Spherical metal-based nano laminated conductive wear-resistant coating as well as preparation method and application thereof

Abstract

The invention belongs to the technical field of wear-resistant coatings, and relates to a spherical metal-based nano laminated conductive wear-resistant coating as well as a preparation method and application thereof. The invention discloses a preparation method of a spherical metal-based nano laminated conductive wear-resistant coating, which comprises the following steps: in an inert gas environment with the temperature of 40-70 DEG C and the pressure of 1-5 Mpa, treating a rotating spherical substrate through pulsed bias etching and high-power pulse magnetron sputtering in sequence; and a spherical metal-based nano laminated conductive wear-resistant coating with the thickness of 0.12-2.0 microns is formed on the surface of the etched sphere matrix. The invention further discloses the coating and the sphere with the coating. The coating and the sphere with the coating have good conductivity, friction performance and film-substrate bonding strength and can be widely applied to the fields of aerospace, energy reindustry, medical devices and the like.

Description

Technical Field

[0001] This invention belongs to the field of wear-resistant coating technology, and relates to a spherical metal-based nanolayered conductive wear-resistant coating, its preparation method and application. Background Technology

[0002] Circular ball bearings are key components in moving devices such as conductive bearings, motor commutators, electromagnetic shielding components, and X-ray tubes. They reduce frictional resistance, lower energy consumption, provide high-precision guidance, and distribute loads, ensuring the high-precision and stable operation of moving devices. However, with the rapid development of aerospace, energy and heavy industry, and medical devices, critical moving devices face challenges such as conductivity interruption and contact surface friction wear under harsh conditions of frequent start-stop, high-speed heavy load, current-carrying friction, and high thermal conductivity. This leads to component wear and failure, shortened lifespan, increased operating costs, and affects the safe and stable operation of the entire system.

[0003] Traditional solid lubricants are limited by specific environmental and temperature conditions, making it difficult to meet the performance requirements of the aforementioned components. While materials such as diamond-like carbon and molybdenum disulfide possess excellent lubrication properties, their load-bearing capacity and electrical conductivity are relatively poor. Carbide / nitride coatings offer high mechanical properties but suffer from insufficient lubrication and a high coefficient of friction. Furthermore, coating technology on spherical surfaces is challenging, and coating uniformity is typically unsatisfactory, especially when the coating is thin. Therefore, there is an urgent need to develop a conductive and wear-resistant coating material that combines excellent lubricity, good electrical conductivity, a low coefficient of friction, and high thermal stability, and to develop corresponding preparation techniques. Summary of the Invention

[0004] The purpose of this invention is to address the aforementioned problems in the prior art by proposing a spherical metal-based nanolayered conductive and wear-resistant coating. This coating is produced by depositing alternating layers of a metal transition layer and a silver lubricating layer on the etched sphere surface using a high-power pulsed magnetron sputtering method, which effectively improves the friction life and friction stability of the coating.

[0005] One objective of this invention is achieved through the following technical solution:

[0006] A method for preparing a spherical metal-based nanolayered conductive wear-resistant coating includes: treating a rotating spherical substrate by pulsed bias etching and high-power pulsed magnetron sputtering in an inert gas environment of 40–70℃ and 1–5 MPa, thereby forming a spherical metal-based nanolayered conductive wear-resistant coating with a thickness of 0.12–2.0 μm on the surface of the etched spherical substrate.

[0007] The spherical metal-based nanolayered conductive wear-resistant coating comprises alternating layers of a metal transition layer and a silver lubricating layer sequentially formed on the surface of a spherical substrate, wherein the stacking cycle of the metal transition layer and the silver lubricating layer in the alternating layers is at least one.

[0008] The metal transition layer includes at least one single metal nanolayer, which includes one or more of nickel, copper and molybdenum nanolayers; the silver lubricating layer is located on the outermost side of the alternating layers.

[0009] The metal transition layer comprises one or more of the following: face-centered cubic Ni, face-centered cubic Cu, and face-centered cubic Mo metal phases with crystal plane indices of (111), (200), and (220); the silver lubricating layer comprises the following: face-centered cubic Ag phases with crystal plane indices of (311), (111), and (222).

[0010] Preferably, the metal transition layer has a tightly packed nanocrystalline structure; and / or, the silver lubricating layer has a smooth and flat nanolayer structure.

[0011] Preferably, the stacking cycle of the metal transition layer and the silver lubricating layer is 1 to 5.

[0012] Preferably, the metal transition layer comprises 1 to 15 single-metal nanolayers.

[0013] More preferably, the metal transition layer comprises 1 to 6 single-metal nanolayers.

[0014] More preferably, the metal transition layer comprises 1 to 3 single-metal nanolayers.

[0015] Preferably, the diameter of the spherical substrate is 1 to 10 mm.

[0016] Preferably, the material of the spherical substrate includes one or more of single metals, multi-element alloys, and ceramics;

[0017] The single metal includes one of Au, Fe, Ni, Ti, Al, Cu, or W;

[0018] The multi-element alloy includes one or more of NiTi, CoCr, MoW, NiCrFe, TiAlV, or WNiFe;

[0019] The ceramic includes one or more of Si3N4, Al2O3, SiC, AlN, or ZrO2.

[0020] Preferably, the thickness of the alternating layers is 0.12–1.5 μm.

[0021] More preferably, in the alternating layers, the total thickness of the silver lubricating layer is 0.1–1.3 μm; and the thickness of the metal transition layer is 0.02–0.9 μm.

[0022] Preferably, in the alternating layers, the total thickness of the silver lubricating layer is 0.1 to 1.3 μm, and the total thickness of the silver lubricating layer accounts for 20 to 80% of the thickness of the alternating layers.

[0023] More preferably, the total thickness of the silver lubricating layer accounts for 40-70% of the thickness of the alternating layers.

[0024] Preferably, the thickness of the single metal nanolayer is 0.02–0.3 μm.

[0025] Preferably, when the stacking period of the metal transition layer and the silver lubricating layer is 1, the thickness of the metal transition layer is 0.02-0.5 μm, the thickness of the silver lubricating layer is 0.1-0.6 μm, and the thickness of the alternating layers is 0.12-1.1 μm.

