to each other.

[0041] refer to Figure 1 and Figure 2 In an exemplary embodiment, the drive assembly 5 may include a first sliding pin 51, a second sliding pin 52, a first drive part 53, and a second drive part 54. The first sliding pin 51 is slidably engaged with the mounting assembly 2 and has a degree of freedom to slide in a first direction. The first sliding pin 51 and the steel ball 3 are spaced apart in a second direction, and the end of the first sliding pin 51 abuts against the support assembly 1. The second sliding pin 52 is slidably engaged with the mounting assembly 2 and has a degree of freedom to slide in the first direction. The second sliding pin 52 and the first sliding pin 51 are spaced apart in a third direction, and the end of the second sliding pin 52 abuts against the support assembly 1. The first drive part 53 is connected to the first sliding pin 51 and provides a sliding driving force to the first sliding pin 51. The second drive part 54 is connected to the second sliding pin 52 and provides a sliding driving force to the second sliding pin 52.

[0042] Specifically, when it is necessary to drive the mounting component 2 to rotate around a third direction, the first drive unit 53 and the second drive unit 54 can be activated simultaneously, so that the first drive unit 53 and the second drive unit 54 drive the first sliding pin 51 and the second sliding pin 52 to extend or shorten synchronously. When the first sliding pin 51 and the second sliding pin 52 extend synchronously, they will push the mounting component 2 to rotate around a third direction. At this time, each elastic connector 4 is stretched. When the first sliding pin 51 and the second sliding pin 52 shorten synchronously, the elastic connector 4 will pull the mounting component 2 to tilt around a third direction.

[0043] It should be noted that the first drive unit 53 and the second drive unit 54 can be adjusted normally even if they do not work synchronously. However, it is easier to understand to explain the situation in terms of the first drive unit 53 and the second drive unit 54 working synchronously when the mounting component 2 rotates around a third direction.

[0044] Furthermore, when it is necessary for the mounting component 2 to rotate around the second direction, the second drive unit 54 is activated to drive the second sliding pin 52 to extend or shorten, thereby driving the mounting component 2 to rotate around the second direction. Specifically, when the second sliding pin 52 extends or shortens, the working state of the elastic connector 4 is similar to that described above, and will not be repeated here.

[0045] It should be noted that the shortening of the first sliding pin 51 here refers to the process of the first sliding pin 51 gradually retracting into the mounting component 2. The same applies to the second sliding pin 52, which will not be described in detail here.

[0046] In addition, three non-collinear points define a plane, and the mounting component 2 can be stabilized by contacting the support component 1 at three locations: the first sliding pin 51, the second sliding pin 52, and the steel ball 3.

[0047] It should be noted that, taking the first sliding pin 51 and the first driving part 53 as examples, there are many traditional solutions for how the first sliding pin 51 slides and engages with the mounting component 2, which will not be elaborated here. For example, a hole can be made in the mounting component 2, and a linear bearing can be installed in the hole to engage with the first sliding pin 51, etc. In addition, the first driving part 53 can be a motor-related structure. The operation of the motor can be converted into the sliding of the first sliding pin 51 through a transmission mechanism. There are many similar transmission mechanisms, which will not be elaborated here. For example, a threaded rod can be fixed on the output shaft of the motor, and the threaded rod can be threadedly connected to the first sliding pin 51, etc. The rotation of the motor can be converted into the sliding of the first sliding pin 51 through the threaded engagement.

[0048] refer to Figure 1 , Figures 4-8 In an exemplary embodiment, the support component 1 has a U-shaped structure and may include a first support leg 12, a second support leg 13, and a third support leg 14 connected in sequence, with the first support leg 12 and the third support leg 14 both extending along a second direction; the mounting component 2 has a U-shaped structure and may include a first mounting leg 22, a second mounting leg 23, and a third mounting leg 24 connected in sequence, with the first mounting leg 22 and the third mounting leg 24 both extending along a second direction; wherein, the steel ball 3 is located between the first support leg 12 and the first mounting leg 22.

[0049] It should be noted that a solution for adding a backplate 61 and a leg 62 will be added later. Therefore, for ease of load-bearing, in the first direction, the support component 1 is set above the leg 62, and the mounting component 2 is set above the support component 1. In fact, the mounting component 2 can also be set below the support component 1, and the optical head can be installed below the mounting component 2. For ease of understanding, the following explanation will take the example of the mounting component 2 being set above the support component 1.

