Laser welding of glass-metal with ultrasonic spraying of nanoparticles

Abstract

The application discloses a laser welding method for glass-metal by ultrasonic spraying of nanoparticles, wherein the method fills the rough surface of the uneven connection interface by introducing nanoparticles, and the thickness of the nanoparticle layer can be controlled by adjusting process parameters, so that the requirement for polishing accuracy of the interface is greatly reduced, the interface can still be successfully welded by ultrashort laser under the condition of large roughness, the process flow is simplified, the process threshold is reduced, and the connection efficiency is improved; and the method can also realize stable connection of the interface without relying on high external pressure. The reason is that the nanoparticles selected based on the first principle can chemically react with elements in the metal or glass, and have the opportunity to form a metallurgical bonding layer, thereby greatly improving the connection efficiency and connection strength.

Description

Technical Field

[0001] This invention belongs to the field of precision packaging technology, specifically relating to a laser welding method for glass-metal reinforced with ultrasonic spraying of nanoparticles. Background Technology

[0002] Glass-metal precision packaging structures are widely used in industries such as integrated circuits, precision optics, and new energy. High-quality micro-nano connections between the glass and metal interfaces are crucial for ensuring the service performance of precision packaging structures. Achieving high-quality micro-nano connections between glass and metal interfaces requires controlling the gap between the two materials. Ultrafast laser welding, with its "ultra-short pulse time" and "ultra-high energy and photon density," generates extremely high heat accumulation effects in a very short time when the pulsed laser interacts with the material, and has been applied to the direct welding between glass and metal. However, successful connection often requires a very high gap between the glass and metal interfaces, typically requiring optical contact (current research defines optical contact as an interface gap less than λ / 4, where λ is the wavelength of the selected pulsed laser), and the application of external force for clamping. Therefore, for metal materials with high roughness, fine polishing and clamping processes are necessary, leading to complex procedures, high costs, long cycles, and insufficient connection strength and stability, making them prone to cracking under high stress. Summary of the Invention

[0003] The purpose of this invention is to provide a laser welding method for glass-metal reinforced by ultrasonic spraying of nanoparticles, in order to solve the above-mentioned problems.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a laser welding method for glass-metal reinforced by ultrasonic spraying of nanoparticles, comprising a laser welding head, wherein the laser welding head is provided with an atomizing spraying device;

[0005] The specific steps of this method are as follows:

[0006] S1. Selection of nanoparticles: First-principles screening is used to select suitable nanoparticles.

[0007] S2, Nano-spraying, including the preparation of nanoparticle dispersion, ultrasonic parameter setting, and atomization treatment of dispersion;

[0008] S3. Coating parameter control: By controlling parameters such as ultrasonic power, frequency, processing time, and solution concentration, the thickness and uniformity of the sprayed coating are controlled, so that the rough metal surface is filled with nanoparticles, thereby greatly reducing the interfacial gap.

[0009] S4. Pre-welding cleaning: Ultrasonic cleaning of the glass surface is used to reduce impurities and increase the welding effect.

[0010] S5. Laser welding: Finally, nanoparticles are sprayed around the laser welding head using an atomizing spraying device, and laser welding is performed simultaneously.

[0011] Preferably, the principle of matching the binding energy magnitude and thermodynamic properties specifically includes the following steps:

[0012] Step 1: Determine the physical parameters (lattice parameters, coefficient of thermal expansion, chemical composition) of the glass and metal.

[0013] Step 2: Based on first principles, construct an atomic model of the glass-nanoparticle-metal interface using Material Studio software, optimize the structure of the interface model, and calculate the total energy of the glass-nanoparticle-metal system. The bonding energy of the interface was then calculated using the following formula. By comparing the interfacial binding energies of different nanoparticles, nanoparticles with high binding energies were selected.

