Dust removal device and dust removal method for single crystal furnace

Abstract

The invention provides a dust removal device and a dust removal method for a single crystal furnace, and relates to the technical field of dust removal. The dust removal device comprises a filtering tank, a mounting frame, a cloth bag assembly, a vibration assembly, a purging assembly, an ash extraction assembly, an oxidation gas inlet assembly, a vacuum assembly, a temperature sensor and a controller. The filtering tank is divided into a bottom cavity and a dust removal cavity. And the filter tank is provided with an access port. And the mounting frame is mounted in the dust removal chamber. The cloth bag assembly and the vibration assembly are both installed on the installation frame. And the purging assembly is communicated with the bottom cavity. And the ash pumping assembly is communicated with the bottom cavity. And the oxidation gas inlet assembly is connected into the filtering tank. And the vacuum assembly is communicated with the dust removal chamber. The temperature sensor is installed in the bottom cavity. And the controller is electrically connected with the vibration assembly, the purging assembly, the ash extraction assembly and the oxidation gas inlet assembly. Dust on the cloth bag assembly is shaken off through the vibration assembly, and the situation that the service life of a cloth bag is affected by long-term vibration is avoided. The invention further discloses a dust removal method for the single crystal furnace.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of dust removal, in particular to a dust removal device for a single crystal furnace and a dust removal method. BACKGROUND

[0002] In the single crystal rod industry, a large amount of oxides are generated in the process of drawing single crystal silicon rods by a single crystal furnace. The production and operation environment of the single crystal furnace needs to be kept in a vacuum and low pressure, so the vacuum pump needs to be continuously and stably operated. Therefore, there is an auxiliary device, i.e. an oxidation filter tank, between the single crystal furnace and the vacuum pump, which collects a large amount of oxides generated in the production process of the single crystal furnace in the bottom cavity of the tank.

[0003] The filtering principle of the oxidation filter tank is to isolate the waste generated in the process of drawing single crystal rods by three independent groups (12 bags in each group) of filter bags, to make the waste fully burn to form oxides by connecting compressed air, and to make the oxides gather at the bottom of the tank. In this process, part of the oxides will also adhere to the inner lining of the bag. The oxides are cleaned and dropped to the bottom of the tank by a telescopic cylinder at the top of the tank, which quickly extends and retracts to hit the bag mounting plate. The oxides are dropped by one-time compression and rebound of the hit group of bags. According to the program setting, the bag mounting plate is hit in turn and intermittently, which can ensure the ventilation of the bag during the production process of the single crystal furnace, reduce the vacuum resistance, and stabilize the low pressure environment in the furnace.

[0004] After the furnace is stopped, the oxides deposited in the bottom cavity need to be manually opened to the oxidation process, fully oxidized, and then opened to the oxidation process. The filter tank ash outlet is opened to the oxidation process, and the oxides are planed onto the ash receiving vehicle. After natural cooling, the oxides are treated.

[0005] The above-mentioned oxidation filter tank has the following problems in use:

[0006] 1. The bag mounting is hung and buckled on the mounting plate by the extension spring. Long-term extension and fatigue will cause the spring to break.

[0007] 2. The sealing of the cylinder installation position will age and cause the pressure leakage of the filter tank.

[0008] 3. Long-term vibration and pulling of the bag will reduce the service life of the bag.

[0009] 4. The oxides in the bottom cavity need to be cleaned manually, which has the risk of oxidation explosion and injury. SUMMARY

[0010] The present application provides a dust removal device for a single crystal furnace, which shakes off the dust on the bag assembly by the vibration assembly, avoiding the influence of long-term vibration on the service life of the bag. The present application also discloses a dust removal method for a single crystal furnace.

