Single crystal silicon rod drawing device
By designing a single-crystal silicon rod pulling device with a water-cooled box and heat sink assembly, the problem of low heat removal efficiency in existing devices was solved, achieving efficient longitudinal temperature gradient control of silicon rods and rapid cooling of silicon rods of various diameters.
Patent Information
- Application Number
- CN202511338156.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-18
- Publication Date
- 2026-01-09
AI Technical Summary
In existing single-crystal silicon rod pulling equipment, the efficiency of removing heat from the rod through radiation is not high, resulting in limited effect on improving the longitudinal temperature gradient of the rod.
A single-crystal silicon rod pulling device was designed, which includes components such as a water-cooled box, heat sink, telescopic rod and lifting motor. The device achieves efficient heat dissipation of silicon rods by cooling with water flow in the water-cooled box and rotating heat sink, thus adapting to the production needs of silicon rods of different diameters.
This improves the convenience of the longitudinal temperature gradient for silicon rods and the versatility of the device, ensuring rapid cooling during the production of silicon rods of different diameters.
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Figure CN121295321A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of monocrystalline silicon rod production technology, specifically a monocrystalline silicon rod pulling device. Background Technology
[0002] Monocrystalline silicon wafers are a fundamental material for photovoltaic power generation and have a wide market demand. Monocrystalline silicon wafers are usually obtained by slicing monocrystalline silicon rods. Monocrystalline silicon rods are grown and pulled by heating silicon material placed inside a monocrystalline furnace. During the pulling of monocrystalline silicon rods, in order to accelerate the forming speed, it is necessary to increase the longitudinal temperature gradient of the rod.
[0003] Chinese patent application CN117628962A discloses a heat exchanger, heat exchange components, and a single-crystal silicon rod pulling device. It proposes that existing conventional methods for increasing the longitudinal temperature gradient of silicon rods involve designing a water-cooled heat exchanger near the inner wall of the heat shield. The latent heat energy released during crystallization is radiated to the inner wall of the water-cooled heat exchanger and carried out of the furnace, thereby increasing the longitudinal temperature gradient of the silicon rod and increasing the crystal growth rate. However, existing heat exchangers are not very efficient at removing heat from the silicon rod through radiation, and their effect on increasing the longitudinal temperature gradient of the silicon rod is limited. Therefore, a single-crystal silicon rod pulling device is proposed to address the above problems. Summary of the Invention
[0004] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.
[0005] The technical solution adopted by the present invention to solve its technical problem is as follows: A single crystal silicon rod pulling device of the present invention includes a water-cooled box, a water pipe connected to the inner side of the water-cooled box, a groove opened on the inner side of the water-cooled box, a heat sink rotatably connected to the inner side of the groove, a telescopic rod fixedly connected to one end of the heat sink, a connecting block rotatably connected to one end of the telescopic rod, a fixing block fixedly connected to one end of the water-cooled box, an adjusting ring rotatably connected to the inner side of the fixing block, the adjusting ring and the connecting block fixedly connected, a support block fixedly connected to one end of the water-cooled box, a fixing screw threadedly connected to the inner side of the support block, a fixing groove opened on the surface of the adjusting ring, the fixing screw and the fixing groove threadedly connected, a support frame fixedly connected to the upper side of the water-cooled box, a lifting motor fixedly connected to the outer side of the support frame, a winding roller fixedly connected to the output end of the lifting motor, a lifting cable fixedly connected to the outer side of the winding roller, and a clamp fixedly connected to one end of the lifting cable; Before implementing this invention, the thickness, width, and number of heat sinks can be adjusted according to actual usage to ensure that the spacing between multiple fixing slots is the same. A slot of the same size and cross-section as this device is opened inside the single crystal furnace to facilitate installation and fixation. After installation, the water pipe is connected to a pump capable of conveying water flow, allowing water to flow in and out of the water-cooling box. The weight of the clamping plate is sufficient to pull the lifting cable downwards. During installation, an isolation valve between the main furnace chamber and the auxiliary furnace chamber of the single crystal furnace is placed at the connection between the water-cooling box and the support frame. A plate is used to separate the gap between the isolation valve and the water-cooling box and the support frame. This allows the silicon rod, after being pulled, to be lifted into the auxiliary furnace chamber. The isolation valve can be used to separate the silicon rod from the main furnace chamber. When using this invention, the device is installed inside the upper part of the single crystal furnace body. By rotating the adjusting ring, multiple connecting blocks are driven by the adjusting ring. The rotation, driven by multiple connecting blocks, rotates multiple telescopic rods. Because these rods can extend or retract, they don't become immobile due to a fixed length. The rotation of these rods causes multiple heat sinks to rotate, bringing one end of each heat sink closer together to a suitable position. The seed crystal is then clamped and fixed by a chuck. A lifting motor drives a winding roller to unwind the lifting cable, causing the cable to move the chuck and seed crystal downwards into the furnace for drawing. During drawing, the silicon rod gradually rises until it is close to one end of each heat sink, ensuring the heat sink adheres tightly to the silicon rod. The end of the heat sink furthest from the silicon rod is pressed against the inside of the groove. Water is drawn into and out of the water-cooling box via a water pipe, cooling the water-cooling box and the groove. The contact between one end of the heat sink and the groove facilitates cooling of the heat sink, allowing the heat sink to contact the silicon rod and further cool it. In other words, when the silicon rod needs to dissipate heat, one end of the heat sink is pressed tightly against the silicon rod, which facilitates the cooling of the air between the silicon rod and the water-cooled box. This makes the cooling of the silicon rod faster and more convenient, thereby increasing the longitudinal temperature gradient of the silicon rod. Furthermore, the rotation of the heat sink allows it to come into contact with silicon rods of various diameters pulled out from the inside of the single crystal furnace. Thus, when the single crystal furnace produces silicon rods of various diameters, the device can cool the silicon rods, improving the convenience of increasing the longitudinal temperature gradient of the silicon rod and the versatility of the device in use.
