Waste liquid collecting device for semiconductor organic alkali purification equipment

Abstract

The invention belongs to the technical field of waste liquid collection and treatment, and particularly relates to a waste liquid collection device for semiconductor organic alkali purification equipment, the waste liquid collection device comprises a base, a filter cartridge, an ultrafiltration membrane layer, a shrinkage type rotary fixing mechanism and a steam guide type energy collection mechanism, the ultrafiltration membrane layer is arranged on the inner wall of the filter cartridge, the upper end of the filter cartridge is open, and the lower end of the filter cartridge is open; the base is arranged on the bottom wall of the filter cartridge, the shrinkage type rotating and fixing mechanism is arranged on one side of the filter cartridge, and the steam guide type energy collecting mechanism is arranged on the side wall of the filter cartridge. Solid substances in waste liquid can be induced to be attached to the inner wall of the liquid separation barrel, so that the volume of the waste liquid is greatly reduced, the solid substances are conveniently and intensively collected, meanwhile, impact force and heat energy of steam can be utilized, on one hand, the attached solid substances are cleaned in an auxiliary mode, on the other hand, the viscosity of the waste liquid is reduced, and the cleaning efficiency is improved. And the membrane flux of an ultrafiltration membrane layer is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of waste liquid collection and treatment, and particularly relates to a waste liquid collection device for a semiconductor organic alkali purification device. BACKGROUND

[0002] The semiconductor manufacturing industry includes the manufacturing of semiconductor electronic components such as integrated circuits, discrete devices, optoelectronic devices, sensors, etc., and the common point is that similar semiconductor manufacturing process technologies are used, and the photolithography process is the most precise and critical part. In the process of developing the exposed photoresist after photolithography, a large amount of high-purity photoresist stripping liquid needs to be used, so a large amount of waste liquid will be generated, which needs to be collected and treated.

[0003] The existing waste liquid collection device for a semiconductor organic alkali purification device has the following problems: The existing waste liquid collection device for a semiconductor organic alkali purification device has the following problems: Secondly, the conventional waste liquid collection device for a semiconductor organic alkali purification device does not have the capability of recycling the steam generated when the waste water is heat treated; Therefore, it cannot meet the use requirements of the existing waste liquid collection device for a semiconductor organic alkali purification device. SUMMARY

[0004] In view of the above problems, the present application provides a waste liquid collection device for a semiconductor organic alkali purification device, which can induce the solid matter in the waste liquid to adhere to the inner wall of the separation cylinder, thereby greatly reducing the volume of the waste liquid, facilitating the centralized collection of the solid matter, and utilizing the impact force and heat energy of the steam to assist in cleaning the adhered solid matter and reduce the viscosity of the waste liquid, thereby improving the membrane flux of the ultrafiltration membrane layer.

[0005] The technical scheme adopted by the scheme is as follows: the waste liquid collecting device for the semiconductor organic alkali purification equipment provided by the scheme comprises a base, a filter cylinder, an ultrafiltration membrane layer, a body-shrinking solid-rotating mechanism and a steam-guiding energy-collecting mechanism, the ultrafiltration membrane layer is arranged on the inner wall of the filter cylinder, the filter cylinder is provided with an open upper end, the base is arranged on the bottom wall of the filter cylinder, the body-shrinking solid-rotating mechanism is arranged on one side of the filter cylinder, and the steam-guiding energy-collecting mechanism is arranged on the side wall of the filter cylinder.

[0006] As further preferred of the scheme, the water conveying assembly comprises a water conveying pipe, a bearing frame, a one-way water conveying valve, a water outlet, a water pump and a water outlet pipe, a plurality of water pumps are arranged on the bottom wall of the filter cylinder, the water pumping end of the water pump extends to the inside of the filter cylinder below the ultrafiltration membrane layer, the water conveying pipe is arranged through the inner wall of the base and the water outlet end of the water pump, the bearing frame is arranged on the end of the base away from the filter cylinder, the one-way water conveying valve is arranged outside the water conveying pipe below the bearing frame, the water outlet pipe is arranged through the bearing frame and is connected to the end of the water conveying pipe away from the water pump, the water outlet pipe is rotationally connected to the water conveying pipe, and the water outlet is arranged on the side wall of the water outlet pipe.

