Method for generating a pattern of a spiral inductor fabricated by a semiconductor process

Abstract

The application provides a pattern generation method of a spiral inductor manufactured by a semiconductor process, comprising the following steps: setting the number of turns of the spiral inductor as M, and the shape of a single-turn coil as an N-polygon; taking the center of the N-polygon where the inner coil is located as the center of the XY axis coordinate origin, and corresponding to dividing into N regions, the first region is provided with a starting edge and an ending edge parallel to the X axis or the Y axis, and the other N-1 regions correspond to one edge of the N-polygon respectively: the distance difference between the starting edge and the ending edge relative to the distance of the origin is S, and the distance between the N+1 edges relative to the origin is the following expression:, r1 is the inner diameter of the N-polygon coil; i=1, 2, 3…N+1; Step=S / N, S is the sum of the line width and the line spacing of the N-polygon coil; linear relationship formulas corresponding to the regions where N edges are located are listed respectively, the intersection coordinates of two adjacent edges are solved as a vertex coordinate of the N-polygon, other vertex coordinates are obtained in this way, and the single-turn coil of the spiral inductor is drawn.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit layout design, and in particular to a method for generating a pattern of a spiral inductor fabricated using semiconductor processes. Background Technology

[0002] Inductors are widely used in integrated circuits. Planar spiral inductors, with their higher integration density and smaller footprint, are gradually replacing larger discrete inductors in integrated circuit design. Before manufacturing, inductors require layout design. Drawing polygonal inductors, specifically hexagonal or larger polygons, is significantly more difficult than drawing simple quadrilaterals. This is because the inner diameter of each side of a polygonal planar spiral inductor increases compared to the previous side. Therefore, the algorithm for calculating the vertex coordinates of the polygon directly determines the quality of the polygon shape. A uniform method for calculating the vertices of the polygonal spiral structure can result in a more reasonable and accurate shape, leading to better inductor characteristics. Different inductor structures have different effects on inductor characteristics. Currently, three common structures are hollow quadrilateral, octagonal, and circular RF spiral inductors. With equal inner diameters and conductor cross-sections, simulation analysis shows that circular inductors can achieve larger inductance, better quality factor, and higher bandwidth. In practice, it is very difficult to manufacture a circular planar spiral inductor. Forcing it to be made will backfire and become uncontrollable. Generally, a near-circular polygon is chosen as a substitute. The closer it is to a circle, the better its characteristics, provided that the process allows it to be.

[0003] The existing semiconductor process for generating the spiral inductor pattern involves first setting the segmented gradient of the coil in a planar octagonal spiral structure, and the offset of each coil relative to the vertex of the regular octagonal structure, based on layout parameters. Then, the coil is spiraled outwards or inwards according to the layout parameters, segmented gradient, and vertex offset. Each segment of each coil is sequentially varied by one segmented gradient and its vertex is offset by one vertex offset, resulting in the inner and outer edges and vertices of each segment of each coil, forming a planar octagonal spiral structure. The vertex offset is calculated as (1 + tan22.5°) * (coil width W + coil spacing S) / 8.

[0004] However, with changes in size, existing semiconductor manufacturing processes struggle to generate accurate layouts for spiral inductors under varying process parameter combinations, making it difficult to guarantee consistent results. Changes in vertex coordinates can lead to smaller spacing between adjacent coils or even overlapping lines in certain sections of the inductor coil. Such smaller spacing is difficult to achieve during fabrication, resulting in performance significantly deviating from design specifications and severely impacting RFIC performance. Alternatively, uneven structural variations may occur, with large angular changes in the pattern when altering the number of turns, leading to poor inductor characteristics. Furthermore, existing algorithms only address octagonal spiral structures, relying on geometric structures and trigonometric functions, and are computationally complex, failing to address structures with more sides. Summary of the Invention

[0005] The purpose of this invention is to provide a method for generating the graphic representation of a spiral inductor manufactured using semiconductor processes. This method can accurately draw a planar polygonal spiral inductor layout that meets the required specifications. It ensures that the distance between adjacent coils in the layout meets the standards and that the angle changes uniformly when the number of turns is varied. This allows for the quick and accurate drawing of inductors of specific dimensions. The calculation method involved in the drawing process provided by this invention is relatively simple and applicable to various computer languages, reducing the computational load of inductor drawing in drawing software. It is suitable for drawing polygonal coils of inductor, not limited to fixed-shape polygons, thus improving the efficiency, accuracy, and flexibility of inductor drawing.

