Silicon boat groove rod processing device and silicon boat

Abstract

The invention relates to the field of semiconductor manufacturing, and discloses a processing device of a silicon boat groove rod, a joint of a groove tooth and a support rod is provided with a to-be-processed part, the processing device of the silicon boat groove rod comprises a support member, the silicon boat groove rod is placed on a first surface of the support member along a third direction, and the to-be-processed part is ensured to be horizontally arranged along the first direction; the limiting piece is arranged on one side, in the first direction, of the supporting piece, and the silicon boat trench rod abuts against the limiting piece so that the silicon boat trench rod can be limited in the first direction; the number of the clamping pieces is two, the two clamping pieces are arranged on the supporting piece in a spaced mode in the second direction, a clamping space is formed between the two clamping pieces, the silicon boat trench rod is located in the clamping space, and the clamping pieces fix the silicon boat trench rod in the second direction; the machining tool is located at the top, in the third direction, of the silicon boat groove rod, and the machining tool is used for machining the chamfer of the part to be machined. The invention provides the silicon boat groove rod processing device for chamfering a part to be processed and the silicon boat.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a processing device for a silicon boat groove rod and a silicon boat. BACKGROUND

[0002] The silicon boat is a core bearing tool in semiconductor manufacturing, mainly used for accurately and cleanly bearing and positioning silicon wafers in high-temperature processes (such as diffusion, oxidation, vapor deposition, etc.), preventing the silicon wafers from being contaminated, damaged or positionally deviated during the processing, and ensuring process uniformity and silicon wafer quality.

[0003] The silicon boat is composed of a top plate, a flange and a silicon boat groove rod, and the silicon boat groove rod is an important component of the silicon boat. The edges of the teeth on the silicon boat groove rod are usually sharp, which can easily damage the silicon wafers during transmission, causing scratches on the surface of the silicon wafers and affecting the yield. Therefore, in the prior art, the edges of the teeth are usually chamfered to avoid scratches on the surface of the silicon wafers. However, the existing chamfering device can cause overcutting when chamfering the bottom of the teeth, further causing the problem of sharpness of the bottom of the teeth. SUMMARY

[0004] The present application mainly solves the technical problem of overcutting when the chamfering device in the prior art chamfers the bottom of the teeth. A processing device for a silicon boat groove rod and a silicon boat are provided.

[0005] To solve the above technical problems, the present application provides a processing device for a silicon boat groove rod, the silicon boat groove rod being composed of a tooth and a support rod, and the connection between the tooth and the support rod having a part to be processed, wherein the processing device for the silicon boat groove rod comprises, a support member, the silicon boat groove rod being placed on a first surface of the support member in a third direction, and the part to be processed being horizontally arranged in a first direction; a limiting member, the limiting member being arranged on one side of the support member in the first direction, and the silicon boat groove rod abutting against the limiting member to form a limit in the first direction of the silicon boat groove rod; two clamping members, the two clamping members being arranged on the support member in a second direction and spaced apart, the two clamping members having a clamping space therebetween, and the silicon boat groove rod being located in the clamping space, the clamping members fixing the silicon boat groove rod in the second direction; a processing tool, the processing tool being located at the top of the silicon boat groove rod in the third direction, and the processing tool being used for chamfering the part to be processed.

[0006] In an implementation, the limiting member has a second surface near one side of the support member, and the first surface and the second surface are connected to form an L-shaped structure.

[0007] In an implementation, the silicon boat trench rod further comprises two connecting sections, the two connecting sections are located on two sides of the support rod along the second direction, the two connecting sections are connected with the support rod, the two connecting sections have a third surface at the bottom along the third direction, the third surface is formed by the first connecting surface and the second connecting surface, and the first connecting surface and the second connecting surface have a first included angle therebetween.

[0008] In an implementation, the first surface comprises a first support surface and a second support surface arranged in sequence along the first direction, the first support surface and the second support surface are connected, the first support surface and the second support surface have a second included angle therebetween, the first support surface is used for supporting the first connecting surface, the second support surface is used for supporting the second connecting surface, and the first included angle is equal to the second included angle.

[0009] In an implementation, the machining tool is arranged perpendicularly to the first support surface.

[0010] In an implementation, the machining tool is installed on a machining center.

[0011] In an implementation, the machining device of the silicon boat trench rod further comprises, a fixing member arranged at the bottom of the support member along the third direction, and used for fixing the support member and the limiting member.