[0011] The technical scheme adopted by the present application is:

[0012] A dust removal device for a single crystal furnace, comprising:

[0013] A filter tank is divided into a bottom chamber and a dust removal chamber by a partition plate from bottom to top, a side wall of the bottom chamber is provided with an access port communicated with the single crystal furnace, and the partition plate is provided with a communication hole communicated between the bottom chamber and the dust removal chamber;

[0014] A mounting frame is mounted in the dust removal chamber, and the bottom of the mounting frame is connected with the top of the partition plate;

[0015] A bag assembly is mounted on the mounting frame;

[0016] A vibration assembly is mounted on the top of the mounting frame;

[0017] A purge assembly is communicated with the bottom chamber;

[0018] An ash extraction assembly is communicated with the bottom of the bottom chamber;

[0019] An oxidation gas inlet assembly is connected to the bottom chamber, the dust removal chamber and the ash extraction assembly;

[0020] A vacuum assembly is communicated with the dust removal chamber;

[0021] A temperature sensor is mounted in the bottom chamber;

[0022] A controller is electrically connected with the vibration assembly, the purge assembly, the ash extraction assembly and the oxidation gas inlet assembly.

[0023] Optionally, the mounting frame comprises:

[0024] A column is arranged in the middle of the top of the partition plate;

[0025] A plurality of edge supports are arranged on the top of the partition plate and arranged around the column;

[0026] A mounting plate is mounted on the top of the column and the edge supports, the vibration assembly is mounted on the top of the mounting plate, and the bag assembly is mounted below the mounting plate.

[0027] Optionally, the bag assembly comprises:

[0028] A hanging plate is mounted on the mounting frame by a connecting assembly;

[0029] A bag is hung on the bottom of the hanging plate, and the number of the bags matches the number of the communication holes.

[0030] Optionally, the vibration assembly comprises:

[0031] A linear bearing is mounted on the mounting frame;

[0032] a vibration rod, one end of which is connected with the cloth bag assembly, and the other end of which passes through the linear bearing and extends to the top of the mounting frame;

[0033] a lower sheath, which is sleeved on the vibration rod and located at the top of the linear bearing;

[0034] an upper sheath, which is sleeved on the vibration rod;

[0035] a second spring, which is arranged between the lower sheath and the upper sheath;

[0036] a motor support rod, which is installed at the top of the cloth bag assembly and extends to the top of the mounting frame;

[0037] a motor plate, which is installed at the top of the motor support rod;

[0038] a vibration motor, which is installed at the top of the motor plate and electrically connected with the controller.

[0039] Optionally, the blowing assembly comprises:

[0040] an air pump;

[0041] six blowing pipes, which are uniformly distributed on the filter tank and extend into the bottom chamber;

[0042] an air supply pipe, one end of which is in communication with the air pump;

[0043] three shunt pipes, one end of each of which is in communication with the other end of the air supply pipe, and one end of each of the six blowing pipes is in communication with the shunt pipes;

[0044] an air inlet valve, which is arranged on each of the shunt pipes;

[0045] wherein the controller is electrically connected with the air pump and the air inlet valve.

[0046] Optionally, the ash extraction assembly comprises:

[0047] an extraction pump, which is electrically connected with the controller;

[0048] an ash extraction pipe, one end of which is in communication with the bottom of the filter tank, and the other end of which is arranged obliquely upward and in communication with the extraction pump.

[0049] Optionally, the oxidation air inlet assembly comprises:

[0050] a first oxidation pipe, one end of which is installed on the side wall of the filter tank and extends into the dust removal chamber;

[0051] a second oxidation pipe, one end of which is installed on the side wall of the filter tank and extends into the bottom chamber;

[0052] A third oxidation pipe is installed at the bottom of the filter tank and extends into the bottom chamber;

[0053] An electromagnetic valve is installed on the first, second and third oxidation pipes, and the electromagnetic valve is electrically connected to the controller;

[0054] An oxygen supply assembly is in communication with the first, second and third oxidation pipes.

