Integrated grabbing mechanism for multi-specification crystal ingots

Abstract

The invention relates to the technical field of semiconductors, in particular to a multi-specification crystal ingot integrated grabbing mechanism. The mechanism mainly comprises a mechanism body with an adsorption-clamping cooperative grabbing function and a control system with an adsorption-clamping cooperative control function. The quantitative matching rule of the crystal ingot size and the suction cup space distribution is established, the minimum critical adsorption force dynamic expansion algorithm is combined, it is ensured that the started suction cup set can be completely covered by the crystal ingot to achieve effective adsorption, the minimum total adsorption force needed by grabbing stability can be met, and finally the purpose that the grabbing reliability is guaranteed, and meanwhile the grabbing efficiency is improved is achieved. Energy consumption of a vacuum system is obviously reduced, and mechanical stress concentration of the crystal ingot is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and in particular to a multi-specification crystal ingot integrated grabbing mechanism. BACKGROUND

[0002] Although the existing crystal ingot grabbing mechanism adopts a multi-suction cup and clamping cooperative design, there are obvious defects in the suction cup opening and closing control. The existing technical solution usually sets the suction cup opening and closing combination corresponding to different crystal ingot specifications according to experience, lacks quantitative analysis of the coupling relationship between the suction cup spatial distribution and the suction force, and leads to rough opening and closing strategy. For example, when grabbing a small size crystal ingot (such as 8 inches), if only the inner ring suction cup is enabled, the local vacuum leakage may be caused due to the too close distance between the suction cup and the edge of the crystal ingot, resulting in insufficient effective suction area. However, enabling too many suction cups will lead to redundant suction area, increase the energy consumption of the vacuum system, and may cause local stress concentration of the crystal ingot. The core of this problem lies in the lack of adaptive opening and closing strategy based on the crystal ingot size and the suction cup spatial distribution, and it is difficult to achieve optimal segmentation of the suction area and energy-saving stable grabbing. SUMMARY

[0003] The purpose of the present application is to solve the problem of inaccurate matching of suction cup opening and closing combination and crystal ingot size in the prior art, and to provide a multi-specification crystal ingot integrated grabbing mechanism.

[0004] The present application provides a multi-specification crystal ingot integrated grabbing mechanism, which comprises: a mechanism body with suction-clamping cooperative grabbing function, a plurality of suction cups are arranged on the mechanism body, the radial position of each suction cup is pre-marked, and the radius value of each suction cup from the center of the mechanism body is recorded; a control system with suction-clamping cooperative control function, which is used to generate optimal suction cup opening and closing instructions through a suction cup opening and closing dynamic expansion algorithm based on minimum critical suction force and a crystal ingot specification-suction cup opening and closing-suction force mapping relationship, and after completing the suction cup opening and closing configuration, enter the critical suction verification process to judge whether each enabled suction cup reaches the threshold negative pressure within a first preset time, if yes, control the mechanism body to perform the suction-clamping cooperative grabbing operation of the crystal ingot, if no, judge that the corresponding suction cup does not meet the standard, and trigger a local compensation mechanism to continuously judge whether the suction cup compensated by the local compensation mechanism reaches the threshold negative pressure within a second preset time, if no, determine that the suction cup is invalid, and recheck the total suction force and simultaneously enhance the clamping force.

[0005] Optionally, the plurality of suction cups are arranged in a concentric circular array, including inner ring suction cups and outer ring suction cups, the number of the inner ring suction cups and the outer ring suction cups is equal, and the adjacent suction cups are distributed at equal angles.

[0006] Optionally, the radial position calibration of each suction cup includes: measuring the actual radius value from the center of each suction cup to the center of the mechanism body through a laser calibration system, and storing the calibration data in the database of the control system, with the positioning error controlled within ±0.5mm.

[0007] Optionally, the suction cup opening and closing dynamic expansion algorithm based on minimum critical adsorption force includes: calculating the effective coverage radius based on the ingot diameter and safety margin; selecting suction cups whose center-to-center radius is less than or equal to the effective coverage radius to generate an initial effective suction cup set; calculating the theoretical minimum adsorption force based on the calibrated unit adsorption force and the initial number of effective suction cups; if the theoretical minimum adsorption force is lower than the minimum value required by the safety factor, then expanding and enabling adjacent outer ring suction cups according to distance priority, expanding one adjacent outer ring suction cup at a time until the force balance condition is met; if the theoretical minimum adsorption force exceeds the maximum value required by the safety factor, then triggering the adsorption force margin feedback mechanism, and based on the stress distribution uniformity optimization target, closing the suction cup with the smallest adsorption force contribution until the theoretical minimum adsorption force meets the safety factor requirement.

