Shielding sheet state detection method and device and high-energy Patt-Watt laser terminal system

Abstract

The invention discloses a shielding sheet state detection method and device and a high-energy pat-watt laser terminal system, and relates to the technical field of high-energy pat-watt laser. An isolation valve is arranged between a shielding sheet of a high-field laser device and a target chamber, the isolation valve is closed, and a sealed cavity is formed between the shielding sheet and the isolation valve; a vacuum gauge I is arranged to measure the vacuum degree in the sealed cavity; vacuumizing a terminal focusing vacuum chamber of the high-field laser device to a working vacuum degree; the sealed cavity is vacuumized, so that the vacuum degree of the focusing vacuum cavity of the terminal is superior to that of the sealed cavity; first vacuum degree information of the sealed cavity is obtained, the first vacuum degree information is compared with theoretical vacuum degree information, and if the vacuum degree of the sealed cavity is superior to the theoretical vacuum degree, it is judged that the shielding piece is damaged. According to the invention, resource occupation is reduced, and detection efficiency is improved; the exposure time of the shielding sheet under unknown substances in the target chamber can be shortened, pollution is reduced, the service life is ensured, and the maintenance difficulty is reduced.

Description

Technical Field

[0001] This invention relates to the field of high-energy petawatt laser technology, and in particular to a method, device, and high-energy petawatt laser terminal system for detecting the status of a shielding sheet. Background Technology

[0002] Ultrashort, ultra-intense, high-energy petawatt lasers can provide unprecedentedly strong fields and extreme physical conditions, playing an increasingly important role in strong-field physics research fields such as quantum electrodynamics, secondary radiation source generation, and laboratory astrophysics. In physics experiments, laser target ablation (precisely irradiating a target with a high-intensity, short-pulse laser through a complex focusing optical system) generates numerous high-speed impact target fragments. To protect the terminal focusing element, improve the load-bearing capacity of the device, and reduce the propagation of contaminants from the target chamber, a shielding plate needs to be installed between the target chamber and the terminal focusing element. The condition of the shielding plate must be monitored before the ablation experiment to ensure it is undamaged.

[0003] In traditional nanosecond long-pulse laser devices, the terminal protection system typically employs a multi-layered structure including a primary shield, a secondary shield, and a vacuum isolation plate. Its condition monitoring primarily relies on a terminal optical element damage detection device. During operation, this device must move to the center of the target chamber via a cantilever support mechanism and use a precision adjustment mechanism to focus and acquire images of each optical element individually, then analyze the images to determine the damage. However, this method has significant limitations: the detection process occupies valuable space resources in the cantilever support mechanism and the center of the target chamber, meaning it can usually only be used as a periodic maintenance measure and cannot be performed before each firing.

[0004] Previously, shielding sheets were primarily used on nanosecond long-pulse laser terminal components. These sheets were positioned between the vacuum target chamber and the terminal optical components and typically included a main shield, a secondary shield, and a vacuum isolation sheet. The condition monitoring of the shielding sheets relied mainly on a terminal optical component damage detection device. During operation, this device was positioned in the center of the target chamber via a cantilever support device. An attitude adjustment mechanism was used to adjust the device's orientation to focus and photograph each component individually, and the damage was assessed through image analysis. Because this required space on the cantilever support device and in the center of the target chamber, the inspection of the shielding sheets on nanosecond lasers was periodic and could not be performed every time.

[0005] For high-energy petawatt laser terminal systems, the nonlinear self-focusing effect imposes strict limitations on the number and thickness of the shielding plates. Only one shielding plate can be installed, with a thickness of approximately 3 mm. A single target test may cause the shielding plate to break. Therefore, routine monitoring of the shielding plate's condition is necessary, and its condition must be confirmed before each target test. Previously used optical damage detection methods are no longer sufficient.