[0055] A dust removal method for a single crystal furnace, comprising the following steps:

[0056] S01, after the single crystal furnace is shut down, the electromagnetic valve installed on the first oxidation pipe is operated after the vacuum pump is stopped for 30 minutes, natural air intake is started and continues until the dust removal device is cleaned;

[0057] S02, after the vacuum pump is stopped for 60 minutes, the electromagnetic valve on the second oxidation pipe is operated to start air intake, and after 90 minutes of air intake oxidation, the operation is stopped;

[0058] S03, the vacuum pump is stopped for 150 minutes, the electromagnetic valve on the third oxidation pipe is operated, the air intake pressure is 0.6Mpa, the air intake amount is 26L / s, the air intake time is 0.5s, the interval is 15s, and the cycle is at least 90 minutes, then the operation is stopped;

[0059] S04, the temperature sensor detects the temperature in the filter tank, if the temperature is reduced to 10-20℃ within 30 minutes, it is judged that the third oxidation is completed, then step S05 is entered, if the temperature does not meet the temperature interval, it needs to wait for 90 minutes, then step S05 is entered;

[0060] S05, after the oxidation is completed, the suction pump is in an open state, and the air pump provides a gas source for the blowing pipe to complete the dust removal work.

[0061] Optionally, in step S01, the air intake amount is 3*10 -4 m³ / s.

[0062] Optionally, in step S05, during blowing, 6 blowing pipes are divided into 3 groups, two relatively arranged blowing pipes are a group, air intake is sequentially circulated for 10s, and the circulation is 40 times, and the dust removal action is completed.

[0063] Compared with the prior art, the beneficial effects of the present application are:

[0064] 1. The dust on the cloth bag assembly is shaken off by the vibration assembly, so that the service life of the cloth bag is affected.

[0065] 2、Adopt the vibration mode to shake off the dust, compared with the prior art to avoid telescopic cylinder in the bag when hitting the problem of incomplete sealing.

[0066] 3, the dust extraction assembly is arranged at the bottom of the filter tank, avoids manual cleaning, and causes the event of oxidizing explosion injury. BRIEF DESCRIPTION OF DRAWINGS

[0067] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0068] Figure 1 It is a schematic diagram of the three-dimensional structure of the dust removal device for single crystal furnace.

[0069] Figure 2 It is a schematic diagram of the structure of the mounting frame of the dust removal device for single crystal furnace.

[0070] Figure 3 It is a schematic diagram of the structure of the dust removal device for single crystal furnace.

[0071] Figure 4 It is a schematic diagram of the sectional structure of the dust removal device for single crystal furnace.

[0072] Figure 5 It is a schematic diagram of the local structure of the dust removal device for single crystal furnace.

[0073] Figure 6 It is a schematic diagram of the structure of the bottom chamber of the dust removal device for single crystal furnace.

[0074] Figure 7 It is a schematic diagram of the local plane structure of the dust removal device for single crystal furnace.

[0075] Figure 8 It is a schematic diagram of the structure of the purge assembly of the dust removal device for single crystal furnace.

[0076] Figure 9 It is a schematic diagram of the layout structure of the dust extraction assembly and the oxidation gas inlet assembly of the dust removal device for single crystal furnace.

[0077] Figure 10 It is a schematic diagram of the installation structure of the vibration assembly of the dust removal device for single crystal furnace.

[0078] Figure 11 It is a schematic diagram of the structure of the first oxidation pipe of the dust removal device for single crystal furnace.

[0079] Figure 12 It is a schematic diagram of the bottom structure of the first oxidation pipe.

[0080] Reference signs:

[0081] 1. Filter tank; 11, partition plate; 12, bottom chamber; 13, dust removal chamber; 14, inlet; 15, communication hole; 16, dust removal port;

[0082] 2. Mounting frame; 21, upright column; 22, edge support; 23, mounting plate;

[0083] 3. Cloth bag assembly; 31, hanging plate; 32, cloth bag; 33, connecting assembly; 331, connecting rod; 332, positioning nut; 333, first spring;

[0084] 4. Vibration assembly; 41, linear bearing; 42, vibration rod; 43, lower sheath; 44, upper sheath; 45, second spring; 46, motor support rod; 47, motor plate; 48, vibration motor;

[0085] 5. Purging assembly; 51, air pump; 52, purging pipe; 53, air feeding pipe; 54, shunt pipe; 55, air inlet valve;

[0086] 6. Dust extraction assembly; 61, suction pump; 62, dust extraction pipe;

[0087] 7. Oxidation air inlet assembly; 71, first oxidation pipe; 72, auxiliary pipe; 73, second oxidation pipe; 74, third oxidation pipe; 75, electromagnetic valve; 76, oxygen supply assembly;

[0088] 8. Vacuum assembly;

[0089] 9. Temperature sensor;

[0090] 10. Controller. DETAILED DESCRIPTION

[0091] In the following, only certain exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present application. Therefore, the drawings and the description are considered to be exemplary in nature rather than limiting.

