Novel high-cleanliness intelligent storage warehouse

Abstract

The invention provides a novel high-cleanliness intelligent storage warehouse. The novel high-cleanliness intelligent storage warehouse can store products which are not operated during operation. And when the machine table is idle, the product is delivered to the idle machine table for operation, so that the production efficiency and the stability are improved. The closed cavity is provided with a material inlet and outlet; the carrying mechanism comprises an X-axis module, a Z-axis module, a Y-axis module, a rotating motor, a tray changing mechanism, a supporting arm and a suck-back arm, a lower end connector of the tray changing mechanism is used for being in butt joint with a connecting connector of the supporting arm or the suck-back arm, and the supporting arm is used for supporting the trays and transferring the trays into or out of the product storage positions; the inverse suction arm is used for sucking and placing the trays into or separating the trays from an external conveying line; a plurality of groups of product storage positions; a centering platform; the feeding buffer area is provided with a plurality of groups of feeding buffer platforms; the discharging buffer area is provided with a plurality of groups of discharging buffer platforms; a holding arm fork placing position; a suck-back arm fork placing position; and a high clean FFU.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor product production, in particular to a novel high-cleanliness intelligent storage. BACKGROUND

[0002] With the continuous development of modern industry, the automation level of semiconductor industry production is also gradually improved. In the production process, if the CT of each machine is different, the product to be operated needs to be temporarily stored if the product is being operated in the current machine, and then the material is dispatched after the operation of the machine is completed, so as to improve the machine utilization rate. Now the operation is completely manual and the product is taken and placed manually, which has great safety hidden danger, is easy to cause slide and drop, and has low efficiency and many instabilities caused by human participation. SUMMARY

[0003] In view of the above problems, the present application provides a novel high-cleanliness intelligent storage, which can store the products that cannot be operated during operation; and when the machine is idle, the products are dispatched to the idle machine for operation, thereby improving the production efficiency and stability.

[0004] A novel high-cleanliness intelligent storage, characterized in that it comprises: A closed cavity provided with a material inlet and outlet; A carrying mechanism comprising an X-axis module, a Z-axis module, a Y-axis module, a rotating motor, a disc changing mechanism, and a taking and placing arm and a suction arm, the lower end interface of the disc changing mechanism being used to connect the connecting interface of the taking and placing arm or the suction arm, the taking and placing arm being used to take and transport the tray into or out of the product storage position, and the suction arm being used to hold and place the tray into or out of the external conveying line; A plurality of groups of product storage positions; A centering platform; A feeding buffer area provided with a plurality of groups of feeding buffer platforms; A discharging buffer area provided with a plurality of groups of discharging buffer platforms; A taking and placing arm fork placement position; A suction arm fork placement position; And a high-cleanliness FFU; The top of the closed cavity is provided with at least one high-cleanliness FFU, one side of the front end area of the closed cavity is provided with a material exit and entry, and the same row area of the material exit and entry is provided with a carrying mechanism, the X-axis module of the carrying mechanism covers the X-direction of the whole closed cavity, and a plurality of product storage positions are arranged at the rear end of the closed cavity relative to the X-axis module, each column of product storage positions is arranged along the height direction, and the X-direction one end side of the closed cavity is further provided with a transfer material area corresponding to the rear of the X-axis module, and the transfer material area is arranged with corresponding centering platforms, feeding buffer areas and discharging buffer areas along the height direction, and the closed cavity is further provided with tray picking arm fork placement positions and suction arm fork placement positions.