[0026] Preferably, when the stacking period of the metal transition layer and the silver lubricating layer is 2 to 5, in an alternating stack, the thickness of the metal transition layer is 0.02 to 0.5 μm, the thickness of the silver lubricating layer is 0.1 to 0.6 μm, and the thickness of the alternating stack is 0.12 to 0.8 μm.

[0027] Preferably, when the stacking period of the metal transition layer and the silver lubricating layer is greater than 1, the individual metal nanolayers in the metal transition layer are the same or different; the order of the individual metal nanolayers in the metal transition layer is the same or different.

[0028] Preferably, in the first stacking cycle, the nickel nanolayer in the single metal nanolayer is in contact with the spherical substrate, and the molybdenum nanolayer in the single metal nanolayer is in contact with the silver lubricating layer.

[0029] Preferably, the rotational speed of the spherical substrate is 10 to 190 r / min.

[0030] More preferably, the rotational speed of the spherical substrate is 30 to 100 r / min.

[0031] Preferably, the spherical substrate is placed in a stainless steel tray, which is connected to a base frame. The spherical substrate is rotated by rotating the base frame. The rotation speed of the base frame is 10 to 190 r / min.

[0032] Further preferably, the rotational speed of the spherical substrate is substantially the same as the rotational speed of the base frame.

[0033] Preferably, the pulse negative bias voltage is -10 to -300V, and the etching time is 1 to 240 minutes.

[0034] Further preferably, the pulse negative bias voltage is -100 to -200V, and the etching time is 10 to 120 minutes.

[0035] Preferably, the high-power pulsed magnetron sputtering is carried out in an inert gas with a flow rate of 10–25 sccm.

[0036] Preferably, the duty cycle of the pulse power supply for the high-power pulsed magnetron sputtering is 1 to 20%.

[0037] Preferably, the method for preparing the spherical metal-based nanolayered conductive wear-resistant coating includes:

[0038] (1) Place the cleaned spherical substrate under a vacuum of 5 to 10 × 10⁻⁶. -4 In a vacuum chamber of Pa, the temperature is heated to 40-70°C, and an inert gas is introduced to a pressure of 1-5 MPa. Under the action of a pulse negative bias voltage of -100-200V, a rotating spherical substrate with a rotation speed of 10-190 r / min is etched for 10-120 min to obtain a pretreated spherical substrate.

[0039] (2) Subsequently, a high-power pulsed magnetron sputtering is performed by turning on the pulsed power supply. In the continuously heated cavity, a metal transition layer is sequentially sputtered on the surface of the pretreated spherical substrate using a single metal target. The single metal target includes one or more of nickel, copper, and molybdenum metal targets. The sputtering power of the single metal target is 30-100W, and the sputtering time is 5-60min. The duty cycle of the pulsed power supply is 4-10%. A silver lubricating layer is sputtered on the surface of the metal transition layer using a silver metal target. The sputtering power of the silver metal target is 10-40W, the sputtering time is 5-20min, and the duty cycle of the pulsed power supply is 2-18%. The stacking cycle of the metal transition layer and the silver lubricating layer is 1-5, resulting in a spherical metal-based nanolayered conductive and wear-resistant coating.

[0040] Further preferably, the sputtering power of the single metal target is greater than that of the silver metal target.

[0041] The second objective of this invention is achieved through the following technical solution:

[0042] A sphere having a spherical metal-based nanolayered conductive wear-resistant coating, comprising a spherical metal-based nanolayered conductive wear-resistant coating prepared by the above-described method for preparing a spherical metal-based nanolayered conductive wear-resistant coating.

[0043] Preferably, the sphere with the spherical metal-based nano-layered conductive wear-resistant coating comprises a spherical substrate with a diameter of 1 to 10 mm and a spherical metal-based nano-layered conductive wear-resistant coating with a thickness of 0.12 to 2.0 μm.

[0044] The spherical metal-based nanolayered conductive wear-resistant coating comprises alternating layers of a metal transition layer and a silver lubricating layer sequentially formed on the surface of a spherical substrate, wherein the stacking cycle of the metal transition layer and the silver lubricating layer in the alternating layers is at least one.

[0045] The metal transition layer includes at least one single metal nanolayer, which includes one or more of nickel, copper and molybdenum nanolayers; the silver lubricating layer is located on the outermost side of the alternating layers.

[0046] Further preferably, the metal transition layer comprises one or more of the following: face-centered cubic Ni metal phase, face-centered cubic Cu metal phase, and face-centered cubic Mo metal phase with crystal plane indices of (111), (200), and (220); the silver lubricating layer comprises the face-centered cubic Ag phase with crystal plane indices of (311), (111), and (222).

[0047] The third objective of this invention is achieved through the following technical solution:

[0048] Applications of a sphere with a spherical metal-based nanolayered conductive and wear-resistant coating in aerospace, energy industry, and medical device fields.

[0049] Compared with the prior art, the present invention has the following beneficial effects:

[0050] 1. The spherical metal-based nanolayered conductive wear-resistant coating provided by the present invention adopts a multilayer metal nanostructure, with Ni and / or Cu and / or Mo as the main phase to provide mechanical support and strong interfacial bonding. At the same time, Ni and / or Cu and / or Mo generate oxide lubricating phases in situ during friction, which significantly improves wear resistance. The Ag phase serves as a lubricating layer with a smooth and dense surface. It plays a solid lubricating role in a vacuum environment and can be converted into AgO lubricating phase in a room temperature atmospheric environment, achieving a stable and low coefficient of friction.

[0051] 2. The spherical metal-based nano-layered conductive and wear-resistant coating of the present invention has excellent conductivity, high toughness and outstanding wear resistance. Its nano-layered structure effectively enhances the film-substrate bonding strength and overall toughness, and can maintain structural integrity and functionality under complex working conditions.

[0052] 3. The spherical metal-based nano-layered conductive wear-resistant coating of the present invention maintains good performance after long-distance, high-speed friction tests in an atmospheric environment, without peeling or failure, demonstrating excellent environmental adaptability and long-term friction stability.

