XPS analysis device for powder sample surface

Abstract

This invention discloses an XPS analysis device for powder sample surfaces, relating to the field of XPS analysis technology for powder sample surfaces. By setting up a sample analysis mechanism, multiple powder sample preparation mechanisms, and multiple channel opening and closing components, this invention can provide multiple sample compartments during use through the cooperation of multiple powder sample preparation mechanisms and a corresponding number of channel opening and closing components. This allows operators to analyze multiple samples simultaneously during XPS surface analysis of powder samples, improving analysis efficiency. Furthermore, since there are multiple different powder sample preparation mechanisms, this invention can prepare different test samples under different inert gas atmospheres when preparing powder samples into test blocks, thus avoiding contamination of the chamber by powder samples.

Description

Technical Field

[0001] This invention relates to the field of XPS analysis technology for powder sample surfaces, and particularly to an XPS analysis device for powder sample surfaces. Background Technology

[0002] X-ray photoelectron spectroscopy (XPS), an important surface analysis technique, has been widely used in materials science, chemistry, physics, and other fields since its development in the 1960s, thanks to its unique characteristics of chemical and surface sensitivity. With continuous advancements in science and technology, XPS technology plays an increasingly important role in surface-modified materials research, catalyst characterization, thin film analysis, and corrosion research. Modern XPS equipment has undergone continuous technological innovation, resulting in significant improvements in detection accuracy, analytical depth, and spatial resolution, making it an indispensable tool in the field of surface analysis.

[0003] Currently, when using XPS to perform surface analysis on powder samples, it is usually necessary to place the powder samples in a high-temperature or gaseous environment to analyze the surface data. However, in existing technologies, the sample holder for powder sample surface analysis only has one sample compartment, which leads to low efficiency and contamination of the chamber due to powder falling during the surface analysis. Summary of the Invention

[0004] The main objective of this invention is to provide an XPS analysis device for powder sample surfaces, which aims to solve the technical problem that in the prior art, when performing surface analysis on powder samples, there is only one sample compartment on the sample holder where the powder sample is placed. This results in low efficiency for operators and contamination of the compartment due to powder falling off.

[0005] To achieve the above objectives, in a first aspect, the present invention provides a powder sample surface XPS analysis device, comprising:

[0006] A sample analysis apparatus, comprising a sample analysis space and multiple sample loading / unloading ports, wherein the sample analysis space is used to analyze a test sample block made of powder sample in an inert gas atmosphere, and all the sample loading / unloading ports are connected to the sample analysis space and are distributed circumferentially at intervals on the sidewalls of the sample analysis apparatus; and,

[0007] Multiple powder sample preparation mechanisms are provided, the number of which corresponds to the number of sample inlet / outlet ports and is sealed and connected to them one-to-one. Each powder sample preparation mechanism has a sample placement space and a powder sample conveying channel that connects the sample placement space to the corresponding sample inlet / outlet. A discharge port is also provided on the side of each powder sample preparation mechanism away from the sample inlet / outlet, and this discharge port is connected to the sample placement space. The powder sample preparation mechanism can form the test sample block from the powder sample placed through the discharge port.

[0008] Multiple channel opening and closing components are provided, the number of which corresponds to the number of powder sample conveying channels and are installed one-to-one. Each channel opening and closing component has an open state and a closed state. In the open state, the channel opening and closing component opens the powder sample conveying channel, so that the sample block to be tested located in the sample placement space can be moved to the sample analysis space. In the closed state, the channel opening and closing component closes the powder sample conveying channel, so that the sample analysis mechanism can analyze the sample block to be tested.

[0009] In one embodiment, the powder sample preparation mechanism includes:

[0010] A sample preparation box is provided, which forms a sample placement space. The sample preparation box is sealed and connected to the sample analysis mechanism. The side of the sample preparation box connected to the sample analysis mechanism forms the powder sample conveying channel, and the side away from the sample analysis mechanism forms the discharge port.

[0011] A separating component is installed within the sample placement space and divides the sample placement space into a sample release space and a transition space. The sample release space is connected to the discharge port, and the transition space is connected to the powder sample conveying channel. The separating component has a connected state that connects the sample release space and the transition space, and a closed state that disconnects the sample release space and the transition space. An inert gas inlet pipe is connected to both the sample release space and the transition space, and a one-way valve for discharging waste material is provided at the bottom of both the sample release space and the transition space.

[0012] The sample preparation component is installed in the sample placement space. The sample preparation component can form the test sample block from the powder sample placed through the discharge port in the sample placement space. When the separating component is in the connected state and the powder sample conveying channel is in the open state, the sample preparation component can transfer the test sample block from the sample placement space through the transition space and the powder sample conveying channel to the analysis space.

[0013] In one embodiment, the sample preparation component includes:

[0014] A lifting assembly is installed at the bottom of the sampling space, and a lifting groove is formed on the top of the lifting assembly for forming the powder sample into the test sample block.

[0015] A transfer and conveying assembly is installed in the sample placement space and positioned above the supporting assembly. The transfer and conveying assembly is switchable between an extended state and a retracted state. In the extended state, the transfer and conveying assembly passes sequentially through the transition space and the powder sample transfer channel and extends into the analysis space. In the retracted state, the transfer and conveying assembly retracts and is placed within the sample placement space.

[0016] A sample preparation component is installed at the bottom of the transfer and conveying component. When the sample placement space is in an inert gas atmosphere, the powder sample can be placed into the support groove through the discharge port, and the transfer and conveying component can drive the sample preparation component to descend into the support groove and cooperate with the support component to press the powder sample into the test sample block.

[0017] In one embodiment, the lifting assembly includes a lifting block that magnetically engages with the bottom of the lofting space. The top of the lifting block forms the lifting groove, and a plurality of circumferentially spaced locking holes are formed on the sidewall of the groove. The sample preparation assembly locks with the locking holes and drives the lifting block to transfer from the lofting space to the analysis space.

[0018] In one embodiment, the sample preparation component includes:

[0019] A sample pressing block is connected to the transfer conveying assembly. The side wall of the sample pressing block is provided with a plurality of sliding holes spaced apart along the circumference. All the sliding holes can be aligned with the locking holes one by one when the sample pressing block is pressed into the lifting groove.

[0020] Multiple return springs, wherein the number of return springs corresponds to the number of sliding holes and they are installed in a one-to-one manner; and...

[0021] Multiple locking balls are provided, the number of which corresponds to the number of sliding holes, and the return spring can drive the corresponding locking ball to extend and engage in the corresponding locking hole.

[0022] In one embodiment, the transfer component includes:

[0023] A horizontal telescopic component is installed in the layout space, and the telescopic end of the horizontal telescopic component is oriented towards the transition space.

[0024] A guide rail is mounted on the telescopic end of the horizontal telescopic member and is arranged along the extension direction of the horizontal telescopic member, and the horizontal telescopic member can drive the guide rail to retract and accommodate the guide rail within the lofting space; and,

[0025] A vertical telescopic component is slidably mounted on the guide rail, and the sample pressing block is mounted on the telescopic end of the vertical telescopic component.

[0026] In one embodiment, the separating component includes:

[0027] The first sealing door has a first rotating end and a first sealing end at its two ends, respectively. The first rotating end is rotatably connected to the sample placement space via a first hinge, and the first sealing end is provided with a first embedding groove extending vertically.

[0028] A first automatic drive unit is installed in the sample placement space. The output end of the first automatic drive unit is rotatably connected to the first sealing door body. The first automatic drive unit is used to drive the first sealing door body to rotate around the first hinge.

[0029] A second sealing door body is disposed opposite to the first sealing door body. The two ends of the second sealing door body are a second rotating end and a second sealing end, respectively. The second rotating end is rotatably connected to the sample placement space via a second hinge. The second sealing end is provided with a first insert capable of sealingly engaging with the first insert groove.

[0030] The second automatic drive unit is installed in the sample placement space and is arranged opposite to the first automatic drive unit. The output end of the second automatic drive unit is rotatably connected to the second sealing door. The second automatic drive unit can drive the second sealing door to rotate around the second hinge so that the first sealing door cooperates with the first sealing door to divide the sample placement space into the sample placement space and the transition space.

[0031] In one embodiment, the second sealing end is formed with a first mounting groove, and the second sealing door body is formed with a first air passage. One end of the first air passage is connected to an external inert air source through a pipeline, and the other end extends to the first mounting groove and forms a plurality of spaced first air outlets.

[0032] The first embedding element includes:

[0033] Multiple first tension springs are distributed at intervals within the first mounting groove, and a first tension spring is provided between any two adjacent first air outlets, and all the first tension springs extend outward from the first mounting groove.

[0034] A first support plate, mounted on one end of all the first tension springs extending from the first mounting groove, the first support plate being accommodating within the first mounting groove; and...

[0035] The first flexible sealing cover has its open end embedded in the wall of the first mounting groove, so that the first flexible sealing cover and the first mounting groove enclose a first sealing chamber, and the first flexible sealing cover covers the outside of the first support plate.

[0036] The external inert gas source can inflate the first sealed cavity through all the first air outlets to push the first support plate and the first flexible sealing cover out of the first mounting groove and embed the first support plate into the first embedding groove.

[0037] In one embodiment, the channel opening / closing component includes:

[0038] The third sealing door has a third rotating end and a third sealing end at its two ends, respectively. The third rotating end is rotatably connected to the powder sample conveying channel via a third hinge, and the third sealing end is provided with a second embedded groove extending vertically.

[0039] The third automatic drive unit is installed in the powder sample conveying channel. The output end of the third automatic drive unit is rotatably connected to the third sealing door body. The third automatic drive unit is used to drive the third sealing door body to rotate around the third hinge.

[0040] A fourth sealing door body is disposed opposite to the third sealing door body. The fourth sealing door body has a fourth rotating end and a fourth sealing end at its two ends, respectively. The fourth rotating end is rotatably connected to the powder sample conveying channel via a fourth hinge. The fourth sealing end is provided with a second insert capable of sealingly engaging with the second insert groove.

