250-1700 nanometer six-waveband switchable high-resolution thin-plate spectrometer

Abstract

The invention discloses a 250-1700 nanometer six-wave-band switchable high-resolution thin-plate spectrometer, and belongs to the technical field of spectral measurement, the 250-1700 nanometer six-wave-band switchable high-resolution thin-plate spectrometer comprises a plurality of measurement assemblies which are sequentially arranged in the x direction, each measurement assembly comprises a micro lens, an optical filter, a plane transmission grating and a detector, the micro lens collimates incident light into parallel light beams, and the parallel light beams are transmitted to the optical filter; the optical filter transmits light beams in a specific wave band range in the parallel light beams; the plane transmission grating diffracts the filtered parallel light beams to generate primary diffraction light beams; a pixel array of the detector is divided into a plurality of blocks arranged in the y direction, and high-resolution spectral information, collected by the micro lens, of a detected object in a specific wave band is obtained in real time according to target blocks irradiated by first-order diffraction light beams with different wavelengths in the specific wave band. According to the spectrograph, the combination of all the measuring components can cover the ultra-wide wave band of 250-1700 nanometers, and switchable independent measurement or simultaneous measurement of multiple wave bands is supported.

Description

Technical Field

[0001] This invention belongs to the field of spectral measurement technology, specifically relating to a 250~1700 nm six-band switchable high-resolution thin-plate spectrometer. Background Technology

[0002] Spectrometers play an increasingly important role in scientific research and industrial applications across various fields, including chemical analysis, environmental monitoring, food inspection, medical diagnosis, and space exploration. In certain applications or for certain users, there is a demand for spectrometers that can acquire high-resolution spectral information in real time, and also require the measurement of high-resolution spectral information in one or more different bands within an ultra-wide wavelength range (e.g., 250–1700 nm). Purchasing several high-resolution spectrometers with different spectral ranges would be both a financial burden and a waste of resources. Furthermore, some applications (such as online measurements on industrial production lines) require spectrometers to occupy as little space as possible. Therefore, there is an urgent need for a thin-plate spectrometer that can cover an ultra-wide wavelength range with high spectral resolution, allows for multi-band switching and individual measurement (i.e., can select to measure only one wide band at a time, or simultaneously measure multiple or all wide bands), and is less than 3 mm thick.

[0003] In the prior art, scanning high-resolution spectrometers have three disadvantages: (1) long measurement time, requiring at least one scanning cycle, which cannot meet the requirements of real-time measurement; (2) low instrument stability due to the presence of moving devices and their driving systems; and (3) limited instrument miniaturization, making it impossible to realize a thin-plate spectrometer with ultra-wide band high spectral resolution and an instrument thickness of less than 3 mm.

[0004] The drawbacks of existing snapshot-type high-resolution spectrometers are that they have narrow spectral ranges and cannot achieve measurable wavelength ranges above 200 nanometers, let alone the ultra-wide wavelength range of 250 to 1700 nanometers. Furthermore, existing high-resolution spectrometers cannot achieve multi-band switchable individual measurement. Summary of the Invention

[0005] To address the aforementioned problems in the prior art, this invention provides a 250-1700 nm six-band switchable high-resolution thin-plate spectrometer. The technical problem to be solved by this invention is achieved through the following technical solution: This invention provides a 250~1700 nm six-band switchable high-resolution thin-plate spectrometer, comprising: along x Multiple measurement components arranged sequentially in a directional manner, each of the measurement components including a microlens, a filter, a planar transmission grating, and a detector; the first... In each measurement component The microlens is used to collimate the incident light into a parallel beam; The filter is located in the output optical path of the microlens and is used to transmit the first light beam in the parallel beam. Beams within a specific wavelength band; The planar transmission grating is used to diffract the filtered parallel beam to generate the first... First-order diffraction beams of different wavelengths within each band; The detector includes a pixel array, which is divided into sections along... y Multiple blocks arranged sequentially in a direction; the detector is used to determine the direction of the first... The target area is illuminated by first-order diffraction beams of different wavelengths within each band, and the first-order diffraction beams of the measured object collected by the microlens are acquired in real time. High-resolution spectral information within each band; in, , This indicates the number of measurement components. The combination of all measurement components is used to acquire high-resolution spectral information in the ultra-wideband 250–1700 nm in real time. x The direction of the grating groove extension is parallel to the inner plane transmission grating of each measuring component. y Direction and the stated x The directions are perpendicular within the same vertical plane.