[0008] Optionally, the constructed ingot specification-suction cup opening / closing-adsorption force mapping relationship includes a pre-stored multi-specification ingot opening / closing configuration lookup table. The multi-specification ingot opening / closing configuration lookup table contains the correspondence between ingot size, effective suction cup quantity, adsorption force redundancy threshold and clamping force adjustment parameters, and dynamically updates the safety margin and unit adsorption force parameters through a machine learning model.

[0009] Optionally, the critical adsorption verification process includes: real-time monitoring of the negative pressure change curve of each activated suction cup using an independently set absolute pressure sensor, wherein the threshold negative pressure is dynamically set based on the ingot weight and adsorption contact area.

[0010] Optionally, the local compensation mechanism includes: implementing pulse-type opening and closing adjustment of the solenoid valve in the branch where the non-compliant suction cup is located, and simultaneously increasing the vacuum pump power of the corresponding branch.

[0011] Optionally, the re-verification of total adsorption force includes: after removing the failed adsorption cups from the current set of effective adsorption cups, recalculating the theoretical minimum adsorption force of the remaining adsorption cups; if the theoretical minimum adsorption force is lower than the minimum value required by the safety factor, then activating the backup outer ring adsorption cups and simultaneously increasing the clamping force.

[0012] Optionally, the enhanced clamping force includes: calculating a clamping force compensation coefficient based on the ingot diameter and the adsorption failure ratio, increasing the basic clamping force to 1.2 to 1.5 times the original value, and controlling the closing pressure of the clamping claws through a servo pneumatic proportional valve.

[0013] Optionally, the execution timing of the adsorption-clamping coordinated grasping of the crystal ingot includes: after the suction cup reaches a stable negative pressure, a third preset time is delayed to trigger the clamping claw to close, and the initial value of the clamping force is dynamically set according to the circumference of the crystal ingot and the safe pressure range of the contact surface.

[0014] The advantages and beneficial effects of the present invention are as follows: The multi-specification crystal ingot integrated gripping mechanism provided by the present invention establishes a quantitative matching rule between the crystal ingot size and the spatial distribution of the suction cups, and combines a minimum critical adsorption force dynamic expansion algorithm to ensure that the activated suction cup group can be completely covered by the crystal ingot to achieve effective adsorption, and can also meet the minimum total adsorption force required for gripping stability. Ultimately, it can significantly reduce the energy consumption of the vacuum system and avoid the concentration of mechanical stress on the crystal ingot while ensuring gripping reliability. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the main body of the invention.

[0016] The components include an inner ring suction cup 1, an outer ring suction cup 2, a crystal ingot 3, a first driving device 4, a second driving device 5, and a clamping claw 6. Detailed Implementation

[0017] The embodiments of this application will now be described in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, the following embodiments and features can be combined with each other unless otherwise specified. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0018] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0019] This application provides a multi-specification ingot integrated gripping mechanism, which mainly includes a mechanism body with adsorption-clamping collaborative gripping function and a control system with adsorption-clamping collaborative control function.

[0020] In some optional implementations of this application, the mechanism body is provided with multiple suction cups, the radial position of each suction cup is pre-calibrated, and the radius value of each suction cup from the center of the mechanism body is recorded.

[0021] In some optional implementations of this application, a plurality of suction cups are arranged in a concentric circular array, including an inner ring suction cup 1 and an outer ring suction cup 2, wherein the number of inner ring suction cups 1 and outer ring suction cups 2 are equal and adjacent suction cups are distributed at equal angles.

[0022] In some optional implementations of this application, the radial position calibration of each suction cup includes: measuring the actual radius value from the center of each suction cup to the center of the mechanism body through a laser calibration system, and storing the calibration data in the database of the control system, with the positioning error controlled within ±0.5mm.

