HBM high-bandwidth memory CT detection mechanism

Abstract

The invention relates to the technical field of memory CT detection, in particular to an HBM high-bandwidth memory CT detection mechanism. According to the technical scheme, the device comprises a carrying table and a driving unit movably connected to the carrying table, and the driving unit is used for pushing a memory body to a detection station; the detection unit is arranged in the carrying table, the detection unit comprises a detection frame rotationally connected into the carrying table, and sleeve pieces are fixedly installed on the two sides of the detection frame; and the clamping rod is inserted into the sleeve piece. When CT detection is carried out on the HBM high-bandwidth memory, the memory can be quickly pushed to a detection station by utilizing the arranged moving frame and the clamping piece, and stable clamping is realized; the detection frame can be driven to carry out multi-dimensional data acquisition on the memory through the meshing connection relation between the gear ring and the rack which are arranged in a matched mode, it is guaranteed that a plurality of DRAM chip structures which are vertically stacked in HBM high bandwidth can be clearly imaged, and the accuracy of CT detection results is guaranteed.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of memory CT detection, in particular to an HBM high bandwidth memory CT detection mechanism. BACKGROUND

[0002] The memory CT detection process is a nondestructive testing method based on X-ray computed tomography technology, and is mainly applied to internal structure analysis, defect identification and size measurement of memory chips and related packaging parts. The core principle is that fan-shaped or cone-beam rays are emitted by an X-ray source to penetrate a sample, a detector collects multi-angle projection data, and a two-dimensional cross section or a three-dimensional stereoscopic image is generated after computer reconstruction, so that visual detection of the internal microstructure of the memory is realized.

[0003] The HBM high bandwidth memory is also a kind of memory, by vertically stacking multiple DRAM chips, using TSV technology to realize high-speed interconnection, forming a large-capacity, high-bit-width memory array, when the HBM high bandwidth memory is detected by CT, in order to obtain accurate detection parameters, the memory usually needs to be positioned and fixed with high precision, due to the complex structure and small volume of the memory, the positioning is difficult, and the fixing is unstable, which causes displacement during the detection process and affects the accuracy of the detection result. SUMMARY

[0004] The purpose of the present application is to solve the problems in the background art, and to provide an HBM high bandwidth memory CT detection mechanism, which is simple in structure, convenient to operate, accurate in positioning, stable in fixing, and can improve the accuracy and reliability of CT detection.

[0005] The technical scheme of the present application is an HBM high bandwidth memory CT detection mechanism, which comprises a carrier, a guide frame fixedly installed on the upper side of the carrier, and a driving unit movably connected to the carrier, the driving unit is used for pushing the memory body placed in the guide frame to a detection station, the driving unit comprises a moving frame movably connected to the carrier, an end of the moving frame is provided with a clamping piece, and the clamping piece is used for clamping and pushing the memory body. In addition, a detection unit is arranged at one side of the inside of the carrier, the detection unit comprises a detection frame rotatably connected to the carrier, sleeve pieces are fixedly installed on both sides of the detection frame, a gear ring is sleeved on the outer wall of the sleeve piece, the gear ring is engaged with a gear rack movably connected to the carrier, and when the gear rack moves under the drive of a hydraulic cylinder, the corresponding detection frame rotates by 180 DEG, so that the memory body is scanned again. In addition, a clamping rod is inserted into the sleeve piece, and the clamping rod is used for fixing the position of the memory body during the rotation detection of the detection frame. Optionally, the outer end of the moving frame is fixedly provided with a connecting shaft, the connecting shaft is fixedly connected with the output shaft of the external driving motor, and is used for adjusting the position of the moving frame along the sliding groove provided on the table top.

[0006] Optionally, the moving frame further comprises a fixed plate fixedly provided at the outer end of the connecting frame, one side of the fixed plate is provided with an elastic bag, and the inside of the elastic bag is in communication with the connecting pipe provided on the outer wall of the fixed plate; when the moving frame pushes the memory body from the receiving table to the detection station, the elastic bag is compressed, and the gas in the elastic bag is discharged outward through the connecting pipe.

