Combination back-suction valve and back-suction method thereof
By designing a back-suction valve chamber and a movable back-suction component in the valve body, the problem of liquid accumulation in semiconductor devices is solved, achieving effective liquid discharge and sealing, and ensuring normal operation of the equipment.
Patent Information
- Application Number
- CN202511874980.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-12
- Publication Date
- 2026-03-03
- Estimated Expiration
- 2045-12-12
AI Technical Summary
In semiconductor equipment, liquid may slowly flow out or flow out due to vibration when the valve of the delivery pipeline is closed, causing the equipment to malfunction. Furthermore, prolonged liquid accumulation can lead to reduced performance or failure.
Design a combined back suction valve, including a valve body, a liquid inlet assembly, and a back suction assembly. By opening a back suction valve chamber in the valve body and movably installing the back suction assembly in the back suction valve chamber, the back suction assembly rotates and blows air to clean impurities when the liquid outlet is blocked, forming a negative pressure to attract liquid out and ensure sealing.
It effectively prevents liquid from leaking out of the drain channel, ensures that the inlet and outlet channels do not leak during normal fluid transport, and can discharge residual liquid, thereby improving the stability of equipment operation.
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Figure CN121296746B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of engineering components technology, specifically relating to valves, and more particularly to a combined back suction valve and its back suction method. Background Technology
[0002] Semiconductor equipment is transported with various liquids during operation. Even when the valves of the transport pipeline are closed, the liquid accumulated in the pipeline will still slowly flow out, or it will flow out after being vibrated, affecting the normal operation of the equipment. If the liquid accumulates in the pipeline for too long, the performance will gradually decrease or even fail completely.
[0003] Therefore, there is an urgent need to develop a new combined back suction valve and its back suction method to solve the technical problem that liquid residue in the delivery pipeline cannot be discharged in a timely manner.
[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Summary of the Invention
[0005] This disclosure provides at least one combined back-suction valve and its back-suction method.
[0006] In a first aspect, embodiments of this disclosure provide a combined backflow valve, comprising: a valve body, an inlet assembly, and a backflow assembly; wherein the valve body has an inlet / outlet flow channel, an inlet valve chamber, a backflow valve chamber, and a discharge flow channel; the inlet valve chamber communicates with the inlet / outlet flow channel, the backflow valve chamber communicates with the inlet / outlet flow channel, and the discharge flow channel communicates with the inlet / outlet flow channel, and the discharge flow channel is located below the inlet / outlet flow channel; the inlet assembly is movably disposed within the inlet valve chamber, the backflow assembly is movably disposed within the backflow valve chamber, and the discharge inlet of the discharge flow channel is located on the moving path of the backflow assembly; the inlet assembly is adapted to move within the inlet valve chamber. The system controls the opening or closing of the inlet and outlet flow channels; the back suction assembly moves toward the drain inlet of the drain channel; after the back suction assembly blocks the drain inlet, the back suction assembly rotates at the drain inlet and discharges air to form an airflow that blows impurities out of the drain inlet until the back suction assembly is in contact with the drain inlet to completely block the drain inlet; and the back suction assembly moves away from the drain inlet; after the back suction assembly abuts against the diaphragm of the back suction valve chamber, the back suction assembly absorbs air in the inlet and outlet flow channels to attract the fluid in the inlet and outlet flow channels toward the back suction valve chamber until the fluid flows into the drain channel through the drain inlet.
[0007] In one optional embodiment, the back suction assembly includes: a back suction unit and a drive unit; the back suction unit is movably disposed within the back suction valve chamber via the drive unit, and the drive unit is movably connected to the back suction unit; the drive unit drives the back suction unit to move toward the drain inlet; after the back suction unit blocks the drain inlet, the drive unit pushes the back suction unit to rotate at the drain inlet, so that the back suction unit scrapes off impurities at the drain inlet, and when the drive unit moves relative to the back suction unit, it discharges air from the back suction unit to form an airflow that blows impurities out of the drain inlet until the back suction unit is in contact with the drain inlet, that is, the back suction unit completely blocks the drain inlet; the drive unit drives the back suction unit to move away from the drain inlet; after the back suction unit abuts against the diaphragm of the back suction valve chamber, when the drive unit moves relative to the back suction unit, it draws air from the inlet and outlet flow channels into the back suction unit, so as to attract fluid in the inlet and outlet flow channels toward the back suction valve chamber, until the fluid flows into the drain channel through the drain inlet.