[0041] A fourth automatic drive unit is installed in the powder sample conveying channel. The fourth automatic drive unit is arranged opposite to the third automatic drive unit. The output end of the second automatic drive unit is rotatably connected to the fourth sealing door. The fourth automatic drive unit can drive the fourth sealing door to rotate around the second hinge so that the third sealing door cooperates with the third sealing door to open or close the powder sample conveying channel.

[0042] In one embodiment, the fourth sealing end is formed with a second mounting groove, and the fourth sealing door body is formed with a second air passage. One end of the second air passage is connected to an external inert air source through a pipeline, and the other end extends to the second mounting groove and forms a plurality of spaced second air outlets.

[0043] The second embedding includes:

[0044] Multiple second tension springs are spaced apart in the second mounting groove, and a second tension spring is provided between any two adjacent second air outlets, and all the second tension springs extend outward from the second mounting groove.

[0045] A second support plate, mounted on one end of all the second tension springs extending out of the second mounting groove, the second support plate being accommodating within the second mounting groove; and...

[0046] The second flexible sealing cover has its open end embedded in the wall of the second mounting groove, so that the second flexible sealing cover and the second mounting groove enclose a second sealing chamber, and the second flexible sealing cover covers the outside of the second support plate.

[0047] The external inert gas source can inflate the second sealed cavity through all the second air outlets to push the second support plate and the second flexible sealing cover out of the second mounting groove and embed the second support plate into the second embedding groove.

[0048] The technical solution of this invention, by setting up a sample analysis mechanism, multiple powder sample preparation mechanisms, and multiple channel opening and closing components, allows for the analysis of test samples made from powder samples in an inert gas atmosphere. During use, a sample analysis space and multiple sample loading / unloading ports are provided within the sample analysis mechanism. All sample loading / unloading ports are connected to the sample analysis space and are distributed circumferentially on the sidewalls of the sample analysis mechanism. The number of powder sample preparation mechanisms corresponds to the number of sample loading / unloading ports and is sealed and connected to them one-to-one. A sample placement space is formed within the powder sample preparation mechanism, and a powder sample conveying channel is formed on the powder sample preparation mechanism, connecting the sample placement space to the corresponding sample loading / unloading ports. A discharge port is also provided on the side of the powder sample preparation mechanism away from the sample loading / unloading ports, and the discharge port is connected to the sample placement space. The powder sample preparation mechanism can prepare test samples from powder samples placed through the discharge port. The channel opening and closing components connect to the powder... The number of sample transfer channels is consistent and they are installed one-to-one. The channel opening and closing components have open and closed states. In the open state, the channel opening and closing components open the powder sample transfer channel, allowing the test sample block located in the sample placement space to move to the sample analysis space. In the closed state, the channel opening and closing components close the powder sample transfer channel, allowing the sample analysis mechanism to analyze the test sample block. Thus, this invention can provide multiple sample compartments through the cooperation of multiple powder sample preparation mechanisms and corresponding number of channel opening and closing components. This allows operators to analyze multiple samples simultaneously when performing XPS surface analysis on powder samples, improving analysis efficiency. Furthermore, since there are multiple different powder sample preparation mechanisms, this invention can prepare different test sample blocks under different inert gas atmospheres when preparing powder samples into test sample blocks, thus avoiding contamination of the chamber by powder samples. Attached Figure Description

[0049] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0050] Figure 1 A schematic diagram of the powder sample surface XPS analysis device provided by the present invention from one perspective;

[0051] Figure 2 for Figure 1 Another structural schematic diagram of the powder sample surface XPS analysis device illustrated in the example;

[0052] Figure 3 for Figure 1 A schematic diagram of the structure of the powder sample preparation mechanism in the example;

[0053] Figure 4 for Figure 3 A schematic diagram of the internal structure of the powder sample preparation mechanism in the example;

[0054] Figure 5 for Figure 4 A schematic diagram of the structure of the partition component in the example;

[0055] Figure 6 for Figure 5 A schematic diagram of the internal structure of the second sealing door in the example;

[0056] Figure 7 for Figure 4 A schematic diagram of the transfer and transmission component in the example;

[0057] Figure 8 for Figure 7 A schematic diagram of the internal structure of the sample preparation component in the example;

[0058] Figure 9 for Figure 1 A simplified structural diagram of the sample analysis mechanism shown in the example;

[0059] Figure 10 for Figure 1 A schematic diagram of the channel opening and closing component in the example;

[0060] Figure 11 for Figure 10 The diagram shows the structure of the fourth sealing door in the example.

[0061] Explanation of icon numbers:

[0062] 100. Sample analysis mechanism; 110. Sample analysis space; 120. Sample loading / unloading port; 200. Powder sample preparation mechanism; 210. Powder sample conveying channel; 220. Discharge port; 230. Sample block to be tested; 300. Channel opening / closing component; 240. Sample preparation box; 250. Separating component; 260. Sample placement space; 270. Transition space; 280. One-way valve; 290. Sample preparation component; 291. Lifting assembly; 292. Lifting groove; 293. Transfer and conveying assembly; 294. Sample preparation assembly; 11. Lifting block; 12. Locking hole; 13. Sample pressing block; 14. Return spring; 15. Locking ball; 16. Horizontal telescopic component; 17. Guide rail; 18. Vertical telescopic component; 251. First sealing door; 252. First hinge; 253. 254. First embedded groove; 255. First automatic drive component; 256. Second sealing door body; 257. First embedded component; 258. Second automatic drive component; 259. Second hinge; 10. First mounting groove; 20. First air passage; 21. First air outlet; 22. First tension spring; 23. First support plate; 24. First flexible sealing cover; 310. Third sealing door body; 320. Third hinge; 330. Second embedded groove; 340. Third automatic drive component; 350. Fourth sealing door body; 360. Second embedded component; 370. Fourth automatic drive component; 380. Fourth hinge; 361. Second mounting groove; 362. Second air passage; 363. Second air outlet; 364. Second tension spring; 365. Second support plate; 366. Second flexible sealing cover.

[0063] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0064] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0065] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0066] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0067] The applicant's research found that X-ray photoelectron spectroscopy (XPS), as an important surface analysis technique, has been widely used in materials science, chemistry, physics, and other fields since its development in the 1960s, thanks to its unique characteristics of chemical state sensitivity and surface sensitivity. With the continuous advancement of science and technology, XPS technology plays an increasingly important role in surface modification material research, catalyst characterization, thin film analysis, and corrosion research. Modern XPS equipment, through continuous technological innovation, has significantly improved in detection accuracy, analytical depth, and spatial resolution, becoming an indispensable tool in the field of surface analysis.

[0068] Currently, when using XPS to perform surface analysis on powder samples, it is usually necessary to place the powder samples in a high-temperature or gaseous environment to analyze the surface data. However, in existing technologies, the sample holder for powder sample surface analysis only has one sample compartment, which leads to low efficiency and contamination of the chamber due to powder falling during the surface analysis.

[0069] This invention proposes an XPS analysis device for the surface of powder samples.

[0070] Please see Figures 1 to 11For ease of understanding, this powder sample surface XPS analysis device includes a sample analysis mechanism 100, multiple powder sample preparation mechanisms 200, and multiple channel opening and closing components 300. The sample analysis mechanism 100 contains a sample analysis space 110 and multiple sample loading / unloading ports 120. The sample analysis space 110 is used to analyze a test sample block 230 made from powder samples in an inert gas atmosphere. All sample loading / unloading ports 120 are connected to the sample analysis space 110 and are distributed circumferentially at intervals on the sidewall of the sample analysis mechanism 100. The number of powder sample preparation mechanisms 200 is the same as the number of sample loading / unloading ports 120, and they are sealed and connected to each other. A sample placement space is formed within each powder sample preparation mechanism 200, and a powder sample transfer channel 210 is formed on each powder sample preparation mechanism 200. The sample placement space is connected to the corresponding sample pick-up and drop-off port 120. The powder sample preparation mechanism 200 is also provided with a discharge port 220 on the side away from the sample pick-up and drop-off port 120. The discharge port 220 is connected to the sample placement space. The powder sample preparation mechanism 200 can make the powder sample placed in the discharge port 220 into a test sample block 230. The number of channel opening and closing components 300 and the powder sample conveying channels 210 are the same and are installed in a one-to-one correspondence. The channel opening and closing components 300 have an open state and a closed state. In the open state, the channel opening and closing components 300 open the powder sample conveying channel 210 so that the test sample block 230 located in the sample placement space can be moved to the sample analysis space 110. In the closed state, the channel opening and closing components 300 close the powder sample conveying channel 210 so that the sample analysis mechanism 100 can analyze the test sample block 230.

[0071] Specifically, the sample analysis mechanism 100 has a vertical cavity structure, within which a sample analysis space 110 is formed. This sample analysis space 110 is used to analyze a test sample block 230 made from powder samples in an inert gas atmosphere. Multiple sample loading / unloading ports 120 are formed on the sidewalls of the sample analysis mechanism 100. All sample loading / unloading ports 120 are connected to the sample analysis space 110 and are distributed circumferentially at intervals on the sidewalls of the sample analysis mechanism 100. The number of powder sample preparation mechanisms 200 is the same as the number of sample loading / unloading ports 120, and they are sealed and connected to each other. Each powder sample preparation mechanism 200 has a sample placement space, and a powder sample transfer channel 210 is formed on the powder sample preparation mechanism 200, which connects the sample placement space to the corresponding sample loading / unloading port 120. The powder sample preparation mechanism 200 is also provided with a discharge port 220 on the side away from the sample pick-up and drop-out port 120. The discharge port 220 is connected to the sample placement space. The powder sample preparation mechanism 200 can prepare the powder sample placed in the discharge port 220 into a test sample block 230. The number of channel opening and closing components 300 is the same as that of the powder sample conveying channels 210 and they are installed in a one-to-one correspondence. The channel opening and closing components 300 have an open state and a closed state. In the open state, the channel opening and closing components 300 open the powder sample conveying channel 210 so that the test sample block 230 located in the sample placement space can be moved to the sample analysis space 110. In the closed state, the channel opening and closing components 300 close the powder sample conveying channel 210 so that the sample analysis mechanism 100 can analyze the test sample block 230.