[0006] In one embodiment of the present invention, ; The first band is 250-400 nm, the second band is 400-700 nm, the third band is 700-980 nm, the fourth band is 980-1250 nm, the fifth band is 1250-1450 nm, and the sixth band is 1450-1700 nm.

[0007] In one embodiment of the present invention, the first In the measurement assembly, the optical axis of the microlens is perpendicular to the plane of the filter and the extending direction of the grating groove in the planar transmission grating, and the angle between the optical axis of the microlens and the normal to the plane of the planar transmission grating is... .

[0008] In one embodiment of the present invention, the spectrometer is x Dimensions in direction satisfy: ; In the formula, Indicates the first The aperture size of the microlens in each measurement component Indicates rounding up. Indicates the first In each measurement component, the filter is inx the dimension of the spectrometer in the direction of represents the dimension of the plane transmission grating in the direction of the first measurement assembly, x the dimension of the plane transmission grating in the direction of the first measurement assembly, the dimension of the pixel of the detector in the first measurement assembly.

[0009] In one embodiment of the present application, the dimension of the spectrometer in the direction of y should satisfy:

[0010] wherein, represents the number of wavelengths in the first wavelength band measurable by the spectrometer, represents the dimension of the illuminated area of each wavelength in the first wavelength band measurable by the spectrometer on the detector of the first measurement assembly in the direction of represents the dimension of the illuminated area of each wavelength in the first wavelength band measurable by the spectrometer on the detector of the first measurement assembly in the direction of represents the dimension of the illuminated area of each wavelength in the first wavelength band measurable by the spectrometer on the detector of the first measurement assembly in the direction of represents the distance from the lower edge of the first order diffraction beam of the minimum wavelength in the first wavelength band incident on the detector in the first measurement assembly to the lower edge of the filtered parallel light beam at the normal of the incident point of the plane transmission grating. y represents the dimension of the plane transmission grating in the direction of the first measurement assembly, represents the distance from the lower edge of the first order diffraction beam of the minimum wavelength in the first wavelength band incident on the detector in the first measurement assembly to the lower edge of the filtered parallel light beam at the normal of the incident point of the plane transmission grating.

[0011] In one embodiment of the present application, the distance between the plane on which the plane transmission grating is located and the plane on which the detector is located in the first measurement assembly is:

[0012] wherein, represents the minimum wavelength in the first wavelength band measurable by the spectrometer, represents the grating constant of the plane transmission grating in the first measurement assembly, represents the spectral resolution of the spectrometer at .

[0013] In one embodiment of the present application, the spectral resolution of the spectrometer at the first wavelength in the first wavelength band measurable by the spectrometer is: ; wherein, .

[0014] In one embodiment of the present application, the distance between the plane on which the plane transmission grating is located and the plane on which the detector is located in the first measurement assembly is: ​​​​​​​​In the measurement assembly, the blocks of the detector are in x direction and y direction are respectively wherein, .

[0015] Compared with the prior art, the present application has the beneficial effects that: (1) The spectrometer provided by the present application can cover the super wide band of 250-1700 nanometer wavelength range.

[0016] (2) The spectrometer provided by the present application can realize six-band switchable single measurement, can perform single measurement of corresponding wide band according to different requirements, so as to reduce unnecessary measurement and data processing, improve efficiency and save cost; different objects with different band spectra can also be measured at the same time, so as to reduce the measurement time of multiple objects, improve efficiency and expand the application range.

[0017] (3) The thickness of the spectrometer provided by the present application is less than 3 mm, which is a thin plate instrument.

