Ultra-clean high-purity reagent split charging device

Abstract

The invention discloses an ultra-clean high-purity reagent split charging device, and relates to the technical field of split charging, the ultra-clean high-purity reagent split charging device comprises a suction assembly, a split charging bottle and a self-adaptive assembly, the suction assembly is fixedly arranged on an ultra-clean high-purity reagent raw material container in a sealed mode and communicates with the interior of the ultra-clean high-purity reagent raw material container, and the self-adaptive assembly is arranged on the split charging bottle; the suction assembly is arranged in the ultra-clean high-purity reagent raw material container to suck an ultra-clean high-purity reagent in the ultra-clean high-purity reagent raw material container, the split charging bottle can be communicated with the suction assembly and can receive the ultra-clean high-purity reagent pumped out by the suction assembly, and the self-adaptive assembly is arranged at the top end of the split charging bottle, is communicated with the interior of the split charging bottle and can deform along with the suction action of the suction assembly; the self-adaptive assembly, the split charging bottle and the suction assembly are used for forming a closed space isolated from the outside with the ultra-clean high-purity reagent raw material container; according to the invention, the influence of external environment and personnel operation on the quality of the ultra-clean high-purity reagent product can be effectively avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of split charging, and particularly relates to a super-clean high-purity reagent split charging device. BACKGROUND

[0002] The super-clean high-purity reagent, also known as wet electronic chemicals, is one of the key basic raw materials in the production process of ultra-large scale integrated circuits. The main packaging forms thereof include 4L gallon bottles, 200L barrels, ton barrels and tank containers. Among these packaging forms, only the 200L barrels and the tank containers are suitable for charging high-grade (G4 grade and above) super-clean high-purity reagents. The high-grade super-clean high-purity reagents can not only be used in large-scale production of integrated circuits, but also have some special uses, such as test reagents for VPD-ICP (Vapor Phase Decomposition - Inductively Coupled Plasma) wafer surface metal contamination analyzers in wafer laboratories, cleaning reagents for ICP-MS (Inductively Coupled Plasma Mass Spectrometry) in trace analysis laboratories, and the like.

[0003] Due to the characteristics of laboratories, small specifications such as 250mL and 500mL of super-clean high-purity reagents are generally used, so that small specifications of super-clean high-purity reagents suitable for laboratories need to be split charged from 200L barrel products. However, in the process of splitting charging 200L super-clean high-purity reagents, impurity ions caused by particles in the environment and personnel operation will enter the split charging products from the non-sealed parts of the split charging equipment through air circulation. Therefore, in order to ensure the quality of the small specifications of super-clean high-purity reagent products after split charging, a special device for split charging of super-clean high-purity reagents needs to be made to solve the pollution problems caused by the environment and personnel operation. SUMMARY

[0004] The purpose of the present application is to provide a super-clean high-purity reagent split charging device to solve the problems existing in the prior art, which can effectively avoid the influence of external environment and personnel operation on the quality of super-clean high-purity reagent products.

[0005] To achieve the above purpose, the present application provides the following solutions: The application provides an ultra-clean high-purity reagent sub-packaging device, which comprises a suction assembly, a sub-packaging bottle and a self-adapting assembly, the suction assembly is used for being fixedly arranged on an ultra-clean high-purity reagent raw material container and being in communication with the inside of the ultra-clean high-purity reagent raw material container, so as to suck the ultra-clean high-purity reagent in the inside of the ultra-clean high-purity reagent raw material container, the sub-packaging bottle can be in communication with the suction assembly, the sub-packaging bottle can receive the ultra-clean high-purity reagent sucked by the suction assembly, the self-adapting assembly is arranged at the top end of the sub-packaging bottle and is in communication with the inside of the sub-packaging bottle, and the self-adapting assembly can be deformed along with the suction action of the suction assembly; the self-adapting assembly, the sub-packaging bottle and the suction assembly are used for forming a closed space which is isolated from the outside with the ultra-clean high-purity reagent raw material container.

[0006] Preferably, the suction assembly comprises a sub-packaging cannula, a piston and a blocking ball, the bottom end of the sub-packaging cannula is used for being arranged below the liquid level in the inside of the ultra-clean high-purity reagent raw material container, the bottom end of the sub-packaging cannula is provided with a liquid suction port, the top end of the sub-packaging cannula is provided with a liquid outlet port, the liquid outlet port can be in communication with the sub-packaging bottle, the piston is arranged in the sub-packaging cannula, the outer side surface of the piston is in sealing contact with the inner side surface of the sub-packaging cannula, the piston can move upwards or downwards along the sub-packaging cannula, the bottom surface of the piston is provided with a liquid inlet hole, the top surface of the piston is provided with a liquid outlet hole, the inside of the piston has a transfer space, the transfer space is in communication with the liquid inlet hole and the liquid outlet hole, the blocking ball is arranged in the transfer space, and the blocking ball is used for blocking the liquid inlet hole when the piston moves upwards and opening the liquid inlet hole when the piston moves downwards.