[0023] In some optional implementations of this application, the suction cup spatial layout modeling and geometric coverage analysis process involves the following specific implementation process: For example, 16 suction cups are arranged in a double-layer concentric circular array on the mechanism body (i.e., positioned above the upper surface of the crystal ingot 3 for adsorption gripping of the upper surface of the crystal ingot 3). The inner 8 suction cups are distributed on a circle with a radius of 75mm, and the outer 8 suction cups are distributed on a circle with a radius of 115mm. The included angle between adjacent suction cups is 45°. The center coordinates of each suction cup are calibrated with high precision and stored in the control system database. Based on the input diameter D of the crystal ingot 3, combined with the installation positioning error... The effective coverage radius is calculated based on the influence of (±0.5mm) and mechanical tolerances, using the following formula: ,in, To achieve effective coverage radius, For safety margin, a value of 0.8mm is used to ensure that the center of the chuck is located within the projected area of ​​the upper surface of ingot 3, thus being considered a valid adsorption point. An initial set of valid chucks is generated by iterating through all chucks using polar coordinate criteria. To avoid ineffective vacuuming, chucks located outside the edge of ingot 3 are excluded. The polar coordinate criterion rule is as follows: , This refers to the extreme diameter of the suction cup. It should be noted that the extreme diameter of the suction cup involved in this application... This indicates the radius of the suction cup.

[0024] In some optional implementations of this application, a control system with adsorption-clamping collaborative control function is used to generate optimal suction cup opening and closing instructions by using a suction cup opening and closing dynamic expansion algorithm based on minimum critical adsorption force and a constructed mapping relationship between crystal ingot 3 specifications, suction cup opening and closing, and adsorption force. After completing the suction cup opening and closing configuration, it enters the critical adsorption verification process to determine whether each activated suction cup reaches the threshold negative pressure within a first preset time. If so, the control mechanism body performs adsorption-clamping collaborative grasping operation of crystal ingot 3. If not, it is determined that the corresponding suction cup has not met the standard, and a local compensation mechanism is triggered. It continuously determines whether the suction cup after compensation by the local compensation mechanism reaches the threshold negative pressure within a second preset time. If not, it is determined that the suction cup has failed, the total adsorption force is rechecked, and the clamping force is increased synchronously.

[0025] In some optional implementations of this application, the suction cup opening and closing dynamic expansion algorithm based on minimum critical adsorption force includes: calculating the effective coverage radius based on the diameter of the ingot 3 and the safety margin; selecting suction cups whose center-to-center radius is less than or equal to the effective coverage radius to generate an initial set of effective suction cups; calculating the theoretical minimum adsorption force based on the calibrated unit adsorption force and the initial number of effective suction cups; if the theoretical minimum adsorption force is lower than the minimum value required by the safety factor, then expanding and enabling adjacent outer ring suction cups 2 according to distance priority, expanding one adjacent outer ring suction cup 2 at a time until the force balance condition is met; if the theoretical minimum adsorption force exceeds the maximum value required by the safety factor, then triggering the adsorption force margin feedback mechanism, and based on the stress distribution uniformity optimization target, closing the suction cup with the smallest adsorption force contribution until the theoretical minimum adsorption force meets the safety factor requirement.

[0026] In some optional implementations of this application, the suction cup opening and closing dynamic expansion algorithm based on minimum critical adsorption force specifically includes: determining... Then, call the calibrated unit adsorption force, such as the unit adsorption force. Given a suction cup capacity of 85 N / cup (measured average under vacuum conditions of -80 kPa), calculate the number of currently available suction cups. The corresponding theoretical minimum adsorption force is given by the following formula: ,in, This represents the theoretical minimum adsorption force. Assuming a safety factor K of 1.3, the total adsorption force must meet the following requirements: ,in, The weight of the crystal ingot (density ρ is 2.33 g / cm³) 3(Height fixed at 180 mm). The theoretical minimum adsorption force is compared with the safety factor requirement. If the theoretical minimum adsorption force does not meet the safety factor requirement, there are two scenarios: the theoretical minimum adsorption force is lower than the minimum safety factor requirement, and the theoretical minimum adsorption force exceeds the maximum safety factor requirement. If the theoretical minimum adsorption force is lower than the minimum safety factor requirement (i.e., the calculated total adsorption force), a dynamic expansion strategy is activated: prioritizing distance... The outer ring suction cup 2, which is currently not activated, expands by one suction cup at a time until the force balance condition is met; during the expansion process, an adsorption force decay model is introduced, and the formula is: ,in, For each outer suction cup 2, the effective adsorption force is defined as σ, which is the correction distance and is set to 10mm. By introducing an adsorption force attenuation model, the effective adsorption force reduction caused by partial air leakage in the edge suction cups can be corrected, ensuring that the total adsorption force estimation is closer to the actual working conditions. If the theoretical minimum adsorption force exceeds the maximum value of the safety factor requirement (e.g., K times the required total adsorption force requirement), redundancy is determined, triggering the adsorption force margin feedback mechanism. Based on the stress distribution uniformity optimization objective, the suction cup with the smallest adsorption force contribution is shut down until the theoretical minimum adsorption force meets the safety factor requirement.