[0092] In the description of the application, it is necessary to understand that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the application is used, or the orientation or positional relationship commonly understood by those skilled in the art, and is only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application.

[0093] In addition, the terms "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0094] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected, or it can be communicated; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0095] In the present application, unless otherwise explicitly specified and limited, the first feature "above" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "above", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0096] The following disclosure provides many different embodiments, or examples, for implementing different structures of the present application. For the purpose of simplifying the present application, the components and arrangements of the specific examples are described in the following. Of course, they are only examples and the purpose is not to limit the present application. In addition, the present application can repeatedly refer to the same reference numerals and / or reference letters in different examples, and such repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or arrangements discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art can realize the application of other processes and / or the use of other materials.

[0097] The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0098] As shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 , the embodiment of the present application provides a dust removal device for a single crystal furnace, comprising: a filter tank 1, a mounting frame 2, a bag assembly 3, a vibration assembly 4, a purge assembly 5, an ash extraction assembly 6, an oxidation gas inlet assembly 7, a vacuum assembly 8, a temperature sensor 9 and a controller 10. The filter tank 1 is divided into a bottom chamber 12 and a dust removal chamber 13 from bottom to top by a partition plate 11. The side wall of the bottom chamber 12 is provided with an inlet 14 communicating with the single crystal furnace. The partition plate 11 is provided with a communication hole 15 communicating the bottom chamber 12 and the dust removal chamber 13. The mounting frame 2 is mounted in the dust removal chamber 13, and the bottom thereof is connected with the top of the partition plate 11. The bag assembly 3 is mounted on the mounting frame 2. The vibration assembly 4 is mounted on the top of the mounting frame 2. The purge assembly 5 communicates with the bottom chamber 12. The ash extraction assembly 6 communicates with the bottom of the bottom chamber 12. The oxidation gas inlet assembly 7 is connected to the bottom chamber 12, the dust removal chamber 13 and the ash extraction assembly 6. The vacuum assembly 8 communicates with the dust removal chamber 13. The temperature sensor 9 is mounted in the bottom chamber 12. The controller 10 is electrically connected with the vibration assembly 4, the purge assembly 5, the ash extraction assembly 6 and the oxidation gas inlet assembly 7.

[0099] When the single crystal furnace is working, the vacuum pump communicating with the filter tank 1 works at the same time to suck the dust generated in the production process of the single crystal furnace into the filter tank 1. Then the dust is treated by the bag assembly 3 in the filter tank 1. After the dust is concentrated on the bag assembly 3, the dust on the bag assembly 3 is shaken off by the vibration assembly 4. The shaken-off dust enters the bottom chamber 12 through the communication hole 15 on the partition plate 11, and then is extracted to the outside by the ash extraction assembly 6.

[0100] In order to reduce the risk of flash explosion during ash extraction, the oxidation gas inlet assembly 7 is provided, which makes air enter the filter tank 1, and combust with the oxides accumulated in the filter tank 1, and continues for at least 120 min.

[0101] It should be noted that the vacuum assembly 8 is a prior art design, and its specific working principle and structure are not described here.

[0102] By shaking the dust on the bag assembly 3, the service life of the bag 32 is avoided by long-term vibration.

[0103] After the dust is shaken off by vibration, compared with the prior art, the problem of incomplete sealing of the telescopic cylinder when hitting the bag 32 is avoided.

[0104] The dust extraction assembly 6 is arranged at the bottom of the filter tank 1, avoiding manual cleaning and causing oxidizing explosion injury.

