Insulation paper multilayer film deposition device and preparation method of insulation paper

Abstract

The invention discloses an insulation paper multilayer film deposition device and a preparation method of insulation paper. The insulation paper multilayer film deposition device comprises a film deposition module assembly, a transfer assembly, a pulse power supply module, an atmosphere control module and a control monitoring module. The two thin film deposition modules are the first thin film deposition module and the second thin film deposition module respectively, each thin film deposition module comprises an electrode assembly, and the electrode assemblies comprise the first electrode assembly and the second electrode assembly. The first high-voltage electrode and the first ground electrode are arranged at intervals so that a first deposition space can be formed between the first high-voltage electrode and the first ground electrode, and the second high-voltage electrode and the second ground electrode are arranged at intervals so that a second deposition space can be formed between the second high-voltage electrode and the second ground electrode. According to the multilayer film deposition device for the insulation paper, the mechanical strength and the insulation performance of the insulation paper are improved at the same time.

Description

Technical Field

[0001] This invention relates to the field of insulating paper preparation, and in particular to an apparatus for depositing multilayer thin films of insulating paper and a method for preparing insulating paper. Background Technology

[0002] Cellulose insulating paper is a polymer material based on natural plant fibers. It possesses excellent renewability, environmental friendliness, and electrical insulation properties, and is widely used in high-voltage electrical equipment such as transformers, cables, and instrument transformers as a crucial component of oil-immersed insulation systems. Its porous, layered structure facilitates the penetration and distribution of insulating oil, forming a stable oil-paper composite insulation system. However, with the development of power equipment towards higher voltage, larger capacity, and more compact designs, higher requirements are placed on insulating paper materials in terms of insulation performance, mechanical strength, and dielectric properties. Traditional cellulose insulating paper, due to the hydrophilicity, heterogeneous microstructure, and chemical inertness of natural fibers, is prone to mechanical fatigue, hygroscopic expansion, and degradation of dielectric properties under long-term electric and thermal fields, severely affecting the stability and safety of equipment operation. To meet the performance requirements of modern electrical systems, researchers have begun exploring ways to enhance the functionality of cellulose paper through material modification or composite material technology, particularly by endowing it with new mechanical and electrical properties without compromising its main structure. This has become a key research direction in this field.

[0003] To address the aforementioned issues, researchers have focused on altering the structure and chemical composition of insulating paper, employing physicochemical methods such as process optimization, surface coating, and nano-doping to improve its overall performance. However, limited by the maturity of relevant theories and technologies, achieving coordinated improvement in dielectric matching and mechanical strength while controlling dielectric properties remains challenging. In contrast, modifying the surface physical structure and chemical composition of insulating paper, through surface treatment, can inhibit insulation failure at the oil-paper insulation interface while preserving the excellent properties of the insulating paper itself, offering a new approach to solving the aging problem of oil-paper insulation. Therefore, focusing on the surface characteristics of insulating paper and controlling its physicochemical properties to achieve a synergistic improvement in both dielectric and insulation performance is fundamental and crucial for enhancing the insulation performance of oil-paper.

[0004] Current technologies cannot simultaneously address the multi-layered needs of cellulose paper in terms of both mechanical reinforcement and improved insulation properties. There is a lack of a multi-layer functional coating method that can be implemented under normal pressure, is highly controllable, effectively leverages the porous structure of paper, and achieves synergistic enhancement of mechanical and electrical properties. Therefore, there is an urgent need to develop a highly efficient multi-layer deposition scheme based on atmospheric pressure low-temperature plasma technology to achieve high-performance functionalization of cellulose insulating paper. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one object of this invention is to provide a multilayer thin film deposition apparatus for insulating paper, which can improve the bonding force between the first film layer and the cellulose substrate, preventing peeling between the first film layer and the cellulose substrate; it enables the first and second film layers to undergo functional layering modification for mechanical reinforcement and insulation performance enhancement, respectively, while simultaneously improving the mechanical strength and insulation performance of the insulating paper, resulting in a more significant and balanced performance improvement; it can more fully enhance the mechanical strength and insulation performance of the insulating paper.

[0006] The present invention also proposes a method for preparing insulating paper using the above-mentioned insulating paper multilayer thin film deposition apparatus.

[0007] According to a first aspect of the present invention, an insulating paper multilayer thin film deposition apparatus includes: a thin film deposition module assembly comprising two thin film deposition modules spaced apart along a first direction, the two thin film deposition modules being a first thin film deposition module and a second thin film deposition module, the first thin film deposition module being used to deposit a first film layer and a second film layer on one side of a cellulose substrate, and the second thin film deposition module being used to deposit a first film layer and a second film layer on the other side of the cellulose substrate to form insulating paper, the thin film deposition module including a housing and an electrode assembly disposed within the housing, the housing having an air inlet formed thereon, the electrode assembly including a first electrode assembly and a second electrode assembly, the first electrode assembly including a first high-voltage electrode and a first ground electrode, the first high-voltage electrode and the first ground electrode being spaced apart to form a first deposition space between the first high-voltage electrode and the first ground electrode, the... The second electrode assembly includes a second high-voltage electrode and a second ground electrode, the second high-voltage electrode and the second ground electrode being spaced apart to form a second deposition space between the second high-voltage electrode and the second ground electrode; a transfer assembly for moving the cellulose substrate into the first deposition space to deposit the first film layer and for moving the cellulose substrate from the first deposition space to the second deposition space to deposit the second film layer; a pulse power module electrically connected to both the first high-voltage electrode and the second high-voltage electrode; an atmosphere control module connected to the air inlet and for supplying reactive gas into the housing through the air inlet; and a control and monitoring module electrically connected to the atmosphere control module, the transfer assembly, and the pulse power module, the control and monitoring module being used to control the atmosphere control module, the transfer assembly, and the pulse power module.

[0008] According to an embodiment of the present invention, the insulating paper multilayer thin film deposition apparatus includes a thin film deposition module, which includes an electrode assembly. This module can ionize gas to form plasma. When the plasma is deposited on the surface of a cellulose substrate to form a first film layer, some of the plasma penetrates into the interior of the cellulose substrate, forming an "embedded" high-bonding-strength thin film system. This significantly improves the material's stability and aging resistance. Compared to coating and nanoparticle loading methods in related technologies, this method enhances the bonding force between the first film layer and the cellulose substrate, preventing peeling. By including a first electrode assembly and a second electrode assembly, and sequentially depositing the first and second film layers on the cellulose substrate, the modification methods for the cellulose substrate are enriched. The first and second film layers are functionally modified for mechanical reinforcement and insulation performance enhancement, respectively, while simultaneously improving the mechanical strength and insulation performance of the insulating paper, resulting in a more significant and balanced performance improvement. By including two thin film deposition modules in the thin film deposition module assembly, which deposit film layers on both sides of the cellulose substrate respectively, the mechanical strength and insulation performance of the insulating paper can be more fully improved.

[0009] According to some embodiments of the present invention, the transfer assembly is located outside the housing and includes an unwinding shaft mechanism and a winding shaft mechanism. The unwinding shaft mechanism includes an unwinding shaft and an unwinding motor, and the winding shaft mechanism includes a winding shaft and a winding motor. One end of the cellulose substrate is connected to the unwinding shaft and the other end is connected to the winding shaft. The unwinding motor is connected to the unwinding shaft to drive the unwinding shaft to release the cellulose substrate, and the winding motor is connected to the winding shaft to drive the winding shaft to wind and receive the insulating paper. The housing of the first thin film deposition module is provided with a first feed. The second film deposition module has a first inlet and a first outlet. The first inlet is used to feed the cellulose substrate released by the unwinding shaft into the first deposition space of the first film deposition module. The first outlet is used to discharge the cellulose substrate from the second deposition space of the first film deposition module. The housing of the second film deposition module is provided with a second inlet and a second outlet. The second inlet is used to feed the cellulose substrate discharged from the first outlet into the first deposition space of the second film deposition module. The second outlet is used to discharge the insulating paper from the second deposition space of the second film deposition module.

