Pneumatic liquid mixing combination valve and operation method thereof

Abstract

The invention belongs to the technical field of engineering elements, and particularly relates to a valve, in particular to a pneumatic liquid mixing combination valve and an operation method thereof. The pneumatic liquid mixing combination valve comprises a valve body, a valve rod, a valve rod and a valve rod, the liquid outlet opening and closing unit is arranged in the valve body and used for opening and closing an outlet of the valve body; the liquid inlet opening and closing units are arranged on the valve body and communicate with the injection port, and each liquid inlet opening and closing unit comprises a valve seat arranged on the upper surface of the valve body; the opening and closing piece is arranged in the air chamber in the valve seat in a lifting manner and is used for opening and closing the liquid outlet of the valve seat; the air inlet is formed in the side wall of the valve seat and communicates with the air chamber cavity; the sealing ring is arranged on the bottom wall of the opening and closing piece; an air hole is formed in the opening and closing piece in the axial direction, and the air hole is communicated with the air chamber cavity; the connecting piece is arranged in the radial direction of the valve seat and communicates with the air inlet; through cooperation of the air hole and the sealing ring, the contact area of the sealing ring and the valve seat can be increased, and therefore the sealing effect is improved.

Description

Technical Field

[0001] This invention belongs to the field of engineering components technology, specifically relating to valves, and more particularly to pneumatic mixing combination valves and their operating methods. Background Technology

[0002] In semiconductor manufacturing, various valves are used to control the opening and closing of liquid pipelines. When it is necessary to transport mixed liquids, multiple liquids need to be mixed together before being transported. This requires multiple valves to control the opening and closing of each liquid. Numerous pipelines are needed to connect multiple valve bodies to the mixing container, which results in a large number of complex pipelines.

[0003] In existing technologies, pneumatic mixing valves are commonly used to control the opening and closing of liquid pipelines. The pipeline is opened by supplying compressed air into the valve; it is closed by a compression spring within the valve pushing the valve core downwards. However, after prolonged use, the compression spring experiences elasticity decay, resulting in a weakened closing force and ultimately poor sealing between the valve core and seat. Furthermore, existing pneumatic mixing valves require a high degree of cleanliness in the mixed liquid; the presence of solid particles in the liquid can affect the sealing performance when the valve core closes.

[0004] Therefore, it is very necessary to develop a pneumatic mixing valve and its operation method.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute information related to the technology. Summary of the Invention

[0006] This disclosure provides at least one pneumatic mixing valve and its operating method.

[0007] In a first aspect, embodiments of this disclosure provide a pneumatic mixing combination valve, comprising: The valve body has a main inlet inside; The liquid outlet opening and closing unit is located inside the valve body and is used to open and close the outlet of the valve body. Several liquid inlet opening and closing units are mounted on the valve body and communicate with the injection port, including: Valve seat, which is disposed on the upper surface of the valve body; The opening and closing element is located in the air chamber of the valve seat and is used to open and close the liquid outlet of the valve seat. The air inlet is located on the side wall of the valve seat and communicates with the air chamber. A sealing ring is provided on the bottom wall of the opening and closing component; The opening and closing component has an air hole along the axial direction, and the air hole communicates with the air chamber. A connector, which is arranged radially along the valve seat and communicates with the air inlet; When any one of the liquid inlet opening and closing units is opened, it can deliver mixed liquid into the main inlet; When compressed air is delivered into the air chamber through the air inlet, the opening and closing element moves downward so that the sealing ring abuts against the inner wall of the valve seat; Compressed air flows through the air hole to the inner ring of the sealing ring, causing the sealing ring to expand radially outward to increase the contact area between the sealing ring and the inner wall of the valve seat; When the opening and closing element moves upward to open the outlet of the valve seat, the connecting element connects with the air hole, and the compressed air flows through the air hole to the sealing ring, and then through the inner ring of the sealing ring to the outlet.