[0018] The present application will be further described in detail below in combination with the drawings and examples. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a structural schematic diagram of a 250-1700 nanometer six-band switchable high-resolution thin plate spectrometer provided by the present application; Figure 2 is a structural schematic diagram of the first measurement assembly provided by the present application; Figure 3 is a structural schematic diagram of the first measurement assembly provided by the present application; Figure 4 is a curve diagram of the spectral resolution of the 250-1700 nanometer six-band switchable high-resolution thin plate spectrometer provided by the present application in the first band with wavelength change; Figure 5 is a curve diagram of the spectral resolution of the 250-1700 nanometer six-band switchable high-resolution thin plate spectrometer provided by the present application in the second band with wavelength change; Figure 6 is a curve diagram of the spectral resolution of the 250-1700 nanometer six-band switchable high-resolution thin plate spectrometer provided by the present application in the third band with wavelength change; Figure 7 is a curve diagram of the spectral resolution of the 250-1700 nanometer six-band switchable high-resolution thin plate spectrometer provided by the present application in the fourth band with wavelength change; Figure 8 This is a graph showing the spectral resolution of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention as a function of wavelength in the fifth band. Figure 9 This is a graph showing the spectral resolution of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention as a function of wavelength in the sixth band. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to specific embodiments, but the implementation of the present invention is not limited thereto.

[0021] Figure 1 This is a schematic diagram of a 250~1700 nm six-band switchable high-resolution thin-plate spectrometer provided in an embodiment of the present invention. Figure 2 This is the first embodiment of the present invention. A schematic diagram of the structure of each measurement component. Figure 3 This is the first embodiment of the present invention. A schematic diagram of the detector structure in each measurement component. (See diagram below.) Figures 1-3 As shown in the figure, an embodiment of the present invention provides a 250~1700 nm six-band switchable high-resolution thin-plate spectrometer, comprising: along x Multiple measurement components 1 are arranged sequentially in the direction of the image. Each measurement component 1 includes a microlens 101, a filter 102, a planar transmission grating 103, and a detector 104; In measurement component 1, Microlens 101 is used to collimate the incident light into a parallel beam; Filter 102 is located in the output optical path of microlens 101 and is used to transmit the first light in a parallel beam. Beams within a specific wavelength band; Planar transmission grating 103 is used to diffract the filtered parallel beam to generate the first... First-order diffraction beams of different wavelengths within each band; Detector 104 includes a pixel array, which is divided into sections along... y Multiple blocks arranged sequentially in the direction; detector 104 is used to determine the direction based on the... The target area is illuminated by first-order diffraction beams of different wavelengths within each band, and the first-order diffraction beams of the measured object collected by the microlens 101 are acquired in real time. High-resolution spectral information within each band; in, , This indicates the number of measurement components 1. The combination of all measurement components 1 is used to acquire high-resolution spectral information in the ultra-wide band of 250~1700 nm in real time. xthe direction is parallel to the direction in which the grating grooves of the planar transmission grating 103 extend in each measurement assembly 1, y the direction is perpendicular to the direction in which the grating grooves of the planar transmission grating 103 extend in each measurement assembly 1, x the direction is perpendicular to the direction in which the grating grooves of the planar transmission grating 103 extend in each measurement assembly 1.

[0022] Specifically, the spectrometer comprises a plurality of measurement assemblies 1 arranged in sequence along the direction, each measurement assembly 1 comprising a microlens 101, a filter 102, a planar transmission grating 103, and a detector 104. x For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. y For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102. For the first measurement assembly 1, the working process of the spectrometer begins with the incident light output by the optical fiber being collimated into a parallel light beam by the microlens 101, and the light beam in the first waveband being diffracted by the planar transmission grating 103 after being filtered by the filter 102.

[0023] In this embodiment, the number of measurement assemblies 1 is Correspondingly, the first waveband is 250-400 nm, which mainly involves the ultraviolet spectrum region and is suitable for chemical analysis or environmental monitoring in scenarios sensitive to ultraviolet spectrum, the second waveband is 400-700 nm, covering the visible spectrum region and being widely used in color analysis in medical diagnosis or food inspection, the third waveband is 700-980 nm, belonging to the initial part of the near-infrared spectrum region and being suitable for space exploration or material analysis, the fourth waveband is 980-1250 nm, also belonging to the near-infrared spectrum region and being applicable to moisture detection or industrial online monitoring, the fifth waveband is 1250-1450 nm, belonging to the middle part of the near-infrared spectrum region and being suitable for gas analysis or medical infrared imaging, and the sixth waveband is 1450-1700 nm, covering the terminal part of the near-infrared spectrum region and being applicable to remote sensing.

