Vacuum coating equipment

Abstract

The embodiment of the invention provides vacuum coating equipment. The vacuum coating equipment comprises an observation window structure, a lining and an observation window channel, the observation window channel is arranged on the side wall of a cavity of the vacuum coating equipment, the observation window structure is connected with the observation window channel, and high-transmittance glass is arranged at the center of the observation window structure; the lining is arranged in the observation window channel and abuts against the observation window structure, the observation window channel is connected with the gas path, and the gas path is used for conveying inert gas to the cavity through the lining so as to reduce the situation that original gas in the cavity diffuses to the high-transmittance glass. According to the equipment, the lining communicated with the gas path is additionally arranged at the observation window structure, inert gas can be guided to the cavity, so that the gas in the cavity is reduced or even isolated from diffusing to the high-transmittance glass of the observation window structure, the high-transmittance glass is prevented from being polluted by sputtering, and the observation effect of the high-transmittance glass is guaranteed. And the equipment is simple in structure and easy to operate, and equipment cost and labor cost can be reduced.

Description

Technical Field

[0001] This specification relates to the field of vacuum coating equipment technology, and in particular to a vacuum coating equipment. Background Technology

[0002] The observation window system of vacuum coating equipment is a key component of the equipment. All vacuum coating processes must be carried out in a vacuum chamber. The observation window system of vacuum coating equipment is mainly used to observe and detect the working condition inside the vacuum chamber and to promptly identify and handle equipment abnormalities.

[0003] Currently, the observation window of vacuum coating equipment generally adopts a single-layer glass design. This solution has a low cost, but the disadvantage is that over time, the observation window glass of the process coating area is easily covered by coating sputterings, making it impossible for staff to see or clearly see the operation of the vacuum equipment, thus failing to detect problems in time.

[0004] The existing technology uses an observation window system that combines double-layered high-transparency glass with a rotatable baffle. The design scheme is shown in the attached figure. Figure 1 As shown, 7 is a fixed high-transparency glass, and 8 is a replaceable high-transparency glass. If the high-transparency glass 8 is contaminated by coating sputterings during vacuum equipment operation, the contaminated high-transparency glass 8 can be replaced by removing the retaining ring 3, ensuring the user's ability to observe the machine's operation. In addition, a baffle mechanism is also added, as shown in the attached diagram. Figure 2 As shown, when observation is required during vacuum coating, rotating the handle 19 drives the rotating shaft 010 and the baffle 2 to rotate, opening the baffle 2 and allowing staff to easily observe the operation of the vacuum equipment inside the coating area. When the baffle 2 is not in use, rotating it can cover the high-transparency glass 8 to prevent sputtering contamination, allowing staff to observe the internal coating process through the observation window. This structure further extends the service life of the high-transparency glass 8.

[0005] However, the above-mentioned technical solution still requires staff to regularly maintain and replace the observation window, increasing costs; and the baffle mechanism requires manual rotation, which is cumbersome. Furthermore, the observation window system has a complex structure, further increasing the machine's cost.

[0006] In view of this, the embodiments in this specification are intended to provide a vacuum coating apparatus. Summary of the Invention

[0007] The purpose of this specification is to provide a vacuum coating equipment to solve the problems of existing vacuum coating equipment still requiring regular maintenance by operators and having a relatively complex structure, which increases labor and equipment costs.

[0008] To solve the above-mentioned technical problems, the specific technical solutions of the embodiments in this specification are as follows: This specification provides a vacuum coating apparatus, including an observation window structure, a bushing, and an observation window channel; The observation window channel is located on the side wall of the cavity of the vacuum coating equipment, the observation window structure is connected to the observation window channel, and a high-transparency glass is provided at the center of the observation window structure; The bushing is disposed within the observation window channel and abuts against the observation window structure. The observation window channel is connected to the gas path, which is used to deliver inert gas through the bushing to the cavity to reduce the diffusion of the original gas in the cavity to the high-transparency glass.

[0009] Specifically, the bushing includes a first end, a second end, and a connecting portion; The connecting part connects the first end and the second end. The first end is located on the side of the observation window channel near the observation window structure, and the second end is located on the side of the observation window channel near the vacuum coating equipment cavity. The outlet of the gas path is located in the section of the observation window channel corresponding to the connecting part. The bushing is also provided with a through hole, which passes through the first end, the second end and the connecting part, with one end of the through hole facing the high-transparency glass.

[0010] Furthermore, the diameters of the first end and the second end are adapted to the inner diameter of the observation window channel; The diameters of the first end and the second end are larger than the diameter of the connecting part, and an annular air passage for gas flow is formed between the connecting part and the observation window channel.