[0050] Specifically, such as Figure 4 As shown, the U-shaped support component 1 and the U-shaped mounting component 2 are stacked, that is, the first mounting leg 22 is above the first support leg 12, and the second mounting leg 23 and the third mounting leg 24 are arranged in the same way.

[0051] It should be understood that the U-shaped support component 1 and mounting component 2 facilitate the installation of the optical head, wiring, and water jet operation, etc.

[0052] Among them, the steel ball 3 is located between the first support leg 12 and the first mounting leg 22, that is, the first mounting groove 11 is set on the first support leg 12 and the second mounting groove 21 is set on the first mounting leg 22.

[0053] refer to Figure 1 and Figure 4 In an exemplary embodiment, a steel ball 3 is disposed in the region of the first mounting leg 22 near the second mounting leg 23; the first sliding pin 51 and the first driving part 53 are both disposed at the end of the first mounting leg 22 away from the second mounting leg 23; the second sliding pin 52 and the second driving part 54 are both disposed at the end of the third mounting leg 24 away from the second mounting leg 23.

[0054] Specifically, such as Figure 1 and Figure 4 As shown, the steel ball 3, the first sliding pin 51, and the second sliding pin 52 are respectively set at three of the four apex corners of the U-shaped mounting component 2. The first drive part 53 is set corresponding to the first sliding pin 51, and the second drive part 54 is set in the same way. With such a position setting, when the first sliding pin 51 and / or the second sliding pin 52 are extended or shortened, even if the gap between the mounting component 2 and the support component 1 is small, the range of rotation of the mounting component 2 around the steel ball 3 can be maximized to increase the adjustment range of the verticality adjustment mechanism.

[0055] refer to Figure 4 In an exemplary embodiment, the elastic connector 4 is a spring and extends along a first direction; there are three connection areas between the support assembly 1 and the mounting assembly 2, the three connection areas being the areas where the two ends of the first mounting leg 22 are located and the area where the end of the third mounting leg 24 away from the second mounting leg 23 is located; at least one spring is provided in each connection area to connect the support assembly 1 and the mounting assembly 2.

[0056] Specifically, the three connection areas are essentially the areas where the steel ball 3, the first sliding pin 51, and the second sliding pin 52 are located, respectively. By setting springs at the three connection areas, the stability of the mounting component 2 and the support component 1 can be effectively guaranteed.

[0057] refer to Figure 1 In an exemplary embodiment, the steel ball 3 is located between two connecting areas on the first mounting leg 22.

[0058] Specifically, the springs in these three connection areas are equivalent to being arranged around the outer periphery of the steel ball 3. When the mounting component 2 rotates around the center of the steel ball 3, the connection of the springs becomes more stable, that is, the rotation process of the mounting component 2 becomes more stable.

[0059] Furthermore, the spring force at the first sliding pin 51 and the second sliding pin 52 can be slightly larger, so that when the first sliding pin 51 and / or the second sliding pin 52 shorten, the spring at the corresponding position can effectively pull the mounting assembly 2 to tilt, that is, the end of the first mounting leg 22 and the third mounting leg 24 away from the second mounting leg 23 tilts downward.

[0060] Furthermore, such as Figure 2 As shown, two springs are provided in the area where the first mounting leg 22 is located away from the second mounting leg 23; two springs are provided in the area where the third mounting leg 24 is located away from the second mounting leg 23.

[0061] Thus, when the first sliding pin 51 and / or the second sliding pin 52 are shortened, the spring at the corresponding position can effectively pull the mounting assembly 2 to tilt.

[0062] refer to Figures 1-3 In an exemplary embodiment, the verticality adjustment mechanism for micro-jets laser processing may further include a back plate 61 and two legs 62. The back plate 61 is bolted to an external machine tool. Both legs 62 extend along a second direction and are fixed to the same side of the back plate 61. The two legs 62 are spaced apart in a third direction. The first support leg 12 and the third support leg 14 are respectively fixed to one of the legs 62. The mounting assembly 2 is located on the side of the support assembly 1 away from the legs 62.