[0053] 4. The spherical metal-based nanolayered conductive wear-resistant coating of the present invention is prepared in an inert gas environment of 40-70°C and 1-5 MPa, which is beneficial to achieving uniformity and density of the coating structure and improving the overall performance consistency.

[0054] 5. The spherical metal-based nano-layered conductive wear-resistant coating of the present invention has a small thickness and uniform distribution, and is especially suitable for small-diameter spherical substrates. It can be widely used in high-precision moving parts such as conductive bearings, motor commutators, electromagnetic shielding components and X-ray tubes in aerospace, energy heavy industry, medical devices and other fields. Attached Figure Description

[0055] Figure 1 The image shows the XRD pattern of the spherical metal-based nanolayered conductive and wear-resistant coating NiCuAg in Example 1 of this invention.

[0056] Figure 2 This is a surface SEM image of the spherical metal-based nanolayered conductive and wear-resistant coating NiCuAg in Embodiment 1 of the present invention;

[0057] Figure 3 The images show the cross-sectional SEM image (left) and mapping image (right) of the spherical metal-based nanolayered conductive and wear-resistant coating NiCuAg in Example 1 of this invention.

[0058] Figure 4 This is a friction curve diagram of the spherical metal-based nanolayered conductive wear-resistant coating NiCuAg in atmospheric and vacuum environments in Embodiment 1 of the present invention.

[0059] Figure 5 This is a friction curve diagram of the spherical metal-based nanolayered conductive wear-resistant coating NiMoCuAg in atmospheric and vacuum environments in Embodiment 2 of the present invention.

[0060] Figure 6 This is a friction curve of the spherical metal-based nanolayered conductive wear-resistant coating NiAg in an atmospheric environment in Example 4 of the present invention;

[0061] Figure 7 The friction curves of the spherical metal-based nano-conductive wear-resistant coating Ni in Comparative Example 1 of the present invention in atmospheric and vacuum environments are shown.

[0062] Figure 8 This is a cross-sectional SEM image of the spherical metal-based nano-conductive wear-resistant coating NiCuAg in Comparative Example 5 of the present invention;

[0063] Figure 9 The friction curve of the spherical metal-based nano-conductive wear-resistant coating Cu in Comparative Example 6 of the present invention in a vacuum environment;

[0064] Figure 10 The resistivity test results are shown for the spherical substrate after cleaning treatment according to the present invention, the spherical metal-based nano-layered conductive and wear-resistant coating NiMoCuAg in Example 2, and the spherical metal-based nano-layered conductive and wear-resistant coating NiAg in Example 4.

[0065] Figure 11 This is a comparison diagram of the film-substrate bonding strength between the spherical metal-based nano-layered conductive and wear-resistant coating NiCuMoAg in Example 2 of the present invention and the spherical metal-based nano-conductive and wear-resistant coating Ag in Comparative Example 2. Detailed Implementation

[0066] The technical solution of the present invention will be further described and illustrated below through specific embodiments. It should be understood that the specific embodiments described herein are only for the purpose of helping to understand the present invention and are not intended to limit the present invention.

[0067] Unless otherwise specified, the raw materials used in the embodiments of the present invention are all commonly used in the art, and the methods used in the embodiments are all conventional methods in the art.

[0068] In this paper, the spherical substrate was ultrasonically cleaned multiple times with ethanol and acetone, and then dried to remove surface oil and insoluble impurities, resulting in a cleaned spherical substrate. This cleaned substrate was then placed in a circular stainless steel tray within the coating apparatus cavity. The circular stainless steel tray was connected to a base frame, and the spherical substrate was rotated by rotating the base frame. The inner surface roughness Ra of the circular stainless steel tray was <50 micrometers, the inner diameter was 100–200 mm, the depth was 5–15 mm, and the perimeter was surrounded by semi-circular chamfers with an angle of 90–150°. The dimensions of the circular stainless steel tray were adjusted to ensure that the rotational speed of spherical substrates of different materials and sizes was approximately the same as that of the base frame.

[0069] In this paper, the coating apparatus includes a plasma etching apparatus and a high-power pulse sputtering apparatus, and the plasma etching apparatus and the high-power pulse sputtering apparatus operate in the same cavity.

[0070] This paper describes a method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating, including:

[0071] (1) Place the spherical substrate in the circular stainless steel tray in the cavity of the coating device, evacuate the cavity, and then heat it to a temperature of 40-70°C. Introduce argon gas to a pressure of 1-5 MPa. Rotate the base frame to drive the spherical substrate in the circular stainless steel tray to rotate. The rotation speed of the base frame is 10-130 r / min. Under the action of a pulse negative bias voltage of -100-300V, etch the rotating spherical substrate for 10-60 min to obtain the pretreated spherical substrate.

[0072] (2) While keeping the base frame rotating, turn on the pulse power supply to perform high-power pulsed magnetron sputtering. Use a single metal target to sequentially sputter a metal transition layer on the surface of the pretreated spherical substrate while rotating. The single metal target includes one or more of nickel metal target, copper metal target and molybdenum metal target. The sputtering power of the single metal target is 30-100W and the sputtering time is 5-60min. The duty cycle of the pulse power supply is 4-10%.

[0073] A silver lubricating layer is sputtered onto the surface of a metal transition layer using a silver metal target; the sputtering power of the silver metal target is 10-40W, the sputtering time is 5-20min, and the duty cycle of the pulse power supply is 2-18%.

[0074] (3) Repeat step (2) above 0 to 4 times until the stacking cycle of the metal transition layer and the silver lubricating layer is 1 to 5 times to obtain a spherical metal-based nano-stacked conductive wear-resistant coating.

[0075] In this paper, the spherical substrates in the examples and comparative examples are made of the same material, stainless steel. The spherical metal-based nanolayered conductive wear-resistant coatings obtained by the preparation method of the present invention on substrates of different materials ranging from 1 to 10 mm all exhibit good friction coefficients and frictional stability in atmospheric and vacuum environments.