[0006] Preferably, a heat-conducting sheet is fixedly connected to the inner side of the groove, the heat-conducting sheet is connected to the water-cooling box, and a heat-conducting groove is opened on the inner side of the heat sink, and the heat-conducting groove and the heat-conducting sheet are rotatably connected; Before implementing this invention, if the single crystal furnace is large and the diameter of the silicon rods produced is large, and it is necessary to improve the heat dissipation efficiency of the device, a groove of the same size and dimensions as the heat-conducting plate can be opened on the inside of the water-cooling box during production to facilitate the installation of the heat-conducting plate. If the heat-conducting plate does not need to be installed, there is no need to open a groove on the inside of the water-cooling box. Ensure that one end of the heat-conducting plate can extend into the inside of the heat-conducting groove. When using this invention, by extending one end of the heat-conducting plate into the inside of the water-cooling box, the water flow inside the water-cooling box can directly cool the heat-conducting plate. And because the other end of the heat-conducting plate extends into and is close to the inner wall of the heat-conducting groove, the heat-conducting plate can directly contact the heat-conducting groove, thereby enabling the heat-conducting groove to cool the heat sink. In other words, by opening multiple heat-conducting grooves on the inside of the heat sink, the surface area of the heat sink is further increased. The heat-conducting plate is cooled by the water flow inside the water-cooling box, and the contact area between the water-cooling box and the heat sink is further increased by extending the heat-conducting plate into the heat-conducting grooves. This further expands the heat transfer path between the heat sink and the water-cooling box, thereby enabling the device to cool the silicon rod more quickly and conveniently, and improving the convenience of heat dissipation of the device.
[0007] Preferably, the surface of the heat sink is provided with a through groove, and a heat-conducting block is slidably connected to the inside of the through groove, and the heat-conducting block and the groove are fixedly connected; Before implementing this invention, ensure that when the heat sink rotates back and forth, a portion of the length of the heat-conducting block can enter the inside of the through slot and fit tightly against the through slot. When using this invention, after the heat sink is cooled, the opening of the through slot further increases the air contact area between the heat sink, the silicon rod, and the inside of the water-cooling box, thereby cooling the air. The groove connects to the heat-conducting block, allowing the water-cooling box to cool the heat-conducting block, which in turn allows the heat-conducting block to further cool the through slot and the heat sink. In other words, by opening the through slot, the air contact area between the heat sink and the silicon rod and the inside of the water-cooling box is further increased, thereby enabling the heat sink to further cool the air. The through slot is further cooled by the heat-conducting block attached to it. As shown in the figure, two sides of the heat-conducting block are not in contact with the through slot. When the air passes through the through slot, the two sides of the heat-conducting block are exposed to the air, thus cooling the air. This further increases the contact area between the device and the air, so as to further cool the air near the curved surface of the silicon rod and improve the stability of the device's heat dissipation and cooling.
[0008] Preferably, a waterproof motor is fixedly connected to the inside of the water-cooled box, a lifting screw is fixedly connected to the output end of the waterproof motor, and a ring is threadedly connected to the outside of the lifting screw; Before implementing this invention, ensure that there is sufficient gap between the two curved surfaces of the ring and the inner wall of the water-cooled box for water flow. Place the waterproof motor at the top inside the water-cooled box so that when the silicon rod is pulled up, the waterproof motor will only approach the silicon rod that has been cooled and formed at the top through the water-cooled box. The water flow will cool the water-cooled box, thus preventing the waterproof motor from overheating and affecting its operation. When using this invention, after the water flow is injected into the inside of the water-cooled box, the waterproof motor drives the lifting screw to rotate, which in turn drives the ring to move up and down. The up and down movement of the ring causes the water flow inside the water-cooled box to tumble up and down. In other words, by moving the ring up and down, the ring can cause the water flow to tumble, which in turn allows the water flow on the lower side to move closer to the water pipe. This makes it easier for the water pipe to draw out the water flow from the lower side more quickly and conveniently, so that the device can replace the water flow. This results in better water cooling effect and improved cooling stability of the device.
[0009] Preferably, an extension plate is fixedly connected to the upper side of the ring, and a fluororubber pad is fixedly connected to the inner side of the extension plate; Before implementing this invention, ensure that the connection between the extension plate and the fluororubber pad is a vulcanized connection so that the connection between the two can be more resistant to high temperature and the connection between the two is not easily affected by high temperature. When this invention is working, the ring will drive the extension plate and the fluororubber pad to move up and down. The fluororubber pad will stick to the inner wall of one side of the water-cooled box and one end of the heat-conducting plate, thereby wiping and cleaning the inner wall of one side of the water-cooled box and one end of the heat-conducting plate. In other words, when water flows in and out of the water-cooled box for a long time, scale is easily adhering to the inside of the water-cooled box. By moving the fluororubber pad up and down, the inner wall of the water-cooled box near the silicon rod and the end of the heat-conducting plate are wiped and cleaned, so that scale is less likely to adhere to the outside of the two, affecting the heat exchange of the device and improving the stability of the heat exchange of the device.