[0008] In one alternative implementation, the opening / closing element includes: The connecting rod, whose lifting mechanism is located within the valve seat; The piston is sleeved on the outer wall of the connecting rod, and the outer wall slides and adapts to the inner wall of the air chamber. The valve core is fixed to the bottom wall of the connecting rod, and a groove for fixing the sealing ring is provided on the bottom wall; The return spring is sleeved on the outer wall of the connecting rod, and its upper end abuts against the lower bottom wall of the piston. The sealing ring is embedded in the groove and protrudes from the bottom wall of the valve core; The air hole extends axially along the connecting rod and communicates with the inner ring sidewall of the groove; When compressed air is delivered into the air chamber through the air inlet, the piston pushes the connecting rod and valve core downwards until the sealing ring abuts against the bottom wall of the valve seat. Compressed air flows into the groove through the air hole, and the compressed air pushes the sealing ring to expand and deform outward.

[0009] In one alternative embodiment, the sealing ring has an elliptical cross-section; When the valve core is not closed at the outlet, the axial thickness of the sealing ring along the piston rod is greater than its radial thickness. When the valve core closes the outlet, the axial thickness of the sealing ring along the piston rod is less than its radial thickness.

[0010] In one alternative embodiment, the connecting rod has a radially formed air passage that communicates with the air hole, and the inner end of the connector near the connecting rod is adapted to be inserted into the air passage.

[0011] In one alternative embodiment, the outlet of the air inlet is located above the opening / closing element.

[0012] In one alternative embodiment, the connector is elastic and has a first magnetic ring at its inner end; A second magnetic ring is provided on the inner wall of the airway, and the inner wall of the second magnetic ring matches the outer wall of the first magnetic ring. The connecting rod moves upward until the airway and the connector are at the same horizontal level, and the connector is adapted to be inserted into the airway.

[0013] In one optional embodiment, a mixing chamber is provided within the liquid outlet opening and closing unit, and the mixing chamber is connected to the injection port; The liquid outlet opening and closing unit includes a main valve core that is lifted and disposed in the mixing chamber, and the main valve core is used to open and close the mixing chamber.

[0014] In one alternative embodiment, the opening and closing element is ellipsably disposed within the air chamber of the valve seat for opening and closing the liquid outlet of the valve seat. The air inlet is located on the side wall of the valve seat, communicates with the air chamber, and is located above the opening and closing element. A sealing ring is provided on the bottom wall of the opening and closing component, and its cross-section is elliptical. The opening and closing component has an air hole along the axial direction, and the air hole communicates with the air chamber. A connector, which is arranged radially along the valve seat, is detachably connected to the air port; When compressed air is delivered into the air chamber through the air inlet, the compressed air flows through the air hole to the inner ring of the sealing ring, so that the sealing ring expands radially outward to increase the contact area between the sealing ring and the inner wall of the valve seat. When the opening and closing element moves upward to open the outlet of the valve seat, the connecting element connects with the air hole, and the compressed air flows through the air hole to the sealing ring, and then through the inner ring of the sealing ring to the outlet.

[0015] In one alternative implementation, the opening / closing element includes: The connecting rod, whose lifting mechanism is located within the valve seat; The piston is sleeved on the outer wall of the connecting rod, and the outer wall slides and adapts to the inner wall of the air chamber. The valve core is fixed to the bottom wall of the connecting rod, and a groove for fixing the sealing ring is provided on the bottom wall; The return spring is sleeved on the outer wall of the connecting rod, and its upper end abuts against the lower bottom wall of the piston. The sealing ring is embedded in the groove and protrudes from the bottom wall of the valve core; The air hole extends axially along the connecting rod and communicates with the inner ring sidewall of the groove; When compressed air is delivered into the air chamber through the air inlet, the piston pushes the connecting rod and valve core downwards until the sealing ring abuts against the bottom wall of the valve seat. Compressed air flows into the groove through the air hole, and the compressed air pushes the sealing ring to expand and deform outward.

[0016] In one optional embodiment, the connecting rod has a radially formed air passage that communicates with the air hole, and the inner end of the connector near the connecting rod is adapted to be inserted into the air passage. The connector is elastic and has a first magnetic ring at its inner end; A second magnetic ring is provided on the inner wall of the airway, and the inner wall of the second magnetic ring matches the outer wall of the first magnetic ring. The connecting rod moves upward until the airway and the connector are at the same horizontal level, and the connector is adapted to be inserted into the airway.

