Special gas filling mass temperature compensation method and system

Abstract

The invention discloses a special gas filling quality temperature compensation method and system, and the method comprises the steps: S1, collecting a multi-dimensional temperature and related parameters, and enabling the sampling frequency to be 1 Hz; s2, aiming at influence factors of temperature on quality, establishing a cooperative calculation model which comprises a gas density temperature compensation model, a gas cylinder volume temperature compensation model and a weighing system temperature drift compensation model; and S3, dynamic compensation calculation and filling control: completing initial compensation before gas filling, real-time compensation in the gas filling process and multi-component cooperative compensation during multi-gas filling on the basis of each calculation model obtained in the step S2. Through a quality control strategy of dynamically compensating the influence of the temperature on the gas density, the gas cylinder volume and the weighing system, the method is suitable for high-precision special gas filling scenes such as semiconductor manufacturing, medical gas use and scientific research experiments, and filling quality deviation caused by temperature fluctuation can be effectively eliminated.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of high-pressure special gas filling, and particularly relates to a special gas filling quality temperature compensation method and system. BACKGROUND

[0002] The core requirement of special gas filling is to ensure quality precision (especially the precision of multi-component gas proportioning), and temperature is a key interference factor affecting filling quality: Gas density level: gas density changes significantly with temperature (for example, in the ideal gas state, density is inversely proportional to absolute temperature), and environmental temperature fluctuations or gas phase change heat absorption during the filling process (such as CO2 liquefaction under high pressure) will cause the actual density of the gas in the cylinder to deviate from the standard value; Cylinder volume level: the cylinder material (such as austenitic stainless steel) has a thermal expansion coefficient, and temperature changes will cause a slight change in the effective volume of the cylinder (about 0.05% volume deviation per 10°C temperature change at room temperature); Weighing system level: high-precision electronic scales (such as milligrams) themselves have temperature drift (for every 1°C change in ambient temperature, the drift can be 0.02-0.1mg), which directly affects the accuracy of quality detection.

[0003] The existing technology mainly includes the following methods to deal with the influence of temperature: Static calibration: only set a fixed correction value according to the initial ambient temperature before filling, ignoring the dynamic temperature change during the filling process; Single parameter compensation: only compensate for the temperature influence of gas density, without considering the temperature interference of the cylinder volume and the weighing system; Fixed scene adaptation: only designed for a single gas (such as pure N2) in a constant temperature environment, and cannot adapt to multi-component gas (such as CO2 containing phase change characteristics) or dynamic temperature change scenarios (such as a workshop with a day-night temperature difference of 5-10°C).

[0004] The existing technology does not solve the following core problems, resulting in insufficient quality precision of special gas filling: Dynamic compensation missing: unable to respond in real time to the multi-dimensional temperature change of "ambient temperature-cylinder temperature-gas temperature" during the filling process (such as the cylinder wall temperature can be reduced from 25℃ to 15℃ when filling CO2), the fixed correction value and the actual deviation continue to expand; Multi-factor coupling ignored: temperature coupling effects of "gas density-cylinder volume-weighting drift" are not compensated (such as temperature reduction not only increases gas density, but also reduces cylinder volume, both have opposite effects on mass, which need to be calculated simultaneously); Poor multi-component adaptability: the temperature coefficients (density change rate with temperature) of different special gases (such as Ar, CO2, and ultra-high purity O2) differ significantly (the temperature coefficient of CO2 is 1.8 times that of Ar), and the existing method uses a unified compensation coefficient, resulting in multi-component proportion deviation; The upper limit of precision is insufficient: the filling mass error of traditional methods is generally ±0.3% to ±0.5%, which cannot meet the high-precision requirements of semiconductor manufacturing (within ±0.05%) and medical gas (within ±0.1%). SUMMARY

[0005] The purpose of the present application is to overcome the defects of "static compensation, single factor, poor adaptability" in the prior art, and to provide a special gas filling mass temperature compensation method and system. The present application uses a dynamic compensation temperature mass control strategy to affect the gas density, cylinder volume and weighing system, which is suitable for high-precision special gas filling scenes such as semiconductor manufacturing, medical gas and scientific research, and can effectively eliminate the filling mass deviation caused by temperature fluctuations.

[0006] In one aspect, the purpose of the present application is achieved by the following technical solutions: A special gas filling mass temperature compensation method, the special gas filling mass temperature compensation method comprising: S1: Multi-dimensional temperature and associated parameter acquisition, sampling frequency 1Hz; S2: For the factors affecting the mass by temperature, a collaborative calculation model is established, including: a gas density temperature compensation model, a cylinder volume temperature compensation model and a weighing system temperature drift compensation model; S3: Dynamic compensation calculation and filling control, including: based on step S2, each calculation model is completed: initial compensation before gas filling, real-time compensation during gas filling, and multi-component collaborative compensation when multiple gas filling.

