All-angle mode hemispherical resonator gyroscope electrode structure

Abstract

The invention provides an all-angle mode hemispherical resonator gyroscope electrode structure. The all-angle mode hemispherical resonator gyroscope electrode structure comprises a quartz glass substrate and a signal guide pin, on the basis of an independent electrode structure, a complete annular electrode area in the circumferential direction is added and used for amplitude control stress application of the full-angle mode hemispherical resonator gyroscope, and control errors introduced by machining errors when electrodes are segmented in the circumferential direction and stress application efficiency reduction and control noise caused by time division multiplexing of the electrodes can be effectively avoided. Through the design of the electrode size and the electrode signal path, the signal extraction of the independent electrode and the annular electrode is realized, the coupling interference is avoided, and the control efficiency is optimized.

Description

TECHNICAL FIELD

[0001] The application relates to a full-angle mode hemispherical resonator gyroscope electrode structure and belongs to the full-angle mode hemispherical resonator gyroscope structure design field. BACKGROUND

[0002] The hemispherical resonator gyroscope is a solid-state wave gyroscope based on the Coriolis effect, has simple structure, high precision and good reliability, and is widely applied to many fields such as aviation, aerospace and strategic navigation.

[0003] The core parts of the hemispherical resonator gyroscope are a hemispherical resonator and an electrode base, the electrode base surface is plated with a conductive film layer, the film layer on the electrode base surface is divided into uniformly distributed independent electrodes through mechanical processing or laser etching technology, a capacitor is formed between the conductive film layer plated on the surface of the resonator and the electrode base, the vibration displacement of the resonator is detected by utilizing the capacitance change between the electrode and the resonator, and the vibration of the resonator is driven and controlled by utilizing the electrostatic force between the electrode and the resonator.

[0004] The control of the amplitude of the full-angle mode hemispherical resonator gyroscope usually adopts a parameter excitation mode, that is, a uniform control voltage is simultaneously applied to the circumference of the resonator, so that the gyro error caused by the direction error of the force can be effectively avoided. The electrode base surface is usually uniformly distributed with eight independent electrodes, vibration signal detection, amplitude control, orthogonal control and the like are realized through time division multiplexing, and the force of the amplitude control is realized by applying the same voltage to the eight electrodes. In the actual manufacturing of the hemispherical resonator gyroscope, due to the electrode processing forming error, the gain error of each signal and the like, the size and direction of the force of the eight electrodes exist non-symmetrical error in the circumferential direction, and the resultant force will introduce gyro error. In addition, the time division control mode will cause the effective time length of the amplitude control to be shortened, so that the control efficiency is reduced, and the attenuation of the amplitude in the non-control period will introduce additional output noise. SUMMARY

[0005] The technical problem to be solved by the application is that, in view of the defects in the prior art, a full-angle mode hemispherical resonator gyroscope electrode structure is provided to realize uniform force of the hemispherical resonator gyroscope amplitude control along the circumferential direction of the resonator and improve the control efficiency of the resonator amplitude.

[0006] The technical solution adopted by the application is that a full-angle mode hemispherical resonator gyroscope electrode structure comprises a quartz glass base body and a signal lead pin.

[0007] The quartz glass base comprises a top surface, a bottom surface and a spherical side surface; the quartz glass base is provided with a plurality of through holes in the circumferential direction, and a signal lead pin is arranged in each through hole; the quartz glass base is assembled and connected with the base of the gyroscope through the planar area of the bottom surface or through the signal lead pin; the quartz glass base is provided with a mounting hole along the central axis and is assembled and connected with the resonator handle; the surface of the quartz glass base is coated with a conductive film layer; and the spherical area of the quartz glass base is divided into a plurality of independent electrodes and ring electrodes, and there is a film-coated area for signal shielding between the plurality of independent electrodes and the ring electrodes.

[0008] Further, the signal lead pin is made of a metal material with a low linear expansion coefficient, and the linear expansion coefficient is less than 5*10 -6 / ℃.

[0009] Further, the film-coating method of the conductive film layer on the surface of the quartz glass base adopts magnetron sputtering, and the film layer material adopts chromium, gold, platinum or copper.

[0010] Further, the division of each film-coated area is realized by laser etching or mechanical processing, and the etching interval width is 0.05mm-0.2mm.

[0011] Further, the ring electrode is distributed at a position close to the resonator lip, and the plurality of independent electrodes are uniformly distributed in the small end of the spherical area of the quartz glass base in the circumferential direction.