[0010] According to some embodiments of the present invention, the first deposition space and the second deposition space of each thin film deposition module are arranged along the first direction, and both the first deposition space and the second deposition space extend along the second direction, which is perpendicular to the first direction; wherein, the first thin film deposition module is provided with the air inlet on one side along the second direction, and the first feed inlet and the first discharge outlet are provided on the other side along the second direction, and the unwinding shaft mechanism is located on the other side of the first thin film deposition module along the second direction and close to the first feed inlet; the second thin film deposition module is provided with the air inlet on one side along the second direction, and the second feed inlet and the second discharge outlet are provided on the other side along the second direction, and the winding shaft mechanism is located on the other side of the second thin film deposition module along the second direction and close to the second discharge outlet.

[0011] According to some embodiments of the present invention, the transfer assembly further includes a guide roller assembly, the guide roller assembly including a first guide roller and a second guide roller, the first guide roller being located within the housing of the first thin film deposition module and on one side of the electrode assembly along the second direction, the first guide roller being located between the first deposition space and the second deposition space and serving to guide and support the cellulose substrate; the second guide roller being located within the housing of the second thin film deposition module and on one side of the electrode assembly along the second direction, the second guide roller being located between the first deposition space and the second deposition space and serving to guide and support the cellulose substrate.

[0012] According to some embodiments of the present invention, in the second direction, the unwinding shaft mechanism and the winding shaft mechanism are located on different sides of the thin film deposition module; The transfer assembly further includes a guide roller assembly, which includes a third guide roller and a fourth guide roller. The third guide roller and the unwinding shaft mechanism are located on the same side of the first thin film deposition module along the second direction. The third guide roller is located on the side of the unwinding shaft mechanism along the first direction closer to the second thin film deposition module. The fourth guide roller and the winding shaft mechanism are located on the same side of the second thin film deposition module along the second direction. The fourth guide roller is located on the side of the winding shaft mechanism along the first direction closer to the first thin film deposition module. The third guide roller and the fourth guide roller are used to guide and support the cellulose substrate located between the first outlet and the second inlet.

[0013] According to some embodiments of the present invention, the first ground electrode and the second ground electrode of each of the thin film deposition modules are connected and integrally formed.

[0014] According to some embodiments of the present invention, the atmosphere control module includes an argon cylinder, a connecting pipeline, a first medium bottle, a second medium bottle, a third medium bottle, and a fourth medium bottle. The connecting pipeline includes a main pipe, a first branch pipe, a second branch pipe, a third branch pipe, and a fourth branch pipe. One end of the main pipe is connected to the gas outlet of the argon cylinder, and the other end of the main pipe is connected to the first branch pipe, the second branch pipe, the third branch pipe, and the fourth branch pipe. The first branch pipe is connected in series with the first medium bottle and a first airflow switch. The second branch pipe is connected in series with the second medium bottle and a second airflow switch. The third branch pipe is connected in series with the third medium bottle and a third airflow switch. The fourth branch pipe is connected in series with the fourth medium bottle and a fourth airflow switch. The air inlet of each thin film deposition module includes a first air inlet and a second air inlet. The ends of the first branch pipe and the second branch pipe away from the main pipe are connected to the first air inlets of the two thin film deposition modules. The ends of the third branch pipe and the fourth branch pipe away from the main pipe are connected to the second air inlets of the two thin film deposition modules.

[0015] According to some embodiments of the present invention, the control and monitoring module includes at least one of the following: a winding / unwinding speed control module, a gas flow rate control module, a device operation status display screen, a processing area space temperature monitoring module, a gas passage closure status monitoring and manual switching module, and a discharge parameter setting module; the winding / unwinding speed control module is connected to the transfer assembly and is used to control the speed at which the transfer assembly moves the cellulose substrate; the gas flow rate control module is electrically connected to the atmosphere control module and is used to control the flow rate of gas introduced into the atmosphere control module through the air inlet; the processing area space temperature monitoring module includes a circulating exhaust system for automatically or manually adjusting the temperature inside the housing; the gas passage closure status monitoring and manual switching module is electrically connected to the atmosphere control module and is used to control whether the atmosphere control module introduces gas into the air inlet, and the gas passage closure status monitoring and manual switching module has an automatic mode and a manual mode; the discharge parameter setting module is electrically connected to both the first high-voltage electrode and the second high-voltage electrode and is used to control the discharge parameters of the first high-voltage electrode and the second high-voltage electrode.

[0016] According to a second aspect of the present invention, a method for preparing insulating paper is provided, wherein the insulating paper is prepared using a multilayer thin film deposition apparatus according to a first aspect of the present invention. The method includes: a transfer component moving a cellulose substrate into a first deposition space of a first thin film deposition module; an atmosphere control module introducing a first gas into the first deposition space of the first thin film deposition module through the air inlet, the first gas comprising hexamethyldisiloxane and 3-aminopropyltriethoxysilane; energizing a first high-voltage electrode for a first set duration to ionize the first gas, thereby depositing a first film layer on one side of the cellulose substrate, the first set duration being 4-8 minutes; the transfer component transferring the cellulose substrate into which the first film layer is deposited from the first deposition space of the first thin film deposition module to a second deposition space of the first thin film deposition module; introducing a second gas into the second deposition space of the first thin film deposition module, the second gas comprising octamethylcyclotetrasiloxane and hexamethyldisilazane; energizing a second high-voltage electrode for a second set duration to ionize the second gas, thereby depositing a second film layer on the first film layer on the cellulose substrate. The second set duration is 4-8 minutes, and the voltages of the first high-voltage electrode and the second high-voltage electrode are different. The transfer component moves the cellulose substrate discharged from the first thin film deposition module to the first deposition space of the second thin film deposition module. The atmosphere control module introduces a first gas into the first deposition space of the second thin film deposition module through the air inlet. The first gas includes hexamethyldisiloxane and 3-aminopropyltriethoxysilane. The first high-voltage electrode is energized for a first set duration to ionize the first gas, so as to deposit the first film layer on the other side of the cellulose substrate. The first set duration is 4-8 minutes. The transfer component transfers the cellulose substrate with the first film layer deposited from the first deposition space of the second thin film deposition module to the second deposition space of the second thin film deposition module. A second gas is introduced into the second deposition space of the second thin film deposition module. The second gas includes octamethylcyclotetrasiloxane and hexamethyldisilazane. The second high-voltage electrode is energized for a second set duration to ionize the second gas, so as to deposit the second film layer on the first film layer on the cellulose substrate, so as to deposit the second film layer on the first film layer on the cellulose substrate. The second set duration is 4-8 minutes.

[0017] According to the method for preparing insulating paper according to embodiments of the present invention, by energizing a first high-voltage electrode to ionize a first gas and depositing a first film layer on one side of a cellulose substrate, and then energizing a second high-voltage electrode to ionize a second gas and depositing a second film layer on one side of the cellulose substrate, the modification methods for the cellulose substrate are enriched, allowing the first and second film layers to be functionally modified in layers to enhance mechanical reinforcement and insulation performance, respectively, thereby improving the mechanical strength and insulation performance of the insulating paper, resulting in a more significant and balanced performance improvement. By depositing the first and second film layers on one side of the cellulose substrate and then depositing the first and second film layers on the other side of the cellulose substrate, the mechanical strength and insulation performance of the cellulose substrate can be improved more fully.

[0018] According to some embodiments of the present invention, the flow rate of hexamethyldisiloxane is 0.15 L / min, the flow rate of 3-aminopropyltriethoxysilane is 0.05 L / min; the flow rate of octamethylcyclotetrasiloxane is 1.75 L / min, the flow rate of hexamethyldisilazane is 0.15 L / min; and / or, the first membrane layer comprises amino groups, and the second membrane layer comprises carbon, silicon, and oxygen.