[0063] Specifically, a backplate 61 and outriggers 62 are provided to support the support assembly 1. The backplate 61 is also connected to the external machine tool for easier installation.

[0064] refer to Figure 1 and Figure 2 In an exemplary embodiment, a limiting groove 121 is provided in the area where the support component 1 abuts against the first sliding pin 51; the first sliding pin 51 passes through the limiting groove 121 and abuts against the support component 1; the limiting groove 121 has a tapered cross section perpendicular to the second direction with an upward opening.

[0065] Specifically, the limiting groove 121 has an upward-opening conical cross-section perpendicular to the second direction. Thus, when the first sliding pin 51 is inserted into the limiting groove 121, the engagement between the first sliding pin 51 and the conical groove wall restricts the rotation of the mounting assembly 2 around an axis parallel to the first direction. In other words, the first sliding pin 51 limits the first mounting leg 22, preventing it from rotating around the first direction via the steel ball 3. This prevents the mounting assembly 2 from swaying around the first direction, thereby facilitating angle adjustment of the mounting assembly 2 and maintaining high adjustment accuracy.

[0066] refer to Figure 1 and Figure 2 In an exemplary embodiment, the verticality adjustment mechanism for microfluidic laser processing may further include two first cylinders 71 and two second cylinders 72. The two first cylinders 71 correspond to the first mounting leg 22 and the third mounting leg 24, respectively. The first cylinder 71 is located on the side of the corresponding mounting leg away from the support assembly 1. The first cylinder 71 has a degree of freedom to extend and retract in a first direction and is fixed to the back plate 61. The first cylinder 71 abuts against or separates from the mounting assembly 2 in the first direction. The two second cylinders 72 correspond to the first mounting leg 22 and the third mounting leg 24, respectively. The second cylinder 72 is fixed to the corresponding mounting leg and has a degree of freedom to extend and retract in the first direction. The second cylinder 72 abuts against or separates from the support assembly 1 in the first direction.

[0067] Specifically, taking the first cylinder 71 above the first mounting leg 22 and the second cylinder 72 mounted on the first mounting leg 22 as examples, after the angle of the mounting component 2 is adjusted, the first cylinder 71 extends and contacts the first mounting leg 22, so that the first mounting leg 22 is subjected to downward pressure. At this time, the second cylinder 72 extends and contacts the first support leg 12. Thus, the first mounting leg 22 is subjected to upward support force through the second cylinder 72. The first mounting leg 22 can be clamped and fixed by the first cylinder 71 and the second cylinder 72. The third mounting leg 24 is the same, which can fix the mounting component 2, prevent the mounting component 2 from shaking during operation, ensure the stability of the optical head, and thus ensure the processing quality.

[0068] It should be understood that when the angle of the mounting component 2 needs to be adjusted again, the first cylinder 71 and the second cylinder 72 can be retracted.

[0069] Furthermore, such as Figure 1As shown, a strip-shaped metal block can be set below the first cylinder 71, and the metal block extends along the second direction. In this way, the first cylinder 71 applies downward pressure to the mounting assembly 2 more evenly. Taking the first mounting leg 22 as an example, the first cylinder 71 forms a surface contact with the upper part of the first mounting leg 22. The lower part of the first mounting leg 22 is supported by the second cylinder 72 and the first support leg 12 through point contact. This makes the clamping effect of the first mounting leg 22 better and more stable. The same applies to the third mounting leg 24.