[0027] In some optional implementations of this application, the constructed ingot specification-suction cup opening / closing-adsorption force mapping relationship includes a pre-stored multi-specification ingot opening / closing configuration lookup table. The multi-specification ingot opening / closing configuration lookup table contains the correspondence between ingot size, effective suction cup number, adsorption force redundancy threshold and clamping force adjustment parameters, and dynamically updates the safety margin and unit adsorption force parameters through a machine learning model.

[0028] In some optional implementations of this application, the process of constructing the mapping relationship between ingot specifications, suction cup opening / closing, and adsorption force includes: establishing a lookup table for opening / closing configurations of ingots of multiple specifications (such as 6-inch, 8-inch, and 12-inch) and embedding it into an online decision-making module. Taking an 8-inch ingot (D=200mm) as an example... It is 99.2mm thick, and only the inner ring of 8 suction cups meets the requirements. Therefore, initially all suction cups in the inner ring are activated. =8×85=680N, ingot weight G is 520N, required total adsorption force: K×G=676N, the theoretical minimum adsorption force just meets the safety factor requirement, no expansion is needed. For a 12-inch ingot (D=300mm). It measures 149.2mm, and all 16 suction cups, both inner and outer rings, are effective. =1360N, Required total adsorption force: K×G=780N, If the value exceeds the maximum safety factor requirement, redundancy exists. In this case, an adsorption force margin feedback mechanism is employed to shut down the four outermost suction cups with the smallest adsorption force contribution (based on the stress distribution uniformity optimization objective), achieving optimal synergy between energy consumption and stability. This mapping relationship is updated online through a machine learning regression model, adaptively adjusting by incorporating historical successful capture data. and parameter.

[0029] In some optional implementations of this application, the critical adsorption verification process includes: real-time monitoring of the negative pressure change curve of each activated suction cup by an independently set absolute pressure sensor, wherein the threshold negative pressure is dynamically set according to the weight of the crystal ingot and the adsorption contact area.

[0030] In some optional implementations of this application, the local compensation mechanism includes: implementing pulse-type opening and closing adjustment of the solenoid valve of the branch where the substandard suction cup is located, and simultaneously increasing the vacuum pump power of the corresponding branch.

[0031] In some optional implementations of this application, the re-verification of the total adsorption force includes: after removing the failed adsorption cups from the current set of effective adsorption cups, recalculating the total adsorption force of the remaining adsorption cups; if the total adsorption force is lower than the minimum value required by the safety factor, then activating the spare outer ring adsorption cup 2 and simultaneously increasing the clamping force.

[0032] In some optional implementations of this application, a real-time verification mechanism for the critical adsorption state based on multi-source sensor fusion is introduced into the critical adsorption verification process. Specifically, this includes: after the suction cups are configured to open and close, the adsorption establishment monitoring stage is entered. Each suction cup is equipped with an independent miniature absolute pressure sensor (sampling frequency 1 kHz) to collect the negative pressure change curve in real time. The "critical adsorption success" criterion is defined as follows: all activated suction cups reach the threshold negative pressure (e.g., the threshold negative pressure is -70 kPa) within a first preset time (e.g., 500 ms), and the pressure fluctuation amplitude is less than ±5 kPa / 100 ms, indicating good sealing and no leakage. If individual suction cups fail to meet the criteria, a local compensation mechanism is triggered. Specifically, the solenoid valve of the branch containing the suction cup is subjected to pulse-type opening and closing adjustment (e.g., PWM control, with the duty cycle gradually increasing from 50% to 100%) to attempt to clear micro-blockages or interface foreign objects, and the vacuum pump power of the corresponding branch is increased simultaneously. The system continuously judges whether the suction cup, after compensation by the local compensation mechanism, reaches the threshold negative pressure within the second preset time. If it still fails to reach the threshold after 300 ms, the suction cup is deemed to be faulty and removed from the valid set. The theoretical minimum adsorption force of the remaining suction cups is recalculated, and it is compared with the minimum value required by the safety factor. If the theoretical minimum adsorption force is lower than the minimum value required by the safety factor, the backup outer ring suction cup 2 is immediately activated and the clamping force is simultaneously enhanced to form a closed-loop fault-tolerant control to ensure zero risk in the grasping process.