[0010] Preferably, a fixing rod is fixedly connected to one end of the ring, and a scraper is fixedly connected to the outside of the fixing rod. The scraper is used in conjunction with the water pipe. Before implementing this invention, ensure that the arc surface of one side of the scraper can fit the shape of the inner wall of the water pipe. When the invention is used, when the ring rises to the highest point, it will simultaneously drive the fixing rod to move. The fixing rod will drive the scraper to enter the inner side of the water pipe. The arc surface of the scraper in different directions will fit tightly against the inner wall of the water pipe, thereby scraping the inner wall of the water pipe. In other words, by periodically raising the ring to its highest position, the scraper can enter the inside of the water pipe and scrape and clean the inner wall of the pipe. This prevents scale from adhering to the inner wall of the pipe and affecting the flow of water during long-term use, thus further improving the stability of the device.
[0011] Preferably, a limiting plate is fixedly connected to the inner side of the water-cooled box, a limiting groove is formed on the inner side of the ring, the limiting groove and the limiting plate are slidably connected, and the limiting plate and the scraper are used in conjunction. Before implementing this invention, ensure that the arc surface of one side of the limiting plate is the same as that of the scraper, and ensure that one end of the limiting plate is aligned with one end of the water pipe. When the scraper moves up and down, the limiting plates on both sides are respectively attached to the scrapers on both sides, and the limiting groove limits the limiting plate, making the position of the limiting plate more stable and making the limitation of the scraper's movement trajectory more stable. That is, when the scraper moves up and down, the limiting plate further limits the scraper and aligns the limiting plate with the water pipe, so that when the scraper is raised to its maximum height, it can be stably inserted into the inside of the water pipe, which makes the scraper's scraping and cleaning of the water pipe more stable and improves the stability of the device.
[0012] Preferably, the surface of the annulus is provided with a drainage groove, and a spiral plate is fixedly connected to the inner side of the drainage groove; During the operation of this invention, as the ring moves up and down, the water flow can pass through the drainage channel and move up and down, facilitating the exchange and replacement of the water flow positions. Furthermore, as the water flow passes through the drainage channel, it comes into contact with the spiral plate, which guides the water flow by rotation. This allows the water flow to generate a certain degree of vortex when it exits the drainage channel. In other words, when the ring moves up and down to agitate the water flow, the opening of the drainage channel further increases the movement path of the water flow, so as to facilitate the alternation of water flow. The spiral plate guides the water flow, so that the water flow generates eddies when discharged, making the alternation between water flows more frequent. This allows the new water flow entering through the water pipe on one side to mix and exchange with the old water flow inside the water-cooled box more frequently, thus making the cooling of the water-cooled box more uniform and improving the stability and uniformity of the device's cooling.
[0013] Preferably, a polygonal groove is provided on the inner side of the telescopic rod, a polygonal rod is slidably connected to the inner side of the polygonal groove, a synchronization ring is fixedly connected to one end of the polygonal rod, and a magnetic plate is fixedly connected to one side of the synchronization ring; When the present invention is working, after the adjusting ring drives the telescopic rod to rotate, the synchronous ring is moved to the upper side of the telescopic rod so that the polygonal rod is aligned with the inner side of the polygonal groove. Then the synchronous ring is moved down, and the polygonal rod is inserted into the inner side of the polygonal groove by the synchronous ring. The magnetic plate is also attached to the upper side of the water-cooled box and fixed by adsorption by the synchronous ring. In other words, after the telescopic rod has rotated, the polygonal groove is limited by the polygonal rod, which further restricts the position of the telescopic rod, making the position of the telescopic rod and the heat sink more stable after rotation. This makes the heat sink adhere more tightly to the silicon rod for heat dissipation, thus improving the stability of the device.
[0014] Preferably, a connecting plate is fixedly connected to the lower side of the synchronization ring, and a connecting groove is formed on the surface of the connecting plate. The connecting groove is threadedly connected to the fixing screw. A reinforcing groove is formed on the inner side of one of the telescopic rods, and a reinforcing plate is rotatably connected to one end of one of the fixing screws. The reinforcing groove and the reinforcing plate are used in conjunction. Before implementing this invention, ensure that the reinforcing plate has a protruding part with the same shape as the reinforcing groove, as shown in the figure. When using this invention, after the telescopic rod has rotated, the synchronizing ring can be moved down first, so that the polygonal rod is inserted into the inside of the polygonal groove. The synchronizing ring drives the connecting groove of the connecting plate to align with the fixing groove at the appropriate position. Then, the fixing screw is screwed into the connecting groove and the fixing groove. At the same time, the user can manually keep the reinforcing plate horizontal. When the fixing screw moves, it will drive the reinforcing plate to move synchronously, so that the reinforcing plate is inserted into the reinforcing groove at the appropriate position inside the telescopic rod. In other words, after the synchronization ring is fixed to the outside of the water-cooled box by magnetic adsorption, the position of the connecting plate and the synchronization ring can be further restricted and fixed by screwing the fixing screw into the connecting groove and the fixing groove. This makes the installation of the synchronization ring more stable. At the same time, by inserting the reinforcing plate into the reinforcing groove, the position of the telescopic rod can be further restricted, which makes the position of the heat sink more fixed after adjustment and improves the stability of the device.