[0012] Further, the positions of the ring electrode and the independent electrode can be interchanged, the ring electrode is arranged at the small end of the sphere, and the plurality of independent electrodes are arranged at the position opposite to the resonator lip.

[0013] Further, the independent electrode, the ring electrode and the shielding area extend to the top surface and the bottom surface of the quartz glass base and are in conduction with the corresponding signal lead pin to realize the signal lead-out.

[0014] Further, the diameter of the sphere is smaller than the inner diameter of the resonator, and the sphere is assembled to the gyroscope so that the spherical surface is opposite to the inner spherical surface of the resonator.

[0015] Compared with the prior art, the present application has the following advantages:

[0016] The present application provides a full-angle mode hemispherical resonator gyroscope electrode structure for detecting and controlling the vibration of the resonator in the working process of the full-angle mode hemispherical resonator gyroscope. In addition to the independent electrode, a complete ring electrode area in the circumferential direction is added for amplitude control of the full-angle mode hemispherical resonator gyroscope, which can effectively avoid the introduction of gyroscope errors caused by machining errors when the electrode is divided in the circumferential direction; the independent electrode is used for amplitude control, which can effectively avoid the decline of the force adding efficiency caused by the traditional time division multiplexing mode and reduce the noise introduced by the amplitude attenuation in the non-control period. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 This is a schematic diagram of the installation of the electrodes of the present invention inside the gyroscope;

[0018] Figure 2 This is a schematic diagram of the electrode structure of the full-angle mode hemispherical resonant gyroscope of the present invention;

[0019] Figure 3 This is a schematic diagram of the spherical electrode distribution of the present invention. Detailed Implementation

[0020] The present invention will be described in conjunction with the accompanying drawings.

[0021] A full-angle mode hemispherical resonant gyroscope electrode structure, such as Figures 2-3 As shown, it includes a quartz glass substrate 11 and a signal pin 13.

[0022] like Figure 1 As shown, the quartz glass substrate 11 mainly includes a planar area with a top surface 111 and a bottom surface 112, and a spherical area with a side surface 113. The quartz glass substrate 11 can be assembled and connected to the gyroscope base 14 through the bottom surface 112 area, or it can be assembled and connected to the gyroscope base 14 through the signal pin 13. The spherical area 113 on the side surface faces the resonator 15. After being coated with a conductive film layer, it forms a capacitor with the inner spherical surface of the resonator and is the main area for the distribution of measurement and control electrodes. A mounting hole 16 is provided at the center of the quartz glass substrate for assembly and connection with the resonator post.

[0023] like Figure 2 As shown, the quartz glass substrate 11 has through holes distributed along the axial direction. Signal pins 13 are installed in the through holes, and are typically made of a metal material with a low coefficient of linear expansion (coefficient of linear expansion less than 5 × 10⁻⁶). -6 / ℃) to match the coefficient of linear expansion of quartz glass.

[0024] like Figure 3 As shown, the surface of the quartz glass substrate 11 is coated with a conductive film layer. The coating method is usually magnetron sputtering or similar methods, and the film material is usually a metal material with good conductivity such as chromium, gold, platinum, or copper.

[0025] like Figure 3 As shown, the spherical region is divided into eight independent electrodes 21 and one complete annular electrode 22. A coated region 23 for signal shielding exists between the electrodes to prevent coupling interference. The division of each coated region is achieved through laser etching or mechanical processing. The etching interval 24 is typically 0.05mm-0.2mm wide to ensure insulation between regions while avoiding excessive size that could occupy the effective electrode area.

[0026] like Figure 1 , Figure 3As shown, the ring electrode 22 is distributed near the lip edge of the resonator 15, with high force efficiency. The size of the ring electrode is designed according to the quality factor of the resonator, the electrode force voltage, the gap between the electrode and the resonator, and other parameters, to ensure that the force of the ring electrode during the operation of the gyroscope can fully meet the needs of amplitude stability control.

[0027] As shown in Figure 1 , Figure 3 , the eight independent electrodes 21 occupy a larger area of the spherical surface region and are distributed near the small end of the spherical surface region to ensure the force efficiency in time-sharing control. The angle occupied by each electrode is as large as possible during the design of the electrode size to improve the signal strength. At the same time, a wide enough shielding area 23 is needed between the electrodes to avoid excessive coupling interference.