[0014] ;

[0015] Step 3: Since brittle cracking is a common problem during glass-metal bonding, the coefficient of thermal expansion of the nanoparticles must also be considered when selecting them. Is it related to glass? ) or metal ( The thermal expansion coefficients of the substrates are similar, avoiding interface cracking due to thermal stress after welding. By comparing the similarity between the thermal expansion coefficients of different nanoparticles and the substrates, the most suitable one is selected.

[0016] Preferably, the ultrasonic power in S3 determines the intensity and efficiency of liquid atomization. The higher the power, the greater the atomization intensity, the faster the liquid is dispersed into droplets, the higher the power, the higher the atomization efficiency, the higher the spraying rate, and the higher the coating thickness. However, excessive power may cause droplet splashing, increase the surface roughness of the coating, and reduce uniformity.

[0017] Preferably, in S3, the ultrasonic frequency mainly affects the atomization effect of the liquid, determining the size and distribution of droplets. Higher frequency ultrasonic waves produce smaller droplets, and the droplet diameter is inversely proportional to the frequency. Generally speaking, the smaller the droplets, the better the uniformity of the coating. However, excessively high frequencies may lead to excessively fine droplets, accelerated evaporation, and reduced coating thickness. Therefore, the frequency is inversely proportional to the coating thickness but positively correlated with uniformity.

[0018] Processing time: This refers to the spraying time; the longer the time, the thicker the coating.

[0019] Solution concentration: The higher the solution concentration, the greater the content of solid particles in the coating after spraying. Therefore, the higher the concentration, the greater the coating thickness.

[0020] Preferably, the welding head includes a housing, a laser welding head, and a nanoparticle spraying head. The housing is used to connect to external equipment. The laser welding head is installed at the bottom of the housing for laser welding. The nanoparticle spraying head is distributed in a ring around the laser welding head for spraying nanoparticles. The housing is equipped with an atomizing spraying device. The nanoparticle spraying head is connected to the atomizing spraying device, and the atomizing spraying device is used to supply dispersion liquid to the nanoparticle spraying head.

[0021] Preferably, the atomizing spraying device includes a main pipe for an external liquid pump, the bottom of which is connected to multiple nanoparticle spray heads for supplying dispersion liquid. The atomizing spraying device has an internal mounting groove, a partition is provided inside the mounting groove, and a moving block is slidably connected to the bottom of the partition. A push rod is fixed to the bottom of the moving block, and an electric push rod is connected to at least two mutually perpendicular shafts of the moving block for lateral and longitudinal pushing. The electric push rod is in contact with but not connected to the outer surface of the moving block.

[0022] Preferably, the bottom of the push rod is provided with two staggered rocker components. The top surfaces of the two rocker components are V-shaped and both V-shaped surfaces face the push rod. The rocker components are pried by the movement of the push rod to form a rocker state, so that the push rod moves to one side to pry one end of the corresponding rocker component, causing the other end to tilt upwards, and the corresponding bottom branch of the main pipe is blocked by the blocking component.

[0023] Preferably, a ball is disposed in the center of the rocker assembly, and the rocker assembly is slidably disposed inside the housing, with the sliding groove being arc-shaped and providing support while sliding. One of the rocker assemblies is configured with two arcs, and the diameter of the arc of the other rocker assembly is larger than that of the other rocker assembly. The multiple arcs of the rocker assembly are connected to the ball through universal joints.

[0024] Preferably, the blocking assembly includes multiple branch pipes connected to the main pipe and connected to multiple nanoparticle spray heads through the multiple branch pipes, with intermediate blocking components provided on the outer side of the branch pipes;

[0025] The intermediate blocking component includes a housing two connected to the outside of the main pipe. Inside the housing two, there is a return pipe connected to one end of the main pipe via a three-way valve. The branch pipe is vertically provided with a movable blocking component, and the movable blocking component is provided with multiple arc-shaped tops that are connected to multiple rocker assemblies via universal joints and are slidably connected to the partition. When one end of the rocker assembly is tilted up, the movable blocking component is pushed to block the branch pipe, thereby cutting off the liquid flow to the corresponding nanoparticle spray head.