[0017] In one alternative implementation, when the valve core is not closed at the outlet, the cross-sectional thickness of the sealing ring along the piston rod is greater than its radial thickness. When the valve core closes the outlet, the axial thickness of the sealing ring along the piston rod is less than its radial thickness.

[0018] Secondly, this disclosure also provides an operating method for a pneumatic mixing valve, the operating method comprising: When any liquid inlet opening / closing unit is opened, it can deliver mixed liquid into the main inlet; When compressed air is delivered into the air chamber through the air inlet, the opening and closing element moves downward so that the sealing ring abuts against the inner wall of the valve seat; Compressed air flows through the air hole to the inner ring of the sealing ring, causing the sealing ring to expand radially outward to increase the contact area between the sealing ring and the inner wall of the valve seat; When the opening and closing element moves upward to open the outlet of the valve seat, the connecting element connects with the air hole, and the compressed air flows through the air hole to the sealing ring, and then through the inner ring of the sealing ring to the outlet.

[0019] The beneficial effects of this invention are that it provides a pneumatic mixing combination valve and its operating method. By integrating several inlet opening and closing units with the valve body, the number of pipelines required to connect multiple valve bodies is reduced, assembly difficulty is lowered, and space is saved. Furthermore, by supplying compressed air to each inlet opening and closing unit to drive the opening and closing components to close each valve seat, the problem of poor sealing effect caused by the weakening of the compression spring force is avoided. Simultaneously, during sealing, compressed air is supplied to the inner ring of the sealing ring through the air vent, causing the sealing ring to expand and deform, further increasing the contact area between the sealing ring and the inner wall of the valve seat, thus improving the sealing effect.

[0020] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0021] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of the present invention, the drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 A perspective view of the pneumatic mixing combination valve provided in an embodiment of this disclosure; Figure 2 A partial sectional perspective view of the pneumatic mixing combination valve provided in an embodiment of this disclosure; Figure 3 Provided for the embodiments of this disclosure Figure 1 Sectional front view from the perspective of AA (American angle); Figure 4 This is a schematic diagram of the valve core sealing valve seat state provided in the embodiments of this disclosure; Figure 5 This is a schematic diagram showing the valve core in the open valve seat state according to an embodiment of this disclosure. In the figure: 1. Valve body; 10. Main inlet; 11. Outlet; 2. Liquid outlet opening and closing unit; 20. Mixing chamber; 21. Main valve core; 3. Liquid inlet opening and closing unit; 31. Valve seat; 32. Opening and closing element; 320. Air port; 321. Connecting rod; 322. Piston; 323. Valve core; 324. Return spring; 325. Groove; 326. Air passage; 33. Air inlet; 34. Sealing ring; 35. Air chamber; 36. Connecting piece; 360. First magnetic ring. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0026] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify an entire column of elements when following a column of elements. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0027] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise expressly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0028] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0029] Research has shown that various valves are needed in semiconductor manufacturing to control the opening and closing of liquid pipelines. When it is necessary to transport mixed liquids, multiple liquids need to be mixed together before being transported. This requires multiple valves to control the opening and closing of each liquid. Numerous pipelines are needed to connect multiple valve bodies to the mixing container, resulting in a large number of complex pipelines.

[0030] In existing technologies, pneumatic mixing valves are commonly used to control the opening and closing of liquid pipelines. The pipeline is opened by supplying compressed air into the valve; it is closed by a compression spring within the valve pushing the valve core downwards. However, after prolonged use, the compression spring experiences elasticity decay, resulting in a weakened closing force and ultimately poor sealing between the valve core and seat. Furthermore, existing pneumatic mixing valves require a high degree of cleanliness in the mixed liquid; the presence of solid particles in the liquid can affect the sealing performance when the valve core closes.

[0031] Therefore, it is very necessary to develop a pneumatic mixing valve and its operation method.