[0007] Optionally, the middle part of the clamping piece is provided with a clamping groove, and the two sides of the clamping groove are provided with inclined surfaces; the upper and lower inner walls of the clamping groove are provided with magnetic clamping pieces; in the clamping stage, the two magnetic clamping pieces are electrified, the memory body is clamped by the magnetic attraction between the two magnetic clamping pieces; when the memory body is pushed to the detection station, the two magnetic clamping pieces are de-energized, and the magnetic clamping pieces no longer clamp the memory body.

[0008] Optionally, the sliding groove is provided on the table and located at the two sides of the detection station; the table is provided with a discharging groove at the lower side of the detection station; and the table is detachably connected with a shielding cover at the upper side of the detection station; the rack and the sliding groove are in sliding fit; and the right end of the rack is fixedly connected with the output end of the hydraulic cylinder.

[0009] Optionally, the moving frame further comprises piston pipes fixedly provided on the outer walls of the shielding cover; the two piston pipes are in communication with the two connecting pipes respectively; the connecting pipe is provided with a control valve; the outer wall of the fixed plate is provided with a trigger switch; when the trigger switch contacts with the right outer wall of the sliding groove, the control valve of the corresponding connecting pipe is in an open state, at this time, the gas enters the piston pipe, drives the clamping rod movably arranged in the piston pipe to move outward, and effectively clamps the memory body.

[0010] Optionally, when the outer wall of the trigger switch contacts with the right outer wall of the sliding groove, the two magnetic clamping pieces change from the electrified clamping state to the de-energized relaxed state.

[0011] Optionally, the inner wall of the sleeve piece is provided with a transverse groove along the axial direction of the sleeve piece; the end of the transverse groove is provided with an annular groove; the annular groove is in communication with the transverse groove; the outer wall of the clamping rod is fixedly provided with a limiting block; the limiting block is in sliding fit with the transverse groove and the annular groove; and the inner end of the clamping rod is fixedly provided with a rubber ring.

[0012] Optionally, a monitoring unit is also included. The monitoring unit is used to monitor whether the axial position of the clamping rod is offset when the testing frame rotates. The monitoring unit includes a distance sensor transmitter that is arranged in a ring at equal intervals on the inner wall of the sleeve, and a distance sensor receiver that is fixedly installed on the outer wall of the clamping rod.

[0013] Optionally, the detection frame is a frame structure, and the transmitter is laid in a strip structure on the upper and lower inner walls of the detection frame.

[0014] In summary, this application includes at least one of the following beneficial technical effects: When performing CT scans on HBM high-bandwidth memory, this invention utilizes a movable frame and clamping components to quickly push the memory to the inspection station. The clamping rod, movably connected within the piston tube, ensures stable clamping of the HBM high-bandwidth memory during the inspection process. Furthermore, the meshing connection between the toothed ring and rack on the outer wall of the sleeve allows the inspection frame to perform multi-dimensional data acquisition of the memory, ensuring clear imaging of the vertically stacked DRAM chip structure within the HBM high-bandwidth memory and guaranteeing the accuracy of the CT scan results. Attached Figure Description

[0015] Figure 1 A schematic diagram of the overall structure of the testing organization. Figure One ; Figure 2 A schematic diagram of the overall structure of the testing organization. Figure Two ; Figure 3 This is a schematic diagram of the overall exploded structure of the testing facility; Figure 4 This is a schematic diagram of the exploded structure at the mobile frame. Figure 5 for Figure 4 Enlarged structural diagram at point A in the middle; Figure 6 Schematic diagram of the exploded structure at the testing frame Figure One ; Figure 7 Schematic diagram of the exploded structure at the testing frame Figure Two ; Figure 8 This is a schematic diagram of the cross-sectional structure of the sleeve component; Figure 9 A schematic diagram of the structure when the mobile frame pushes the memory body to the testing station.

