Z-axis down pressure control mechanism

Abstract

The application relates to the technical field of semiconductor packaging equipment, and particularly discloses a Z-axis downward pressing force control mechanism, which comprises a driving mechanism and the like, the driving mechanism is connected with a voice coil force control mechanism and a negative pressure follow-up mechanism, and the voice coil force control mechanism moves synchronously with the driving mechanism when the driving mechanism drives the voice coil force control mechanism to move up and down; the voice coil force control mechanism comprises a voice coil motor, a downward pressing assembly and a downward pressing head, the downward pressing head is connected with the voice coil motor through the downward pressing assembly; the negative pressure follow-up mechanism is provided with a gas hole with negative pressure, the gas hole is tightly attached to the downward pressing assembly, and the gas hole is separated from the downward pressing assembly when the gas hole moves upward under the pressure of the downward pressing head, thereby triggering an alarm. The Z-axis downward pressing force control mechanism controls the size of the force when the voice coil motor control chip lands in the handover process, reduces the damage to the chip product, and realizes secondary protection of the chip through the air leakage protection method when the stress of the chip exceeds the set pressure value of the voice coil motor, so that the appearance and function of the chip in the handover process are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor packaging equipment, in particular to a Z-axis down pressure control mechanism. BACKGROUND

[0002] At present, in the packaging field, full-automatic marking and banding integrated machines, chip mounters and other equipment need high-precision Z-axis down pressure control mechanism. Most of the existing technical solutions are to control the down pressure by connecting a motor with a cam, the force value cannot be adjusted, there is no overload protection mechanism, the chip or product itself has no large load capacity, and is easy to be damaged under excessive force. The current production mode is hard landing of the chip, which may cause deformation, fragmentation, scratching and other problems of the chip, thereby increasing the production cost.

[0003] A high-speed and high-precision force control mechanism is disclosed in Chinese patent application publication No. CN119673831A, which comprises a fixed seat, a power assembly, a pressure assembly and a flexible hinge assembly. The power assembly comprises a ball guide rail assembly and a large voice coil motor. The ball guide rail assembly is arranged on the fixed seat, and a Z-direction mover plate is arranged on the ball guide rail assembly in sliding mode. The stator fixed plate of the large voice coil motor is connected to the upper end of the fixed seat, and the mover fixed plate of the large voice coil motor is fixedly arranged on the Z-direction mover plate. The pressure assembly comprises a small voice coil motor and a down pressure plate. The upper end of the small voice coil motor is arranged at the upper right end of the Z-direction mover plate, and the down pressure plate is arranged at the lower end of the small voice coil motor. The flexible hinge assembly comprises a leaf spring connecting seat and a leaf spring fixed seat. The right end of the leaf spring connecting seat is connected to the lower middle part of the small voice coil motor, the leaf spring fixed seat is fixed to the Z-direction mover plate, and the upper end of the leaf spring connecting seat and the upper end of the leaf spring fixed seat are fixed with a leaf spring pressing block, an upper leaf spring and a lower leaf spring through a fastening screw. The application uses a voice coil motor to realize rapid movement and pressure control.

[0004] However, in actual use, the force borne by the product may be greater than the set range of the voice coil motor, and the product still has the risk of deformation, fragmentation and scratching. SUMMARY

[0005] The present application aims to solve the problem of product damage caused by overpressure during the transfer process of the chip. To this end, the present application provides a Z-axis down pressure control mechanism, which controls the force of the chip landing through a voice coil motor during the handover process, reduces the damage to the chip product, and at the same time, when the force borne by the chip exceeds the set pressure value of the voice coil motor, realizes the secondary protection of the chip through the air leakage protection method, and ensures the appearance and function of the chip during the handover. Through experiments, the present application can realize the non-destructive delivery of the product in the cooperation process with the suction mechanism.

[0006] The present application provides a Z-axis down pressure control mechanism, which adopts the following technical scheme: comprising a driving mechanism, a voice coil force control mechanism and a negative pressure follow-up mechanism.