[0008] In one optional embodiment, the driving unit includes: a first piston, a connecting column, and a push plate; the connecting column is connected to the first piston, the push plate is connected to the connecting column, and the push plate is movably disposed in the back suction valve chamber via the connecting column and the first piston; the push plate is helically connected to the back suction unit; the first piston drives the connecting column and the push plate to move toward the discharge inlet, thereby driving the back suction unit to move toward the discharge inlet of the discharge channel; after the back suction unit blocks the discharge inlet, the first piston continues to push the connecting column and the push plate to move relative to the back suction unit, so as to push the back suction unit to rotate at the discharge inlet, and the push plate discharges air from the back suction unit when it moves relative to the back suction unit; the first piston drives the connecting column and the push plate to move away from the discharge inlet; after the back suction unit abuts against the diaphragm of the back suction valve chamber, the first piston continues to push the connecting column and the push plate to move relative to the back suction unit, that is, the push plate draws air from the inlet and outlet channels into the back suction unit when it moves relative to the back suction unit.
[0009] In one optional embodiment, the back-suction unit includes: a conical barrel; the conical barrel is divided into a conical portion and a cylindrical portion, the conical portion is positioned facing the drain inlet, and the conical portion has several through holes; the pusher plate is located in the cylindrical portion and is spirally connected to the cylindrical portion; when the pusher plate moves relative to the conical barrel and penetrates deeper into the conical barrel, the conical barrel rotates under the pusher plate, and the pusher plate compresses the volume inside the conical barrel to discharge the air inside the conical barrel through each through hole; when the pusher plate moves relative to the conical barrel and tends to move away from the conical barrel, the conical barrel rotates under the pusher plate, and the pusher plate expands the volume inside the conical barrel to draw external air into the conical barrel through each of the through holes.
[0010] In one optional embodiment, the cylindrical portion is provided with a spiral groove, the outer diameter of the pusher plate is the same as the inner diameter of the cylindrical portion, a limit block is provided on the edge of the pusher plate, and the limit block is slidably disposed in the spiral groove.
[0011] In one alternative embodiment, the drain inlet is designed to be constricted so that the conical barrel fits snugly against the drain inlet.
[0012] In one optional embodiment, the valve body has a first movable chamber, the first piston is located in the first movable chamber and divides the first movable chamber into an upper part and a lower part; the valve body has a first vent that communicates with the lower part of the first movable chamber, and a first spring is provided in the upper part of the first movable chamber; when high-pressure gas is injected into the lower part of the first movable chamber through the first vent, the first piston squeezes the first spring to drive the connecting column and push plate away from the drain inlet; when the high-pressure gas in the lower part of the first movable chamber is discharged from the first vent, the first spring pushes the first piston to reset, thereby driving the connecting column and push plate toward the drain inlet.
[0013] In one optional embodiment, the liquid inlet assembly includes: a second piston and a liquid inlet valve core; the liquid inlet valve core is connected to the second piston and is movably disposed within the liquid inlet valve chamber via the second piston; the second piston drives the liquid inlet valve core to move toward the liquid inlet / outlet channel until the liquid inlet valve core cuts off the liquid inlet / outlet channel; the second piston drives the liquid inlet valve core to move away from the liquid inlet / outlet channel until the liquid inlet valve core opens the liquid inlet / outlet channel.
[0014] In one optional embodiment, a second movable chamber is provided within the valve body, and a second piston is located within the second movable chamber, dividing the second movable chamber into an upper part and a lower part; a second vent is provided on the valve body, communicating with the lower part of the second movable chamber, and a second spring is provided in the upper part of the second movable chamber; when high-pressure gas is injected into the lower part of the second movable chamber through the second vent, the second piston compresses the second spring to drive the inlet valve core away from the inlet / outlet flow channel; when high-pressure gas is discharged from the lower part of the second movable chamber through the second vent, the second spring pushes the second piston to reset, thereby driving the inlet valve core toward the inlet / outlet flow channel.
[0015] Secondly, embodiments of this disclosure also provide a back-suction method using the aforementioned combined back-suction valve, comprising: moving the inlet assembly within the inlet valve chamber to control the opening or closing of the inlet and outlet flow channels; moving the back-suction assembly toward the outlet inlet of the outlet flow channel; after the back-suction assembly blocks the outlet inlet, rotating the back-suction assembly at the outlet inlet and discharging air to form an airflow that blows impurities out of the outlet inlet until the back-suction assembly adheres to the outlet inlet to completely block the outlet inlet; and moving the back-suction assembly away from the outlet inlet; after the back-suction assembly abuts against the diaphragm of the back-suction valve chamber, the back-suction assembly absorbs air from the inlet and outlet flow channels to attract fluid in the inlet and outlet flow channels toward the back-suction valve chamber until the fluid flows into the outlet flow channel through the outlet inlet.