[0072] This application's powder sample surface XPS analysis device achieves simultaneous preparation and analysis of multiple powder samples by arranging multiple sample loading / unloading ports 120 at circumferential intervals on the side wall of the sample analysis mechanism 100, and correspondingly configuring multiple powder sample preparation mechanisms 200. When surface analysis of powder samples is required, operators can simultaneously or sequentially feed powder samples into multiple powder sample preparation mechanisms 200 through multiple loading ports 220. Each powder sample preparation mechanism 200 prepares the powder sample into a test sample block 230, which is then located in its respective sample placement space. During analysis, by controlling the corresponding channel opening / closing component 300 to switch to the open state, the corresponding powder sample conveying channel 210 is opened, allowing the test sample block 230 to move into the sample analysis space 110 via the powder sample conveying channel 210 and the sample loading / unloading ports 120. Subsequently, the channel opening / closing component 300 switches to the closed state, closing the powder sample conveying channel 210. At this time, the sample analysis mechanism 100 can perform XPS analysis on the test sample block 230 in an inert gas atmosphere. Once the analysis of one sample block 230 is completed, it can be removed from the sample analysis space 110, and at the same time, another powder sample transfer channel 210 can be opened to move the next sample block 230 into the sample analysis space 110 for analysis, thereby realizing continuous analysis of multiple powder samples.

[0073] Furthermore, the powder sample transfer channel 210, which connects the sample placement space with the corresponding sample pick-up / drop-off port 120, provides a dedicated channel for the transfer of the test sample block 230. This channel allows the test sample block 230 to move directly from the sample placement space to the sample analysis space 110, reducing turns and open spaces in the transfer path and lowering the risk of powder falling. The channel opening / closing component 300, when closed, can completely seal the powder sample transfer channel 210, isolating the sample placement space from the sample analysis space 110. Thus, while the sample analysis mechanism 100 analyzes a particular test sample block 230, the environment within other powder sample preparation mechanisms 200 remains independent and is not affected by the inert gas atmosphere or the analysis process within the sample analysis space 110, ensuring the independence of each test sample block 230 and the accuracy of the analysis results.

[0074] Multiple sample pick-up and drop-off ports 120 are evenly spaced along the circumferential direction of the sidewall of the sample analysis mechanism 100, with equal circumferential angles between adjacent ports. This uniformly distributed layout allows multiple powder sample preparation mechanisms 200 to be symmetrically arranged around the sample analysis mechanism 100, facilitating operation from different angles and improving operational convenience. Simultaneously, the uniform distribution structure also ensures more balanced stress distribution within the sample analysis mechanism 100, preventing localized stress concentration caused by the connection of multiple powder sample preparation mechanisms 200 and guaranteeing the overall structural stability.

[0075] In this embodiment, by setting up a sample analysis mechanism 100, multiple powder sample preparation mechanisms 200, and multiple channel opening and closing components 300, during use, a sample analysis space 110 and multiple sample loading and unloading ports 120 are provided within the sample analysis mechanism 100. The sample analysis space 110 is used to analyze the test sample block 230 made from the powder sample in an inert gas atmosphere. All sample loading and unloading ports 120 are connected to the sample analysis space 110 and are distributed circumferentially at intervals on the sidewall of the sample analysis mechanism 100. The number of powder sample preparation mechanisms 200 is... The sample inlet / outlet 120 is of the same number and is sealed and connected to each of the corresponding sample inlets / outlets. A sample placement space is formed within the powder sample preparation mechanism 200. A powder sample conveying channel 210 is formed on the powder sample preparation mechanism 200, connecting the sample placement space to the corresponding sample inlet / outlet 120. A discharge port 220 is also provided on the side of the powder sample preparation mechanism 200 away from the sample inlet / outlet 120, and the discharge port 220 is connected to the sample placement space. The powder sample preparation mechanism 200 can prepare the test sample from the powder sample placed through the discharge port 220. The number of block 230, channel opening and closing components 300, and powder sample conveying channels 210 are consistent and installed in a one-to-one correspondence. The channel opening and closing components 300 have an open state and a closed state. In the open state, the channel opening and closing components 300 open the powder sample conveying channel 210, allowing the test sample block 230 located in the sample placement space to move to the sample analysis space 110. In the closed state, the channel opening and closing components 300 close the powder sample conveying channel 210, allowing the sample analysis mechanism 100 to analyze the test sample block 230. This allows the invention to be used in a manner that... The combination of multiple powder sample preparation mechanisms 200 and corresponding number of channel opening and closing components 300 provides multiple sample compartments, thereby enabling operators to analyze multiple samples simultaneously when performing XPS surface analysis on powder samples, improving analysis efficiency. At the same time, since there are multiple different powder sample preparation mechanisms 200, the present invention can prepare different test sample blocks 230 under different inert gas atmospheres when preparing powder samples into test sample blocks 230, thereby avoiding contamination of the chamber by powder samples.

[0076] In one embodiment, the powder sample preparation mechanism 200 includes a sample preparation box 240, a separating component 250, and a sample preparation component 290. The sample preparation box 240 forms a sample placement space and is sealed to the sample analysis mechanism 100. A powder sample conveying channel 210 is formed on the side of the sample preparation box 240 connected to the sample analysis mechanism 100, and a discharge port 220 is formed on the side away from it. The separating component 250 is installed within the sample placement space and divides the sample placement space into a discharge space 260 and a transition space 270. The discharge space 260 communicates with the discharge port 220, and the transition space 270 communicates with the powder sample conveying channel 210. The separating component 250 has a communicating state connecting the discharge space 260 and the transition space 270. The sampling space 260 and the transition space 270 are closed. The sampling space 260 and the transition space 270 are connected by an inert gas blowing pipe. The bottom of the sampling space 260 and the transition space 270 are both equipped with a one-way valve 280 for discharging waste. The sample preparation component 290 is installed in the sampling space 260. The sample preparation component 290 can make the powder sample put in through the discharge port 220 into a test sample block 230 in the sampling space 260. When the separating component 250 is in the connected state and the powder sample conveying channel 210 is in the open state, the sample preparation component 290 can transfer the test sample block 230 from the sampling space 260 through the transition space 270 and the powder sample conveying channel 210 to the analysis space.

[0077] Specifically, a powder sample conveying channel 210 is formed on the side of the sample preparation box 240 connected to the sample analysis mechanism 100. The powder sample conveying channel 210 is connected to the sample pick-up and drop-out port 120, so that the sample block 230 to be tested can be conveyed from the sample placement space in the sample preparation box 240 to the sample analysis space 110. A discharge port 220 is formed on the side of the sample preparation box 240 away from the sample analysis mechanism 100, through which the operator can put the powder sample into the sample preparation box 240.

[0078] The separating component 250 is installed within the sample placement space, dividing it into two relatively independent areas: a placement space 260 and a transition space 270. The placement space 260 is connected to the discharge port 220, through which the powder sample enters and is used to prepare the test sample block 230. The transition space 270 is connected to the powder sample conveying channel 210, serving as an intermediate transition area for transferring the test sample block 230 from the placement space 260 to the sample analysis space 110. The separating component 250 has two operating states: a connected state and a closed state. In the closed state, the separating component 250 completely isolates the placement space 260 and the transition space 270, making the two spaces independent. In the connected state, the separating component 250 opens the connecting channel between the placement space 260 and the transition space 270, allowing the test sample block 230 to be transferred from the placement space 260 to the transition space 270.

[0079] The sample placement space is divided into a placement space 260 and a transition space 270 by the separator 250, achieving spatial isolation between the powder sample preparation process and the test sample block 230 transfer process. During the preparation of the test sample block 230, the separator 250 is in a closed state, and the placement space 260 and the transition space 270 are isolated from each other. The powder sample is prepared by pressing, heating and other processes in the placement space 260. Powder scattering, gas release and other phenomena that may occur during the preparation process are confined to the placement space 260 and will not enter the transition space 270 and the powder sample transfer channel 210, thus avoiding contamination of the sample analysis space 110. After the test sample block 230 is prepared, the separating component 250 switches to the connected state, opening the connecting channel between the sample placement space 260 and the transition space 270. The sample preparation component 290 pushes the test sample block 230 from the sample placement space 260 to the transition space 270. Subsequently, the channel opening and closing component 300 opens the powder sample transfer channel 210, and the test sample block 230 enters the sample analysis space 110 through the transition space 270 and the powder sample transfer channel 210. After the test sample block 230 is transferred, the separating component 250 returns to the closed state, and the transition space 270 and the sample placement space 260 are isolated again. At this time, even if there is a small amount of residual powder or impurities in the transition space 270, it will not affect the preparation of a new batch of powder samples in the sample placement space 260, ensuring the independence and cleanliness of each batch of powder sample preparation during continuous operation.

[0080] An inert gas inlet pipe is connected to the sample preparation space 260 and the transition space 270. This inert gas inlet pipe continuously introduces inert gas into the sample preparation space 260 and the transition space 270 during powder sample preparation and the transfer of the test sample 230, creating an inert gas atmosphere within these spaces to prevent the powder sample or test sample 230 from reacting with oxygen or water vapor in the air. This is especially important for highly reactive powder samples, such as metal powders and alloy powders, which are prone to oxidation in air, leading to changes in surface condition and affecting the accuracy of XPS analysis results. By establishing an inert gas atmosphere in the sampling space 260 and the transition space 270, the surface condition of the powder sample and the test sample block 230 can be effectively protected, ensuring that the surface of the test sample block 230 is not oxidized or contaminated throughout the entire process from preparation to entering the sample analysis space 110, thereby improving the reliability of XPS analysis results.