[0006] To achieve the above objectives, the present invention provides a method for generating a pattern of a spiral inductor fabricated using semiconductor technology. The method employs computer code to perform the following calculations to draw the spiral inductor, including:

[0007] The initial conditions of the spiral inductor are set as follows: the number of turns of the spiral inductor is M, and the shape of a single turn of the coil is an N-sided polygon;

[0008] Taking the center of the N-sided polygon containing the inner loop of the N-sided coil as the origin of the XY axis coordinate center, it is divided into N regions. The first region is set with a starting edge and an ending edge parallel to the X-axis or Y-axis. The other N-1 regions correspond to one edge of the N-sided polygon.

[0009] The difference between the distances between the starting edge and the ending edge and the distances relative to the origin is S. The spacing between the N+1 edges relative to the origin is expressed by the following expression:

[0010]

[0011] Where r1 is the inner diameter of the N-sided coil, which is also equal to the distance from the starting edge to the origin; i = 1, 2, 3...N+1; Step = S / N, where S is the sum of the line width and line spacing of the N-sided coil;

[0012] List the linear relationships corresponding to the regions where the N sides are located, solve for the coordinates of the intersection of two adjacent sides to obtain the coordinates of a vertex of the N-sided polygon, and obtain the coordinates of the other N-1 vertices in this way, and draw the single-turn coil of the spiral inductor.

[0013] Optionally, in the method for generating the pattern of the spiral inductor, the value of N includes 2n, where n is a natural number 3 or an even number greater than 3.

[0014] Optionally, in the method for generating the pattern of the spiral inductor, when the spiral inductor is an m-turn coil, the S of the m-th turn coil is the sum of the line width of the m-th turn coil and the turn pitch of the m-th turn coil and the (m-1)-th turn coil.

[0015] In the method for generating a spiral inductor pattern using semiconductor processes provided by this invention, the polygon's coordinates are obtained sequentially by first dividing the polygon into regions, then calculating the linear relationship between the corresponding edges of each region, and finally calculating the coordinates of the intersection points based on the two linear relationships between adjacent edges of adjacent regions. This method for generating a spiral inductor pattern using semiconductor processes can quickly and accurately draw polygonal spiral inductor layouts that meet semiconductor process requirements and parameters. Furthermore, this calculation method can be implemented using different computer languages ​​matched by current semiconductor layout drawing tools, reducing computational load and improving the efficiency and flexibility of drawing polygonal spiral inductors. Attached Figure Description

[0016] Figure 1 This is a flowchart of the method for generating the pattern of a spiral inductor fabricated using semiconductor technology according to the present invention;

[0017] Figure 2 This is a schematic diagram of the generation process of the spiral inductance of the octagonal coil of the present invention;

[0018] Figures 3 to 6 This is a schematic diagram of the quadrant function corresponding edge in the process of generating a spiral inductor using the Skill language on the Virtuoso platform in Embodiment 1 of the present invention;

[0019] Figure 7 This is a schematic diagram of a spiral inductor with two octagonal coils drawn using the Skill language on the Virtuoso platform according to Embodiment 1 of the present invention;

[0020] Figure 8 This is a schematic diagram of a spiral inductor with two octagonal coils drawn using the klayout platform based on the Python language in Embodiment 2 of the present invention;

[0021] Figure 9 This is a schematic diagram illustrating the drawing process of the helical inductance of the dodecagonal coil according to an embodiment of the present invention. Detailed Implementation

[0022] The specific embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0023] In the following text, the terms “first,” “second,” etc., are used to distinguish between similar elements and are not necessarily used to describe a specific order or chronological sequence. It should be understood that these terms, as used herein, may be replaced where appropriate. Similarly, if the methods described herein comprise a series of steps, and the order of these steps presented herein is not necessarily the only possible order in which they can be performed, and some described steps may be omitted and / or other steps not described herein may be added to the method.