[0007] In use, the liquid separation cylinder is placed on the upper wall of the cushion block in the bearing frame, the inner diameter of the annular sealing ring is smaller than the outer diameter of the water outlet pipe, the sleeve is sleeved on the outer side of the water outlet pipe by virtue of the elastic deformation of the annular sealing ring, the heat-conducting copper column penetrates into the inside of the liquid separation cylinder through the heating port by virtue of the elastic deformation of the annular sealing ring, the inner wall of the liquid separation cylinder is provided in a rough state, and the annular heating disc heats the inside of the liquid separation cylinder through the heat-conducting copper column. The waste liquid enters the inside of the filter cylinder for preliminary filtration, and the solid impurities in the waste liquid are intercepted by the ultrafiltration membrane layer in the inside of the filter cylinder. The water pump extracts the waste liquid after preliminary filtration in the inside of the filter cylinder through the water extraction end. The waste liquid flows into the inside of the water outlet pipe through the water conveying pipe. The water outlet pipe conveys the waste liquid to the inside of the liquid separation cylinder through the sleeve through the water outlet. The waste liquid entering the inside of the liquid separation cylinder is heated by the heat-conducting copper column. The waste liquid undergoes evaporation after being heated; The centrifugal motor drives the driving gear to rotate through the power end. The driving gear drives the sleeve to rotate through the driven gear. The sleeve drives the liquid separation cylinder to rotate. The liquid separation cylinder drives the annular box to rotate along the inner wall of the bearing frame through the heat-conducting copper column. The liquid separation cylinder drives the waste liquid in the inside of the liquid separation cylinder to perform centrifugal motion. Since the inner wall of the liquid separation cylinder is relatively rough, it can provide an attachment point for the solid substances of the waste liquid. As the liquid level of the waste liquid in the inside of the liquid separation cylinder decreases, the solid substances are attached to the inner wall of the liquid separation cylinder. The liquid level of the waste liquid in the inside of the liquid separation cylinder gradually decreases. The waste liquid closely adheres to the inner wall of the liquid separation cylinder under the action of the centrifugal force, and the liquid level thereof appears a concave state, thereby causing the solid substances generated by the waste liquid to be attached to the inner wall of the liquid separation cylinder, which is convenient for subsequent treatment of the solid substances.

[0008] Preferably, the closing assembly comprises a closing frame, a steam pipe, a fixed plate, a closing spring, a closing plate and a telescopic pipe one. The closing frame is arranged on the side wall of the filter cylinder. The steam pipe is arranged through the closing frame away from the filter cylinder. The fixed plate is arranged outside the steam pipe above the liquid separation cylinder. The closing spring is arranged on the bottom wall of the fixed plate. The closing plate is arranged on the bottom wall of the closing spring. The telescopic pipe one is arranged through the fixed plate and the closing plate and is in communication with the steam pipe away from the closing frame. The driving assembly comprises a linear motor, a support frame, a steam turbine, a viscosity-reducing copper pipe, a telescopic pipe two and a flow valve. A plurality of linear motors are arranged on the side wall of the filter cylinder. The support frame is arranged on the power end of the linear motor. The steam turbine is arranged on the bottom wall of the support frame away from the linear motor. The telescopic pipe two is arranged in communication between the steam pipe and the steam inlet end of the steam turbine. The viscosity-reducing copper pipe is arranged at the steam exhaust end of the steam turbine. The end of the viscosity-reducing copper pipe away from the steam turbine is arranged in a U shape and is arranged through the inside of the filter cylinder above the ultrafiltration membrane layer. The flow valve is arranged in communication at the end of the viscosity-reducing copper pipe away from the steam turbine.