[0081] Simultaneously, the inert gas blowing pipeline introduces inert gas into the sample placement space 260 and the transition space 270, which also serves to purge dust and impurities within the space. During the powder sample preparation process, operations such as pressing and heating may generate a small amount of powder scattering or gas release. The continuous blowing of inert gas can blow these powders and gases towards the one-way valve 280 at the bottom of the sample placement space 260 and the transition space 270, and discharge them outside the sample preparation box 240 through the one-way valve 280, maintaining the cleanliness of the sample placement space 260 and the transition space 270. During the transfer of the test sample block 230, the blowing of inert gas can also prevent powder adhering to the surface of the test sample block 230 from falling off and scattering in the transition space 270 and the powder sample transfer channel 210 during the transfer process, reducing the risk of powder falling and contaminating the sample analysis space 110.

[0082] Both the sampling space 260 and the transition space 270 are equipped with one-way valves 280 for discharging waste. The one-way valves 280 allow gaseous and solid waste to escape from the sampling space 260 and the transition space 270, but prevent external gas from entering, thus ensuring the sealing of the sampling space 260 and the transition space 270. During powder sample preparation, when the sample preparation component 290 presses the powder sample, a small amount of powder may overflow from the pressing area. This overflowing powder is blown towards the bottom of the sampling space 260 by the inert gas and discharged outside the sample preparation box 240 through the one-way valve 280, preventing the overflowing powder from accumulating in the sampling space 260 and affecting the preparation of subsequent batches of powder samples. During the transfer of the test sample block 230, loose powder particles may be attached to the surface of the test sample block 230. These powder particles may fall off during the transfer process. The fallen powder is blown to the bottom of the transition space 270 by the purging action of inert gas and discharged from the sample preparation box 240 through the one-way valve 280, preventing the powder from entering the powder sample transfer channel 210 and the sample analysis space 110.

[0083] The one-way valve 280 enables automatic discharge of waste from the sampling space 260 and transition space 270, eliminating the need for operators to periodically open the sample preparation box 240 for cleaning. This reduces manual operation and lowers the risk of external air contamination to the sampling space 260 and transition space 270 during cleaning, while also improving the automation level and continuous operation capability of the device. The one-way conduction characteristic of the one-way valve 280 ensures that external air does not enter the sampling space 260 and transition space 270 through the one-way valve 280 while waste is being discharged, maintaining the stability of the inert gas atmosphere within the sampling space 260 and transition space 270.

[0084] Through the cooperation of the sample preparation box 240, the separator 250, the sample preparation component 290, the inert gas inlet pipe, and the one-way valve 280, the powder sample preparation mechanism 200 of this embodiment achieves spatial isolation and environmental protection between the powder sample preparation process and the transfer process of the test sample block 230. The separator 250 divides the sample placement space into a placement space 260 and a transition space 270, so that the powder sample preparation is carried out independently in the placement space 260. The powder scattering and gas release generated during the preparation process are confined to the placement space 260 and will not contaminate the transition space 270 and the sample analysis space 110. The transition space 270 serves as an intermediate area for the transfer of the test sample block 230, playing a buffering and transitional role during the transfer process. Even if a small amount of powder falls off the test sample block 230 during the transfer process, it will only be discharged within the transition space 270 through the one-way valve 280 and will not enter the sample analysis space 110. An inert gas blowing pipeline establishes an inert gas atmosphere within the sample preparation space 260 and the transition space 270, protecting the surface of the powder sample and the test sample block 230 from oxidation. Simultaneously, it purges dust and impurities from the space, and, in conjunction with a one-way valve 280, automatically discharges waste, maintaining the cleanliness of the sample preparation space 260 and the transition space 270. The sample preparation component 290 integrates the preparation and transfer functions of the test sample block 230, simplifying the structure and improving transfer efficiency and reliability. Overall, the powder sample preparation mechanism 200 of this embodiment effectively solves the problem of powder falling and contaminating the sample analysis space 110 during powder sample preparation and transfer, while ensuring that the powder sample and the test sample block 230 are prepared and transferred in an inert gas atmosphere, improving the accuracy and reliability of XPS analysis results.

[0085] In one embodiment, the sample preparation component 290 includes a lifting assembly 291, a transfer and conveying assembly 293, and a sample preparation component 294. The lifting assembly 291 is installed at the bottom of the sample placement space 260, and a lifting groove 292 for forming a test sample block 230 from the top of the lifting assembly 291 is formed. The transfer and conveying assembly 293 is installed in the sample placement space 260 and is located above the lifting assembly 291. The transfer and conveying assembly 293 can switch between an extended state and a retracted state. In the extended state, the transfer and conveying assembly 294... 3. It passes through the transition space 270 and the powder sample transfer channel 210 in sequence and extends to the analysis space; in the retracted state, the transfer and transfer assembly 293 retracts and is placed in the sample placement space 260, and the sample preparation assembly 294 is installed at the bottom of the transfer and transfer assembly 293. When the sample placement space 260 is in an inert gas atmosphere, the powder sample can be placed in the support groove 292 through the discharge port 220, and the transfer and transfer assembly 293 can drive the sample preparation assembly 294 to descend into the support groove 292, and cooperate with the support assembly 291 to press the powder sample into the test sample block 230.

[0086] In this embodiment, when it is necessary to prepare a powder sample, the operator first introduces inert gas into the sample preparation space 260 through the inert gas supply system to displace the air in the sample preparation space 260, thus creating an inert gas atmosphere in the sample preparation space 260. This prevents the powder sample from reacting with oxygen, water vapor, etc., in the air during the sample preparation process, which could affect the surface condition of the sample block 230 to be tested. After the sample preparation space 260 reaches the required inert gas atmosphere, the sealing cover at the discharge port 220 is opened, and the powder sample is placed into the sample preparation space 260 through the discharge port 220. The powder sample falls into the lifting groove 292 at the top of the lifting assembly 291, where the lifting groove 292 contains and positions the powder sample. The sealing cover is then closed to maintain the sealed environment of the sample preparation space 260.

[0087] Next, the transfer and conveying component 293 drives the sample preparation component 294 to descend vertically. The sample preparation component 294 moves downward until it extends into the support groove 292. The bottom pressing surface of the sample preparation component 294 contacts the powder sample in the support groove 292. The sample preparation component 294 continues to descend, applying a pressing force to the powder sample. During the pressing process, the support groove 292 of the support component 291 provides bottom support, and the sample preparation component 294 applies pressure from above. The powder sample is squeezed between the support groove 292 and the sample preparation component 294, and the powder particles fill and compact each other, gradually forming a test sample block 230 with a certain density and strength. The shape of the support groove 292 determines the outer contour of the test sample block 230. By controlling the descent stroke of the sample preparation component 294 and the applied pressing force, the thickness and density of the test sample block 230 can be precisely controlled to meet the requirements of XPS analysis for sample surface flatness and density.

[0088] In one embodiment, the lifting assembly 291 includes a lifting block 11, which magnetically engages with the bottom of the sample placement space 260. A lifting groove 292 is formed on the top of the lifting block 11, and a plurality of locking holes 12 are formed on the side wall of the groove 292 at intervals along the circumference. The sample preparation assembly 294 locks with the locking holes 12 and drives the lifting block 11 to be transferred from the sample placement space 260 to the analysis space.

[0089] Specifically, the powder sample preparation mechanism 200 includes a sample placement space, also known as the sample placement space 260, which is used to hold the powder sample and complete the preparation process of the powder sample into the test sample block 230. A lifting assembly 291 is disposed within the sample placement space 260. The lifting block 11, as the main structure of the lifting assembly 291, is magnetically connected to the bottom of the sample placement space 260. Specifically, the bottom of the sample placement space 260 is provided with magnetic material or a permanent magnet, and the lifting block 11 is made of a magnetically attractive material, or the lifting block 11 has embedded magnetic material. Magnetic attraction allows the lifting block 11 to be stably adsorbed onto the bottom of the sample placement space 260. This magnetic connection method ensures that the lifting block 11 has a stable initial position within the sample placement space 260, while also facilitating its separation from the bottom of the sample placement space 260 when needed, thus achieving the detachability and mobility of the lifting block 11.

[0090] The top of the support block 11 forms a support groove 292, which is used to accommodate the powder sample and the test sample block 230 formed after pressing. The support groove 292 provides a dedicated space for the powder sample. When the powder sample is placed into the sample placement space 260 through the discharge port 220, the powder sample falls into the support groove 292. The support groove 292 provides circumferential restraint for the powder sample, preventing the powder sample from scattering or moving within the sample placement space 260. When the pressing assembly presses the powder sample, the support groove 292 provides a support reference for the pressing process. The pressing piston moves downward to apply pressure to the powder sample in the support groove 292. Under the restraint of the support groove 292, the powder sample is pressed into a test sample block 230 that matches the shape of the support groove 292. The sidewall of the support groove 292 provides circumferential restraint for the powder sample, ensuring the shape regularity and dimensional consistency of the test sample block 230.

[0091] The support groove 292 has multiple circumferentially spaced locking holes 12 on its sidewall, providing locking positions for the locking connection between the sample preparation assembly 294 and the support block 11. The sample preparation assembly 294 includes a locking structure that mates with the locking holes 12, allowing it to be inserted into and locked into the locking holes 12. After the sample block 230 is prepared, when it needs to be transferred from the sample placement space 260 to the analysis space, the locking structure of the sample preparation assembly 294 is inserted into the locking holes 12 on the sidewall of the support groove 292, forming a reliable locking connection. At this time, the sample preparation assembly 294 and the support block 11 form an integrated structure. Subsequently, the sample preparation component 294 moves the lifting block 11. Since the lifting block 11 and the bottom of the sample placement space 260 are magnetically attracted, the pulling force applied by the sample preparation component 294 can overcome the magnetic attraction, causing the lifting block 11 to separate from the bottom of the sample placement space 260. Driven by the sample preparation component 294, the lifting block 11 moves through the powder sample transfer channel 210 to the sample pick-up and drop-off port 120, and then enters the sample analysis space 110. Throughout the transfer process, the sample block 230 is always contained in the lifting groove 292. The lifting groove 292 provides stable support and protection for the sample block 230, preventing it from moving, tipping over, or being damaged during the transfer process.