[0032] The defects in the above solutions and the reasons for their occurrence are the results of the inventors' practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventors' contributions to this disclosure.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0035] like Figure 1 As shown, at least one embodiment provides a pneumatic mixing combination valve, comprising: The valve body 1 has a main inlet 10 and an outlet 11 inside. The valve body 1 is made of stainless steel to meet the high cleanliness requirements of the semiconductor industry. The main inlet 10 is used to receive the mixed liquid, while the outlet 11 is connected to the downstream delivery pipeline. The liquid outlet opening and closing unit 2 is located inside the valve body 1 and is used to open and close the outlet 11 of the valve body 1. Several liquid inlet opening and closing units 3 are located on the valve body 1 and are connected to the injection port. Each liquid inlet opening and closing unit 3 corresponds to one liquid inlet pipe and is used to connect different liquids. When any liquid inlet opening and closing unit 3 is opened, the mixed liquid can be delivered into the main inlet 10. Multiple liquid inlet opening and closing units 3 are fixed on the upper surface of the valve body 1. This integrated design reduces external pipelines and lowers the assembly difficulty and space occupation.

[0036] Reference Appendix Figure 2Each of the liquid inlet opening and closing units 3 includes: a valve seat 31, which is fixed to the upper surface of the valve body 1, and has an air chamber 35 inside, which is connected to the injection port; an opening and closing member 32, which is raised and lowered in the air chamber 35, for controlling the opening and closing of the liquid outlet of the valve seat 31; that is, when the opening and closing member 32 moves upward, the liquid outlet opens, and vice versa. An air inlet 33 is provided on the side wall of the valve seat 31 and is connected to the air chamber 35; the air inlet 33 is connected to an air pump, and the air pump is adapted to deliver compressed air into the air chamber 35 through the air inlet 33, and the compressed air is adapted to push the opening and closing member 32 downward to close the liquid outlet of the valve seat 31.

[0037] Reference Appendix Figure 3 The opening and closing component 32 includes: a connecting rod 321, a piston 322, a valve core 323, a return spring 324, and a groove 325. The connecting rod 321 moves axially up and down; the piston 322 is sleeved and fixed on the outer wall of the connecting rod 321 and slides against the inner wall of the air chamber 35 to ensure airtightness. The valve core 323 is fixed on the bottom wall of the connecting rod 321, and its bottom wall has a groove 325 for embedding the sealing ring 34. The return spring 324 is sleeved on the outer wall of the connecting rod 321, and its upper end abuts against the lower bottom wall of the piston 322 to provide initial return force. When the liquid inlet opening and closing unit 3 is in the open state, the air inlet 33 stops supplying compressed air into the air chamber 35, and the return spring 324 pushes the piston 322 upward to separate the valve core 323 from the inner bottom wall of the valve seat 31, thereby opening the liquid outlet. The sealing ring 34 is made of an elastic material such as fluororubber and has an elliptical cross-section.

[0038] Reference Appendix Figure 5 When the valve core 323 is not closing the outlet, the axial thickness of the sealing ring 34 is greater than the radial thickness (specifically as follows). Figure 5 (As shown in the diagram), h2 represents the axial thickness of the sealing ring 34, h1 represents the radial thickness of the sealing ring 34, and h2 is greater than h1. This facilitates liquid flow; see attached diagram. Figure 3 When closed, the axial thickness is less than the radial thickness (specifically as follows). Figure 4 (As shown in the diagram), h2 represents the axial thickness of the sealing ring 34, h1 represents the radial thickness of the sealing ring 34, and h2 is less than h1 to enhance the seal. This design accommodates particulate matter that may be present in the semiconductor liquid, compensating for the sealing gap through deformation.

[0039] Reference Appendix Figure 2 The opening / closing member 32 has an axially oriented air hole 320, which communicates with the air chamber 35; the connecting rod 321 has a radially oriented air passage 326, which communicates with the air hole 320. The connecting member 36 is arranged radially along the valve seat 31, and its inner end can be inserted into the air passage 326. Figure 2As shown in the cross-sectional view, the connector 36 is elastic, with a first magnetic ring 360 at its inner end and a second magnetic ring on the inner wall of the air passage 326. The detachable connection is achieved through magnetic attraction, ensuring the stability of the air passage.