[0033] In some optional implementations of this application, the enhanced clamping force includes: calculating a clamping force compensation coefficient based on the ingot diameter and the adsorption failure ratio, increasing the basic clamping force to 1.2 to 1.5 times the original value, and controlling the closing pressure of the clamping claw 6 through a servo pneumatic proportional valve.

[0034] In some optional implementations of this application, the execution timing of the adsorption-clamping collaborative grasping of the crystal ingot includes: after the suction cup reaches a stable negative pressure, a third preset time is delayed to trigger the closing action of the clamping claw 6, and the initial value of the clamping force is dynamically set according to the circumference of the crystal ingot and the safe pressure range of the contact surface.

[0035] In some optional implementations of this application, the mechanism body with adsorption-gripping collaborative grasping function involved in this application adopts a dual-mode force control mechanism of suction cup-gripping collaborative grasping, wherein, refer to the attached... Figure 1 As shown, the mechanism body includes an adsorption gripping module with vertical support provided by suction cups and a clamping gripping module with a clamping structure as a redundancy guarantee against detachment. The adsorption gripping module consists of multiple suction cups arranged in a concentric circular array, including an inner ring suction cup 1 and an outer ring suction cup 2. The clamping gripping module consists of a first drive device 4 that drives the clamping structure to move up and down and a second drive device 5 that drives the clamping structure to move horizontally (both the first drive device 4 and the second drive device 5 are conventional drive structures and will not be described in detail here). The clamping structure consists of clamping claws 6 controlled by servo pneumatic proportional valves. The clamping claws 6 use servo pneumatic proportional valves to control the output clamping force of the double-sided cylinders (i.e., the double-sided cylinders in the second drive device 5). It is dynamically set based on the ingot diameter and wall thickness, specifically: basic clamping force. It is proportional to the ingot circumference, and the formula is: ,in, The proportionality coefficient is set to 0.15 N / mm to ensure that the contact surface pressure is maintained within the safe range of 0.2–0.3 MPa. Simultaneously, an adsorption state feedback signal is introduced. If the vacuum sensor detects that the negative pressure rise rate of any activated suction cup is lower than a threshold (e.g., <5 kPa / s), a leakage risk is determined, and the clamping force is increased to 1.5 × 10⁻⁶ MPa in real time. This enhances lateral restraint capabilities. The clamping action timing is linked to the opening and closing of the suction cup: after the suction cup completes adsorption and confirms that a stable negative pressure has been reached, the clamping claw 6 closes after a third preset time (e.g., 200 ms) to avoid clamping impacts interfering with the vacuum establishment process.

[0036] This embodiment describes the specific implementation process of the multi-size ingot integrated gripping mechanism involved in this application. Scenario Description: To meet the automated gripping requirements of multi-size silicon ingots (6-inch, 8-inch, and 12-inch), the multi-size ingot integrated gripping mechanism involved in this application is adopted. The mechanism body is equipped with 16 suction cups arranged in a double-layer concentric circular array. The inner ring of 8 suction cups is located on a circle with a radius of 75mm, and the outer ring of 8 suction cups is located on a circle with a radius of 115mm. The included angle between adjacent suction cups is 45°. The center coordinates of each suction cup are accurately measured by a laser calibration system and stored in a database, with the positioning error controlled within ±0.5mm. The implementation process includes the following steps.

[0037] 1. Suction Cup Spatial Layout Modeling and Geometric Coverage Analysis

[0038] After the system receives the input command for the diameter D of the crystal ingot, it first calculates its effective coverage radius using the following formula: Among them, safety margin The value is set to 0.8mm to compensate for the risk of seal failure caused by the curvature transition zone at the edge of the crystal ingot and minor positioning deviations. Taking an 8-inch crystal ingot as an example, with a diameter D=200mm, then... The diameter is 99.2mm. The extreme diameter of all 16 suction cups... and The comparison determines whether the suction cups fall within the valid projection area. Since the radius of inner suction cup 1 is 75mm < 99.2mm, all conditions are met; while the radius of outer suction cup 2 is 115mm > 99.2mm, it is not initially enabled. Therefore, an initial set of valid suction cups is generated. Includes all 8 suction cups in the inner ring, numbered as follows (Numbered clockwise), the remaining outer ring suction cups 2 are temporarily marked as pending expansion.

