Silicon-carbon negative electrode material production deposition cabin mechanism

Abstract

The invention discloses a silicon-carbon negative electrode material production deposition cabin mechanism, and relates to the technical field of lithium ion secondary battery materials, the silicon-carbon negative electrode material production deposition cabin mechanism comprises deposition cabin bodies, the top end of each deposition cabin body is fixedly connected with an air inlet, a pressure relief opening and two vacuum openings, and the two deposition cabin bodies are in butt joint operation through a butt joint unit. The front end and the rear end of the deposition cabin body are opened and closed through a switch unit, the butt joint unit comprises a sealing ring, and the sealing ring is installed at the front end of the deposition cabin body. According to the high-temperature CVD equipment disclosed by the invention, a plurality of groups of deposition cabin bodies capable of being spliced are arranged, so that the deposition cabin bodies filled with silicon-carbon deposition carrier materials continuously enter the high-temperature CVD equipment for continuous production, the step of cooling and then heating in intermittent production is avoided, the waste of energy is avoided, the production efficiency is improved, and the production cost is reduced. And meanwhile, the reaction stability of materials in different deposition cabin bodies is ensured.

Description

Technical Field

[0001] This invention relates to the field of lithium-ion secondary battery materials technology, specifically to a deposition chamber mechanism for producing silicon-carbon anode materials. Background Technology

[0002] With the rapid development of consumer electronics, new energy vehicles, and electric low-altitude aircraft, the market demand for lithium-ion batteries with high energy density and long cycle life is becoming increasingly urgent. Traditional graphite anode materials, due to their low specific capacity (approximately 372 mAh / g), are no longer sufficient to meet the requirements of next-generation high-performance batteries. Silicon-carbon anode materials, due to their high theoretical specific capacity (silicon's theoretical specific capacity can reach 4200 mAh / g) and the ability to effectively mitigate the volume expansion problem of silicon during charging and discharging through composite with carbon materials, have become one of the most promising anode material systems. Among them, chemical vapor deposition (CVD) is considered a key process route for preparing high-performance silicon-carbon anodes because it can achieve uniform deposition of silicon and carbon coating on porous carbon substrates.

[0003] Currently, the CVD method for preparing silicon-carbon anode materials mainly employs batch production methods such as fluidized bed or rotary furnace. This type of process typically involves first loading a quantitative amount of porous carbon support into the reaction chamber, then sequentially depositing silicon and coating it with carbon. After the entire batch reaction is complete, the material is removed as a whole. This production method has the following significant drawbacks: 1. Low energy efficiency and long production cycle: After each batch of production is completed, the reaction system needs to be cooled to below the safe temperature before discharge, and then heated back to the process temperature for the next batch. The repeated heating and cooling process causes a lot of heat energy loss and prolongs the ineffective production time, which restricts the overall production efficiency.

[0004] 2. Unstable product quality and poor uniformity: During the same batch production process, due to the typically large amount of material fed (up to 20-100kg), the temperature and airflow fields in different areas of the reaction chamber are difficult to distribute completely uniformly, resulting in differences in deposition rates and coating thicknesses at different locations, affecting the consistency within the batch. Between different batches, slight differences may exist in the equipment sealing status, thermocouple positioning, and material stacking morphology during each loading and unloading process. Even using the same process parameters, it is difficult to guarantee the repeatability and stability of product performance across different batches.

[0005] 3. Insufficient production continuity: Intermittent operation cannot achieve continuous material feeding and discharging, which limits the level of automation and continuity of the production process and makes it difficult to meet the needs of large-scale, high-efficiency industrial production.

[0006] To address the aforementioned issues, existing technologies lack a CVD deposition apparatus capable of continuous, stable, and efficient production. Therefore, developing a deposition chamber mechanism that enables continuous docking of multiple deposition units, sealed transport, and coordinated opening and closing of front and rear doors is of significant practical importance for promoting the large-scale, high-quality, and low-energy-consumption continuous production of silicon-carbon anode materials. Summary of the Invention