[0019] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a simplified schematic diagram of a thin film deposition module assembly in an insulating paper multilayer thin film deposition apparatus according to some embodiments of the present invention; Figure 2 This is a simplified schematic diagram of the atmosphere control module in an insulating paper multilayer thin film deposition apparatus according to some embodiments of the present invention; Figure 3 This is a simplified schematic diagram of the control and monitoring module in an insulating paper multilayer film deposition apparatus according to some embodiments of the present invention; Figure 4 This is a schematic diagram showing the connection of various modules in the multilayer thin film deposition of insulating paper according to some embodiments of the present invention.

[0021] Figure label: 1. Thin film deposition module assembly; 10. Thin film deposition module; 11. First thin film deposition module; 12. Second thin film deposition module; 13. Housing; 130. Air inlet; 131. First air inlet; 132. Second air inlet; 133. First feed inlet; 134. First discharge outlet; 135. Second feed inlet; 136. Second discharge outlet; 14. Electrode assembly; 141. First electrode assembly; 1411. First high-voltage electrode; 1412. First ground electrode; 1413. First deposition space; 142. Second electrode assembly; 1421. Second high-voltage electrode; 1422. Second ground electrode; 1423. Second deposition space; 2. Transfer assembly; 21. Unwinding shaft mechanism; 22. Rewinding shaft mechanism; 23. Guide roller assembly; 231. First guide roller; 232. Second guide roller; 233. Third guide roller; 234. Fourth guide roller; 3. Atmosphere control module; 31. Argon cylinder; 32. Connecting pipeline; 320. Main pipe; 321. First branch pipe; 322. Second branch pipe; 323. Third branch pipe; 324. Fourth branch pipe; 331. First medium bottle; 332. Second medium bottle; 333. Third medium bottle; 334. Fourth medium bottle; 341. First airflow switch; 342. Second airflow switch; 343. Third airflow switch; 344. Fourth airflow switch; 5. Control and monitoring module; 51. Winding speed control module; 52. Gas flow rate control module; 53. Device operation status display screen; 54. Processing area space temperature monitoring module; 55. Gas passage opening and closing status monitoring and manual switching module; 56. Discharge parameter setting module. Detailed Implementation

[0022] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0023] The following is for reference. Figures 1-4 An apparatus for depositing multilayer thin films of insulating paper according to an embodiment of the present invention is described.

[0024] Reference Figures 1-4 According to a first aspect of the present invention, an insulating paper multilayer thin film deposition apparatus includes: a thin film deposition module assembly 1, a transfer assembly 2, a pulse power supply module, an atmosphere control module 3, and a control and monitoring module 5.

[0025] The thin film deposition module assembly 1 includes two thin film deposition modules 10 arranged at intervals along a first direction. The two thin film deposition modules 10 are a first thin film deposition module 11 and a second thin film deposition module 12. The first thin film deposition module 11 is used to deposit a first film layer and a second film layer on one side of a cellulose substrate, and the second thin film deposition module 12 is used to deposit a first film layer and a second film layer on the other side of the cellulose substrate to form an insulating paper. The thin film deposition module 10 includes a housing 13 and an electrode assembly 14 disposed within the housing 13. An air inlet 130 is formed on the housing 13. The electrode assembly 14 includes a first electrode assembly 1. 41 and second electrode assembly 142, the first electrode assembly 141 includes a first high voltage electrode 1411 and a first ground electrode 1412, the first high voltage electrode 1411 and the first ground electrode 1412 are arranged at intervals to form a first deposition space 1413 between the first high voltage electrode 1411 and the first ground electrode 1412, the second electrode assembly 142 includes a second high voltage electrode 1421 and a second ground electrode 1422, the second high voltage electrode 1421 and the second ground electrode 1422 are arranged at intervals to form a second deposition space 1423 between the second high voltage electrode 1421 and the second ground electrode 1422.

[0026] The transfer component 2 is used to move the cellulose substrate into the first deposition space 1413 to deposit a first film layer and to move the cellulose substrate from the first deposition space 1413 into the second deposition space 1423 to deposit a second film layer.

[0027] The pulse power module is electrically connected to both the first high-voltage electrode 1411 and the second high-voltage electrode 1421. The atmosphere control module 3 is connected to the air inlet 130 and is used to deliver the reaction gas into the housing 13 through the air inlet 130. The control and monitoring module 5 is electrically connected to the atmosphere control module 3, the transfer component 2 and the pulse power module. The control and monitoring module 5 is used to control the atmosphere control module 3, the transfer component 2 and the pulse power module.

[0028] For example, refer to Figure 4 The control and detection module controls the start or stop of the thin film deposition module 10, controls the start or stop of the atmosphere control module 3, and monitors and controls the status of the pulse power supply module. The pulse power supply module provides energy output to the thin film deposition module 10, and the parameters of the pulse power supply module are matched with those of the atmosphere control module 3.

[0029] To improve the mechanical and dielectric properties of cellulose insulating paper, related technologies employ methods such as chemical modification and nanomaterial filling for functionalization. However, these methods have several drawbacks, including complex processes, poor environmental friendliness, and a tendency to cause nanoparticle aggregation.

[0030] Atmospheric pressure low-temperature plasma technology has garnered widespread attention in the field of materials modification due to its advantages of operating at room temperature, requiring no vacuum, and offering high controllability. By adding different types of media to introduce functional groups or depositing thin films, the dielectric, mechanical, and insulating properties of insulating paper can be effectively improved. This allows for significant enhancement of the mechanical and insulating properties of cellulose paper through functionalized coatings while maintaining its structural characteristics, meeting the application requirements in high-performance electrical insulation. In contrast to related chemical modification processes, which are prone to embrittlement, warping, or coating breakage when applied to flexible paper-based materials, this invention does not introduce high-temperature or strong acid / alkali environments, maintains the flexibility of cellulose paper well, has a wide process window, and possesses good reproducibility and scalability potential.

[0031] Plasma surface treatment in related technologies often requires low pressure or even vacuum conditions, demanding sophisticated equipment and complex processes, and is difficult to adapt to flexible and porous materials. This invention, by including a first electrode assembly 141 and a second electrode assembly 142 in the electrode assembly 14, employs atmospheric pressure dielectric barrier discharge plasma technology to achieve plasma deposition reactions at room temperature and pressure, simplifying the equipment structure and providing excellent industrial adaptability and environmental friendliness.

[0032] For example, the device uses direct dielectric barrier discharge (DBD) to generate plasma through electrode discharge. Dielectric barrier discharge is currently the most common form of atmospheric pressure low-temperature plasma in industrial applications of material surface modification, and it is particularly suitable for processing wide-area planar materials. There are many ways to improve DBD discharge uniformity, enhance plasma chemical activity, and control material surface temperature, such as using pulsed excitation power supplies and optimizing operating parameters. This device uses a nanosecond pulse power supply to excite direct DBD electrode discharge, which can generate uniform plasma. Furthermore, by experimentally determining the gas flow rate and the type and concentration of added medium, the discharge uniformity can be further improved, and the activity and quantity of active particles generated by the discharge can be greatly increased.

[0033] For example, the device also includes a circulating exhaust cooling system. By controlling the discharge processing time of the first high-voltage electrode 1411 and the second high-voltage electrode 1421 and the power supply operating parameters, the material surface temperature during the discharge processing can be controlled. With the assistance of the circulating exhaust cooling system for temperature control, non-destructive plasma can be generated.

[0034] For example, the pulse power supply module uses a nanosecond pulse power supply with a voltage amplitude of 12kV, a repetition frequency of 5kHz, a pulse width of 800ns, and both the rise and fall edges are 100ns.

[0035] For example, the distance between the first high-voltage electrode 1411 and the first ground electrode 1412 is 1 mm; the distance between the second high-voltage electrode 1421 and the second ground electrode 1422 is 1 mm.