[0016] The beneficial effects of this invention are as follows: By opening a back suction valve chamber in the valve body and movably installing the back suction assembly in the back suction valve chamber, during the process of the back suction assembly blocking the drain inlet, the back suction assembly rotates and blows air at the drain inlet to clean impurities at the drain inlet, avoiding gaps between the back suction assembly and the drain inlet, improving the sealing performance between the back suction assembly and the drain inlet, and ensuring that the inlet and outlet flow channels do not leak from the drain flow channel during normal fluid transport. At the same time, during the process of the back suction assembly opening the drain inlet to drain, the back suction assembly presses against the diaphragm of the back suction valve chamber to draw air, which can create a negative pressure in the back suction valve chamber, thereby guiding the residual liquid in the inlet and outlet flow channels into the drain flow channel through the drain inlet, thus realizing the discharge of the residual liquid in the inlet and outlet flow channels.
[0017] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.
[0018] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0020] Figure 1 An external structural diagram of a combined back suction valve provided in an embodiment of this disclosure;
[0021] Figure 2 This is an internal structural diagram of a combined backflow valve provided in an embodiment of the present disclosure;
[0022] Figure 3 This is a structural diagram of a back-suction assembly provided in an embodiment of the present disclosure;
[0023] Figure 4 A structural diagram of a driving unit provided in an embodiment of this disclosure;
[0024] Figure 5 This is a structural diagram of a back-suction unit provided in an embodiment of the present disclosure;
[0025] Figure 6 This is a structural diagram of a back-suction unit abutting against a diaphragm, provided in an embodiment of this disclosure.
[0026] In the picture:
[0027] 1. Valve body; 11. Inlet / outlet flow channel; 12. Inlet valve chamber; 13. Backflow valve chamber; 131. Diaphragm; 14. Drainage flow channel; 141. Drainage inlet; 15. First movable chamber; 16. First vent; 17. Second movable chamber; 18. Second vent;
[0028] 2. Liquid inlet assembly; 21. Second piston; 22. Liquid inlet valve core; 23. Second spring;
[0029] 3. Back suction assembly; 31. Drive unit; 311. First piston; 312. Connecting column; 313. Push plate; 314. Limiting block; 315. First spring; 32. Back suction unit; 321. Conical barrel; 3211. Cylindrical part; 3212. Conical part; 3213. Spiral groove; 3214. Through hole. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0031] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0032] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.
[0033] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.
[0034] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0035] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0036] Research has found that semiconductor equipment involves the transport of various liquids during operation. Even when the valves in the transport pipeline are closed, the liquid accumulated in the pipeline will still slowly flow out, or flow out after being vibrated, affecting the normal operation of the equipment. If the liquid accumulates in the pipeline for too long, the performance will gradually decrease or even fail completely.
[0037] Based on the above research, this disclosure provides a combined back-suction valve and its back-suction method. By opening a back-suction valve chamber in the valve body and movably installing a back-suction component in the back-suction valve chamber, during the process of the back-suction component blocking the drain inlet, the back-suction component rotates and blows air at the drain inlet to clean impurities at the drain inlet, avoiding gaps between the back-suction component and the drain inlet, improving the sealing performance between the back-suction component and the drain inlet, and ensuring that the inlet and outlet flow channels do not leak from the drain flow channel during normal fluid transport. At the same time, during the process of the back-suction component opening the drain inlet to drain, the back-suction component presses against the diaphragm of the back-suction valve chamber to draw air, which can create a negative pressure in the back-suction valve chamber, thereby guiding the residual liquid in the inlet and outlet flow channels into the drain flow channel through the drain inlet, realizing the discharge of the residual liquid in the inlet and outlet flow channels.
[0038] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.