[0015] The advantages of this invention are: 1. In the single-crystal silicon rod pulling device of the present invention, before specific implementation of the present invention, the thickness, width and number of heat sinks can be adjusted according to actual use to ensure that the spacing between multiple fixing slots is the same. A slot with the same size and cross-section as the device is opened inside the single crystal furnace to facilitate the installation and fixing of the device. After installation, the water pipe is connected to a pump capable of conveying water flow so that the water pipe can convey water flow into and out of the water-cooling box. It is ensured that the weight of the clamping plate is sufficient to pull the lifting cable down. During the installation of the device, the isolation valve between the main furnace chamber and the auxiliary furnace chamber of the single crystal furnace is set in the water-cooling box and the support frame. At the connection point, a plate is used to separate the gap between the isolation valve and the water-cooled box and support frame, so that the silicon rod needs to be lifted into the auxiliary furnace chamber after the silicon rod is pulled. The isolation valve can be used to separate the silicon rod lifted into the auxiliary furnace chamber from the main furnace chamber. In the use of this invention, the device is installed on the upper side inside the single crystal furnace body. By rotating the adjusting ring, the adjusting ring drives multiple connecting blocks to rotate, and the multiple connecting blocks drive multiple telescopic rods to rotate. Because the telescopic rods can extend or retract, they will not be unable to rotate due to a fixed length. The rotation of the telescopic rods causes multiple heat sinks to rotate, so that... Multiple heat sinks are brought close together at one end to a suitable position. The seed crystal is clamped and fixed by a clamping plate. A lifting motor drives a winding roller to rotate, causing the winding roller to unwind the suspension cable. This causes the suspension cable to move the clamping plate and the seed crystal downwards, moving the seed crystal into the furnace for drawing. During drawing, the silicon rod gradually moves upwards, rising until it is close to one end of the multiple heat sinks. This allows the heat sinks to adhere tightly to the silicon rod, with the ends of the heat sinks furthest from the silicon rod adhering to the inside of the groove. Water is introduced and discharged into the water-cooled box through water pipes, thereby cooling the water-cooled box and the groove. The contact between one end of the heat sink and the groove facilitates heat dissipation from the groove. The device cools the silicon rod by placing one end of the heat sink against it, allowing the heat sink to contact the silicon rod and thus cool it down. Specifically, when the silicon rod needs cooling, the heat sink is placed against it, facilitating the cooling of the air between the rod and the water-cooled box. This makes cooling the silicon rod faster and more convenient, increasing the longitudinal temperature gradient. Furthermore, the rotation of the heat sink allows it to contact silicon rods of various diameters pulled from the inside of the single crystal furnace. Therefore, the device can cool silicon rods of different diameters produced in the single crystal furnace, improving the ease of increasing the longitudinal temperature gradient and the versatility of the device.
[0016] 2. In the single-crystal silicon rod pulling device of the present invention, if the single-crystal furnace is large and the diameter of the produced silicon rod is large, and it is necessary to improve the heat dissipation efficiency of the device, a groove of the same size and dimensions as the heat-conducting plate can be opened on the inside of the water-cooling box during production to facilitate the installation of the heat-conducting plate. If the heat-conducting plate does not need to be installed, there is no need to open a groove on the inside of the water-cooling box. Ensure that one end of the heat-conducting plate can extend into the inside of the heat-conducting groove. When the present invention is used, the water flow inside the water-cooling box can directly cool the heat-conducting plate by extending one end of the heat-conducting plate into the inside of the water-cooling box. And because the other end of the heat-conducting plate extends into and is close to the inner wall of the heat-conducting groove, the heat-conducting plate can directly contact the heat-conducting groove, thereby enabling the heat-conducting groove to cool the heat sink. In other words, by opening multiple heat-conducting grooves on the inside of the heat sink, the surface area of the heat sink is further increased. The heat-conducting plate is cooled by the water flow inside the water-cooling box, and the contact area between the water-cooling box and the heat sink is further increased by extending the heat-conducting plate into the heat-conducting grooves. This further expands the heat transfer path between the heat sink and the water-cooling box, thereby enabling the device to cool the silicon rod more quickly and conveniently, and improving the convenience of heat dissipation of the device. Attached Figure Description
[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a top view of the three-dimensional structure of the present invention; Figure 2 This is a bottom view of the three-dimensional structure in this invention; Figure 3 This is a schematic diagram of the three-dimensional structure for removing the synchronization loop in this invention; Figure 4 This is a schematic diagram of the water-cooled box structure in this invention; Figure 5 This is a schematic diagram of the heat sink structure in this invention; Figure 6 This is a schematic diagram of the adjusting ring structure in this invention; Figure 7 This is a schematic diagram of the ring structure in this invention; Figure 8 This is a schematic diagram of the synchronization ring structure in this invention; Figure 9 In this invention Figure 2 Enlarged schematic diagram of the structure at point A in the middle; Figure 10This is a schematic diagram of the water pipe and scraper used in conjunction in this invention; Figure 11 This is a schematic diagram of the use of the limiting plate in this invention; Figure 12 In this invention Figure 7 Enlarged diagram of point B in the middle.