[0007] The driving mechanism is connected to the voice coil force control mechanism and is used to drive the voice coil force control mechanism to move up and down; the negative pressure follower mechanism is connected to the driving mechanism and moves synchronously with the voice coil force control mechanism when the driving mechanism drives the voice coil force control mechanism to move up and down.

[0008] The voice coil force control mechanism includes a voice coil motor, a pressing assembly, and a pressing head, wherein the pressing head is connected to the voice coil motor through the pressing assembly;

[0009] The negative pressure follow-up mechanism is provided with a negative pressure air hole, which is closely attached to the pressing component. When the pressing component moves upward under the pressure of the pressing head, the air hole separates from the pressing component and triggers an alarm.

[0010] Furthermore, the downward pressing process includes:

[0011] The drive mechanism works, causing the voice coil force control mechanism and the negative pressure follower mechanism to move downward synchronously until the mechanism connected to the lower pressure head approaches the product, at which point the drive mechanism stops working.

[0012] The voice coil motor adjusts its output force to counteract the force of the mechanism connected to the lower pressure head, keeping the lower pressure head stationary until the mechanism connected to the lower pressure head completes its action.

[0013] Furthermore, the negative pressure follow-up mechanism includes a limiting block and a pneumatic connector disposed on the limiting block. The air hole is disposed on the limiting block and is connected to the pneumatic connector through the air passage in the limiting block.

[0014] Furthermore, the pressing assembly includes an adapter plate, a pressing block, and a compression spring. The adapter plate is located below the voice coil motor, the pressing block is located below the adapter plate, and the pressing head is located below the pressing block. The air hole is located on the upper end face of the limiting block and is tightly fitted to the adapter plate. The compression spring is located between the limiting block and the pressing block.

[0015] Furthermore, the drive mechanism includes a motor, a motor mounting base, a pressing cam, a tension spring, a cam follower, a voice coil mounting plate, and a connecting plate. The motor is fixed on the motor mounting base, and a pressing cam is fixed on the drive shaft of the motor. A cam follower that cooperates with the pressing cam is installed above the voice coil mounting plate. A connecting plate is provided on the voice coil mounting plate. The two ends of the tension spring are respectively connected to the motor mounting base and the connecting plate. The voice coil motor is fixed below the voice coil mounting plate, and the negative pressure follower mechanism is fixed on the connecting plate.

[0016] Furthermore, a miniature guide rail is fixed on the connecting plate, and the miniature guide rail is connected to the pressing component.

[0017] Furthermore, there are two tension springs, which are respectively located on both sides of the connecting plate and the motor mounting base.

[0018] Furthermore, a linear guide rail is provided on the motor mounting base, and a connecting plate is provided on the linear guide rail.

[0019] Furthermore, a sensor is provided on the motor mounting base, and a sensor baffle is fixed on the connecting plate. When the sensor baffle blocks the sensor, it restricts the movement of the mechanism connected to the lower pressure head.

[0020] Furthermore, after the alarm is triggered, the voice coil motor stops outputting power.

[0021] The above-described one or more technical solutions in the embodiments of the present invention have at least one of the following technical effects:

[0022] 1. The voice coil motor of the present invention precisely controls the downward pressure by changing the current, which counteracts the force of the suction mechanism and keeps the mechanism stationary. When the product comes into contact, the force control can be maintained within a certain range or there is no downward pressure, so as to achieve product delivery without damage. Moreover, it triggers an air leakage alarm when stacking or pressing occurs, so as to avoid product damage due to pressure.

[0023] 2. The present invention has strong motion stability. The motor and the voice coil motor work together. The motor is responsible for the overall downward displacement, and the voice coil motor provides stable downward force to prevent rebound. During the rebound, the tension spring ensures that the cam follower and the downward cam are closely matched to avoid collision of the mechanism.