[0105] In one embodiment, as shown in Figure 2 , Figure 3 and Figure 4 , in order to facilitate the installation of the vibration assembly 4 and the bag assembly 3, the mounting frame 2 includes a stand 21, a plurality of edge supports 22 and a mounting plate 23. The stand 21 is arranged at the top of the partition plate 11. The plurality of edge supports 22 are arranged at the top of the partition plate 11 and around the stand 21. The mounting plate 23 is mounted at the top of the stand 21 and the edge supports 22. The vibration assembly 4 is mounted at the top of the mounting plate 23, and the bag assembly 3 is mounted below the mounting plate 23.

[0106] The plurality of edge supports 22 are arranged around the stand 21 to avoid the inclination of the mounting plate 23 during use, which causes the vibration assembly 4 and the bag assembly 3 mounted on the mounting plate 23 to not work normally, affecting the dust removal work of the filter tank 1.

[0107] In one embodiment, as shown in Figure 3 and Figure 4 , the bag assembly 3 includes a hanging plate 31 and a bag 32. The hanging plate 31 is mounted on the mounting plate 23 by a connecting assembly 33. The bag 32 is hung at the bottom of the hanging plate 31, and the number of bags 32 matches the number of communication holes 15.

[0108] More specifically, as shown in Figure 3 , Figure 4 and Figure 10 , the connecting assembly 33 includes a connecting rod 331, a positioning nut 332 and a first spring 333. One end of the connecting rod 331 is connected with the hanging plate 31, and the other end extends out of the mounting plate 23. The positioning nut 332 is mounted at the end of the connecting rod 331 extending out of the mounting plate 23. The first spring 333 is arranged between the mounting plate 23 and the positioning nut 332.

[0109] In use, the plurality of cloth bags 32 are hung from the bottom of the hanging plate 31 to form a separate assembly. The assembly is then connected to the mounting plate 23 by the connecting assembly 33. After connection, the cloth bags 32 mounted on the hanging plate 31 are driven to vibrate by the vibration assembly 4 connected to the hanging plate 31, so that the oxides attached to the inner lining of the cloth bags 32 fall off, reducing the ventilation resistance of the cloth bags 32.

[0110] During the vibration process, the first spring 333 cooperates with the vibration assembly 4 to achieve the falling off of the attachments in the cloth bags 32, avoiding the use of traditional methods to knock off the attachments in the cloth bags 32, and improving the service life of the cloth bags 32.

[0111] In one embodiment, as shown in Figure 3 、 Figure 4 and Figure 10 , the vibration assembly 4 includes a linear bearing 41, a vibration rod 42, a lower sleeve 43, an upper sleeve 44, a second spring 45, a motor support rod 46, an electrode plate 47, and a vibration motor 48. The linear bearing 41 is mounted on the mounting frame 2. One end of the vibration rod 42 is connected to the hanging plate 31 of the cloth bag assembly 3, and the other end passes through the linear bearing 41 and extends to the top of the mounting plate 23. The lower sleeve 43 is sleeved on the vibration rod 42 and located at the top of the linear bearing 41. The upper sleeve 44 is sleeved on the vibration rod 42. The second spring 45 is sleeved on the vibration rod 42 and located between the upper sleeve 44 and the lower sleeve 43. The motor support rod 46 is installed on the top of the hanging plate 31 of the cloth bag assembly 3 and extends above the mounting plate 23. The electrode plate 47 is installed on the top of the motor support rod 46 and located above the mounting plate 23 after installation. The vibration motor 48 is installed on the top of the electrode plate 47, and the vibration motor 48 is electrically connected to the controller 10.

[0112] When the cloth bags 32 need to be vibrated, the controller 10 controls the vibration motor 48 to start and transmits the vibration to the hanging plate 31 through the electrode plate 47 and the motor support rod 46, and the hanging plate 31 transmits the vibration to the cloth bags 32, so that the dust attached to the cloth bags 32 falls off.

[0113] It should be noted that after the vibration motor 48 is installed, its height is higher than the height of the cloth bag assembly 3, avoiding the influence of the dust entering the cloth bag assembly 3 on the service life of the vibration motor 48.