[0006] Therefore, there is an urgent need for a method, device, and high-energy petawatt laser terminal system for detecting the status of shielding sheets that can effectively reduce the probability of shielding sheet damage, reduce resource consumption, and reduce the transmission of contamination in the target chamber. Summary of the Invention

[0007] The purpose of this invention is to provide a method, device, and high-energy petawatt laser terminal system for detecting the state of a shielding sheet, thereby solving the problems existing in the prior art, greatly reducing resource consumption, improving detection efficiency, shortening the exposure time of the shielding sheet under unknown substances in the target chamber, reducing contamination, ensuring service life, and reducing maintenance difficulty.

[0008] To achieve the above objectives, the present invention provides the following solution: This invention provides a method for detecting the state of a shielding sheet, comprising the following steps: An isolation valve is installed between the shielding plate and the target chamber of the high-field laser device. When the isolation valve is closed, a sealed cavity is formed between the shielding plate and the isolation valve. The terminal focusing vacuum chamber of the high-field laser device is evacuated until its vacuum level reaches the working vacuum level; the sealed cavity is evacuated so that the vacuum level of the terminal focusing vacuum chamber is higher than that of the sealed cavity. Obtain the first vacuum level information of the sealed cavity, compare the first vacuum level information with the theoretical vacuum level information, and if the vacuum level of the sealed cavity is better than the theoretical vacuum level, then determine that the shielding sheet is damaged.

[0009] Preferably, when evacuating the terminal focusing vacuum chamber, the sealed cavity is also evacuated simultaneously, so that the pressure difference between the sealed cavity and the terminal focusing vacuum chamber is less than a set pressure difference range.

[0010] Preferably, the sealed cavity is connected to the terminal focusing vacuum chamber via a bypass pipeline, and a bypass valve is provided on the bypass pipeline; Methods for ensuring that the pressure difference between the sealed cavity and the terminal focusing vacuum chamber is less than a set pressure difference range include: The bypass valve is opened to evacuate the terminal focusing vacuum chamber. During the evacuation process, the vacuum levels in the sealed cavity and the terminal focusing vacuum chamber are monitored. If the difference between the vacuum level in the terminal focusing vacuum chamber and the vacuum level in the sealed cavity is greater than or equal to a set value, the evacuation speed of the terminal focusing vacuum chamber is reduced. If the difference between the vacuum level in the terminal focusing vacuum chamber and the vacuum level in the sealed cavity is less than the set value, the evacuation speed of the terminal focusing vacuum chamber is maintained or increased.

[0011] Preferably, after the focusing cavity in the terminal focusing vacuum chamber reaches the working vacuum level and before the target is fired, the bypass valve is closed to monitor the vacuum level of the sealed cavity and determine whether the shielding sheet is damaged; after the target is fired, the isolation valve is closed to monitor the vacuum level of the sealed cavity and determine whether the shielding sheet is damaged.

[0012] Preferably, after determining that the shielding sheet is damaged, the evacuation of the terminal focusing vacuum chamber is stopped, the isolation valve is kept closed and the bypass valve is kept open, so that the terminal focusing vacuum chamber and the sealed cavity are restored to atmospheric pressure, the shielding sheet is taken out for inspection, and if the shielding sheet is damaged, the shielding sheet is replaced.

[0013] Preferably, the method for ensuring that the pressure difference between the sealed cavity and the terminal focusing vacuum chamber is less than a set pressure difference range includes: if the difference between the vacuum level in the terminal focusing vacuum chamber and the vacuum level in the sealed cavity is greater than or equal to 1000 Pa, then reducing the vacuum pumping speed of the terminal focusing vacuum chamber; if the difference between the vacuum level in the terminal focusing vacuum chamber and the vacuum level in the sealed cavity is less than 1000 Pa, then maintaining or increasing the vacuum pumping speed of the terminal focusing vacuum chamber.

[0014] The present invention also provides a shielding sheet status detection device, comprising an isolation valve, a vacuum gauge, and a control system, wherein: The isolation valve is used to be installed between the shielding plate and the target chamber of the high-field laser device. When the isolation valve is closed, a sealed cavity is formed between the isolation valve and the shielding plate. The vacuum gauge is mounted on the high-field laser device and is used to measure the vacuum level inside the sealed cavity. The vacuum gauge is connected to the control system via a signal connection. The control system compares the vacuum level information obtained by the vacuum gauge with the theoretical vacuum level information within the control system to determine whether the shielding sheet is damaged.