[0039] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0040] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0041] like Figures 1 to 6As shown, at least one embodiment provides a combined backflow valve, comprising: a valve body 1, an inlet assembly 2, and a backflow assembly 3; wherein the valve body 1 has an inlet / outlet flow channel 11, an inlet valve chamber 12, a backflow valve chamber 13, and a drain flow channel 14, the inlet valve chamber 12 communicating with the inlet / outlet flow channel 11, the backflow valve chamber 13 communicating with the inlet / outlet flow channel 11, and the drain flow channel 14 communicating with the inlet / outlet flow channel 11, and the drain flow channel 14 being located below the inlet / outlet flow channel 11; the inlet assembly 2 is movably disposed within the inlet valve chamber 12, the backflow assembly 3 is movably disposed within the backflow valve chamber 13, and the drain inlet 141 of the drain flow channel 14 is located on the moving path of the backflow assembly 3; the inlet assembly 2 is adapted to move within the inlet valve chamber 12 to control the inlet / outlet flow. The flow channel 11 is opened or closed; the back suction assembly 3 moves toward the drain inlet 141 of the drain channel 14. After the back suction assembly 3 blocks the drain inlet 141, the back suction assembly 3 rotates at the drain inlet 141 and discharges air to form an airflow that blows impurities out of the drain inlet 141 until the back suction assembly 3 is in contact with the drain inlet 141 to completely block the drain inlet 141; and the back suction assembly 3 moves away from the drain inlet 141. After the back suction assembly 3 abuts against the diaphragm 131 of the back suction valve chamber 13, the diaphragm 131 deforms, and the back suction assembly 3 absorbs air in the inlet and outlet flow channel 11 to attract the fluid in the inlet and outlet flow channel 11 toward the back suction valve chamber 13 until the fluid flows into the drain channel 14 through the drain inlet 141.
[0042] In at least one embodiment, by opening a back suction valve chamber 13 in the valve body 1 and movably installing the back suction assembly 3 in the back suction valve chamber 13, during the process of the back suction assembly 3 blocking the drain inlet 141, the back suction assembly 3 rotates and blows air at the drain inlet 141 to clean impurities at the drain inlet 141, avoiding gaps between the back suction assembly 3 and the drain inlet 141, improving the sealing performance between the back suction assembly 3 and the drain inlet 141, and ensuring that the inlet and outlet flow channels 11 will not leak from the drain flow channel 14 when normally conveying fluid. At the same time, during the process of the back suction assembly 3 opening the drain inlet 141 to drain fluid, after the back suction assembly 3 abuts against the diaphragm 131 of the back suction valve chamber 13, the diaphragm 131 deforms and then draws in air, which can form a negative pressure in the back suction valve chamber 13, thereby guiding the residual liquid in the inlet and outlet flow channels 11 into the drain flow channel 14 through the drain inlet 141, thereby realizing the discharge of the residual liquid in the inlet and outlet flow channels 11.
[0043] In at least one embodiment, please refer to Figure 2 , Figure 3 , Figure 6The back suction assembly 3 includes a back suction unit 32 and a drive unit 31. The back suction unit 32 is movably disposed within the back suction valve chamber 13 via the drive unit 31, and the drive unit 31 is movably connected to the back suction unit 32. The drive unit 31 drives the back suction unit 32 to move toward the discharge inlet 141. After the back suction unit 32 blocks the discharge inlet 141, the drive unit 31 pushes the back suction unit 32 to rotate at the discharge inlet 141, so that the back suction unit 32 scrapes off impurities at the discharge inlet 141. When the drive unit 31 moves relative to the back suction unit 32, it expels air from the back suction unit 32. The airflow is generated to blow impurities out from the drain inlet 141 until the back suction unit 32 comes into contact with the drain inlet 141, that is, the back suction unit 32 completely blocks the drain inlet 141; the drive unit 31 drives the back suction unit 32 to move away from the drain inlet 141. After the back suction unit 32 abuts against the diaphragm 131 of the back suction valve chamber 13, the drive unit 31 moves relative to the back suction unit 32 and draws air from the inlet and outlet flow channels 11 into the back suction unit 32, so as to attract the fluid in the inlet and outlet flow channels 11 to flow toward the back suction valve chamber 13, until the fluid flows into the drain channel 14 through the drain inlet 141.
[0044] Specifically, since there are particles in the fluid, and these particles adhere to the drain inlet 141, if the particles attached to the drain inlet 141 are not treated, a gap will exist between the drain inlet 141 and the back suction unit 32. During the normal flow of fluid through the inlet / outlet channel 11, the fluid will be discharged through the gap between the drain inlet 141 and the back suction unit 32, resulting in fluid waste. However, when the back suction unit 32 rotates at the drain inlet 141, the friction between the back suction unit 32 and the drain inlet 141 can scrape off the particles attached to the drain inlet 141, thus eliminating the gap between the drain inlet 141 and the back suction unit 32. The back suction unit 32 completely blocks the drain inlet 141, and during the normal flow of fluid through the inlet / outlet channel 11, the fluid will not be discharged from the drain inlet 141, improving the sealing between the back suction unit 32 and the drain inlet 141.
[0045] Specifically, the function of the drive unit 31 is to drive the back suction unit 32 to rotate. At the same time, the drive unit 31 can also move relative to the back suction unit 32. That is, when the drive unit 31 and the back suction unit 32 move towards each other, the drive unit 31 squeezes the air in the back suction unit 32 and the air is discharged from the back suction unit 32. When the drive unit 31 and the back suction unit 32 move away from each other, the drive unit 31 draws external air into the back suction unit 32.