[0076] In this paper, the friction test includes: using a stainless steel substrate as the grinding surface, the friction performance of the substrate in atmospheric and / or vacuum environments is tested using a ball-and-disc friction machine. Since the coefficient of friction is a fluctuating value, the intermediate coefficient of friction is the average value of the first and second significant changes, and the coefficient of friction in the stable phase is the average value of the test during the stable period.

[0077] Example 1

[0078] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiCuAg with a thickness of 0.27 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0079] (1) Place the cleaned spherical substrate in a circular stainless steel tray inside the coating device cavity, and evacuate to 9×10⁻⁶. -4 Pa, heated to 50℃ inside the cavity, argon gas was introduced to a pressure of 2Mpa, the rotating base frame drove the spherical substrate in the circular stainless steel tray to rotate, the rotation speed of the base frame was 40r / min, under the action of -100V pulse negative bias voltage, the rotating spherical substrate was etched for 30min to obtain the pretreated spherical substrate.

[0080] (2) Keep the base rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 3%, sputter a nickel metal target, sputter power of 60W, sputtering time of 10min, and deposit a nickel metal nanolayer with a thickness of 0.05μm. Then sputter a copper metal target, sputter power of 50W, sputtering time of 10min, and deposit a copper metal nanolayer with a thickness of 0.06μm. Adjust the power duty cycle to 4%, sputter a silver metal target, sputter power of 10W, sputtering time of 10min, and deposit a silver lubricating layer with a thickness of 0.16μm. A spherical metal-based nanolayer conductive wear-resistant coating NiCuAg with an average total thickness of 0.27μm is formed.

[0081] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and perform characterization and friction performance testing.

[0082] Figure 1 The image shows the XRD pattern of the spherical metal-based nanolayered conductive wear-resistant coating in this embodiment. It can be seen that the coating contains elemental Ni, elemental Cu, and elemental Ag. Figure 2 This is a surface SEM image of the spherical metal-based nanolayered conductive wear-resistant coating in this embodiment. Figure 3 The cross-sectional SEM image (left) and mapping image (right) show that the interfaces of each layer are clear.

[0083] Figure 4 This is a friction curve diagram of the spherical metal-based nanolayered conductive wear-resistant coating in this embodiment under atmospheric and vacuum environments. In this embodiment, the initial friction coefficient of the spherical metal-based nanolayered conductive wear-resistant coating in the atmospheric environment is 0.14, the intermediate friction coefficient is 0.3, and the friction coefficient in the stable stage is 0.75; in the vacuum environment, the initial friction coefficient is 0.15, the intermediate friction coefficient is 0.4, and the friction coefficient in the stable stage is 0.86.

[0084] Example 2

[0085] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiMoCuAg with a thickness of 0.59 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0086] (1) Same as step (1) in Example 1;

[0087] (2) While keeping the base rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering. Set the power duty cycle to 5%, sputter a nickel metal target with a sputtering power of 80W and a sputtering time of 15min to deposit a nickel metal nanolayer with a thickness of 0.12μm. Then sputter a molybdenum metal target with a sputtering power of 50W and a sputtering time of 15min to deposit a molybdenum metal nanolayer with a thickness of 0.08μm. Next, sputter a copper metal target with a sputtering power of 100W and a sputtering time of 15min to deposit a copper metal nanolayer with a thickness of 0.13μm. Adjust the power duty cycle to 7%, sputter a silver metal target with a sputtering power of 25W and a sputtering time of 15min to deposit a silver lubricating layer with a thickness of 0.26μm. A NiMoCuAg nanolayer conductive and wear-resistant coating with an average total thickness of 0.59μm is formed.

[0088] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and conduct a friction performance test.

[0089] Figure 5 This is a friction curve diagram of the spherical metal-based nanolayered conductive wear-resistant coating in this embodiment under atmospheric and vacuum environments. In this embodiment, the initial friction coefficient of the spherical metal-based nanolayered conductive wear-resistant coating in an atmospheric environment is 0.1, the intermediate friction coefficient is 0.2, and the stable friction coefficient is 0.75. In a vacuum environment, the initial friction coefficient is 0.13, the intermediate friction coefficient is 0.25, and the stable friction coefficient is 0.74; furthermore, in a vacuum environment, the friction coefficient increases rapidly and tends to stabilize dynamically after prolonged friction.

[0090] Example 3

[0091] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating CuMoNiAg with a thickness of 0.59 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0092] (1) Same as step (1) in Example 2;

[0093] (2) While keeping the base rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering. Set the power duty cycle to 5%, sputter a copper metal target with a sputtering power of 100W and a sputtering time of 15min, and deposit a copper metal nanolayer with a thickness of 0.13μm. Then sputter a molybdenum metal target with a sputtering power of 50W and a sputtering time of 15min, and deposit a molybdenum metal nanolayer with a thickness of 0.08μm. Next, sputter a nickel metal target with a sputtering power of 80W and a sputtering time of 15min, and deposit a nickel metal nanolayer with a thickness of 0.12μm. Adjust the power duty cycle to 7%, sputter a silver metal target with a sputtering power of 25W and a sputtering time of 15min, and deposit a silver lubricating layer with a thickness of 0.26μm. A spherical metal-based nanolayer conductive and wear-resistant coating CuMoNiAg with an average total thickness of 0.59μm is formed.

[0094] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and conduct a friction performance test.

[0095] In this embodiment, the initial friction coefficient of the spherical metal-based nanolayered conductive wear-resistant coating in an atmospheric environment is 0.16, the friction coefficient rapidly increases to 0.51 during friction, and the friction coefficient in the stable stage is 0.79.

[0096] Example 4

[0097] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiAg with a thickness of 0.74 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0098] Preparation of spherical metal-based nanolayered conductive and wear-resistant NiAg coating:

[0099] (1) Same as step (1) in Example 1.

[0100] (2) Keep the base frame rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 7%, sputter a nickel metal target, sputter power of 100W, sputtering time of 20min, and deposit a nickel metal nanolayer with a thickness of 0.24μm; adjust the power duty cycle to 10%, sputter a silver metal target, sputter power of 40W, sputtering time of 20min, and deposit a silver lubricating layer with a thickness of 0.5μm; form a spherical metal-based nanolayered conductive wear-resistant coating NiAg with a total thickness of 0.74μm.