[0019] In the diagram: 1. Water-cooled box; 101. Support frame; 102. Lifting motor; 103. Winding roller; 104. Suspension cable; 105. Clamping plate; 2. Water pipe; 3. Groove; 4. Heat sink; 5. Telescopic rod; 6. Connecting block; 7. Fixing block; 8. Adjusting ring; 9. Support block; 10. Fixing screw; 11. Fixing groove; 12. Heat-conducting plate; 13. Heat-conducting groove; 14. Through groove; 15. Heat-conducting block; 16. Waterproof motor; 17. Lifting screw; 18. Ring; 19. Extension plate; 20. Fluororubber pad; 21. Fixing rod; 22. Scraper; 23. Limiting plate; 24. Limiting groove; 25. Drainage groove; 26. Spiral plate; 27. Polygonal groove; 28. Polygonal rod; 29. Synchronization ring; 30. Magnetic plate; 31. Connecting plate; 32. Connecting groove; 33. Reinforcing groove; 34. Reinforcing plate. Detailed Implementation
[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0021] Specific implementation examples are given below.
[0022] Please see Figures 1 to 12As shown in the embodiment of the present invention, a single-crystal silicon rod pulling device includes a water-cooled box 1. A water pipe 2 is connected to the upper side of the water-cooled box 1. A groove 3 is formed inside the water-cooled box 1. A heat sink 4 is rotatably connected to the inside of the groove 3. A telescopic rod 5 is fixedly connected to one end of the heat sink 4. A connecting block 6 is rotatably connected to one end of the telescopic rod 5. A fixing block 7 is fixedly connected to one end of the water-cooled box 1. An adjusting ring 8 is rotatably connected to the inside of the fixing block 7. The adjusting ring 8 and the connecting block 6 are fixedly connected. A support block 9 is fixedly connected, and a fixing screw 10 is threadedly connected to the inner side of the support block 9. A fixing groove 11 is opened on the surface of the adjusting ring 8. The fixing screw 10 and the fixing groove 11 are threadedly connected. A support frame 101 is fixedly connected to the upper side of the water-cooled box 1. A lifting motor 102 is fixedly connected to the outer side of the support frame 101. A winding roller 103 is fixedly connected to the output end of the lifting motor 102. A lifting cable 104 is fixedly connected to the outer side of the winding roller 103. A clamp 105 is fixedly connected to one end of the lifting cable 104. Before implementing this invention, the thickness, width, and number of heat sink 4 can be adjusted according to actual usage to ensure that the spacing between multiple fixing slots 11 is the same. A slot of the same size and cross-section as this device is opened inside the single crystal furnace to facilitate installation and fixing of the device. After installation, the water pipe 2 is connected to a pump capable of conveying water flow so that the water pipe 2 can convey water flow in and out of the water-cooled box 1. The weight of the clamp 105 is sufficient to pull the lifting cable 104 downwards. During device installation, An isolation valve between the main furnace chamber and the auxiliary furnace chamber of the single crystal furnace is installed at the connection between the water-cooled box 1 and the support frame 101. A plate is used to separate the gap between the isolation valve and the water-cooled box 1 and the support frame 101. This allows the silicon rod, after being pulled, to be lifted into the auxiliary furnace chamber. The isolation valve can be used to separate the silicon rod lifted into the auxiliary furnace chamber from the main furnace chamber. In this invention, the device is installed on the upper side inside the single crystal furnace body. By rotating the adjusting ring 8, multiple connecting blocks 6 are rotated. Block 6 drives multiple telescopic rods 5 to rotate. Because the telescopic rods 5 can extend or retract, they do not become stuck due to a fixed length during rotation. The rotation of the telescopic rods 5 causes multiple heat sinks 4 to rotate, bringing one end of each heat sink 4 closer together to a suitable position. The seed crystal is then clamped and fixed by the clamping plate 105. The lifting motor 102 drives the winding roller 103 to rotate, causing the winding roller 103 to unwind the lifting cable 104. This causes the lifting cable 104 to move the clamping plate 105 and the seed crystal downwards, allowing... The seed crystal is moved into the furnace for pulling. During the pulling process, the silicon rod gradually moves upward, causing it to rise and come into close contact with one end of multiple heat sinks 4. This allows the heat sinks 4 to come into close contact with the silicon rod. Since the end of the heat sink 4 away from the silicon rod is close to the inside of the groove 3, water is driven into and out of the water cooling box 1 through the water pipe 2, thereby cooling the water cooling box 1 and the groove 3. The contact between one end of the heat sink 4 and the groove 3 facilitates the cooling of the heat sink 4 by the groove 3, thus allowing the heat sink 4 to come into contact with the silicon rod and cool the silicon rod. In other words, when the silicon rod needs to dissipate heat, one end of the heat sink 4 is pressed tightly against the silicon rod, which facilitates the cooling of the air between the water cooling box 1 and the silicon rod. This makes the cooling of the silicon rod faster and more convenient, thereby increasing the longitudinal temperature gradient of the silicon rod. Furthermore, the rotation of the heat sink 4 allows it to come into contact with silicon rods of various diameters pulled out from the inside of the single crystal furnace. Thus, when the single crystal furnace produces silicon rods of various diameters, the device can cool the silicon rods, improving the convenience of increasing the longitudinal temperature gradient of the silicon rod and the versatility of the device in use.