[0024] 3. The present invention uses a design that integrates a negative pressure vent with an adapter plate to quickly trigger a leak alarm under abnormal operating conditions; the compression spring can push the pressure component to reset after the fault is resolved, helping the mechanism to quickly return to normal.

[0025] 4. This invention uses a limit sensor mechanism as a safety sensor to restrict the action of the suction mechanism when the pressing mechanism is in the pressing state, thereby avoiding safety hazards or mechanism interference caused by misoperation.

[0026] 5. This invention can ensure the chip product is delivered without damage at high speeds. During the handover process, the voice coil motor controls the force when the chip lands, reducing damage to the chip product. At the same time, when the chip is subjected to force exceeding the set pressure value of the voice coil motor, this invention will provide secondary protection for the chip through voice coil motor current feedback and leakage protection methods, ensuring that the chip's appearance and function are intact during handover.

[0027] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0030] Figure 2 This is a front view of the present invention.

[0031] Figure 3 This is a side view of the present invention.

[0032] Figure 4 This is a force analysis diagram of the present invention.

[0033] Figure 5 This is a schematic diagram of the suction mechanism used in conjunction with the present invention.

[0034] Figure 6 This is a control curve diagram of the voice coil motor of the present invention.

[0035] Figure label:

[0036] 1. Motor; 2. Motor mounting base; 3. Pressing cam; 4. Spring hook; 5. Tension spring; 6. Cam follower; 7. Voice coil mounting plate; 8. Linear slide rail; 9. Connecting plate; 10. Voice coil motor; 11. Adapter plate; 12. Limit block; 13. Compression spring; 14. Sensor mounting plate; 15. Sensor; 16. Sensor baffle; 17. Miniature guide rail; 18. Pressing block; 19. Pneumatic connector; 20. Pressing head. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention. The following embodiments are used to illustrate this invention but should not be used to limit the scope of this invention.

[0038] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0039] The following is combined with Figures 1 to 6 The present invention will be further described in detail below, including a Z-axis pressure control mechanism:

[0040] In this embodiment, as Figures 1 to 3 As shown, a Z-axis pressure control mechanism is provided, including: a drive mechanism, a voice coil force control mechanism, a negative pressure follower mechanism, and a limit sensor mechanism.

[0041] The driving mechanism is connected to the voice coil force control mechanism and is used to drive the voice coil force control mechanism to move up and down; the negative pressure follower mechanism is connected to the driving mechanism and moves synchronously with the voice coil force control mechanism when the driving mechanism drives the voice coil force control mechanism to move up and down.

[0042] The drive mechanism includes a motor 1, a motor mounting base 2, a pressing cam 3, a tension spring 5, a cam follower 6, a voice coil mounting plate 7, and a connecting plate 9. The motor 1 is fixed to the motor mounting base 2. The pressing cam 3 is fixed to the drive shaft of the motor 1 by set screws. The cam follower 6, which cooperates with the pressing cam 3, is mounted above the voice coil mounting plate 7. The connecting plate 9 is provided on the voice coil mounting plate 7. The voice coil motor 10 is fixed to the lower part of the voice coil mounting plate 7 by screws, and the negative pressure follower mechanism is fixed to the connecting plate 9. A linear slide rail 8 is provided on the motor mounting base 2, and the connecting plate 9, fixed by screws, is provided on the linear slide rail 8. The linear slide rail 8 is used for guiding the voice coil force control mechanism. There are two tension springs 5, respectively located on both sides of the connecting plate 9 and the motor mounting base 2. Spring hooks 4, fixed by threads, are provided on both the left and right sides of the motor mounting base 2 and the connecting plate 9, and are connected to the tension springs 5 ​​through the spring hooks 4.