[0011] Specifically, the side wall of the connecting part is provided with a plurality of air holes, which are used to connect the through hole to the annular air passage.

[0012] Preferably, the air holes are disposed on the top of the connecting part, and a plurality of the air holes are evenly distributed on the connecting part.

[0013] Preferably, the gas line is equipped with a switch control valve and a flow meter.

[0014] Specifically, the observation window structure also includes a connecting platform; The connecting platform includes a boss and a frustum, the frustum being disposed around the boss, and the boss and the frustum being integrally formed. The boss is used to install the high-transparency glass, and the frustum is detachably connected to the cavity sidewall of the vacuum coating equipment through a locking mechanism.

[0015] Furthermore, the observation window structure also includes a sealing ring, which is disposed between the connecting platform and the vacuum coating equipment.

[0016] Furthermore, the observation window structure also includes a central ring; The truncated cone has a groove on the side facing the bushing, and the outer wall of the vacuum coating equipment has an installation groove. The central ring includes a first snap-fit ​​edge that engages with the groove and a second snap-fit ​​edge that engages with the mounting groove. A sealing ring fixing part is provided between the first snap-fit ​​edge and the second snap-fit ​​edge, and the sealing ring fixing part is used to fix the sealing ring.

[0017] Preferably, the surface of the high-transparency glass is coated with a corrosion-resistant film.

[0018] By employing the above technical solution, the vacuum coating equipment provided in this specification embodiment, through the addition of a bushing connected to the gas path at the observation window structure, can guide a large portion of the inert gas to the cavity, thereby preventing the original gas in the cavity from diffusing to the high-transparency glass of the observation window structure, avoiding the original gas splashing and contamination of the high-transparency glass, and affecting the observation effect of the high-transparency glass. Furthermore, due to the diffusion effect of the gas, at least some of the inert gas may also diffuse to the high-transparency glass, purging and cleaning the high-transparency glass, further ensuring the observation effect of the high-transparency glass on the reaction inside the equipment. Moreover, the vacuum coating equipment provided in this specification embodiment has a simple structure, is easy to operate, and helps to reduce equipment and labor costs.

[0019] To make the above and other objects, features and advantages of the embodiments of this specification more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 and Figure 2 A schematic diagram of the observation window structure in a vacuum coating device in the prior art is shown; Figure 3 A schematic diagram of the structure of a vacuum coating apparatus provided in an embodiment of this specification is shown; Figure 4 An exploded view of the vacuum coating equipment is shown below. Figure 5 This diagram shows an assembly schematic of the vacuum coating equipment from a cross-sectional view. Figure 6 A schematic diagram of the countersunk head structure is shown.

[0022] Explanation of reference numerals in the attached figures: 10. Observation window structure; 11. High-transparency glass; 12. Connecting platform; 121. Boss; 122. Frustum; 13. Sealing ring; 14. Central ring; 15. Locking mechanism; 20. Bushing; 21. First end; 22. Second end; 23. Connecting part; 24. Through hole; 25. Air hole; 30. Observation window passage; 40. Air passage. Detailed Implementation

[0023] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0024] It should be noted that the terms "first," "second," etc., used in this specification, claims, and the foregoing drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, apparatus, product, or device that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or devices.

[0025] This specification provides a vacuum coating equipment to address the problems of existing vacuum coating equipment requiring regular maintenance by operators and having a complex structure that increases labor and equipment costs.

[0026] like Figures 3 to 6 As shown in the embodiments of this specification, a vacuum coating apparatus includes an observation window structure 10, a bushing 20, and an observation window channel 30. The observation window channel 30 is disposed on the side wall of the cavity of the vacuum coating equipment. The observation window structure 10 is connected to the observation window channel 30. A high-transparency glass 11 is disposed at the center of the observation window structure 10. Thus, the reaction information inside the vacuum coating equipment (such as whether it emits light, whether it flashes, and what color it is) can be observed through the high-transparency glass 11.

[0027] The bushing 20 is disposed within the observation window channel 30 and abuts against the observation window structure 10. The bushing 20 is connected to the gas passage 40, which is used to deliver inert gas through the bushing 20 to the cavity, thereby reducing the diffusion of the original gas in the cavity to the high-transparency glass 11. In the embodiments of this specification, the original gas in the cavity can be the process gas used in the vacuum coating equipment during the coating process, or the cleaning gas used for cleaning after the coating process is completed.