[0015] Preferably, it also includes a vacuum gauge 2, a bypass pipeline and a bypass valve, wherein the two ends of the bypass pipeline are respectively connected to the terminal focusing vacuum chamber of the high field laser device and the sealed cavity, and the bypass valve is disposed on the bypass pipeline; The second vacuum gauge is installed on the terminal focusing vacuum chamber of the high-field laser device, and the second vacuum gauge is used to measure the vacuum level of the focusing cavity inside the terminal focusing vacuum chamber; The control system can obtain the vacuum difference information between the sealed cavity and the focusing cavity based on the vacuum information obtained by the first vacuum gauge and the vacuum information obtained by the second vacuum gauge.

[0016] Preferably, both the isolation valve and the bypass valve are connected to the control system, which can control the opening and closing of the isolation valve and the bypass valve.

[0017] This invention also provides a high-energy petawatt laser terminal system, including a target chamber, a terminal focusing vacuum chamber, a shielding plate, and a shielding plate status detection device. The shielding plate is disposed between the target chamber and the terminal focusing vacuum chamber. An isolation valve is disposed between the shielding plate and the target chamber, and when the isolation valve is closed, a sealed cavity is formed between the isolation valve and the shielding plate. A vacuum gauge is disposed on the terminal focusing vacuum chamber and is used to measure the vacuum degree of the focusing cavity within the terminal focusing vacuum chamber. A second vacuum gauge is used to measure the vacuum degree within the sealed cavity.

[0018] The present invention achieves the following technical effects compared to the prior art: This invention provides a method, apparatus, and high-energy petawatt laser terminal system for detecting the state of a shielding sheet. An isolation valve is installed between the shielding sheet and the target chamber of a high-field laser device. Closing the isolation valve creates a sealed cavity between the shielding sheet and the isolation valve. The terminal focusing vacuum chamber of the high-field laser device is evacuated until its vacuum level reaches the working vacuum level. The vacuum level of the terminal focusing vacuum chamber is made superior to the vacuum level of the sealed cavity. Vacuum level information 1 of the sealed cavity is obtained and compared with theoretical vacuum level information. If the vacuum level of the sealed cavity is superior to the theoretical vacuum level, the shielding sheet is determined to be damaged.

[0019] If the shielding plate is damaged, it will connect with the terminal focusing vacuum chamber, and the vacuum level inside the sealed chamber will be higher than the theoretical vacuum level. By monitoring the vacuum level inside the sealed chamber and comparing it with the theoretical vacuum level, it is possible to determine whether the shielding plate is damaged. This invention can perform status monitoring during normal target firing experiments without occupying additional external instruments, target chamber space, or time, greatly reducing resource consumption and improving detection efficiency. Simultaneously, by closing the isolation valve, the exposure time of the shielding plate to unknown substances in the target chamber can be shortened, reducing contamination, ensuring service life, and reducing maintenance difficulty. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1This is a schematic diagram of the high-energy petawatt laser terminal system provided in Example 3; Figure 2 A flowchart of the shielding sheet status detection method provided in Example 1; In the diagram: 100, High-energy petawatt laser terminal system; 1, Shielding sheet; 2, Target chamber; 3, Isolation valve; 4, Sealed cavity; 5, Terminal focusing vacuum chamber; 6, Bypass pipeline; 7, Bypass valve; 8, Vacuum gauge one; 9, Vacuum gauge two. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] It should be noted that in the description of this invention, the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "center," "longitudinal," "transverse," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "clockwise," and "counterclockwise," etc., indicating directional or positional relationships, are based on the directional or positional relationships shown in the accompanying drawings. These are merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Additionally, it should be noted that in the description of this invention, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or a connection within two elements. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0024] The purpose of this invention is to provide a method, device, and high-energy petawatt laser terminal system for detecting the state of a shielding sheet, thereby solving the problems existing in the prior art, greatly reducing resource consumption, improving detection efficiency, shortening the exposure time of the shielding sheet under unknown substances in the target chamber, reducing contamination, ensuring service life, and reducing maintenance difficulty.