[0005] It is further characterized in that: The X-axis module, the Z-axis module and the Y-axis module are all dust-free modules, which ensure the cleanliness of the tray and the material in the closed cavity; The feeding buffer platform and the discharging buffer platform are the same buffer platform, which comprises a first bottom plate, a plurality of first positioning blocks around the periphery, and a plurality of first supporting columns in the central area, the first supporting columns enable the tray to have a bottom insertion space, so that the tray can be picked by the tray picking arm; The centering platform comprises a second bottom plate, a plurality of second positioning blocks around the periphery, a plurality of centering positioning cylinders around the periphery, and a plurality of second supporting columns in the central area, the second supporting columns enable the tray to have a bottom insertion space, so that the tray can be picked by the tray picking arm; The feeding buffer area is arranged above the centering platform, the discharging buffer area is arranged below the centering platform, a plurality of buffer platforms of the feeding buffer area are arranged at intervals in the height direction, a plurality of buffer platforms of the discharging buffer area are arranged at intervals in the height direction, and the interval space in the height direction ensures that the suction arm can reliably drive the tray to enter and exit; The centering platform and the buffer platforms above and below the centering platform are both provided with interval spaces in the height direction, and the interval space in the height direction ensures that the suction arm can reliably drive the tray to enter and exit; The closed cavity is arranged with two columns of product storage positions at the rear end relative to the X-axis module, each column of product storage positions comprises height-directionally spaced-apart barriers on both sides, and the corresponding edges of the tray in the storage state are supported on the bottom edges of the barriers, and the height-directionally adjacent barrier distances ensure that the tray picking arm enters the work; The tray picking arm fork placement position is arranged at the bottom of one column of product storage positions close to the transfer material area, and the suction arm fork placement position is arranged at the bottom of the transfer material area; The tray picking arm fork placement position comprises a third bottom plate, a first limiting block and first rotating cylinders on both sides, the locked tray picking arm comprises two arms and a plurality of suction nozzles on the upper surface of the arms; The suction arm fork placement position comprises a fourth bottom plate, second arm limiting blocks on both sides, and a second rotary air cylinder on the inner side of the arm, the suction arm for locking comprises arms on both sides and a plurality of suction nozzles on the lower surface of the arm; The number of the high-cleanliness FFUs is two, and the two groups of high-cleanliness FFUs are arranged on the top of the closed cavity to ensure the cleanliness inside the closed cavity. The front end face of the closed cavity is made of transparent material to ensure that the internal state is visible.

[0006] After the scheme of the application is adopted, when the storage bin is stored, the carrying mechanism is assembled with the suction arm, the suction arm obtains the tray from the external conveying line through the material inlet and outlet by the three-axis module, and then the three-axis module is transported to the centering platform to complete the centering operation of the tray, or is transported to the feeding buffer platform to wait for the centering operation, and then the tray is carried to the corresponding product storage position by switching the taking arm; when the storage bin is dispatched, the carrying mechanism is assembled with the taking arm, the corresponding tray is carried and transported to the centering platform or the discharging buffer platform by the three-axis module, and then the carrying mechanism is switched to the suction arm, the corresponding tray is sucked and held, and then the tray is transported to the external conveying line through the material inlet and outlet; the product that fails to work can be stored when work is performed; and the product is dispatched to the idle machine table for work when the machine table is idle, thereby improving the production efficiency and stability. BRIEF DESCRIPTION OF DRAWINGS

[0007] Figure 1 It is a perspective view structural schematic diagram of the application; Figure 2 It is a perspective view of the carrying mechanism (provided with the taking arm and the tray) of the application; Figure 3 It is a perspective view of the buffer platform of the application; Figure 4 It is a perspective view of the centering platform of the application; Figure 5 It is a perspective view of the taking arm fork placement position of the application; Figure 6 It is a perspective view of the suction arm fork placement position of the application; The names corresponding to the serial numbers in the figure are as follows: The closed cavity 10, the material access 11, the carrying mechanism 20, the X-axis module 21, the Z-axis module 22, the Y-axis module 23, the rotating motor 24, the disc changing mechanism 25, the lower end interface 251, the taking and placing arm 26, the connecting interface 261, the product storage 30, the barrier 31, the centering platform 40, the second bottom plate 41, the second positioning block 42, the centering positioning cylinder 43, the second supporting column 44, the feeding buffer area 50, the discharging buffer area 60, the taking and placing arm fork placement position 70, the third bottom plate 71, the first limiting block 72, the first rotating cylinder 73, the inverted suction arm fork placement position 80, the fourth bottom plate 81, the second arm limiting block 82, the second rotating cylinder 83, the high-clean FFU 90, the tray 100, the buffer platform 110, the first bottom plate 1, the first positioning block 2, the first supporting column 3, the transfer material area 120. DETAILED DESCRIPTION

[0008] A novel high-clean intelligent storage, see Figures 1-6 , comprising a closed cavity 10, a carrying mechanism 20, a plurality of product storage 30, a centering platform 40, a feeding buffer area 50, a discharging buffer area 60, a taking and placing arm fork placement position 70, an inverted suction arm fork placement position 80, and a high-clean FFU 90. The closed cavity 10 is provided with a material access 11; the carrying mechanism 20 comprises an X-axis module 21, a Z-axis module 22, a Y-axis module 23, a rotating motor 24, a disc changing mechanism 25, and a taking and placing arm 26, an inverted suction arm (blocked in the figure), the lower end interface 251 of the disc changing mechanism 25 is used to connect the connecting interface 261 of the taking and placing arm 26 or the inverted suction arm, the taking and placing arm 26 is used to take and transfer the tray 100 into or out of the product storage 30, and the inverted suction arm is used to hold and place the tray 100 into or out of the external conveying line. The feeding buffer area 50 is provided with a plurality of feeding buffer platforms; The discharging buffer area 60 is provided with a plurality of discharging buffer platforms; The top of the closed cavity 10 is provided with at least one high-clean FFU 90, the front end area of the closed cavity 10 is provided with a material access 11 on one side, the same row area of the material access 11 is provided with a carrying mechanism 20, the X-axis module 21 of the carrying mechanism 20 covers the X-directional arrangement of the entire closed cavity 10, the rear end of the closed cavity 10 relative to the X-axis module 21 is arranged with a plurality of columns of product storage 30, each column of product storage 30 is arranged along the height direction, the X-directional one end side of the closed cavity 10, corresponding to the rear of the X-axis module 21, is further provided with a transfer material area 120, the transfer material area 120 is arranged with corresponding centering platforms 40, feeding buffer areas 50, and discharging buffer areas 60 along the height direction, and the closed cavity 10 is further provided with a taking and placing arm fork placement position 70 and an inverted suction arm fork placement position 80.