[0026] The technical effects and advantages of this invention are as follows: 1. This method fills the uneven and rough surface of the connection interface by introducing nanoparticles, and the thickness of the nanoparticle layer can be controlled by adjusting the process parameters, which greatly reduces the requirements for the interface grinding and polishing precision. This allows the interface to be successfully welded by ultrafast laser under high roughness conditions, without having to reduce the interface roughness to Ra<λ / 4 through grinding and polishing. This simplifies the process, lowers the process threshold, and improves the connection efficiency.

[0027] 2. Secondly, this method achieves a stable interface connection without relying on high-intensity external pressure. The reason for this is that the nanoparticles selected based on first-principles calculations can chemically react with elements in the metal or glass, potentially forming a metallurgical bonding layer, which greatly improves the connection efficiency and strength. Without applying external force, it effectively avoids uneven stress caused by external pressure, thus preventing cracking and ensuring the uniformity and reliability of the connection interface.

[0028] 3. By setting up the atomizing spraying equipment, the electric push rod can be used to synchronize the rear end of the welding head during the laser welding process. When the welding head moves to one side, the electric push rod extends or retracts to one end. This push rod then pushes the corresponding rocker assembly to lift the rear arc in the direction of movement, thereby pushing the movable blocking part connected to the top of the arc to block the corresponding branch pipe. This stops the nanoparticle spraying head at the rear of the movement from spraying, thus reducing waste while ensuring uniform spraying.

[0029] 4. While the moving blocking component is blocking the branch pipe, the push rod is moving towards the V-shaped surface of the rocker assembly but not making contact. When the through hole moves synchronously to the return pipe, the nanoparticle spray head at that position stops dispensing liquid, but the liquid here is received by the return pipe and returned to the liquid pump for recycling. When the welding moving speed increases, the electric push rod pushes a longer distance, thus increasing the upward distance of the moving blocking component. While the branch pipe is blocked, the return pipe is gradually blocked, so that the main liquid volume of the main pipe remains unchanged, while the pressure of the other three dispersion liquids increases, thus increasing the spraying efficiency in conjunction with the welding speed. Attached Figure Description

[0030] Figure 1 This is a diagram illustrating the ultrasonic spraying principle of the present invention;

[0031] Figure 2 This is a schematic diagram of the optical path principle structure of the present invention;

[0032] Figure 3 This is a flowchart of the present invention;

[0033] Figure 4 This is a schematic diagram of the laser welding head structure of the present invention;

[0034] Figure 5 This is a schematic diagram of the installation structure of the atomizing spraying equipment of the present invention;

[0035] Figure 6 This is a schematic diagram of the internal structure of the atomizing spraying device of the present invention;

[0036] Figure 7 For the present invention Figure 6 Schematic diagram of a partial structure of section A in the middle;

[0037] Figure 8 This is a detailed structural diagram of the intermediate plugging component of the present invention;

[0038] Figure 9 This is a perspective view of the rocker assembly of the present invention.

[0039] In the diagram: 1. Shell 1; 2. Laser welding head; 3. Nanoparticle spray head; 4. Atomizing spraying equipment; 401. Mounting groove; 402. Intermediate plug; 4021. Shell 2; 4022. Telescopic sealing cover; 4023. Moving plug; 4024. Through hole; 4025. Branch pipe; 4026. Return pipe; 403. Main pipe; 404. Partition plate; 405. Moving block; 406. Push rod; 407. Rocker assembly; 408. Electric push rod; 409. Sphere. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] This invention provides, for example Figures 1-9 The laser welding method for glass-metal reinforced by ultrasonic spraying of nanoparticles shown includes a laser welding head, wherein an atomizing spraying device 4 is provided on the laser welding head;

[0042] The specific steps of this method are as follows:

[0043] S1. Selection of nanoparticles: First-principles screening is used to select suitable nanoparticles.

