Interferometer rotation angle stroke testing device

Abstract

The invention relates to the technical field of laser interferometer testing, in particular to an interferometer rotation angle travel testing device. The supporting frame assembly is arranged at one end of the bottom plate. The interferometer positioning and adjusting assembly is arranged above the supporting frame assembly; the interferometer positioning and adjusting assembly comprises an interferometer mounting plate and an interferometer, and the interferometer is hung on the lower surface of the interferometer mounting plate; the guide rail is arranged at the other end of the bottom plate, and the reflector assembly is arranged on the guide rail in a sliding mode so that the reflector assembly can move in the direction close to the interferometer or away from the interferometer; the optical assembly can emit a light beam to a light inlet of the interferometer, and the light beam of a light outlet of the interferometer can vertically irradiate the reflector assembly. The device is high in measurement precision, multiple in measurement freedom degree, large in rotation angle measuring range and small in occupied space; the interferometer positioning and adjusting assembly can be quickly and repeatedly positioned, mounted and dismounted, and can be compatible with tests of interferometers of various models.

Description

Technical Field

[0001] This application relates to the field of laser interferometer testing technology, and in particular to an interferometer rotation stroke testing device. Background Technology

[0002] A laser interferometer is a high-precision measurement instrument based on the principle of light interference. It is widely used in industrial manufacturing, metrology and scientific research. After the laser interferometer is manufactured and integrated, a series of performance tests are usually required, among which the interferometer rotation stroke test is an important test item.

[0003] The current main testing technology and method for interferometer rotation stroke testing is the high-precision turntable reference method. This method uses a high-precision mechanical turntable as an angle reference, fixes the interferometer under test, mounts a reflector on the turntable, rotates the turntable, and records the turntable reading and the interferometer measurement signal value.

[0004] However, the above measurement methods have some drawbacks, namely: the turntable reference method cannot simulate the actual working conditions of the interferometer; when measuring various types of interferometers, a lot of time is required for debugging, resulting in high labor costs; and the incident light path of the interferometer cannot be finely adjusted. Summary of the Invention

[0005] This application provides an interferometer rotation stroke testing device, which is compatible with different types of interferometers and can measure the rotation stroke of the interferometer's optical axis and the signal consistency at different rotation angles of the interferometer's optical axes.

[0006] The interferometer rotation stroke testing device provided in this application includes optical components, a base plate, a mirror assembly, a guide rail, an interferometer positioning and adjustment assembly, and a support frame assembly; The support frame assembly is disposed at one end of the base plate; the interferometer positioning and adjustment assembly is disposed above the support frame assembly; The interferometer positioning and adjustment assembly includes an interferometer mounting plate and an interferometer, with the interferometer suspended on the lower surface of the interferometer mounting plate; The guide rail is located at the other end of the base plate, and the reflector assembly is slidably mounted on the guide rail, allowing it to move toward or away from the interferometer. The optical component can emit a light beam into the light inlet of the interferometer, and the light beam from the light outlet of the interferometer can be perpendicularly incident on the mirror component.

[0007] In a preferred embodiment, the interferometer positioning and adjustment assembly further includes a plurality of support columns; the support columns are disposed at various corners of the side of the interferometer mounting plate opposite to the interferometer.

[0008] In a preferred embodiment, the reflector assembly includes a reflector mounting base, a six-axis displacement stage, a guide rail mounting plate, a displacement stage mounting plate, and a combined reflector; The guide rail mounting plate is slidably connected to the guide rail via a slider at the bottom; The six-axis displacement stage is mounted on the guide rail mounting plate; The displacement stage mounting plate is disposed at the upper end of the six-axis displacement stage; A reflector mounting base is provided on the displacement stage mounting plate, and the combined reflector is installed thereon.

[0009] In a preferred embodiment, the support frame assembly includes a frame mounting plate, columns, and a frame base plate; Several frame base plates are connected and fixed to the base plate, several columns are respectively set on each of the frame base plates, the frame mounting plate is set on the upper end of the columns, and multiple positioning pins for positioning the interferometer positioning and adjustment components are set on the frame mounting plate.

[0010] In a preferred embodiment, the optical components include a laser generator, a dimmer, and an optical lens group; The optical mirror assembly includes several left-turning mirrors, vertical turning mirrors, and beam splitters respectively mounted on the base plate and the interferometer mounting plate. The laser emitted by the laser generator passes through the left-turning mirror group, the vertical turning mirror group, and the beam splitter and enters the light inlet of the interferometer, forming an optical path; Multiple integrated dimmers are disposed in the optical path.