[0036] In addition, the cellulose substrate has multiple pores. By using atmospheric pressure low-temperature plasma technology to deposit a first film layer on the cellulose substrate, some of the protrusions in the first film layer can be accommodated in the pores of the cellulose substrate, forming an "embedded" high-bonding film system. Compared with the coating method and nanoparticle loading method in related technologies, this can improve the bonding force between the first film layer and the cellulose substrate and prevent the first film layer from peeling off from the cellulose substrate.

[0037] Furthermore, most modification methods in related technologies are single-faceted, often only improving one aspect of the insulating paper's performance, such as solely enhancing its mechanical or dielectric properties. This makes it difficult to achieve synergistic optimization of mechanical strength and electrical insulation performance. In this invention, the electrode assembly 14 comprises a first electrode assembly 141 and a second electrode assembly 142. A first film layer and a second film layer are sequentially deposited on a cellulose substrate. The first and second film layers are functionally layered to enhance mechanical and insulation performance, respectively. This results in a more systematic and targeted structure, leading to more significant and balanced performance improvements. For example, the first film layer can improve the mechanical properties of the insulating paper, while the second film layer can improve its insulation performance.

[0038] According to an embodiment of the present invention, the insulating paper multilayer film deposition apparatus includes a film deposition module 10, which includes an electrode assembly 14. This module ionizes gas to form plasma, allowing the plasma to deposit on the surface of a cellulose substrate to form a first film layer. Part of the plasma penetrates into the interior of the cellulose substrate, forming an "embedded" high-bonding-strength film system. This significantly improves the material's stability and aging resistance. Compared to coating and nanoparticle loading methods in related technologies, this method enhances the bonding force between the first film layer and the cellulose substrate, preventing peeling. By including a first electrode assembly 141 and a second electrode assembly 142 on the electrode assembly 14, the first and second film layers are deposited sequentially on the cellulose substrate. This enriches the modification methods for the cellulose substrate, allowing the first and second film layers to be functionally modified for mechanical reinforcement and insulation performance enhancement, respectively. This simultaneously improves the mechanical strength and insulation performance of the insulating paper, resulting in a more significant and balanced performance improvement. Furthermore, by including two film deposition modules 10 in the film deposition module assembly 1, which deposit film layers on both sides of the cellulose substrate respectively, the mechanical strength and insulation performance of the insulating paper can be more fully enhanced.

[0039] Reference Figure 1According to some embodiments of the present invention, the transfer assembly 2 is located outside the housing 13 and includes an unwinding shaft mechanism 21 and a winding shaft mechanism 22. The unwinding shaft mechanism 21 includes an unwinding shaft and an unwinding motor, and the winding shaft mechanism 22 includes a winding shaft and a winding motor. One end of the cellulose substrate is connected to the unwinding shaft and the other end is connected to the winding shaft. The unwinding motor is connected to the unwinding shaft to drive the unwinding shaft to release the cellulose substrate, and the winding motor is connected to the winding shaft to drive the winding shaft to wind and store the insulating paper.

[0040] The housing 13 of the first thin film deposition module 11 is provided with a first inlet 133 and a first outlet 134. The first inlet 133 is used to feed the cellulose substrate released by the unwinding spindle into the first deposition space 1413 of the first thin film deposition module 11. The first outlet 134 is used to discharge the cellulose substrate from the second deposition space 1423 of the first thin film deposition module 11. The housing 13 of the second thin film deposition module 12 is provided with a second inlet 135 and a second outlet 136. The second inlet 135 is used to feed the cellulose substrate discharged from the first outlet 134 into the first deposition space 1413 of the second thin film deposition module 12. The second outlet 136 is used to discharge the insulating paper from the second deposition space 1423 of the second thin film deposition module 12.

[0041] The unwinding motor drives the unwinding reel to rotate, releasing the insulating paper that has not undergone thin film deposition treatment. The insulating paper enters the first deposition space 1413 of the first thin film deposition module 11 from the first feed port 133 and is deposited with the first film layer. Then, the insulating paper moves from the first deposition space 1413 to the second deposition space 1423, where a second film layer is deposited. It then leaves the first thin film deposition module 11 from the first discharge port 134 and enters the second thin film deposition module 12 from the second discharge port 136. In the first deposition space 1413 of the second thin film deposition module 12, the first film layer is deposited. Then, the insulating paper moves from the first deposition space 1413 to the second deposition space 1423, where a second film layer is deposited to form the insulating paper. The insulating paper leaves the second thin film deposition module 12 from the second discharge port 136. The winding motor drives the winding reel to rotate, so that the insulating paper is finally wound into the winding reel.

[0042] By including an unwinding shaft mechanism 21 and a winding shaft mechanism 22 in the transfer assembly 2, it is convenient to store and hold cellulose substrates that have not undergone thin-film deposition treatment and insulating paper that has undergone thin-film deposition treatment, thereby improving space utilization. By connecting the unwinding motor to the unwinding reel, the unwinding motor can drive the unwinding reel to rotate, thereby releasing the cellulose substrate that has not undergone thin-film deposition treatment; by connecting the winding motor to the winding reel, the winding motor can drive the winding reel to rotate, thereby winding and storing the insulating paper that has undergone thin-film deposition treatment. At the same time, the cellulose substrate between the unwinding reel and the winding reel can be moved to the corresponding position to deposit a first film layer or a second film layer on the cellulose substrate.

[0043] Reference Figure 1 According to some embodiments of the present invention, the first deposition space 1413 and the second deposition space 1423 of each thin film deposition module 10 are arranged along a first direction, and both the first deposition space 1413 and the second deposition space 1423 extend along a second direction, which is perpendicular to the first direction. The first thin film deposition module 11 is provided with an air inlet 130 on one side along the second direction, and a first feed inlet 133 and a first discharge outlet 134 on the other side along the second direction. The unwinding shaft mechanism 21 is located on the other side of the first thin film deposition module 11 along the second direction and is close to the first feed inlet 133. The second thin film deposition module 12 has an air inlet 130 on one side along the second direction, and a second feed inlet 135 and a second discharge outlet 136 on the other side along the second direction. The winding shaft mechanism 22 is located on the other side of the second thin film deposition module 12 along the second direction and is close to the second discharge outlet 136.

[0044] By positioning the unwinding shaft mechanism 21 on the other side of the first thin film deposition module 11 along the second direction and close to the first feed port 133, the arrangement of the cellulose substrate can be facilitated, allowing the cellulose substrate to enter the first thin film deposition module 11 through the first feed port 133 after leaving the unwinding shaft mechanism 21. By positioning the winding shaft mechanism 22 on the other side of the second thin film deposition module 12 along the second direction and close to the second feed port 135, the arrangement of the insulating paper can be facilitated, allowing the insulating paper to enter the winding shaft mechanism 22 and be received after leaving the second feed port 135 of the second thin film deposition module 12.

[0045] By positioning the air inlet 130 of the first thin film deposition module 11 on opposite sides of the first feed inlet 133 and the first discharge outlet 134 along the second direction, interference between the air inlet pipe and the cellulose substrate passing through the first feed inlet 133 and the first discharge outlet 134 can be avoided. It can also prevent the gas from leaving the first thin film deposition module 11 through the first feed inlet 133 or the first discharge outlet 134 after entering the first thin film deposition module 11 without being evenly dispersed within the first thin film deposition module 11, thus allowing the gas to be more fully dispersed within the first thin film deposition module 11. By positioning the air inlet 130 of the second thin film deposition module 12 on opposite sides of the second feed inlet 135 and the second discharge outlet 136 along the second direction, interference between the air inlet pipeline and the cellulose substrate passing through the second feed inlet 135 and the second discharge outlet 136 can be avoided. It can also prevent the gas from leaving the second thin film deposition module 12 through the second feed inlet 135 or the second discharge outlet 136 after entering the second thin film deposition module 12 without being evenly dispersed within the second thin film deposition module 12, thus allowing the gas to be more fully dispersed within the second thin film deposition module 12.