[0044] The main principle for screening nanoparticles is based on the matching of binding energy and thermodynamic properties.

[0045] Step 1: Determine the physical parameters (lattice parameters, coefficient of thermal expansion, chemical composition) of the glass and metal.

[0046] Step 2: Based on first principles, construct an atomic model of the glass-nanoparticle-metal interface using Material Studio software, optimize the structure of the interface model, and calculate the total energy of the glass-nanoparticle-metal system. The bonding energy of the interface was then calculated using the following formula. By comparing the interfacial binding energies of different nanoparticles, nanoparticles with high binding energies were selected.

[0047] ;

[0048] Step 3: Since brittle cracking is a common problem during glass-metal bonding, the coefficient of thermal expansion of the nanoparticles must also be considered when selecting them. Is it related to glass? ) or metal ( The thermal expansion coefficients of the substrates are similar to those of the substrates to avoid interface cracking due to thermal stress after welding. The most suitable nanoparticles can be selected by comparing their thermal expansion coefficients with those of the substrates.

[0049] S2, Nano-spraying, including the preparation of nanoparticle dispersion, ultrasonic parameter setting, and atomization treatment of dispersion;

[0050] S3. Coating parameter control: By controlling parameters such as ultrasonic power, frequency, processing time, and solution concentration, the thickness and uniformity of the sprayed coating are controlled, so that the rough metal surface is filled with nanoparticles, thereby greatly reducing the interfacial gap.

[0051] Ultrasonic power: Ultrasonic power determines the intensity and efficiency of liquid atomization. Higher power results in greater atomization intensity, faster liquid dispersion into droplets, improved atomization efficiency, increased spraying rate, and increased coating thickness. However, excessive power can lead to droplet splashing, increased coating surface roughness, and decreased uniformity. Therefore, power is positively correlated with coating thickness, but both excessively high and low power negatively impact uniformity and need to be controlled within an appropriate range.

[0052] Ultrasonic frequency primarily affects the atomization of liquids, determining droplet size and distribution. Higher frequency ultrasound produces smaller droplets, and droplet diameter is inversely proportional to frequency. Generally, smaller droplets result in better coating uniformity, but excessively high frequencies can lead to excessively fine droplets, accelerated evaporation, and reduced coating thickness. Therefore, frequency is inversely proportional to coating thickness but positively correlated with uniformity.

[0053] Processing time: This refers to the spraying time. The longer the time, the thicker the coating.

[0054] Solution concentration: The higher the solution concentration, the greater the content of solid particles in the coating after spraying. Therefore, the higher the concentration, the thicker the coating will be. However, it may affect the uniformity and particle distribution. That is, the concentration is positively correlated with the coating thickness. Too high a concentration may lead to a decrease in uniformity (because particles tend to accumulate).

[0055] S4. Pre-welding cleaning: Ultrasonic cleaning of the glass surface is used to reduce impurities and increase the welding effect.

[0056] S5. Laser welding: Finally, nanoparticles are sprayed around the laser welding head using an atomizing spraying device, and laser welding is performed simultaneously.

[0057] Specifically, the welding head includes a housing 1, a laser welding head 2, and a nanoparticle spraying head 3. The housing 1 is used to connect to external equipment. The laser welding head 2 is installed at the bottom of the housing 1 for laser welding. The nanoparticle spraying head 3 is distributed around the laser welding head 2 in a ring for spraying nanoparticles. The housing 1 is equipped with an atomizing spraying device 4. The nanoparticle spraying head 3 is connected to the atomizing spraying device 4, and the atomizing spraying device 4 is used to supply dispersion liquid to the nanoparticle spraying head 3.