[0007] The purpose of this invention is to provide a modular, connectable silicon-carbon anode material deposition chamber mechanism. By continuously operating multiple chambers in series, it avoids the intermittent stoppages and heat waste in traditional processes, while ensuring consistent process conditions in each chamber. This significantly improves the stability and uniformity of product quality while increasing production efficiency.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a silicon-carbon anode material production deposition chamber mechanism, comprising a deposition chamber body, wherein an air inlet, a pressure relief port, and two vacuum ports are fixedly connected to the top of the deposition chamber body; two deposition chamber bodies are docked through a docking unit; the front and rear ends of the deposition chamber bodies are switched on and off through a switching unit; the docking unit includes a sealing ring, which is installed at the front end of the deposition chamber body; a plug is fixedly connected to the front end of the deposition chamber body outside the sealing ring; a slot is provided at the rear end of the deposition chamber body; a connecting frame and a support plate are symmetrically fixedly connected to both sides of the outer wall of the deposition chamber body; the connecting frame is located at the rear end of the deposition chamber body; the support plate is located at the front end of the deposition chamber body; a through-hole is provided at the bottom of the inner wall of the connecting frame, and an L-shaped rod is slidably connected to its inner wall; a connecting block is provided at one end of the support plate; a limit rod and a third threaded rod are fixedly connected to the outer wall of the connecting block; the limit rod passes through the support plate.

[0009] As a further embodiment of the present invention: the docking unit further includes a rotating cylinder, which is rotatably connected to the outer wall of the support plate. The third threaded rod passes through the rotating cylinder. An installation plate is fixedly connected to the top of the sedimentation chamber. A first motor is installed on the outer wall of the installation plate. A second spur gear is connected to the output end of the first motor. A rotating shaft is rotatably connected inside the sedimentation chamber. A first spur gear is fixedly connected to the outer wall of the rotating shaft. The first spur gear is in contact with the second spur gear. A first bevel gear is fixedly connected to both ends of the rotating shaft. The first bevel gear is in contact with the rotating cylinder. A fixing rod extending to the outer wall of the connecting block is slidably connected inside the connecting block. A slot is provided on the outer wall of the fixing rod. A locking block is slidably connected inside the connecting block on one side of the fixing rod. A spring is connected between the locking block and the connecting block. A push rod is slidably connected inside the connecting block below the locking block. The push rod extends out of the connecting block.

[0010] As a further embodiment of the present invention: the switching unit includes a first fixing plate, which is fixedly connected to the front end of the inner wall of the sedimentation chamber. A first baffle is slidably connected to the inner wall of the first fixing plate. The first fixing plate and the first baffle form the front wall of the sedimentation chamber. A second motor is installed inside the sedimentation chamber. The output end of the second motor is connected to a mounting shaft. A third bevel gear is fixedly connected to the outer wall of the mounting shaft. A second bevel gear is rotatably connected to the outer wall of the third bevel gear inside the sedimentation chamber. A first threaded rod is fixedly connected to the bottom end of the second bevel gear. The first threaded rod extends into the interior of the first baffle. A docking block is fixedly connected to one end of the mounting shaft. A square block is fixedly connected to one end of the docking block.

[0011] As a further embodiment of the present invention: the switching unit further includes a second fixing plate, which is fixedly connected to the rear end of the inner wall of the sedimentation chamber. A second baffle is slidably connected to the inner wall of the second fixing plate. The second fixing plate and the second baffle form the rear wall of the sedimentation chamber. A second threaded rod is rotatably connected inside the sedimentation chamber. The second threaded rod extends into the interior of the second baffle. A fourth bevel gear is fixedly connected to the top end of the second threaded rod. A fifth bevel gear is rotatably connected to the outer wall of the fourth bevel gear inside the sedimentation chamber. A docking cylinder is fixedly connected to the outer wall of the fifth bevel gear. The docking cylinder is rotatably connected to the outer wall of the sedimentation chamber. A square groove is formed on the outer wall of the docking cylinder.

[0012] As a further embodiment of the present invention: the outer wall of the insert is in contact with the inner wall of the slot.

[0013] As a further embodiment of the present invention: the second spur gear meshes with the first spur gear, and the outer wall of the rotating cylinder is provided with gear teeth, which mesh with the first bevel gear.

[0014] As a further embodiment of the present invention: a third threaded hole is provided inside the rotating cylinder, and the third threaded hole matches the third threaded rod.

[0015] As a further embodiment of the present invention: the outer wall of the connecting block is in contact with the inner wall of the connecting frame, one end of the locking block is in contact with the inner wall of the locking groove, the bottom end of the locking block is provided with a first inclined surface, the top end of the pushing rod is in contact with the first inclined surface, and the bottom end of the pushing rod is provided with a second inclined surface.

[0016] As a further embodiment of the present invention: the third bevel gear meshes with the second bevel gear, the inner wall of the first fixing plate is in contact with the outer wall of the first baffle, and the top end of the first baffle is provided with a first threaded hole, which matches the first threaded rod.