[0024] Please refer to Figure 1 This invention provides a method for generating a graphic representation of a spiral inductor fabricated using semiconductor technology. The method employs computer code to perform the following calculations to draw the spiral inductor, including:

[0025] S1: Set the initial conditions for the spiral inductor. The number of turns of the spiral inductor is M, and the shape of a single turn is an N-sided polygon.

[0026] S2: Taking the center of the N-sided polygon containing the inner loop as the origin of the XY axis coordinate center, it is divided into N regions. The first region is set with a starting edge and an ending edge parallel to the X-axis or Y-axis. The other N-1 regions correspond to one edge of the N-sided polygon.

[0027] S3: The difference between the distances between the starting edge and the ending edge and their distances relative to the origin is S. The distance between the N+1 edges relative to the origin is expressed by the following expression:

[0028]

[0029] Where r1 is the inner diameter of the N-sided coil, which is also equal to the distance from the starting edge to the origin; i = 1, 2, 3…N+1; Step = S / N, where S is the sum of the line width and line spacing of the N-sided coil;

[0030] S4: List the linear relationships corresponding to the regions where the N sides are located, solve for the coordinates of the intersection of two adjacent sides as the coordinates of a vertex of the N-sided polygon, and obtain the coordinates of the other N-1 vertices in this way, and draw the single-turn coil of the spiral inductor.

[0031] Please refer to Figure 2First, set the initial conditions for the spiral inductor. The spiral inductor has M turns, and each turn has an N-sided shape. The value of N includes 2n, where n is 3 or an even number greater than 3. Figure 2 The diagram shown is an example of how to draw a single-turn coil of a spiral inductor when it is octagonal.

[0032] Combination Figure 2 To illustrate, the center of the octagon containing the inner coil is taken as the origin of the XY-axis coordinate system. The X and Y axes intersect perpendicularly at the origin, dividing the plane containing the coil into four quadrants. The relative positions of the X and Y axes to the origin are set according to conventional coordinate systems. The inner diameter of the inner coil of the octagon from the origin is r1. In this embodiment, the plane is divided into eight equal regions corresponding to the eight sides of the octagon, with each region having the same angle. The eight regions are named sequentially, clockwise or counterclockwise, as Region A, Region B, Region C, Region D, Region E, Region F, Region G, and Region H. Figure 2 In the example shown, the starting and ending edges of the first region of the octagon are parallel to the X-axis, and the other seven edges correspond to the other seven regions. In other embodiments, the starting and ending edges of the first region can also be parallel to the Y-axis. Setting the starting and ending edges of the first region in this way greatly simplifies the linear relationship expression of the edges of the octagonal coil relative to the X and Y axis coordinates. Of course, this can be extrapolated to other N-sided coils; setting the starting or ending edge of the first region parallel to the X or Y axis also simplifies the calculation of the linear relationship expression for the other N-1 sides.

[0033] like Figure 2 As shown, the starting point P0 and ending point P9 of the octagonal coil are located within the first region A and positioned between two adjacent vertices of the N-sided polygon. The first region A is divided into two parallel sides: the starting side (where P0 is located) and the ending side (where P9 is located). The difference between the distances between the starting and ending sides relative to the origin is S. The distance between two adjacent sides from the starting point P0 to the ending point P9, for example, the distance between the side of P2P3 and the side of P1P2 relative to the origin, is set to S / N. If the number of sides N of the planar polygonal spiral inductor is 8, then S / N is calculated as step = S / 8, where step is the sum of the line width and line spacing of the octagonal coil. The difference between the distances between the starting and ending sides relative to the origin is S. Based on the above calculation method, the distances between other sides relative to the origin are expressed as follows: ;in, Let r1 be the distance from the i-th side to the origin, and r1 be the inner diameter of the octagonal coil, which is also equal to the distance from the starting side to the origin. Let i = 1, 2, 3…9. Step = S / 8, where S is the sum of the line width and line spacing of the octagonal coil, and Step is called the step size. Similarly, this can be extended to N-sided coils. ;in, R1 is the distance from the i-th side to the origin, and r1 is the inner diameter of the N-sided coil, which is also equal to the distance from the starting side to the origin. i = 1, 2, 3...N+1; Step = S / N, where S is the sum of the line width and line spacing of the N-sided coil, and Step is the step between adjacent sides of the N-sided coil.