[0024] In the aforementioned spectrometer, each measurement component 1 can acquire high-resolution spectral information of a single wide band in real time, while the combination of six wide bands covers the ultra-wide band wavelength range of 250~1700 nanometers. The spectrometer can achieve six-band switchable individual measurement, that is, it can measure only one of the six wide bands at a time, or it can measure multiple or all of the six wide bands at the same time.

[0025] No. In the measurement component 1, the optical axis of the microlens 101 is perpendicular to the plane of the filter 102 and the extension direction of the grating groove in the planar transmission grating 103. This design ensures that the incident light, after being collimated by the microlens 101, can uniformly illuminate the filter 102 and the planar transmission grating 103, avoiding optical path deviation or energy loss. Furthermore, the angle between the optical axis of the microlens 101 and the normal to the plane of the planar transmission grating 103 is... It should be understood that The angle between the incident beam and the normal to the plane containing the planar transmission grating 103 is defined. The distribution of the first-order diffracted beam can be controlled by the grating equation. The grating equation of the planar transmission grating 103 is expressed as: ; In the formula, This indicates the diffraction order of the planar transmission grating 103. Indicates the wavelength of the incident light. Represents the grating constant. This represents the angle of incidence of the filtered parallel beam on the plane containing the planar transmission grating 103. Indicates wavelength of Order of diffraction angle.

[0026] In other words, The optimized selection ensures that first-order diffraction beams of different wavelengths accurately illuminate the blocks of detector 104, thereby achieving high spectral resolution.

[0027] For example, the first In the measurement component 1, the block of detector 104 is in x direction and y The dimensions in the directions are respectively ,in, Each block contains 1 pixel, This indicates the size of the pixel in the detector.

[0028] The spectrometer can measure the first The first band Wavelength The spectral resolution at that location is: ; In the formula, .

[0029] According to the definition of the resolution of the grating and the calculation formula of the maximum theoretical resolution of the plane transmission grating 103, the spectral resolution of the plane transmission grating 103 at the wavelength should satisfy , in which, m represents the diffraction order of the plane transmission grating 103, n represents the number of grating grooves covered by the irradiation area of the plane transmission grating 103.

[0030] The first measurement assembly 1 is taken as an example. The number of grating grooves covered by the irradiation area of the plane transmission grating 103 on which the parallel light beams emitted by the microlens 101 are irradiated is .

[0031] Therefore, the spectral resolution of the 250-1700 nm six-waveband switchable high-resolution thin-plate spectrometer provided by the present application at the first wavelength in the first waveband should also satisfy: .

[0032] The first measurement assembly 1 is taken as an example. The clear aperture size of the microlens 101 is: ; The size of the optical filter 102 in the direction should satisfy: ; The size of the plane transmission grating 103 in the direction should satisfy: ; ; The size of the plane transmission grating 103 in the direction should satisfy: ; The size of the detector 104 in the direction is: ; ; In the formula, represents the upward rounding, represents all the wavelengths greater than or equal to ​​​​​​​The smallest one of the integers.

[0033] The detector 104 is in The dimension of the detector 104 in is: In the formula, represents the dimension of the irradiated area of each wavelength in the first wavelength band measurable by the spectrometer on the detector 104 in the direction, represents the number of wavelengths in the first wavelength band measurable by the spectrometer.

[0034] In this embodiment, the dimension of the spectrometer in x direction satisfies: In the formula, represents the clear aperture size of the microlens 101 in the first measurement assembly 1, represents the upward rounding, represents the dimension of the filter 102 in the first measurement assembly 1 in the x direction, represents the dimension of the planar transmission grating 103 in the first measurement assembly 1 in the x direction, represents the pixel size of the detector 104 in the first measurement assembly 1.