[0043] The voice coil force control mechanism includes a voice coil motor 10, a pressing assembly, and a pressing head 20. The pressing head 20 is connected to the voice coil motor 10 via the pressing assembly. The pressing assembly includes an adapter plate 11, a pressing block 18, and a compression spring 13. The adapter plate 11 is located below the voice coil motor 10, the pressing block 18 is located below the adapter plate 11, and the pressing head 20 is located below the pressing block 18 and fixed by threads. A miniature guide rail 17 is fixed on the connecting plate 9, and the miniature guide rail 17 is connected to the pressing block 18. The miniature guide rail 17 is used to guide the pressing block 18.

[0044] The negative pressure follower mechanism is provided with a negative pressure air hole, which is tightly fitted to the pressing component. When the pressing component moves upward under the pressure of the pressing head 20, the air hole separates from the pressing component, triggering an alarm. After the alarm is triggered, the voice coil motor 10 stops outputting. In this embodiment, the negative pressure follower mechanism includes a limiting block 12 and a pneumatic connector 19 disposed on the right side of the limiting block 12. The air hole is disposed on the limiting block 12 and communicates with the pneumatic connector 19 through the air passage within the limiting block 12. In actual use, the pneumatic connector 19 is connected to an external negative pressure device, and a pressure gauge is connected in the middle.

[0045] like Figure 2 As shown, the pores described in this embodiment ( Figure 2 (Not shown in the diagram) It is set on the upper end face of the limiting block 12 and tightly attached to the adapter plate 11. The compression spring 13 is set between the limiting block 12 and the lower pressing block 18. Specifically, a circular hole is provided in the middle of the lower pressing block 18, and the compression spring 13 is installed in the circular hole. The upper end of the compression spring 13 contacts the limiting block 12. Under normal working conditions, the air hole is completely closed by the adapter plate 11. When encountering situations such as stacking or pressing materials during use, a large upward force will be generated. This force causes the lower pressing head 20, the lower pressing block 18, and the adapter plate 11 to move upward, resulting in a gap between the limiting block 12 and the adapter plate 11. The air pressure gauge connected to the other end of the air pressure connector 19 will alarm. After the operator handles the situation (solving the stacking or pressing material situation), the compression spring 13 provides a downward force to the lower pressing block 18, so that the adapter plate 11 continues to be attached to the limiting block 12 downward, thereby returning the equipment to the normal state.

[0046] The limit sensor mechanism includes a sensor 15 and a sensor baffle 16 used in conjunction. The sensor 15 is mounted on the motor mounting base 2 and is fixed to the right side of the motor mounting base 2 by a sensor mounting plate 14. The sensor baffle 16 is fixed on the connecting plate 9. When the sensor baffle 16 blocks the sensor 15, it restricts the movement of the mechanism connected to the lower pressure head. In this embodiment, the lower pressure head 20 is connected to a suction mechanism located below it; that is, the mechanism connected to the lower pressure head is a suction mechanism, the structure of which is as follows... Figure 5As shown. When the sensor baffle 16 blocks the sensor 15, the suction mechanism cannot operate by default. The limit sensor mechanism is used as a safety sensor 15. That is, the limit sensor mechanism is used to control the suction mechanism not to operate when the pressing mechanism is in the pressing state.

[0047] The pressing process in this embodiment includes:

[0048] The drive mechanism operates, causing the voice coil force control mechanism and the negative pressure follower mechanism to move downwards synchronously until the suction mechanism approaches the product, at which point the drive mechanism stops. The motor 1 and voice coil motor 10 act as the drive, with motor 1 driving the lowering cam 3, thus causing the entire voice coil force control mechanism to move downwards. During this process, the voice coil motor 10 provides a significant force to prevent the lowering block 18 from rebounding due to insufficient force. When it is about to contact the product, motor 1 stops operating. During this process, the sensor 15 baffle blocks and triggers the sensor 15, restricting the movement of the lower suction mechanism.