[0009] In use, the closing plate is deformed by the closing spring to adhere to the upper wall of the separation cylinder, the closing plate is rotationally connected to the separation cylinder, the steam generated by evaporation of the waste liquid in the separation cylinder is transported to the inside of the steam turbine through the steam pipe and the telescopic pipe two, the steam drives the steam turbine to move, the steam turbine drives the soft shaft to rotate through the power output end, the steam buffered by the steam turbine is discharged into the internal of the viscosity reduction copper pipe, the viscosity reduction copper pipe heats the waste liquid in the filter cylinder to reduce the viscosity of the waste liquid and improve the membrane flux of the ultrafiltration membrane layer; When the waste liquid in the separation cylinder is completely evaporated, the separation cylinder is taken out from the inside of the bearing frame by the deformation of the closing spring, the bottom side wall of the separation cylinder is provided with a clamping block, the soft shaft is bent by the bendable characteristic, the separation cylinder is placed on the upper wall of the collecting cylinder, the clamping block is clamped in the clamping groove to limit the circumferential direction of the separation cylinder, the sleeve of the separation cylinder is sleeved on the outside of the intermediate electromagnetic body, the intermediate electromagnetic body generates magnetism by electrification, the intermediate electromagnetic body and the rotating magnetic block are arranged at different poles, the intermediate electromagnetic body is driven to rotate by the power end of the sweeping motor, the intermediate electromagnetic body is driven to rotate by the magnetic attraction force between the intermediate electromagnetic body and the rotating magnetic block, the rotating magnetic block drives the sweeping brush to rotate by the soft shaft to sweep the solid substances attached to the inner wall of the separation cylinder, the swept solid substances fall into the inside of the collecting cylinder through the heating port to complete the sweeping operation of the solid substances.

[0010] Specifically, the side wall of the filter cylinder is provided with a controller.

[0011] The controller is electrically connected with the annular heating disc, the centrifugal motor, the linear motor, the sweeping motor and the intermediate electromagnetic body respectively to realize accurate control on the running state of each component.

[0012] By adopting the above structure, the present application has the following beneficial effects: Compared with the prior art, the present application combines the body-shrinking solidifying mechanism with the steam-guiding energy-recycling mechanism, and through the water conveying assembly, the heating assembly, the centrifugal assembly, the closing assembly, the driving assembly and the recycling assembly, the solid substances in the waste liquid can be induced to adhere to the inner wall of the separation cylinder, the volume of the waste liquid is greatly reduced, the two sets of separation cylinders are used alternately to facilitate the centralized sweeping and treatment of the solid substances, and the steam generated by evaporation of the waste liquid is utilized, on one hand, the impact force of the steam can drive the steam turbine, the steam turbine drives the soft shaft to rotate, and the soft shaft drives the sweeping brush to assist in sweeping the solid substances attached to the inside of the separation cylinder; on the other hand, the heat energy of the steam can heat the waste liquid in the filter cylinder to reduce the viscosity of the waste liquid, improve the membrane flux of the ultrafiltration membrane layer, reduce the membrane pollution and prolong the service life of the membrane. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the present application; Figure 2 It is a front view of the present application; Figure 3 This is a bottom-view perspective of the design. Figure 4 This is a schematic diagram of the internal structure of this solution; Figure 5 This is a schematic diagram of the combined structure of the evaporation component and the centrifugal component in this scheme; Figure 6 This is the main view of this solution; Figure 7 This is the rear view of the design. Figure 8 This is a side view of the design. Figure 9 This is a top view of the plan; Figure 10 for Figure 9 Sectional view of AA section; Figure 11 for Figure 10 An enlarged structural view of section I.

[0014] The components include: 1. Filter cartridge; 2. Ultrafiltration membrane layer; 3. Condensed solidification mechanism; 4. Water supply assembly; 5. Water supply pipe; 6. Support frame; 7. One-way water supply valve; 8. Water outlet; 9. Heating assembly; 10. Annular box; 11. Annular heating plate; 12. Thermally conductive copper column; 13. Evaporation assembly; 14. Pad; 15. Separator; 16. Sleeve; 17. Annular sealing ring; 18. Heating port; 19. Centrifugal assembly; 20. Centrifugal motor; 21. Drive gear; 22. Driven gear; 23. Vapor-conducting energy harvesting mechanism; 24. Closing assembly. 25. Closing frame, 26. Steam pipe, 27. Fixing plate, 28. Closing spring, 29. Closing plate, 30. Drive assembly, 31. Linear motor, 32. Support frame, 33. Steam turbine, 34. Recycling assembly, 35. Flexible shaft, 36. Sweeping brush, 37. Collection cylinder, 38. Engaging groove, 39. Controller, 40. Water pump, 41. Base, 42. Sweeping motor, 43. Indirect electromagnet, 44. Rotating magnet, 45. Copper pipe for reducing viscosity, 46. Water outlet pipe, 47. Telescopic pipe II, 48. Telescopic pipe I, 49. Flow valve.