[0009] In specific implementation, the X-axis module 21, the Z-axis module 22 and the Y-axis module 23 are all dust-free modules, which ensure the cleanliness of the tray and the material in the closed cavity 10. The feeding buffer platform and the discharging buffer platform are the same buffer platform 110, which includes a first bottom plate 1, first positioning blocks 2 around the periphery, and a plurality of first support columns 3 in the central region. The first support columns 3 enable the tray 100 to have a bottom insertion space, so that the tray 100 can be taken by the taking arm. The centering platform 40 includes a second bottom plate 41, second positioning blocks 42 around the periphery, centering positioning air cylinders 43 around the periphery, and a plurality of second support columns 44 in the central region. The second support columns 44 enable the tray 100 to have a bottom insertion space, so that the tray 100 can be taken by the taking arm 26.

[0010] In specific embodiments, the feeding buffer area 50 is arranged above the centering platform 40, and the discharging buffer area 60 is arranged below the centering platform 40. The buffer platforms 110 of the feeding buffer area 50 are arranged in height direction with a space therebetween, and the buffer platforms 110 of the discharging buffer area 60 are arranged in height direction with a space therebetween. The space between the buffer platforms 110 ensures that the tray 100 can be reliably taken in and out by the suction arm. The centering platform 40 and the buffer platforms 110 above and below the centering platform 40 are both arranged with a space in height direction. The space between the buffer platforms 110 ensures that the tray 100 can be reliably taken in and out by the suction arm.

[0011] In specific embodiments, the closed cavity 10 is arranged with two rows of product storage positions 30 relative to the rear end of the X-axis module 21. Each row of product storage positions 30 includes two side height direction spaced apart barriers 31. The corresponding side of the tray 100 in the storage state is supported on the bottom side of the barrier 31. The distance between the adjacent barriers 31 in height direction ensures that the taking arm 26 can enter the work area. The taking arm fork placement position 70 is arranged at the bottom of one row of product storage positions 30 near the transfer area 120, and the suction arm fork placement position 80 is arranged at the bottom of the transfer area 120. The taking arm fork placement position 70 includes a third bottom plate 71, first limiting blocks 72, and first rotating air cylinders 73 on both sides. The taking arm 26 used for locking includes two arms and a plurality of suction nozzles on the upper surface of the arm. The suction arm fork placement position 80 includes a fourth bottom plate 81, second arm limiting blocks 82 on both sides, and second rotating air cylinders 83 on the inner side of the arm. The suction arm used for locking includes two arms and a plurality of suction nozzles on the lower surface of the arm. The number of high-cleanliness FFUs 90 is two. Two groups of high-cleanliness FFUs 90 are arranged on the top of the closed cavity, which ensures the cleanliness of the inside of the closed cavity.

[0012] In specific embodiments, the front end face of the closed cavity 10 is made of transparent material to ensure that the internal state is visible.

[0013] In specific embodiments, the material inlet and outlet 11 is arranged close to the transfer area 120.

[0014] The working process is as follows: when the storage is stored, the carrying mechanism is assembled with the reverse suction arm, the reverse suction arm obtains the tray from the external conveying line through the three-axis module through the material inlet and outlet, and then is transferred to the centering platform through the three-axis module to complete the centering operation of the tray, or is transferred to the feeding buffer platform to wait for the centering operation, and then the tray is carried to the corresponding product storage position through the switching of the taking arm; when the storage is dispatched, the carrying mechanism is assembled with the taking arm, the corresponding tray is taken and transferred to the centering platform or the discharging buffer platform through the three-axis module, and then the carrying mechanism is switched to the reverse suction arm, the corresponding tray is sucked and held, and then the tray is transferred to the external conveying line through the material inlet and outlet; it can store the products that cannot be operated during operation; and when the machine is idle, the products are dispatched to the idle machine for operation, improving the production efficiency and stability.