[0034] The following combination Figure 2 The illustrated embodiment further describes the linear relationship between the sides of the octagons corresponding to each region. The mathematical equations for the N sides of the first region A are as follows: The value of i is 1, 2, 3...9, y is the y-axis value of the i-th side, and x is the x-axis value of the i-th side. Let be the distance from the i-th edge to the origin. For example, when i is 1, , It is the inner diameter, which is the parameter set initially. Therefore, we can obtain the linear relationship of the starting edge P0P1 of the first region. When the value of i is 9, This allows us to obtain the linear relationship between the endpoint edges P8 and P9 within the first region. When i = , According to The linear relationship between the second edge P1P2 corresponding to the second region B is obtained by adding the step value. The value of i is 2. The linear relationship of the third edge P2P3 in the third region C is as follows: The value of i is 3. The linear relationship of the fourth edge P3P4 of the fourth region D is as follows: The value of i is 4. The linear relationship of the fifth edge P4P5 corresponding to the fifth region E is as follows: The value of i is 5. The linear relationship of the sixth edge P5P6 corresponding to the sixth region F is as follows: The value of i is 6. The linear relationship between the seventh edge P6P7 corresponding to the seventh region G is as follows: The value of i is 7. The linear relationship between the eighth edge P7P8 corresponding to the eighth region H is as follows: The value of i is 8.

[0035] in accordance with Figure 2The division method shown allows for a relatively simple and quick acquisition of the coordinates of the starting point P0, the ending point P9, and the ordinate of vertex P1. Based on the linear relationship between the starting edge P0P1 and the edge P1P2, the intersection point, i.e., the coordinates of vertex P1, is easily obtained. Similarly, by combining the linear relationships of two adjacent edges, the coordinates of the other seven vertices can be obtained. The coordinates of the intersection point are calculated based on the linear relationship between the i-th edge of the i-th region and the linear relationship between the i+1-th edge of the (i+1)-th region. For example, using... Figure 2 Taking the octagonal coil shown as an example, the linear relationship of the starting side of the first region is as follows: The linear relationship of the second side of the second region is: It can be based on the system of equations and The coordinates P1 of the intersection of the starting edge of the first region and the second edge of the second region are obtained. The coordinates of the other vertices of the octagonal coil are obtained in the same way, i.e., the coordinates of vertices P2 to P8 can be obtained. The starting point P0 is set at the intersection of the starting edge and the Y-axis, and the ending point P9 is set at the intersection of the ending edge and the Y-axis. The distance between the starting point P0 and the origin is the inner diameter R of the octagonal coil, which is also r1 here. The distance between the ending point P9 and the origin is the outer diameter R+S of the octagon.

[0036] Next, using the coordinates of all vertices as the vertices of the polygon, a single-turn coil of the spiral inductor is drawn based on these coordinates. For example... Figure 2 A single-turn octagonal coil of spiral inductance is obtained by rotating from the starting point P0 to the ending point P9. The above description using a single-turn octagonal coil illustrates that for a multi-turn spiral inductance, the number of turns of the spiral inductance is expanded outwards by repeating the drawing method of the single-turn octagonal coil.

[0037] The following combination Figure 2 The spiral inductance of the 2-turn octagonal coil shown is illustrated using layout drawing platforms and programming languages ​​commonly used in the semiconductor industry, providing an exemplary description of the drawing method described above. Example 1 uses the Virtuoso platform and the Skill language to draw the spiral inductance of the 2-turn octagonal coil. Example 2 uses the klayout platform and the Python language to draw the spiral inductance of the 2-turn octagonal coil.