[0007] Preferably, the suction assembly further comprises a push-pull rod, the bottom end of the push-pull rod is arranged in the sub-packaging cannula and is fixedly connected with the piston, the top end of the push-pull rod is arranged outside the sub-packaging cannula, the push-pull rod is in sealing contact with the sub-packaging cannula, the push-pull rod can move upwards or downwards relative to the sub-packaging cannula, and a liquid passing space is left between the outer side surface of the part of the push-pull rod arranged in the sub-packaging cannula and the inner side surface of the sub-packaging cannula.

[0008] Preferably, the suction assembly further comprises an outlet hard pipe and a connecting hose, one end of the outlet hard pipe is fixedly connected with and in communication with the liquid outlet port, the other end of the outlet hard pipe is fixedly connected with and in communication with the first end of the connecting hose, and the second end of the connecting hose is arranged in the sub-packaging bottle and is in communication with the inside of the sub-packaging bottle.

[0009] Preferably, the sub-packaging bottle comprises a bottle body and a bottle cap, the top end of the bottle body is provided with an inlet and outlet, the bottle cap is detachably and sealingly arranged on the top end of the bottle body and can block the inlet and outlet, the connecting hose passes through the bottle cap, and the connecting hose is sealingly connected with or in sealing contact with the bottle cap.

[0010] Preferably, the self-adapting component comprises a flexible film cylinder, the top end of the flexible film cylinder is closed, the bottom end of the flexible film cylinder is fixedly and sealingly connected with the bottle cap, and the bottom end of the flexible film cylinder is in communication with the inside of the bottle body.

[0011] Preferably, the thickness of the side wall of the flexible film cylinder is 0.1 um.

[0012] Preferably, the suction component further comprises a threaded cap, the threaded cap is fixedly and sealingly sleeved on the outside wall of the dispensing cannula, and the threaded cap is used for threadedly and sealingly connecting with the raw material access port of the ultra-clean high-purity reagent raw material container.

[0013] Preferably, a on-off control valve is arranged on the connecting hose, and the on-off control valve can control the on-off of the connecting hose.

[0014] Preferably, the dispensing cannula, the piston, the blocking ball, the outflow hard pipe, the push-pull rod and the threaded cap are all made of high-density polyethylene material; and the bottle body, the connecting hose, the flexible film cylinder, the bottle cap and the on-off control valve are all made of soluble polytetrafluoroethylene material.

[0015] The present application has the following technical effects relative to the prior art: The ultra-clean high-purity reagent dispensing device provided by the present application can realize the dispensing of high-grade ultra-clean high-purity reagent products in small packages (dispensing bottles) from high-grade ultra-clean high-purity reagent raw material containers (such as 200L barrels), and can effectively avoid the influence of the external environment and personnel operation on the quality of the ultra-clean high-purity reagent products. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description only constitute some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0017] Figure 1 FIG. 1 is a schematic view of the ultra-clean high-purity reagent dispensing device provided by the present application; In the diagram: 1-Dispensing tube, 2-Piston, 3-Sealing ball, 4-Bottle body, 5-Connecting hose, 6-Outflow rigid tube, 7-Push-pull rod, 8-Threaded cap, 9-Flexible membrane tube, 10-Bottle cap, 11-On / off control valve, 12-Transfer space, 13-Inlet port, 14-Outlet port. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] The purpose of this invention is to provide an ultra-clean high-purity reagent dispensing device to solve the problems existing in the prior art, and to effectively avoid the influence of the external environment and personnel operation on the quality of ultra-clean high-purity reagent products.

[0020] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] like Figure 1 As shown, the present invention provides an ultra-clean high-purity reagent dispensing device, including a suction component, a dispensing bottle, and an adaptive component. The suction component is fixedly and sealed on the ultra-clean high-purity reagent raw material container and communicates with the interior of the ultra-clean high-purity reagent raw material container to suction the ultra-clean high-purity reagent inside the ultra-clean high-purity reagent raw material container. The dispensing bottle can communicate with the suction component and can receive the ultra-clean high-purity reagent extracted by the suction component. The adaptive component is located at the top of the dispensing bottle and communicates with the interior of the dispensing bottle. The adaptive component can deform with the suction action of the suction component. The adaptive component, the dispensing bottle, and the suction component are used to form a closed space isolated from the outside world with the ultra-clean high-purity reagent raw material container.