[0101] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and conduct a friction performance test.

[0102] In this embodiment, the spherical metal-based nanolayered conductive wear-resistant coating has an initial friction coefficient of 0.13, an intermediate friction coefficient of 0.23, and a stable friction coefficient of 0.70 in an atmospheric environment.

[0103] Example 5

[0104] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiAg with a thickness of 0.74 μm is formed on the surface of a spherical substrate with a diameter of 3 mm after argon plasma etching. The preparation method includes:

[0105] (1) Same as step (1) in Example 4.

[0106] (2) Keep the base rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 7%, sputter a nickel metal target, sputter power of 100W, sputtering time of 20min, and deposit a nickel metal nanolayer with a thickness of 0.24μm; adjust the power duty cycle to 10%, sputter a silver metal target, sputter power of 40W, sputtering time of 20min, and deposit a silver lubricating layer with a thickness of 0.5μm; form a spherical metal-based nanolayer conductive wear-resistant coating NiAgNiAg with a total thickness of 0.74μm.

[0107] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and conduct a friction performance test.

[0108] In this embodiment, the spherical metal-based nanolayered conductive wear-resistant coating has an initial friction coefficient of 0.12, an intermediate friction coefficient of 0.2, and a stable friction coefficient of 0.67 in an atmospheric environment.

[0109] Example 6

[0110] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiAgNiAg with a thickness of 1.48 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0111] (1) Same as step (1) in Example 4.

[0112] (2) Same as step (2) in Example 5.

[0113] (3) Repeat step (2) once to form a spherical metal-based nanolayer conductive wear-resistant coating NiAgNiAg with a total thickness of 1.48μm.

[0114] (4) is the same as step (4) in Example 5.

[0115] In this embodiment, the spherical metal-based nanolayered conductive wear-resistant coating has an initial friction coefficient of 0.13, an intermediate friction coefficient of 0.31, and a stable friction coefficient of 0.69 in an atmospheric environment.

[0116] Example 7

[0117] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiAgNiAg with a thickness of 0.24 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0118] (1) Same as step (1) in Example 4.

[0119] (2) Keep the base rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 7%, sputter a nickel metal target, sputter power of 100W, and deposit a nickel metal nanolayer with a thickness of 0.1μm; adjust the power duty cycle to 10%, sputter a silver metal target, sputter power of 40W, sputtering time of 20min, and deposit a silver lubricating layer with a thickness of 0.02μm.

[0120] (3) Repeat step (2) once to form a spherical metal-based nanolayered conductive wear-resistant coating NiAgNiAg with a total thickness of 0.24μm.

[0121] (4) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and perform a friction performance test.

[0122] In this embodiment, the spherical metal-based nanolayered conductive wear-resistant coating has an initial friction coefficient of 0.13, an intermediate friction coefficient of 0.6, and a stable friction coefficient of 1.0 in an atmospheric environment.

[0123] In this embodiment, the total thickness of the spherical metal-based nano-layered conductive wear-resistant coating is relatively thin, especially the silver lubricating layer, which is too thin. After long-distance, high-speed friction, the coating's friction performance decreases significantly.

[0124] Example 8

[0125] In this embodiment, a spherical metal-based nanolayered conductive and wear-resistant coating NiAg with a thickness of 1.44 μm is formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0126] (1) Same as step (1) in Example 4.

[0127] (2) Keep the base frame rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 7%, sputter a nickel metal target, sputter power of 100W, sputtering time of 20min, and deposit a nickel metal nanolayer with a thickness of 0.24μm; adjust the power duty cycle to 10%, sputter a silver metal target, sputter power of 100W, sputtering time of 20min, and deposit a silver lubricating layer with a thickness of 1.2μm; form a spherical metal-based nanolayered conductive wear-resistant coating NiAg with a total thickness of 1.44μm.

[0128] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and conduct a friction performance test.

[0129] In this embodiment, the spherical metal-based nanolayered conductive wear-resistant coating has an initial friction coefficient of 0.14, an intermediate friction coefficient of 0.25, and a stable friction coefficient of 0.75 in an atmospheric environment.

[0130] In this embodiment, the silver lubricating layer is relatively thick, forming a thicker lubricating layer in the early stage of friction. It maintains low friction in both the initial and intermediate friction stages. However, the coating is relatively soft. When the surface lubricating layer wears and fails, the stainless steel substrate comes into contact with the Ni layer or even the intrinsic material of the spherical substrate, which leads to an increased degree of coating deformation. As the friction time increases, the coefficient of friction increases rapidly and then decreases and tends to stabilize.

[0131] Comparative Example 1

[0132] In this comparative example, a spherical metal-based nano-conductive wear-resistant coating Ni with a thickness of 0.24 μm was formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0133] (1) Same as step (1) in Example 4.

[0134] (2) Keep the base frame rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 7%, sputter the nickel metal target, sputtering power to 100W, sputtering time to 20min, deposit a nickel metal nanolayer with a thickness of 0.24μm, and form a Ni nano-conductive wear-resistant coating with a total thickness of 0.24μm.

[0135] (3) Lower the cavity temperature to room temperature, take out the sphere with the spherical metal-based nano-conductive wear-resistant coating, and conduct a friction performance test.

[0136] Figure 7The graphs show the friction curves of the spherical metal-based nano-conductive wear-resistant coating in atmospheric and vacuum environments in this comparative example. In the atmospheric environment, the initial friction coefficient is 0.18, the intermediate friction coefficient is 0.51, and the friction coefficient in the stable stage is 0.77. In the vacuum environment, the friction coefficient in the initial stage is 0.26, the intermediate friction coefficient is 0.80, and the friction coefficient in the stable stage is 1.22.

[0137] In this comparative example, the spherical metal-based nano-conductive wear-resistant coating lacks a silver lubricating layer. The nickel nanolayer generates corresponding oxides through tribochemical reactions in the atmospheric environment. With increasing friction time, excessive oxidation leads to the coating losing its lubricating effect. In a vacuum environment, the lack of a lubricating phase reduces the coefficient of friction with increasing friction time, resulting in severe wear and significant fluctuations in the friction curve.