[0017] As a further embodiment of the present invention: the outer wall of the square block is in contact with the inner wall of the square groove, the fifth bevel gear meshes with the fourth bevel gear, the inner wall of the second fixing plate is in contact with the outer wall of the second baffle, and the top end of the second baffle is provided with a second threaded hole, which matches the second threaded rod.

[0018] Compared with the prior art, the beneficial effects of the present invention are: 1. By setting up multiple modular deposition chambers, the deposition chambers containing silicon-carbon deposition carrier materials can continuously enter the high-temperature CVD equipment for continuous production. This avoids the cooling and reheating steps required in intermittent production, preventing energy waste, improving production efficiency, and ensuring the stability of material reactions within different deposition chambers. This invention achieves truly continuous production throughout the entire process through a modular, modular deposition chamber design. Each chamber is sealed and pre-set with the process atmosphere before entering the high-temperature CVD zone, and separation and unloading only occur after exiting the reaction zone. This ensures the reaction system remains in a stable state of constant temperature and pressure, completely eliminating the thermal stress and energy waste caused by repeated heating and cooling in traditional intermittent processes. Unit product energy consumption can be reduced by approximately 30-50%, while the production cycle is shortened by more than 40%.

[0019] 2. By setting up a docking unit, the front end of the sedimentation chamber is docked with the rear end of the previous sedimentation chamber, allowing the insert block to be inserted into the slot. The first motor rotates, driving the connecting block to move. The connecting block moves and inserts into the connecting frame of the previous sedimentation chamber. When the connecting block is fully inserted into the connecting frame, the fixing rod moves downward under gravity, displacing the connecting block and contacting the connecting frame, locking the connecting block in place. This allows for the splicing operation of the two sedimentation chambers, facilitating rapid docking and separation between them. This invention, through the setting of an automatic docking and locking unit, achieves rapid and reliable sealed connection and separation between chamber sections. The precise fit between the insert block and the slot, the multiple protections of the sealing ring, and the mechanical locking between the connecting block and the connecting frame ensure the sealing and structural stability of the connection points during continuous operation of each chamber section. This design eliminates process fluctuations caused by differences in furnace loading conditions each time (such as inconsistent furnace door tightness and sealing strip compression) at the equipment level, ensuring high repeatability and performance consistency between different batches of products.

[0020] 3. By setting up a switching unit, the second motor drives the mounting shaft to rotate, which in turn drives the first threaded rod to rotate. The first threaded rod then moves the first baffle upwards, opening the front wall of the sedimentation chamber. When two sedimentation chambers are docked, a square block is inserted into a square slot. When the second motor drives the mounting shaft to rotate, the second threaded rod moves the second baffle, opening the rear wall of the sedimentation chamber. This allows the rear wall of the preceding sedimentation chamber and the front wall of the following sedimentation chamber to open synchronously. Due to the use of a front and rear door linkage switching mechanism, the docking of the square block and the square slot achieves synchronous control of the doors of adjacent chambers, ensuring atmospheric isolation and seamless connection of the reaction chambers during material transfer. This design not only avoids temperature fluctuations and atmosphere contamination caused by frequent door opening and closing in traditional intermittent production, but also effectively solves the problem of inconsistent product quality within the same batch due to uneven airflow and temperature distribution, significantly improving batch-specific uniformity.

[0021] 4. This invention achieves modularization and flexibility in the production process. Users can flexibly adjust the number of series sections according to capacity requirements, and each section can be used as an independent process unit for pre-processing and post-processing. This facilitates dynamic adjustment of production plans and independent optimization of process parameters, providing an equipment foundation for the multi-variety, small-batch customized production of silicon-carbon anode materials and enhancing the adaptability and scalability of the production system.

[0022] 5. This invention represents a significant advancement in automation and intelligence. By using motor drives, it achieves fully automated control of compartment docking, locking, and door opening and closing, reducing manual intervention and mitigating quality risks caused by operational errors. Simultaneously, it lays the hardware foundation for future integration with a central control system, enabling fully unmanned continuous production.

[0023] In summary, this invention not only solves the core pain points of energy waste and discontinuous production in traditional CVD processes, but also systematically improves process stability and product consistency from the perspective of equipment structure. It provides reliable equipment support for the efficient, high-quality, low-energy continuous production of silicon-carbon anode materials and has strong industrial application value. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the sedimentation chamber of the present invention; Figure 3 This is a schematic diagram of the slot structure of the present invention; Figure 4 This is a schematic diagram of the internal structure of the support plate of the present invention; Figure 5 This is a schematic diagram of the installation of the rotating shaft of the present invention; Figure 6 This is a schematic diagram of the internal structure of the connecting block of the present invention; Figure 7 This is a schematic diagram of the structure of the fixing rod of the present invention; Figure 8 This is a schematic diagram of the internal structure of the deposition chamber of the present invention; Figure 9 This is a schematic diagram showing the connection between the docking block and the docking cylinder of the present invention.