[0022] The ultra-clean high-purity reagent dispensing device provided by this invention, by setting up a suction component, draws ultra-clean high-purity reagent from inside the ultra-clean high-purity reagent raw material container into a dispensing bottle. By setting up an adaptive component, the dispensing bottle, and the suction component together with the ultra-clean high-purity reagent raw material container to form a closed space isolated from the outside world, and by setting up an adaptive component that deforms with the suction action of the suction component, the entire ultra-clean high-purity reagent dispensing device is relatively closed. This enables the dispensing of high-grade ultra-clean high-purity reagent products in small packages (dispensing bottles) from high-grade ultra-clean high-purity reagent raw material containers (such as 200L drums), and effectively avoids the influence of the external environment and personnel operation on the quality of ultra-clean high-purity reagent products.

[0023] As a more preferred embodiment of the present application, the suction assembly comprises a dispensing nozzle 1, a piston 2 and a sealing ball 3, the bottom end of the dispensing nozzle 1 is used to be placed below the liquid level inside the container of the ultra-clean high-purity reagent raw material, the bottom end of the dispensing nozzle 1 is provided with a liquid suction port, the top end of the dispensing nozzle 1 is provided with a liquid outlet port, the liquid outlet port can be communicated with the dispensing bottle, the piston 2 is placed in the dispensing nozzle 1, the outer side surface of the piston 2 is in sealing contact with the inner side surface of the dispensing nozzle 1, the piston 2 can move upward or downward along the dispensing nozzle 1, the bottom surface of the piston 2 is provided with a liquid inlet hole 13, the top surface of the piston 2 is provided with a liquid outlet hole 14, the inside of the piston 2 has a transfer space 12, the transfer space 12 is communicated with the liquid inlet hole 13 and the liquid outlet hole 14, the sealing ball 3 is placed in the transfer space 12, the sealing ball 3 is used to seal the liquid inlet hole 13 when the piston 2 moves upward, and the sealing ball 3 is used to open the liquid inlet hole 13 when the piston 2 moves downward, which is convenient to use.

[0024] As a more preferred embodiment of the present application, the suction assembly further comprises a push-pull rod 7, the bottom end of the push-pull rod 7 is placed in the dispensing nozzle 1 and is fixedly connected with the piston 2, the top end of the push-pull rod 7 is placed outside the dispensing nozzle 1, the push-pull rod 7 is in sealing contact with the dispensing nozzle 1, the push-pull rod 7 can move upward or downward relative to the dispensing nozzle 1, the outer side surface of the part of the push-pull rod 7 placed in the dispensing nozzle 1 and the inner side surface of the dispensing nozzle 1 leave a liquid passing space, which is simple to operate, only needs to move the push-pull rod 7 upward or downward by the operator, and can realize the dispensing operation, avoiding the personnel operation pollution caused by complex operation.

[0025] As a more preferred embodiment of the present application, the suction assembly further comprises an outlet hard pipe 6 and a connecting hose 5, one end of the outlet hard pipe 6 is fixedly connected with and communicated with the liquid outlet port, the other end of the outlet hard pipe 6 is fixedly connected with and communicated with the first end of the connecting hose 5, the second end of the connecting hose 5 is placed in the dispensing bottle and is communicated with the inside of the dispensing bottle, which is convenient to assemble and use.

[0026] As a more preferred embodiment of the present application, the dispensing bottle comprises a bottle body 4 and a bottle cap 10, the top end of the bottle body 4 is provided with an inlet and outlet, the bottle cap 10 is detachably and sealingly arranged on the top end of the bottle body 4 and can seal the inlet and outlet, the connecting hose 5 passes through the bottle cap 10, and the connecting hose 5 is sealingly connected or sealingly contacted with the bottle cap 10, which is convenient to assemble and use.

[0027] As a more preferred embodiment of the present application, the self-adaptive assembly comprises a flexible film cylinder 9, the top end of the flexible film cylinder 9 is closed, the bottom end of the flexible film cylinder 9 is fixedly and sealingly connected with the bottle cap 10, and the bottom end of the flexible film cylinder 9 is communicated with the inside of the bottle body 4, which is convenient to manufacture and use.

[0028] As a more preferred embodiment of the present application, the thickness of the side wall of the flexible film cylinder 9 is 0.1 um, so as to improve the deformation ability.