[0058] Specifically, the atomizing spraying device 4 includes a main pipe 403 for an external liquid pump. The bottom of the main pipe 403 is connected to multiple nanoparticle spray heads 3 for supplying dispersion liquid. The atomizing spraying device 4 has an installation groove 401 inside. A partition 404 is provided inside the installation groove 401, and a moving block 405 is slidably connected to the bottom of the partition 404. A push rod 406 is fixed to the bottom of the moving block 405, and an electric push rod 408 is connected to at least two mutually perpendicular shafts of the moving block 405 for lateral and longitudinal pushing. The electric push rod 408 is in contact with but not connected to the outer surface of the moving block 405.

[0059] Specifically, the bottom of the push rod 406 is provided with two staggered rocker assemblies 407. The top surfaces of the two rocker assemblies 407 are V-shaped and the V-shaped surfaces face the push rod 406. The rocker assemblies 407 are pried by the push rod 406 to form a rocker state, so that the push rod 406 moves to one side to pry one end of the corresponding rocker assembly 407, causing the other end to tilt upwards, and blocking the corresponding branch at the bottom of the main pipe 403 through the blocking assembly.

[0060] Specifically, a ball 409 is provided in the center of the rocker assembly 407, and the rocker assembly 407 is slidably disposed inside the housing 1. The sliding groove is arc-shaped and provides support while sliding. One rocker assembly 407 has two arcs and the diameter is larger than the arc diameter of the other rocker assembly 407. The multiple arcs of the rocker assembly 407 are connected to the ball 409 through universal joints.

[0061] Specifically, the blocking component includes multiple branch pipes 4025 connected to the main pipe 403 and connected to multiple nanoparticle spray heads 3 through the multiple branch pipes 4025, with an intermediate blocking component 402 provided on the outside of the branch pipes 4025.

[0062] The intermediate blockage component 402 includes a housing 4021 connected to the outside of the main pipe 403. Inside the housing 4021, there is a return pipe 4026 connected to one end of the main pipe 403 via a three-way valve. A movable blockage component 4023 is vertically arranged on the branch pipe 4025. The movable blockage component 4023 is provided with multiple arc-shaped tops that are connected to multiple rocker assembly 407 via universal joints and are slidably connected to the partition plate 404. When one end of the rocker assembly 407 is tilted up, the movable blockage component 4023 is pushed to block the branch pipe 4025, causing the corresponding nanoparticle spray head 3 to stop the liquid flow.

[0063] Example 1: First, based on first principles, suitable nanoparticles corresponding to the selected metal are selected. Then, ultrasonic spraying technology is used to uniformly spray the nanoparticles onto the rough metal surface. The thickness and uniformity of the sprayed layer can be controlled by adjusting parameters such as ultrasonic power, frequency, processing time, and solution concentration, so that the rough metal surface is filled with nanoparticles, thereby significantly reducing the interfacial gap. On this basis, without applying any external force to compress, ultrashort pulse width laser picosecond or femtosecond lasers are used to act on the glass-metal interface. By adjusting parameters such as laser power, repetition frequency, defocusing amount, and scanning speed, high-quality micro-nano connections of the interface are achieved. In order to select suitable nanoparticles, first principles are used in this method to screen nanoparticles with high binding energy to the metal-glass interface. When constructing the atomic model of the metal-nanoparticle-glass interface, since glass is an amorphous structure, it is replaced by a crystalline structure of the same element that is stable at room temperature, such as quartz glass, which can be replaced by α-quartz crystal that is stable at room temperature. In order to ensure the uniformity of nanoparticle spreading, ultrasonic spraying technology is used in this method. After the nanoparticles are prepared into a dispersion, they are atomized at the nozzle, so as to be uniformly sprayed on the metal surface.

[0064] Example 2: By setting up the atomizing spraying device 4, during the laser welding process, the electric push rod 408 can be used to synchronize the rear end of the welding head. When the welding head moves to one side, the electric push rod 408 extends or retracts to one end. This allows the push rod 406 to push the corresponding rocker assembly 407 to rock up the rear arc in the direction of movement, thereby pushing the movable blocking part 4023 connected to the top of the arc to block the corresponding branch pipe 4025. This stops the nanoparticle spraying head 3 at the rear of the movement, thus reducing waste while ensuring uniform spraying.