[0046] Specifically, after the back suction unit 32 blocks the drain inlet 141, the drive unit 31 squeezes the air in the back suction unit 32. The discharged air forms an airflow that can be blown between the drain inlet 141 and the back suction unit 32, thereby blowing out the impurities ground off from the drain inlet 141 by the back suction unit 32, preventing impurities from accumulating at the drain inlet 141, and further improving the sealing performance between the back suction unit 32 and the drain inlet 141.
[0047] Specifically, after the back suction unit 32 abuts against the diaphragm 131 of the back suction valve chamber 13, the diaphragm 131 deforms. After the diaphragm 131 deforms, the back suction unit 32 can no longer move, but the drive unit 31 can move relative to the back suction unit 32. Thus, the drive unit 31 is equivalent to a piston in the back suction unit 32, which can draw air from outside the back suction unit 32 into the back suction unit 32. As a result, a negative pressure is formed in the back suction valve chamber 13, and the fluid in the inlet and outlet liquid flow channel 11 flows toward the back suction valve chamber 13. Below the back suction valve chamber 13 is the drain channel 14, and the fluid flows into the drain channel 14 through the drain inlet 141.
[0048] In at least one embodiment, please refer to Figure 3 , Figure 4 The drive unit 31 includes a first piston 311, a connecting column 312, and a push plate 313. The connecting column 312 is connected to the first piston 311, and the push plate 313 is connected to the connecting column 312. The push plate 313 is movably disposed in the suction valve chamber 13 via the connecting column 312 and the first piston 311. The push plate 313 is helically connected to the suction unit 32. The first piston 311 drives the connecting column 312 and the push plate 313 to move toward the discharge inlet 141, thereby driving the suction unit 32 to move toward the discharge inlet 141 of the discharge channel 14. After the suction unit 32 blocks the discharge inlet 141, the first piston... 311 continues to push the connecting column 312 and the push plate 313 to move relative to the back suction unit 32, so as to push the back suction unit 32 to rotate at the discharge inlet 141, and when the push plate 313 moves relative to the back suction unit 32, it discharges the air in the back suction unit 32; the first piston 311 drives the connecting column 312 and the push plate 313 to move away from the discharge inlet 141. After the back suction unit 32 abuts against the diaphragm 131 of the back suction valve chamber 13, the first piston 311 continues to push the connecting column 312 and the push plate 313 to move relative to the back suction unit 32, that is, when the push plate 313 moves relative to the back suction unit 32, it draws the air in the inlet and outlet flow channel 11 into the back suction unit 32.
[0049] Specifically, the first piston 311 is used to drive the connecting column 312 and the push plate 313 to move.
[0050] Specifically, the connecting column 312 is used to connect the first piston 311 and the push plate 313.
[0051] Specifically, the push plate 313 is used to seal the back suction unit 32. At the same time, the push plate 313 can drive the back suction unit 32 to rotate, and the back suction unit 32 moves relative to the push plate 313 during the rotation, thereby squeezing the air in the back suction unit 32 or sucking external air into the back suction unit 32.
[0052] In at least one embodiment, please refer to Figure 3 , Figure 5 The back-suction unit 32 includes a conical barrel 321; the conical barrel 321 is divided into a conical portion 3212 and a cylindrical portion 3211, the conical portion 3212 is positioned facing the drain inlet 141, and the conical portion 3212 has several through holes 3214, the pusher plate 313 is located in the cylindrical portion 3211 and is spirally connected to the cylindrical portion 3211; when the pusher plate 313 moves relative to the conical barrel 321 and penetrates into the conical barrel 321, the conical barrel 3212... 1. Under the push of the push plate 313, the cone 321 rotates and the push plate 313 compresses the volume inside the cone 321 to discharge the air inside the cone 321 through each through hole 3214; when the push plate 313 moves relative to the cone 321 and tends to move away from the cone 321, the cone 321 rotates under the push of the push plate 313 and the push plate 313 expands the volume inside the cone 321 to draw external air into the cone 321 through each through hole 3214.
[0053] Specifically, the cylindrical part 3211 is used in conjunction with the push plate 313 to achieve rotation and relative movement.
[0054] Specifically, the function of the conical portion 3212 is to contain air.
[0055] Specifically, the conical barrel 321 and the push plate 313 form a piston structure, so that when the push plate 313 and the conical barrel 321 move relative to each other, the air in the conical barrel 321 can be discharged or the external air can be drawn into the conical barrel 321.
