Vacuum angle valve structure capable of monitoring failure of corrugated pipe

Abstract

The invention provides a vacuum angle valve structure capable of monitoring corrugated pipe failure, and relates to the technical field of valve body structures. Comprising a valve body provided with a first connecting port and a second connecting port, a corrugated pipe assembly arranged in the valve body, an air cylinder assembly connected to the valve body and a pressure sensor. The air cylinder assembly is provided with a piston rod which extends into the valve body and is connected with the valve plate so as to control communication and closing of the first connecting port and the second connecting port. A monitoring cavity is formed in the corrugated pipe, the pressure sensor is connected into the monitoring cavity to monitor periodic pressure changes in the monitoring cavity, and the vacuum failure position is judged according to signals fed back by the pressure changes. According to the scheme, the failure state and the failure position of the valve body can be accurately recognized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of valve body structure, in particular to a vacuum angle valve structure capable of monitoring the failure of bellows. BACKGROUND

[0002] As a key component for controlling vacuum environment, vacuum valve plays an important role in the field of precision manufacturing such as semiconductor. There are three main technical defects in traditional vacuum angle valve. First, its airtight range is limited to the chamber structure formed by bellows and valve body, and the rest is directly exposed to the atmosphere. Once external leakage occurs, it will cause the entire process material to be scrapped, resulting in significant economic losses. Second, the service life of the existing vacuum angle valve can only be predicted by experience value. This prediction method has low reliability, which may lead to resource waste due to premature replacement, or may cause unexpected failure risk due to inaccurate prediction. In particular, the fatigue failure problem of bellows structure in long-term reciprocating motion becomes a key factor affecting the stability of the process of the equipment. Third, the traditional structure lacks effective monitoring means for the sealing failure of the cylinder assembly. When the compressed air leaks between the piston rod and the cylinder shell, it is difficult to find out in time, which not only causes energy waste, but also increases the difficulty of troubleshooting. These problems seriously restrict the application reliability of vacuum angle valve in the field of precision manufacturing. SUMMARY

[0003] The purpose of the present application is to provide a vacuum angle valve structure capable of monitoring the failure of bellows and a monitoring method thereof, which has the advantages of real-time monitoring of the sealing state of bellows and cylinder, accurate judgment of failure position, and avoidance of process interruption and material scrap.

[0004] The present application adopts the following scheme: A vacuum angle valve structure capable of monitoring the failure of bellows, comprising a valve body having a first connection port and a second connection port, a bellows assembly arranged in the valve body, and a cylinder assembly connected to the valve body, further comprising a pressure sensor; wherein the cylinder assembly has a piston rod extending into the interior of the valve body and connecting a valve plate to control the communication and closure of the first connection port and the second connection port; a monitoring cavity is formed in the bellows, and the pressure sensor is connected to the monitoring cavity to monitor the periodic pressure change in the monitoring cavity, and the vacuum failure position is determined according to the signal feedback by the pressure change.

[0005] Further, the vacuum angle valve structure is adapted to determine the vacuum failure position according to the signal feedback by the pressure change, and perform the following actions: a. When the pressure sensor detects that the internal pressure of the monitoring cavity is lower than the bottom pressure of the vacuum environment, it is judged that the bellows assembly fails or leaks, at this time the valve body does not exist external leakage, and the equipment in the process can continue to produce to complete the production task; b. When the pressure sensor detects positive pressure and is greater than the initial maximum pressure, it is determined that the positive pressure in the cylinder assembly is caused by the leakage of compressed air to the monitoring cavity due to the sealing failure of the cylinder assembly, at this time the bellows assembly is not failed, the valve body is not externally leaked, and the equipment can continue to produce to complete the production task; c. When the pressure sensor detects that the pressure in the monitoring cavity does not match the pressure change caused by the movement of the angular valve in the normal state, and the pressure state is different from the pressure states of a and b, it is determined that the sealing of the bellows assembly and the cylinder assembly is failed, at this time it is determined that the equipment is externally leaked, and the process production task is immediately stopped.

[0006] Further, the cylinder assembly is connected to the third connecting port of the valve body through a mounting plate, and the mounting plate is provided with sealing rings connecting the cylinder assembly and the valve body on the upper and lower sides thereof.

[0007] Further, an air passage is formed on the mounting plate, the air passage communicates with the monitoring cavity, and the pressure sensor is connected to the air passage to monitor the air pressure of the monitoring cavity.