[0007] According to one preferred embodiment, in step S1, the temperature parameters collected include: ambient temperature, cylinder wall temperature, temperature of each component gas source, and weighing system temperature; The associated parameters collected include: cylinder real-time pressure, current filling mass, and target mass of each component gas.

[0008] According to a preferred embodiment, the volume density temperature compensation model established in step S2 is used to complete the density correction for gases without phase change and gases undergoing phase change, including: For gases without phase change, density correction under actual temperature and pressure is completed based on the ideal gas law and the gas density under standard conditions, i.e., 20℃ and 0.1MPa. For gases that are prone to phase change, the gas saturation temperature is calculated using the Antoine equation. If the temperature of the gas cylinder wall is lower than the saturation temperature, meaning the gas is in a liquid state, the actual density after the phase change is corrected by combining the density of the liquid gas and the volume expansion coefficient.

[0009] According to a preferred embodiment, the gas cylinder volume temperature compensation model established in step S2 is configured to: correct the effective volume of the gas cylinder at the actual temperature based on the standard gas cylinder volume, the thermal expansion coefficient of the material, and the difference between the gas cylinder wall and the standard temperature.

[0010] According to a preferred embodiment, the weighing system temperature drift compensation model established in step S2 is configured to: calculate the mass drift of the weighing system due to temperature based on the temperature drift coefficient obtained from the weighing system calibration and the difference between the actual temperature of the weighing system and the standard temperature.

[0011] According to a preferred embodiment, the initial compensation before gas filling in step S3 includes: The ambient temperature, cylinder wall temperature, and weighing system temperature collected before gas filling are combined, and the initial corrected target mass of each component gas is calculated based on a collaborative computing model. This initial target mass is used as the initial filling target, and the initial opening of the filling flow valve is set accordingly. The initial corrected target mass integrates the results of gas density correction, cylinder volume correction, and weighing drift compensation.

[0012] According to a preferred embodiment, the real-time compensation during the gas filling process in step S3 includes: The temperature parameters are updated based on a preset time period, and the density, volume, and drift correction values ​​are recalculated to dynamically adjust the target mass. By comparing the difference between the actual filling quality and the corrected target quality using a PID algorithm, the opening of the flow regulating valve is dynamically adjusted to ensure that the quality error is ≤ ±0.005g when filling is terminated.

[0013] According to a preferred embodiment, the multi-component synergistic compensation during multi-gas filling in step S3 includes: Compensation values ​​are calculated separately for the density characteristics and temperature coefficients of different gases; and after filling a gas, the actual compensation amount of the corresponding gas is recorded, and the initial corrected target mass of the next gas is recalculated based on the gas cylinder temperature at this time.

[0014] On the other hand, this application also discloses: A special gas filling quality and temperature compensation system is provided, wherein the special gas filling quality and temperature compensation system uses the aforementioned special gas filling quality and temperature compensation method to perform special gas filling quality and temperature compensation calculation, and completes the flow regulating valve opening control for gas filling control.

[0015] According to a preferred embodiment, the special gas filling mass temperature compensation system includes: The data acquisition module is used to collect multi-dimensional temperature and related parameters; The control module is configured to perform dynamic compensation calculations based on a preset collaborative computing model and output filling control commands. The execution module is configured to control the opening degree of the flow regulating valve based on the control commands output by the control module; The user interface module is configured to facilitate data interaction between the system and the user.

[0016] The aforementioned main solution and its various further alternative solutions can be freely combined to form multiple solutions, all of which are solutions that can be adopted and are claimed in this application. Those skilled in the art, after understanding the solution of this application, will realize that there are many combinations based on the prior art and common general knowledge, all of which are technical solutions to be protected in this application, and will not be exhaustively listed here.