[0016] Reference numerals: 1. Memory body; 100. Platform; 101. Slide groove; 102. Unloading chute; 110. Shielding cover; 120. Guide frame; 130. Receiving platform; 131. Guide groove; 200. Moving frame; 210. Connecting frame; 220. Fixing plate; 221. Trigger switch; 222. Connecting pipe; 230. Elastic bladder; 300. Clamping component; 301. Clamping groove; 302. Inclined surface; 310. Magnetic clamp; 400. Hydraulic cylinder; 410. Rack; 500. Piston tube; 510. Clamping rod; 520. Limiting block; 530. Distance sensor receiving end; 540. Rubber ring; 600. Sleeve component; 601. Transverse groove; 602. Annular groove; 610. Toothed ring; 620. Distance sensor transmitting end; 700. Detection frame; 710. Transmitter. Detailed Implementation

[0017] The technical solution of this application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application.

[0019] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] In the description of this application, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0022] likeFigures 1 to 9 As shown, the HBM high-bandwidth memory CT detection mechanism proposed in this invention includes a stage 100, a guide frame 120 fixedly mounted on the upper side of the stage 100, and a drive unit movably connected to the stage 100. The drive unit is used to push the memory body 1 placed in the guide frame 120 to the detection station. The drive unit includes a movable frame 200 movably connected to the stage 100, and a clamping member 300 is provided at the end of the movable frame 200 for clamping and pushing the memory body 1. In order to achieve efficient detection of the memory body 1, in this application, the guide frame 120 is located on the upper side of the stage 100. Multiple memory bodies 1 are placed inside. During the actual testing process, the position of the memory body 1, which is originally in the guide frame 120, can be adjusted by the movable frame 200 connected to the stage 100. When the movable frame 200 moves one of the memory bodies 1 to adjust its position, the upper inner wall of the corresponding movable frame 200 can block the outlet at the lower position of the guide frame 120. Only when the movable frame 200 is reset can the other memory body 1 fall back onto the top surface of the receiving platform 130 set on the stage 100. In this way, efficient testing of the memory bodies 1 in the production line can be achieved.

[0023] Furthermore, a detection unit is provided on one side inside the stage 100. The detection unit includes a detection frame 700 rotatably connected inside the stage 100. The detection frame 700 has a frame structure, and the transmitters 710 are laid in strips on the upper and lower inner walls of the detection frame 700. It can be understood that in this application, there are two transmitters 710 on the detection frame 700, and the operation time of the two transmitters 710 is separated. It can be understood that the transmitter 710 located on the upper side of the detection frame 700 performs the detection first. After the transmitter 710 on the upper side completes the CT detection and collects data, the transmitter 710 located on the lower side performs the CT detection again and collects data again. After the two sets of data collection, the corresponding CT images generated are different, but both can reflect the welding status and connection relationship of the electronic components inside the memory body 1.

[0024] Furthermore, sleeve components 600 are fixedly installed on both sides of the testing frame 700. A toothed ring 610 is fitted on the outer wall of the sleeve component 600. The toothed ring 610 meshes with a rack 410 movably connected to the stage 100. When the rack 410 moves under the drive of the hydraulic cylinder 400, the corresponding testing frame 700 will rotate 180° to achieve a full scan of the memory body 1. Additionally, a clamping rod 510 is inserted inside the sleeve component 600. The clamping rod 510 is used to fix the position of the memory body 1 when the testing frame 700 rotates for testing. Specifically, when the moving frame 200 transports the memory body 1 to the testing station, the clamping rods 510, which are positioned on both sides of the testing station, can stably clamp the memory body 1. During the clamping process, the clamping member 300, which is positioned at the end of the moving frame 200, can ensure the stability of the horizontal posture of the memory body 1. After the clamping member 300 clamps the memory body 1, the moving frame 200 will reset. At this time, the memory body 1 at the testing station can be stably clamped by the clamping rods 510, and the testing frame 700 can perform scanning and testing on the memory body 1.