[0039] 2. Dynamic expansion algorithm for suction cup opening and closing based on minimum critical adsorption force

[0040] The measured average adsorption force of a single suction cup under a vacuum of -80 kPa is known. 85N, current number of available suction cups If there are 8 adsorption elements, then the theoretical minimum adsorption force is: The density ρ of the ingot is 2.33 g / cm³. 3 The height is fixed at 180 mm, and the volume is calculated as follows: The calculated ingot gravity G is 520N. The safety factor K is set to 1.3. The required total adsorption force is: K×G=1.3×520=676N. The comparison shows that the theoretical minimum adsorption force meets the safety factor requirement. There is no need to start the outer ring suction cup 2 expansion, and only the inner ring 8 suction cups are working.

[0041] For a 12-inch ingot (D=300mm), calculate =149.2mm. Since the radius of the outer ring suction cup 2 is 115mm < 149.2mm, all 16 suction cups in the inner and outer rings are located within the effective area. The initial number of usable suction cups is... If there are 16, then the theoretical minimum adsorption force is: The density ρ of the ingot is 2.33 g / cm³. 3 With a fixed height of 180 mm, the calculated volume V is 1.272 × 10⁻⁶ mm. -2 m 3 The calculated ingot gravity G is 780 N, and the required total adsorption force is: K × G = 1.3 × 780 = 1014 N. At this point, the theoretical minimum adsorption force exceeds the maximum value required by the safety factor, indicating significant redundancy. To reduce energy consumption and optimize stress distribution uniformity, an adsorption force margin feedback mechanism is activated. Specifically, based on the finite element simulation results, the four adsorption cups closest to the edge of the ingot in the outer ring 2 (such as...) The edge effect causes local stress concentration, which can easily lead to microcracks in the ingot. Therefore, the four suction cups are turned off, and 12 suction cups are kept running. The theoretical minimum adsorption force of the remaining suction cups is recalculated as 12 × 85 = 1020 N. The theoretical minimum adsorption force at this time meets the safety factor requirements. This process achieves synergistic optimization of energy saving and mechanical performance.

[0042] In a specific working condition, such as during the production of custom-sized ingots (e.g., a 9.5-inch ingot, D=241.3mm), calculations... =119.85mm, all 8 inner ring suction cups are effective, some outer ring suction cups are out of range. Number of available suction cups at this time. With 8 crystals, the theoretical minimum adsorption force is 680N. Since the ingot weight is 600N, the calculated total adsorption force is 780N. Therefore, the theoretical minimum adsorption force is lower than the minimum safety factor requirement (680N < 780N), necessitating the activation of a dynamic expansion strategy. Distance should be prioritized. The outermost suction cup 2 (i.e., the one with the smallest radial deviation) is activated sequentially. Considering that the radius of outer suction cup 2 is 115mm (<... =119.85mm), theoretically all can be used, but due to edge air leakage, the actual adsorption force needs to be corrected. An adsorption force attenuation model is introduced, taking a single outer ring suction cup 2 as an example. If it is 115mm, then , Further calculations Specifically: That is, the effective adsorption force of each outer ring suction cup 2 is approximately 75.6 N. After activating the first outer ring suction cup 2, the total adsorption force is calculated as follows: Continue using the second outer suction cup 2, and calculate the total suction force as follows: Once the conditions are met, expansion stops. Ultimately, the eight inner ring suction cups and two outer ring suction cups are activated to achieve the minimum necessary opening and closing configuration.

[0043] 3. Construction of the mapping relationship between ingot specifications, suction cup opening and closing, and adsorption force

[0044] The system pre-stores a lookup table for the opening and closing configurations of multi-specification crystal ingots (see Table 1 below) and continuously optimizes the parameters in conjunction with the online machine learning module.

[0045] Table 1. Pre-stored multi-specification ingot opening and closing configuration lookup table

[0046] Crystal size (in) Diameter D (mm) Effective cover radius (mm) Initial number of activated chuck Whether to expand Actual total number of activation Theoretical minimum adsorption force (N) Required total adsorption force (N) 6 150 74.2 8 (inner ring) No 8 680 507 8 200 99.2 8 No 8 680 676 12 300 149.2 16 Yes (close outer ring 4) 12 1020 1014

[0047] This mapping relationship is used to train a regression model with historically successful data captures, dynamically adjusting the safety margin and unit adsorption force parameters. For example, if the surface roughness of a batch of 8-inch ingots is too high, causing the average adsorption force to drop to 80 N, the model automatically identifies the trend and updates the unit adsorption force to 80 N in advance during the next capture, while increasing the safety margin to 1.0 mm to improve robustness.