[0012] In an implementation, the clamping member comprises, an abutting plate arranged at one side of the silicon boat trench rod along the second direction; a driving structure used for driving the abutting plate to move along the second direction and achieving clamping or loosening of the silicon boat trench rod.

[0013] In an implementation, the driving structure comprises, a driving rod arranged along the second direction; a fixing plate connected with the support member and / or the limiting member, and the driving rod is rotationally connected with the fixing plate to achieve movement of the driving rod along the second direction.

[0014] Another aspect of the present application provides a silicon boat, wherein the silicon boat comprises, a top plate and a flange; a silicon boat trench rod, the top plate and the flange are located on two sides of the silicon boat trench rod along the second direction, the top plate and the flange are connected with the silicon boat trench rod, and the silicon boat trench rod is supported by the machining device of the silicon boat trench rod according to any one of the embodiments 1.

[0015] The support in the processing device of the silicon boat groove rod of the application supports the silicon boat groove rod and ensures that the processing part is horizontally arranged along the first direction, the limiting part limits the silicon boat groove rod along the first direction, the clamping part fixes the silicon boat groove rod along the second direction, and the processing cutter is located at the top of the silicon boat groove rod along the third direction, and the processing cutter is used to process the chamfer of the to-be-processed part, and ensures that the chamfer of the to-be-processed part does not have a sharp problem. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure Figure 1 is a structural schematic diagram of a silicon boat groove rod in the prior art; Figure Figure 2 is a structural schematic diagram of a silicon boat groove rod in the prior art in a processing state; Figure Figure 3 is a structural schematic diagram of a processing device of a silicon boat groove rod; Figure Figure 4 is another structural schematic diagram of a processing device of a silicon boat groove rod.

[0017] Explanation of figure marks: X, first direction; Y, second direction; Z, third direction; 10, silicon boat groove rod; 11, groove tooth; 12, support rod; 13, to-be-processed part; 14, connecting section; 15, third surface; 15-1, first connecting surface; 15-2, second connecting surface; 20, processing device of silicon boat groove rod; 100, support; 110, first surface; 111, first support surface; 112, second support surface; 200, limiting part; 210, second surface; 300, clamping part; 310, clamping space; 320, abutting plate; 330, driving structure; 331, driving rod; 332, fixed plate; 400, processing cutter; 500, fixed part; 30, jig. DETAILED DESCRIPTION

[0018] In order to make the purposes, features and advantages of the application more obvious and easy to understand, the technical solutions in the embodiments of the application will be described clearly and completely below in conjunction with the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the application.

[0019] The chamfering device in the prior art has the technical problem of overcutting when chamfering the bottom of the groove tooth.

[0020] Therefore, this application provides a processing apparatus for silicon boat groove rods, wherein the silicon boat groove rod is composed of groove teeth and a support rod, and the connection between the groove teeth and the support rod has a part to be processed. The processing apparatus for the silicon boat groove rod includes... The support member, the silicon boat groove bar is placed on the first surface of the support member along the third direction, and the part to be processed is set horizontally along the first direction; A limiting member is provided on one side of the support member along the first direction, and the silicon boat groove rod abuts against the limiting member to limit the silicon boat groove rod along the first direction; The clamping member has two clamping members, which are spaced apart on the support member along a second direction and have a clamping space between them. The silicon boat groove rod is located in the clamping space, and the clamping members fix the silicon boat groove rod along the second direction. A machining tool is located at the top of the silicon boat groove bar along a third direction, and the machining tool is used to machine the chamfer of the part to be machined.

[0021] This application also provides a silicon boat, wherein the silicon boat comprises, Top plate, flange; The silicon boat groove bar has a top plate and a flange located on both sides of the silicon boat groove bar along a second direction. The top plate and the flange are connected to the silicon boat groove bar. The silicon boat groove bar is supported by the processing device for silicon boat groove bars described in any of the embodiments in 1.

[0022] In existing technologies, silicon boats are the core support tools in semiconductor manufacturing. They are mainly used to accurately and cleanly support and position silicon wafers in high-temperature processes (such as diffusion, oxidation, and vapor deposition) to prevent the silicon wafers from being contaminated, damaged, or misaligned during processing, thus ensuring process uniformity and silicon wafer quality.