[0138] Comparative Example 2

[0139] In this comparative example, a spherical metal-based nano-conductive and wear-resistant coating Ag with a thickness of 0.6 μm was formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0140] Preparation of spherical metal-based nano-conductive wear-resistant coating:

[0141] (1) Same as step (1) in Example 4;

[0142] (2) Keep the base frame rotating, turn on the pulse power supply to perform high-power pulsed magnetron sputtering, set the power duty cycle to 10%, sputter the silver metal target, sputtering power to 40W, sputtering time to 20min, and deposit a silver lubricating layer with a thickness of 0.6μm; forming a silver lubricating layer with a total thickness of 0.6μm.

[0143] (3) Lower the cavity temperature to room temperature, take out the sphere with the spherical metal-based nano-conductive wear-resistant coating, and conduct a friction performance test.

[0144] In this comparative example, the spherical metal-based nano-conductive wear-resistant coating exhibits an initial friction coefficient of 0.14, an intermediate friction coefficient of 0.35, and a stable friction coefficient of 0.91 in an atmospheric environment. In a vacuum environment, the initial friction coefficient is 0.13, the intermediate friction coefficient is 0.31, and the stable friction coefficient is 0.88.

[0145] Comparative Example 3

[0146] This comparative example demonstrates the formation of a spherical metal-based nanolayered conductive and wear-resistant coating NiCuAg with a thickness of 0.27 μm on the surface of a 6 mm diameter spherical substrate without argon plasma etching. The preparation method includes:

[0147] Preparation of spherical metal-based nanolayered conductive and wear-resistant NiAg coating:

[0148] (1) Place the cleaned spherical substrate in a circular stainless steel tray inside the coating device cavity, and evacuate to 9×10⁻⁶. -4 Pa, heated to 50℃ inside the cavity, the rotating base frame drives the spherical substrate in the circular stainless steel tray to rotate, the rotation speed of the base frame is 40r / min.

[0149] High-power pulsed magnetron sputtering was performed with a pulsed power supply set to 3%. A nickel metal target was sputtered at a power of 60 W for 10 min, depositing a nickel metal nanolayer with a thickness of 0.05 μm. Subsequently, a copper metal target was sputtered at a power of 50 W for 10 min, depositing a copper metal nanolayer with a thickness of 0.06 μm. The power supply duty cycle was adjusted to 4%, and a silver metal target was sputtered at a power of 10 W for 10 min, depositing a silver lubricating layer with a thickness of 0.16 μm. This resulted in a spherical metal-based nanolayered conductive and wear-resistant NiCuAg coating with an average total thickness of 0.27 μm.

[0150] (2) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layered conductive wear-resistant coating, and conduct a friction performance test.

[0151] In this comparative example, the spherical metal-based nanolayered conductive wear-resistant coating exhibits an initial friction coefficient of 0.14, an intermediate friction coefficient of 0.61, and a stable friction coefficient of 0.76 in an atmospheric environment. In a vacuum environment, the initial friction coefficient is 0.14, the intermediate friction coefficient is 0.55, and the stable friction coefficient is 0.91.

[0152] In this comparative example, the spherical substrate was not etched by argon plasma, resulting in an uneven surface coating, increased impurities and defects, and a tendency for localized coating peeling. During the friction process, the coating is prone to separation from the substrate, leading to an increase in the coefficient of friction and ultimately a significant reduction in friction life.

[0153] Comparative Example 4

[0154] This comparative example demonstrates the formation of a spherical metal-based nano-conductive and wear-resistant NiCu coating with a thickness of 0.11 μm on the surface of a 6 mm diameter spherical substrate after argon plasma etching. The preparation method includes:

[0155] (1) Same as step (1) in Example 1.

[0156] (2) Keep the base rotating, turn on the pulse power supply for high-power pulsed magnetron sputtering, set the power duty cycle to 3%, sputter a nickel metal target, sputter power of 60W, sputtering time of 10min, and deposit a nickel metal nanolayer with a thickness of 0.05μm. Then sputter a copper metal target, sputter power of 50W, sputtering time of 10min, and deposit a copper metal nanolayer with a thickness of 0.06μm. Adjust the power duty cycle to 4% to form a spherical metal-based nano-conductive wear-resistant coating NiCu with an average total thickness of 0.11μm.

[0157] (3) Lower the cavity temperature to room temperature, take out the sphere with the spherical metal-based nano-conductive wear-resistant coating, and conduct a friction performance test.

[0158] In this comparative example, the spherical metal-based nano-conductive wear-resistant coating has an initial friction coefficient of 0.22, an intermediate friction coefficient of 0.65, and a stable friction coefficient of 0.92 in an atmospheric environment.

[0159] The comparative example lacks a silver lubricating layer and a lubricating phase, resulting in a higher initial friction coefficient of the coating, a rapid increase in the intermediate friction coefficient, easy wear and failure, a significantly shortened friction life, and a large fluctuation in the friction curve during the friction process.

[0160] Comparative Example 5

[0161] In this comparative example, a spherical metal-based nano-conductive and wear-resistant coating NiCuAg with a thickness of 2.3 μm was formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0162] (1) Same as step (1) in Example 1.

[0163] (2) Keep the base rotating, turn on the power supply for DC magnetron sputtering, sputter a nickel metal target with a sputtering power of 60W and a sputtering time of 10min, and deposit a nickel metal nanolayer with a thickness of 0.54μm. Then sputter a copper metal target with a sputtering power of 50W and a sputtering time of 10min, and deposit a copper metal nanolayer with a thickness of 0.5μm. Sputter a silver metal target with a sputtering power of 10W and a sputtering time of 10min, and deposit a silver lubricating layer with a thickness of 1.26μm. A spherical metal-based nanolayer conductive wear-resistant coating NiCuAg with an average total thickness of 2.3μm is formed.

[0164] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and perform characterization and friction performance testing.