[0046] Reference Figure 1 According to some embodiments of the present invention, the transfer assembly 2 further includes a guide roller assembly 23, which includes a first guide roller 231 and a second guide roller 232. The first guide roller 231 is located inside the housing 13 of the first thin film deposition module 11 and on one side of the electrode assembly 14 along the second direction. The first guide roller 231 is located between the first deposition space 1413 and the second deposition space 1423 and is used to guide and support the cellulose substrate. The second guide roller 232 is located inside the housing 13 of the second thin film deposition module 12 and on one side of the electrode assembly 14 along the second direction. The second guide roller 232 is located between the first deposition space 1413 and the second deposition space 1423 and is used to guide and support the cellulose substrate.

[0047] By including a first guide roller 231 in the guide roller assembly 23, the first guide roller 231 is located between the first deposition space 1413 and the second deposition space 1423 of the first thin film deposition module 11 and is used to guide and support the cellulose substrate. This allows the first guide roller 231 to support and guide the cellulose substrate, enabling the cellulose substrate to fully expand in the first deposition space 1413 or the second deposition space 1423 of the first thin film deposition module 11. This allows the first or second film layer deposited on the cellulose substrate to more fully cover the cellulose substrate, resulting in a more complete modification effect on the cellulose substrate. By including a second guide roller 232 in the guide roller assembly 23, the second guide roller 232 is located between the first deposition space 1413 and the second deposition space 1423 of the second thin film deposition module 12 and is used to guide and support the cellulose substrate. This allows the second guide roller 232 to support and guide the cellulose substrate, enabling the cellulose substrate to fully expand in the first deposition space 1413 or the second deposition space 1423 of the second thin film deposition module 12. This allows the first or second film layer deposited on the cellulose substrate to more fully cover the cellulose substrate, resulting in a more complete modification effect on the cellulose substrate.

[0048] Reference Figure 1 According to some embodiments of the present invention, in the second direction, the unwinding shaft mechanism 21 and the winding shaft mechanism 22 are located on different sides of the thin film deposition module 10; The transfer assembly 2 further includes a guide roller assembly 23, which includes a third guide roller 233 and a fourth guide roller 234. The third guide roller 233 is located on the same side of the first film deposition module 11 along the second direction as the unwinding shaft mechanism 21, and the third guide roller 233 is located on the side of the unwinding shaft mechanism 21 along the first direction closer to the second film deposition module 12. The fourth guide roller 234 is located on the same side of the second film deposition module 12 along the second direction as the rewinding shaft mechanism 22, and the fourth guide roller 234 is located on the side of the rewinding shaft mechanism 22 along the first direction closer to the first film deposition module 11. The third guide roller 233 and the fourth guide roller 234 are used to guide and support the cellulose substrate located between the first outlet 134 and the second inlet 135.

[0049] After the cellulose substrate leaves the first film deposition module 11 through the first outlet 134, it passes by the third guide roller 233 and the fourth guide roller 234 in sequence and enters the second film deposition module 12 through the second inlet 135. This allows the cellulose substrate to deposit the first and second film layers in the first film deposition module 11, and then turn over to enter the second film deposition module 12. This enables the cellulose substrate to deposit the first and second film layers on the other side in the second film deposition module 12, achieving deposition of the first and second film layers on both sides of the cellulose substrate, resulting in more complete modification of the cellulose substrate.

[0050] Reference Figure 1 According to some embodiments of the present invention, the first ground electrode 1412 and the second ground electrode 1422 of each thin film deposition module 10 are connected and integrally formed. By connecting the first ground electrode 1412 and the second ground electrode 1422 of each thin film deposition module 10 and integrally forming them, the space occupied by the first ground electrode 1412 and the second ground electrode 1422 can be saved, and the number of parts in the thin film deposition module 10 can be reduced, making the thin film deposition module 10 easier to install.

[0051] Reference Figure 2 According to some embodiments of the present invention, the atmosphere control module 3 includes an argon cylinder 31, a connecting pipeline, a first medium bottle 331, a second medium bottle 332, a third medium bottle 333, and a fourth medium bottle 334. The connecting pipeline includes a main pipe 320, a first branch pipe 321, a second branch pipe 322, a third branch pipe 323, and a fourth branch pipe 324. One end of the main pipe 320 is connected to the gas outlet of the argon cylinder 31, and the other end of the main pipe 320 is connected to the first branch pipe 321, the second branch pipe 322, the third branch pipe 323, and the fourth branch pipe 324. The first branch pipe 321 is connected in series with the first medium bottle 331 and the first gas flow switch 341. The second branch pipe 322 is connected in series with the first medium bottle 331 and the first gas flow switch 341. A second medium bottle 332 and a second airflow switch 342 are connected in series. A third medium bottle 333 and a third airflow switch 343 are connected in series on a third branch pipe 323. A fourth medium bottle 334 and a fourth airflow switch 344 are connected in series on a fourth branch pipe 324. The air inlet 130 of each thin film deposition module 10 includes a first air inlet 131 and a second air inlet 132. The ends of the first branch pipe 321 and the second branch pipe 322 that are away from the main pipe 320 are both connected to the first air inlet 131 of the two thin film deposition modules 10. The ends of the third branch pipe 323 and the fourth branch pipe 324 that are away from the main pipe 320 are both connected to the second air inlet 132 of the two thin film deposition modules 10.

[0052] For example, the first medium bottle 331 contains hexamethyldisiloxane (HMDSO), the second medium bottle 332 contains aminopropyltriethoxysilane (APTES), the third medium bottle 333 contains octamethylcyclotetrasiloxane (OMCTS), and the fourth medium bottle 334 contains hexamethyldisilazane (HMDSN). When depositing the first film layer on the cellulose substrate, the first gas flow switch 341 and the second gas flow switch 342 are opened to allow HMDSO and APTES to enter the thin film deposition module 10. When depositing the second film layer on the cellulose substrate, the third gas flow switch 343 and the fourth gas flow switch 344 are opened to allow OMCTS and HMDSN to enter the thin film deposition module 10.

[0053] By making each thin film deposition module 10's air inlet 130 include a first air inlet 131 and a second air inlet 132, and by connecting a first straight pipe and a second branch pipe 322 to the first air inlet 131, and by connecting a third branch pipe 323 and a fourth branch pipe 324 to the second air inlet 132, it is possible to introduce gases of different compositions when depositing different film layers on a cellulose substrate.

[0054] For example, the media in the first medium bottle 331, the second medium bottle 332, the third medium bottle 333 and the fourth medium bottle 334 are all liquid. The argon gas in the argon gas bottle 31 blows out the media contained in the first medium bottle 331, the second medium bottle 332, the third medium bottle 333 and the fourth medium bottle 334 by bubbling and carries the media into the thin film deposition module 10.

[0055] For example, each thin film deposition module 10 has an air outlet formed on its housing 13. Gas enters the thin film deposition module 10 through the first air inlet 131 or the second air inlet 132 and leaves the thin film deposition module 10 through the air outlet to maintain the air pressure balance inside the thin film deposition module 10.

[0056] Reference Figure 3 According to some embodiments of the present invention, the control and monitoring module 5 includes at least one of the following: a winding and unwinding speed control module 51, a gas flow rate control module 52, a device operation status display screen 53, a processing area space temperature monitoring module 54, a gas passage opening and closing status monitoring and manual switching module 55, and a discharge parameter setting module 56.

[0057] The unwinding / rewinding speed control plate 51 is connected to the transfer assembly 2 and is used to control the speed at which the transfer assembly 2 moves the cellulose substrate. The gas flow rate control plate 52 is electrically connected to the atmosphere control module 3 and is used to control the flow rate of the gas introduced into the atmosphere control module 3 through the air inlet 130.