[0114] In one embodiment, as shown in Figure 4 、 Figure 8As shown, the blowing assembly 5 comprises an air pump 51, blowing pipes 52, an air inlet pipe, three branch pipes 54 and air inlet valves 55. The blowing pipes 52 are six in number and are uniformly distributed on the filter tank 1 and extend into the bottom chamber 12. One end of the air inlet pipe 53 is in communication with the air pump 51. One end of the three branch pipes 54 is in communication with the other end of the air inlet pipe, and two ends of the blowing pipes 52 are in communication with the branch pipes 54. The air inlet valves 55 are installed on the branch pipes 54. The controller 10 is electrically connected with the air pump 51 and the air inlet valves 55.

[0115] The blowing pipes 52 in the blowing assembly 5 are uniformly installed on the filter tank 1, and two oppositely arranged blowing pipes 52 form a group, and there are three groups in total. When the controller 10 controls the three air inlet valves 55 to be started in sequence, the blowing of the bottom chamber 12 is realized.

[0116] In one embodiment, as shown in Figure 5 , Figure 6 , Figure 7 and Figure 8 , a dust removal port 16 is arranged on the filter tank 1, and the dust removal port 16 is in communication with the bottom chamber 12. Five blowing pipes 52 are welded on the bottom side wall of the filter tank 1, and the welding height of the five blowing pipes 52 is 280 cm away from the bottom of the filter tank 1, and the five blowing pipes 52 are inserted into the bottom chamber 12 at an angle of 45°, and the insertion length is about 100 cm, and the end of the five blowing pipes 52 located in the bottom chamber 12 is sealed. A dust blowing hole of 5 mm is arranged on the bottom surface of the blowing pipe 52 towards the filter tank 1 at a distance of 1 cm from the end. The remaining one blowing pipe 52 is welded on one side of the dust removal port 16 and extends into the dust removal port 16, and after extending into the dust removal port 16, the blowing pipe 52 is aligned with the center of the bottom chamber 12.

[0117] The dust removal is more complete, and the residual dust in the bottom chamber 12 is reduced.

[0118] In use, the user can also observe the situation in the bottom chamber 12 through the dust removal port 16. If a large amount of dust accumulates in the bottom chamber 12, the user can also clean the dust out through the dust removal port 16.

[0119] It should be noted that a valve is arranged at the dust removal port 16, and the valve is in a closed state when the dust removal system is working. The valve can only be opened in specific situations.

[0120] In one embodiment, as shown in Figure 1 , Figure 9 , the dust extraction assembly 6 comprises a suction pump 61 and a dust extraction pipe 62. The suction pump 61 is electrically connected with the controller 10. One end of the dust extraction pipe 62 is in communication with the bottom of the filter tank 1, and the other end is arranged obliquely upward and is in communication with the suction pump 61.

[0121] A dust extraction pipe 62 is welded to the center of the bottom of the filter tank 1, which extends obliquely upward from the bottom of the filter tank 1 to the sidewall of the filter tank 1 for about 50 cm in length, and cooperates with the suction pump 61 connected to the dust extraction pipe 62 to realize automatic dust extraction.

[0122] During dust extraction, the controller 10 controls the operation of the suction pump 61, and the suction pump 61 extracts the dust in the bottom chamber 12 through the dust extraction pipe 62.

[0123] In one embodiment, as shown in Figure 9 , the oxidation air inlet assembly 7 includes a first oxidation pipe 71, a second oxidation pipe 73, a third oxidation pipe 74, an electromagnetic valve 75, and an oxygen supply assembly 76. One end of the first oxidation pipe 71 is installed on the sidewall of the filter tank 1 and extends into the dust removal chamber 13. One end of the second oxidation pipe 73 is installed on the sidewall of the filter tank 1 and extends into the bottom chamber 12. The third oxidation pipe 74 is installed at the bottom of the filter tank 1 and extends into the bottom chamber 12. The first oxidation pipe 71, the second oxidation pipe 73, and the third oxidation pipe 74 are all installed with the electromagnetic valve 75, which is electrically connected to the controller 10. The oxygen supply assembly 76 is in communication with the first oxidation pipe 71, the second oxidation pipe 73, and the third oxidation pipe 74.