[0023] The silicon boat consists of a top plate, flanges, and a silicon boat groove bar. The top plate and flanges are located on both sides of the silicon boat groove bar along the second direction and are connected to the silicon boat groove bar. The silicon boat groove bar is an important component of the silicon boat and is used to support the silicon wafers. (See attached image) Figure 1 This is a schematic diagram of a silicon boat trench rod 10 in the prior art. Please refer to the attached diagram. Figure 1As shown, the silicon boat groove rod 10 of this embodiment is manufactured from a silicon rod through processes such as cutting and grinding. The silicon boat groove rod 10 of this embodiment consists of groove teeth 11, support rods 12, and connecting sections 14. The support rods 12 are arranged along the second direction Y and are used to connect the groove teeth 11 and the connecting sections 14. Several groove teeth 11 are arranged at intervals along the second direction Y. The groove teeth 11 extend along the first direction X. The first end of the groove teeth 11 along the first direction X is connected to the support rod 12. The second end of the groove teeth 11 along the first direction X is located away from the support rod 12. The connection between the groove teeth 11 and the support rod 12 has a processing part 13. The connecting section 14 has two sections. The connecting section 14 is used to connect the silicon boat groove rod 10 with the top plate and flange. The two connecting sections 14 are located on both sides of the support rod 12 along the second direction Y. The two connecting sections 14 are connected to the support rod 12. There are grooves between the connecting section 14 and the groove teeth 11 and between the two groove teeth 11. The silicon wafer is stored in the grooves. The part to be processed 13 is set close to the grooves.

[0024] Furthermore, the bottom of the two connecting segments 14 along the third direction Z has a third surface 15, which is also the bottom surface of the silicon boat groove rod 10 along the third direction Z. That is, during the placement of the silicon boat groove rod 10 along the third direction Z, the third surface 15 is the first to come into contact with other components. The third surface 15 is formed by a first connecting surface 15-1 and a second connecting surface 15-2. The first connecting surface 15-1 and the second connecting surface 15-2 are connected, and there is a distinct fold line at the connection between the first connecting surface 15-1 and the second connecting surface 15-2. There is a first included angle between the first connecting surface 15-1 and the second connecting surface 15-2.

[0025] In the accompanying drawings of this application, the silicon boat groove rod 10 is shown in partial structural diagrams to more clearly illustrate the specific structure of the silicon boat groove rod 10.

[0026] Appendix Figure 2 This is a schematic diagram of a silicon boat groove rod 10 in its processed state according to existing technology. Please refer to the attached diagram. Figure 2 As shown, the specific processing procedure for the grooves and chamfers of the silicon boat groove bar 10 in the prior art is as follows: the silicon boat groove bar 10 is mounted on the jig 30 and kept along the first direction X. The jig 30 is mounted on a grooving device, and the grooving and chamfering of the silicon boat groove bar 10 are achieved by using different cutting tools. After chamfering the silicon boat groove bar 10, the sharp edges of the groove teeth 11 can be eliminated, thereby avoiding damage to the silicon wafer surface during silicon wafer transport. However, in the process of chamfering the silicon boat groove bar 10 using the existing cutting equipment, since the grooving equipment can only chamfer it with a circular cutting blade, and the smallest diameter of the circular cutting blade that can be installed is 65mm, the existing grooving equipment is prone to overcutting during the chamfering of the part to be processed 13. After overcutting, the part to be processed of the silicon boat groove bar 10 is prone to becoming even sharper.

[0027] Example 1: Appendix Figure 3 This is a schematic diagram of a processing device for silicon boat groove rod 10, with attached... Figure 4 This is another schematic diagram of the processing device for the silicon boat groove rod 10. Please refer to the attached diagram. Figure 3 and appendix Figure 4 As shown, the first direction X in this embodiment refers to the width direction of the processing device for the silicon boat groove rod 10, that is, the direction from left to right or from right to left of the processing device for the silicon boat groove rod 10. In this embodiment, the support member 100 is disposed to the right of the limiting member 200, and the limiting member 200 is disposed to the left of the support member 100. The second direction Y in this embodiment refers to the length direction of the processing device for the silicon boat groove rod 10, that is, the direction from front to back or from back to front of the processing device for the silicon boat groove rod 10. In this embodiment, the clamping member 300 is disposed forward of the silicon boat groove rod 10, and the silicon boat groove rod 10 is disposed backward of the clamping member 300. In this embodiment, the third direction Z is the height direction of the processing device for the silicon boat groove rod 10, that is, the direction from top to bottom or from bottom to top of the processing device for the silicon boat groove rod 10. In this embodiment, the processing tool 400 is arranged higher than the support member 100, and the support member 100 is arranged lower than the processing tool 400.