[0015] The accompanying drawings are provided to further understand the present solution and form part of the specification. They are used together with the embodiments of the present solution to explain the present solution and do not constitute a limitation thereof. Detailed Implementation

[0016] With reference to the accompanying drawings, the technical solutions in the embodiments of the present application will be clearly and completely described below. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0017] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0018] As shown in Figures 1-11 The present application provides a waste liquid collecting device for a semiconductor organic alkali purification equipment, which comprises a filter cylinder 1, a base 41, an ultrafiltration membrane layer 2, a body-shrinking solidifying mechanism 3 and a steam-guiding energy collecting mechanism 23. The ultrafiltration membrane layer 2 is arranged on the inner wall of the filter cylinder 1, and the filter cylinder 1 is provided with an open upper end. The base 41 is arranged on the bottom wall of the filter cylinder 1. The body-shrinking solidifying mechanism 3 is arranged on one side of the filter cylinder 1. The steam-guiding energy collecting mechanism 23 is arranged on the side wall of the filter cylinder 1. The body-shrinking solidifying mechanism 3 comprises a water conveying assembly 4, a heating assembly 9, an evaporation assembly 13 and a centrifugal assembly 19. The water conveying assembly 4 is arranged at the bottom of the filter cylinder 1. The heating assembly 9 is arranged at the end of the water conveying assembly 4 away from the filter cylinder 1. The evaporation assembly 13 is arranged at the end of the water conveying assembly 4 close to the heating assembly 9. The centrifugal assembly 19 is arranged at the bottom of the water conveying assembly 4. The steam-guiding energy collecting mechanism 23 comprises a closing assembly 24, a driving assembly 30 and a recycling assembly 34. The closing assembly 24 is arranged on the side wall of the filter cylinder 1. The driving assembly 30 is arranged below the closing assembly 24 on the side wall of the filter cylinder 1. The recycling assembly 34 is arranged below the driving assembly 30.

[0019] The water delivery assembly 4 comprises a water delivery pipe 5, a bearing frame 6, a one-way water delivery valve 7, a water outlet 8, a water pump 40 and a water outlet pipe 46, a plurality of water pumps 40 are arranged on the bottom wall of the filter cartridge 1, the water pumping end of the water pump 40 extends to the inside of the filter cartridge 1 below the ultrafiltration membrane layer 2, the water delivery pipe 5 is arranged between the inner wall of the base 41 and the water outlet end of the water pump 40, the bearing frame 6 is arranged at one end of the base 41 away from the filter cartridge 1, the one-way water delivery valve 7 is arranged outside the water delivery pipe 5 below the bearing frame 6, the water outlet pipe 46 is arranged at one end of the water delivery pipe 5 away from the water pump 40 and is communicated through the bearing frame 6, the water outlet pipe 46 is rotatably connected with the water delivery pipe 5, and the water outlet 8 is arranged on the side wall of the water outlet pipe 46; the heating assembly 9 comprises an annular box 10, an annular heating disc 11 and a heat-conducting copper column 12, the annular box 10 is rotatably arranged on the inner wall of the bottom of the bearing frame 6, the annular heating disc 11 is arranged in the annular box 10, and a plurality of heat-conducting copper columns 12 are arranged through the inner wall of the annular box 10; the evaporation assembly 13 comprises a pad 14, a liquid separation cylinder 15, a sleeve 16, an annular sealing ring 17 and a heating port 18, the pad 14 is arranged on the bottom wall of the bearing frame 6, the liquid separation cylinder 15 is arranged on the upper wall of the pad 14 in a fit manner, the liquid separation cylinder 15 is provided with an opening at the upper end and is provided in a reverse tapered manner inside, the sleeve 16 is arranged in a communicating manner on the bottom wall of the liquid separation cylinder 15, a plurality of heating ports 18 are arranged on the bottom wall of the liquid separation cylinder 15 outside the sleeve 16, and the annular sealing ring 17 is arranged on the inner wall of the sleeve 16 and the inner wall of the heating port 18 respectively; the centrifugal assembly 19 comprises a centrifugal motor 20, a driving gear 21 and a driven gear 22, the centrifugal motor 20 is symmetrically arranged on the bottom wall of the bearing frame 6, the driven gear 22 is arranged outside the sleeve 16, and the driving gear 21 is arranged on the power end of the centrifugal motor 20, and the driving gear 21 is engaged with the driven gear 22.