[0124] Three times of oxidation makes air burn from the inside of the oxide accumulated at the bottom, which lasts for 120 minutes of oxidation, reducing the risk of flash explosion during automatic dust extraction.

[0125] In one embodiment, as shown in Figure 6 and Figure 9 , after the third oxidation pipe 74 is installed, the oxygen outlet of the third oxidation pipe 74 is located at the inlet of the dust extraction assembly 6. One end of the auxiliary pipe 72 is in communication with the third oxidation pipe 74, and the other end extends into the dust extraction assembly 6. More specifically, the third oxidation pipe 74 is welded to the hole opened at the bottom side of the filter tank 1, and the gas outlet end of the third oxidation pipe 74 is a ring pipe, which is installed at a distance of 122 cm from the bottom chamber 12, and the auxiliary pipe 72 is welded to the tangent position of the gas inlet end of the third oxidation pipe 74 and extends into the dust extraction pipe 62 of the dust extraction assembly 6. The second oxidation pipe 73 and the third oxidation pipe 74 both supply oxygen to the filter tank 1.

[0126] In another embodiment, as shown in Figure 11 and Figure 12 , the third oxidation pipe 74 is a spiral coil pipe, and the third oxidation pipe 74 is provided with an oxygen outlet towards the bottom sidewall of the bottom chamber 12.

[0127] This makes the oxide accumulated in the bottom chamber contact air more comprehensively and oxidize more fully.

[0128] A dust removal method for a single crystal furnace, comprising the following steps:

[0129] S01, after the single crystal furnace is shut down, the electromagnetic valve 75 installed on the first oxidation pipe 71 works after the vacuum pump stops for 30 minutes, and natural air intake starts, the air intake amount is 3*10-4m³ / s, and the process continues until the dust removal device is cleaned;

[0130] S02, after the vacuum pump stops running for 60 minutes, the electromagnetic valve 75 on the second oxidation pipe 73 works, and air intake (air pressure 0.3Mpa) starts, and continues for 90 minutes, and then stops working;

[0131] S03, the vacuum pump stops running for 150 minutes, the electromagnetic valve 75 on the third oxidation pipe 74 works, the air intake pressure is 0.6Mpa, the air intake amount is 26L / s, the air intake time is 0.5s, the interval is 15s, and the process is repeated for at least 90 minutes, and then stops working;

[0132] S04, the temperature sensor 9 detects the temperature in the filter tank 1, if the temperature drops to 10℃-20℃ within 30 minutes, it is judged that the three oxidation processes are completed, then enter step S05, if the temperature does not meet the temperature interval, it needs to wait for 90 minutes, and then enter step S05;

[0133] S05, after the oxidation is completed, the suction pump 61 is in an open state, and the air pump 51 provides air source for the blowing pipe 52 to complete the dust removal work. During the blowing, the six blowing pipes 52 are divided into three groups, two blowing pipes 52 arranged oppositely are a group, and the air intake is circulated for 10s, and the process is repeated for 40 times, and the dust removal action is completed.

[0134] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A dust removal device for a single crystal furnace, characterized in that, include: The filter tank is divided into a bottom chamber and a dust removal chamber from bottom to top by a partition plate. The side wall of the bottom chamber is provided with an inlet that communicates with the single crystal furnace. The partition plate is provided with a connecting hole that connects the bottom chamber and the dust removal chamber. The mounting bracket is installed inside the dust removal chamber, and its bottom is connected to the top of the partition plate; The cloth bag assembly is mounted on the mounting bracket; A vibration assembly is mounted on top of the mounting bracket; The purging assembly is in communication with the bottom chamber; The ash extraction assembly is connected to the bottom of the bottom chamber; An oxidation air intake assembly is connected to the bottom chamber, the dust removal chamber, and the ash extraction assembly. The vacuum assembly is connected to the dust removal chamber; A temperature sensor is installed in the bottom cavity; The controller is electrically connected to the vibration assembly, purging assembly, ash extraction assembly, and oxidation air intake assembly.

2. The dust removal device for a single crystal furnace according to claim 1, characterized in that, The mounting bracket includes: A column is installed at the top center of the partition plate; Multiple edge supports are disposed on the top of the partition plate and arranged around the column; The mounting plate is installed on top of the column and the edge bracket, the vibration assembly is installed on top of the mounting plate, and the bag assembly is installed below the mounting plate.