[0025] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] Example 1 like Figure 1 and 2 As shown, this embodiment provides a method for detecting the status of a shielding sheet, including the following steps: An isolation valve 3 is installed between the shielding plate 1 and the target chamber 2 of the high-field laser device. The isolation valve 3 is closed to form a sealed cavity 4 between the shielding plate 1 and the isolation valve 3. The terminal focusing vacuum chamber 5 of the high-field laser device is evacuated until the vacuum degree of the terminal focusing vacuum chamber 5 reaches the working vacuum degree. The sealed cavity 4 is evacuated so that the vacuum degree of the terminal focusing vacuum chamber 5 is better than the vacuum degree of the sealed cavity 4. The vacuum degree information 1 of the sealed cavity 4 is obtained and compared with the theoretical vacuum degree information. If the vacuum degree of the sealed cavity 4 is better than the theoretical vacuum degree, the shielding plate 1 is determined to be damaged.

[0027] If the shielding plate 1 is damaged, it will connect with the terminal focusing vacuum chamber 5, and the vacuum level inside the sealed chamber 4 will be better than the theoretical vacuum level. By monitoring the vacuum level inside the sealed chamber 4 and comparing it with the theoretical vacuum level, it is possible to determine whether the shielding plate 1 is damaged. This embodiment can perform status monitoring during normal target firing experiments without occupying additional external instruments or additional space and time in the target chamber 2, greatly reducing resource consumption and improving detection efficiency. At the same time, by closing the isolation valve 3, the exposure time of the shielding plate 1 to unknown substances in the target chamber 2 can be shortened, reducing contamination, ensuring service life, and reducing maintenance difficulty.

[0028] In some embodiments, when the terminal focusing vacuum chamber 5 is evacuated, the sealed cavity 4 is also evacuated at the same time, so that the pressure difference between the sealed cavity 4 and the terminal focusing vacuum chamber 5 is less than a set pressure difference range.

[0029] In some embodiments, the sealed cavity 4 and the terminal focusing vacuum chamber 5 are connected via a bypass pipe 6, and a bypass valve 7 is installed on the bypass pipe 6. The method to ensure that the pressure difference between the sealed cavity 4 and the terminal focusing vacuum chamber 5 is less than a set pressure difference range includes: opening the bypass valve 7 to evacuate the terminal focusing vacuum chamber 5; during the evacuation process, monitoring the vacuum levels in both the sealed cavity 4 and the terminal focusing vacuum chamber 5; if the difference between the vacuum levels in the terminal focusing vacuum chamber 5 and the sealed cavity 4 is greater than or equal to a set value, reducing the evacuation speed of the terminal focusing vacuum chamber 5; if the difference between the vacuum levels in the terminal focusing vacuum chamber 5 and the sealed cavity 4 is less than a set value, maintaining or increasing the evacuation speed of the terminal focusing vacuum chamber 5. Opening the bypass valve connects the sealed cavity 4 and the terminal focusing vacuum chamber 5. When evacuating the terminal focusing vacuum chamber 5, the vacuum level in the sealed cavity 4 will also decrease to a certain extent, preventing excessive pressure difference between the sealed cavity 4 and the terminal focusing vacuum chamber 5 from causing damage. When the vacuum in the terminal focusing vacuum chamber 5 is completed, the bypass valve 7 is closed simultaneously to achieve vacuum acquisition and maintenance in the sealed chamber 4 and the terminal focusing vacuum chamber 5.

[0030] In some implementations, after the focusing cavity in the terminal focusing vacuum chamber 5 reaches the working vacuum level and before the target is fired, the bypass valve 7 is closed to monitor the vacuum level of the sealed cavity 4 and determine whether the shielding sheet 1 is damaged; after the target is fired, the isolation valve 3 is closed to monitor the vacuum level of the sealed cavity 4 and determine whether the shielding sheet 1 is damaged.