[0025] In one embodiment, a connecting shaft is fixedly installed at the outer end of the movable frame 200. The connecting shaft is fixedly connected to the output shaft of an external drive motor and is used to adjust the position of the movable frame 200 along the slide groove 101 opened on the platform 100. A receiving platform 130 is fixedly installed on the top surface of the platform 100, located below the guide frame 120. Connecting frames 210 are fixedly installed on the inner walls of both sides of the movable frame 200. The connecting frames 210 slide and cooperate with the guide groove 131 opened on the side wall of the receiving platform 130. The movable frame 200, which is movably connected to the platform 100, can realize the stable adjustment of the position of the memory body 1. In particular, in this application, the right end of the movable frame 200 is fixedly connected to the output end of the external drive motor. In the actual adjustment process, the movable frame 200 can push the memory body 1, which is originally on the receiving platform 130, to the testing station along the direction of the guide groove 131.

[0026] See attached document Figure 5As shown, the clamping member 300 further includes a clamping groove 301 in the middle and inclined surfaces 302 on both sides of the clamping groove 301. Magnetic clips 310 are provided on the inner walls of the upper and lower sides of the clamping groove 301. During the clamping stage, the two magnetic clips 310 are energized, and the magnetic attraction between the two magnetic clips 310 is used to achieve stable clamping of the memory body 1. When the memory body 1 is pushed to the detection station, the corresponding two magnetic clips 310 are de-energized, and the magnetic clips 310 no longer clamp the memory body 1. The clamping member 300 is fixedly installed at the end of the movable frame 200. When the movable frame 200 moves toward the inspection station, the clamping member 300, which is fixedly connected to the movable frame 200, also moves synchronously. During this process, it should be noted that in this application, the outer wall of the clamping member 300 slides and engages with the top surface of the receiving platform 130. When the clamping member 300 moves toward the inspection station, the right end of the memory body 1 is inserted into the internal position of the clamping groove 301. When the memory body 1 is in the internal position of the clamping groove 301, the magnetic clips 310 that are movably connected to the inner walls of the upper and lower sides of the clamping groove 301 are energized with the external power supply. The magnetic attraction between the magnetic clips 310 is used to achieve stable clamping of the memory body 1 and to adjust its position synchronously with the movement of the movable frame 200.

[0027] Furthermore, it also includes a fixing plate 220 fixedly installed on the outer end of the connecting frame 210. An elastic bladder 230 is provided on one side of the fixing plate 220. The interior of the elastic bladder 230 is connected to the connecting pipe 222 provided on the outer wall of the fixing plate 220. When the moving frame 200 pushes the memory body 1 from the receiving platform 130 to the testing station, the elastic bladder 230 is compressed, and the gas inside it overflows outward through the connecting pipe 222. Specifically, in the actual testing process, when the moving frame 200 moves to the left, the fixing plate 220, which is fixedly connected to it, also moves synchronously. During this process, the elastic bladder 230 located on one side of the fixing plate 220 is compressed. In conjunction with the communication between the elastic bladder 230 and the connecting pipe 222, the gas inside the elastic bladder 230 can overflow outward from the connecting pipe 222.

[0028] The technical solution for the change in the state of the memory body 1 from being held by the clamping member 300 to being held by the clamping rod 510 is described. Specifically, it also includes piston tubes 500 fixed on the outer walls of both sides of the shielding cover 110. The two piston tubes 500 are respectively connected to two connecting pipes 222, and control valves are provided on the connecting pipes 222. A trigger switch 221 is provided on the outer wall of the fixing plate 220. When the trigger switch 221 contacts the outer wall of the right side of the slide groove 101, the control valve on the corresponding connecting pipe 222 is in the open state. At this time, gas enters into the piston tube 500, which drives the clamping rod 510, which is movably connected in the piston tube 500, to move outward, thereby achieving effective clamping of the memory body 1.

[0029] As mentioned above, when the moving frame 200 moves towards the inspection station, the elastic bladder 230 located on one side of the fixed plate 220 is compressed, and the gas inside overflows from the connecting pipe 222. In this application, it should be noted that a control valve is provided on the connecting pipe 222. In the initial stage of the compression of the elastic bladder 230, the connecting pipe 222 is in a closed state. When the trigger switch 221 on the outer wall of the fixed plate 220 contacts the side wall of the stage 100 where the slide groove 101 is located, the moving frame 200 has already moved the memory body 1 to the center position of the inspection station. At this time, the control valve on the connecting pipe 222 is opened. Combined with the communication relationship between the connecting pipe 222 and the piston tube 500, when the control valve is opened, the gas in the connecting pipe 222 enters the piston tube 500, so that the clamping rod 510, which is movably connected in the piston tube 500, can stably clamp the memory body 1 located at the center position of the inspection station.