[0025] In the diagram: 1. Sedimentation chamber body; 2. Air inlet; 3. Pressure relief port; 4. Vacuum port; 5. Docking unit; 501. Sealing ring; 502. Insert block; 503. Slot; 504. Connecting frame; 505. L-shaped rod; 506. Support plate; 507. Connecting block; 508. Limiting rod; 509. Third threaded rod; 510. Rotating cylinder; 511. First bevel gear; 512. Rotating shaft; 513. First spur gear; 514. Second spur gear; 515. First motor; 516. Mounting plate; 517. Fixing rod; 51 8. Slot; 519. Block; 520. Spring; 521. Push rod; 6. Switch unit; 601. First fixing plate; 602. First baffle; 603. First threaded rod; 604. Second bevel gear; 605. Second motor; 606. Mounting shaft; 607. Third bevel gear; 608. Connecting block; 609. Square block; 610. Second fixing plate; 611. Second baffle; 612. Second threaded rod; 613. Fourth bevel gear; 614. Fifth bevel gear; 615. Connecting cylinder; 616. Square slot. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this invention, it should be noted that unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," and "set up" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. The following describes embodiments of the invention based on its overall structure.

[0028] Please see Figures 1 to 9In this embodiment of the invention, the silicon-carbon anode material production deposition chamber mechanism includes a deposition chamber body 1. The top of the deposition chamber body 1 is fixedly connected to an air inlet 2, a pressure relief port 3 and two vacuum ports 4. The two deposition chamber bodies 1 are docked through a docking unit 5. The front and rear ends of the deposition chamber bodies 1 are switched on and off through a switching unit 6.

[0029] In this embodiment: multiple sets of deposition chambers 1 are spliced ​​together to form a chamber with multiple sections. The chambers are conveyed into the high-temperature CVD equipment for reaction. The pre-loaded sections are prepared before entering the high-temperature CVD equipment: silicon carbon deposition carrier materials are pre-loaded into the pre-loaded sections. The deposition carriers include porous carbon, carbon nanotubes, carbon aerogels, etc.

[0030] The prepared pre-assembled compartment is fed into the production line, and the following operations are performed: First, a quick-sealing connection is made between the pre-assembled compartment and the last compartment on the original production line. The pre-assembled compartment is then opened from its sealed state and evacuated to below 5 Pa. Silane gas and nitrogen are introduced into the pre-assembled compartment, followed by nitrogen, until the pressure reaches a slightly positive pressure state (102-120 kPa). After connection, the front wall of the pre-assembled compartment is opened, and simultaneously the rear wall of the last compartment on the original production line is opened, allowing for connection between the two. Throughout the above process, the conveyor belt continues uninterrupted, and the docking process should be completed outside the high-temperature CVD zone.

[0031] Each time a compartment enters a production line, there is a section at the very front that exits the production line. Before exiting the production line, the rear wall of the compartment should be closed, the front wall of the preceding compartment should be closed, the connection between the compartment and the preceding compartment should be released, and the compartment should be disconnected from the production line.

[0032] After the compartment is removed from the production line, the following operations are performed: First, a vacuum is drawn to remove the silane gas; then, nitrogen is introduced to atmospheric pressure; the compartment must be kept sealed during this process; finally, the compartment is sent back to the next carbon coating CVD production line.

[0033] This invention, by setting up multiple sets of connectable deposition chambers 1, allows the deposition chambers 1 containing silicon-carbon deposition carrier materials to continuously enter the high-temperature CVD equipment for continuous production. This avoids the cooling and heating steps in intermittent production, avoids energy waste, improves production efficiency, and ensures the stability of material reactions in different deposition chambers 1.