[0058] The temperature monitoring module 54 for the processing area includes a circulating exhaust system for automatically or manually regulating the temperature inside the housing 13.

[0059] The airway patency monitoring and manual switching panel 55 is electrically connected to the atmosphere control module 3 and is used to control whether the atmosphere control module 3 introduces gas into the air inlet 130. The airway patency monitoring and manual switching panel 55 has an automatic mode and a manual mode, and relevant personnel can switch between the automatic mode and the manual mode by adjusting the airway patency monitoring and manual switching panel 55. For example, the atmosphere control module 3 has a first airflow switch 341, a second airflow switch 342, a third airflow switch 343, and a fourth airflow switch 344. In the automatic mode, the airway patency monitoring and manual switching panel 55 can automatically adjust the opening or closing of the first airflow switch 341, the second airflow switch 342, the third airflow switch 343, and the fourth airflow switch 344. In the manual mode, relevant personnel can manually adjust the opening or closing of the first airflow switch 341, the second airflow switch 342, the third airflow switch 343, and the fourth airflow switch 344 respectively.

[0060] The discharge parameter setting board 56 is electrically connected to both the first high-voltage electrode 1411 and the second high-voltage electrode 1421 and is used to control the discharge parameters of the first high-voltage electrode 1411 and the second high-voltage electrode 1421.

[0061] Reference Figures 1-4 According to a second aspect embodiment of the present invention, an insulating paper is prepared using an insulating paper multilayer thin film deposition apparatus according to a first aspect embodiment of the present invention. The method for preparing the insulating paper includes: The transfer component 2 moves the cellulose substrate into the first deposition space 1413 of the first thin film deposition module 11, and the atmosphere control module 3 introduces a first gas into the first deposition space 1413 of the first thin film deposition module 11 through the air inlet 130. The first gas includes hexamethyldisiloxane and 3-aminopropyltriethoxysilane. The first high-voltage electrode 1411 is energized for a first set time to ionize the first gas, thereby depositing a first film layer on one side of the cellulose substrate. The first set time is 4-8 minutes.

[0062] The transfer component 2 transfers the cellulose substrate for depositing the first film layer from the first deposition space 1413 of the first thin film deposition module 11 to the second deposition space 1423 of the first thin film deposition module 11, and introduces a second gas into the second deposition space 1423 of the first thin film deposition module 11. The second gas includes octamethylcyclotetrasiloxane and hexamethyldisilazane.

[0063] The second high-voltage electrode 1421 is energized for a second set duration to ionize the second gas, thereby depositing a second film layer on the first film layer on the cellulose substrate. The second set duration is 4-8 minutes. The voltages of the first high-voltage electrode 1411 and the second high-voltage electrode 1421 are different. The transfer assembly 2 moves the cellulose substrate discharged from the first thin film deposition module 11 to the first deposition space 1413 of the second thin film deposition module 12. The atmosphere control module 3 introduces the first gas into the first deposition space 1413 of the second thin film deposition module 12 through the air inlet 130. The first gas includes hexamethyldisiloxane and 3-aminopropyltriethoxysilane.

[0064] The first high-voltage electrode 1411 is energized for a first set time to ionize the first gas, thereby depositing and forming a first film layer on the other side of the cellulose substrate. The first set time is 4-8 minutes.

[0065] The transfer component 2 transfers the cellulose substrate for depositing the first film layer from the first deposition space 1413 of the second thin film deposition module 12 to the second deposition space 1423 of the second thin film deposition module 12, and introduces a second gas into the second deposition space 1423 of the second thin film deposition module 12. The second gas includes octamethylcyclotetrasiloxane and hexamethyldisilazane.

[0066] The second high-voltage electrode 1421 is energized for a second set time to ionize the second gas, thereby depositing a second film layer on the first film layer on the cellulose substrate. The second set time is 4-8 minutes.

[0067] For example, the atmosphere control module 3 introduces a first gas into the first deposition space 1413 of the first thin film deposition module 11 through the air inlet 130, and after 1 minute, energizes the first high-voltage electrode 1411; the atmosphere control module 3 introduces a second gas into the second deposition space 1423 of the first thin film deposition module 11 through the air inlet 130, and after 1 minute, energizes the second high-voltage electrode 1421. This allows the first or second gas to be evenly dispersed within the thin film deposition module 10, resulting in more uniform deposition of the first or second gas on the cellulose substrate and a better modification effect on the cellulose substrate.

[0068] For example, the first set duration can be 6 minutes, and the second set duration can be 6 minutes.

[0069] Plasma surface treatment in related technologies often requires low pressure or even vacuum conditions, demanding sophisticated equipment and complex processes, and is difficult to adapt to flexible and porous materials. This invention, by including a first electrode assembly 141 and a second electrode assembly 142 in the electrode assembly 14, employs atmospheric pressure dielectric barrier discharge plasma technology to achieve plasma deposition reactions at room temperature and pressure, simplifying the equipment structure and providing excellent industrial adaptability and environmental friendliness.

[0070] In addition, the cellulose substrate has multiple pores. By using atmospheric pressure low-temperature plasma technology to deposit a first film layer on the cellulose substrate, some of the protrusions in the first film layer can be accommodated in the pores of the cellulose substrate, forming an "embedded" high-bonding film system. Compared with the coating method and nanoparticle loading method in related technologies, this can improve the bonding force between the first film layer and the cellulose substrate and prevent the first film layer from peeling off from the cellulose substrate.

[0071] Furthermore, most modification methods in related technologies are single-faceted, often only improving one aspect of the insulating paper's performance, such as solely enhancing its mechanical or dielectric properties. This makes it difficult to achieve synergistic optimization of mechanical strength and electrical insulation performance. In this invention, the electrode assembly 14 comprises a first electrode assembly 141 and a second electrode assembly 142. A first film layer and a second film layer are sequentially deposited on a cellulose substrate. The first and second film layers are functionally layered to enhance mechanical and insulation performance, respectively. This results in a more systematic and targeted structure, leading to more significant and balanced performance improvements. For example, the first film layer can improve the mechanical properties of the insulating paper, while the second film layer can improve its insulation performance.

[0072] Furthermore, by depositing the first and second membrane layers on one side of the cellulose substrate and then depositing the first and second membrane layers on the other side of the cellulose substrate, both sides of the cellulose substrate are modified by the first and second membrane layers, which can more fully improve the mechanical strength and insulation properties of the cellulose substrate.

[0073] According to the method for preparing insulating paper according to embodiments of the present invention, by energizing the first high-voltage electrode 1411 to ionize the first gas and depositing a first film layer on one side of the cellulose substrate, and then energizing the second high-voltage electrode 1421 to ionize the second gas and depositing a second film layer on one side of the cellulose substrate, the modification methods of the cellulose substrate are enriched, so that the first film layer and the second film layer are functionally modified in layers to enhance mechanical reinforcement and insulation performance, respectively, thereby improving the mechanical strength and insulation performance of the insulating paper, resulting in a more significant and balanced performance improvement. By depositing the first film layer and the second film layer on one side of the cellulose substrate and then depositing the first film layer and the second film layer on the other side of the cellulose substrate, the mechanical strength and insulation performance of the cellulose substrate can be improved more fully.