[0165] Figure 8 The image shows the interface SEM image of the spherical metal-based nano-conductive wear-resistant coating in this comparative example. The coating interface thickness is 2.3 μm.

[0166] In this comparative example, the spherical metal-based nano-conductive wear-resistant coating exhibits an initial friction coefficient of 0.32, an intermediate friction coefficient of 0.19, and a stable friction coefficient of 0.68 in an atmospheric environment.

[0167] This comparative example uses DC magnetron sputtering, and the thickness and uniformity of the single metal layer and silver transition layer are difficult to control. Under low power and short time, the coating is not complete. With the increase of power and time, the coating integrity increases, but cracks exist in the horizontal direction and there are undulations between the layers, resulting in a high initial friction coefficient. As the friction time increases, the coating layers separate and move, and the soft lubricating phase fills the interlayer depressions, reducing the intermediate friction coefficient. However, its density is poor and the structure is loose, causing the friction coefficient to rise again in the stable stage, affecting the friction life.

[0168] Comparative Example 6

[0169] This comparative example demonstrates the formation of a 0.13 μm thick spherical metal-based nano-conductive wear-resistant coating Cu on the surface of a 6 mm diameter spherical substrate after argon plasma etching. The preparation method includes:

[0170] (1) Same as step (1) in Example 1.

[0171] (2) Keep the base frame rotating, turn on the pulse power supply to perform high-power pulse magnetron sputtering, set the power duty cycle to 3%, sputter copper metal target, sputtering power of 50W, sputtering time of 20min, deposit copper metal nanolayer with a thickness of 0.13μm; form a spherical metal-based nano-conductive wear-resistant coating Cu with an average total thickness of 0.13μm.

[0172] (3) Lower the cavity temperature to room temperature, take out the sphere with the spherical metal-based nano-conductive wear-resistant coating, and conduct a friction performance test.

[0173] Figure 9 This is a friction curve of the spherical metal-based nano-conductive wear-resistant coating in a vacuum environment in this comparative example. In this comparative example, the Cu coating can play a certain role in lubrication, with an initial friction coefficient as low as 0.1. However, it is prone to wear and failure, resulting in a significantly shortened friction life. Furthermore, the friction curve fluctuates considerably throughout the entire friction process.

[0174] Comparative Example 7

[0175] (1) Place the cleaned spherical substrate in a circular stainless steel tray inside the coating device cavity, and evacuate to 9×10⁻⁶. -4Pa, heated to 100℃ inside the cavity, argon gas was introduced to a pressure of 2Mpa, the rotating base frame drove the spherical substrate in the circular stainless steel tray to rotate, the rotation speed of the base frame was 40r / min, under the action of -100V pulse negative bias voltage, the rotating spherical substrate was etched for 30min to obtain the pretreated spherical substrate.

[0176] (2) Same as step (2) in Example 4;

[0177] (3) Reduce the temperature of the cavity to room temperature, take out the sphere with the spherical metal-based nano-layer conductive wear-resistant coating, and conduct a friction performance test.

[0178] As the deposition temperature in the chamber increases, Ag elements gradually soften and precipitate, accumulating on the transition layer to form large particles. With increasing coating thickness, the low wettability of the Ag layer reduces the anchoring energy between layers. Under the bombardment of metal ions, significant large gaps appear between layers during high-temperature deposition. This weakens the film-substrate adhesion and interlayer bonding strength, leading to coating separation in the early stages of friction, a rapid increase in the coefficient of friction, and ultimately, coating failure.

[0179] Comparative Example 8

[0180] In this comparative example, a spherical metal-based nanolayered conductive and wear-resistant coating NiAgNiAgNiAg with a thickness of 2.22 μm was formed on the surface of a spherical substrate with a diameter of 6 mm after argon plasma etching. The preparation method includes:

[0181] (1) Same as step (1) in Example 4.

[0182] (2) Same as step (2) in Example 4.

[0183] (3) Repeat step (2) twice to form a spherical metal-based nanolayered conductive wear-resistant coating NiAgNiAgNiAg with a total thickness of 2.22 μm.

[0184] (4) is the same as step (4) in Example 5.

[0185] In this comparative example, the spherical metal-based nanolayered conductive wear-resistant coating has an initial friction coefficient of 0.14, an intermediate friction coefficient of 0.36, and a stable friction coefficient of 0.72 in an atmospheric environment.

[0186] In this comparative example, increasing both the laminate thickness and the number of silver lubricating layers simultaneously leads to a decrease in the Ag-Ni interlayer bonding force and a reduction in the mechanical properties of the coating bottom, resulting in insufficient support. This makes interlayer separation prone to occur during friction, generating a large amount of wear debris on the coating surface, forming three-body wear, causing a rapid increase in the friction coefficient and wear rate, and exhibiting large fluctuations in the friction curve. However, while maintaining a constant number of silver lubricating layers, reducing the laminate thickness per laminate cycle can improve interlayer separation to some extent, thereby improving the friction coefficient. When the total laminate thickness meets the requirements of 0.12–2.0 μm, and the thicknesses of the metal transition layer and the silver lubricating layer also meet the thickness requirements, the resulting spherical metal-based nanolayered conductive wear-resistant coating exhibits better friction performance, film-substrate adhesion, and interlayer bonding strength.

[0187] In addition, the present invention also tests the resistivity and film-substrate bonding strength of the spherical metal-based nanolayered conductive wear-resistant coating.

[0188] Resistivity tests were performed on three spheres: a cleaned spherical substrate (pure substrate) with a diameter of 6 mm, a sphere with a spherical metal-based nanolayered conductive and wear-resistant coating (Example 2), and a sphere with a spherical metal-based nanolayered conductive and wear-resistant coating (Example 4). The results are shown in [Figure Number]. Figure 10 It can be seen that the resistivity of the spherical substrate is the highest at all five measurement points, with an average value of 9.41 × 10⁻⁶. -6 The resistivity of the NiAg coating is 8 Ohm / cm, indicating the worst electrical conductivity. Compared to the spherical substrate, the resistivity of the NiAg coating is significantly reduced, with an average resistivity of 8.28 × 10⁻⁶. -6 Ohm / cm; After the NiMoCuAg coating was deposited on the surface, the resistivity at all five measurement points was at its lowest, and the average resistivity decreased to 7.66 × 10⁻⁶. -6 Ohm / cm. This indicates that the conductivity of the NiAg coating is significantly improved compared to the spherical substrate, while the resistivity of the NiMoCuAg coating is further improved compared to the NiAg coating, and its conductivity is the best among all the comparative coatings mentioned above.