[0011] In a preferred embodiment, the interferometer mounting plate is further provided with a plurality of pin sleeves.

[0012] In a preferred embodiment, guide rail limiting blocks are respectively provided at both ends of the guide rail to limit the position of the reflector assembly.

[0013] In a preferred embodiment, the interferometer rotation stroke testing device further includes a long strip mirror support frame disposed on the base plate, the upper end of the long strip mirror support frame is provided with a long strip mirror mounting plate, and a long strip mirror is disposed on the lower surface of the long strip mirror mounting plate.

[0014] In a preferred embodiment, a first handle is provided at each of the two ends of the base plate.

[0015] In a preferred embodiment, two second handles are provided on the side of the interferometer mounting plate opposite to the interferometer.

[0016] This application has the following beneficial effects: This device has high measurement accuracy, many degrees of freedom in measurement, a large angular range, and occupies little space. The interferometer positioning and adjustment assembly allows for quick and repeated positioning, installation, and disassembly, and is compatible with testing various models of interferometers. After the interferometer is installed offline, it is placed on the support frame assembly, allowing the interferometer to be inverted for measurement, effectively reducing the safety risks associated with disassembling the interferometer. The angles and positions of the incident and outgoing light beams of the interferometer can be adjusted by optical components to meet the requirement of precise incident light angle; furthermore, the mirror assembly can slide on the guide rail, thereby enabling measurements to be performed at multiple points at different distances. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the four-axis interferometer rotation stroke testing device provided in the embodiments of this application; Figure 2 A three-dimensional schematic diagram of the interferometer positioning and adjustment components; Figure 3 A three-dimensional schematic diagram of the supporting frame components; Figure 4 This is a 3D schematic diagram of the reflector assembly; Figure 5 A three-dimensional schematic diagram of the mounting components for a differential interferometer; Numbering on the map: 1-Laser generator; 2-Laser mounting plate; 3-Base plate; 4-Reflector assembly; 5-Interferometer positioning and adjustment assembly; 6-Guide rail; 7-Support frame assembly; 8-Integrated dimmer; 9-Left-turning mirror group; 10-Vertical turning mirror group; 11-Guide rail limit block; 12-First handle; 13-Interferometer mounting plate; 14-Support column; 15-Pin sleeve; 16-Second handle; 17-Beam splitter; 18-Four-axis interferometer; 19-Frame mounting plate; 20-Positioning pin; 21-Column; 22-Frame base plate; 23-Mirror mounting base; 24-Six-axis displacement stage; 25-Guide rail mounting plate; 26-Displacement stage mounting plate; 27-Combined mirror; 28-Elongated reflector mounting plate; 29-Elongated reflector; 30-Elongated reflector support frame; 31-Differential interferometer. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and labeled in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0026] like Figures 1 to 4 As shown, this embodiment provides an interferometer rotation stroke testing device, including an optical component, a base plate 3, a reflector component 4, a guide rail 6, an interferometer positioning and adjustment component 5, and a support frame component 7; The support frame assembly 7 is located at one end of the base plate 3; the interferometer positioning and adjustment assembly 5 is located above the support frame assembly 7. The interferometer positioning and adjustment 5-component includes an interferometer mounting plate 13 and an interferometer, with the interferometer suspended on the lower surface of the interferometer mounting plate 13; The guide rail 6 is set at the other end of the base plate 3, and the reflector assembly 4 is slidably mounted on the guide rail 6, so that it can move towards the interferometer or away from the interferometer. The optical components can emit a light beam into the light inlet of the interferometer, and the light beam from the light outlet of the interferometer can be perpendicularly incident on the mirror assembly 4.

[0027] Specifically, the interferometer used in this embodiment is a four-axis interferometer 18.

[0028] The support frame assembly 7 consists of a frame mounting plate 19, positioning pins 20, columns 21, and a frame base plate 22. The frame base plate 22 is placed at the bottom and positioned and fixed to the base plate 3. The lower ends of the four columns 21 are positioned and fixed to the frame base plate 22, and the frame mounting plate 19 is positioned and fixed to the upper ends of the four columns 21. Two positioning pins 20 are provided on the frame mounting plate 19 for positioning the interferometer positioning adjustment assembly 5.

[0029] The interferometer positioning and adjustment assembly 5 also includes four support columns 14; the four support columns 14 are located at each corner of the side of the interferometer mounting plate 13 opposite to the four-axis interferometer 18.