[0023] Please see Figure 1 , Figure 2 and Figure 5As shown, a heat-conducting sheet 12 is fixedly connected to the inner side of the groove 3. The heat-conducting sheet 12 is connected to the water-cooled box 1. A heat-conducting groove 13 is opened on the inner side of the heat sink 4. The heat-conducting groove 13 and the heat-conducting sheet 12 are rotatably connected. Before implementing this invention, if the single crystal furnace is large and the diameter of the silicon rods produced is large, and it is necessary to improve the heat dissipation efficiency of the device, a groove of the same size and dimensions as the heat-conducting plate 12 can be opened on the inside of the water-cooling box 1 during production to facilitate the installation of the heat-conducting plate 12. If the heat-conducting plate 12 does not need to be installed, there is no need to open a groove on the inside of the water-cooling box 1. Ensure that one end of the heat-conducting plate 12 can extend into the inside of the heat-conducting groove 13. When using this invention, by extending one end of the heat-conducting plate 12 into the inside of the water-cooling box 1, the water flow inside the water-cooling box 1 can directly cool the heat-conducting plate 12. And because the other end of the heat-conducting plate 12 extends into and is close to the inner wall of the heat-conducting groove 13, the heat-conducting plate 12 can directly cool the heat-conducting groove 13, thereby enabling the heat-conducting groove 13 to cool the heat sink 4. That is, by opening multiple heat conduction grooves 13 on the inner side of the heat sink 4, the surface area of the heat sink 4 is further expanded. The heat conduction plate 12 is cooled by the water flow inside the water cooling box 1. The contact area between the water cooling box 1 and the heat sink 4 is further expanded by the heat conduction plate 12 extending into the heat conduction grooves 13. This further expands the heat transfer path between the heat sink 4 and the water cooling box 1, thereby making the device cool the silicon rod faster and more convenient, and improving the convenience of heat dissipation of the device.
[0024] Please see Figure 1 As shown, a through groove 14 is provided on the surface of the heat sink 4, and a heat-conducting block 15 is slidably connected to the inside of the through groove 14. The heat-conducting block 15 and the groove 3 are fixedly connected. Before implementing this invention, ensure that when the heat sink 4 rotates back and forth, a portion of the length of the heat-conducting block 15 can enter the inside of the through groove 14 and fit tightly against the through groove 14. When this invention is used, after the heat sink 4 is cooled down, the opening of the through groove 14 further increases the air contact area between the heat sink 4, the silicon rod, and the inside of the water-cooling box 1, so as to cool the air. The groove 3 is connected to the heat-conducting block 15, so that the water-cooling box 1 can cool the heat-conducting block 15, thereby enabling the heat-conducting block 15 to further cool the through groove 14 and the heat sink 4. That is, by opening the through slot 14, the air contact area between the heat sink 4 and the silicon rod and the inner side of the water-cooled box 1 is further expanded, thereby enabling the heat sink 4 to further cool the air. The heat-conducting block 15 is attached to the through slot 14, thereby further cooling the through slot 14. As shown in the figure, two sides of the heat-conducting block 15 are not in contact with the through slot 14. Thus, when the air passes through the through slot 14, the two sides of the heat-conducting block 15 are exposed to the air, thereby cooling the air. This further expands the contact area between the device and the air, so as to further cool the air near the curved surface of the silicon rod and improve the stability of the heat dissipation and cooling of the device.
[0025] Please see Figure 2 , Figure 7 and Figure 9 As shown, a waterproof motor 16 is fixedly connected to the inner side of the water-cooled box 1, and a lifting screw 17 is fixedly connected to the output end of the waterproof motor 16. A ring 18 is threadedly connected to the outer side of the lifting screw 17. Before implementing this invention, ensure that there is sufficient gap between the two sides of the arc surface of the ring 18 and the inner wall of the water-cooled box 1 for water flow. Set the waterproof motor 16 at the top inside the water-cooled box 1 so that when the silicon rod is pulled up, the waterproof motor 16 will only approach the silicon rod that has been cooled and formed at the top through the water-cooled box 1. The water flow cools the water-cooled box 1, so that the waterproof motor 16 can be cooled, and the phenomenon of excessive temperature affecting the operation of the waterproof motor 16 is not likely to occur. When using this invention, after the water flow is injected into the inside of the water-cooled box 1, the waterproof motor 16 drives the lifting screw 17 to rotate, the lifting screw 17 drives the ring 18 to move up and down, and the up and down movement of the ring 18 drives the water flow inside the water-cooled box 1 to tumble up and down. That is, by moving the ring 18 up and down, the ring 18 can drive the water flow to tumble, so that the water flow on the lower side can be moved closer to the water pipe 2 due to the tumbling and replacement, so that the water pipe 2 can more quickly and conveniently pull out the water flow on the lower side, so that the device can replace the water flow, thereby making the water cooling effect of the device better and improving the stability of the device's cooling.
[0026] Please see Figure 1 and Figure 7 As shown, an extension plate 19 is fixedly connected to the upper side of the ring 18, and a fluororubber pad 20 is fixedly connected to the inner side of the extension plate 19. Before implementing the present invention, ensure that the connection between the extension plate 19 and the fluororubber pad 20 is a vulcanized connection so that the connection between the two can be more resistant to high temperature and the connection between the two is not easily affected by high temperature. When the present invention is working, the ring 18 will drive the extension plate 19 and the fluororubber pad 20 to move up and down. The fluororubber pad 20 is pressed against the inner wall of one side of the water-cooled box 1 and one end of the heat-conducting plate 12, thereby wiping and cleaning the inner wall of one side of the water-cooled box 1 and one end of the heat-conducting plate 12. That is, when water flows in and out of the inside of the water-cooled box 1 for a long time, scale is easily adhered to the inside of the water-cooled box 1. By moving the fluororubber pad 20 up and down, the inner wall of the water-cooled box 1 near the silicon rod and the end of the heat-conducting plate 12 are wiped and cleaned, so that scale is not easy to adhere to the outside of the two, affecting the heat exchange of the device and improving the stability of the heat exchange of the device.