[0008] Further, the piston rod of the cylinder assembly is provided with air holes above and below the piston rod.

[0009] Further, the valve plate is arranged below the bellows assembly and surrounds the monitoring cavity with the bellows assembly, the mounting plate and the shell of the cylinder assembly.

[0010] Further, the side of the valve plate facing the second connecting port is provided with a sealing member to ensure the disconnection of the first connecting port and the second connecting port in the closed state.

[0011] Advantages: The vacuum angular valve structure capable of monitoring the failure of the bellows and the monitoring method thereof provided by the application can accurately identify the sealing failure state of the bellows assembly or the cylinder assembly by setting the monitoring cavity containing the pressure sensor to detect the pressure change in real time, effectively solve the technical problems that the conventional vacuum angular valve cannot detect the leakage in time and is difficult to determine the failure position, and have the advantages of avoiding process interruption and material scrapping and improving the operation reliability of the equipment. Through the present application: 1) The sealing structure failure of the bellows and the cylinder can be monitored.

[0012] 2) The angular valve does not need to be replaced in advance, and the utilization rate of the theoretical service life value of the angular valve is greatly improved.

[0013] 3) The present application can still ensure the equipment to continue to complete the production task under the above-mentioned a and b failure conditions, and greatly reduces the production scrapping loss caused by the fatigue failure of the angular valve bellows. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a cross-sectional view of a vacuum angle valve structure capable of monitoring the failure of a bellows according to an embodiment of the present application; Figure 2 is a whole view of a vacuum angle valve structure capable of monitoring the failure of a bellows according to an embodiment of the present application; Reference signs: valve body 1, first connection port 11, second connection port 12, third connection port 13, bellows assembly 2, monitoring cavity 21, cylinder assembly 3, piston rod 31, air hole 32, shell 33, mounting plate 4, air cavity 41, valve plate 5, pressure sensor 6, sealing ring 7, sealing element 8. DETAILED DESCRIPTION

[0015] In combination Figures 1-2 As shown, the embodiment provides a vacuum angle valve structure capable of monitoring the failure of a bellows, which comprises a valve body 1 having a first connection port 11 and a second connection port 12, a bellows assembly 2 arranged in the valve body 1, and a cylinder assembly 3 connected to the valve body 1, and further comprises a pressure sensor 6; wherein the cylinder assembly 3 has a piston rod 31 extending into the interior of the valve body 1 and connected to a valve plate 5 to control the communication and closure of the first connection port 11 and the second connection port 12; the bellows has a monitoring cavity 21 formed therein, and the pressure sensor 6 is connected to the monitoring cavity 21 to monitor the periodic pressure change in the monitoring cavity 21, and determine the vacuum failure position according to the signal feedback of the pressure change.

[0016] The pressure sensor 6 can be realized by a piezoresistive or piezoelectric sensor to capture the pressure fluctuation in the monitoring cavity 21 in real time. The monitoring cavity 21 refers to a closed space inside the bellows assembly 2 surrounded by the bellows assembly 2, the valve plate 5 and the cylinder shell 33, which can be realized by forming an independent chamber through the structure of the bellows itself, and its function is to isolate the process medium from the external environment and provide a physical space for pressure monitoring. The periodic pressure change refers to the regular change of the volume of the monitoring cavity 21 caused by the movement of the piston rod 31 during the opening and closing of the angle valve, which is specifically manifested as the waveform characteristics of the pressure curve, and its function is to establish the pressure change reference under normal working conditions.

[0017] When the angular valve performs opening and closing actions, the piston rod 31 drives the valve plate 5 to move, causing the volume of the monitoring cavity 21 to change, and the pressure sensor 6 continuously records the pressure data in the cavity. Under normal conditions, the pressure change presents a periodic waveform with a specific amplitude and frequency. When the bellows is broken or leaks, the monitoring cavity 21 is connected to the vacuum environment, causing the pressure to drop to the bottom pressure of the vacuum environment, for example, usually in the range of 1-10 Pa absolute pressure, at which time the pressure sensor 6 outputs a -101.3 kPa gauge pressure signal. If the cylinder seal fails, compressed air (usually 0.2-0.4 MPa positive pressure) enters the monitoring cavity 21, exceeding the initial maximum pressure threshold of the monitoring cavity 21. When atypical pressure characteristics appear, the system determines a composite failure and triggers a shutdown protection.