[0020] The closure assembly 24 comprises a closure frame 25, a steam pipe 26, a fixing plate 27, a closure spring 28, a closure plate 29 and a telescopic pipe I 48, the closure frame 25 is arranged on the side wall of the filter cylinder 1, the steam pipe 26 is arranged through the end of the closure frame 25 away from the filter cylinder 1, the fixing plate 27 is arranged outside the steam pipe 26 above the liquid distribution cylinder 15, the closure spring 28 is arranged on the bottom wall of the fixing plate 27, the closure plate 29 is arranged on the bottom wall of the closure spring 28, and the telescopic pipe I 48 is arranged through the fixing plate 27 and the closure plate 29 and is communicated with the side of the steam pipe 26 away from the closure frame 25; the drive assembly 30 comprises a linear motor 31, a support frame 32, a steam turbine 33, a viscosity-reducing copper pipe 45, a telescopic pipe II 47 and a flow valve 49, a plurality of linear motors 31 are arranged on the side wall of the filter cylinder 1, the support frame 32 is arranged on the power end of the linear motor 31, the steam turbine 33 is arranged on the bottom wall of the end of the support frame 32 away from the linear motor 31, the telescopic pipe II 47 is arranged in communication between the steam pipe 26 and the steam inlet end of the steam turbine 33, the viscosity-reducing copper pipe 45 is arranged at the steam exhaust end of the steam turbine 33, the end of the viscosity-reducing copper pipe 45 away from the steam turbine 33 is arranged in a U shape and is arranged through the inside of the filter cylinder 1 above the ultrafiltration membrane layer 2, and the flow valve 49 is arranged in communication at the end of the viscosity-reducing copper pipe 45 away from the steam turbine 33; the recovery assembly 34 comprises a flexible shaft 35, a cleaning brush 36, a collection cylinder 37, a clamping groove 38, a cleaning motor 42, an interconnection electromagnet 43 and a rotating magnetic block 44, the flexible shaft 35 is arranged on the power output end of the steam turbine 33, the cleaning brush 36 is arranged outside the flexible shaft 35, the collection cylinder 37 is arranged on the side wall of the filter cylinder 1 below the flexible shaft 35, a plurality of clamping grooves 38 are arranged on the upper wall of the collection cylinder 37, the clamping groove 38 is arranged in an open state on two sides, the cleaning motor 42 is arranged on the bottom wall of the collection cylinder 37, the power end of the cleaning motor 42 is arranged through the inside of the collection cylinder 37, the interconnection electromagnet 43 is arranged on the power end of the cleaning motor 42, and the rotating magnetic block 44 is arranged on the bottom wall of the flexible shaft 35, and the interconnection electromagnet 43 and the rotating magnetic block 44 are arranged opposite to each other.

[0021] The side wall of the filter cylinder 1 is provided with a controller 39.

[0022] The controller 39 is electrically connected with the annular heating disc 11, the centrifugal motor 20, the linear motor 31, the cleaning motor 42 and the interconnection electromagnet 43 respectively, so as to realize accurate control on the running state of each assembly.