[0028] The vacuum coating equipment provided in this specification, by adding a bushing connected to the gas path at the observation window structure, utilizes the pressure difference between the gas path and the cavity to guide a large portion of the inert gas to the cavity. This reduces or even prevents the diffusion of process gases or cleaning gases from the cavity to the high-transparency glass of the observation window structure, avoiding sputtering and contamination of the high-transparency glass and affecting its observation effect. Furthermore, due to gas diffusion, at least some inert gas may diffuse to the high-transparency glass of the observation window structure, thus purging and cleaning the glass and further ensuring the observation effect of the high-transparency glass on the reaction inside the equipment. The vacuum coating equipment provided in this specification has a simple structure; the gas path only needs to be opened during coating or cleaning operations, making it easy to operate and eliminating the need for operators to regularly maintain or replace the observation window structure, thus reducing equipment and labor costs. In addition, guiding the inert gas can improve the uniformity of the flow field in the chamber and introduces new adjustable parameters for the coating process, positively contributing to the uniformity of the coating thickness.

[0029] like Figure 2 and Figure 4 As shown, the bushing 20 includes a first end 21, a second end 22, and a connecting portion 23; The connecting part 23 connects the first end 21 and the second end 22. The first end 21 is located on the side of the observation window channel 30 near the observation window structure 10, and the second end 22 is located on the side of the observation window channel 30 near the device cavity. The bushing 20 is also provided with a through hole 24, which passes through the first end 21, the second end 22, and the connecting part 23. One end of the through hole 24 at the first end 21 faces the high-transparency glass 11, and the other end of the through hole 24 at the second end 22 faces the equipment cavity. Thus, the operator can observe the reaction information inside the vacuum coating equipment through the high-transparency glass 11 and the through hole 24. The outlet of the gas path 40 is located in the section of the observation window channel 30 corresponding to the connecting part 23 (i.e., as shown in the image). Figure 3 (As shown).

[0030] Specifically, the overall length of the bushing 20 (in this embodiment, the overall length of the bushing 20 refers to the total length along the axial direction of the bushing, including the first end 21, the connecting portion 23, and the second end 22) may be slightly longer than the length of the observation window channel 30. When the bushing 20 is placed inside the observation window channel 30, its first end 21 will at least partially extend from the observation window channel 30 and abut against the observation window structure 10, and its second end 22 may be flush with the inner wall of the cavity of the vacuum coating equipment (i.e., as shown in the figure). Figure 3 (As shown).

[0031] Furthermore, in the embodiments of this specification, the cross-section of the through hole 24 can be circular, and the high-transparency glass 11 can also be circular. The diameter of the through hole 24 can be less than or equal to the diameter of the high-transparency glass 11. That is, the size of the through hole 24 can be set according to the actual application scenario, and the size of the through hole 24 is actually the size of the angle from which the operator observes the reaction information inside the equipment cavity.

[0032] Furthermore, the diameters of the first end 21 and the second end 22 are adapted to the inner diameter of the observation window channel 30 so as to be installed within the observation window channel 30; The diameters of the first end portion 21 and the second end portion 22 are larger than the diameter of the connecting portion 23, meaning the diameter of the connecting portion 23 is smaller than the diameter of the observation window channel 30. This creates an annular gas path between the connecting portion 23 and the observation window channel 30 for the flow of inert gas. The inert gas will then be output from the outlet of the gas path 40 to the section of the observation window channel 30 corresponding to the connecting portion 23, i.e., the annular gas path.

[0033] like Figures 3 to 6 As shown, a plurality of air holes 25 are provided on the side wall of the connecting part 23, and the air holes 25 are used to connect the through hole 24 to the annular air passage.

[0034] During the coating process and cleaning, the gas path 40 is opened to allow inert gas to be input into the annular gas path between the connection part 23 and the observation window channel 30; then, the inert gas will flow through the air hole 25 into the through hole 24, and flow towards the side closer to the observation window structure 10 and the side of the vacuum coating equipment cavity (e.g. Figure 3 (As indicated by the middle arrow), the flow is mainly towards the side closer to the vacuum coating equipment cavity, and secondarily towards the side closer to the observation window structure 10.

[0035] At this time, since the through hole 24 of the bushing 20 is in an inert gas atmosphere, it can prevent the process gas or cleaning gas in the vacuum coating equipment cavity from entering, thereby avoiding the problem of process gas or cleaning gas contaminating the viewing window.

[0036] In some feasible embodiments, the first end 21 and the second end 22 may be made of rubber, or the sidewalls of the first end 21 and the second end 22 may be wrapped with a layer of rubber to achieve a tight connection with the observation window channel 30 through the tension of the rubber material, so that the inert gas can flow into the through hole 24 in most of the way when it flows from the gas passage 40 into the annular gas passage, which is beneficial to ensure the isolation effect of the inert gas on the original gas in the cavity.