[0031] In some embodiments, after it is determined that the shielding sheet 1 is damaged, the evacuation of the terminal focusing vacuum chamber 5 is stopped, the isolation valve 3 is kept closed and the bypass valve 7 is kept open, so that the terminal focusing vacuum chamber 5 and the sealed cavity 4 are restored to atmospheric pressure. The shielding sheet 1 is then removed for inspection (preferably visual inspection). If the shielding sheet 1 is damaged, it is replaced. By performing a re-pressure check, interference caused by a decrease in the sealing performance of related components constituting the sealed cavity 4, resulting in a poor vacuum level in the sealed cavity 4, can be eliminated.

[0032] In some embodiments, the method for making the pressure difference between the sealed cavity 4 and the terminal focusing vacuum chamber 5 less than a set pressure difference range includes: if the difference between the vacuum level in the terminal focusing vacuum chamber 5 and the vacuum level in the sealed cavity 4 is greater than or equal to 1000 Pa, then reducing the vacuum pumping speed of the terminal focusing vacuum chamber 5; if the difference between the vacuum level in the terminal focusing vacuum chamber 5 and the vacuum level in the sealed cavity 4 is less than 1000 Pa, then maintaining or increasing the vacuum pumping speed of the terminal focusing vacuum chamber 5.

[0033] In some embodiments, the isolation valve 3 is preferably a large-diameter gate valve. The isolation valve 3 is opened when the target is being fired and closed when the target is not being fired, so as to isolate the material exchange between the target chamber 2 and the terminal focusing vacuum chamber 5 as much as possible, protect the shielding plate 1, and monitor the status of the shielding plate 1.

[0034] The shielding sheet status detection method provided in this embodiment specifically includes: Step 1: Evacuate the terminal focusing vacuum chamber 5 to obtain the working vacuum level. During working vacuum acquisition, close the large-diameter gate valve, open the bypass valve 7, and start the vacuum acquisition device (preferably a coarse pump). Control the opening size of the coarse pump valve based on the reading difference between vacuum gauge 1 (8) and vacuum gauge 2 (9), and protect the shielding plate 1. If the reading difference between vacuum gauge 1 (8) and vacuum gauge 2 (9) is greater than or equal to 1000 Pa, reduce the opening size of the coarse pump valve and decrease the pumping speed; if the reading difference between vacuum gauge 1 (8) and vacuum gauge 2 (9) is less than 1000 Pa, expand or maintain the opening size of the coarse pump valve. Continue until the readings of both vacuum gauge 1 (8) and vacuum gauge 2 (9) are less than 1000 Pa, then fully open the coarse pump valve.

[0035] Before the terminal focusing vacuum chamber 5 reaches the working vacuum level, keep the large-diameter gate valve closed to protect the shielding plate 1 from contamination by unknown substances in the target chamber 2.

[0036] Step 2: After the terminal focusing vacuum chamber 5 reaches the working vacuum level and before the actual target firing, close the bypass valve 7 and re-inspect the status of the shielding plate 1. Compare the vacuum level curve measured by the vacuum gauge 8 with the vacuum level curve when the shielding plate 1 is intact. If the vacuum level of the measured vacuum level curve is better than expected (better than the vacuum level curve when the shielding plate 1 is intact), it is determined that the shielding plate 1 is damaged, causing the left and right spaces of the shielding plate 1 to be connected. The bypass valve 7 needs to be opened and the pump stopped to restore the terminal focusing vacuum chamber 5 and the sealed cavity 4 to atmospheric pressure for visual inspection; if the vacuum level of the measured vacuum level curve is worse than the expected vacuum level curve, the shielding plate 1 is in a good state of isolating the left and right spaces, and the large-diameter gate valve can be opened for normal target firing. The method for obtaining the vacuum level curve when the shielding plate 1 is intact is as follows: when the shielding plate 1 is initially installed but not yet fired (when the shielding plate 1 is in good condition), measure the pressure of the sealed cavity 4 at this time using a vacuum gauge. The measured curve can be the vacuum level curve when the shielding plate 1 is intact.