[0029] As a more preferred embodiment of the present application, the suction assembly further comprises a threaded cap 8 fixedly sealed to the outer sidewall of the dispensing cannula 1, which is used for threaded sealing connection with the raw material access port of the ultra-clean high-purity reagent raw material container, facilitating assembly and use; as a more preferred embodiment of the present application, the ultra-clean high-purity reagent raw material container adopts a 200L barrel of a mainstream brand on the market, and the threaded cap 8 is correspondingly arranged to be compatible with the 200L barrel of the mainstream brand on the market. When in use, after the cap of the 200L barrel of the mainstream brand on the market is opened, the threaded cap 8 is installed at the original cap of the 200L barrel of the mainstream brand on the market, which is convenient to use.

[0030] As a more preferred embodiment of the present application, the connecting hose 5 is provided with an on-off control valve 11, which can control the on-off of the connecting hose 5, facilitating operation.

[0031] As a more preferred embodiment of the present application, the dispensing cannula 1, the piston 2, the blocking ball 3, the outflow hard pipe 6, the push-pull rod 7 and the threaded cap 8 are all made of high-density polyethylene material; the bottle body 4, the connecting hose 5, the flexible film cylinder 9, the bottle cap 10 and the on-off control valve 11 are all made of soluble polytetrafluoroethylene material, avoiding contamination of the ultra-clean high-purity reagent caused by impurities precipitated from the materials.

[0032] As a more preferred embodiment of the present application, when selecting materials, different brands and different grades of soluble polytetrafluoroethylene granules and different brands and different grades of high-density polyethylene granules are respectively shaken and washed with ultrapure water for 2 minutes, and the washing is repeated for 10 times; after washing, each granule is placed in a soluble polytetrafluoroethylene bottle that has been cleaned, and each granule is subjected to immersion test using G5 grade 49% electronic grade hydrofluoric acid, G5 grade 38% electronic grade hydrochloric acid and G5 grade 68% electronic grade nitric acid, with test time intervals being blank test, 1 day, 3 days, 5 days and 7 days, and test items being metal ions, anions and 0.1um-0.5um particles. The impurity precipitation amount of each granule is calculated according to the test data to evaluate whether it meets the manufacturing requirements; before use, the ultra-clean high-purity reagent dispensing device provided by the present application is placed in an ultrasonic cleaning tank, and ultrasonic cleaning is performed for 10 minutes. During cleaning, ultrapure water is introduced from the bottom of the ultrasonic cleaning tank and discharged from the upper part of the ultrasonic cleaning tank, so as to maintain the flow of the live water in the ultrasonic cleaning tank. After cleaning, the water sample discharged is taken for testing, and the test items are metal ions and anions. According to the test results, it is evaluated whether the cleaning is clean. If it is unqualified, the above cleaning steps are repeated.

[0033] The working process of the ultra-clean high-purity reagent sub-packaging device provided by the application is as follows: the cover of a 200L barrel is opened, the sub-packaging nozzle 1 is inserted into the barrel, the threaded cap 8 is screwed, the push-pull rod 7 is pulled upwards, the ultra-clean high-purity reagent to be sub-packaged is extracted into the sub-packaging nozzle 1, at this time, the sealing ball 3 blocks the liquid inlet hole 13 of the piston 2, the push-pull rod 7 is pushed downwards, at this time, there is a gap between the sealing ball 3 and the liquid inlet hole 13 of the piston 2, the ultra-clean high-purity reagent enters the transfer space 12 from the liquid inlet hole 13 and then rises to the upper side of the piston 2 from the liquid outlet hole 14, the push-pull rod 7 is repeatedly moved up and down, the ultra-clean high-purity reagent on the upper side of the piston 2 becomes more and more, when the liquid level reaches the liquid outlet, the ultra-clean high-purity reagent enters the bottle body 4 along the outflow hard pipe 6 and the connecting hose 5, during the up-and-down movement of the push-pull rod 7, the internal air pressure is kept balanced through the flexible film cylinder 9, so that the ultra-clean high-purity reagent is prevented from being polluted by external air, after the bottle body 4 is filled with the ultra-clean high-purity reagent, the on-off control valve 11 is closed.

[0034] The principles and implementation manners of the application are described by using specific examples in the application, and the above description of the examples is only used to help understand the method of the application and the core idea thereof; meanwhile, for those skilled in the art, according to the idea of the application, the specific implementation manners and application ranges will be changed. In conclusion, the content of the specification should not be understood as a limitation of the application.

Claims

1. A high-purity reagent dispensing device, characterized in that: The application relates to a device for extracting ultra-clean high-purity reagent, which comprises a suction assembly, a sub-packaging bottle and an adaptive assembly.