[0035] The dimension of the spectrometer in y direction should satisfy:

[0036] In the formula, represents the number of wavelengths in the first wavelength band measurable by the spectrometer, represents the dimension of the irradiated area of each wavelength in the first wavelength band measurable by the spectrometer on the detector 104 of the first measurement assembly 1 in the y direction, represents the distance from the lowermost edge of the first-order diffracted light beam of the smallest wavelength in the first wavelength band incident on the detector 104 in the first measurement assembly 1 to the lowermost edge of the filtered parallel light beam at the normal of the planar transmission grating 103 incident point. ​​

[0037] Further, in the first measurement assembly 1, the distance between the plane where the plane transmission grating 103 is located and the plane where the detector 104 is located is:

[0038] In the formula, represents the minimum wavelength within the first wavelength range that can be measured by the spectrometer, represents the minimum wavelength within the first wavelength range that can be measured by the spectrometer, represents the grating constant of the plane transmission grating 103 in the first measurement assembly 1, represents the spectral resolution of the spectrometer at the minimum wavelength within the first wavelength range. In the first measurement assembly 1, the distance between the lowest edge light of the first-order diffracted light beam of the minimum wavelength within the first wavelength range on the detector 104 and the lowest edge light of the filtered parallel light beam at the grating normal of the plane transmission grating 103 incident point is:

[0039] In the first measurement assembly 1, the distance between the lowest edge light of the first-order diffracted light beam of the minimum wavelength within the first wavelength range on the detector 104 and the lowest edge light of the filtered parallel light beam at the grating normal of the plane transmission grating 103 incident point is: In the formula, represents the grating constant of the plane transmission grating 103 in the first measurement assembly 1, is the spectral resolution of the spectrometer at the minimum wavelength within the first wavelength range.

[0040] In the formula, represents the grating constant of the plane transmission grating 103 in the first measurement assembly 1, is the spectral resolution of the spectrometer at the minimum wavelength within the first wavelength range. In the formula, represents the grating constant of the plane transmission grating 103 in the first measurement assembly 1,

[0041] Next, the 250-1700 nanometer six-wavelength-range switchable high-resolution thin-plate spectrometer provided by the present application is further described through simulation experiments.

[0042] Specifically, the related parameters are as follows: The first wavelength range is 250-400 nanometers, the second wavelength range is 400-700 nanometers, the third wavelength range is 700-980 nanometers, the fourth wavelength range is 980-1250 nanometers, the fifth wavelength range is 1250-1450 nanometers, the sixth wavelength range is 1450-1700 nanometers, and the combination of the first wavelength range to the sixth wavelength range constitutes the super-wide wavelength range of 250-1700 nanometers; the spectral resolution of the spectrometer at the minimum wavelength of 250 nanometers in the first wavelength range is , the spectral resolution at the minimum wavelength of 400 nanometers in the second wavelength range is , the spectral resolution at the minimum wavelength of 700 nanometers in the third wavelength range is , the spectral resolution at the minimum wavelength of 980 nanometers in the fourth wavelength range is ​​​​​​​The spectral resolution at the minimum wavelength of 1250 nm in the fifth band is [missing value]. The spectral resolution at the minimum wavelength of 1450 nm in the sixth band is [missing value]. .

[0043] The relevant parameters of the first measurement component 1: The grating constant of the planar transmission grating 103 is The angle between the parallel beam emitted from the microlens 101 and the normal to the plane containing the planar transmission grating 103 is... The parallel beam emitted from the microlens 101 illuminates the area along the plane transmission grating 103. The dimension of the direction is The number of grating grooves covered by the parallel beam emitted from the microlens 101 on the planar transmission grating 103 is [number missing]. The distance between the plane containing the planar transmission grating 103 and the plane containing the detector 104 is The distance between the lowest edge of the first-order diffracted beam (minimum wavelength 250 nm) on detector 104 and the lowest edge of the filtered parallel beam at the incident point of the plane transmission grating 103 is... ; The aperture size of microlens 101 is focal length is Filter 102 in The dimension in the direction is The filter 102 only transmits light beams within the first wavelength range of 250-400 nanometers; the planar transmission grating 103... The dimension in the direction is ,exist The dimension in the direction is The pixel size of detector 104 is The pixel array is divided along 170 blocks arranged sequentially in a directional pattern, each block having a size of [size missing]. Each block contains 20 columns and 24 rows of pixels.