[0037] In some feasible embodiments, the vent 25 can be located at any position on the side wall of the connecting part 23, so that inert gas can be introduced from the annular gas path through the vent 25 into the through hole 24 of the bushing.

[0038] Preferably, in this embodiment of the specification, the air holes 25 are disposed on the top of the connecting portion 23, and the plurality of air holes 25 are evenly distributed on the connecting portion 23. That is, the connecting portion 23 is cylindrical, the plurality of air holes 25 are located on the same straight line, and the straight line is parallel to the axis of the cylindrical connecting portion 23 and has the highest height. In this way, when the inert gas flows into the through hole 24 through the plurality of air holes 25, it can form an air curtain from top to bottom, which is beneficial to forming a "gas shield plug" in the through hole, preventing the working gas or clean gas in the equipment cavity from flowing in.

[0039] In the embodiments described in this specification, the position of the through hole 24 relative to the bushing 20 can be set according to actual application needs; that is, from the cross-section of the bushing 20, the position of the cross-section of the through hole 24 can be located at any position of the cross-section of the bushing 20. In some preferred embodiments, since the vent 25 is located at the top of the connecting portion 23, the through hole 24 can be correspondingly set in the upper half of the bushing to reduce the wall thickness encountered when opening the vent 25 and reduce the process difficulty.

[0040] Furthermore, in this embodiment of the specification, the air passage 40 may also be equipped with a switch control valve and a flow meter. The switch control valve is used to control the air intake, and in conjunction with the flow meter, the air intake flow rate can be controlled, allowing for convenient adjustment of the air intake flow rate.

[0041] like Figure 4 and Figure 5 As shown, the observation window structure 10 also includes a connecting platform 12; The connecting platform 12 includes a boss 121 and a frustum 122, which can be integrally formed. Specifically, the frustum 122 is disposed around the boss 121, and the boss 121 protrudes from the frustum 122. The boss 121 is used to install the high-transparency glass 11. The frustum 122 is detachably connected to the cavity sidewall of the vacuum coating equipment via a locking mechanism 15. That is, the locking mechanism 15 cooperates with a connector (such as a bolt) to detachably connect the connecting platform 12 and the high-transparency glass 11 installed on the connecting platform 12 to the observation window channel 30 of the vacuum coating equipment. The locking mechanism 15 can be a clamp.

[0042] Specifically, in the embodiments of this specification, the diameter of the boss 121 is smaller than the inner diameter of the locking mechanism 15, and the outer diameter of the frustum 122 is larger than the inner diameter of the locking mechanism 15; thus, when the frustum 122 is confined between the locking mechanism 15 and the cavity shell of the vacuum coating equipment, the boss 121 and the high-transparency glass 11 can be exposed from the inner diameter of the locking mechanism 15, so that the operator can observe the reaction inside the equipment.

[0043] Furthermore, in this embodiment of the specification, the observation window structure 10 further includes a sealing ring 13, which is disposed between the observation window structure 10 and the cavity housing of the vacuum coating equipment. The sealing ring 13 is used to ensure the airtightness of the vacuum coating equipment after the observation window structure 10 is installed.

[0044] Furthermore, in the embodiments of this specification, the observation window structure 10 further includes a central ring 14; The frustum 122 has a groove on the side facing the bushing 20, and the outer wall of the vacuum coating equipment has an installation groove. The central ring 14 includes a first snap-fit ​​edge that engages with the groove and a second snap-fit ​​edge that engages with the mounting groove. A sealing ring fixing part is provided between the first snap-fit ​​edge and the second snap-fit ​​edge, and the sealing ring fixing part is used to fix the sealing ring 13.

[0045] In some feasible embodiments, the inner diameter of the groove is adapted to the outer diameter of the first end 21 of the bushing 20, which extends at least partially from the observation window channel 30 and into the groove. A shoulder is formed on the inner wall where the boss 121 connects to the frustum 122, and the first end 21 extends into the groove and abuts against the shoulder.

[0046] Furthermore, in this embodiment of the specification, the lengths of the first end 21 and the second end 22 along their respective axial directions are not limited, nor is the relationship between the lengths of the first end 21 and the second end 22 limited; the lengths of the first end 21 and the second end 22 can be set according to actual application needs, as long as the connecting part 23 is completely located within the observation window channel 30, so as to ensure the isolation effect of the inert gas on the original gas in the cavity.

[0047] Preferably, the surface of the high-transparency glass 11 is coated with a corrosion-resistant film.