[0037] It should be noted that after closing the bypass valve 7, if the shielding plate 1 is intact, since there is no vacuum equipment to evacuate the sealed cavity 4, the material of the sealed cavity wall will continuously release gas (when the sealed cavity 4 is in atmospheric condition, gas molecules in the air will be adsorbed or dissolved on the inner wall of the sealed cavity; after the sealed cavity 4 is evacuated, due to the decrease in pressure inside the cavity, these gas molecules will be continuously released from the surface of the inner wall of the sealed cavity), and the vacuum degree of the sealed cavity 4 will deteriorate; if the shielding plate 1 is damaged, the sealed cavity 4 will be indirectly evacuated by the pump group, and the rate at which the vacuum degree deteriorates will be slower or not deteriorate at all.

[0038] Step 3: After the actual firing, the large-diameter gate valve is automatically closed using the synchronous trigger signal of the high-energy petawatt laser to reduce the exposure time of shielding plate 1. Vacuum gauge 8 is used to monitor the state of shielding plate 1. The vacuum degree curve measured by vacuum gauge 8 is compared with the curve when shielding plate 1 is intact to monitor the state of shielding plate 1 after firing. If the measured vacuum degree curve is better than expected, shielding plate 1 is highly likely damaged, causing communication between the left and right spaces. In this case, the bypass valve 7 needs to be opened and the pump stopped for re-pressure inspection. If the measured vacuum degree curve is worse than the expected vacuum degree curve, shielding plate 1 is in a better state of isolating the left and right spaces. The bypass valve 7 can be opened, and the system can wait for the next firing.

[0039] Step 4: When the pump in the terminal focusing vacuum chamber 5 is stopped and repressurized, the opening size of the repressurization valve (preferably a venting valve) is controlled according to the reading difference between vacuum gauge 8 and vacuum gauge 9 to protect the shielding plate 1. If the reading difference between vacuum gauge 8 and vacuum gauge 9 is greater than or equal to 1000 Pa, the opening size of the repressurization valve is reduced to decrease the repressurization speed; if the reading difference between vacuum gauge 8 and vacuum gauge 9 is less than or equal to 1000 Pa, the opening size of the repressurization valve is expanded or maintained. The repressurization valve is closed until the readings of both vacuum gauge 8 and vacuum gauge 9 are greater than or equal to 100000 Pa.

[0040] The above-mentioned specific operations are carried out automatically using the control system to protect and monitor the status of shielding sheet 1 as much as possible.

[0041] Example 2 like Figure 1 and 2 As shown, this embodiment provides a shielding sheet 1 state detection device, including an isolation valve 3, a vacuum gauge 8, and a control system. The isolation valve 3 is positioned between the shielding sheet 1 and the target chamber 2 of the high-field laser device. When the isolation valve 3 is closed, a sealed cavity 4 is formed between the isolation valve 3 and the shielding sheet 1. The vacuum gauge 8 is mounted on the high-field laser device and is used to measure the vacuum level within the sealed cavity 4. The vacuum gauge 8 is connected to the control system via a signal connection. The control system compares the vacuum level information obtained by the vacuum gauge 8 with the theoretical vacuum level information within the control system to determine whether the shielding sheet 1 is damaged.

[0042] In some embodiments, the system also includes a second vacuum gauge 9, a bypass pipe 6, and a bypass valve 7. The two ends of the bypass pipe 6 are connected to the focusing cavity and the sealed cavity 4, respectively. The bypass valve 7 is installed on the bypass pipe 6. The second vacuum gauge 9 is installed on the terminal focusing vacuum chamber 5 of the high-field laser device and is used to measure the vacuum level of the focusing cavity within the terminal focusing vacuum chamber 5. The control system can obtain the vacuum difference information between the sealed cavity 4 and the focusing cavity based on the vacuum level information obtained by the first vacuum gauge 8 and the second vacuum level information obtained by the second vacuum gauge 9. The control system can connect to the vacuum acquisition device of the terminal focusing vacuum chamber 5. The control system can control the opening and closing of the vacuum acquisition device and its opening degree to adjust the vacuuming speed of the terminal focusing vacuum chamber 5 and prevent excessive pressure difference between the sealed cavity 4 and the terminal focusing vacuum chamber 5 from causing damage. After the actual target firing, the control system can automatically close the isolation valve 3 according to the synchronous trigger signal of the high-energy petawatt laser.