[0040] When the air inlet 33 delivers compressed air into the air chamber 35, the opening and closing element 32 moves downward to make the sealing ring 34 abut against the inner wall of the valve seat 31. The compressed air flows through the air hole 320 to the inner ring of the sealing ring 34, causing the sealing ring 34 to expand radially outward to increase the contact area between the sealing ring 34 and the inner wall of the valve seat 31. This solves the sealing problem caused by spring decay and improves the reliability of the valve in long-term use. When the opening and closing element 32 moves upward to open the liquid outlet of the valve seat 31, the connecting element 36 connects with the air hole 320, and the compressed air flows through the air hole 320 to the sealing ring 34. The compressed air flows through the inner ring of the sealing ring 34 to the liquid outlet. Delivering compressed air to the inner ring of the sealing ring 34 not only increases the flow rate of the liquid in the valve seat 31, but also prevents particulate matter in the liquid from remaining on the bottom wall of the sealing ring 34 when the liquid delivery ends.

[0041] Reference Appendix Figure 3 The liquid outlet opening / closing unit 2 is located inside the valve body 1 and is used to open and close the outlet 11. A mixing chamber 20 is formed within the liquid outlet opening / closing unit 2 and communicates with the main inlet 10. The main valve core 21 is vertically mounted within the mixing chamber 20, and its structure is similar to that of the liquid inlet opening / closing unit 3, but its size is larger to handle the mixed liquid. The mixing chamber 20 is designed with a vortex structure to promote uniform mixing of the liquid and reduce residue.

[0042] The operation of the liquid outlet opening / closing unit 2 is synchronized with that of the liquid inlet opening / closing unit 3: when all liquid inlet opening / closing units 3 are open, the main valve core 21 rises to allow the mixed liquids to be discharged. When closed, compressed air is supplied to the liquid outlet opening / closing unit 2, and the main valve core 21 descends to seal the outlet 11. This design extends the mixing time and is suitable for scenarios in semiconductor processes where strict mixing ratios are required.

[0043] The working principle of this valve is as follows: Liquid inlet stage: When any liquid inlet opening / closing unit 3 is opened, liquid flows from the branch inlet into the main inlet 10. In semiconductor applications, programmable logic controllers control the sequential opening of multiple units to achieve precise mixing ratios. For example, unit A is opened first to inject etching solution, and then unit B is opened to inject cleaning solution, avoiding cross-contamination.

[0044] Sealing Stage: When a liquid inlet unit needs to be shut down, compressed air is introduced into the air chamber 35 through the air inlet 33. The opening and closing element 32 moves downward, and the sealing ring 34 abuts against the inner wall of the valve seat 31. Compressed air flows through the air hole 320 to the inner ring of the sealing ring 34, causing it to expand and deform. This process can be completed in a very short time (e.g., 100 milliseconds), meeting the high-frequency operation requirements of semiconductor devices.

[0045] Liquid discharge control stage: When the opening / closing element 32 moves upward, the connecting element 36 connects with the air hole 320, and compressed air flows to the liquid outlet to purge residual liquid and prevent particle accumulation. The liquid discharge opening / closing unit 2 operates synchronously to ensure that the mixed liquid is discharged from the outlet 11.

[0046] The entire operation is automated through a pneumatic system, reducing manual intervention. The combination valve can integrate sensors to monitor flow and pressure in real time, enabling intelligent control.

[0047] At least one embodiment provides a method for operating a pneumatic mixing combination valve, the method comprising: When any liquid inlet opening / closing unit 3 is opened, it can deliver mixed liquid into the main inlet 10; When the air inlet 33 delivers compressed air into the air chamber 35, the opening and closing element 32 moves downward so that the sealing ring 34 abuts against the inner wall of the valve seat 31. Compressed air flows through the air hole 320 to the inner ring of the sealing ring 34, so that the sealing ring 34 expands radially outward to increase the contact area between the sealing ring 34 and the inner wall of the valve seat 31. When the opening and closing element 32 moves upward to open the outlet of the valve seat 31, the connecting element 36 communicates with the air hole 320, and the compressed air flows through the air hole 320 to the sealing ring 34, and the compressed air flows through the inner ring of the sealing ring 34 to the outlet.

[0048] In the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention based on the specific circumstances.

[0049] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as a second element, component, region, layer, or segment.