[0048] 4. Dual-mode force control mechanism for suction cup-clamping collaborative grasping

[0049] The clamping claw 6 is controlled by a dual-sided servo pneumatic proportional valve that outputs clamping force from the cylinder. The basic clamping force is set to be proportional to the ingot circumference, as shown in the formula: ,in, With a value of 0.15 N / mm, for an 8-inch ingot (D=200 mm), the calculated basic clamping force is 94.2 N, and the total clamping force on both sides is 188.4 N, ensuring that the contact surface pressure is between 0.2 and 0.3 MPa (the contact area is estimated to be 600 mm²). 2 The pressure p is 0.314 MPa, close to the upper limit but acceptable. Adsorption status feedback is also introduced: each suction cup is equipped with an absolute pressure sensor with a sampling frequency of 1 kHz. If the negative pressure rise rate of any activated suction cup is detected to be less than 5 kPa / s during the adsorption establishment phase (first 500 ms), a leakage risk is determined, and the clamping force is increased in real time to: =1.5×94.2=141.3N (single side), enhancing lateral restraint and preventing sudden slippage. Strictly linked action sequence: After the suction cup solenoid valve opens, the control system monitors the negative pressure values ​​of all activated suction cups; when all reach the threshold negative pressure (e.g., -70kPa) and stabilize, a 200ms delay triggers the closing action of the clamping claw 6, preventing instantaneous vibration from damaging the vacuum sealing interface.

[0050] 5. Real-time verification of critical adsorption state by multi-source sensor fusion

[0051] During the adsorption setup phase, the system continuously collected pressure curves from 16 suction cups. The criteria for "critical adsorption success" were defined as: (1) all activated suction cups reached the threshold negative pressure (e.g., -70 kPa) within 500 ms; (2) the pressure fluctuation amplitude was less than ±5 kPa within 100 ms. During a single 12-inch ingot gripping process, the suction cups... The outer ring only reached -65 kPa at 400 ms, with a rise rate of only 3.2 kPa / s, below the threshold. The system immediately activated a local compensation mechanism: PWM pulse control was implemented on the solenoid valve of the suction cup branch, gradually increasing the duty cycle from 50% to 100% to attempt to clear micro-blockages or interface particles, while simultaneously increasing the vacuum pump power of the corresponding branch. After 200 ms of adjustment, the negative pressure rose to -72 kPa, the fluctuation stabilized, and normal operation was restored. If the suction cup still fails to meet the standard within 300 ms, it is considered a failure, and the system will proceed accordingly. If one suction cup is removed, and the theoretical minimum suction force is 1020 N, then removing one suction cup will reduce the theoretical minimum suction force to 935 N (< the required total suction force of 1014 N), which does not meet the safety factor requirements. The system will immediately activate a backup outer ring suction cup 2 (which was previously turned off due to redundancy) and simultaneously increase the gripping force to 1.5 times, forming a closed-loop fault-tolerant control to ensure gripping safety.

[0052] In summary, this embodiment provides a complete implementation of a suction cup opening and closing control algorithm based on geometric coverage analysis and dynamic force balance verification, and integrates clamping force feedback adjustment and multi-sensor verification mechanisms to achieve the goal of safe, efficient, and adaptive gripping of multi-specification ingots.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of the present invention. Any modifications or equivalent substitutions that do not depart from the spirit and scope of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A multi-specification crystal ingot integrated gripping mechanism, characterized by, The application relates to a mechanism body with adsorption-clamping cooperative grabbing function, wherein a plurality of suction cups are arranged on the mechanism body, the radial positions of the suction cups are pre-calibrated, and the radius values of the suction cups from the center of the mechanism body are recorded. A control system with adsorption-clamping cooperative control function is used to generate optimal suction cup opening and closing instructions through a suction cup opening and closing dynamic expansion algorithm based on minimum critical adsorption force and a constructed ingot specification-suction cup opening and closing-adsorption force mapping relationship, and after the suction cup opening and closing configuration is completed, a critical adsorption verification process is entered to judge whether the threshold negative pressure of each enabled suction cup is reached within a first preset time, if yes, the mechanism body is controlled to perform adsorption-clamping cooperative grabbing ingot operation, if not, it is judged that the corresponding suction cup does not meet the standard, and a local compensation mechanism is triggered to continuously judge whether the threshold negative pressure of the suction cup compensated by the local compensation mechanism is reached within a second preset time, if not, the suction cup is determined to be invalid, and the total adsorption force is recalibrated and the clamping force is simultaneously enhanced. The plurality of suction cups are arranged in concentric circular array, including inner circle suction cups and outer circle suction cups, the number of the inner circle suction cups is equal to that of the outer circle suction cups, and the adjacent suction cups are distributed at equal angles.