[0030] When the clamping rod 510 achieves stable clamping of the memory body 1, the corresponding moving frame 200 will reset. During the reset phase, when the moving frame 200 moves to the left, the control valve changes from the open state back to the closed state. Since the piston tube 500 is already filled with a certain amount of gas, the corresponding clamping rod 510 can still achieve stable clamping of the memory body. After the detection of the memory body 1 is completed, the moving frame 200 is already in the initial position, and the corresponding elastic bladder 230 will also be in its original state, but at this time there is less gas inside. After the detection of the memory body 1 is completed, the corresponding control valve changes from the closed state to the open state again, and the gas in the corresponding piston tube 500 will enter the interior of the elastic bladder 230 again through the connecting pipe 222, thereby causing the two clamping rods 510 to release the clamping of the memory body 1, and the memory body 1 can fall into the unloading groove 102 to complete the unloading.

[0031] Specifically, regarding the release method of the clamping member 300 on the memory body 1, in this application, the clamping member 300 achieves clamping of the memory body 1 by relying on the magnetic clamping piece 310 disposed in the clamping groove 301. The magnetic clamping piece 310 only achieves stable clamping of the memory body 1 by magnetic attraction when energized. When the memory body 1 is transported to the center position of the detection station, after the two symmetrically arranged clamping rods 510 have achieved stable clamping of the memory body 1, the magnetic clamping piece 310 no longer needs to clamp the memory body 1. At the next time point, the corresponding moving frame 200 will reset. Therefore, in this application, in order to ensure a stable connection transition, when the outer wall of the trigger switch 221 contacts the right outer wall of the slide 101, the two magnetic clamping pieces 310 change from the energized clamping state to the de-energized relaxed state. This means that once the two clamping rods 510 achieve stable clamping of the memory body 1, the corresponding two magnetic clips 310 will be de-energized, thereby releasing the clamping of the memory body 1. The subsequent reset of the moving frame 200 will not cause the memory body 1 to reset, and the memory body 1 can be placed in the detection station to perform subsequent CT detection.

[0032] Furthermore, a transverse groove 601 is formed on the inner wall of the sleeve 600 along the axial direction of the sleeve 600, and an annular groove 602 is formed at the end of the transverse groove 601, with the annular groove 602 communicating with the transverse groove 601; a limiting block 520 is fixedly installed on the outer wall of the clamping rod 510, and the limiting block 520 maintains a sliding fit with the transverse groove 601 and the annular groove 602; a rubber ring 540 is fixedly installed on the inner end of the clamping rod 510. During the clamping process of the clamping rod 510, when a certain amount of gas is injected into the piston tube 500, the two clamping rods 510 will move closer to each other to clamp the memory body 1. During this process, the limiting block 520 fixedly installed on the outer wall of the clamping rod 510 can slide in the transverse groove 601. After the clamping rod 510 achieves stable clamping of the memory body 1, the outer end of the limiting block 520 is located inside the annular groove 602. At this time, the outer wall of the rubber ring 540, which is fixedly installed at the inner end of the clamping rod 510, will contact the outer wall of the memory body 1, thereby achieving stable clamping of the memory body 1.

[0033] Regarding the CT inspection process of the memory body 1, in this application, the slide 101 is set on both sides of the inspection station on the platform 100, and the unloading groove 102 is opened on the lower side of the inspection station on the platform 100. After the inspection is completed, the memory body 1 can be unloaded from the unloading groove 102. The shield 110 is detachably connected to the upper side of the inspection station on the platform 100. The rack 410 slides with the slide 101, and the right end of the rack 410 is fixedly connected to the output end of the hydraulic cylinder 400. When the memory body 1 is in the center of the inspection station and is stably clamped by the two clamping rods 510, the hydraulic cylinder 400 fixedly installed on the stage 100 and the fixed connection between the output end of the hydraulic cylinder 400 and the outer wall of the rack 410 can make the rack 410 slide in the slide groove 101. Combined with the meshing connection between the rack 410 and the toothed ring 610 fixedly installed on the outer wall of the sleeve 600, the sleeve 600 can be rotated relative to the stage 100. With the fixed connection between the sleeve 600 and the inspection frame 700, the inspection frame 700 can also rotate synchronously, thereby driving the memory to rotate synchronously and achieving clear imaging of multiple DRAM chips vertically stacked in HBM high bandwidth.