[0018] The embodiment realizes accurate identification of failure modes by establishing a corresponding relationship between pressure characteristics and failure types. In the prior art, cylinder leakage cannot be effectively detected, but the design extends the monitoring cavity 21 to the cylinder sealing area, which can simultaneously monitor the sealing state of the piston rod 31. Compared with the experience-based maintenance method, the present scheme significantly improves the maintenance efficiency through data-driven decision-making.

[0019] Through the above technical scheme, the application can identify three failure modes of bellows rupture, cylinder leakage and composite failure in real time, and timely issue a graded alarm while maintaining process continuity. When a single failure is detected and the valve body 1 does not leak, the current production cycle is allowed to be completed to avoid sudden material scrap. For composite failure, which may cause the valve body 1 to leak, immediate shutdown is required. At the same time, by accurately distinguishing the failure types, the downtime for equipment maintenance is greatly shortened, and unnecessary losses are reduced.

[0020] In the embodiment, the vacuum angular valve structure is suitable for determining the vacuum failure position according to the signals fed back by the pressure change, and performing the following actions: a. When the pressure sensor 6 detects that the pressure inside the monitoring cavity 21 is lower than the bottom pressure of the vacuum environment, at which time the pressure sensor 6 gauge pressure feedback signal forms an angular valve abnormal signal, it is determined that the bellows assembly 2 is failed or leaked, and at this time the valve body 1 does not exist external leakage, and the equipment being processed can continue to produce to complete the current production task; b. When the pressure sensor 6 detects a positive pressure greater than the initial maximum pressure, it is determined that the positive pressure compressed air in the cylinder assembly 3 leaks to the monitoring cavity 21 due to the sealing failure of the cylinder assembly 3, at which time the bellows assembly 2 is not failed, the valve body 1 does not exist external leakage, and the equipment being processed can continue to produce to complete the current production task; c. When the pressure sensor 6 detects that the pressure in the monitoring cavity 21 does not match the pressure change caused by the movement state change of the angular valve under normal conditions, and is different from the pressure state of the above-mentioned a and b, it is determined that the seals of the bellows assembly 2 and the cylinder assembly 3 are both failed, at which time it is determined that the equipment is externally leaked, and the process production task is immediately stopped.

[0021] The vacuum failure position refers to a specific area in the bellows assembly 2 or the cylinder assembly 3 where gas leakage occurs, such as a sudden pressure drop or an abnormal pressure rise corresponding to different leakage sources. The bottom pressure refers to the minimum absolute pressure range during vacuum environment operation, which can be 1-10 Pa, for example, and can be maintained by a vacuum pump. The positive pressure compressed air leakage refers to the compressed air inside the cylinder assembly 3 for driving the piston rod 31 entering the monitoring cavity 21 due to seal failure, for example, the pressure range of the positive pressure compressed air can be 0.2-0.4 MPa, which exceeds the upper limit of the pressure fluctuation of the monitoring cavity 21 in the normal angular valve movement. The pressure change mismatch refers to a significant deviation between the pressure curve of the monitoring cavity 21 and the standard pressure curve of the angular valve opening and closing action, which can be realized by comparing real-time data with a preset model through a logic controller, for example, an abnormal pressure rise rate or a missing pressure peak.

[0022] The pressure sensor 6 continuously collects pressure data in the monitoring cavity 21 and distinguishes three failure modes through a preset logic. When the pressure is detected to be lower than the bottom pressure, it indicates that the bellows rupture seal leaks, causing the environment inside the valve body 1 to communicate with the monitoring cavity 21, at which time only the abnormality needs to be marked, but the device is allowed to complete the current process, and then maintenance is performed after the process is completed to avoid material waste; when the positive pressure is detected to exceed the initial maximum pressure, it indicates that the cylinder seal fails, causing compressed air to enter the monitoring cavity 21, at which time production can be maintained, and then maintenance is performed after the process is completed to avoid material waste; when the pressure change neither meets the vacuum leakage characteristics nor meets the positive pressure leakage characteristics, and at the same time does not meet the pressure curve change in the normal working state, it is determined as a composite failure, which may exist valve body 1 leaks, at which time normal process production cannot be performed, and immediate shutdown is required to prevent external leakage. Through pressure change mode recognition, the leakage position can be accurately located without interrupting production, while avoiding unnecessary shutdown caused by misjudgment, solving the problem that traditional vacuum angular valves cannot distinguish between bellows failure and cylinder seal failure in real time.