2. The multi-specification ingot integrated gripping mechanism according to claim 1, wherein The calibration of the radial position of each suction cup includes measuring the actual radius value of the center of each suction cup to the center of the mechanism body through a laser calibration system, and storing the calibration data in the database of the control system, and the positioning error is controlled within the range of plus or minus 0.5 mm.

3. The multi-specification ingot integrated gripping mechanism according to claim 1, wherein The suction cup opening and closing dynamic expansion algorithm based on minimum critical adsorption force includes calculating the effective coverage radius according to the ingot diameter and the safety margin, screening out the suction cups with the radius value from the center of the mechanism body less than or equal to the effective coverage radius to generate an initial effective suction cup set, calculating the theoretical minimum adsorption force based on the calibrated unit adsorption force and the initial effective suction cup number, if the theoretical minimum adsorption force is lower than the minimum value required by the safety coefficient, the adjacent outer circle suction cups are expanded in distance priority, one adjacent outer circle suction cup is expanded at a time until the force balance condition is met, if the theoretical minimum adsorption force exceeds the maximum value required by the safety coefficient, the adsorption force margin feedback mechanism is triggered, the suction cup with the minimum adsorption force contribution is closed based on the stress distribution uniformity optimization goal, and the theoretical minimum adsorption force meets the safety coefficient requirement.

4. The multi-specification ingot integrated gripping mechanism according to claim 1, wherein The constructed ingot specification-suction cup opening and closing-adsorption force mapping relationship includes a pre-stored multi-specification ingot opening and closing configuration lookup table, the multi-specification ingot opening and closing configuration lookup table contains the corresponding relationship of ingot size, effective suction cup number, adsorption force redundancy threshold and clamping force adjustment parameter, and the safety margin and unit adsorption force parameter are dynamically updated through a machine learning model.

5. The multiple gauge ingot integrated gripping mechanism as set forth in claim 1, wherein, The critical adsorption verification process includes real-time monitoring of the negative pressure change curve of each enabled suction cup through an independently set absolute pressure sensor, and the threshold negative pressure is dynamically set according to the ingot weight and the adsorption contact area.

6. The multiple gauge ingot integrated gripping mechanism as set forth in claim 1, wherein, The local compensation mechanism includes pulse type opening and closing adjustment of the electromagnetic valve of the branch where the suction cup does not meet the standard, and synchronous improvement of the vacuum pump power of the corresponding branch.

7. The multiple gauge ingot integrated gripping mechanism as set forth in claim 1, wherein, ​ 8. The multiple gauge ingot integrated gripping mechanism as set forth in claim 1, wherein, The re-checking total adsorption force includes: after eliminating the invalid adsorption disc from the current effective adsorption disc set, the theoretical minimum adsorption force of the remaining adsorption disc is recalculated, if the theoretical minimum adsorption force is lower than the minimum value required by the safety factor, the standby outer ring adsorption disc is activated and the clamping force is simultaneously enhanced.

9. The multiple gauge ingot integrated gripping mechanism of claim 8, wherein, The enhanced clamping force includes: calculating the clamping force compensation coefficient according to the crystal diameter and the adsorption failure ratio, increasing the basic clamping force to 1.2-1.5 times of the original value, and controlling the closing pressure of the clamping jaw through the servo pneumatic proportional valve.

10. The multiple gauge ingot integrated gripping mechanism as set forth in claim 1, wherein, The execution timing of the adsorption-clamping cooperative grabbing crystal operation includes: delaying for a third preset time after the adsorption disc reaches a stable negative pressure, triggering the clamping jaw closing action, and the initial value of the clamping force is dynamically set according to the crystal circumference and the contact surface safety pressure interval.

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