[0092] The structure of multiple locking holes 12 spaced circumferentially along the sidewall of the lifting groove 292 provides multiple selectable locking positions for the locking between the sample preparation component 294 and the lifting block 11. In actual operation, the sample preparation component 294 can choose any set of locking holes 12 for locking. This multi-position locking structure improves the convenience and flexibility of the locking operation between the sample preparation component 294 and the lifting block 11. Even if a certain locking hole 12 cannot be used normally due to wear or contamination, the sample preparation component 294 can still choose other locking holes 12 for locking, ensuring the reliability and continuous working capability of the device. At the same time, the circumferential spacing of the multiple locking holes 12 also makes the pulling force applied by the sample preparation component 294 to the lifting block 11 more balanced, avoiding tilting or deflection of the lifting block 11 during the transmission process due to single-point force, ensuring the smooth movement of the lifting block 11 and the stability of the test sample block 230.

[0093] In one embodiment, the sample preparation assembly 294 includes a sample preparation pressing block 13, multiple return springs 14, and multiple locking balls 15. The sample preparation pressing block 13 is connected to the transfer and conveying assembly 293. Multiple sliding holes are provided on the side wall of the sample preparation pressing block 13 at intervals along the circumference. All sliding holes can be aligned with the locking holes 12 one by one when the sample preparation pressing block 13 is pressed into the lifting groove 292. The number of return springs 14 is the same as the number of sliding holes and they are installed one by one. The number of locking balls 15 is the same as the number of sliding holes and they are set one by one. The return springs 14 can drive the corresponding locking balls 15 to extend and engage in the corresponding locking holes 12.

[0094] In this embodiment, the automatic locking function of the sample pressing block 13 in the pressing position is achieved through the cooperation of the sample pressing block 13, the return spring 14, and the locking ball 15. During the pressing of the powder sample, the transfer and conveying component 293 drives the sample pressing block 13 to move downward. When the sample pressing block 13 presses against the powder sample in the support groove 292 and applies a pressing force, the sliding hole and the locking hole 12 automatically align. The return spring 14 drives the locking ball 15 to extend and engage in the locking hole 12, completing the locking of the sample pressing block 13. This automatic locking structure eliminates the need for additional locking operations, simplifies the pressing process, and improves work efficiency. At the same time, the locking connection formed by the locking ball 15 engaging in the locking hole 12 can withstand a large axial force, ensuring that the sample pressing block 13 remains stable during the pressing process and will not rebound or shift due to the pressing force. This ensures that the powder sample can be fully compacted to form a uniformly dense test sample block 230.

[0095] Multiple sliding holes are evenly spaced along the circumference of the sidewall of the sample pressing block 13, with equal circumferential angles between adjacent sliding holes. Correspondingly, multiple locking holes 12 on the sidewall of the support groove 292 are also evenly spaced along the circumference. This evenly distributed layout allows multiple locking balls 15 to simultaneously align and engage with the corresponding locking holes 12 when the sample pressing block 13 is pressed into the support groove 292, forming a multi-point evenly distributed locking connection. The multi-point locking structure makes the force on the sample pressing block 13 more balanced, avoiding tilting or displacement of the sample pressing block 13 during the pressing process due to single-point or local locking, ensuring that the powder sample is subjected to uniform pressing force, and improving the density uniformity and surface flatness of the test sample block 230.

[0096] In one embodiment, the transfer and conveying assembly 293 includes a horizontal telescopic member 16, a guide rail 17, and a vertical telescopic member 18. The horizontal telescopic member 16 is installed in the lofting space 260, with its telescopic end facing the transition space 270. The guide rail 17 is installed at the telescopic end of the horizontal telescopic member 16 and is arranged along the extension direction of the horizontal telescopic member 16. The horizontal telescopic member 16 can drive the guide rail 17 to retract and accommodate the guide rail 17 within the lofting space 260. The vertical telescopic member 18 is slidably installed on the guide rail 17, and the sample pressing block 13 is installed at the telescopic end of the vertical telescopic member 18.

[0097] In this embodiment, the transfer and conveying assembly 293 achieves precise movement of the test sample block 230 in both the horizontal and vertical directions through the cooperation of the horizontal telescopic member 16, the guide rail 17, and the vertical telescopic member 18. The horizontal telescopic member 16 enables the guide rail 17 to extend and retract in the horizontal direction, allowing the guide rail 17 to move between the sample placement space 260, the transition space 270, the powder sample conveying channel 210, and the sample analysis space 110, providing a horizontal movement path for the transfer of the test sample block 230. The guide rail 17 provides sliding support and guidance for the vertical telescopic member 18, ensuring the stability of the vertical telescopic member 18 during horizontal movement. At the same time, the vertical telescopic member 18 can perform vertical lifting and lowering movements at any position on the guide rail 17, realizing the pressing of the powder sample by the sample pressing block 13 and the placement and removal of the test sample block 230.

[0098] In one embodiment, the separating component 250 includes a first sealing door 251, a first automatic drive 254, a second sealing door 255, and a second automatic drive 257. The first sealing door 251 has a first rotating end and a first sealing end at its two ends, respectively. The first rotating end is rotatably connected to the sample placement space via a first hinge 252. The first sealing end is provided with a first vertically extending embedding groove 253. The first automatic drive 254 is installed in the sample placement space, and its output end is rotatably connected to the first sealing door 251. The first automatic drive 254 drives the first sealing door 251 to rotate around the first hinge 252. The second sealing door 255 is positioned opposite the first sealing door 251. The second sealing door has a second rotating end and a second sealing end at its two ends. The second rotating end is rotatably connected to the sample placement space via a second hinge 258. The second sealing end is provided with a first insert 256 that can seal with the first insert groove 253. The second automatic drive 257 is installed in the sample placement space and is positioned opposite to the first automatic drive 254. The output end of the second automatic drive 257 is rotatably connected to the second sealing door 255. The second automatic drive 257 can drive the second sealing door 255 to rotate around the second hinge 258 so that the first sealing door 251 cooperates with the first sealing door 251 to divide the sample placement space into a sample placement space 260 and a transition space 270.

[0099] Specifically, the powder sample preparation mechanism 200 includes a sample placement space, which requires different functional area divisions at different working stages. The separating component 250 divides the sample placement space into a placement space 260 and a transition space 270. The placement space 260 is used to accommodate powder samples and perform pressing and sample preparation operations, while the transition space 270 is located between the placement space 260 and the powder sample conveying channel 210, serving as a buffer for atmosphere transition and sample transfer. The first sealing door 251 and the second sealing door 255, as the main structure of the separating component 250, are positioned opposite each other within the sample placement space. When they are closed, they separate the sample placement space; when they are open, the sample placement space remains connected.

[0100] The first sealing door 251 has a first rotating end and a first sealing end at its two ends, respectively. The first rotating end is rotatably connected to the side wall of the sample placement space via a first hinge 252, which provides rotational support and a rotation axis for the first sealing door 251. The first sealing door 251 can rotate around the axis of the first hinge 252 to achieve opening and closing actions. The first sealing end is located at the end of the first sealing door 251 away from the first rotating end. The first sealing end is provided with a first embedding groove 253 extending vertically. The first embedding groove 253 is an elongated groove structure that extends along the height direction of the first sealing door 251. The first embedding groove 253 is used to cooperate with the first embedding member 256 on the second sealing door 255 to form a sealing connection.

[0101] The first automatic drive unit 254 is installed on the side wall or bottom of the sample placement space, and its output end is rotatably connected to the first sealing door 251. The first automatic drive unit 254 can output rotational or push-pull power to drive the first sealing door 251 to rotate around the first hinge 252. Specifically, the first automatic drive unit 254 can be an electric push rod, a pneumatic push rod, a hydraulic push rod, or a motor-driven linkage mechanism, etc. When the output end of the first automatic drive unit 254 extends, it pushes the first sealing door 251 to rotate around the first hinge 252 towards the center of the sample placement space, rotating the first sealing door 251 from the open state to the closed state; when the output end of the first automatic drive unit 254 retracts, it pulls the first sealing door 251 to rotate around the first hinge 252 towards the side wall of the sample placement space, rotating the first sealing door 251 from the closed state to the open state. The first automatic drive unit 254 enables automated opening and closing control of the first sealing door 251, eliminating the need for manual operation and improving operational efficiency and automation.

[0102] The second sealing door 255 is disposed opposite to the first sealing door 251 within the sample placement space, and the structure of the second sealing door 255 corresponds to that of the first sealing door 251. The two ends of the second sealing door 255 are a second rotating end and a second sealing end, respectively. The second rotating end is rotatably connected to the side wall of the sample placement space via a second hinge 258. The second hinge 258 provides rotational support and a rotation axis for the second sealing door 255, and the second hinge 258 and the first hinge 252 are located on opposite sides of the sample placement space. The second sealing end is located at the end of the second sealing door 255 furthest from the second rotating end, and is provided with a first insert 256. The first insert 256 is a vertically extending convex structure, and its shape and size are adapted to the first insert groove 253, allowing it to be inserted into the first insert groove 253 and form a sealing fit with it.

[0103] The second automatic drive unit 257 is installed on the side wall or bottom of the sample placement space. The second automatic drive unit 257 is positioned opposite the first automatic drive unit 254, located on opposite sides of the sample placement space. The output end of the second automatic drive unit 257 is rotatably connected to the second sealing door 255. The second automatic drive unit 257 can drive the second sealing door 255 to rotate around the second hinge 258, realizing the opening and closing action of the second sealing door 255. The structure and working principle of the second automatic drive unit 257 are the same as or similar to those of the first automatic drive unit 254, and it can be an electric push rod, a pneumatic push rod, a hydraulic push rod, or a motor-driven linkage mechanism, etc.