[0017] The beneficial effects of this application are: 1. Significantly improved filling accuracy: Through multi-dimensional temperature collaborative compensation, the filling quality error of special gases is reduced from the existing ±0.3%-±0.5% to within ±0.05%, meeting the needs of high-precision scenarios such as semiconductor manufacturing and medical gas use; 2. Strong adaptability to dynamic temperature changes: 1Hz high-frequency real-time compensation can cope with dynamic scenarios such as ambient temperature fluctuations (e.g., 5-35℃) and heat absorption during filling phase change (e.g., CO2 temperature drop of 10-15℃), avoiding the accumulation of deviations in fixed compensation values; 3. High versatility for multiple components: Differentiated compensation models are designed for different gases (Ar, N2, CO2, etc.), which can be adapted to multi-component gas filling without changing hardware, reducing equipment adaptation costs; 4. Balance between cost and reliability: No additional heating / temperature control equipment is required. Compensation is achieved solely through sensors and algorithms, reducing operating energy consumption by more than 30% and minimizing gas rework losses due to substandard quality. 5. Excellent ease of operation: Calibration parameters (such as gas density and balance drift coefficient) can be directly input and stored through the user interface, without the need for on-site debugging by professional personnel, making it suitable for industrial batch filling scenarios. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the principle structure of the special gas filling mass temperature compensation system of this application; Figure 2 This is a flowchart of multi-component gas compensation calculation; Figure 3 This is the temperature drift compensation curve of the balance. Detailed Implementation

[0019] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, unless otherwise specified, the following embodiments and features in the embodiments can be combined with each other.

[0020] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0021] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0023] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] Furthermore, it should be noted that unless otherwise specified in this application, the specific structures, connections, positions, power sources, etc. involved are all things that a person skilled in the art can know without creative effort based on the prior art.

[0025] Example 1 This application discloses a method for compensating the filling mass and temperature of special gases, which includes the following steps.

[0026] Step S1: Multi-dimensional temperature and related parameter acquisition; sampling frequency 1Hz to ensure dynamic response.

[0027] The temperature parameters include: ambient temperature (T_env, using SHT30 temperature and humidity sensor), cylinder wall temperature (T_bot, using PT100 contact sensor), gas source temperature of each component gas (T_gas-i, i is the gas component number, such as T_gas-1 is the temperature of Ar), and weighing system (electronic balance) temperature (T_bal, temperature sensor integrated inside the balance). The associated parameters include: real-time cylinder pressure (P_bot, 0-30MPa pressure sensor), current filling mass (m_real, real-time balance reading), and target mass of each component gas (m_target-i).

[0028] Step S2: Establish a collaborative calculation model for the factors affecting the mass of the gas, including: a gas density temperature compensation model, a gas cylinder volume temperature compensation model, and a weighing system temperature drift compensation model.

[0029] ① Gas density temperature compensation model (distinguishing between conventional gases and gases prone to phase change): Conventional gases (such as Ar and N2, without phase change): Based on the ideal gas law, combined with the gas density under standard conditions (20℃, 0.1MPa), the density under actual temperature and pressure is corrected; Gases prone to phase change (such as CO2): The gas saturation temperature is calculated using the Antoine equation. If the temperature of the gas cylinder wall is lower than the saturation temperature (the gas is in a liquid state), the actual density after the phase change is corrected by combining the density of the liquid gas and the volume expansion coefficient.

[0030] ② Gas cylinder volume temperature compensation model It is configured to adjust the effective volume of the gas cylinder at the actual temperature based on the standard volume of the gas cylinder, the coefficient of thermal expansion of the material (such as austenitic stainless steel), and the difference between the gas cylinder wall and the standard temperature.

[0031] ③ Temperature drift compensation model for weighing system The system is configured to calculate the mass shift caused by temperature based on the temperature drift coefficient obtained from the weighing system calibration, combined with the difference between the actual temperature and the standard temperature of the balance. Step S3: Dynamic compensation calculation and filling control, including: based on the calculation models obtained in step S2, the following are completed: initial compensation before gas filling, real-time compensation during gas filling, and multi-component collaborative compensation when multiple gases are filled.

[0032] Phase 1: Initial Compensation (Before Refilling) Based on the environmental data, cylinder wall temperature, and balance temperature collected before filling, the "initial corrected target mass" of each component gas is calculated (integrating gas density correction, cylinder volume correction, and weighing drift compensation results). This mass is used as the initial target for filling, and the initial opening of the flow valve is set accordingly.

[0033] Phase 2: Real-time compensation (during the filling process) The temperature parameters are updated every second, and the density, volume, and drift correction values ​​are recalculated to dynamically adjust the target mass. The difference between the actual filling mass and the corrected target mass is compared using a PID algorithm to adjust the opening of the flow control valve (to avoid underfilling or overfilling) and ensure that the mass error is ≤ ±0.005g when filling is terminated.

[0034] Phase 3: Multi-component synergistic compensation (for multi-gas filling) Calculate compensation values ​​separately for the density characteristics and temperature coefficients of different gases; after filling one gas, record its actual compensation amount, and based on the cylinder temperature at this time (previous filling may cause temperature changes), recalculate the initial correction target mass of the next gas to avoid the superposition of the effects of multi-component temperature.