2. The ultra-clean high-purity reagent dispensing device according to claim 1, characterized in that: The suction assembly is used for sealingly arranging on an ultra-clean high-purity reagent raw material container and communicating with the inside of the ultra-clean high-purity reagent raw material container to suck the ultra-clean high-purity reagent in the ultra-clean high-purity reagent raw material container; the sub-packaging bottle can communicate with the suction assembly and receive the ultra-clean high-purity reagent sucked by the suction assembly; the adaptive assembly is arranged at the top end of the sub-packaging bottle and communicates with the inside of the sub-packaging bottle, and the adaptive assembly can be deformed along with the suction action of the suction assembly; the adaptive assembly, the sub-packaging bottle and the suction assembly are used for forming a closed space which is isolated from the outside with the ultra-clean high-purity reagent raw material container.

3. The ultra-clean high-purity reagent dispensing device according to claim 2, characterized in that: The suction assembly comprises a sub-packaging cannula, a piston and a blocking ball, the bottom end of the sub-packaging cannula is arranged below the liquid level in the ultra-clean high-purity reagent raw material container, the bottom end of the sub-packaging cannula is provided with a liquid suction port, the top end of the sub-packaging cannula is provided with a liquid outlet port, the liquid outlet port can communicate with the sub-packaging bottle, the piston is arranged in the sub-packaging cannula, the outer side surface of the piston is in sealing contact with the inner side surface of the sub-packaging cannula, the piston can move upwards or downwards along the sub-packaging cannula, the bottom surface of the piston is provided with a liquid inlet hole, the top surface of the piston is provided with a liquid outlet hole, the inside of the piston has a transfer space which communicates with the liquid inlet hole and the liquid outlet hole, and the blocking ball is arranged in the transfer space and used for blocking the liquid inlet hole when the piston moves upwards and opening the liquid inlet hole when the piston moves downwards.

4. The ultra-clean high-purity reagent dispensing device according to claim 3, characterized in that: The suction assembly further comprises a push-pull rod, the bottom end of the push-pull rod is arranged in the sub-packaging cannula and fixedly connected with the piston, the top end of the push-pull rod is arranged outside the sub-packaging cannula, the push-pull rod is in sealing contact with the sub-packaging cannula, the push-pull rod can move upwards or downwards relative to the sub-packaging cannula, and a liquid passing space is left between the outer side surface of the part of the push-pull rod arranged in the sub-packaging cannula and the inner side surface of the sub-packaging cannula.

5. The ultra-clean high-purity reagent dispensing device according to claim 4, characterized in that: The suction assembly further comprises an outlet hard pipe and a connecting hose, one end of the outlet hard pipe is fixedly connected with and communicates with the liquid outlet port, the other end of the outlet hard pipe is fixedly connected with and communicates with the first end of the connecting hose, and the second end of the connecting hose is arranged in the sub-packaging bottle and communicates with the inside of the sub-packaging bottle.

6. The ultra-clean high-purity reagent dispensing device according to claim 5, characterized in that: The sub-packaging bottle comprises a bottle body and a bottle cap, the top end of the bottle body is provided with an inlet and outlet, the bottle cap is detachably and sealingly arranged on the top end of the bottle body and can block the inlet and outlet, the connecting hose passes through the bottle cap and is sealingly connected with or in sealing contact with the bottle cap.

7. The ultra-clean high-purity reagent dispensing device according to claim 6, characterized in that: The adaptive assembly comprises a flexible film cylinder, the top end of the flexible film cylinder is closed, the bottom end of the flexible film cylinder is fixedly and sealingly connected with the bottle cap and communicates with the inside of the bottle body. The thickness of the side wall of the flexible film cylinder is 0.1 um.

8. The ultra-clean high-purity reagent dispensing device according to claim 6, characterized in that: The suction assembly further comprises a threaded cap fixedly sealingly sleeved on the outer sidewall of the dispensing cannula, and used for threadedly sealingly connecting with a raw material access port of the ultra-clean high-purity reagent raw material container.

9. The ultra-clean high-purity reagent dispensing device according to claim 8, characterized in that: The connecting hose is provided with an on-off control valve capable of controlling the on-off of the connecting hose.

10. The ultra-clean high-purity reagent dispensing device according to claim 9, characterized in that: The dispensing cannula, the piston, the blocking ball, the outflow rigid pipe, the push-pull rod and the threaded cap are made of high-density polyethylene material; and the bottle body, the connecting hose, the flexible film cylinder, the bottle cap and the on-off control valve are made of soluble polytetrafluoroethylene material.

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