[0034] See attached document Figures 6-8 As shown, during the CT scan, after the memory body 1 is initially fixed, the scan frame 700 is in a vertical position. Once the transmitters 710 located on the upper and lower sides of the scan frame 700 have completed data acquisition, the hydraulic cylinder 400 drives the rack 410 to slide within the groove 101. Combined with the meshing connection between the rack 410 and the toothed ring 610, the position of the scan frame 700 can be adjusted. It should be noted that in this application, the distance the rack 410 moves along the groove 101 is fixed, corresponding to the... The rotation angle of the sleeve 600 and the detection frame 700, which is fixedly connected to the sleeve 600, is also fixed. As one embodiment, in this application, the angle of the detection frame 700 is adjusted by 180° each time. At this time, the transmitter 710, which was originally in the upper position, will be in the lower position, and the transmitter 710, which was originally in the lower position, will be in the upper position. After the position adjustment is completed, data is collected again. The CT data of the same memory body 1 collected by the two different transmitters 710 are compared to verify the accuracy of the CT detection results.

[0035] Furthermore, a monitoring unit is included. This unit monitors whether the axial position of the clamping rod 510 shifts during the rotation of the testing frame 700. The monitoring unit includes distance sensor transmitters 620 arranged in a ring at equal intervals on the inner wall of the sleeve 600, and distance sensor receivers 530 fixedly installed on the outer wall of the clamping rod 510. After the sleeve 600 rotates, the distance sensor transmitters 620 on the inner wall of the sleeve 600 and the distance sensor receivers 530 fixedly installed on the outer wall of the clamping rod 510 can detect whether the distance between the two transmitters 710 and the memory body 1 changes after the position of the testing frame 700 is adjusted. By acquiring this distance parameter, during subsequent data processing, the imaging points of the CT image are adjusted to ensure that the variables of the corresponding CT images are the same when subsequent CT imaging is performed at the same position, ensuring accurate comparison of subsequent CT images and improving the accuracy of CT detection results.

[0036] The above specific embodiments are merely several optional embodiments of the present invention. Based on the technical solutions of the present invention and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. An HBM high-bandwidth memory CT detection mechanism, comprising a stage (100), characterized in that, Also includes: A guide frame (120) is fixedly installed on the upper side of the platform (100), and a drive unit is movably connected to the platform (100). The drive unit is used to push the memory body (1) placed in the guide frame (120) to the inspection station. The drive unit includes a movable frame (200) movably connected to the platform (100). The end of the movable frame (200) is provided with a clamping member (300), which is used to clamp and push the memory body (1). And, a detection unit is set inside one side of the stage (100). The detection unit includes a detection frame (700) rotatably connected inside the stage (100). Sleeves (600) are fixedly installed on both sides of the detection frame (700). A toothed ring (610) is sleeved on the outer wall of the sleeve (600). The toothed ring (610) meshes with a rack (410) movably connected to the stage (100). When the rack (410) moves under the drive of the hydraulic cylinder (400), the corresponding detection frame (700) will rotate 180° to realize the re-scanning of the memory body (1). In addition, a clamping rod (510) is inserted inside the sleeve (600), the clamping rod (510) being used to fix the position of the memory body (1) during the rotation detection of the detection frame (700).