[0189] The film-substrate bonding strength of the sphere with the spherical metal-based nanolayered conductive and wear-resistant coating in Example 2 and the sphere with only a silver lubricating layer in Comparative Example 2 was tested and compared. Figure 11It can be seen that in Comparative Example 2, the Ag layer was directly deposited on the substrate surface, resulting in a thin coating and no metal transition layer to increase adhesion. In the scratch test, the coating was quickly pressed against the sphere, causing cracks and peeling. The worst film-substrate adhesion was 3.5N, indicating that the coating and substrate were prone to separation, which could lead to coating peeling or collapse during friction. In contrast, in Example 2, the coating was relatively thick, and the addition of a metal transition layer effectively increased the film-substrate adhesion. Moreover, the surface was a soft metal Ag layer, resulting in a film-substrate adhesion of 12.5N. The coating exhibited better film-substrate adhesion and toughness, effectively inhibiting separation between the coating and substrate, thereby reducing the wear rate.

[0190] In summary, the present invention uses a high-power pulsed magnetron sputtering method to sequentially deposit alternating layers of a metal transition layer and a silver lubricating layer on the etched sphere surface, with the stacking period of the metal transition layer and the silver lubricating layer being at least one. The resulting spherical metal-based nanolayered conductive wear-resistant coating exhibits good friction life and friction stability.

[0191] All aspects, embodiments, and features of this invention should be considered illustrative in all respects and not limiting of the invention; the scope of the invention is defined only by the claims. Other embodiments, modifications, and uses will become apparent to those skilled in the art without departing from the spirit and scope of the invention as claimed.

[0192] In the preparation method of this invention, the order of the steps is not limited to the listed order. For those skilled in the art, variations in the order of the steps without creative effort are also within the scope of protection of this invention. Furthermore, two or more steps or actions can be performed simultaneously.

[0193] Finally, it should be noted that the specific embodiments described herein are merely illustrative examples of the invention and are not intended to limit the implementation of the invention. Those skilled in the art can make various modifications or additions to the described specific embodiments or use similar methods to replace them; it is neither necessary nor possible to exemplify all embodiments here. However, these obvious variations or modifications derived from the essential spirit of the invention still fall within the scope of protection of the invention, and interpreting them as any additional limitation would contradict the spirit of the invention.

Claims

1. A method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating, characterized in that, The preparation method includes: in an inert gas environment of 40-70℃ and 1-5 MPa, a rotating spherical substrate is successively treated by pulsed bias etching and high-power pulsed magnetron sputtering to form a spherical metal-based nanolayered conductive and wear-resistant coating with a thickness of 0.12-2.0 μm on the surface of the etched spherical substrate. The spherical metal-based nanolayered conductive wear-resistant coating comprises alternating layers of a metal transition layer and a silver lubricating layer sequentially formed on the surface of a spherical substrate, wherein the stacking cycle of the metal transition layer and the silver lubricating layer in the alternating layers is at least one. The metal transition layer includes at least one single metal nanolayer, which includes one or more of nickel, copper and molybdenum nanolayers; the silver lubricating layer is located on the outermost side of the alternating layers. The metal transition layer comprises one or more of the following: face-centered cubic Ni, face-centered cubic Cu, and face-centered cubic Mo metal phases with crystal plane indices of (111), (200), and (220); the silver lubricating layer comprises the following: face-centered cubic Ag phases with crystal plane indices of (311), (111), and (222).

2. The method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 1, characterized in that, The diameter of the spherical base is 1 to 10 mm.

3. The method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 1, characterized in that, The material of the spherical substrate includes one or more of the following: single metal, multi-element alloy, and ceramic.

4. The method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 1, characterized in that, The thickness of the alternating layers is 0.12–1.5 μm; in the alternating layers, the total thickness of the silver lubricating layer is 0.1–1.3 μm; and the thickness of the metal transition layer is 0.02–0.9 μm.

5. The method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 1, characterized in that, In the alternating layers, the total thickness of the silver lubricating layer is 0.1 to 1.3 μm, and the total thickness of the silver lubricating layer accounts for 20 to 80% of the thickness of the alternating layers.

6. The method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 1, characterized in that, The rotational speed of the spherical substrate is 10 to 190 r / min.

7. The method for preparing a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 1, characterized in that, The pulsed negative bias voltage is -10 to -300V, and the etching time is 1 to 240 minutes.

8. A sphere with a spherical metal-based nanolayered conductive and wear-resistant coating, characterized in that, It includes a spherical metal-based nanolayered conductive wear-resistant coating prepared by the method described in any one of claims 1 to 7.

9. The sphere with a spherical metal-based nanolayered conductive and wear-resistant coating according to claim 8, characterized in that, It includes a spherical substrate with a diameter of 1 to 10 mm and a spherical metal-based nanolayered conductive and wear-resistant coating with a thickness of 0.12 to 1.5 μm; The spherical metal-based nanolayered conductive wear-resistant coating comprises alternating layers of a metal transition layer and a silver lubricating layer sequentially formed on the surface of a spherical substrate, wherein the stacking cycle of the metal transition layer and the silver lubricating layer in the alternating layers is at least one. The metal transition layer includes at least one single metal nanolayer, which includes one or more of nickel, copper and molybdenum nanolayers; the silver lubricating layer is located on the outermost side of the alternating layers.

10. The application of a spherical metal-based nanolayered conductive wear-resistant coating prepared by the preparation method of any one of claims 1 to 7, or a sphere having a spherical metal-based nanolayered conductive wear-resistant coating as described in any one of claims 8 to 9, in the fields of aerospace, energy industry, and medical devices.

Images