[0056] In at least one embodiment, please refer to Figure 3 The cylindrical portion 3211 is provided with a spiral groove 3213. The outer diameter of the push plate 313 is the same as the inner diameter of the cylindrical portion 3211. A limit block 314 is provided on the edge of the push plate 313, and the limit block 314 is slidably disposed in the spiral groove 3213.
[0057] Specifically, the limiting block 314 cooperates with the spiral groove 3213 to enable the pusher plate 313 to push the conical barrel 321 to rotate, and at the same time enable the pusher plate 313 and the conical barrel 321 to move relative to each other.
[0058] Specifically, the limiting block 314 is fully filled in the spiral groove 3213, and the limiting block 314 can act as a separator, while the pusher plate 313 can achieve isolation between the inside and outside of the conical barrel 321.
[0059] In at least one embodiment, please refer to Figure 2 The drain inlet 141 is designed in a constricted shape so that the conical barrel 321 fits into the drain inlet 141.
[0060] Specifically, the drain inlet 141 is designed to be constricted, and the conical barrels 321 of different specifications can be adapted to the drain inlet 141, thus overcoming assembly errors.
[0061] In at least one embodiment, please refer to Figure 2 The valve body 1 has a first movable chamber 15, and the first piston 311 is located in the first movable chamber 15 and divides the first movable chamber 15 into an upper part and a lower part. The valve body 1 has a first vent 16 communicating with the lower part of the first movable chamber 15, and a first spring 315 is provided in the upper part of the first movable chamber 15. When the first vent 16 injects high-pressure gas into the lower part of the first movable chamber 15, the first piston 311 squeezes the first spring 315 to drive the connecting column 312 and the push plate 313 away from the drain inlet 141. When the high-pressure gas in the lower part of the first movable chamber 15 is discharged from the first vent 16, the first spring 315 pushes the first piston 311 to reset, so as to drive the connecting column 312 and the push plate 313 toward the drain inlet 141.
[0062] Specifically, the first piston 311 can move within the first movable chamber 15, thereby driving the pusher plate 313 to move upward or downward.
[0063] In at least one embodiment, please refer to Figure 2 The liquid inlet assembly 2 includes a second piston 21 and a liquid inlet valve core 22. The liquid inlet valve core 22 is connected to the second piston 21 and is movably disposed in the liquid inlet valve chamber 12 via the second piston 21. The second piston 21 drives the liquid inlet valve core 22 to move toward the liquid inlet / outlet channel 11 until the liquid inlet valve core 22 cuts off the liquid inlet / outlet channel 11. The second piston 21 drives the liquid inlet valve core 22 to move away from the liquid inlet / outlet channel 11 until the liquid inlet valve core 22 opens the liquid inlet / outlet channel 11.
[0064] In at least one embodiment, please refer to Figure 2The valve body 1 has a second movable chamber 17, and the second piston 21 is located in the second movable chamber 17 and divides the second movable chamber 17 into an upper part and a lower part. The valve body 1 has a second vent 18 that communicates with the lower part of the second movable chamber 17, and a second spring 23 is provided in the upper part of the second movable chamber 17. When the second vent 18 injects high-pressure gas into the lower part of the second movable chamber 17, the second piston 21 squeezes the second spring 23 to drive the liquid inlet valve core 22 away from the liquid inlet / outlet channel 11. When the high-pressure gas in the lower part of the second movable chamber 17 is discharged from the second vent 18, the second spring 23 pushes the second piston 21 to reset, so as to drive the liquid inlet valve core 22 toward the liquid inlet / outlet channel 11.
[0065] Based on the same technical concept, at least one embodiment also provides a back suction method using the combined back suction valve as described above, which includes: the inlet assembly 2 moving within the inlet valve chamber 12 to control the opening or closing of the inlet / outlet flow channel 11; the back suction assembly 3 moving toward the drain inlet 141 of the drain flow channel 14, after the back suction assembly 3 blocks the drain inlet 141, the back suction assembly 3 rotating at the drain inlet 141 and discharging air to form an airflow that blows impurities out of the drain inlet 141 until the back suction assembly 3 adheres to the drain inlet 141 to completely block the drain inlet 141; and the back suction assembly 3 moving away from the drain inlet 141, after the back suction assembly 3 abuts against the diaphragm 131 of the back suction valve chamber 13, the back suction assembly 3 absorbing air in the inlet / outlet flow channel 11 to attract fluid in the inlet / outlet flow channel 11 toward the back suction valve chamber 13 until the fluid flows into the drain flow channel 14 through the drain inlet 141.