[0050] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A pneumatic mixing combination valve, characterized in that, include: The valve body (1) has a main inlet (10) inside. The liquid outlet opening and closing unit (2) is located inside the valve body (1) and is used to open and close the outlet (11) of the valve body (1). Several liquid inlet opening and closing units (3) are disposed on the valve body (1) and communicate with the injection port, including: Valve seat (31), which is disposed on the upper surface of valve body (1); The opening and closing element (32) is raised and lowered in the air chamber (35) inside the valve seat (31) and is used to open and close the liquid outlet of the valve seat (31); The air inlet (33) is located on the side wall of the valve seat (31) and communicates with the air chamber (35); A sealing ring (34) is disposed on the bottom wall of the opening and closing member (32); The opening and closing element (32) has an air hole (320) along the axial direction, and the air hole (320) is connected to the air chamber (35); A connector (36) is arranged radially along the valve seat (31) and communicates with the air inlet (33); When any one of the liquid inlet opening and closing units (3) is opened, it can deliver mixed liquid into the main inlet (10); When the air inlet (33) delivers compressed air into the air chamber (35), the opening and closing element (32) moves downward so that the sealing ring (34) abuts against the inner wall of the valve seat (31); Compressed air flows through the air hole (320) to the inner ring of the sealing ring (34), so that the sealing ring (34) expands radially outward to increase the contact area between the sealing ring (34) and the inner wall of the valve seat (31); When the opening and closing part (32) moves upward to open the outlet of the valve seat (31), the connecting part (36) communicates with the air hole (320), and the compressed air flows through the air hole (320) to the sealing ring (34), and the compressed air flows through the inner ring of the sealing ring (34) to the outlet.

2. The pneumatic mixing valve as described in claim 1, characterized in that, The opening and closing element (32) includes: The connecting rod (321) is raised and lowered within the valve seat (31); The piston (322) is sleeved on the outer wall of the connecting rod (321), and the outer wall is slidably adapted to the inner wall of the air chamber (35); The valve core (323) is fixed to the bottom wall of the connecting rod (321), and a groove (325) for fixing the sealing ring (34) is provided on the bottom wall. The return spring (324) is sleeved on the outer wall of the connecting rod (321), and its upper end abuts against the lower bottom wall of the piston (322); The sealing ring (34) is embedded in the groove (325) and protrudes from the bottom wall of the valve core (323); The air hole (320) extends axially along the connecting rod (321) and communicates with the inner ring sidewall of the groove (325); When the air inlet (33) delivers compressed air into the air chamber (35), the piston (322) pushes the connecting rod (321) and the valve core (323) downwards until the sealing ring (34) abuts against the bottom wall of the valve seat (31); Compressed air flows through the air hole (320) to the groove (325), and the compressed air pushes the sealing ring (34) to expand and deform outward.

3. The pneumatic mixing valve as described in claim 2, characterized in that, The cross-section of the sealing ring (34) is elliptical; When the valve core (323) is not closed at the outlet, the cross-sectional thickness of the sealing ring (34) along the piston (322) rod is greater than the radial thickness. When the valve core (323) closes the liquid outlet, the cross-sectional thickness of the sealing ring (34) along the piston (322) rod is less than the radial thickness.

4. The pneumatic mixing valve as described in claim 2, characterized in that, The connecting rod (321) has an air passage (326) in the radial direction. The air passage (326) is connected to the air hole (320). The inner end of the connector (36) near the connecting rod (321) is adapted to be inserted into the air passage (326).

5. The pneumatic mixing valve as described in claim 1, characterized in that, The air outlet of the air inlet (33) is located above the opening and closing element (32).

6. The pneumatic mixing combination valve as described in claim 4, characterized in that, The connector (36) is elastic and has a first magnetic ring (360) at its inner end. The inner wall of the airway (326) is provided with a second magnetic ring, and the inner wall of the second magnetic ring matches the outer wall of the first magnetic ring (360); The connecting rod (321) moves upward until the air passage (326) and the connector (36) are at the same horizontal level, and the connector (36) is adapted to be inserted into the air passage (326).

7. The pneumatic mixing valve as described in claim 1, characterized in that, A mixing chamber (20) is provided inside the liquid outlet opening and closing unit (2), and the mixing chamber (20) is connected to the injection port; The liquid outlet opening and closing unit (2) includes a main valve core (21) that is raised and lowered in the mixing chamber (20), and the main valve core (21) is used to open and close the mixing chamber (20).