[0034] Please refer to this carefully. Figures 2 to 7The docking unit 5 includes a sealing ring 501, which is installed at the front end of the sedimentation chamber 1. A plug 502 is fixedly connected to the front end of the sedimentation chamber 1 outside the sealing ring 501. A slot 503 is provided at the rear end of the sedimentation chamber 1. A connecting frame 504 and a support plate 506 are symmetrically fixedly connected to both sides of the outer wall of the sedimentation chamber 1. The connecting frame 504 is located at the rear end of the sedimentation chamber 1, and the support plate 506 is located at the front end of the sedimentation chamber 1. The bottom of the inner wall of the 4 has a through-hole and an L-shaped rod 505 is slidably connected to its inner wall. A connecting block 507 is provided at one end of the support plate 506. A limiting rod 508 and a third threaded rod 509 are fixedly connected to the outer wall of the connecting block 507. The limiting rod 508 passes through the support plate 506. The docking unit 5 also includes a rotating cylinder 510, which is rotatably connected to the outer wall of the support plate 506. The third threaded rod 509 passes through the rotating cylinder 510. The sedimentation chamber 1... A mounting plate 516 is fixedly connected to the top. A first motor 515 is installed on the outer wall of the mounting plate 516. A second spur gear 514 is connected to the output end of the first motor 515. A rotating shaft 512 is rotatably connected inside the sedimentation chamber 1. A first spur gear 513 is fixedly connected to the outer wall of the rotating shaft 512. The first spur gear 513 is in contact with the second spur gear 514. A first bevel gear 511 is fixedly connected to both ends of the rotating shaft 512. The first bevel gear 511 is in contact with the rotating cylinder 510. A fixing rod 517 extending to the outer wall of the connecting block 507 is slidably connected inside the connecting block 507. A slot 518 is opened on the outer wall of the fixing rod 517. A locking block 519 is slidably connected inside the connecting block 507 on one side of the fixing rod 517. A spring 520 is connected between the locking block 519 and the connecting block 507. A push rod 521 is slidably connected inside the connecting block 507 below the locking block 519. The push rod 521 extends out of the connecting block 507.

[0035] In this embodiment: when splicing the two sedimentation chambers 1, the front end of sedimentation chamber 1 is aligned with the rear end of the previous sedimentation chamber 1, so that the insert block 502 is inserted into the slot 503. After completion, the first motor 515 is started. The first motor 515 drives the second spur gear 514 to rotate. The rotation of the second spur gear 514 drives the first spur gear 513 to rotate. The rotation of the first spur gear 513 drives the rotating shaft 512 to rotate. The rotation of the rotating shaft 512 drives the first bevel gear 511 to rotate. The rotation of the first bevel gear 511 drives the rotating cylinder 510 to rotate. The rotation of the rotating cylinder 510 drives the third threaded rod 509 to move. The movement of the third threaded rod 509 drives the connecting... The connecting block 507 is displaced and inserted into the connecting frame 504 of the previous sedimentation chamber 1. When the connecting block 507 is fully inserted into the connecting frame 504, the push rod 521 contacts the connecting frame 504, pushing the push rod 521 to move. The displacement of the push rod 521 pushes the locking block 519 to move, compressing the spring 520. The locking block 519 moves out of the locking groove 518, releasing the fixation of the fixing rod 517. The fixing rod 517 moves downward under the action of gravity. The fixing rod 517 moves out of the connecting block 507 and inserts into the through hole at the bottom of the inner wall of the connecting frame 504, locking the connecting block 507 into the connecting frame 504, and performing the splicing operation of the two sedimentation chambers 1.

[0036] When separating the two sedimentation chambers 1, a rod-shaped tool is inserted from bottom to top through the through-hole at the bottom of the inner wall of the connecting frame 504, pushing the fixing rod 517 upward. After the fixing rod 517 moves into the connecting block 507, it pushes the L-shaped rod 505 to move. The L-shaped rod 505 moves to the bottom of the fixing rod 517, supporting the fixing rod 517 and preventing it from moving downward. Then, the first motor 515 operates to drive the connecting block 507 to move out of the connecting frame 504, canceling the docking between the two sedimentation chambers 1, which facilitates a quick docking and separation operation between the two sedimentation chambers 1.