[0028] Please refer to the attached document. Figure 3 and appendix Figure 4 As shown, the processing apparatus for the silicon boat groove rod 10 in this embodiment is used to chamfer the portion 13 to be processed in the silicon boat groove rod 10. The processing apparatus for the silicon boat groove rod 10 includes a support member 100, which has a first surface 110 on its upper side along the third direction Z. The silicon boat groove rod 10 is placed on the first surface 110 to receive the silicon boat groove rod 10 and ensure that the portion 13 to be processed is horizontally positioned along the first direction X, thereby ensuring that the portion 13 to be processed is completely exposed under the processing tool 400.

[0029] In one embodiment, the first surface 110 includes a first support surface 111 and a second support surface 112. The first support surface 111 and the second support surface 112 are continuously arranged surfaces, connected to each other, and have a second included angle. The first support surface 111 supports the first connecting surface 15-1, and the second support surface 112 supports the second connecting surface 15-2. The first included angle and the second included angle are equal. Therefore, after the silicon boat groove rod 10 is placed on the support member 100, the first included angle and the second included angle coincide, and the first connecting surface 15-1 is completely located on the first support surface 111, and the second connecting surface 15-2 is completely located on the second support surface 112. Furthermore, the machining tool 400 is vertically positioned with the first support surface 111, and during machining, the first connecting surface 15-1 of the silicon boat groove rod 10 along the third direction Z is perpendicular to the machining tool 400, so as to further improve the quality of the chamfer of the part to be machined 13, and ensure that the chamfer is evenly distributed vertically during the process of making arc chamfer or 45° chamfer.

[0030] Please refer to the attached document. Figure 3 and appendix Figure 4 As shown, the processing apparatus for the silicon boat groove rod 10 in this embodiment further includes a limiting member 200. The limiting member 200 is disposed on one side of the support member 100 along the first direction X. The silicon boat groove rod 10 abuts against the limiting member 200 to form a limiting of the silicon boat groove rod 10 along the first direction X.

[0031] In one embodiment, the limiting member 200 has a second surface 210 on the side near the support member 100, and the first surface 110 is connected to the second surface 210 to form an L-shaped structure.

[0032] Please refer to the attached document. Figure 3 and appendix Figure 4 As shown, the processing apparatus for the silicon boat groove rod 10 in this embodiment further includes a clamping member 300, which is used to clamp and fix the silicon boat groove rod 10 in the second direction Y. Two clamping members 300 are provided, and the two clamping members 300 are spaced apart on the support member 100 along the second direction Y, with a clamping space 310 between the two clamping members 300, and the silicon boat groove rod 10 is located in the clamping space 310.

[0033] In one embodiment, the clamping member 300 includes an abutment plate 320 and a driving structure 330. The abutment plate 320 is disposed on one side of the silicon boat groove rod 10 along the second direction Y. The driving structure 330 is used to drive the abutment plate 320 to move along the second direction Y, thereby clamping or releasing the silicon boat groove rod. The abutment plate 320 is provided to avoid direct contact between the driving structure 330 and the silicon boat groove rod 10, thus preventing scratches from forming on the silicon boat groove rod 10.

[0034] Furthermore, the drive structure 330 includes a drive rod 331 and a fixing plate 332. The drive rod 331 is arranged along the second direction Y, and the fixing plate 332 is connected to the support member 100 and / or the limiting member 200. The drive rod 331 is rotatably connected to the fixing plate 332 to realize the movement of the drive rod 331 along the second direction Y. When clamping the silicon boat groove rod 10, the drive rod 331 rotates and moves towards the abutment plate 320. After contacting the abutment plate 320, it drives the abutment plate 320 to move towards the silicon boat groove rod 10, and finally locks the silicon boat groove rod 10. When releasing the silicon boat groove rod 10, the drive rod 331 rotates and moves towards the abutment plate 320 until the abutment plate 320 loosens, thereby realizing the mobility of the silicon boat groove rod 10 within the clamping space 310.

[0035] Please refer to the attached document. Figure 3 and appendix Figure 4 As shown, the processing device for the silicon boat groove rod 10 in this embodiment also includes a processing tool 400. The processing tool 400 is located at the top of the silicon boat groove rod 10 along the third direction Z. The processing tool 400 is used to process the chamfer of the part to be processed 13. The processing tool 400 is a 45° chamfering tool or a rounded chamfering tool. The processing tool 400 is mounted on a processing center.