[0044] The relevant parameters of the second measurement component 1: The grating constant of the planar transmission grating 103 is The angle between the parallel beam emitted from the microlens 101 and the normal to the plane containing the planar transmission grating 103 is... The parallel beam emitted from the microlens 101 illuminates the area along the plane transmission grating 103. The dimension of the direction is The number of grating grooves covered by the parallel beam emitted from the microlens 101 on the planar transmission grating 103 is [number missing]. The distance between the plane containing the planar transmission grating 103 and the plane containing the detector 104 is The distance from the lowest edge of the first-order diffracted beam (minimum wavelength 400 nm) on detector 104 to the lowest edge of the incident parallel beam at the incident point of the plane transmission grating 103 is... ; The aperture size of microlens 101 is focal length is Filter 102 in The dimension in the direction is The filter 102 only transmits light in the second wavelength range of 400-700 nanometers; the planar transmission grating 103... The dimension in the direction is ,exist The dimension in the direction is The pixel size of detector 104 is The pixel array is divided along The 188 blocks are arranged sequentially in the direction of the direction, and the size of each block is [size missing]. Each block contains 23 columns and 38 rows of pixels.

[0045] The relevant parameters of the third measurement component 1: The grating constant of the planar transmission grating 103 is The angle between the parallel beam emitted from the microlens 101 and the normal to the plane containing the planar transmission grating 103 is... The parallel beam emitted from the microlens 101 illuminates the area along the plane transmission grating 103. The dimension of the direction is The number of grating grooves covered by the parallel beam emitted from the microlens 101 on the planar transmission grating 103 is... The distance between the plane containing the planar transmission grating 103 and the plane containing the detector 104 is The distance from the lowest edge of the first-order diffracted beam (minimum wavelength 700 nm) in the third band to the lowest edge of the incident parallel beam on detector 104 at the incident point of the plane transmission grating 103 is... ; The aperture size of microlens 101 is focal length is Filter 102 in The dimension in the direction is The filter 102 only transmits light in the third wavelength range of 700-980 nanometers; the planar transmission grating 103... The dimension in the direction is ,exist The dimension in the direction is The pixel size of detector 104 is The pixel array is divided along The 137 blocks are arranged sequentially in the direction of the direction, and the size of each block is [size missing]. Each block contains 13 columns and 26 rows of pixels.

[0046] The relevant parameters of the fourth measurement component 1: The grating constant of the planar transmission grating 103 is The angle between the parallel beam emitted from the microlens 101 and the normal to the planar transmission grating 103 is... The parallel beam emitted from the microlens 101 illuminates the area along the plane transmission grating 103. The dimension of the direction is The number of grating grooves covered by the parallel beam emitted from the microlens 101 on the planar transmission grating 103 is [number missing]. The distance between the plane containing the planar transmission grating 103 and the plane containing the detector 104 is The distance between the lowest edge of the first-order diffracted beam (minimum wavelength 980 nm) on detector 104 and the lowest edge of the incident parallel beam at the incident point of the plane transmission grating 103 is... ; The aperture size of microlens 101 is focal length is Filter 102 in The dimension in the direction is The filter 102 only transmits light in the fourth wavelength range of 980~1250 nanometers; the planar transmission grating 103... The dimension in the direction is ,exist The dimension in the direction is The pixel size of detector 104 is The pixel array is divided along The 74 blocks are arranged sequentially in the direction of the direction, and the size of each block is [size missing]. Each block contains 10 columns and 20 rows of pixels.

[0047] The relevant parameters of the fifth measurement component 1: The grating constant of the planar transmission grating 103 is The angle between the parallel beam emitted from the microlens 101 and the normal to the plane containing the planar transmission grating 103 is... The parallel beam emitted from the microlens 101 illuminates the area along the plane transmission grating 103. The dimension of the direction is The number of grating grooves covered by the parallel beam emitted from the microlens 101 on the planar transmission grating 103 is [number missing]. The distance between the plane containing the planar transmission grating 103 and the plane containing the detector 104 is The distance between the lowest edge of the first-order diffracted beam (minimum wavelength 1250 nm) on detector 104 and the lowest edge of the incident parallel beam at the incident point of the plane transmission grating 103 is... ; The aperture size of microlens 101 is focal length is Filter 102 in The dimension in the direction is The filter 102 only transmits light in the fifth wavelength range of 1250~1450 nanometers; the planar transmission grating 103... The dimension in the direction is ,exist The dimension in the direction is The pixel size of detector 104 is The pixel array is divided along The 57 blocks are arranged sequentially in the direction of the direction, and the size of each block is [size missing]. Each block contains 13 columns and 26 rows of pixels.