[0049] Specifically, motor 1 operates, driving the downward pressing cam 3 to rotate. The cam follower 6, which cooperates with the downward pressing cam 3, moves downward. The voice coil mounting plate 7, connected to the cam follower 6, moves downward. The connecting plate 9 moves downward under the guidance of the linear slide rail 8. At this time, the voice coil motor 10 and the connecting plate 9 have a downward relative displacement (relative to motor 1). The voice coil motor 10 itself has no relative movement but only outputs force. The voice coil motor 10 and the connecting plate 9 descend with the same displacement, driving the downward pressing block 18 and the downward pressing head 20 to move downward. When the suction mechanism is about to contact the chip product, motor 1 stops working, and the downward pressing cam 3 and the voice coil motor 10 maintain their positions and no longer change.

[0050] The voice coil motor 10 adjusts its output force to counteract the force and friction of the suction mechanism, keeping the lower pressure head 20 stationary until the suction mechanism completes its action. The voice coil motor 10 controls the downward pressure force by changing the current. When there is a large gap between the voice coil motor 1 and the product, and the motor 1 controls the overall mechanism to press down, the voice coil motor 10 outputs a larger downward force. When it is about to contact the product, the output current of the voice coil motor 10 decreases to balance the spring friction and the upward rebound force of the lower suction mechanism, ensuring that the force control when the suction mechanism contacts the product is within a certain range or there is no downward pressure, thus achieving non-destructive delivery technology. When the force on the product exceeds the set range of the voice coil motor 10, it will cause the lower pressure block 18 to move upward and disengage from the limit block 12. The air hole on the limit block 12 will leak air, triggering an abnormal pressure alarm on the pressure gauge, thus achieving secondary protection.

[0051] The force situation during the downward pressing process is as follows: Figure 4As shown, F1 is the downward force exerted by the motor 1 on the lowering cam 3 to the voice coil force control mechanism; F2 is the downward force exerted by the voice coil motor 10 on the suction mechanism; F3 is the rebound force of the suction mechanism; and f is the sum of the forces acting between components such as the miniature guide rail 17, the negative pressure suction, and the spring force of the compression spring 13, the direction of which may be reversed (downward). When the suction mechanism is far from the lowering mechanism, F1 and F2 are not zero, and F1+F2 is much greater than f+F3, causing the entire mechanism to move downward. When the suction mechanism is about to contact the product, F1=0, F3-f (reversed)≤F2≤F3+f, and the mechanism remains stationary. The output force of the voice coil motor 10 is within this range, ensuring that the chip's bearing force is very small or zero during feeding.

[0052] Recovery process: When motor 1 drives the pressing cam 3 to complete the pressing process, during the recovery process, the two tension springs 5 ​​provide upward pulling force to the cam follower 6 to ensure the tight cooperation between the cam follower 6 and the pressing cam 3, and prevent the lower voice coil force control mechanism from colliding due to failure to recover in time.

[0053] In this embodiment, during the pressing process, the voltage of the voice coil motor 10 is controlled by analog signals. Changes in motor voltage alter the current within the coil, which in turn changes the force exerted by the motor on its own spring. This force controls the pressing mechanism to overcome the pull-down spring. When the gap with the product is greater than 0.3mm, the motor 1 controls the entire mechanism to press down. At this time, the voice coil motor 10 outputs a downward force of 1.5N to hold the motor spring in place, stabilizing the entire pressing mechanism and preventing relative displacement during movement. 0.3mm before contact with the product, the voice coil motor 10 begins to change its output force, calculated according to Hooke's Law. The control system monitors the movement of the pressing spring in real time. For every 0.05mm increase in movement, the output force changes until the servo stops compressing the spring. This ensures that the force control is within a certain range or there is no downward pressure when the suction mechanism contacts the product, thus achieving non-destructive delivery technology.