[0038] Example 1, implemented using the Virtuoso platform based on the Skill language, follows as follows:

[0039] like Figure 3 The linear functions corresponding to the first quadrant are as follows:

[0040] procedure(fqt1(xr)

[0041] let((y)

[0042] y=-x+sqrt(2)*r ) )

[0045] The inverse function corresponding to the first quadrant is as follows:

[0046] procedure(rfqt1(yr))

[0047] let((x)

[0048] x = -y + sqrt(2) * r ) )

[0051] like Figure 4 The linear functions corresponding to the second quadrant are as follows:

[0052] procedure(fqt2(xr))

[0053] let((y)

[0054] y=x-sqrt(2)*r ) )

[0057] The inverse function corresponding to the second quadrant is as follows:

[0058] procedure(rfqt2(yr))

[0059] let((x)

[0060] x=y+sqrt(2)*r ) )

[0063] like Figure 5 The linear function corresponding to the third quadrant is as follows:

[0064] procedure(fqt3(xr))

[0065] let((y)

[0066] y=-x-sqrt(2)*r ) )

[0069] The inverse function corresponding to the third quadrant is as follows:

[0070] procedure(rfqt3(yr))

[0071] let((x)

[0072] x = -y - sqrt(2) * r ) )

[0075] like Figure 6 The linear function corresponding to the fourth quadrant is as follows:

[0076] procedure(fqt4(xr))

[0077] let((y)

[0078] y=x+sqrt(2)*r ) )

[0081] The inverse function corresponding to the fourth quadrant is as follows:

[0082] procudure(rfqt4(yr)

[0083] let((x)

[0084] x=y-sqrt(2)*r ) )

[0087] The other four edges are: y=r, x=r, y=-r, x=-r.

[0088] The program for calculating the functional relationship between X and Y for all sides is as follows. In this program, the value of i starts from 0 and goes up to 8, which is the same idea as the previous program where the value of i went up to 9. rad is the inner diameter; nt is the number of turns; pitch is the sum of the wire width and wire spacing of the coil (the difference between the inner diameter and the outer diameter); step is pitch / 8, and pt1 to Pt8 are the calculations of the functional relationship between X and Y for all sides.

[0089] pointList = list(list(0 rad))

[0090] for(z 0 nt)

[0091] radius = rad + z * pitch

[0092] r0=radius

[0093] r1 = r0 + step

[0094] r2=r1+step

[0095] r3 = r2 + step

[0096] r4 = r3 + step

[0097] r5 = r4 + step

[0098] r6 = r5 + step

[0099] r7 = r6 + step

[0100] r8 = r7 + step

[0101] pt1 = list(rfqt1(r0 r1) r0)

[0102] Pt2 = list(r2 fqt1(r2 r1))

[0103] Pt3 = list(r2 fqt2(r2 r3))

[0104] Pt4 = list(rfqt2(-r4 r3) –r4)

[0105] Pt5 = list(rfqt3(-r4 r5) –r4)

[0106] pt6 = list(-r6 fqt3(-r6 r5))

[0107] Pt7 = list(-r6 fqt4(-r6 r7))

[0108] Pt8 = list(rfqt4(r8 r7) r8)

[0109] pointList = append(pointList list(pt1 pt2 pt3 pt4 pt4 pt6 pt7 pt8))

[0110] With initial conditions set to width=8um, space=2um, rad=45um, and nt=2, the planar graph of the spiral inductor obtained through the Virtuoso platform using the Skill language is as follows: Figure 7 As shown.

[0111] Example 2, implemented using the klayout platform with Python, is as follows:

[0112] The linear functions corresponding to the first quadrant are as follows:

[0113] def fqt1(x,r)

[0114] y=-x+math.sqrt(2)*r

[0115] return y

[0116] The inverse function corresponding to the first quadrant is as follows:

[0117] def rfqt1(y,r)

[0118] x = -y + math.sqrt(2) * r

[0119] return x

[0120] The linear functions corresponding to the second quadrant are as follows:

[0121] def fqt2(x,r)

[0122] y=x-math.sqrt(2)*r

[0123] return y

[0124] The inverse function corresponding to the second quadrant is as follows:

[0125] def rfqt2(y,r)

[0126] x=y+math.sqrt(2)*r

[0127] return x

[0128] The linear functions corresponding to the third quadrant are as follows:

[0129] def fqt3(x,r)