[0048] The relevant parameters of the sixth measurement component 1: The grating constant of the planar transmission grating 103 is The angle between the parallel beam emitted from the microlens 101 and the normal to the plane containing the planar transmission grating 103 is... The parallel beam emitted from the microlens 101 illuminates the area along the plane transmission grating 103. The dimension of the direction is The number of grating grooves covered by the parallel beam emitted from the microlens 101 on the planar transmission grating 103 is [number missing]. The distance between the plane containing the planar transmission grating 103 and the plane containing the detector 104 is The distance between the lowest edge of the first-order diffracted beam (minimum wavelength 1450 nm) on detector 104 and the lowest edge of the incident parallel beam at the incident point of the plane transmission grating 103 is... ; The aperture size of microlens 101 is focal length is Filter 102 in The dimension in the direction is The filter 102 only transmits light in the sixth wavelength range of 1450~1700 nm; the planar transmission grating 103... The dimension in the direction is ,exist The dimension in the direction is The pixel size of detector 104 is The pixel array is divided along The 72 blocks are arranged sequentially in the direction of the direction, and the size of each block is [size missing]. Each block contains 21 columns and 41 rows of pixels.

[0049] Figure 4 This is a graph showing the spectral resolution as a function of wavelength in the first band of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention, where the first band is the wavelength range of 250-400 nm. Figure 4 As shown, the number of wavelengths that the spectrometer can measure in the first band is... The spectral resolution in the first band, within the wavelength range of 250–400 nm, is approximately 1 nm to 0.72 nm.

[0050] Figure 5 This is a graph showing the spectral resolution as a function of wavelength in the second band of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention, where the second band is the wavelength range of 400-700 nm. Figure 5 As shown, the number of wavelengths that the spectrometer can measure in the second band is... The spectral resolution in the second band, within the wavelength range of 400–700 nm, is approximately 2 nm to 1.02 nm.

[0051] Figure 6 This is a graph showing the spectral resolution as a function of wavelength in the third band of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention, where the third band is the wavelength range of 700-980 nm. Figure 6 As shown, the number of wavelengths within the third band that the spectrometer can measure is The spectral resolution in the third band, within the wavelength range of 700–980 nm, is approximately 3 nm to 1.20 nm.

[0052] Figure 7 This is a graph showing the spectral resolution as a function of wavelength in the fourth band of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention, where the fourth band is the wavelength range of 980-1250 nm. Figure 7As shown, the number of wavelengths measurable in the fourth band by the spectrometer is... The spectral resolution in the fourth band, within the wavelength range of 980–1250 nm, is approximately 4 nm to 3.22 nm.

[0053] Figure 8 This is a graph showing the spectral resolution as a function of wavelength in the fifth band of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention, where the fifth band is the wavelength range of 1250-1450 nm. Figure 8 As shown, the number of wavelengths measurable in the fifth band by the spectrometer is... The spectral resolution in the fifth band, within the wavelength range of 1250–1450 nm, is approximately 4.2 nm–2.87 nm.

[0054] Figure 9 This is a graph showing the spectral resolution as a function of wavelength in the sixth band of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention, where the sixth band is the wavelength range of 1450-1700 nm. Figure 9 As shown, the number of wavelengths measurable in the sixth band by the spectrometer is... The spectral resolution in the sixth band, within the wavelength range of 1450–1700 nm, is approximately 5.2 nm–2.17 nm.

[0055] We can obtain, and Therefore, the thickness of the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided in this embodiment of the invention (i.e., within) The dimension in the direction can be .

[0056] As can be seen from the simulation results above, the 250-1700 nm six-band switchable high-resolution thin-plate spectrometer provided by the present invention can simultaneously achieve high spectral resolution in an ultra-wide wavelength range (250-1700 nm wavelength range), six-band switchable individual measurement, and a thin-plate instrument with a thickness of less than 3 mm.

[0057] As can be seen from the above embodiments, the beneficial effects of the present invention are as follows: (1) The spectrometer provided by the present invention can cover the ultra-wide wavelength range of 250~1700 nanometers.