[0023] Continuing to combine Figure 1 As shown in the embodiment, the cylinder assembly 3 is connected to the third connection port 13 of the valve body 1 through the mounting plate 4, and the mounting plate 4 is provided with a sealing ring 7 connected to the cylinder assembly 3 and the valve body 1 on the upper and lower sides. The third connection port 13 refers to the interface on the valve body 1 for mounting the cylinder assembly 3, which can be designed as a flange structure or a threaded interface to achieve airtight connection. The sealing ring 7 refers to a ring-shaped elastic element arranged at the contact surface of the mounting plate 4, the valve body 1 and the cylinder assembly 3, which can be made of fluororubber or silicone, used to block the gas leakage path. Effectively solves the problem of gas leakage at the connection between the cylinder assembly 3 and the valve body 1, prevents energy waste caused by compressed air leakage, and avoids pressure abnormalities in the vacuum environment due to leakage.

[0024] In this embodiment, the installation plate 4 is formed with a ventilation cavity 41, which is connected to the monitoring cavity 21, and the pressure sensor 6 is connected to the ventilation cavity 41 to monitor the air pressure of the monitoring cavity 21. Here, the ventilation cavity 41 refers to a gas flow space inside the installation panel, which can be realized by machining a through channel or a groove structure inside the installation panel, and its function is to transmit the gas pressure change between the monitoring cavity 21 and the pressure sensor 6. The installation plate 4 is connected to the valve body 1 and the cylinder assembly 3 through the sealing ring 7, and the ventilation cavity 41 is formed inside the installation plate 4. One end of the ventilation cavity 41 is connected to the monitoring cavity 21 surrounded by the bellows assembly 2 through a pipeline or a hole, and the other end is connected to the pressure sensor 6. When the pressure fluctuates inside the monitoring cavity 21 due to the sealing failure of the bellows or the cylinder, the gas is transmitted to the pressure sensor 6 through the ventilation cavity 41, and the pressure sensor 6 converts the pressure change into an electrical signal and outputs it to the external control system or displays it through a pressure gauge. Since the pressure sensor 6 is not directly installed inside the monitoring cavity 21, but is indirectly connected through the ventilation cavity 41, the pressure sensor 6 can be installed outside the valve body 1, which is convenient for installation and connection. By integrating the ventilation cavity 41 structure through the installation plate 4, the pressure sensor 6 can be arranged at a position outside the valve body 1 which is easy to maintain, while reducing the probability of contact between the sensor and high-temperature or corrosive medium, improving the detection reliability.

[0025] The piston rod 31 of the cylinder assembly 3 is provided with a ventilation hole 32 above and below. The ventilation hole 32 refers to a hole structure arranged at the upper and lower ends of the movement path of the piston rod 31. The positive pressure compressed air is input through the ventilation hole 32 to drive the piston rod 31 to move up and down, thereby controlling the opening and closing of the first connection port 11 and the second connection port 12.

[0026] In this embodiment, the valve plate 5 is arranged below the bellows assembly 2 and surrounds the monitoring cavity 21 with the bellows assembly 2, the installation plate 4 and the shell 33 of the cylinder assembly 3. The valve plate 5 refers to a plate structure for blocking or conducting fluid passage, which realizes lifting movement by being driven by the piston rod 31. The valve plate 5 is arranged at the bottom region of the bellows assembly 2, and when the piston rod 31 drives the valve plate 5 to perform opening and closing action, the bellows assembly 2 expands and contracts synchronously with the valve plate 5. The installation plate 4 and the cylinder shell 33 are fixedly connected through the sealing ring 7, and together with the bellows assembly 2 form the boundary of the monitoring cavity 21. When the angle valve is working normally, the monitoring cavity 21 is in a sealed state, and the internal pressure change is only caused by the expansion and contraction deformation or sealing failure of the bellows. When the bellows is broken, the vacuum environment will invade the monitoring cavity 21 through the crack; when the cylinder sealing fails, the compressed air will leak into the monitoring cavity 21. The pressure sensor 6 continuously collects the pressure data in the monitoring cavity 21, and by analyzing the pressure fluctuation characteristics, the specific failure mode can be judged.