[0104] In actual operation, when the sample placement space needs to be divided into a placement space 260 and a transition space 270, the control system simultaneously controls the first automatic drive unit 254 and the second automatic drive unit 257. The first automatic drive unit 254 drives the first sealing door 251 to rotate around the first hinge 252 toward the center of the sample placement space, and the second automatic drive unit 257 drives the second sealing door 255 to rotate around the second hinge 258 toward the center of the sample placement space. The first sealing door 251 and the second sealing door 255 move toward each other. When the first sealing door 251 and the second sealing door 255 rotate to the closed position, the first insert 256 on the second sealing door 255 inserts into the first insert groove 253 on the first sealing door 251, forming a fitting connection between the first insert 256 and the first insert groove 253. The outer surface of the first insert 256 is tightly fitted with the inner surface of the first insert groove 253, forming a sealed contact between them, preventing gas leakage at the joint between the first sealing door 251 and the second sealing door 255. At this time, the first sealing door 251 and the second sealing door 255 together form a sealing partition, dividing the sample placement space into two independent spatial areas, namely the placement space 260 and the transition space 270.

[0105] The sample placement space 260 is located on one side of the first sealing door 251 and the second sealing door 255, and is used to contain powder samples and perform pressing sample preparation operations. After the partition 250 is closed, the sample placement space 260 forms a relatively sealed spatial environment. The inert gas supply system can introduce inert gas into the sample placement space 260 to displace the air inside the sample placement space 260, so that the sample placement space 260 reaches the required inert gas atmosphere. Due to the sealing effect of the first sealing door 251 and the second sealing door 255, the inert gas will not leak from the sample placement space 260 to the transition space 270 or other areas of the sample placement space, ensuring the purity and stability of the inert gas atmosphere in the sample placement space 260, and providing a good atmospheric protection environment for the powder sample preparation operation.

[0106] The transition space 270 is located on the other side of the first sealing door 251 and the second sealing door 255, and is connected to the powder sample transfer channel 210. When the separating component 250 is closed, the transition space 270 is isolated from the sample placement space 260. The transition space 270 can maintain an atmospheric pressure air atmosphere or be vented with other gas atmospheres. When the test sample block 230 is prepared and needs to be transferred from the sample placement space 260 to the sample analysis space 110, the separating component 250 is first opened to connect the sample placement space 260 with the transition space 270. The transfer and conveying component 293 moves the test sample block 230 from the sample placement space 260 to the transition space 270. Then, the separating component 250 is closed, re-isolating the sample placement space 260 from the transition space 270. The sample placement space 260 returns to a sealed state, allowing the preparation of the next batch of powder samples to continue. The test sample block 230 located in the transition space 270 continues to be transferred to the sample analysis space 110 through the powder sample transfer channel 210.

[0107] The fitting structure of the first insert 256 and the first insert groove 253 provides a reliable sealing connection between the first sealing door 251 and the second sealing door 255. The first insert 256 extends vertically, consistent with the extension direction of the first insert groove 253, forming a continuous sealing contact along the entire height direction, thus avoiding any sealing gaps. Simultaneously, the fitting structure of the first insert 256 into the first insert groove 253 also has positioning and centering functions. When the first sealing door 251 and the second sealing door 255 are closed, the first insert 256 guides the second sealing door 255 to precisely align with the first sealing door 251, ensuring the engagement accuracy between the two sealing doors and improving the reliability and repeatability of the sealing effect.

[0108] The relative arrangement of the first automatic drive component 254 and the second automatic drive component 257 enables the first sealing door 251 and the second sealing door 255 to operate synchronously, rotating simultaneously to the closed position or simultaneously to the open position, thus achieving rapid opening and closing of the separating component 250. Compared to a structure with only a single sealing door, the double-door structure allows for a smaller rotation angle for each sealing door, resulting in faster opening and closing. Simultaneously, the two sealing doors abut against each other when closed, forming a more stable sealing barrier, improving the reliability and pressure resistance of the seal. When inert gas is introduced into the sampling space 260, the gas pressure inside the sampling space 260 may be higher than that in the transition space 270. Under the influence of the pressure difference, the first sealing door 251 and the second sealing door 255 are pressed against each other, making the sealing contact between the first insert 256 and the first insert groove 253 tighter, further improving the sealing effect.

[0109] In one embodiment, a first mounting groove 19 is formed at the second sealing end, and a first air passage 20 is formed inside the second sealing door body 255. One end of the first air passage 20 is connected to an external inert air source through a pipeline, and the other end extends to the first mounting groove 19 and forms a plurality of spaced first air outlets 21.

[0110] The first insert 256 includes a first support plate 23, a first flexible sealing cover 24, and multiple first tension springs 22. The first tension springs 22 are spaced apart in the first mounting groove 19, and a first tension spring 22 is disposed between any two adjacent first air outlets 21. All the first tension springs 22 extend outward from the first mounting groove 19. The first support plate 23 is installed at one end of all the first tension springs 22 that extend out of the first mounting groove 19. The first support plate 23 can be received in the first mounting groove 19. The open end of the first flexible sealing cover 24 is embedded into the groove wall of the first mounting groove 19, so that the first flexible sealing cover 24 and the first mounting groove 19 enclose a sealed chamber, and the first flexible sealing cover 24 covers the outside of the first support plate 23. An external inert gas source can fill the sealed chamber through all the first air outlets 21 to push the first support plate 23 and the first flexible sealing cover 24 out of the first mounting groove 19 and embed the first support plate 23 into the first insert groove 253.

[0111] Specifically, a second sealing end is disposed on a second sealing door 255, which can be opened or closed relative to the sample analysis space 110 to achieve sealed isolation of the sample analysis space 110. A first mounting groove 19 is formed on the second sealing end. The first mounting groove 19 is a recessed structure used to accommodate a portion of the components of the first insert 256. A first gas passage 20 is formed inside the second sealing door 255. The first gas passage 20 is a gas channel that penetrates the interior of the second sealing door 255. One end of the first gas passage 20 is connected to an external inert gas source through a pipeline. The external inert gas source can be a nitrogen source, an argon source, or other inert gas supply device, which can provide a stable inert gas pressure. The other end of the first gas passage 20 extends to the first mounting groove 19, and a plurality of spaced first gas outlets 21 are formed in the first mounting groove 19. These first gas outlets 21 are distributed along the bottom or wall of the first mounting groove 19 and are used to release inert gas into the first mounting groove 19.

[0112] The first insert 256, as a key structure for achieving a sealing fit between the second sealing end and the first insert groove 253, comprises three main components: a first support plate 23, a first flexible sealing cover 24, and multiple first tension springs 22. The multiple first tension springs 22 are spaced apart within the first mounting groove 19. One end of each first tension spring 22 is fixed to the bottom of the first mounting groove 19, and the other end extends outward from the first mounting groove 19. In the arrangement of multiple first air outlets 21, a first tension spring 22 is positioned between any two adjacent first air outlets 21. This alternating distribution structure ensures that the first tension springs 22 and the first air outlets 21 are spaced apart, guaranteeing both the supporting function of the springs and ensuring that the gas is evenly distributed within the sealing chamber. All the first tension springs 22 extend from one end of the first mounting groove 19 and are connected to the first support plate 23. The first support plate 23 is a rigid flat plate structure that can remain flat under the support of the first tension springs 22. The size of the first support plate 23 is adapted to the opening of the first mounting groove 19. When the first tension spring 22 is in the retracted state, the first support plate 23 can be completely contained in the first mounting groove 19. The outer surface of the first support plate 23 is basically flush with or slightly lower than the opening plane of the first mounting groove 19.

[0113] The first flexible sealing cover 24 is a cover structure made of flexible material. The first flexible sealing cover 24 has an open end and a closed end. The size of the open end is adapted to the opening of the first mounting groove 19, and the size of the closed end is adapted to the size of the first support plate 23. The open end of the first flexible sealing cover 24 is embedded into the groove wall of the first mounting groove 19. Specifically, an annular embedding groove is formed on the groove wall of the first mounting groove 19, and the edge of the open end of the first flexible sealing cover 24 is embedded in the annular embedding groove. Through the embedding fit and the flexible deformation of the material, the open end of the first flexible sealing cover 24 and the groove wall of the first mounting groove 19 form a sealed connection. The closed end of the first flexible sealing cover 24 is fixedly connected to or covers the outside of the first support plate 23, so that the first flexible sealing cover 24 and the first support plate 23 form an integrated structure. The first flexible sealing cover 24 and the first mounting groove 19 are connected by a sealing connection between the open end of the first flexible sealing cover 24 and the groove wall, and the first flexible sealing cover 24 is connected to the first support plate 23. The first flexible sealing cover 24 and the first mounting groove 19 enclose a sealed chamber. The internal space of the sealed chamber accommodates the first tension spring 22 and the first air outlet 21. The sealed chamber is isolated from the external environment and is only connected to the external inert air source through the first air passage 20.

[0114] When the second sealing door 255 is closed and no external inert gas source supplies air to the first air passage 20, the first tension spring 22 is in a naturally extended or slightly stretched state. The first support plate 23, supported by the first tension spring 22, is located within or slightly protrudes from the first mounting groove 19. The first flexible sealing cover 24 is in a relaxed or slightly stretched state, and the volume of the sealing chamber is relatively small. When a sealing fit is required between the second sealing end and the first embedded groove 253, the control system activates the external inert gas source. Inert gas enters the first air passage 20 through a pipeline, and the first air passage 20 guides the inert gas to the first mounting groove 19. The inert gas is then ejected through multiple first air outlets 21 and fills the sealing chamber. Since the sealed chamber is formed by the first flexible sealing cover 24 and the first mounting groove 19, and the first flexible sealing cover 24 is made of flexible material, as the inert gas continues to fill the sealed chamber, the gas pressure in the sealed chamber gradually increases. The gas pressure acts on the inner surface of the first flexible sealing cover 24 and the first support plate 23, generating an outward thrust on the first support plate 23.