2. The HBM high-bandwidth memory CT detection mechanism according to claim 1, characterized in that, A connecting shaft is fixedly installed at the outer end of the movable frame (200), and the connecting shaft is fixedly connected to the output shaft of an external drive motor for adjusting the position of the movable frame (200) along the slide groove (101) opened on the platform (100). A receiving platform (130) is fixedly installed on the top surface of the platform (100) at the lower side of the guide frame (120). A connecting frame (210) is fixedly installed on the inner walls of both sides of the movable frame (200), and the connecting frame (210) slides in cooperation with the guide groove (131) opened on the side wall of the receiving platform (130).

3. The HBM high-bandwidth memory CT detection mechanism according to claim 2, characterized in that, It also includes a fixing plate (220) fixedly installed on the outer end of the connecting frame (210). An elastic bladder (230) is provided on one side of the fixing plate (220). The interior of the elastic bladder (230) is connected to the connecting pipe (222) provided on the outer wall of the fixing plate (220). When the moving frame (200) pushes the memory body (1) from the receiving platform (130) to the testing station, the elastic bladder (230) will be compressed, and the gas inside will overflow outward through the connecting pipe (222).

4. The HBM high-bandwidth memory CT detection mechanism according to claim 3, characterized in that, The clamping member (300) has a clamping groove (301) in the middle and inclined surfaces (302) on both sides of the clamping groove (301). Magnetic clips (310) are provided on the inner walls of the upper and lower sides of the clamping groove (301). During the clamping stage, the two magnetic clips (310) are energized, and the magnetic attraction between the two magnetic clips (310) is used to achieve stable clamping of the memory body (1). When the memory body (1) is pushed to the detection station, the corresponding two magnetic clips (310) are de-energized, and the magnetic clips (310) no longer clamp the memory body (1).

5. The HBM high-bandwidth memory CT detection mechanism according to claim 4, characterized in that, The chute (101) is located on both sides of the testing station on the platform (100), and a discharge chute (102) is provided on the lower side of the testing station on the platform (100). A shield (110) is detachably connected to the upper side of the testing station on the platform (100). The rack (410) slides with the chute (101), and the right end of the rack (410) is fixedly connected to the output end of the hydraulic cylinder (400).

6. The HBM high-bandwidth memory CT detection mechanism according to claim 5, characterized in that, It also includes piston tubes (500) fixed on the outer walls of both sides of the shield (110). The two piston tubes (500) are respectively connected to two connecting pipes (222), and a control valve is provided on the connecting pipe (222). A trigger switch (221) is provided on the outer wall of the fixing plate (220). When the trigger switch (221) contacts the outer wall of the right side of the slide (101), the control valve on the corresponding connecting pipe (222) is in the open state. At this time, gas enters into the piston tube (500) and drives the clamping rod (510) connected in the piston tube (500) to move outward, thereby realizing the effective clamping of the memory body (1).

7. The HBM high-bandwidth memory CT detection mechanism according to claim 6, characterized in that, When the outer wall of the trigger switch (221) contacts the right outer wall of the slide (101), the two corresponding magnetic clips (310) change from the energized clamping state to the de-energized relaxed state.

8. The HBM high-bandwidth memory CT detection mechanism according to claim 7, characterized in that, On the inner wall of the sleeve (600), a transverse groove (601) is provided along the axial direction of the sleeve (600), and an annular groove (602) is provided at the end of the transverse groove (601). The annular groove (602) and the transverse groove (601) are kept in communication. A limiting block (520) is fixedly installed on the outer wall of the clamping rod (510). The limiting block (520) is in sliding fit with the transverse groove (601) and the annular groove (602). A rubber ring (540) is fixedly installed on the inner end of the clamping rod (510).

9. The HBM high-bandwidth memory CT detection mechanism according to claim 8, characterized in that, It also includes a monitoring unit, which is used to monitor whether the axial position of the clamping rod (510) is offset when the detection frame (700) rotates. The monitoring unit includes a distance sensor transmitter (620) arranged in a ring at equal intervals on the inner wall of the sleeve (600), and a distance sensor receiver (530) fixedly installed on the outer wall of the clamping rod (510).

10. The HBM high-bandwidth memory CT detection mechanism according to claim 9, characterized in that, The testing frame (700) has a frame structure, and the transmitter (710) is laid in a strip structure on the upper and lower inner walls of the testing frame (700).

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