[0048] It should be noted that the above description illustrates several feasible embodiments of the present invention. Each embodiment is described in a progressive manner, with each embodiment focusing on its differences from the others. Similar or identical parts between embodiments can be referred to interchangeably. It should be understood that the embodiments described above are merely examples presented to illustrate the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the invention and implement it accordingly. They should not be used to limit the scope of protection of the present invention. It will be obvious to those skilled in the art that various combinations, modifications, and alterations can be made without departing from the spirit and scope of the present invention. All equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

[0049] Furthermore, in the embodiments described herein, the use of the terms "comprising" or "including" to describe combinations of elements, components, parts, or steps also contemplates implementations essentially consisting of these elements, components, parts, or steps. The use of the term "may" herein is intended to indicate that any described attribute "may" include is optional. Multiple elements, components, parts, or steps can be provided by a single integrated element, component, part, or step. Alternatively, a single integrated element, component, part, or step can be divided into multiple separate elements, components, parts, or steps. The use of "a" or "an" to describe an element, component, part, or step does not imply the exclusion of other elements, components, parts, or steps.

Claims

1. A vacuum coating apparatus, characterized by, The application relates to a vacuum coating equipment observation window structure. The observation window channel (30) is arranged on the cavity side wall of the vacuum coating equipment, the observation window structure (10) is connected with the observation window channel (30), and the high-transparency glass (11) is arranged at the center of the observation window structure (10). The sleeve (20) is arranged in the observation window channel (30) and abuts against the observation window structure (10), the observation window channel (30) is connected with the gas path (40), and the gas path (40) is used for conveying inert gas to the cavity through the sleeve (20) so as to reduce the diffusion of original gas in the cavity to the high-transparency glass (11).

2. The vacuum coating apparatus according to claim 1, wherein The sleeve (20) comprises a first end portion (21), a second end portion (22) and a connecting portion (23). The connecting portion (23) connects the first end portion (21) and the second end portion (22), the first end portion (21) is arranged on one side of the observation window channel (30) close to the observation window structure (10), the second end portion (22) is arranged on one side of the observation window channel (30) close to the cavity of the vacuum coating equipment, and the outlet of the gas path (40) is located on a section of the observation window channel (30) corresponding to the connecting portion (23). The sleeve (20) is further provided with a through hole (24) penetrating through the first end portion (21), the second end portion (22) and the connecting portion (23), and one end of the through hole (24) faces the high-transparency glass (11).

3. The vacuum coating apparatus according to claim 2, wherein The diameters of the first end portion (21) and the second end portion (22) are matched with the inner diameter of the observation window channel (30). The diameters of the first end portion (21) and the second end portion (22) are greater than the diameter of the connecting portion (23), and an annular gas path for gas circulation is formed between the connecting portion (23) and the observation window channel (30).

4. The vacuum coating apparatus according to claim 3, wherein A plurality of gas holes (25) are arranged on the side wall of the connecting portion (23), and the gas holes (25) are used for connecting the through hole (24) with the annular gas path.

5. The vacuum coating apparatus according to claim 4, wherein The gas holes (25) are arranged on the top of the connecting portion (23), and the gas holes (25) are uniformly distributed on the connecting portion (23).

6. The vacuum coating apparatus according to claim 1, wherein A switch control valve and a flow meter are arranged on the gas path (40).

7. The vacuum coating apparatus according to claim 1, wherein The observation window structure (10) further comprises a connecting table (12). The connecting table (12) comprises a convex table (121) and a circular table (122), the circular table (122) is arranged on the periphery of the convex table (121), and the convex table (121) and the circular table (122) are integrally formed. The convex table (121) is used for mounting the high-transparency glass (11), and the circular table (122) is detachably connected with the cavity side wall of the vacuum coating equipment through a locking mechanism (15).

8. The vacuum coating equipment according to claim 7, characterized in that, The observation window structure (10) further comprises a sealing ring (13) arranged between the connecting table (12) and the vacuum coating equipment.

9. The vacuum coating apparatus according to claim 8, wherein The observation window structure (10) further comprises a center ring (14). The side of the circular truncated cone (122) facing the bushing (20) is provided with a groove, and an outer wall surface of the vacuum coating equipment is provided with a mounting groove; The center ring (14) comprises a first clamping edge buckling with the groove and a second clamping edge buckling with the mounting groove, and a sealing ring fixing portion is arranged between the first clamping edge and the second clamping edge, and the sealing ring fixing portion is used for fixing the sealing ring (13).

10. The vacuum coating apparatus according to claim 1, wherein The surface of the high-transparency glass (11) is coated with a corrosion-resistant film.

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