[0035] This application employs multi-dimensional temperature collaborative acquisition technology: simultaneously acquiring temperatures from the environment, gas cylinder, gas source, and weighing system, avoiding the limitations of single-parameter compensation. This application is based on a gas-differentiated compensation model: distinguishing the density correction logic for conventional gases and gases prone to phase change, adapting to multi-component specialty gases. This application uses a real-time dynamic compensation algorithm: updating compensation values ​​at a high frequency of 1Hz, and adjusting flow rate via PID control to eliminate the cumulative error of dynamic temperature changes. This application employs weighing-temperature coupled compensation: for the first time, incorporating the balance's own temperature drift into the compensation range, breaking through the traditional limitation of "only compensating for gas-side temperature."

[0036] Example 2 refer to Figure 1 As shown, based on Embodiment 1, this embodiment discloses a special gas filling quality temperature compensation system. The special gas filling quality temperature compensation system uses the special gas filling quality temperature compensation method described in Embodiment 1 to perform special gas filling quality temperature compensation calculation and completes the flow regulating valve opening control for gas filling control.

[0037] The special gas filling quality temperature compensation system in this embodiment includes: a data acquisition module, a control module, an execution module, and a user interface module.

[0038] The data acquisition module is used to collect multi-dimensional temperature and related parameters; the control module is configured to perform dynamic compensation calculations based on a preset collaborative computing model and output filling control commands; the execution module is configured to control the opening degree of the flow regulating valve based on the control commands output by the control module; and the user interface module is configured to complete data interaction between the system and the user.

[0039] Application Cases like Figure 2 As shown, the implementation process of this invention is explained in detail in the context of "Ar+CO2 two-component special gas filling" scenario, ensuring that those skilled in the art can reproduce the technical solution based on this embodiment: 1. Implementation Scenarios and Equipment Selection Filling requirements: Target mass of Ar is set at 100.000g, target mass of CO2 at 50.000g, two-component mixed filling, with a total mass error ≤ ±0.05%; Cylinder parameters: austenitic stainless steel cylinder, standard cylinder volume, material thermal expansion coefficient α_mat = 16.5 × 10⁻⁶. -6 / ℃; Environmental conditions: Initial ambient temperature T_env = 25℃, T_env fluctuates to 28℃ during filling; Core equipment: Consistent with the system composition (PT100, SHT30, DS18B20, Mettler Toledo ME204E balance, Siemens S7-1200 PLC, SMCITV2030 flow valve).

[0040] 2. Initial compensation implementation (before Ar filling, t=0) Parameter acquisition: Initial data were obtained from various sensors: T_env=25℃, T_bot=25℃, T_gas-1 (Ar gas source)=25℃, T_bal=25℃, P_bot=0.1MPa; Compensation Calculation: The control module calls the pre-stored Ar standard density (1.784 kg / m³, 20℃ / 0.1 MPa), cylinder standard volume, and balance drift coefficient to calculate the initial corrected target mass of Ar (combining gas density, cylinder volume, and balance drift compensation results); the balance temperature drift compensation curve is shown below. Figure 3 As shown.

[0041] Initial settings: Use the calculated initial corrected target mass as the initial target for filling A, control the flow valve opening to 50%, and prepare for filling.

[0042] 3. Real-time compensation implementation (Ar filling process, t=10s to t=45s) Parameter update: Data is updated every second via sensors. For example, at t=10s: T_bot drops to 23℃ due to heat absorption during Ar filling, T_bal rises to 26℃, and P_bot rises to 5MPa. Dynamic adjustment: Based on the updated parameters, the control module recalculates the real-time corrected target mass of Ar and compares the difference between the current filling mass m_real (e.g., m_real = 4980.000g at t=10s) and the real-time corrected target mass. PID control: Adjust the flow valve opening using the PID algorithm (e.g., when the difference is 6.35g at t=10, increase the opening from 50% to 70% to improve the rate). Filling termination: At t=45s, the error between m_real and the real-time corrected target mass is ≤±0.005g, the solenoid valve cuts off the Ar gas supply, and Ar filling is completed.

[0043] 4. Implementation of multi-component synergistic compensation (CO2 filling, t=46s to t=80s) Temperature change record: After Ar filling is completed, record the current cylinder wall temperature T_bot=20℃ (temperature drop caused by Ar filling); Reinitialization: Based on T_bot=20℃, and combined with the pre-stored parameters of CO2 (Antoine constant, liquid density 1101kg / m³, volume expansion coefficient 0.0011 / ℃), the initial corrected target mass of CO2 is recalculated; Real-time adjustment: Repeat the process of "parameter update → compensation calculation → PID adjustment" (updated every 1 second). For example, when t=60s, T_bot=20℃ (lower than the CO2 saturation temperature of 21.5℃, corrected according to liquid density), dynamically adjust the opening of the flow valve. CO2 filling terminates: at t=80s, the error between the m_real of CO2 and the real-time corrected target mass is ≤±0.005g, the solenoid valve cuts off the CO2 gas source, and the two-component filling is completed.