[0054] The electrical control system adjusts the input control values ​​in real time based on changes in displacement. It intervenes during the downward pressure process by converting the output voltage value, controlling the voice coil motor 10's output and retraction during the downward pressure. The numerical input and voltage output are controlled according to corresponding curves, such as... Figure 6 As shown. The input control value is transmitted to the voice coil motor 10 via D / A conversion and converted into voice coil motor pressure. During the output force process, the force load of the voice coil motor 10 is monitored in real time. If there is material stacking or pressing, the force feedback will exceed the range. The controller will immediately stop the output of the voice coil motor 10, sound an alarm, and then hand it over to the operator for handling.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A Z-axis pressure control mechanism, characterized in that, include: Drive mechanism, voice coil force control mechanism, and negative pressure follower mechanism; The driving mechanism is connected to the voice coil force control mechanism and is used to drive the voice coil force control mechanism to move up and down; the negative pressure follower mechanism is connected to the driving mechanism and moves synchronously with the voice coil force control mechanism when the driving mechanism drives the voice coil force control mechanism to move up and down. The voice coil force control mechanism includes a voice coil motor, a pressing assembly, and a pressing head, wherein the pressing head is connected to the voice coil motor through the pressing assembly; The negative pressure follow-up mechanism is provided with a negative pressure air hole. The air hole is tightly attached to the pressing component. When the pressing component moves upward under the pressure of the pressing head, the air hole separates from the pressing component and triggers an alarm. The negative pressure follow-up mechanism includes a limiting block. The pressing assembly includes an adapter plate, a pressing block, and a compression spring. The adapter plate is located below the voice coil motor, the pressing block is located below the adapter plate, and the pressing head is located below the pressing block. The air hole is located on the upper end face of the limiting block and is tightly attached to the adapter plate. The compression spring is located between the limiting block and the pressing block.

2. The Z-axis pressure control mechanism as described in claim 1, characterized in that, The pressing process includes: The drive mechanism works, causing the voice coil force control mechanism and the negative pressure follower mechanism to move downward synchronously until the mechanism connected to the lower pressure head approaches the product, at which point the drive mechanism stops working. The voice coil motor adjusts its output force to counteract the force of the mechanism connected to the lower pressure head, keeping the lower pressure head stationary until the mechanism connected to the lower pressure head completes its action.

3. The Z-axis pressure control mechanism as described in claim 1, characterized in that, The negative pressure follow-up mechanism includes a pneumatic connector disposed on the limiting block, and an air hole disposed on the limiting block and connected to the pneumatic connector through an air passage within the limiting block.

4. The Z-axis pressure control mechanism as described in claim 1, characterized in that, The drive mechanism includes a motor, a motor mounting base, a pressing cam, a tension spring, a cam follower, a voice coil mounting plate, and a connecting plate. The motor is fixed on the motor mounting base, and a pressing cam is fixed on the drive shaft of the motor. A cam follower that cooperates with the pressing cam is installed above the voice coil mounting plate. A connecting plate is provided on the voice coil mounting plate. The two ends of the tension spring are respectively connected to the motor mounting base and the connecting plate. The voice coil motor is fixed below the voice coil mounting plate, and the negative pressure follower mechanism is fixed on the connecting plate.

5. The Z-axis pressure control mechanism as described in claim 4, characterized in that, A miniature guide rail is fixed on the connecting plate, and the miniature guide rail is connected to the pressing component.

6. The Z-axis pressure control mechanism as described in claim 4, characterized in that, There are two tension springs, which are respectively located on both sides of the connecting plate and the motor mounting base.

7. The Z-axis pressure control mechanism as described in claim 4, characterized in that, The motor mounting base is equipped with a linear slide rail, and the linear slide rail is equipped with a connecting plate.

8. The Z-axis pressure control mechanism as described in claim 4, characterized in that, A sensor is provided on the motor mounting base, and a sensor baffle is fixed on the connecting plate. When the sensor baffle blocks the sensor, it restricts the movement of the mechanism connected to the lower pressure head.

9. A Z-axis pressure control mechanism as described in claim 1, characterized in that, After the alarm is triggered, the voice coil motor stops outputting power.

Images