3. The dust removal device for a single crystal furnace according to claim 1, characterized in that, The bag assembly includes: The mounting plate is installed on the mounting bracket via a connecting assembly; The cloth bags are hung at the bottom of the hanging plate, and the number of the cloth bags matches the number of the connecting holes.

4. The dust removal device for a single crystal furnace according to claim 1, characterized in that, The vibration assembly includes: A linear bearing, mounted on the mounting bracket; A vibrating rod, one end of which is connected to the bag assembly, and the other end passes through the linear bearing and extends to the top of the mounting bracket; The lower sheath is fitted onto the vibrating rod and is located on top of the linear bearing; The upper protective sleeve is fitted onto the vibrating rod; A second spring is disposed between the lower sheath and the upper sheath; A motor support rod is mounted on top of the bag assembly and extends to the top of the mounting bracket; A motor plate is mounted on top of the motor support rod; A vibration motor is mounted on top of the motor plate and is electrically connected to the controller.

5. The dust removal device for a single crystal furnace according to claim 1, characterized in that, The purging assembly includes: Air pump; The purge pipe has six tubes, which are evenly distributed on the filter canister and extend into the dust removal chamber; An air supply pipe, one end of which is connected to the air pump; Three diversion pipes, one end of which is connected to the other end of the air intake pipe, and one end of the two purge pipes is connected to the diversion pipes; An intake valve is provided on each of the aforementioned split pipes; The controller is electrically connected to the air pump and the intake valve.

6. The dust removal device for a single crystal furnace according to claim 1, characterized in that, The ash extraction component includes: A suction pump is electrically connected to the controller; The ash extraction pipe is connected to the bottom of the filter tank, and the other end is inclined upward and connected to the suction pump.

7. The dust removal device for a single crystal furnace according to claim 1, characterized in that, The oxidation air intake assembly includes: The first oxidation tube has one end installed on the side wall of the filter tank and extends into the dust removal chamber; The second oxidation tube is installed at one end on the side wall of the filter tank and extends into the bottom chamber; A third oxidation tube is installed at the bottom of the filter tank and extends into the bottom chamber; The solenoid valve is installed in the first oxidation tube, the second oxidation tube, and the third oxidation tube, and the solenoid valve is electrically connected to the controller. The oxygen supply component is connected to the first oxidation tube, the second oxidation tube, and the third oxidation tube.

8. A dust removal method for a single crystal furnace, characterized in that, Includes the following steps: S01. After the single crystal furnace is shut down, the vacuum pump stops for 30 minutes, and then the solenoid valve installed on the first oxidation tube starts to allow natural air intake, which continues until the dust removal device is cleaned. S02. After the vacuum pump stops running for 60 minutes, the solenoid valve on the second oxidation tube starts to operate, and continues to oxidize for 90 minutes before stopping. S03. After the vacuum pump stops running for 150 minutes, the solenoid valve on the third oxidation tube will operate, with an intake pressure of 0.6 MPa, an intake flow rate of 26 L / s, an intake time of 0.5 s, an interval of 15 s, and a cycle of at least 90 minutes before stopping. S04. The temperature sensor detects the temperature inside the filter tank. If the temperature drops to between 10°C and 20°C within 30 minutes, it is determined that the three oxidation processes are complete, and then proceed to step S05. If the temperature does not meet this temperature range, it is necessary to wait for 90 minutes before proceeding to step S05. S05. After oxidation is complete, the suction pump is turned on, and the air pump provides air to the blow pipe to complete the dust removal work.

9. The dust removal method for a single crystal furnace according to claim 8, characterized in that, In step S01, the intake volume is 3*10 - 4 m³ / s.

10. The dust removal method for a single crystal furnace according to claim 8, characterized in that, In step S05, during the purging process, the six purging pipes are divided into three groups, with two purging pipes positioned opposite each other forming one group. The air is circulated for 10 seconds in sequence, and the cycle is repeated 40 times to complete the dust removal action.

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