[0015] It is apparent to those skilled in the art that the present application is not limited to the details of the foregoing exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all respects as illustrative and not restrictive, and the scope of the present application should be defined by the appended claims rather than the above description, and it is intended to include all changes falling within the meaning and range of equivalents of the claims. Any reference signs in the claims should not be considered as limiting the claims involved.

[0016] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.

Claims

1. A new type of high cleanliness intelligent storage repository, characterized by, It comprises: a closed cavity provided with a material outlet; a conveying mechanism comprising an X-axis module, a Z-axis module, a Y-axis module, a rotating motor, a disc changing mechanism, and a picking arm and a suction arm, the lower end of the disc changing mechanism is connected to the connecting interface of the picking arm or the suction arm, the picking arm is used to pick and transport the tray into or out of the product storage, and the suction arm is used to suck and hold the tray into or out of the external conveying line; a plurality of groups of product storage; a centering platform; a feeding buffer area provided with a plurality of groups of feeding buffer platforms; a discharging buffer area provided with a plurality of groups of discharging buffer platforms; a picking arm fork placement position; a suction arm fork placement position; and a high-cleanliness FFU; The top of the closed cavity is provided with at least one high-cleanliness FFU, one side of the front end area of the closed cavity is provided with a material outlet, the same row area of the material outlet is provided with a conveying mechanism, the X-axis module of the conveying mechanism covers the X-directional arrangement of the entire closed cavity, the rear end of the closed cavity relative to the X-axis module is arranged with a plurality of columns of product storage, each column of product storage is arranged along the height direction, and the X-directional one end side of the closed cavity, corresponding to the rear of the X-axis module, is further provided with a transfer area, the transfer area is arranged along the height direction with corresponding centering platforms, feeding buffer areas, and discharging buffer areas, and the closed cavity is further provided with picking arm fork placement positions and suction arm fork placement positions.

2. A novel high cleanliness smart repository as claimed in claim 1, wherein: The X-axis module, the Z-axis module, and the Y-axis module are all dust-free modules.

3. A novel high cleanliness smart repository as claimed in claim 1, wherein: The feeding buffer platforms and the discharging buffer platforms are the same buffer platforms, which comprise a first bottom plate, first positioning blocks around the periphery, and a plurality of first support columns in the central area, the first support columns enable the tray to have a bottom insertion space, so that the tray can be picked by the picking arm.

4. A novel high cleanliness smart repository as claimed in claim 1, wherein: The centering platform comprises a second bottom plate, second positioning blocks around the periphery, centering positioning air cylinders around the periphery, and a plurality of second support columns in the central area, the second support columns enable the tray to have a bottom insertion space, so that the tray can be picked by the picking arm.

5. A novel high cleanliness smart repository as claimed in claim 3, wherein: The feeding buffer area is arranged above the centering platform, the discharging buffer area is arranged below the centering platform, a plurality of buffer platforms of the feeding buffer area are arranged at intervals in the height direction, a plurality of buffer platforms of the discharging buffer area are arranged at intervals in the height direction, and the interval in the height direction ensures that the suction arm can reliably drive the tray in and out.

6. A novel high cleanliness smart repository as claimed in claim 3, wherein: The centering platform and the buffer platforms above and below it are both provided with intervals in the height direction, and the interval in the height direction ensures that the suction arm can reliably drive the tray in and out.

7. A novel high cleanliness smart repository as claimed in claim 1, wherein: The closed cavity is arranged with two columns of product storage relative to the rear end of the X-axis module, and each column of product storage comprises height-directionally spaced barriers, the corresponding side of the tray in the storage state is supported on the bottom edge of the barrier, and the distance between the height-directionally adjacent barriers ensures that the picking arm enters the work.

8. A novel high cleanliness smart repository as claimed in claim 1, wherein: The picking arm fork placement position is arranged at the bottom of one column of product storage close to the transfer area, and the suction arm fork placement position is arranged at the bottom of the transfer area.

9. A novel high cleanliness smart repository as claimed in claim 8, wherein: The placing position of the forked picking arm comprises a third bottom plate, a first limiting block and a first rotary air cylinder on both sides, and the picking arm for locking comprises two arms and a plurality of suction nozzles on the upper surface of the arms; The placing position of the inverted suction arm fork comprises a fourth bottom plate, a second arm limiting block on both sides and a second rotary air cylinder on the inner side of the arms, and the inverted suction arm for locking comprises two arms and a plurality of suction nozzles on the lower surface of the arms.

10. A novel high cleanliness smart repository as claimed in claim 1, wherein: The number of the high-cleanliness FFUs is two, and the two groups of high-cleanliness FFUs are arranged on the top of the closed cavity.

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