[0070] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A verticality adjustment mechanism for microfluidic laser processing, characterized in that, The verticality adjustment mechanism for microfluid laser processing, used for mounting an optical head, includes: The support component (1) has a first mounting groove (11) on one side; The mounting component (2) is stacked with the support component (1) in a first direction and there is a gap between them. The first direction is the same as the thickness direction of the support component (1). The mounting component (2) has a second mounting groove (21) on the side facing the support component (1). The optical head is mounted on the mounting component (2). A steel ball (3) is inserted into the first mounting groove (11) and the second mounting groove (21), and the mounting assembly (2) has the degree of freedom to rotate around the center of the steel ball (3); Multiple elastic connectors (4) are arranged around the periphery of the steel ball (3) to connect the mounting assembly (2) and the support assembly (1). A drive component (5) is disposed on the mounting component (2) and connected to the support component (1). The drive component (5) is used to drive the mounting component (2) to rotate about a second direction and a third direction. The second direction, the third direction and the first direction are perpendicular to each other. The driving component (5) includes: The first sliding pin (51) slides with the mounting component (2) and has the freedom to slide along the first direction. The first sliding pin (51) and the steel ball (3) are spaced apart in the second direction. The end of the first sliding pin (51) abuts against the support component (1). The second sliding pin (52) slides with the mounting component (2) and has the freedom to slide along the first direction. The second sliding pin (52) and the first sliding pin (51) are spaced apart in the third direction. The end of the second sliding pin (52) abuts against the support component (1). The first drive unit (53) is connected to the first sliding pin (51) and provides sliding driving force to the first sliding pin (51); The second drive unit (54) is connected to the second sliding pin (52) and provides sliding driving force to the second sliding pin (52); The support component (1) has a U-shaped structure. The support component (1) includes a first support leg (12), a second support leg (13), and a third support leg (14) connected in sequence. The first support leg (12) and the third support leg (14) both extend along the second direction. The mounting component (2) has a U-shaped structure and includes a first mounting leg (22), a second mounting leg (23), and a third mounting leg (24) connected in sequence. The first mounting leg (22) and the third mounting leg (24) both extend along the second direction. The steel ball (3) is located between the first support leg (12) and the first mounting leg (22); The elastic connector (4) is a spring and extends along the first direction; There are three connection areas between the support component (1) and the mounting component (2), which are the two ends of the first mounting leg (22) and the end of the third mounting leg (24) away from the second mounting leg (23); At least one spring is provided in each of the connection areas to connect the support assembly (1) and the mounting assembly (2).

2. The verticality adjustment mechanism for microfluidic laser processing as described in claim 1, characterized in that, The steel ball (3) is disposed in the area of ​​the first mounting leg (22) near the second mounting leg (23); The first sliding pin (51) and the first driving part (53) are both located at the end of the first mounting leg (22) away from the second mounting leg (23); The second sliding pin (52) and the second driving part (54) are both located at the end of the third mounting leg (24) away from the second mounting leg (23).

3. The verticality adjustment mechanism for microfluidic laser processing as described in claim 1, characterized in that, On the first mounting leg (22), the steel ball (3) is located between the two connecting areas.

4. The verticality adjustment mechanism for microfluidic laser processing as described in claim 1, characterized in that, Two springs are provided in the area where the first mounting leg (22) is located away from the second mounting leg (23); Two springs are provided in the area where the third mounting leg (24) is located away from the end of the second mounting leg (23).

5. The verticality adjustment mechanism for microjets laser processing as described in claim 1, characterized in that, The verticality adjustment mechanism for microfluid laser processing also includes: The back plate (61) is bolted to the external machine tool; Two legs (62) extend along the second direction and are fixed to the same side of the back plate (61), and the two legs (62) are spaced apart in the third direction; The first support leg (12) and the third support leg (14) are respectively fixed to a support leg (62), and the mounting component (2) is located on the side of the support component (1) away from the support leg (62).

6. The verticality adjustment mechanism for microfluidic laser processing as described in claim 1, characterized in that, The area where the support component (1) abuts against the first sliding pin (51) is provided with a limiting groove (121). The first sliding pin (51) passes through the limiting groove (121) and abuts against the support component (1); The limiting groove (121) has a tapered cross section perpendicular to the second direction with an upward opening.

7. The verticality adjustment mechanism for microfluidic laser processing as described in claim 5, characterized in that, The verticality adjustment mechanism for microfluid laser processing also includes: Two first cylinders (71) correspond to the first mounting leg (22) and the third mounting leg (24) respectively. The first cylinder (71) is located on the side of the corresponding mounting leg away from the support assembly (1). The first cylinder (71) has the freedom to extend and retract along the first direction and is fixed to the back plate (61). The first cylinder (71) abuts against or separates from the mounting assembly (2) in the first direction. Two second cylinders (72) correspond to the first mounting leg (22) and the third mounting leg (24) respectively. The second cylinder (72) is fixed on the corresponding mounting leg and has the freedom to extend and retract along the first direction. The second cylinder (72) abuts against or separates from the support assembly (1) in the first direction.

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