[0043] In some implementations, both the isolation valve 3 and the bypass valve 7 are connected to a control system. The control system can control the opening and closing of the isolation valve 3 and the bypass valve 7. After vacuuming is completed, the control system can control the bypass valve 7 and the vacuum acquisition device to close.

[0044] Example 3 This embodiment provides a high-energy petawatt laser terminal system 100, including a target chamber 2, a terminal focusing vacuum chamber 5, a shielding plate 1, and a shielding plate 1 status detection device as described in Embodiment 1. The shielding plate 1 is disposed between the target chamber 2 and the terminal focusing vacuum chamber 5. An isolation valve 3 is disposed between the shielding plate 1 and the target chamber 2. When the isolation valve 3 is closed, a sealed cavity 4 is formed between the isolation valve 3 and the shielding plate 1. A vacuum gauge 8 is disposed on the terminal focusing vacuum chamber 5 and is used to measure the vacuum degree of the focusing cavity in the terminal focusing vacuum chamber 5. A vacuum gauge 9 is used to measure the vacuum degree in the sealed cavity 4.

[0045] This invention can be used to monitor the state of the shielding sheet 1 in a high-energy petawatt laser terminal system 100 and other strong-field laser devices, and has the following main advantages: 1. Effectively reduce the probability of component damage: After the target firing, the state of shielding plate 1 is monitored by comparing the vacuum level; before the next target firing, the state of shielding plate 1 is confirmed by comparing the vacuum level again. Each target firing experiment is monitored and confirmed twice to ensure that the focusing element is not impacted by sputtered debris, effectively reducing the probability of damage to the focusing element.

[0046] 2. Low resource consumption: The status of shielding plate 1 can be monitored during normal operation of the target firing experiment without the need for additional instruments and equipment, and without occupying additional space and time in the device and target chamber 2.

[0047] 3. Reduce contamination transmission in target chamber 2: After firing, the large-diameter gate valve automatically closes according to the synchronous trigger signal. There is no need to open the large-diameter gate valve when monitoring the status of shield 1. Therefore, the exposure time of shield 1 to unknown substances in target chamber 2 is short, which reduces contamination, ensures service life, and reduces maintenance difficulty.

[0048] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A shielding sheet state detection method characterized by comprising: The method comprises the following steps: an isolation valve is arranged between a shielding sheet of a strong-field laser device and a target chamber, the isolation valve is closed, and a sealed cavity is formed between the shielding sheet and the isolation valve; a terminal focusing vacuum chamber of the strong-field laser device is vacuumed until the vacuum degree of the terminal focusing vacuum chamber reaches a working vacuum degree; the sealed cavity is vacuumed, and the vacuum degree of the terminal focusing vacuum chamber is better than that of the sealed cavity; vacuum degree information of the sealed cavity is obtained, the vacuum degree information is compared with theoretical vacuum degree information, and if the vacuum degree of the sealed cavity is better than the theoretical vacuum degree, it is determined that the shielding sheet is damaged.

2. The shield sheet state detection method according to claim 1, characterized by: When the terminal focusing vacuum chamber is vacuumed, the sealed cavity is vacuumed at the same time, and the pressure difference between the sealed cavity and the terminal focusing vacuum chamber is less than a set pressure difference range.

3. The shield sheet state detection method according to claim 1, characterized by: The sealed cavity and the terminal focusing vacuum chamber are connected through a bypass pipeline, and a bypass valve is arranged on the bypass pipeline; the method for making the pressure difference between the sealed cavity and the terminal focusing vacuum chamber less than the set pressure difference range comprises: the bypass valve is opened, and the terminal focusing vacuum chamber is vacuumed; during the vacuuming process, the vacuum degrees in the sealed cavity and the terminal focusing vacuum chamber are monitored respectively; if the difference between the vacuum degree in the terminal focusing vacuum chamber and the vacuum degree in the sealed cavity is greater than or equal to a set value, the vacuum speed of the terminal focusing vacuum chamber is reduced; if the difference between the vacuum degree in the terminal focusing vacuum chamber and the vacuum degree in the sealed cavity is less than the set value, the vacuum speed of the terminal focusing vacuum chamber is maintained or increased.