[0065] In Example 3, based on Example 2, the movable blocking component 4023 moves upward to block the branch pipe 4025 while the push rod 406 moves towards the V-shaped surface of the rocker assembly 407 but does not make contact. At the same time, the through hole 4024 moves synchronously to the return pipe 4026. The nanoparticle spray head 3 at this position stops dispensing liquid, but the liquid here is received by the return pipe 4026 and returned to the liquid pump for recycling. When the welding moving speed increases, the electric push rod 408 pushes a longer distance, thus the upward distance of the movable blocking component 4023 increases. While the branch pipe 4025 is blocked, the return pipe 4026 is gradually blocked. This causes the main liquid volume of the main pipe 403 to remain unchanged, while the pressure of the other three dispersion liquids increases. This increases the spraying efficiency in conjunction with the welding speed, achieving the purpose of automatic adjustment. During this period, multiple telescopic sealing caps 4022 set between the return pipe 4026, the branch pipe 4025 and the housing 4021 can also be used to extend the movable blocking component 4023 to achieve synchronous sealing.

[0066] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for laser welding of glass-metal using ultrasonic spraying of nanoparticles, comprising a laser welded joint, characterized in that: The laser welding joint is provided with an atomizing spraying device (4); The specific steps of the method are as follows: S1, selection of nanoparticles, suitable nanoparticles are screened by first principle; The screening is based on the matching principle of binding energy size and thermodynamic characteristics; The matching principle of binding energy size and thermodynamic characteristics specifically comprises the following steps: Step one: determine the physical parameters of glass and metal, including lattice parameters, thermal expansion coefficient and chemical composition; Step two: based on the first principle, the interface atomic model of glass-nanoparticle-metal is constructed by using Material studio software, the interface model is optimized, and the total energy of glass-nanoparticle-metal system is calculated , then the following formula is used to calculate the interface binding energy ; by comparing the size of the interface binding energy under different nanoparticles, the nanoparticles with high binding energy are screened out; In the formula , Etotal is the total energy of glass-nanoparticle-metal system; Einterface is the interface binding energy; Eglass is the energy of glass; Emetal is the energy of metal; Enanoparticle is the energy of nanoparticle; A is the area of welding path; Step three: since brittle cracking is often encountered in the process of glass-metal connection, the thermal expansion coefficient of nanoparticle whether it is close to the thermal expansion coefficient of glass or the thermal expansion coefficient of metal matrix , to avoid interface cracking due to thermal stress after welding; by comparing the closeness of the thermal expansion coefficients of different nanoparticles and the matrix, the most suitable one is screened out; S2, nano spraying, including preparation of nanoparticle dispersion liquid, ultrasonic parameter setting, and atomization treatment of the dispersion liquid; S3, coating parameter control, by controlling the ultrasonic power, frequency, processing time and solution concentration parameters to control the thickness and uniformity of the sprayed layer, so that the rough metal surface is filled with nanoparticles, thereby greatly reducing the interface gap; S4, pre-welding cleaning, ultrasonic cleaning of the glass surface is adopted to reduce impurities; S5, laser welding, finally, the atomizing spraying device (4) is used to spray nanoparticles around the laser welding joint before laser welding.

2. The method of laser welding of glass-to-metal using ultrasonic spraying of nanoparticles according to claim 1, characterized in that: The ultrasonic power in S3 determines the intensity and efficiency of liquid atomization. The higher the power, the greater the atomization intensity, the faster the liquid is dispersed into droplets, the higher the power, the higher the atomization efficiency, the higher the spraying rate, and the thicker the coating.