[0130] y=-x-math.sqrt(2)*r

[0131] return y

[0132] The inverse function corresponding to the third quadrant is as follows:

[0133] def rfqt3(y,r)

[0134] x = -y - math.sqrt(2) * r

[0135] return x

[0136] The linear functions corresponding to the fourth quadrant are as follows:

[0137] def fqt4(xr)

[0138] y=x+math.sqrt(2)*r

[0139] return y

[0140] The inverse function corresponding to the fourth quadrant is as follows:

[0141] def rfqt4(yr)

[0142] x = y - math.sqrt(2) * r

[0143] return x

[0144] The program for calculating the functional relationship between X and Y for all sides is as follows. In this program, the value of i starts from 0 and goes up to 8, which is the same idea as the previous program where the value of i went up to 9. rad is the inner diameter; nt is the number of turns; pitch is the sum of the wire width and wire spacing of the coil (the difference between the inner diameter and the outer diameter); step is pitch / 8, and pt1 to Pt8 are the calculations of the functional relationship between X and Y for all sides.

[0145] pointList=[[0,rad]]

[0146] for i in range(nt):

[0147] radius = rad + i * pitch

[0148] r0=radius

[0149] r1 = r0 + step

[0150] r2=r1+step

[0151] r3 = r2 + step

[0152] r4 = r3 + step

[0153] r5 = r4 + step

[0154] r6 = r5 + step

[0155] r7 = r6 + step

[0156] r8 = r7 + step

[0157] pt1 = [rfqt1(r0,r1),r0]

[0158] Pt2 = [r2,fqt1(r2,r1)]

[0159] Pt3 = [r2,fqt2(r2,r3)]

[0160] Pt4 = [rfqt2(-r4,r3),–r4]

[0161] Pt5 = [rfqt3(-r4,r5),–r4]

[0162] pt6 = [-r6,fqt3(-r6,r5),

[0163] Pt7 = [-r6,fqt4(-r6,r7)]

[0164] Pt8 = [rfqt4(r8,r7),r8]

[0165] pointList+=[pt1,pt2,pt3,pt4,pt4,pt6,pt7,pt8]

[0166] pointList += [[0, rad + nt * pitch]]

[0167] With initial conditions of width (line width) = 8µm, space (line spacing) = 2µm, rad (inner diameter) = 45µm, and nt (number of turns) = 2, the planar graph of the spiral inductor obtained using the klayout platform based on the Python language is as follows. Figure 8 As shown.

[0168] The method for generating the graphic representation of a spiral inductor disclosed in this invention is also applicable to drawing the spiral inductance of a dodecagonal coil. For example... Figure 9 As shown, the dodecagonal single-turn coil is divided into 12 regions corresponding to the 12 sides, namely region A to region L. The S / N ratio is calculated as step = S / 12, where step is the sum of the line width and spacing of the dodecagonal coil. The difference between the distances of the starting and ending sides relative to the origin is S. The distances between the thirteen sides (the first side in the first region is divided into the starting and ending sides) relative to the origin are expressed as follows: ;in, Let r1 be the distance from the i-th side to the origin, and r1 be the inner diameter of the dodecagonal coil, which is also equal to the distance from the starting side to the origin. i = 1, 2, 3...13; Step = S / 12, where S is the sum of the line width and line spacing of the dodecagonal coil.

[0169] Next, we calculate the linear relationships for the N edges from the first region A to the twelfth region L. For example, the linear relationship for the starting edge P0P1 in the first region A is Y=r1, and the linear relationship for P1P2 is: The linear relationship between P2 and P3 is: The relation for P3P4 is X=r4, and the linear relation for P4P5 is... The linear relationship between P5 and P6 is: The linear relationship between P6 and P7 is Y=r7, and the linear relationship between P7 and P8 is... The linear relationship between P8 and P9 is: The linear relationship between P9 and P10 is X=r 10 The linear relationship between P10 and P11 is: The linear relationship between P11 and P12 is: The linear relationship between the endpoint edges P12 and P13 in the first region A is Y = r. 13 The distance between the starting and ending edges is S, where S is the sum of the coil spacing and line spacing in the metal layer where the single-turn coil is located. Vertex P1 can be obtained based on the intersection of the linear relationship between P0P1 and P1P2, and the coordinate positions of other vertices P2 to P12 can be obtained in the same way. As illustrated in the above example of drawing an octagonal coil, the dodecagon in this embodiment is also drawn using the computer language within the software platform described above. Figure 9 As shown, a single-turn coil of a spiral inductor is drawn from the starting point P0 to the ending point P13. In the embodiments mentioned above, the number of turns of the spiral inductor can be increased according to its design parameters. The additional turns can also be drawn in the same or similar way as the octagonal spiral inductor exemplified in the previous embodiments, so no further detailed examples will be given here.