[0037] Please refer to this carefully. Figures 8 to 9The switching unit 6 includes a first fixing plate 601, which is fixedly connected to the front end of the inner wall of the sedimentation chamber 1. A first baffle 602 is slidably connected to the inner wall of the first fixing plate 601. The first fixing plate 601 and the first baffle 602 form the front wall of the sedimentation chamber 1. A second motor 605 is installed inside the sedimentation chamber 1. The output end of the second motor 605 is connected to a mounting shaft 606. A third bevel gear 607 is fixedly connected to the outer wall of the mounting shaft 606. A second bevel gear 604 is rotatably connected to the outer wall of the third bevel gear 607 inside the sedimentation chamber 1. A first threaded rod 603 is fixedly connected to the bottom end of the second bevel gear 604. The first threaded rod 603 extends into the interior of the first baffle 602. A docking block 608 is fixedly connected to one end of the mounting shaft 606. The switch unit 6, connected to a square block 609, also includes a second fixing plate 610. The second fixing plate 610 is fixedly connected to the rear end of the inner wall of the sedimentation chamber 1. A second baffle 611 is slidably connected to the inner wall of the second fixing plate 610. The second fixing plate 610 and the second baffle 611 form the rear wall of the sedimentation chamber 1. A second threaded rod 612 is rotatably connected inside the sedimentation chamber 1. The second threaded rod 612 extends into the interior of the second baffle 611. A fourth bevel gear 613 is fixedly connected to the top end of the second threaded rod 612. A fifth bevel gear 614 is rotatably connected to the outer wall of the fourth bevel gear 613 inside the sedimentation chamber 1. A docking cylinder 615 is fixedly connected to the outer wall of the fifth bevel gear 614. The docking cylinder 615 is rotatably connected to the outer wall of the sedimentation chamber 1. A square groove 616 is provided on the outer wall of the docking cylinder 615.

[0038] In this embodiment: when the front wall of the sedimentation chamber 1 is opened, the second motor 605 is started. The second motor 605 drives the mounting shaft 606 to rotate. The rotation of the mounting shaft 606 drives the third bevel gear 607 to rotate. The rotation of the third bevel gear 607 drives the second bevel gear 604 to rotate. The rotation of the second bevel gear 604 drives the first threaded rod 603 to rotate. The rotation of the first threaded rod 603 drives the first baffle 602 to move. The first baffle 602 slides within the first fixed plate 601. The first baffle 602 slides upward, opening the front wall of the sedimentation chamber 1.

[0039] When docking the two sedimentation chambers 1, the rear wall of the first sedimentation chamber 1 and the front wall of the second sedimentation chamber 1 are both kept closed; when separating the two sedimentation chambers 1, the rear wall of the first sedimentation chamber 1 and the front wall of the second sedimentation chamber 1 must be closed simultaneously.

[0040] When the two sedimentation chambers 1 are docked, the square block 609 is inserted into the square slot 616. When the second motor 605 rotates, it drives the mounting shaft 606 to rotate. The rotation of the mounting shaft 606 drives the docking block 608 to rotate. The rotation of the docking block 608 drives the docking cylinder 615 to rotate synchronously through the square block 609. The rotation of the docking cylinder 615 drives the fifth bevel gear 614 to rotate. The rotation of the fifth bevel gear 614 drives the fourth bevel gear 613 to rotate. The rotation of the fourth bevel gear 613 drives the second threaded rod 612 to rotate. The rotation of the second threaded rod 612 drives the second baffle 611 to move. The second baffle 611 slides within the second fixed plate 610. The movement of the second baffle 611 opens the rear wall of the sedimentation chamber 1, thus allowing the rear wall of the previous sedimentation chamber 1 and the front wall of the subsequent sedimentation chamber 1 to open synchronously. This design facilitates the synchronous opening and closing control of the front and rear walls of the sedimentation chamber 1.

[0041] Please refer to this carefully. Figures 2 to 7 The outer wall of the insert 502 fits against the inner wall of the slot 503.

[0042] In this embodiment: the front end of the sedimentation chamber 1 is connected to the rear end of the previous sedimentation chamber 1, so that the insert 502 is inserted into the slot 503.

[0043] Please refer to this carefully. Figures 2 to 7 The second spur gear 514 meshes with the first spur gear 513, and the outer wall of the rotating cylinder 510 is provided with gear teeth that mesh with the first bevel gear 511.

[0044] In this embodiment: the first motor 515 drives the second spur gear 514 to rotate, the second spur gear 514 drives the first spur gear 513 to rotate, the first spur gear 513 drives the rotating shaft 512 to rotate, the rotating shaft 512 drives the first bevel gear 511 to rotate, and the first bevel gear 511 drives the rotating cylinder 510 to rotate.

[0045] Please refer to this carefully. Figures 2 to 7 The rotating cylinder 510 has a third threaded hole inside, which matches the third threaded rod 509.

[0046] In this embodiment: the rotating cylinder 510 rotates and drives the third threaded rod 509 to move, and the displacement of the third threaded rod 509 drives the connecting block 507 to move. At this time, the limiting rod 508 slides along the opening on the support plate 506 to limit the displacement of the connecting block 507.

[0047] Please refer to this carefully. Figures 2 to 7The outer wall of the connecting block 507 is in contact with the inner wall of the connecting frame 504, one end of the locking block 519 is in contact with the inner wall of the slot 518, the bottom end of the locking block 519 is provided with a first inclined surface, the top end of the push rod 521 is in contact with the first inclined surface, and the bottom end of the push rod 521 is provided with a second inclined surface.