[0027] Please see Figure 7 and Figure 10 As shown, a fixing rod 21 is fixedly connected to one end of the ring 18, and a scraper 22 is fixedly connected to the outside of the fixing rod 21. The scraper 22 is used in conjunction with the water pipe 2. Before implementing the present invention, ensure that one side of the arc surface of the scraper 22 can fit the shape of the inner wall of the water pipe 2. When the present invention is used, when the ring 18 is raised to the highest position, it will simultaneously drive the fixing rod 21 to move. The fixing rod 21 drives the scraper 22 to enter the inner side of the water pipe 2. The arc surface of the scraper 22 in different directions fits tightly against the inner wall of the water pipe 2, thereby scraping the inner wall of the water pipe 2. That is, by periodically raising the ring 18 to its highest position, the scraper 22 can enter the inside of the water pipe 2, thereby scraping and cleaning the inner wall of the water pipe 2. This prevents scale from adhering to the inner wall of the water pipe 2 and affecting the flow of water during long-term use, thus further improving the stability of the device.
[0028] Please see Figure 7 , Figure 10 , Figure 11 and Figure 12 As shown, a limiting plate 23 is fixedly connected to the inner side of the water-cooled box 1, and a limiting groove 24 is opened on the inner side of the ring 18. The limiting groove 24 and the limiting plate 23 are slidably connected, and the limiting plate 23 and the scraper 22 are used in conjunction. Before implementing this invention, ensure that one side of the limiting plate 23 and one side of the scraper 22 have the same arc surface, and ensure that one end of the limiting plate 23 is aligned with one end of the water pipe 2. When the scraper 22 moves up and down, the limiting plates 23 on both sides are respectively attached to the scraper 22, and the limiting groove 24 limits the limiting plate 23, making the position of the limiting plate 23 more stable and making the limitation of the moving trajectory of the scraper 22 by the limiting plate 23 more stable. That is, when the scraper 22 moves up and down, the limiting plate 23 further limits the scraper 22, and the limiting plate 23 is aligned with the water pipe 2, so that when the scraper 22 is raised to the maximum height, it can be stably inserted into the inside of the water pipe 2, thereby making the scraper 22 more stable in scraping and cleaning the water pipe 2, and improving the stability of the device.
[0029] Please see Figure 7 and Figure 12 As shown, the surface of the ring 18 is provided with a drainage groove 25, and a spiral plate 26 is fixedly connected to the inner side of the drainage groove 25. During the operation of this invention, as the ring 18 moves up and down, the water flow can pass through the drain trough 25 and move up and down, thus facilitating the exchange and replacement of the water flow positions. When the water flow passes through the drain trough 25, it will come into contact with the spiral plate 26, which will guide the water flow by rotation, so that a certain degree of vortex can be generated when the water flow is discharged from the drain trough 25. That is, when the ring 18 moves up and down to agitate the water flow, the opening of the drain channel 25 further increases the movement path of the water flow, so as to facilitate the alternation of the water flow. The spiral plate 26 guides the water flow, so that the water flow generates eddies when it is discharged, making the alternation between the water flows more frequent. As a result, the new water flow entering through the water pipe 2 on one side can mix and exchange with the old water flow inside the water-cooled box 1 more frequently, thereby making the cooling of the water-cooled box 1 more uniform and improving the stability and uniformity of the device's cooling.
[0030] Please see Figure 6 and Figure 8 As shown, a polygonal groove 27 is provided on the inner side of the telescopic rod 5, and a polygonal rod 28 is slidably connected to the inner side of the polygonal groove 27. A synchronization ring 29 is fixedly connected to one end of the polygonal rod 28, and a magnetic plate 30 is fixedly connected to one side of the synchronization ring 29. When the present invention is working, after the adjusting ring 8 drives the telescopic rod 5 to rotate, the synchronous ring 29 is moved to the upper side of the telescopic rod 5 so that the polygonal rod 28 is aligned with the inner side of the polygonal groove 27. Then the synchronous ring 29 is moved down so that the polygonal rod 28 is inserted into the inner side of the polygonal groove 27 through the synchronous ring 29. The magnetic plate 30 is also attached to the upper side of the water-cooled box 1 and is adsorbed and fixed through the synchronous ring 29. That is, after the telescopic rod 5 has rotated, the polygonal rod 28 limits the polygonal groove 27, so that the position of the telescopic rod 5 can be further restricted, making the position of the telescopic rod 5 and the heat sink 4 more stable after rotation, thus making the heat sink 4 adhere to the silicon rod for heat dissipation more stably and improving the stability of the device.