4. The shield sheet state detection method according to claim 3, characterized by: After the focusing cavity in the terminal focusing vacuum chamber reaches the working vacuum degree, the bypass valve is closed before shooting, the vacuum degree of the sealed cavity is monitored, and whether the shielding sheet is damaged is determined; after shooting is completed, the isolation valve is closed, the vacuum degree of the sealed cavity is monitored, and whether the shielding sheet is damaged is determined.

5. The shield sheet state detection method according to claim 3, characterized by: After it is determined that the shielding sheet is damaged, the terminal focusing vacuum chamber is stopped from being vacuumed, the isolation valve is kept closed, the bypass valve is kept open, the terminal focusing vacuum chamber and the sealed cavity are restored to atmospheric pressure, the shielding sheet is taken out for inspection, and if the shielding sheet is damaged, the shielding sheet is replaced.

6. The shield sheet state detection method according to claim 1, characterized by: the method for making the pressure difference between the sealed cavity and the terminal focusing vacuum chamber less than the set pressure difference range comprises: if the difference between the vacuum degree in the terminal focusing vacuum chamber and the vacuum degree in the sealed cavity is greater than or equal to 1000 Pa, the vacuum speed of the terminal focusing vacuum chamber is reduced; if the difference between the vacuum degree in the terminal focusing vacuum chamber and the vacuum degree in the sealed cavity is less than 1000 Pa, the vacuum speed of the terminal focusing vacuum chamber is maintained or increased.

7. A shield sheet state detection device characterized by comprising: The isolation valve, the vacuum gauge and the control system are used for: the isolation valve is arranged between a shielding sheet of a strong-field laser device and a target chamber, the isolation valve is closed, and a sealed cavity is formed between the isolation valve and the shielding sheet; The vacuum gauge one is arranged on the strong-field laser device, and is used for measuring the vacuum degree in the sealed cavity. The vacuum gauge one is connected with the control system, and the control system compares the vacuum degree information one obtained by the vacuum gauge one with the theoretical vacuum degree information in the control system to determine whether the shielding sheet is damaged.

8. The shield sheet state detection apparatus according to claim 7, characterized by: The vacuum gauge two, the bypass pipeline and the bypass valve are further included, two ends of the bypass pipeline are connected with the terminal focusing vacuum chamber of the strong-field laser device and the sealed cavity respectively, and the bypass valve is arranged on the bypass pipeline. The vacuum gauge two is arranged on the terminal focusing vacuum chamber of the strong-field laser device, and is used for measuring the vacuum degree of the focusing cavity in the terminal focusing vacuum chamber. The control system can obtain the vacuum degree difference information of the sealed cavity and the focusing cavity based on the vacuum degree information one obtained by the vacuum gauge one and the vacuum degree information two obtained by the vacuum gauge two.

9. The shield sheet state detecting apparatus according to claim 8, characterized by: The isolation valve and the bypass valve are connected with the control system, the control system can control the opening and closing of the isolation valve, and the control system can control the opening and closing of the bypass valve.

10. A high power petawatt laser terminal system characterized by: The shielding sheet state detection device includes a target chamber, a terminal focusing vacuum chamber, a shielding sheet and any one of the shielding sheet state detection devices in claims 7-9, the shielding sheet is arranged between the target chamber and the terminal focusing vacuum chamber, the isolation valve is arranged between the shielding sheet and the target chamber, a sealed cavity is formed between the isolation valve and the shielding sheet when the isolation valve is closed, the vacuum gauge one is arranged on the terminal focusing vacuum chamber, and is used for measuring the vacuum degree of the focusing cavity in the terminal focusing vacuum chamber, and the vacuum gauge two is used for measuring the vacuum degree in the sealed cavity.

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