[0023] In specific use, first pull up the closing plate 29 to compress the closing spring 28 to make room, then place the separation cylinder 15 on the upper wall of the cushion block 14 inside the bearing frame 6, the inner diameter of the annular sealing ring 17 is smaller than the outer diameter of the water outlet pipe 46, the sleeve 16 is sleeved on the outside of the water outlet pipe 46 by the elastic deformation of the annular sealing ring 17, the heat-conducting copper column 12 penetrates into the inside of the separation cylinder 15 through the heating hole 18 by the elastic deformation of the annular sealing ring 17, the inner wall of the separation cylinder 15 is rough, then loosen the closing plate 29, the closing spring 28 resets to make the closing plate 29 adhere to the upper wall of the separation cylinder 15, the closing plate 29 is rotationally connected with the upper wall of the separation cylinder 15, at this time, the separation cylinder 15 is in a relatively sealed state; The filter cylinder 1 is communicated with the waste liquid through the pipeline, the waste liquid enters the inside of the filter cylinder 1 to be preliminarily filtered, the suspended and colloidal organic impurities in the waste liquid are intercepted in the inside of the filter cylinder 1 by the ultrafiltration membrane layer 2, the controller 39 controls the water pump 40 to start, the water pump 40 draws the waste liquid preliminarily filtered in the inside of the filter cylinder 1 through the water pumping end, the waste liquid flows into the inside of the water outlet pipe 46 through the water conveying pipe 5, the water outlet pipe 46 conveys the waste liquid to the inside of the separation cylinder 15 through the water outlet 8, when the waste liquid fills to the preset liquid level of the separation cylinder 15, the water pump 40 stops the drawing work; The controller 39 controls the annular heating disc 11 to start, the annular heating disc 11 heats the environment in the inside of the separation cylinder 15 through the heat-conducting copper column 12 to convert the dissolved pollutants into solids, greatly reducing the volume of the waste liquid, the heat-conducting copper column 12 heats the waste liquid in the inside of the separation cylinder 15 in the medium and low temperature state, the waste liquid generates evaporation phenomenon after being heated, the solid substances generated by evaporation are attached to the inner wall of the separation cylinder 15; The controller 39 controls the centrifugal motor 20 to start, the centrifugal motor 20 drives the driving gear 21 to rotate through the power end, the driving gear 21 drives the sleeve 16 to rotate through the driven gear 22, the sleeve 16 drives the separation cylinder 15 to rotate, the separation cylinder 15 drives the annular box 10 to rotate along the inner wall of the bearing frame 6 through the heat-conducting copper column 12, the separation cylinder 15 drives the waste liquid in the inside to perform the centrifugal motion, because the inner wall of the separation cylinder 15 is relatively rough, it can provide the attachment points for the solid substances generated by the evaporation of the waste liquid, so that the solid substances are attached to the inner wall of the separation cylinder 15; When the liquid level of the waste liquid begins to drop, the cylinder wall originally immersed in the waste liquid is exposed, which causes the solid substances formed at the top of the separation cylinder 15 to be exposed in the air for the longest time, evaporate and dry most thoroughly, and be attached most hard, thereby increasing the cleaning difficulty, in order to avoid the above-mentioned situation, under the action of the centrifugal force, the waste liquid is closely attached to the inner wall of the separation cylinder 15, as the liquid level in the inside of the separation cylinder 15 drops, the liquid level appears a concave state, the waste liquid flows upward along the inverted conical inner wall of the separation cylinder 15, so that the solid substances formed at the upper part of the separation cylinder are soaked in the waste liquid, thereby avoiding the solid substances from being excessively dried; Under the upward flow guiding effect of the inverted conical inner wall of the separation cylinder 15, the waste liquid uniformly forms solid matter on the inner wall of the separation cylinder 15, avoiding the newly precipitated solid matter from being accumulated in the pores of the scale layer formed at the bottom of the separation cylinder to generate strong mechanical interlocking force, thereby reducing the adhesion of the solid matter and reducing the cleaning difficulty; The steam generated by evaporation of the waste liquid in the separation cylinder 15 is transported to the inside of the steam turbine 33 through the telescopic pipe one 48, the steam pipe 26, and the telescopic pipe two 47. The steam buffered by the steam turbine 33 is discharged through the viscosity-reducing copper pipe 45 and the flow valve 49. The steam flowing through the viscosity-reducing copper pipe 45 heats it, and the temperature-increased viscosity-reducing copper pipe 45 heats the waste liquid in the filter cylinder 1, reduces the viscosity of the waste liquid, improves the membrane flux of the ultrafiltration membrane layer 2, reduces membrane pollution, and prolongs the service life of the membrane; When the flow valve 49 detects that the steam flow discharged from the viscosity-reducing copper pipe 45 decreases until the flow is cut off, the deformation of the closing spring 28 is used to take out the separation cylinder 15 from the inside of the bearing frame 6, and the waste liquid solidification operation is completed; A new set of separation cylinders 15 is placed in the bearing frame 6. The bottom side wall of the separation cylinder 15 is provided with a clamping block. The flexible shaft 35 is bent by using its bendable feature. The separation cylinder 15 is placed on the upper wall of the collection cylinder 37. The clamping block is clamped in the clamping groove 38. The circumference of the separation cylinder 15 is limited. The sleeve 16 is sleeved on the outside of the intermediate electromagnet 43. Then the controller 39 controls the intermediate electromagnet 43 to start. The intermediate electromagnet 43 generates magnetism after being electrified. The intermediate electromagnet 43 and the rotating magnetic block 44 are arranged with opposite poles. The controller 39 controls the cleaning motor 42 to start. The cleaning motor 42 drives the intermediate electromagnet 43 to rotate through the power end. The intermediate electromagnet 43 drives the rotating magnetic block 44 to rotate through the magnetic attraction force between them. The controller 39 controls the linear motor 31 to start. The power end of the linear motor 31 drives the cleaning brush 36 to move up and down by the elongation and shortening of the telescopic pipe two 47. The rotating magnetic block 44 drives the cleaning brush 36 to rotate through the flexible shaft 35 to clean the solid matter attached to the inner wall of the separation cylinder 15; The steam drives the steam turbine 33 to move. The steam turbine 33 drives the flexible shaft 35 to assist in rotating through the power output end. The flexible shaft 35 drives the cleaning brush 36 to assist in cleaning the inner wall of the separation cylinder 15. The cleaned solid matter falls into the collection cylinder 37 through the heating port 18. The cleaning of the solid matter is completed. The above operation can be repeated next time.