[0036] Please refer to the attached document. Figure 3 and appendix Figure 4 As shown, the processing device for the silicon boat groove rod 10 in this embodiment also includes a fixing member 500. The fixing member 500 is disposed at the bottom of the support member 100 along the third direction Z. The processing device for the silicon boat groove rod 10 is connected to the processing center through the fixing member 500 to fix the support member 100 and the limiting member 200.

[0037] Implementation 2: This embodiment discloses a silicon boat, wherein the silicon boat includes a top plate, a flange and a silicon boat groove bar 10. The top plate and the flange are located on both sides of the silicon boat groove bar 10 along the second direction Y. The top plate and the flange are connected to the silicon boat groove bar 10. The silicon boat groove bar 10 is supported by the processing device of the silicon boat groove bar 10 of Embodiment 1.

[0038] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of those different embodiments or examples.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0040] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A processing device for a silicon boat trench rod, the silicon boat trench rod being composed of a trench tooth and a support rod, a connecting portion of the trench tooth and the support rod having a part to be processed, characterized in that, The processing device of the silicon boat groove rod comprises, a support, the silicon boat groove rod is placed on a first surface of the support along a third direction, and the to-be-processed part is horizontally arranged along a first direction; a limiting piece, the limiting piece is arranged on one side of the support along the first direction, and the silicon boat groove rod abuts against the limiting piece to limit the silicon boat groove rod along the first direction; two clamping pieces, the two clamping pieces are arranged on the support along a second direction, the clamping space is between the two clamping pieces, the silicon boat groove rod is located in the clamping space, and the clamping pieces fix the silicon boat groove rod along the second direction; a processing tool, the processing tool is located at the top of the silicon boat groove rod along the third direction, and the processing tool is used for processing the chamfer of the to-be-processed part.

2. The apparatus for processing a silicon boat trench bar according to claim 1, wherein, The limiting piece is close to one side of the support and has a second surface, the first surface is connected with the second surface to form an L-shaped structure.

3. The apparatus for processing a silicon boat trench bar according to claim 2, wherein, The silicon boat groove rod further comprises two connecting sections, the two connecting sections are located on both sides of the support rod along the second direction, the two connecting sections are connected with the support rod, the bottom of the two connecting sections along the third direction has a third surface, the third surface is formed by a first connecting surface and a second connecting surface, and the first connecting surface and the second connecting surface have a first included angle therebetween.

4. The apparatus for processing a silicon boat trench bar according to claim 3, wherein, The first surface comprises a first support surface and a second support surface arranged in sequence along the first direction, the first support surface is connected with the second support surface, the first support surface and the second support surface have a second included angle therebetween, the first support surface is used for supporting the first connecting surface, the second support surface is used for supporting the second connecting surface, and the first included angle is equal to the second included angle.

5. The apparatus for processing a silicon boat trench bar according to claim 4, wherein, The processing tool is arranged perpendicularly to the first support surface.

6. The apparatus for processing a silicon boat trench bar according to claim 1, wherein, The processing tool is installed on a machining center.

7. The apparatus for processing a silicon boat trench bar according to claim 1, wherein The processing device of the silicon boat groove rod further comprises, a fixing piece, the fixing piece is arranged at the bottom of the support along the third direction, and the fixing piece is used for fixing the support and the limiting piece.

8. The apparatus for processing a silicon boat trench bar according to claim 1, wherein, The clamping piece comprises, an abutting plate, the abutting plate is arranged on one side of the silicon boat groove rod along the second direction; a driving structure, the driving structure is used for driving the abutting plate to move along the second direction and achieving clamping or loosening of the silicon boat groove rod.

9. The apparatus for processing a silicon boat trench bar according to claim 8, wherein, The driving structure comprises, a driving rod, the driving rod is arranged along the second direction; a fixed plate, the fixed plate is connected with the support and / or the limiting piece, and the driving rod is rotationally connected with the fixed plate to realize movement of the driving rod along the second direction.

10. A silicon boat characterized by, The silicon boat comprises, a ceiling plate and a flange; a silicon boat groove rod, the ceiling plate and the flange are located on both sides of the silicon boat groove rod along the second direction, the ceiling plate and the flange are connected with the silicon boat groove rod, and the silicon boat groove rod is supported by the processing device of the silicon boat groove rod according to any one of claims 1 to 9.

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