[0028] As shown in Figure 3 , the positions of the ring electrode 22 and the eight independent electrodes 21 can be interchanged. The ring electrode 22 is arranged at the small end of the spherical surface, and the eight independent electrodes 21 are arranged opposite the lip edge of the resonator.

[0029] As shown in Figure 3 , the eight independent electrodes 21, the ring electrode 22, and the shielding area 23 extend to the top surface 111 and the bottom surface 112 of the quartz glass substrate 11 and are in conduction with the corresponding signal pins 13 to realize signal extraction.

[0030] The quartz glass substrate mainly includes the planar area of the top surface and the bottom surface, and the spherical surface area of the side surface. The bottom surface is used as a mounting reference and is assembled and connected with the gyroscope base. The spherical surface area has a diameter slightly smaller than the inner diameter of the resonator and is opposite the inner spherical surface of the resonator after assembly into the gyroscope, which is the main area for electrode distribution. After the surface is coated with a conductive film layer, the spherical surface area is divided into eight independent electrodes and one complete ring electrode through laser etching or mechanical processing. The film area between the electrodes is used for signal shielding to avoid coupling interference. The ring electrode is distributed near the lip edge of the resonator, occupies a small area, and extends to the bottom surface through surface coating to realize signal extraction due to high force efficiency. The eight electrodes occupy a larger area and are distributed near the small end of the spherical surface area. The electrodes extend to the top surface of the quartz glass substrate to realize signal extraction.

[0031] The top of the quartz glass substrate is distributed with through holes that penetrate the quartz substrate, and signal pins made of low linear expansion coefficient metal material are installed in the through holes. Eight holes are uniformly distributed in the circumferential direction and opposite the eight electrodes to extract the signals of the eight independent electrodes. Another hole is used to realize the grounding of the shielding area.

[0032] The part of the present application not described in detail is the common knowledge of the person skilled in the art. The specific embodiments described are only examples to illustrate the spirit of the present application. The person skilled in the art can make different modifications or supplements to the specific embodiments described or use similar ways instead, without deviating from the spirit of the present application or exceeding the scope defined by the appended claims.

Claims

1. A full-angle mode hemispherical resonant gyroscope electrode structure, characterized in that, It includes a quartz glass substrate (11) and a signal pin (13); The quartz glass substrate (11) includes a top surface (111), a bottom surface (112), and a spherical surface (113) on the side. The quartz glass substrate (11) has several through holes distributed circumferentially, and a signal pin (13) is installed in each through hole. The quartz glass substrate (11) is assembled and connected to the base (14) of the gyroscope through the planar area of ​​the bottom surface (112), or assembled and connected to the gyroscope base (14) through the signal pin (13). The quartz glass substrate (11) has mounting holes (16) along the central axis, which are assembled and connected to the shank of the resonator (15). The surface of the quartz glass substrate (11) is coated with a conductive film layer. The spherical surface (113) area of ​​the quartz glass substrate (11) is divided into several independent electrodes (21) and annular electrodes (22), and there is a coated area (23) for signal shielding between the several independent electrodes (21) and annular electrodes (22).

2. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 1, characterized in that: The signal pin (13) is made of a metal material with a low coefficient of linear expansion, which is less than 5 × 10⁻⁶. -6 / ℃.

3. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 1, characterized in that: The conductive film layer on the surface of the quartz glass substrate (11) is deposited by magnetron sputtering, and the film layer material is chromium, gold or copper.

4. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 1, characterized in that: The division of each coating area (23) is achieved by laser etching or mechanical processing, and the etching interval (24) width is 0.05mm to 0.2mm.

5. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 1, characterized in that: The ring electrode (22) is located near the lip of the resonator (15), and several independent electrodes (21) are evenly distributed around the quartz glass substrate at the small end of the spherical region.

6. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 5, characterized in that: The positions of the ring electrode (22) and the independent electrode (21) can be interchanged. The ring electrode (22) is set at the small end of the sphere, and several independent electrodes (21) are set at the position directly opposite the lip of the resonator.

7. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 1, characterized in that: The independent electrode (21), the ring electrode (22), and the shielding area (23) extend to the top surface (111) and bottom surface (112) of the quartz glass substrate (11), and are connected to the corresponding signal pins (13) to realize signal extraction.

8. The electrode structure of a full-angle mode hemispherical resonator gyroscope according to claim 1, characterized in that: The diameter of the sphere (113) is smaller than the inner diameter of the resonator (15), and after being assembled into the gyroscope, the sphere (113) is directly opposite the inner sphere of the resonator (15).

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