3. The method of laser welding of glass-to-metal using ultrasonic nanoparticle spraying according to claim 1, wherein: The ultrasonic frequency in S3 mainly affects the atomization effect of the liquid, determines the size and distribution of the droplets, and higher frequency ultrasonic waves produce smaller droplets. The diameter of the droplet is inversely proportional to the frequency; the smaller the droplet, the better the uniformity of the coating, and the frequency is inversely proportional to the coating thickness, but positively correlated with the uniformity; Processing time: the time of spraying, the longer the time, the thicker the coating; Solution concentration: the greater the solution concentration, the greater the content of solid particles in the coating after spraying, therefore, the higher the concentration, the thicker the coating.

4. The method of laser welding glass-to-metal with nanoparticle enhancement by ultrasonic spraying of claim 1, wherein: The welding joint comprises a shell one (1), a laser welding joint (2) and a nanoparticle spraying head (3), the shell one (1) is used for connecting external devices, the laser welding joint (2) is installed at the bottom of the shell one (1) for laser welding, and the nanoparticle spraying head (3) is distributed around the laser welding joint (2) in a ring shape for spraying nanoparticles. The shell one (1) is provided with an atomizing spraying device (4), the nanoparticle spraying head (3) is in communication with the atomizing spraying device (4), and the atomizing spraying device (4) is used for supplying the dispersion liquid to the nanoparticle spraying head (3).

5. The method of laser welding of glass-to-metal using ultrasonic nanoparticle spraying according to claim 4, wherein: The atomizing spraying device (4) comprises a main pipe (403) connected with a liquid pump, the bottom of the main pipe (403) is in communication with a plurality of nanoparticle spraying heads (3) for supplying dispersion liquid, an installation groove (401) is formed in the atomizing spraying device (4), a partition plate (404) is arranged in the installation groove (401), a moving block (405) is slidably connected to the bottom of the partition plate (404), a pushing rod (406) is fixed to the bottom of the moving block (405), and at least two mutually perpendicular shafts of the moving block (405) are connected with electric push rods (408) for transverse pushing and longitudinal pushing, and the electric push rods (408) are in contact with the outer surface of the moving block (405) without being connected.

6. The method of laser welding of glass-to-metal using ultrasonic nanoparticle spraying according to claim 5, wherein: The push rod (406) is provided with two staggered flap assemblies (407) at the bottom, the top surface of each of the two flap assemblies (407) is provided with a V-shaped surface and the V-shaped surface faces the push rod (406), the flap assemblies (407) are pried to form a flap state by the movement of the push rod (406), the push rod (406) moves to one side to pry one end of the corresponding flap assembly (407) to make the other end up and the corresponding block of the bottom branch of the main pipe (403) is blocked by the blocking assembly.

7. The method of laser welding of glass-to-metal using ultrasonic nanoparticle spraying according to claim 6, wherein: The flap assembly (407) is provided with a ball (409) at the middle and the flap assembly (407) is slidably arranged in the shell (1), one of the flap assemblies (407) is provided with two arcs and the diameter is greater than the arc diameter of the other flap assembly (407), the arcs of the flap assembly (407) are connected with the ball (409) through universal joints.

8. The method of laser welding of glass-to-metal with nanoparticle enhancement by ultrasonic spraying according to claim 7, characterized in that: The blocking assembly includes a plurality of branch pipes (4025) connected with the main pipe (403) and communicates with a plurality of nanoparticle spray heads (3) through the branch pipes (4025), the outer side of the branch pipe (4025) is provided with an intermediate blocking piece (402); The intermediate blocking piece (402) includes a shell (4021) connected with the outside of the main pipe (403), the inside of the shell (4021) is further provided with a return pipe (4026) connected with one end of the main pipe (403) through a three-way valve, the branch pipe (4025) is vertically provided with a moving blocking piece (4023), the moving blocking piece (4023) is provided with a plurality of arcs on the top of the flap assembly (407) connected with the partition (404) through universal joints, the moving blocking piece (4023) is pushed by the upturning of one end of the flap assembly (407) to block the branch pipe (4025) and cut off the liquid of the corresponding nanoparticle spray head (3).

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