[0024] It is to be noted that, in the present text, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0025] The above describes the technical solution and its implementation, which is not limited, and the drawings only show one of the embodiments of the technical solution, and the actual structure is not limited thereto. In summary, if a person skilled in the art is inspired by it, without departing from the purpose of the technical solution, without creative labor, the similar structure and embodiments of the technical solution are designed, which should belong to the protection scope of the technical solution.

Claims

1. A waste liquid collecting device for a semiconductor organic base purification apparatus, comprising a base, a filter cartridge, and an ultrafiltration membrane layer, characterized in that: Also include the body type conversion mechanism and guide steam type energy collection mechanism, the ultrafiltration membrane layer is arranged in the filter cylinder inner wall, the filter cylinder is provided with an open upper end, the base is arranged in the filter cylinder bottom wall, the body type conversion mechanism is arranged in one side of the filter cylinder, the guide steam type energy collection mechanism is arranged in the filter cylinder side wall, the body type conversion mechanism includes water delivery assembly, heating assembly, evaporation assembly and centrifugal assembly, the water delivery assembly is arranged in the filter cylinder bottom, the heating assembly is arranged in the water delivery assembly far from the filter cylinder one end, the evaporation assembly is arranged in the water delivery assembly close to the heating assembly one end, the centrifugal assembly is arranged in the water delivery assembly bottom;The guide steam type energy collection mechanism includes closure assembly, drive assembly and recovery assembly, the closure assembly is arranged in the filter cylinder side wall, the drive assembly is arranged in the filter cylinder side wall below the closure assembly, the recovery assembly is arranged below the drive assembly; The closure assembly includes a steam pipe; The water delivery assembly includes a bearing frame; The drive assembly includes a linear motor, a support frame, a steam turbine, a viscosity-reducing copper pipe, a telescopic pipe two and a flow valve, a plurality of linear motors are arranged on the filter cylinder side wall, the support frame is arranged on the power end of the linear motor, the steam turbine is arranged on the bottom wall of the support frame away from the linear motor, the telescopic pipe two is connected between the steam pipe and the steam turbine inlet end, the viscosity-reducing copper pipe is arranged at the steam turbine exhaust end, the end of the viscosity-reducing copper pipe away from the steam turbine is arranged in U shape and penetrates the inside of the filter cylinder above the ultrafiltration membrane layer, and the flow valve is connected to the end of the viscosity-reducing copper pipe away from the steam turbine. The evaporation assembly includes a pad, a separation cylinder, a sleeve, an annular sealing ring and a heating port, the pad is arranged on the bottom wall of the bearing frame, the separation cylinder is arranged on the upper wall of the pad, the inside of the separation cylinder is arranged in an inverted cone shape, the sleeve is connected to the bottom wall of the separation cylinder, a plurality of heating ports are arranged on the bottom wall of the separation cylinder outside the sleeve, and the annular sealing ring is arranged on the inner wall of the sleeve and the inner wall of the heating port, respectively.