[0066] In summary, this invention, by creating a back suction valve chamber in the valve body and movably installing a back suction assembly within it, allows the back suction assembly to clean impurities at the drain inlet during the process of blocking it. This prevents gaps between the back suction assembly and the drain inlet, improves their sealing, and ensures that the inlet and outlet fluid channels do not leak from the drain channel during normal fluid transport. Simultaneously, during the process of the back suction assembly opening the drain inlet for drainage, the assembly draws air against the diaphragm of the back suction valve chamber, creating a negative pressure within the chamber. This pressure guides residual liquid in the inlet and outlet fluid channels into the drain channel through the drain inlet, effectively discharging the residual liquid.
[0067] In the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention based on the specific circumstances.
[0068] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as a second element, component, region, layer, or segment.
[0069] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.
[0070] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.
[0071] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A combination back-suction valve characterized by, The utility model relates to a valve body (1), liquid inlet assembly (2) and back suction assembly (3), wherein The valve body (1) is provided with inlet and outlet flow channel (11), liquid inlet valve cavity (12), back suction valve cavity (13) and liquid outlet flow channel (14), the liquid inlet valve cavity (12) is communicated with inlet and outlet flow channel (11), the back suction valve cavity (13) is communicated with inlet and outlet flow channel (11), the liquid outlet flow channel (14) is communicated with inlet and outlet flow channel (11), and the liquid outlet flow channel (14) is below inlet and outlet flow channel (11); The liquid inlet assembly (2) is movably arranged in the liquid inlet valve cavity (12), the back suction assembly (3) is movably arranged in the back suction valve cavity (13), and the liquid outlet inlet (141) of the liquid outlet flow channel (14) is located on the moving path of the back suction assembly (3); The liquid inlet assembly (2) is adapted to move in the liquid inlet valve cavity (12) to control the conduction or interruption of the inlet and outlet flow channel (11); The back suction assembly (3) comprises a back suction unit (32) and a driving unit (31); The back suction unit (32) is movably arranged in the back suction valve cavity (13) by the driving unit (31), and the driving unit (31) is movably connected with the back suction unit (32); The driving unit (31) comprises a first piston (311), a connecting column (312) and a push disc (313); The connecting column (312) is connected with the first piston (311), the push disc (313) is connected with the connecting column (312), and the push disc (313) is movably arranged in the back suction valve cavity (13) through the connecting column (312) and the first piston (311); The push disc (313) is screw movably connected with the back suction unit (32); The first piston (311) drives the connecting column (312) and the push disc (313) to move towards the liquid outlet inlet (141), and then drives the back suction unit (32) to move towards the liquid outlet inlet (141) of the liquid outlet flow channel (14), after the back suction unit (32) blocks the liquid outlet inlet (141), the first piston (311) continues to push the connecting column (312) and the push disc (313) to move relative to the back suction unit (32) to push the back suction unit (32) to rotate at the liquid outlet inlet (141), so that the back suction unit (32) scrapes off the impurities at the liquid outlet inlet (141), and the push disc (313) moves relative to the back suction unit (32) to exhaust the air in the back suction unit (32) to form an air flow to blow the impurities out of the liquid outlet inlet (141), until the back suction unit (32) is attached to the liquid outlet inlet (141), that is, the back suction unit (32) completely blocks the liquid outlet inlet (141). The first piston (311) drives the connecting column (312) and the push disc (313) to move away from the liquid outlet inlet (141). After the back-suction unit (32) abuts against the diaphragm (131) of the back-suction valve cavity (13), the first piston (311) continues to drive the connecting column (312) and the push disc (313) to move relative to the back-suction unit (32). When the push disc (313) moves relative to the back-suction unit (32), the push disc (313) sucks air in the inlet and outlet liquid flow channel (11) into the back-suction unit (32), so as to attract the fluid in the inlet and outlet liquid flow channel (11) to flow towards the back-suction valve cavity (13), until the fluid flows into the liquid outlet flow channel (14) through the liquid outlet inlet (141). The back-suction unit (32) comprises a conical barrel (321). The conical barrel (321) is divided into a conical part (3212) and a cylindrical part (3211). The conical part (3212) is arranged towards the liquid outlet inlet (141), and a plurality of through holes (3214) are formed in the conical part (3212). The push disc (313) is located in the cylindrical part (3211) and is in screwing activity connection with the cylindrical part (3211). When the push disc (313) moves relative to the conical barrel (321) and penetrates into the conical barrel (321), the conical barrel (321) rotates under the pushing of the push disc (313), and the push disc (313) compresses the volume in the conical barrel (321), so as to discharge the air in the conical barrel (321) through the through holes (3214). When the push disc (313) moves relative to the conical barrel (321) and tends to move away from the conical barrel (321), the conical barrel (321) rotates under the pushing of the push disc (313), and the push disc (313) expands the volume in the conical barrel (321), so as to suck the external air into the conical barrel (321) through the through holes (3214).