[0048] In this embodiment: the connecting block 507 is displaced and inserted into the connecting frame 504 of the previous sedimentation chamber 1. When the connecting block 507 is fully inserted into the connecting frame 504, the pushing rod 521 contacts the connecting frame 504, pushing the pushing rod 521 to move. The displacement of the pushing rod 521 pushes the locking block 519 to move, causing compression on the spring 520. The locking block 519 moves out of the locking groove 518, releasing the fixation of the fixing rod 517. The fixing rod 517 moves downward under the action of gravity. The fixing rod 517 moves out of the connecting block 507 and inserts into the through insertion hole at the bottom of the inner wall of the connecting frame 504, locking the connecting block 507 into the connecting frame 504.

[0049] Please refer to this carefully. Figures 8 to 9 The third bevel gear 607 meshes with the second bevel gear 604. The inner wall of the first fixed plate 601 is in contact with the outer wall of the first baffle 602. The top of the first baffle 602 is provided with a first threaded hole, which matches the first threaded rod 603.

[0050] In this embodiment: the second motor 605 drives the mounting shaft 606 to rotate, the mounting shaft 606 rotates and drives the third bevel gear 607 to rotate, the third bevel gear 607 rotates and drives the second bevel gear 604 to rotate, the second bevel gear 604 rotates and drives the first threaded rod 603 to rotate, the first threaded rod 603 rotates and drives the first baffle 602 to move, and the first baffle 602 slides within the first fixed plate 601.

[0051] Please refer to this carefully. Figures 8 to 9 The outer wall of the square block 609 fits against the inner wall of the square groove 616. The fifth bevel gear 614 meshes with the fourth bevel gear 613. The inner wall of the second fixing plate 610 fits against the outer wall of the second baffle 611. The top of the second baffle 611 is provided with a second threaded hole, which matches the second threaded rod 612.

[0052] In this embodiment: when the two sedimentation chambers 1 are docked, the square block 609 is inserted into the square groove 616. When the second motor 605 operates and drives the mounting shaft 606 to rotate, the mounting shaft 606 rotates and drives the docking block 608 to rotate. The rotation of the docking block 608 drives the docking cylinder 615 to rotate synchronously through the square block 609. The rotation of the docking cylinder 615 drives the fifth bevel gear 614 to rotate. The rotation of the fifth bevel gear 614 drives the fourth bevel gear 613 to rotate. The rotation of the fourth bevel gear 613 drives the second threaded rod 612 to rotate. The rotation of the second threaded rod 612 drives the second baffle 611 to move. The second baffle 611 slides within the second fixed plate 610.

[0053] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A deposition cabin mechanism for producing silicon-carbon negative electrode material, comprising a deposition cabin cabin body (1), characterized in that, The top end of the deposition cabin body (1) is fixedly connected with an air inlet (2), a pressure relief port (3) and two vacuum ports (4), the two deposition cabin bodies (1) are butted through butt joint units (5), the front end and the rear end of the deposition cabin body (1) are switched through switching units (6), the butt joint unit (5) comprises a sealing ring (501), the sealing ring (501) is installed at the front end of the deposition cabin body (1), the front end of the deposition cabin body (1) is fixedly connected with an insertion block (502) outside the sealing ring (501), the rear end of the deposition cabin body (1) is provided with an insertion slot (503), the outer walls of the deposition cabin body (1) are fixedly connected with a connecting frame (504) and a supporting plate (506) symmetrically, the connecting frame (504) is located at the rear end of the deposition cabin body (1), the supporting plate (506) is located at the front end of the deposition cabin body (1), the inner wall bottom end of the connecting frame (504) is provided with a through insertion hole and is slidably connected with an L-shaped rod (505) on the inner wall, one end of the supporting plate (506) is provided with a connecting block (507), the outer wall of the connecting block (507) is fixedly connected with a limiting rod (508) and a third threaded rod (509), the limiting rod (508) penetrates the supporting plate (506).

2. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 1, characterized in that, The butt joint unit (5) further comprises a rotating cylinder (510), the rotating cylinder (510) is rotatably connected to the outer wall of the supporting plate (506), the third threaded rod (509) penetrates the rotating cylinder (510), the top end of the deposition cabin body (1) is fixedly connected with a mounting plate (516), the outer wall of the mounting plate (516) is installed with a first motor (515), the output end of the first motor (515) is connected with a second spur gear (514), the inside of the deposition cabin body (1) is rotatably connected with a rotating shaft (512), the outer wall of the rotating shaft (512) is fixedly connected with a first spur gear (513), the first spur gear (513) is in contact with the second spur gear (514), the two ends of the rotating shaft (512) are fixedly connected with a first bevel gear (511), the first bevel gear (511) is in contact with the rotating cylinder (510), the inside of the connecting block (507) is slidably connected with a fixed rod (517) extending to the outer wall of the connecting block (507), the outer wall of the fixed rod (517) is provided with a clamping groove (518), the inside of the connecting block (507) is slidably connected with a clamping block (519) on one side of the fixed rod (517), the clamping block (519) and the connecting block (507) are connected with a spring (520), the inside of the connecting block (507) is slidably connected with a pushing rod (521) below the clamping block (519), the pushing rod (521) extends out of the connecting block (507).

3. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 2, characterized in that, The switch unit (6) comprises a first fixed plate (601), the first fixed plate (601) is fixedly connected to the inner wall front end of the deposition cabin body (1), the inner wall of the first fixed plate (601) is slidably connected with a first baffle (602), and the first fixed plate (601) and the first baffle (602) constitute the front wall of the deposition cabin body (1), a second motor (605) is installed in the deposition cabin body (1), the output end of the second motor (605) is connected with a mounting shaft (606), the outer wall of the mounting shaft (606) is fixedly connected with a third bevel gear (607), the outer wall of the third bevel gear (607) is rotatably connected with a second bevel gear (604) in the deposition cabin body (1), the bottom end of the second bevel gear (604) is fixedly connected with a first threaded rod (603), the first threaded rod (603) extends to the inside of the first baffle (602), one end of the mounting shaft (606) is fixedly connected with a butt joint block (608), and one end of the butt joint block (608) is fixedly connected with a square block (609).

4. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 3, characterized in that, The switch unit (6) further comprises a second fixed plate (610), the second fixed plate (610) is fixedly connected to the inner wall rear end of the deposition cabin body (1), the inner wall of the second fixed plate (610) is slidably connected with a second baffle (611), and the second fixed plate (610) and the second baffle (611) constitute the rear wall of the deposition cabin body (1), a second threaded rod (612) is rotatably connected in the deposition cabin body (1), the second threaded rod (612) extends to the inside of the second baffle (611), the top end of the second threaded rod (612) is fixedly connected with a fourth bevel gear (613), the outer wall of the fourth bevel gear (613) is rotatably connected with a fifth bevel gear (614) in the deposition cabin body (1), the outer wall of the fifth bevel gear (614) is fixedly connected with a butt joint cylinder (615), the butt joint cylinder (615) is rotatably connected to the outer wall of the deposition cabin body (1), and a square groove (616) is formed in the outer wall of the butt joint cylinder (615).

5. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 2, characterized in that, The outer wall of the plug-in block (502) is attached to the inner wall of the plug-in groove (503).

6. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 2, characterized by, The second straight gear (514) is engaged with the first straight gear (513), the outer wall of the rotating cylinder (510) is provided with a gear, and the gear is engaged with the first bevel gear (511).

7. The production deposition pod mechanism of a silicon-carbon negative electrode material according to claim 2, wherein, A third threaded hole is formed in the rotating cylinder (510), and the third threaded hole is matched with the third threaded rod (509).

8. The production deposition pod mechanism of a silicon-carbon negative electrode material according to claim 2, wherein, The outer wall of the connecting block (507) is attached to the inner wall of the connecting frame (504), one end of the clamping block (519) is attached to the inner wall of the clamping groove (518), the bottom end of the clamping block (519) is provided with a first inclined surface, the top end of the push rod (521) is in contact with the first inclined surface, and the bottom end of the push rod (521) is provided with a second inclined surface.

9. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 4, characterized in that, The third bevel gear (607) is engaged with the second bevel gear (604), the inner wall of the first fixed plate (601) is attached to the outer wall of the first baffle (602), a first threaded hole is arranged at the top end of the first baffle (602), and the first threaded hole is matched with the first threaded rod (603).

10. The production deposition cell mechanism of a silicon-carbon negative electrode material according to claim 4, characterized in that, The outer wall of the square block (609) is attached to the inner wall of the square groove (616), the fifth bevel gear (614) is engaged with the fourth bevel gear (613), the inner wall of the second fixed plate (610) is attached to the outer wall of the second baffle (611), a second threaded hole is arranged at the top end of the second baffle (611), and the second threaded hole is matched with the second threaded rod (612).

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