[0074] According to some embodiments of the present invention, the flow rate of hexamethyldisiloxane is 0.15 L / min, the flow rate of 3-aminopropyltriethoxysilane is 0.05 L / min, the flow rate of octamethylcyclotetrasiloxane is 1.75 L / min, and the flow rate of hexamethyldisilazane is 0.15 L / min. By setting the flow rate of hexamethyldisiloxane to 0.15 L / min and the flow rate of 3-aminopropyltriethoxysilane to 0.05 L / min, the first gas can be deposited on the cellulose substrate to form a first film layer including amino groups. Hydrogen bonds are formed between the amino groups and cellulose, increasing the bonding strength between the first film layer and cellulose, and the first film layer can enhance the mechanical properties of the cellulose substrate. By setting the flow rate of octamethylcyclotetrasiloxane to 1.75 L / min and the flow rate of hexamethyldisilazane to 0.15 L / min, the second gas can be deposited on the cellulose substrate to form a second film layer including carbon, silicon, and oxygen. The formed second film layer has lower polarity, which can reduce the dielectric constant of the insulating paper. By leveraging the complementary functions of four organosilicon precursor components, silicon framework construction, amino functionalization, and low-polarity insulating coating construction are achieved, enabling targeted performance regulation and multiple optimizations.

[0075] According to some embodiments of the present invention, the first film layer comprises amino groups, and the second film layer comprises carbon, silicon, and oxygen.

[0076] For example, multiple pores are formed on the cellulose substrate, and multiple protrusions are formed on the first membrane layer. The protrusions are accommodated in the pores, that is, when the first membrane layer is deposited, part of the first membrane layer is deposited into the interior of the cellulose substrate through the pores.

[0077] For example, the second membrane layer is a coral-like three-dimensional cross-linked structure comprising carbon, silicon, and oxygen elements.

[0078] By including amino groups in the composition of the first film layer, hydrogen bonds are formed between the amino groups and cellulose, increasing the bonding strength between the first film layer and cellulose, and enabling the first film layer to enhance the mechanical properties of the cellulose substrate. By including carbon, silicon, and oxygen in the composition of the second film layer, the resulting second film layer has lower polarity, which can reduce the dielectric constant of the insulating paper.

[0079] The following reference Figures 1-4 A method for preparing insulating paper according to some specific embodiments of the present invention is described.

[0080] 1. The unwinding motor starts and drives the unwinding shaft to feed the cellulose substrate into the first deposition space 1413 of the first thin film deposition module 11, ensuring that the insulating paper can move smoothly under the drive of the unwinding shaft.

[0081] 2. Relevant personnel activate the human-machine interface and input the required gas and medium flow rates, as well as power supply operating parameters such as voltage and frequency, for the discharge.

[0082] 3. The temperature sensor of the device is activated through the temperature monitoring panel to monitor the processing temperature of the processing area. When the temperature exceeds 85°C, the circulating exhaust cooling system is automatically activated to control the temperature of the thin film deposition module 10 between 70-85°C.

[0083] 4. The first airflow switch 341 and the second airflow switch 342 are opened, allowing the first gas to pass through the first air inlet 131 into the thin film deposition module 10. After maintaining this for 1 minute, the first high-voltage electrode 1411 is connected to generate plasma for deposition of the mechanical property enhancement layer. The deposition time is 6 minutes.

[0084] 5. Close the first airflow switch 341 and the second airflow switch 342, disconnect the first high-voltage electrode 1411; start unwinding to move the insulating paper with the deposited mechanical property enhancement layer to the deposition discharge area of ​​the second thin film, open the third airflow switch 343 and the fourth airflow switch 344 to allow the second gas to pass into the thin film deposition module 10 through the second air inlet 132.

[0085] 6. Connect the second high-voltage electrode 1421 to generate plasma for deposition of the insulation strength enhancement layer. The deposition time is 6 minutes. After the deposition is completed, disconnect the second high-voltage electrode 1421 and turn off the third gas flow switch 343 and the fourth gas flow switch 344.

[0086] 7. Start the take-up and unwind motors to transfer the cellulose substrate from the first film deposition module 11 to the second film deposition module 12. Then repeat the above operations 4-6 to complete the double-sided double-layer film deposition process of the insulating paper.

[0087] 8. After all the insulating paper has been processed, first stop the discharge, then stop the air supply, start the winding shaft motor to drive the insulating paper to be wound back onto the winding shaft, and finally stop the winding shaft motor.

[0088] The performance test results of insulating paper prepared by the method of preparing insulating paper according to some embodiments of the present invention are described below with reference to Table 1.

[0089] Example 1 is an insulating paper prepared by a method for preparing insulating paper according to some embodiments of the present invention.

[0090] Comparative Example 1 is an insulating paper that has not undergone modification treatment with the first and second film layers.

[0091] Table 1 Performance test results of insulating paper according to some embodiments of the present invention

[0092] Referring to Table 1, compared with Comparative Example 1, the dielectric constant of Example 1 decreased by 50%, achieving a match with the dielectric constant of the insulating oil; the flashover voltage increased by 41.6%, the bulk breakdown strength increased by 38.5%, and the tensile strength increased by 29.9%. The method for preparing insulating paper according to some embodiments of the present invention has a significant effect on improving the properties of insulating paper.

[0093] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0094] In the description of this invention, "first feature" and "second feature" may include one or more of the features.

[0095] In the description of this invention, "a plurality of" means two or more.

[0096] In the description of this invention, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0097] In the description of this invention, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicating that the first feature is at a higher horizontal level than the second feature.

[0098] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0099] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An insulating paper multilayer film deposition apparatus characterized by comprising: The application relates to a thin film deposition module assembly for manufacturing insulating paper, which comprises two thin film deposition modules arranged in a first direction, a first thin film deposition module and a second thin film deposition module, the first thin film deposition module is used for depositing a first film layer and a second film layer on one side of a cellulose substrate, and the second thin film deposition module is used for depositing a first film layer and a second film layer on the other side of the cellulose substrate, the thin film deposition module comprises a shell and an electrode assembly arranged in the shell, an air inlet is formed on the shell, the electrode assembly comprises a first electrode assembly and a second electrode assembly, the first electrode assembly comprises a first high-voltage electrode and a first ground electrode, the first high-voltage electrode and the first ground electrode are arranged in a spaced mode to form a first deposition space between the first high-voltage electrode and the first ground electrode, the second electrode assembly comprises a second high-voltage electrode and a second ground electrode, and the second high-voltage electrode and the second ground electrode are arranged in a spaced mode to form a second deposition space between the second high-voltage electrode and the second ground electrode. A transfer assembly is used for moving the cellulose substrate into the first deposition space to deposit the first film layer and moving the cellulose substrate from the first deposition space into the second deposition space to deposit the second film layer. A pulse power supply module is electrically connected with the first high-voltage electrode and the second high-voltage electrode. An atmosphere control module is connected with the air inlet and used for conveying reaction gas into the shell through the air inlet. A control and monitoring module is electrically connected with the atmosphere control module, the transfer assembly and the pulse power supply module, and is used for controlling the atmosphere control module, the transfer assembly and the pulse power supply module. The transfer assembly is arranged outside the shell and comprises a pay-off shaft mechanism and a winding shaft mechanism, the pay-off shaft mechanism comprises a pay-off shaft and a pay-off motor, the winding shaft mechanism comprises a winding shaft and a winding motor, one end of the cellulose substrate is connected with the pay-off shaft and the other end is connected with the winding shaft, the pay-off motor is connected with the pay-off shaft to drive the pay-off shaft to release the cellulose substrate, and the winding motor is connected with the winding shaft to drive the winding shaft to wind and store the insulating paper.

2. The insulation paper multi-layer film depositing apparatus according to claim 1, wherein The shell of the first thin film deposition module is provided with a first feeding port and a first discharging port, the first feeding port is used for feeding the cellulose substrate released by the pay-off shaft into the first deposition space of the first thin film deposition module, the first discharging port is used for discharging the cellulose substrate from the second deposition space of the first thin film deposition module, the shell of the second thin film deposition module is provided with a second feeding port and a second discharging port, the second feeding port is used for feeding the cellulose substrate discharged from the first discharging port into the first deposition space of the second thin film deposition module, and the second discharging port is used for discharging the insulating paper from the second deposition space of the second thin film deposition module. ​ 3. The insulation paper multi-layer film deposition apparatus according to claim 2, wherein The first deposition space and the second deposition space of each of the film deposition modules are arranged along the first direction, and each of the first deposition space and the second deposition space extends along a second direction perpendicular to the first direction; The first film deposition module is provided with the air inlet on one side along the second direction, and is provided with the first feeding port and the first discharging port on the other side along the second direction, and the unwinding rotary shaft mechanism is located on the other side of the first film deposition module along the second direction and close to the first feeding port; The second film deposition module is provided with the air inlet on one side along the second direction, and is provided with the second feeding port and the second discharging port on the other side along the second direction, and the winding rotary shaft mechanism is located on the other side of the second film deposition module along the second direction and close to the second discharging port.