[0027] The valve plate 5 cooperates with multiple components to construct a closed cavity for failure detection. This structural innovation enables the pressure sensor 6 to directly sense the double sealing state of the bellows and the cylinder, overcoming the defect of traditional structures that cannot distinguish the failure source. The physical isolation design of the monitoring cavity 21 also avoids cross-contamination between the process medium and the detection system. Further, the side of the valve plate 5 facing the second connection port 12 is provided with a seal 8 to ensure the disconnection of the first connection port 11 and the second connection port 12 in the closed state. The seal 8 refers to an elastic sealing structure installed on the contact surface of the valve plate 5 and the second connection port 12, which can be implemented by an annular sealing ring 7 made of rubber, silicone or polytetrafluoroethylene material. Its function is to fill the gap between the contact surfaces by being deformed under pressure when the valve plate 5 is closed, thereby blocking the medium from passing through to form a seal.

[0028] Through the above embodiment scheme, the pressure change in the monitoring cavity 21 is monitored by the pressure sensor 6, so as to logically judge whether the angle valve is abnormal, and to infer the abnormal point to assist the equipment to make an alarm signal, which can effectively avoid the waste of materials.

[0029] It should be understood that the above is only a preferred embodiment of the present application, and the protection scope of the present application is not limited to the above embodiment. Any technical solution falling within the scope of the present application shall be within the protection scope of the present application.

[0030] The above introduction of the drawings used in the embodiments only shows some embodiments of the present application and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained from the above drawings without creative labor.

Claims

1. A vacuum angle valve structure capable of monitoring failure of a bellows, comprising a valve body having a first connection port and a second connection port, a bellows assembly disposed in the valve body, and a cylinder assembly connected to the valve body, characterized in that, Further comprising a pressure sensor; wherein the cylinder assembly has a piston rod extending into the valve body and connecting a valve plate to control the communication and closure of the first and second connection ports; the bellows has a monitoring cavity formed therein, and the pressure sensor is connected to the monitoring cavity to monitor the periodic pressure changes in the monitoring cavity and determine the vacuum failure position according to the feedback signals of the pressure changes.

2. The vacuum angle valve structure monitorable for failure of a bellows according to claim 1, characterized by, The vacuum angle valve structure is adapted to determine the vacuum failure position according to the feedback signals of the pressure changes and perform the following actions: a. When the pressure sensor detects that the pressure inside the monitoring cavity is lower than the bottom pressure of the vacuum environment, it is determined that the bellows assembly is failed or leaked, at this time the valve body does not have external leakage, and the equipment in the process can continue to produce to complete the current production task; b. When the pressure sensor detects positive pressure and the pressure is greater than the initial maximum pressure, it is determined that the positive pressure compressed air in the cylinder assembly leaks to the monitoring cavity due to the sealing failure of the cylinder assembly, at this time the bellows assembly is not failed, the valve body does not have external leakage, and the equipment in the process can continue to produce to complete the current production task; c. When the pressure sensor detects that the pressure in the monitoring cavity does not match the pressure change caused by the movement of the angle valve in the normal state, and the pressure state is different from the pressure states of a and b, it is determined that the sealing of the bellows assembly and the cylinder assembly is failed, at this time it is determined that the equipment has external leakage, and the process production task is immediately stopped.

3. The vacuum angle valve structure monitorable for failure of a bellows according to claim 1, characterized by, The cylinder assembly is connected to the third connection port of the valve body through a mounting plate, and the mounting plate has a sealing ring on the upper and lower sides to connect the cylinder assembly and the valve body.

4. The vacuum angle valve structure monitorable for failure of a bellows according to claim 3, characterized by, An air passage is formed on the mounting plate, the air passage communicates with the monitoring cavity, and the pressure sensor is connected to the air passage to monitor the air pressure of the monitoring cavity.

5. The vacuum angle valve structure monitorable for failure of a bellows according to claim 1, characterized by, The piston rod of the cylinder assembly has an air passage on the upper and lower sides.

6. The vacuum angle valve structure monitorable for failure of a bellows according to claim 3, characterized by, The valve plate is arranged below the bellows assembly and forms a closed monitoring cavity with the bellows assembly, the mounting plate, and the shell of the cylinder assembly.

7. The vacuum angle valve structure monitorable for failure of a bellows according to claim 1, characterized by, The side of the valve plate facing the second connection port is provided with a sealing element to ensure the disconnection of the first and second connection ports in the closed state.

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