8. A pneumatic mixing combination valve, characterized in that, include: The opening and closing element (32) is raised and lowered in the air chamber (35) inside the valve seat (31) and is used to open and close the liquid outlet of the valve seat (31); The air inlet (33) is located on the side wall of the valve seat (31), communicates with the air chamber (35), and is located above the opening and closing element (32); A sealing ring (34) is provided on the bottom wall of the opening and closing part (32) and has an elliptical cross section; The opening and closing element (32) has an air hole (320) along the axial direction, and the air hole (320) is connected to the air chamber (35); A connector (36) is arranged radially along the valve seat (31) and is detachably connected to the air port (320); When the air inlet (33) delivers compressed air into the air chamber (35), the compressed air flows through the air hole (320) to the inner ring of the sealing ring (34) so ​​that the sealing ring (34) expands radially outward to increase the contact area between the sealing ring (34) and the inner wall of the valve seat (31). When the opening and closing part (32) moves upward to open the outlet of the valve seat (31), the connecting part (36) communicates with the air hole (320), and the compressed air flows through the air hole (320) to the sealing ring (34), and the compressed air flows through the inner ring of the sealing ring (34) to the outlet.

9. The pneumatic mixing valve as described in claim 8, characterized in that, The opening and closing element (32) includes: The connecting rod (321) is raised and lowered within the valve seat (31); The piston (322) is sleeved on the outer wall of the connecting rod (321), and the outer wall is slidably adapted to the inner wall of the air chamber (35); The valve core (323) is fixed to the bottom wall of the connecting rod (321), and a groove (325) for fixing the sealing ring (34) is provided on the bottom wall. The return spring (324) is sleeved on the outer wall of the connecting rod (321), and its upper end abuts against the lower bottom wall of the piston (322); The sealing ring (34) is embedded in the groove (325) and protrudes from the bottom wall of the valve core (323); The air hole (320) extends axially along the connecting rod (321) and communicates with the inner ring sidewall of the groove (325); When the air inlet (33) delivers compressed air into the air chamber (35), the piston (322) pushes the connecting rod (321) and the valve core (323) downwards until the sealing ring (34) abuts against the bottom wall of the valve seat (31); Compressed air flows through the air hole (320) to the groove (325), and the compressed air pushes the sealing ring (34) to expand and deform outward.

10. The pneumatic mixing valve as described in claim 9, characterized in that, The connecting rod (321) has an air passage (326) in the radial direction, the air passage (326) is connected to the air hole (320), and the inner end of the connector (36) near the connecting rod (321) is adapted to be inserted into the air passage (326); The connector (36) is elastic and has a first magnetic ring (360) at its inner end. The inner wall of the airway (326) is provided with a second magnetic ring, and the inner wall of the second magnetic ring matches the outer wall of the first magnetic ring (360); The connecting rod (321) moves upward until the air passage (326) and the connector (36) are at the same horizontal level, and the connector (36) is adapted to be inserted into the air passage (326).

11. The pneumatic mixing valve as described in claim 10, characterized in that, When the valve core (323) is not closed at the outlet, the cross-sectional thickness of the sealing ring (34) along the piston (322) rod is greater than the radial thickness. When the valve core (323) closes the liquid outlet, the cross-sectional thickness of the sealing ring (34) along the piston (322) rod is less than the radial thickness.

12. An operating method for a pneumatic mixing combination valve, characterized in that, The operation method of using the pneumatic mixing valve as described in any one of claims 1-11 includes: When any liquid inlet opening / closing unit (3) is opened, it can deliver mixed liquid into the main inlet (10); When the air inlet (33) delivers compressed air into the air chamber (35), the opening and closing element (32) moves downward so that the sealing ring (34) abuts against the inner wall of the valve seat (31); Compressed air flows through the air hole (320) to the inner ring of the sealing ring (34), so that the sealing ring (34) expands radially outward to increase the contact area between the sealing ring (34) and the inner wall of the valve seat (31); When the opening and closing part (32) moves upward to open the outlet of the valve seat (31), the connecting part (36) communicates with the air hole (320), and the compressed air flows through the air hole (320) to the sealing ring (34), and the compressed air flows through the inner ring of the sealing ring (34) to the outlet.

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