4. The insulation paper multi-layer film depositing apparatus according to claim 3, wherein The transfer assembly further comprises a guide roller assembly, the guide roller assembly comprises a first guide roller and a second guide roller, the first guide roller is located in the housing of the first film deposition module and on one side of the electrode assembly along the second direction, and the first guide roller is located between the first deposition space and the second deposition space and is used for guiding and supporting the cellulose substrate; The second guide roller is located in the housing of the second film deposition module and on one side of the electrode assembly along the second direction, and the second guide roller is located between the first deposition space and the second deposition space and is used for guiding and supporting the cellulose substrate.

5. The insulation paper multi-layer film depositing apparatus according to claim 3, wherein In the second direction, the unwinding rotary shaft mechanism and the winding rotary shaft mechanism are located on different sides of the film deposition modules; The transfer assembly further comprises a guide roller assembly, the guide roller assembly comprises a third guide roller and a fourth guide roller, the third guide roller is located on the same side of the first film deposition module along the second direction as the unwinding rotary shaft mechanism, the third guide roller is located on the side of the unwinding rotary shaft mechanism along the first direction close to the second film deposition module, the fourth guide roller is located on the same side of the second film deposition module along the second direction as the winding rotary shaft mechanism, the fourth guide roller is located on the side of the winding rotary shaft mechanism along the first direction close to the first film deposition module, and the third guide roller and the fourth guide roller are used for guiding and supporting the cellulose substrate located between the first discharging port and the second feeding port.

6. The insulation paper multi-layer thin film deposition apparatus according to claim 1, wherein The first ground electrode and the second ground electrode of each of the film deposition modules are connected and integrally formed.

7. The insulation paper multi-layer film depositing apparatus according to any one of claims 1 to 6, wherein The atmosphere control module comprises an argon cylinder, a communication pipeline, a first medium cylinder, a second medium cylinder, a third medium cylinder and a fourth medium cylinder. The communication pipeline comprises a main pipe, a first branch pipe, a second branch pipe, a third branch pipe and a fourth branch pipe. One end of the main pipe is in communication with the gas outlet of the argon cylinder. The other end of the main pipe is in communication with the first branch pipe, the second branch pipe, the third branch pipe and the fourth branch pipe. The first branch pipe is provided with the first medium cylinder and a first gas flow switch in series. The second branch pipe is provided with the second medium cylinder and a second gas flow switch in series. The third branch pipe is provided with the third medium cylinder and a third gas flow switch in series. The fourth branch pipe is provided with the fourth medium cylinder and a fourth gas flow switch in series. The gas inlet of each thin film deposition module comprises a first gas inlet and a second gas inlet. The ends of the first branch pipe and the second branch pipe away from the main pipe are connected to the first gas inlets of two thin film deposition modules. The ends of the third branch pipe and the fourth branch pipe away from the main pipe are connected to the second gas inlets of two thin film deposition modules.

8. The insulation paper multi-layer film deposition apparatus according to any one of claims 1 to 6, wherein The control and monitoring module comprises at least one of a take-up and release speed control board, a gas flow rate control board, a device running state display screen, a processing area space temperature monitoring board, a gas passage open and closed state monitoring and manual switching board and a discharge parameter setting board. The take-up and release speed control board is connected to the transfer assembly and is used to control the speed of the transfer assembly moving the cellulose substrate. The gas flow rate control board is electrically connected to the atmosphere control module and is used to control the flow rate of the atmosphere control module passing gas into the gas inlet. The processing area space temperature monitoring board comprises a circulating exhaust system, which is used to adjust the temperature inside the shell in an automatic or manual manner. The gas passage open and closed state monitoring and manual switching board is electrically connected to the atmosphere control module and is used to control whether the atmosphere control module passes gas into the gas inlet. The gas passage open and closed state monitoring and manual switching board has an automatic mode and a manual mode. The discharge parameter setting board is electrically connected to the first high-voltage electrode and the second high-voltage electrode and is used to control the discharge parameters of the first high-voltage electrode and the second high-voltage electrode.

9. A method of producing an insulation paper, characterized by, The insulating paper is prepared by using the insulating paper multi-layer thin film deposition device according to any one of claims 1-8. The preparation method of the insulating paper comprises the following steps: The transfer assembly moves the cellulose substrate into the first deposition space of the first thin film deposition module. The atmosphere control module passes a first gas into the first deposition space of the first thin film deposition module through the gas inlet. The first gas comprises hexamethyldisiloxane and 3-aminopropyltriethoxysilane. The first high-voltage electrode is electrified for a first set time length. The first gas is ionized to form the first film layer on one side of the cellulose substrate. The first set time length is 4-8 min. The second high-voltage electrode is electrified for a second set time length. The second gas is ionized to form the second film layer on the other side of the cellulose substrate. The second set time length is 4-8 min. The transfer assembly transfers the cellulose substrate on which the first film layer is deposited from the first deposition space of the first thin film deposition module to the second deposition space of the first thin film deposition module, and introduces a second gas into the second deposition space of the first thin film deposition module, the second gas comprising octamethylcyclotetrasiloxane and hexamethyldisilazane; The second high-voltage electrode is powered for a second set time period, so as to ionize the second gas, so as to deposit and form the second film layer on the first film layer on the cellulose substrate, the second set time period being 4-8 min, and the voltage of the first high-voltage electrode being different from that of the second high-voltage electrode; The transfer assembly moves the cellulose substrate discharged from the first thin film deposition module into the first deposition space of the second thin film deposition module, and the atmosphere control module introduces a first gas into the first deposition space of the second thin film deposition module through the gas inlet, the first gas comprising hexamethyldisiloxane and 3-aminopropyltriethoxysilane; The first high-voltage electrode is powered for a first set time period, so as to ionize the first gas, so as to deposit and form the first film layer on the other side of the cellulose substrate, the first set time period being 4-8 min; The transfer assembly transfers the cellulose substrate on which the first film layer is deposited from the first deposition space of the second thin film deposition module to the second deposition space of the second thin film deposition module, and introduces a second gas into the second deposition space of the second thin film deposition module, the second gas comprising octamethylcyclotetrasiloxane and hexamethyldisilazane; The second high-voltage electrode is powered for a second set time period, so as to ionize the second gas, so as to deposit and form the second film layer on the first film layer on the cellulose substrate, the second set time period being 4-8 min.

10. The production method of the insulating paper according to claim 9, characterized by, The flow rate of hexamethyldisiloxane is 0.15 L / min, and the flow rate of 3-aminopropyltriethoxysilane is 0.05 L / min; the flow rate of octamethylcyclotetrasiloxane is 1.75 L / min, and the flow rate of hexamethyldisilazane is 0.15 L / min; And / or, the first film layer comprises an amino group, and the second film layer comprises carbon, silicon and oxygen elements. The flow rate of hexamethyldisiloxane is 0.15 L / min, and the flow rate of 3-aminopropyltriethoxysilane is 0.05 L / min; the flow rate of octamethylcyclotetrasiloxane is 1.75 L / min, and the flow rate of hexamethyldisilazane is 0.15 L / min; And / or, the first film layer comprises an amino group, and the second film layer comprises carbon, silicon and oxygen elements.

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