[0170] In summary, in the method for generating a spiral inductor fabricated using semiconductor processes provided in this invention, by first dividing the area into regions, then calculating the linear relationship of the corresponding edge in each region, the coordinates of the start and end points can be easily and quickly obtained according to the calculation method in the above embodiments. Then, the coordinates of the intersection points are calculated based on the two linear relationships of adjacent edges in adjacent regions, thereby sequentially obtaining the coordinates of the other vertices of the polygon. The method for generating a spiral inductor fabricated using semiconductor processes provided by this invention can quickly and accurately draw a polygonal spiral inductor layout that meets the requirements and parameters of semiconductor processes. Furthermore, this calculation method can be implemented using different computer languages ​​matched by current semiconductor layout drawing tools, reducing the computational load and improving the drawing efficiency and flexibility of polygonal spiral inductors.

[0171] The methods for drawing the spiral inductors of the octagonal and dodecagonal coils described above can be extrapolated to the inductors of hexagonal or other symmetrical polygonal coils. When the number of sides of the polygon depends on the actual size of the coil, a large number of sides, especially when fabricating with metal layers or doped semiconductors in semiconductor processes, results in a coil that is nearly circular when the feature size of the actual semiconductor process platform is relatively large compared to the coil size. A large number of sides in the polygons will increase the computational load when drawing the spiral inductors in this application. Therefore, the choice between using polygons or circles can be made based on the actual fabrication effect.

[0172] The above are merely preferred embodiments of the present invention and do not constitute any limitation on the present invention. Any equivalent substitutions or modifications made by those skilled in the art to the technical solutions and content disclosed in the present invention without departing from the scope of the present invention shall be deemed to have remained within the protection scope of the present invention.

Claims

1. A method for generating a pattern of a spiral inductor fabricated using semiconductor technology, characterized in that, The spiral inductance is plotted by performing the following calculations using computer coding: The initial conditions of the spiral inductor are set as follows: the number of turns of the spiral inductor is M, and the shape of a single turn of the coil is an N-sided polygon; Taking the center of the N-sided polygon containing the inner loop of the N-sided coil as the origin of the XY axis coordinate center, it is divided into N regions. The first region is set with a starting edge and an ending edge that are both parallel to the X-axis or both parallel to the Y-axis. The other N-1 regions correspond to one edge of the N-sided polygon. The difference between the distances between the starting edge and the ending edge and the distances relative to the origin is S. The spacing between the N+1 edges relative to the origin is expressed by the following expression: Where r1 is the inner diameter of the N-sided coil, which is also equal to the distance between the starting edge and the origin; i represents the i-th side of the N-sided coil, i=1, 2, 3…N+1; Step=S / N, where S is the sum of the line width and line spacing of the N-sided coil; Let be the distance from the i-th edge to the origin; List the linear relationships corresponding to the regions where the N sides are located, solve for the coordinates of the intersection of two adjacent sides to obtain the coordinates of a vertex of the N-sided polygon, and obtain the coordinates of the other N-1 vertices in this way, and draw the single-turn coil of the spiral inductor.

2. The method for generating the pattern of a spiral inductor as described in claim 1, characterized in that, The value of N includes 2n, where n is a natural number 3 or an even number greater than 3.

3. The method for generating the pattern of a spiral inductor as described in claim 1, characterized in that, When the spiral inductor is an m-turn coil, the S of the m-th turn is the sum of the linewidth of the m-th turn and the turn pitch of the m-th and (m-1)-th turns.

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