[0044] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A method for temperature compensation of special gas filling quality, characterized in that, The special gas filling mass temperature compensation method comprises: S1: multi-dimensional temperature and associated parameter acquisition, sampling frequency 1Hz; S2: for the influence factors of temperature on mass, a collaborative calculation model is established, including: gas density temperature compensation model, cylinder volume temperature compensation model and weighing system temperature drift compensation model; S3: dynamic compensation calculation and filling control, including: based on step S2, each calculation model is completed: initial compensation before gas filling, real-time compensation during gas filling, and multi-component collaborative compensation when multi-gas filling.

2. The method for compensating the temperature of the special gas filling quality according to claim 1, wherein, In step S1, the collected temperature parameters include: ambient temperature, cylinder wall temperature, each component gas source temperature, weighing system temperature; the collected associated parameters include: cylinder real-time pressure, current filling mass, target mass of each component gas.

3. The method of claim 1, wherein the temperature compensation is performed by a temperature sensor and a microprocessor. The bulk density temperature compensation model established in step S2 is used to complete the density correction of non-phase change gas and phase change gas, including: For non-phase change gas, based on the ideal gas state equation, combined with the standard state, i.e. gas density at 20℃, 0.1MPa, the density correction at actual temperature and pressure is completed; For easy phase change gas, the gas saturation temperature is calculated by Antoine equation, if the cylinder wall temperature is lower than the saturation temperature, i.e. the gas is in liquid state, then combined with the liquid gas density and volume expansion coefficient, the actual density after phase change is corrected.

4. The method of claim 3, wherein the temperature compensation is performed by using a temperature sensor and a temperature compensation table. The cylinder volume temperature compensation model established in step S2 is configured to correct the effective volume of the cylinder at actual temperature according to the standard volume of the cylinder, the thermal expansion coefficient of the material and the difference between the cylinder wall and the standard temperature.

5. The method for compensating the temperature of the special gas filling quality according to claim 4, wherein, The weighing system temperature drift compensation model established in step S2 is configured to calculate the mass drift amount of the weighing system due to temperature based on the temperature drift coefficient obtained by calibration of the weighing system, combined with the difference between the actual temperature of the weighing system and the standard temperature.

6. The method for compensating the temperature of the special gas filling quality according to claim 5, wherein, The initial compensation before gas filling in step S3 includes: Combined with the ambient temperature, cylinder wall temperature and weighing system temperature collected before gas filling, and based on the collaborative calculation model, the initial corrected target mass of each component gas is calculated as the initial target of filling, and the initial opening degree of the air flow valve is set; the initial corrected target mass integrates the gas density correction, cylinder volume correction and weighing drift compensation results.

7. The method of claim 6, wherein the temperature compensation is performed by a microprocessor. The real-time compensation during gas filling in step S3 includes: Based on the preset time period, the temperature parameters are updated, and the density, volume and drift correction values are recalculated, and the target mass is dynamically adjusted; By comparing the difference between the actual filling mass and the corrected target mass through PID algorithm, the opening degree of the flow regulating valve is dynamically adjusted to ensure that the mass error is ≤±0.005g when the filling is terminated.

8. The method for compensating the temperature of the special gas filling quality according to claim 7, wherein, The multi-component collaborative compensation when multi-gas filling in step S3 includes: The compensation values are calculated separately for the density characteristics and temperature coefficients of different gases; and after completing the filling of one gas, the actual compensation amount of the corresponding gas is recorded, and based on the cylinder temperature at that time, the initial corrected target mass of the next gas is recalculated.

9. A special gas fill quality temperature compensation system, characterized by, The special gas filling mass temperature compensation system adopts the special gas filling mass temperature compensation method according to any one of claims 1 to 8 to perform special gas filling mass temperature compensation calculation, and completes the opening degree control of the flow regulating valve for gas filling control.

10. The special gas charge mass temperature compensation system of claim 9, wherein, The special gas filling mass temperature compensation system comprises: a data acquisition module configured to complete multi-dimensional temperature and associated parameter acquisition; a control module configured to complete dynamic compensation calculation based on a preset collaborative calculation model and output a filling control instruction; an execution module configured to complete flow regulating valve opening degree control based on the control instruction output by the control module; a user interface module configured to complete data interaction between the system and the user.

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