[0058] (2) The spectrometer provided by the present invention can realize six-band switchable individual measurement, and can perform corresponding wide-band individual measurement for different needs, so as to reduce unnecessary measurement and data processing, improve efficiency and save costs; it can also simultaneously measure different objects with different spectral bands, so as to reduce the measurement time of multiple objects, improve efficiency and expand the application range.

[0059] (3) The 250-1700 nm six-band switchable high-resolution thin plate spectrometer provided by the present invention can be a thin plate instrument with a thickness of less than 3 mm.

[0060] In the description of this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0061] Although this application has been described herein in conjunction with various embodiments, other variations of the disclosed embodiments can be understood and implemented by those skilled in the art in carrying out the claimed application by reviewing the accompanying drawings, the disclosure, and the appended claims.

[0062] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A six-band switchable high-resolution thin-plate spectrometer with wavelengths ranging from 250 to 1700 nanometers, characterized in that, include: along x Multiple measurement components arranged sequentially in a directional manner, each of the measurement components including a microlens, a filter, a planar transmission grating, and a detector; the first... In each measurement component The microlens is used to collimate the incident light into a parallel beam; The filter is located in the output optical path of the microlens and is used to transmit the first light beam in the parallel beam. Beams within a specific wavelength band; The planar transmission grating is used to diffract the filtered parallel beam to generate the first... First-order diffraction beams of different wavelengths within each band; The detector includes a pixel array, which is divided into sections along... y Multiple blocks arranged sequentially in a directional manner; The detector is used to determine the first The target area is illuminated by first-order diffraction beams of different wavelengths within each band, and the first-order diffraction beams of the measured object collected by the microlens are acquired in real time. High-resolution spectral information within each band; in, , This indicates the number of measurement components. The combination of all measurement components is used to acquire high-resolution spectral information in the ultra-wideband 250–1700 nm in real time. x The direction of the grating groove extension is parallel to the inner plane transmission grating of each measuring component. y Direction and the stated x The directions are perpendicular within the same vertical plane.

2. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 1, characterized in that, ； The first band is 250-400 nm, the second band is 400-700 nm, the third band is 700-980 nm, the fourth band is 980-1250 nm, the fifth band is 1250-1450 nm, and the sixth band is 1450-1700 nm.

3. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 2, characterized in that, No. In the measurement assembly, the optical axis of the microlens is perpendicular to the plane of the filter and the extending direction of the grating groove in the planar transmission grating, and the angle between the optical axis of the microlens and the normal to the plane of the planar transmission grating is... .

4. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 3, characterized in that, The spectrometer x Dimensions in direction satisfy: ； In the formula, Indicates the first The aperture size of the microlens in each measurement component Indicates rounding up. Indicates the first In each measurement component, the filter is in x Dimensions in the direction Indicates the first In the measurement components, the planar transmission grating is... x Dimensions in the direction Indicates the first The pixel size of the detector in each measurement component.

5. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 4, characterized in that, The spectrometer y Dimensions in direction Should meet: In the formula, This indicates the number of measurements that the spectrometer can measure. The number of wavelengths within each band This indicates the number of measurements that the spectrometer can measure. Each wavelength within each band is at the [number]th The area illuminated on the detector of each measurement component is in y Dimensions in the direction Indicates the first The incident light on the detector in the measurement component The distance from the lowest edge of the first-order diffracted beam with the smallest wavelength in each band to the normal at the incident point of the filtered parallel beam in the plane transmission grating.

6. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 5, characterized in that, No. In each measurement component, the distance between the plane containing the planar transmission grating and the plane containing the detector is: In the formula, This indicates the number of measurements that the spectrometer can measure. The minimum wavelength within each band Indicates the first The grating constant of the planar transmission grating in each measurement component This indicates that the spectrometer is in Spectral resolution at that location.

7. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 6, characterized in that, The spectrometer can measure the first The first band Wavelength The spectral resolution at that location is: ； In the formula, .

8. The 250~1700 nm six-band switchable high-resolution thin-plate spectrometer according to claim 7, characterized in that, No. In each measurement component, the detector block is in x direction and y The dimensions in the directions are respectively ,in, .

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