[0115] Driven by gas pressure, the first support plate 23 overcomes the tension of the first tension spring 22 and moves away from the first mounting groove 19, further stretching the first tension spring 22. The movement of the first support plate 23 causes the closed end of the first flexible sealing cover 24 to move outward. Under the action of gas pressure, the first flexible sealing cover 24 expands and unfolds, changing from its original relaxed or slightly stretched state to a fully expanded state. The sidewalls of the first flexible sealing cover 24 are opened, and the volume of the sealing chamber increases accordingly. The first support plate 23 and the first flexible sealing cover 24 continue to move outward until the first support plate 23 is fully extended out of the first mounting groove 19. The first support plate 23 moves to the position of the first embedding groove 253, and the outer edge of the first support plate 23 is aligned with the opening of the first embedding groove 253. Under the continuous action of gas pressure, the first support plate 23 is embedded into the first embedding groove 253. The outer surface of the first support plate 23 is in contact with the groove wall of the first embedding groove 253. The side wall of the first flexible sealing cover 24 is in contact with the peripheral structure of the first embedding groove 253 in the expanded state, thereby achieving a sealing fit between the second sealing end and the first embedding groove 253.

[0116] During the process of the first support plate 23 being embedded in the first embedding groove 253, the first flexible sealing cover 24 always covers the outside of the first support plate 23. The flexibility of the first flexible sealing cover 24 allows it to adapt to the movement and deformation of the first support plate 23. When the first support plate 23 extends out of the first mounting groove 19, the first flexible sealing cover 24 unfolds along the moving direction of the first support plate 23. When the first support plate 23 is embedded in the first embedding groove 253, the first flexible sealing cover 24 fits into the gap between the first support plate 23 and the first embedding groove 253. Through the flexible deformation of the flexible sealing cover and the support of gas pressure, the first flexible sealing cover 24 can fill the tiny gap between the first support plate 23 and the first embedding groove 253, forming a reliable sealing contact, preventing outside air from entering the sample analysis space 110, and ensuring the inert gas environment in the sample analysis space 110.

[0117] The structure of multiple spaced first air outlets 21 allows inert gas to be uniformly filled into the sealed chamber, avoiding uneven gas pressure distribution within the sealed chamber. A first tension spring 22 is positioned between any two adjacent first air outlets 21, ensuring that the first tension spring 22 experiences uniform gas pressure during gas filling. The tension of the first tension spring 22 remains consistent, and the first support plate 23 remains flat under the combined support of multiple first tension springs 22, preventing tilting or deflection. This ensures that the first support plate 23 can be accurately embedded into the first embedding groove 253, improving the accuracy and reliability of the sealing fit.

[0118] The first tension spring 22 provides a restoring force to the first support plate 23. When the external inert gas source stops supplying gas or the gas in the sealed chamber is discharged, the gas pressure in the sealed chamber decreases. The elastic restoring force of the first tension spring 22 drives the first support plate 23 to retract into the first mounting groove 19. The first support plate 23 exits from the first embedding groove 253 and returns to the first mounting groove 19. The first flexible sealing cover 24 then contracts, and the sealed chamber returns to its initial state. This pneumatically driven and spring-reset structure enables the automatic extension and retraction of the first embedding member 256 without the need for an additional mechanical drive device. The structure is simple, the operation is reliable, and the complexity and failure rate of the device are reduced.

[0119] The first flexible sealing cover 24 is made of a flexible material, such as rubber, silicone, polyurethane, or other elastomers. These materials have good elastic deformation capabilities and sealing performance, maintaining sealing performance during repeated expansion and contraction, and are not prone to fatigue damage. The flexibility of the first flexible sealing cover 24 allows it to adapt to shape changes and positional deviations of the first embedding groove 253. Even if there are manufacturing errors in the size or position of the first embedding groove 253, the first flexible sealing cover 24 can still achieve a fit with the first embedding groove 253 through its own flexible deformation, improving the tolerance and adaptability of the sealing fit.

[0120] The first support plate 23 and the first flexible sealing cover 24 are extended by filling the sealed chamber with an external inert gas source. Compared with mechanical drive, this method has the advantages of fast response speed, high control precision, and no mechanical wear. Pneumatic drive enables rapid extension and retraction, shortening the opening and closing time of the second sealing door 255 and improving the working efficiency of the device. At the same time, pneumatic drive eliminates mechanical friction and wear problems, maintaining stable driving performance during long-term use and extending the service life of the first insert 256. In addition, the inert gas itself has a protective function; the inert gas filling the sealed chamber protects the first tension spring 22 and the first support plate 23, preventing these components from being oxidized or contaminated during sample analysis, further improving the reliability of the device.

[0121] The other end of the first air passage 20 extends to the first mounting groove 19, forming a structure with multiple spaced-apart first air outlets 21. This allows the first air passage 20 to evenly distribute the inert gas to multiple locations within the sealed chamber, avoiding problems such as excessively high local pressure caused by concentrated gas ejection or excessive local expansion of the first flexible sealing cover 24. The spaced distribution of the multiple first air outlets 21 ensures that the gas pressure acts evenly on all areas of the first support plate 23. Under the push of the uniform gas pressure, the first support plate 23 moves smoothly without tilting or deflection, ensuring the accuracy of the first support plate 23's embedding into the first embedding groove 253 and the reliability of the sealing fit.

[0122] In one embodiment, the channel opening and closing component 300 includes a third sealing door 310, a third automatic drive 340, a fourth sealing door 350, and a fourth automatic drive 370. The third sealing door 310 has a third rotating end and a third sealing end at its two ends, respectively. The third rotating end is rotatably connected to the powder sample conveying channel 210 via a third hinge 320. The third sealing end is provided with a second vertically extending embedding groove 330. The third automatic drive 340 is installed in the powder sample conveying channel 210, and its output end is rotatably connected to the third sealing door 310. The third automatic drive 340 drives the third sealing door 310 to rotate around the third hinge 320. The fourth sealing door 350 is connected to the third sealing door 310. The fourth sealing door 350 is configured with a fourth rotating end and a fourth sealing end at its two ends, respectively. The fourth rotating end is rotatably connected to the powder sample conveying channel 210 via a fourth hinge 380. The fourth sealing end is provided with a second insert 360 that can seal and cooperate with the second insert groove 330. The fourth automatic drive 370 is installed in the powder sample conveying channel 210. The fourth automatic drive 370 is configured opposite to the third automatic drive 340. The output end of the fourth automatic drive 370 is rotatably connected to the fourth sealing door 350. The fourth automatic drive 370 can drive the fourth sealing door 350 to rotate around the second hinge 258, so that the third sealing door 310 cooperates with the third sealing door 310 to open or close the powder sample conveying channel 210.

[0123] In this embodiment, the automatic opening and closing control of the powder sample conveying channel 210 is achieved through the split structure of the third sealing door 310 and the fourth sealing door 350, combined with the coordinated drive of the third automatic drive unit 340 and the fourth automatic drive unit 370. When the powder sample or the test sample 230 needs to be conveyed through the conveying channel, the control system controls the third automatic drive unit 340 and the fourth automatic drive unit 370 to open the two sealing doors, and the conveying channel is in an open state, allowing the powder sample or the test sample 230 to pass smoothly. After the conveying is completed, the control system controls the two automatic drive units to close the two sealing doors, restoring the conveying channel to a sealed state, preventing external environmental contamination of the inside of the conveying channel, and maintaining a vacuum or inert gas environment inside the conveying channel to avoid environmental leakage. This automatic opening and closing control method requires no manual operation, improves work efficiency, and ensures the reliability and stability of the conveying channel's sealing performance.

[0124] In one embodiment, a second mounting groove 361 is formed at the fourth sealing end, and a second air passage 362 is formed inside the fourth sealing door body 350. One end of the second air passage 362 is connected to an external inert air source through a pipeline, and the other end extends to the second mounting groove 361 and forms a plurality of spaced second air outlets 363.

[0125] The second insert 360 includes a second support plate 365, a second flexible sealing cover 366, and multiple second tension springs 364. The second tension springs 364 are spaced apart within the second mounting groove 361, and a second tension spring 364 is disposed between any two adjacent second air outlets 363. All the second tension springs 364 extend outward from the second mounting groove 361. The second support plate 365 is installed at one end of all the second tension springs 364 extending outward from the second mounting groove 361. The second support plate 365 can accommodate the second... Within the mounting groove 361, the open end of the second flexible sealing cover 366 is embedded into the groove wall of the second mounting groove 361, so that the second flexible sealing cover 366 and the second mounting groove 361 enclose a sealed chamber, and the second flexible sealing cover 366 covers the outside of the second support plate 365; wherein, an external inert gas source can fill the sealed chamber through all the second air outlets 363 to push the second support plate 365 and the second flexible sealing cover 366 out of the second mounting groove 361 and embed the second support plate 365 into the second embedding groove 330.

[0126] In this embodiment, the second insert 360 achieves its inflation-driven telescopic function through the cooperation of the second air passage 362, the second air outlet 363, the second tension spring 364, the second support plate 365, and the second flexible sealing cover 366. Compared to using driving devices such as motors, cylinders, or hydraulic cylinders, the inflation-driven method has a simpler structure, requiring no additional driving device or transmission components, thus reducing the size and weight of the second insert 360 and lowering manufacturing costs. The second flexible sealing cover 366 serves both as the enclosure structure of the sealed chamber and as a flexible component for telescopic movement, exhibiting a high degree of integration and good sealing performance. The second tension spring 364 provides the power for the second insert 360 to retract. When inflation or deflation stops, the second tension spring 364 can automatically pull the second insert 360 back to its retracted state without the need for an additional reset device.

[0127] Multiple second air outlets 363 are spaced apart, with a second tension spring 364 positioned between any two adjacent second air outlets 363. This staggered arrangement allows inert gas to be evenly filled into all areas of the sealed chamber, resulting in uniform gas pressure distribution on the second support plate 365. This ensures the second support plate 365 can extend smoothly and evenly, preventing tilting or displacement during extension. Simultaneously, the second tension springs 364 are spaced apart within the second mounting groove 361, providing uniform support and tension to the second support plate 365. This ensures the second support plate 365 maintains a parallel posture to the fourth sealing end face during extension and retraction, improving the fitting accuracy and sealing effect between the second insert 360 and the second insert groove 330.