[0031] Please see Figure 6 and Figure 8 As shown, a connecting plate 31 is fixedly connected to the lower side of the synchronization ring 29. A connecting groove 32 is provided on the surface of the connecting plate 31. The connecting groove 32 is threadedly connected to the fixing screw 10. A reinforcing groove 33 is provided on the inner side of one of the telescopic rods 5. A reinforcing plate 34 is rotatably connected to one end of one of the fixing screws 10. The reinforcing groove 33 and the reinforcing plate 34 are used in conjunction. Before implementing this invention, ensure that the reinforcing plate 34 has a protruding part with the same shape as the reinforcing groove 33 as shown in the figure. When using this invention, after the telescopic rod 5 has rotated, the synchronizing ring 29 can be moved down first, so that the polygonal rod 28 is inserted into the inside of the polygonal groove 27. The synchronizing ring 29 drives the connecting groove 32 of the connecting plate 31 to align with the fixing groove 11 at the appropriate position. Then, the fixing screw 10 is screwed into the inside of the connecting groove 32 and the fixing groove 11. At the same time, the user can manually keep the reinforcing plate 34 horizontal. When the fixing screw 10 moves, it will drive the reinforcing plate 34 to move synchronously, so that the reinforcing plate 34 is inserted into the reinforcing groove 33 at the appropriate position inside the telescopic rod 5. That is, after the synchronization ring 29 is fixed to the outside of the water-cooled box 1 by adsorption by the magnetic plate 30, the position of the connecting plate 31 and the position of the synchronization ring 29 can be further restricted and fixed by screwing the fixing screw 10 into the inner side of the connecting groove 32 and the fixing groove 11, thereby making the installation of the synchronization ring 29 more stable. At the same time, by inserting the reinforcing plate 34 into the inner side of the reinforcing groove 33, the position of the telescopic rod 5 can be further restricted, thereby making the adjusted position of the heat sink 4 more fixed and improving the stability of the device.
[0032] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.
Claims
1. A single-crystal silicon rod pulling device, comprising a water-cooled box (1), characterized in that: The water-cooled box (1) is connected to a water pipe (2) on its inner side. A groove (3) is provided on the inner side of the water-cooled box (1). A heat sink (4) is rotatably connected to the inner side of the groove (3). A telescopic rod (5) is fixedly connected to one end of the heat sink (4). A connecting block (6) is rotatably connected to one end of the telescopic rod (5). A fixing block (7) is fixedly connected to one end of the water-cooled box (1). An adjusting ring (8) is rotatably connected to the inner side of the fixing block (7). The adjusting ring (8) and the connecting block (6) are fixedly connected. A support block (9) is fixedly connected to one end of the water-cooled box (1). The inner side of the support block (9) is threaded with a fixing screw (10), and the surface of the adjusting ring (8) is provided with a fixing groove (11). The fixing screw (10) and the fixing groove (11) are threaded together. The upper side of the water-cooled box (1) is fixedly connected with a support frame (101). The outer side of the support frame (101) is fixedly connected with a lifting motor (102). The output end of the lifting motor (102) is fixedly connected with a winding roller (103). The outer side of the winding roller (103) is fixedly connected with a lifting cable (104). One end of the lifting cable (104) is fixedly connected with a clamp (105).
2. The single-crystal silicon rod pulling device according to claim 1, characterized in that: A heat-conducting plate (12) is fixedly connected to the inner side of the groove (3). The heat-conducting plate (12) is connected to the water-cooled box (1). A heat-conducting groove (13) is opened on the inner side of the heat sink (4). The heat-conducting groove (13) and the heat-conducting plate (12) are rotatably connected.
3. The single-crystal silicon rod pulling device according to claim 2, characterized in that: The heat sink (4) has a through groove (14) on its surface. A heat-conducting block (15) is slidably connected to the inside of the through groove (14). The heat-conducting block (15) and the groove (3) are fixedly connected.
4. The single-crystal silicon rod pulling device according to claim 3, characterized in that: A waterproof motor (16) is fixedly connected to the inside of the water-cooled box (1), and a lifting screw (17) is fixedly connected to the output end of the waterproof motor (16). A ring (18) is threadedly connected to the outside of the lifting screw (17).
5. The single-crystal silicon rod pulling device according to claim 4, characterized in that: An extension plate (19) is fixedly connected to the upper side of the ring (18), and a fluororubber pad (20) is fixedly connected to the inner side of the extension plate (19).
6. The single-crystal silicon rod pulling apparatus according to claim 5, characterized in that: One end of the ring (18) is fixedly connected to a fixing rod (21), and a scraper (22) is fixedly connected to the outside of the fixing rod (21). The scraper (22) and the water pipe (2) are used together.
7. The single-crystal silicon rod pulling apparatus according to claim 6, characterized in that: The water-cooled box (1) is fixedly connected to a limiting plate (23), and a limiting groove (24) is opened on the inner side of the ring (18). The limiting groove (24) and the limiting plate (23) are slidably connected, and the limiting plate (23) and the scraper (22) are used together.
8. The single-crystal silicon rod pulling apparatus according to claim 7, characterized in that: The surface of the ring (18) is provided with a drainage groove (25), and a spiral plate (26) is fixedly connected to the inner side of the drainage groove (25).
9. A single-crystal silicon rod pulling apparatus according to claim 8, characterized in that: The telescopic rod (5) has a polygonal groove (27) on its inner side. A polygonal rod (28) is slidably connected to the inner side of the polygonal groove (27). A synchronization ring (29) is fixedly connected to one end of the polygonal rod (28). A magnetic plate (30) is fixedly connected to one side of the synchronization ring (29).
10. A single-crystal silicon rod pulling apparatus according to claim 9, characterized in that: A connecting plate (31) is fixedly connected to the lower side of the synchronization ring (29). A connecting groove (32) is provided on the surface of the connecting plate (31). The connecting groove (32) is threadedly connected to the fixing screw (10). A reinforcing groove (33) is provided on the inner side of one of the telescopic rods (5). A reinforcing plate (34) is rotatably connected to one end of the fixing screw (10). The reinforcing groove (33) and the reinforcing plate (34) are used together.
Citation Information
Patent Citations
Heat exchanger, heat exchange assembly and single crystal silicon rod drawing device
CN117628962A