2. The combined back-suction valve according to claim 1, characterized in that The cylindrical part (3211) is provided with a spiral groove (3213). The outer diameter of the push disc (313) is consistent with the inner diameter of the cylindrical part (3211). The edge of the push disc (313) is provided with a limiting block (314), and the limiting block (314) is slidingly arranged in the spiral groove (3213).
3. The combined back-suction valve according to claim 1, characterized in that The liquid outlet inlet (141) is arranged in a converging manner, so that the conical barrel (321) is attached to the liquid outlet inlet (141).
4. The combined back-suction valve according to claim 1, characterized in that A first movable cavity (15) is formed in the valve body (1). The first piston (311) is located in the first movable cavity (15) and divides the first movable cavity (15) into an upper part and a lower part. A first air vent (16) is formed in the valve body (1) and communicates with the lower part of the first movable cavity (15). The first spring (315) is arranged in the upper part of the first movable cavity (15). When the first vent (16) injects high-pressure gas into the lower part of the first movable cavity (15), the first piston (311) presses the first spring (315) to drive the connecting column (312) and the push disc (313) to move away from the liquid discharge inlet (141); When the high-pressure gas in the lower part of the first movable cavity (15) is discharged from the first vent (16), the first spring (315) pushes the first piston (311) to reset, so as to drive the connecting column (312) and the push disc (313) to move towards the liquid discharge inlet (141).
5. The combined back-suction valve according to claim 1, characterized in that: the liquid inlet assembly (2) comprises a second piston (21) and a liquid inlet valve core (22); the liquid inlet valve core (22) is connected with the second piston (21), and the liquid inlet valve core (22) is movably arranged in the liquid inlet valve cavity (12) through the second piston (21); the second piston (21) drives the liquid inlet valve core (22) to move towards the liquid inlet and outlet flow channel (11) until the liquid inlet valve core (22) cuts off the liquid inlet and outlet flow channel (11); the second piston (21) drives the liquid inlet valve core (22) to move away from the liquid inlet and outlet flow channel (11) until the liquid inlet valve core (22) conducts the liquid inlet and outlet flow channel (11).
6. The combined back-suction valve according to claim 5, characterized in that: a second movable cavity (17) is formed in the valve body (1), the second piston (21) is located in the second movable cavity (17) and divides the second movable cavity (17) into an upper part and a lower part; a second vent (18) is formed in the valve body (1) and communicates with the lower part of the second movable cavity (17), and a second spring (23) is arranged in the upper part of the second movable cavity (17); when the second vent (18) injects high-pressure gas into the lower part of the second movable cavity (17), the second piston (21) presses the second spring (23) to drive the liquid inlet valve core (22) to move away from the liquid inlet and outlet flow channel (11); when the high-pressure gas in the lower part of the second movable cavity (17) is discharged from the second vent (18), the second spring (23) pushes the second piston (21) to reset to drive the liquid inlet valve core (22) to move towards the liquid inlet and outlet flow channel (11).
7. A method of using the combination return valve according to any one of claims 1 to 6, characterized in that, including: the liquid inlet assembly (2) moves in the liquid inlet valve cavity (12) to control the liquid inlet and outlet flow channel (11) to be conducted or cut off; the back-suction assembly (3) moves towards the liquid discharge inlet (141) of the liquid discharge flow channel (14), after the back-suction assembly (3) blocks the liquid discharge inlet (141), the back-suction assembly (3) rotates at the liquid discharge inlet (141) and discharges air to form an air flow to blow out impurities from the liquid discharge inlet (141), until the back-suction assembly (3) is attached to the liquid discharge inlet (141) to completely block the liquid discharge inlet (141); and The back-suction assembly (3) moves away from the drainage inlet (141), and after the back-suction assembly (3) abuts against the diaphragm (131) of the back-suction valve cavity (13), the back-suction assembly (3) absorbs air in the inlet-outlet liquid flow channel (11) to attract the fluid in the inlet-outlet liquid flow channel (11) to flow towards the back-suction valve cavity (13) until the fluid flows into the drainage flow channel (14) through the drainage inlet (141).
Citation Information
Patent Citations
Suction-back valve
CN117413138A
Pneumatic on-off and back-suction integrated valve for quantitative gluing of semiconductor and working method of pneumatic on-off and back-suction integrated valve
CN119222386A