2. The waste liquid collecting device for a semiconductor organic base purification apparatus according to claim 1, characterized by: The water delivery assembly further includes a water delivery pipe, a one-way water delivery valve, a water outlet, a water pump and a water outlet pipe, a plurality of water pumps are arranged on the bottom wall of the filter cylinder, the water pumping end of the water pump extends to the inside of the filter cylinder below the ultrafiltration membrane layer, the water delivery pipe is arranged between the inside of the base and the water discharge end of the water pump, the bearing frame is arranged at the end of the base away from the filter cylinder, the one-way water delivery valve is connected to the outside of the water delivery pipe below the bearing frame, the water outlet pipe is connected to the end of the water delivery pipe away from the water pump and penetrates the bearing frame, the water outlet pipe is rotatably connected to the water delivery pipe, and the water outlet is arranged on the side wall of the water outlet pipe.

3. The waste liquid collecting device for a semiconductor organic base purification apparatus according to claim 2, characterized by: The heating assembly includes an annular box, an annular heating disc and a heat-conducting copper column, the annular box is rotatably arranged on the bottom inner wall of the bearing frame, the annular heating disc is arranged in the annular box, and a plurality of heat-conducting copper columns are arranged in the inner wall of the annular box.

4. The waste liquid collecting device for a semiconductor organic base purification apparatus according to claim 1, characterized by: The separation cylinder is provided with an open upper end.

5. The waste liquid collecting device for a semiconductor organic base purification apparatus according to claim 3, characterized by: The centrifugal assembly includes a centrifugal motor, a driving gear and a driven gear, the centrifugal motor is symmetrically arranged on the bottom wall of the bearing frame, the driven gear is arranged outside the sleeve, the driving gear is arranged on the power end of the centrifugal motor, and the driving gear is engaged with the driven gear.

6. The waste liquid collecting device for a semiconductor organic base purification apparatus according to claim 5, characterized by: The closure assembly further comprises a closure frame, a fixing plate, a closure spring, a closure plate and an extension tube I, the closure frame is arranged on the side wall of the filter cartridge, the steam tube is arranged through the end of the closure frame away from the filter cartridge, the fixing plate is arranged outside the steam tube above the distribution cartridge, the closure spring is arranged on the bottom wall of the fixing plate, the closure plate is arranged on the bottom wall of the closure spring, and the extension tube I is arranged through the fixing plate and the closure plate and communicated to the side of the steam tube away from the closure frame.

7. A waste liquid collecting device for a semiconductor organic base purification apparatus according to claim 6, characterized by: The recovery assembly comprises a flexible shaft, a cleaning brush, a collection cylinder, a clamping groove, a cleaning motor, an interconnection electromagnet and a rotating magnetic block, the flexible shaft is arranged at the power output end of the steam turbine, the cleaning brush is arranged outside the flexible shaft, the collection cylinder is arranged on the side wall of the filter cartridge below the flexible shaft, a plurality of clamping grooves are arranged on the upper wall of the collection cylinder, the clamping groove is arranged with two open surfaces, the cleaning motor is arranged on the bottom wall of the collection cylinder, the power end of the cleaning motor is arranged through the inside of the collection cylinder, the interconnection electromagnet is arranged on the power end of the cleaning motor, and the rotating magnetic block is arranged on the bottom wall of the flexible shaft. The interconnection electromagnet is arranged opposite to the rotating magnetic block.

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