[0030] During installation of the four-axis interferometer 18, the interferometer positioning and adjustment assembly 5 is rotated 180°, at which point the support column 14 provides downward support. After the four-axis interferometer 18 is installed, the interferometer positioning and adjustment assembly 5 is rotated again and positioned on the support frame assembly 7, thus placing the four-axis interferometer 18 in a suspended state.

[0031] The reflector assembly 4 includes a reflector mounting base 23, a six-axis displacement stage 24, a guide rail mounting plate 25, a displacement stage mounting plate 26, and a combined reflector 27. The guide rail mounting plate 25 is slidably connected to the guide rail 6 through a slider at its bottom. The six-axis displacement stage 24 is disposed on the guide rail mounting plate 25, and the displacement stage mounting plate 26 is disposed on the upper end of the six-axis displacement stage 24. The reflector mounting base 23 is disposed on the displacement stage mounting plate 26, and the combined reflector 27 is mounted thereon.

[0032] The optical components include a laser generator 1, a dimmer 8, and an optical lens assembly; The optical mirror assembly includes several left-turning mirror group 9, vertical turning mirror group 10, and beam splitter 17, which are respectively mounted on the base plate 3 and the interferometer mounting plate 13. The laser generator 1 is mounted on the laser mounting plate 2 on one side of the base plate 3. After adjustment, it is independently mounted on the optical platform. The laser emitted by the laser generator 1 passes through the left-turning mirror group 9, the vertical turning mirror group 10 and the beam splitter 17 and enters the light inlet of the four-axis interferometer 18 to form an optical path; multiple integrated dimmers 8 are set in the optical path.

[0033] Specifically, it includes one integrated dimmer 8, one left-turning mirror group 9, and one vertical turning mirror group 10 mounted on the base plate. It also includes two integrated dimmers 8, one left-turning mirror group 9, one beam splitter 17, and three vertical turning mirror groups 10 mounted on the side of the interferometer mounting plate 13 opposite to the four-axis interferometer 18.

[0034] Of course, each optical element can be configured as needed to form different optical paths, which will not be listed here.

[0035] The optical components on the base plate 3 and the interferometer mounting plate 13 need to work together to adjust the angle of the optical path of the laser generator 1, ensuring that the optical path can enter the entrance aperture of the four-axis interferometer 18 perpendicularly. The light output from the four-axis interferometer 18 must be perpendicular to the combined reflector 27. To achieve this, the rotation angle of the six-axis displacement stage 24 and the integrated dimmer 8 on the interferometer mounting plate 13 need to be adjusted in conjunction.

[0036] In use, the quad-axis interferometer 18 is suspended on the interferometer mounting plate 13. After the laser beam from the laser generator 1 passes through the optical path mirror assembly, the angle of the beam can be changed by adjusting the integrated dimmer 8, so that the beam enters the light input point of the quad-axis interferometer 18 perpendicularly. Reflector assemblies 4 are placed at different positions opposite the light output of the quad-axis interferometer 18. The reflector assemblies can change the measurement distance along the guide rail 6; the combined reflector 27 can rotate with different degrees of freedom as needed. During measurement, first, the six-axis displacement stage 24 is rotated so that the light output from the quad-axis interferometer 18 is perpendicular to the combined reflector 27. Then, an oscilloscope is used to read the signal values ​​output by the quad-axis interferometer 18 at different rotation angles. When the signal value drops to a level that does not meet the requirements, the rotation angle at this point is considered to be the maximum travel of the interferometer's rotation angle. For the four-axis interferometer 18, the signal values ​​of the three-axis beams at different rotation angles are measured and compared in a table. The results in the table reflect the signal consistency of each optical axis of the interferometer at different rotation angles.

[0037] In a preferred embodiment, the interferometer mounting plate 13 is further provided with a plurality of pin sleeves 15.

[0038] In a preferred embodiment, guide rail limiting blocks 11 are respectively provided at both ends of the guide rail 6 to limit the position of the reflector assembly 4.

[0039] In a preferred embodiment, a first handle 12 is provided at each of the two ends of the base plate 3.

[0040] In a preferred embodiment, two second handles 16 are provided on the side of the interferometer mounting plate 13 facing away from the quadriaxial interferometer 18.