[0128] The above are merely exemplary embodiments of the present invention and do not limit the scope of the patent of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect applications in other related technical fields, are included within the scope of patent protection of the present invention.

Claims

1. A powder sample surface XPS analysis device, characterized by, include: A sample analysis apparatus, comprising a sample analysis space and multiple sample loading / unloading ports, wherein the sample analysis space is used to analyze a test sample block made of powder sample in an inert gas atmosphere, and all the sample loading / unloading ports are connected to the sample analysis space and are distributed circumferentially at intervals on the sidewalls of the sample analysis apparatus; and, Multiple powder sample preparation mechanisms are provided, the number of which corresponds to the number of sample pick-up and drop-off ports and is sealed and connected to them one by one. Each powder sample preparation mechanism has a sample placement space and a powder sample conveying channel, which connects the sample placement space to the corresponding sample pick-up and drop-off port. A discharge port is also provided on the side of the powder sample preparation mechanism away from the sample pick-up and drop-off port, and the discharge port is connected to the sample placement space. The powder sample preparation mechanism can form the test sample block from the powder sample placed in through the discharge port. as well as, Multiple channel opening and closing components are provided, the number of which is consistent with the number of powder sample conveying channels and they are installed in a one-to-one correspondence. Each channel opening and closing component has an open state and a closed state. In the open state, the channel opening and closing component opens the powder sample conveying channel so that the sample block to be tested located in the sample placement space can be moved to the sample analysis space. In the closed state, the channel opening and closing component closes the powder sample delivery channel, so that the sample analysis mechanism can analyze the sample block to be tested.

2. The powder sample surface XPS analysis apparatus according to claim 1, wherein The powder sample preparation mechanism includes: A sample preparation box is provided, which forms a sample placement space. The sample preparation box is sealed and connected to the sample analysis mechanism. The side of the sample preparation box connected to the sample analysis mechanism forms the powder sample conveying channel, and the side away from the sample analysis mechanism forms the discharge port. A separating component is installed within the sample placement space and divides the sample placement space into a sample release space and a transition space. The sample release space is connected to the discharge port, and the transition space is connected to the powder sample conveying channel. The separating component has a connected state that connects the sample release space and the transition space, and a closed state that disconnects the sample release space and the transition space. An inert gas inlet pipe is connected to both the sample release space and the transition space, and a one-way valve for discharging waste material is provided at the bottom of both the sample release space and the transition space. The sample preparation component is installed in the sample placement space. The sample preparation component can form the test sample block from the powder sample placed through the discharge port in the sample placement space. When the separating component is in the connected state and the powder sample conveying channel is in the open state, the sample preparation component can transfer the test sample block from the sample placement space to the sample analysis space in sequence through the transition space and the powder sample conveying channel.

3. The powder sample surface XPS analysis apparatus according to claim 2, wherein The sample preparation component includes: A lifting assembly is installed at the bottom of the sample preparation space, and a top of the lifting assembly is formed with a lifting groove for making the powder sample into the sample block to be tested; A transfer conveying assembly is installed at the sample preparation space, and the transfer conveying assembly is located above the lifting assembly, and the transfer conveying assembly is switchable between an extended state and a retracted state, in the extended state, the transfer conveying assembly sequentially passes through the transition space and the powder sample conveying channel and extends to the sample analysis space, in the retracted state, the transfer conveying assembly is retracted and placed in the sample preparation space; and A sample making assembly is installed at the bottom of the transfer conveying assembly, when the sample preparation space is in an inert gas atmosphere, the powder sample can be placed in the lifting groove through the feeding opening, and the transfer conveying assembly can drive the sample making assembly to descend into the lifting groove, and cooperate with the lifting assembly to press the powder sample into the sample block to be tested.

4. The powder sample surface XPS analysis apparatus according to claim 3, wherein The lifting assembly comprises a lifting block which is magnetically attracted to the bottom of the sample preparation space, and a top of the lifting block is formed with the lifting groove, a plurality of lock holes are formed on a groove side wall of the lifting groove and are distributed in a circumferential direction, the sample making assembly is locked with the lock holes and drives the lifting block to be transferred from the sample preparation space to the sample analysis space.

5. The powder sample surface XPS analysis apparatus according to claim 4, wherein The sample making assembly comprises: A sample making pressing block which is connected with the transfer conveying assembly, a plurality of sliding holes are arranged on a side wall of the sample making pressing block and are distributed in a circumferential direction, and all the sliding holes are aligned with the lock holes one by one when the sample making pressing block is pressed into the lifting groove; A plurality of reset springs which are consistent with and correspond to the number of the sliding holes; and A plurality of locking balls which are consistent with and correspond to the number of the sliding holes, the reset springs can drive the corresponding locking balls to extend and be clamped in the corresponding lock holes.

6. The powder sample surface XPS analysis apparatus according to claim 5, wherein The transfer conveying assembly comprises: A horizontal telescopic member which is installed at the sample preparation space, and a telescopic end of the horizontal telescopic member is arranged towards the transition space; A guide rail which is installed at the telescopic end of the horizontal telescopic member and is arranged along an extension direction of the horizontal telescopic member, and the horizontal telescopic member can drive the guide rail to retract and be accommodated in the sample preparation space; and A vertical telescopic member which is slidably installed at the guide rail, and the sample making pressing block is installed at a telescopic end of the vertical telescopic member.

7. The powder sample surface XPS analysis apparatus according to claim 5, wherein The separation component comprises: A first sealing door body which has a first rotating end and a first sealing end at two ends respectively, the first rotating end is rotatably connected with the sample placing space through a first hinge, and the first sealing end is provided with a first embedding groove which extends in a vertical direction; A first automatic driving member is installed in the sample placement space, an output end of the first automatic driving member is rotationally connected with the first sealing door body, and the first automatic driving member is used to drive the first sealing door body to rotate around the first hinge; A second sealing door body is arranged opposite to the first sealing door body, two ends of the second sealing door body are respectively a second rotating end and a second sealing end, the second rotating end is rotationally connected with the sample placement space through a second hinge, and the second sealing end is provided with a first embedding member capable of sealingly cooperating with the first embedding groove; and A second automatic driving member is installed in the sample placement space, the second automatic driving member is arranged opposite to the first automatic driving member, an output end of the second automatic driving member is rotationally connected with the second sealing door body, and the second automatic driving member can drive the second sealing door body to rotate around the second hinge, so that the first sealing door body cooperates with the first sealing door body to divide the sample placement space into the sample placement space and the transition space.

8. The powder sample surface XPS analysis apparatus according to claim 7, wherein The second sealing end is formed with a first mounting groove, a first air channel is formed in the second sealing door body, one end of the first air channel is communicated with an external inert gas source through a pipeline, and the other end extends to the first mounting groove and forms a plurality of first gas outlets which are spaced apart; The first embedding member comprises: A plurality of first tension springs are spaced apart in the first mounting groove, one first tension spring is arranged between any two adjacent first gas outlets, and all the first tension springs extend out of the first mounting groove; A first supporting plate is installed at one end of all the first tension springs extending out of the first mounting groove, and the first supporting plate can be accommodated in the first mounting groove; and A first flexible sealing cover is embedded into the groove wall of the first mounting groove, so that the first flexible sealing cover and the first mounting groove form a first sealing chamber, and the first flexible sealing cover covers the first supporting plate outside. The external inert gas source can inflate the first sealing chamber through all the first gas outlets, so as to push the first supporting plate and the first flexible sealing cover out of the first mounting groove and embed the first supporting plate into the first embedding groove.

9. A powder sample surface XPS analysis apparatus according to any one of claims 7 or 8, wherein The channel opening and closing member comprises: A third sealing door body has two ends which are respectively a third rotating end and a third sealing end, the third rotating end is rotationally connected with the powder sample conveying channel through a third hinge, and the third sealing end is provided with a second embedding groove extending in the vertical direction; A third automatic driving member is installed in the powder sample conveying channel, an output end of the third automatic driving member is rotationally connected with the third sealing door body, and the third automatic driving member is used to drive the third sealing door body to rotate around the third hinge. A fourth sealing door body is arranged opposite to the third sealing door body, and two ends of the fourth sealing door body are a fourth rotating end and a fourth sealing end respectively. The fourth rotating end is rotatably connected to the powder sample conveying channel through a fourth hinge. The fourth sealing end is provided with a second embedding part capable of sealingly cooperating with the second embedding groove. A fourth automatic driving part is installed on the powder sample conveying channel. The fourth automatic driving part is arranged opposite to the third automatic driving part. An output end of the second automatic driving part is rotatably connected to the fourth sealing door body. The fourth automatic driving part can drive the fourth sealing door body to rotate around the fourth hinge, so as to open or close the powder sample conveying channel in cooperation with the third sealing door body.

10. The powder sample surface XPS analysis apparatus according to claim 9, wherein The fourth sealing end is formed with a second installation groove. A second air duct is formed in the fourth sealing door body. One end of the second air duct is communicated with an external inert gas source through a pipeline. The other end of the second air duct extends to the second installation groove and forms a plurality of second air outlets which are spaced apart. The second embedding part includes: A plurality of second tension springs are spaced apart in the second installation groove. Any two adjacent second air outlets are provided with a second tension spring. All the second tension springs extend out of the second installation groove. A second support plate is installed on one end of all the second tension springs extending out of the second installation groove. The second support plate can be accommodated in the second installation groove. A second flexible sealing cover is embedded into the groove wall of the second installation groove. The second flexible sealing cover and the second installation groove form a second sealing cavity. The second flexible sealing cover covers the second support plate. The external inert gas source can inflate the second sealing cavity through all the second air outlets, so as to push the second support plate and the second flexible sealing cover out of the second installation groove and embed the second support plate into the second embedding groove.

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