[0041] In another embodiment, the quadcopter interferometer 18 can be replaced with other types of interferometers, such as a differential interferometer 31. Testing the differential interferometer 31 requires the use of a long strip mirror 29. Therefore, this embodiment also includes a long strip mirror support frame 30 mounted on the base plate 3, with a long strip mirror mounting plate 28 at the upper end of the long strip mirror support frame 30 and a long strip mirror 29 mounted on the lower surface of the long strip mirror mounting plate 28.

[0042] This embodiment has the following advantages: This device has high measurement accuracy, many degrees of freedom in measurement, a large angular range, and occupies little space. The interferometer positioning and adjustment assembly allows for quick and repeated positioning, installation, and disassembly, and is compatible with testing various models of interferometers. After the interferometer is installed offline, it is placed on the support frame assembly, allowing the interferometer to be inverted for measurement, effectively reducing the safety risks associated with disassembling the interferometer. The angles and positions of the incident and outgoing light beams of the interferometer can be adjusted by optical components to meet the requirement of precise incident light angle; furthermore, the mirror assembly can slide on the guide rail, thereby enabling measurements to be performed at multiple points at different distances.

[0043] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An interferometer corner run test apparatus, characterized by, The optical assembly, the bottom plate, the mirror assembly, the guide rail, the interferometer positioning and adjusting assembly and the support frame assembly are included. The support frame assembly is arranged at one end of the bottom plate, and the interferometer positioning and adjusting assembly is arranged above the support frame assembly. The interferometer positioning and adjusting assembly includes an interferometer mounting plate and an interferometer, and the interferometer is hung on the lower surface of the interferometer mounting plate. The guide rail is arranged at the other end of the bottom plate, and the mirror assembly is slidably arranged on the guide rail so as to be capable of moving towards or away from the interferometer. The optical assembly is capable of emitting a light beam towards the light inlet of the interferometer, and the light beam emitted from the light outlet of the interferometer is capable of vertically irradiating the mirror assembly.

2. The interferometer corner stroke test device of claim 1, wherein, The interferometer positioning and adjusting assembly further includes a plurality of support columns, and the support columns are arranged at each corner of the side of the interferometer mounting plate away from the interferometer.

3. The interferometer corner stroke test apparatus of claim 1, wherein, The mirror assembly includes a mirror mounting seat, a six-axis displacement table, a guide rail mounting plate, a displacement table mounting plate and a combined mirror. The guide rail mounting plate is slidably connected with the guide rail through the slider at the bottom. The six-axis displacement table is arranged on the guide rail mounting plate. The displacement table mounting plate is arranged at the upper end of the six-axis displacement table. The mirror mounting seat is arranged on the displacement table mounting plate, and the combined mirror is arranged on the mirror mounting seat.

4. The interferometer corner stroke test apparatus of claim 1, wherein, The support frame assembly includes a frame mounting plate, a stand column and a frame bottom plate. A plurality of frame bottom plates are connected and fixed with the bottom plate, a plurality of stand columns are respectively arranged on each frame bottom plate, the frame mounting plate is arranged at the upper end of the stand column, and a plurality of positioning pins for positioning the interferometer positioning and adjusting assembly are arranged on the frame mounting plate.

5. The interferometer corner stroke test apparatus of claim 1, wherein, The optical assembly includes a laser generator, a comprehensive light adjuster and an optical lens group. The optical lens group includes a left turning mirror group, a vertical turning mirror group and a light splitting mirror, which are respectively arranged on the bottom plate and the interferometer mounting plate. The laser emitted by the laser generator passes through the left turning mirror group, the vertical turning mirror group and the light splitting mirror to enter the light inlet of the interferometer, thereby forming an optical path. A plurality of comprehensive light adjusters are arranged in the optical path.

6. The interferometer corner stroke test device of claim 1, wherein, A plurality of pin sleeves are further arranged on the interferometer mounting plate.

7. The interferometer corner stroke test device of claim 1, wherein, Guide rail limiting blocks for limiting the position of the mirror assembly are arranged at both ends of the guide rail.

8. The interferometer corner stroke test device of claim 1, wherein, A long strip mirror support frame is further arranged on the bottom plate, an upper end of the long strip mirror support frame is provided with a long strip mirror mounting plate, and a long strip mirror is arranged on the lower surface of the long strip mirror mounting plate.

9. The interferometer corner stroke test device of claim 1, wherein, First handles are arranged at both ends of the bottom plate.

10. The interferometer corner stroke test device of claim 1, wherein, Second handles are arranged at the side of the interferometer mounting plate away from the interferometer.

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