Developing solution automatic detection device and detection method thereof

Abstract

The invention belongs to the technical field of developing solution detection, and particularly relates to an automatic developing solution detection device and a detection method.The automatic developing solution detection device comprises a to-be-detected developing solution storage tank, a leaching tank and a standard developing solution storage tank which are arranged on a workbench, and the workbench is further provided with a mechanical claw and a moving mechanism; a detection part and a standard part are arranged on the to-be-tested piece, the to-be-tested piece is clamped by the mechanical claw, and the mechanical claw has a degree of freedom of reciprocating motion among the to-be-tested developing solution storage tank, the leaching tank and the standard developing solution storage tank by virtue of the moving mechanism. According to the invention, the detection part and the standard part are integrated on the to-be-tested test piece, so that the same test piece is successively treated by two developing solutions in a short time, the environmental parameters such as temperature in the soaking process of the standard test piece and the to-be-tested test piece are basically the same, the comparison can be completed without replacing the test pieces, the detection error caused by individual difference of the test pieces is reduced, and the detection accuracy is improved. And subsequent workers can conveniently carry out comparison and observation.

Description

Technical Field

[0001] This invention belongs to the field of developer detection technology, specifically relating to an automatic developer detection device and its detection method. Background Technology

[0002] Developers are indispensable key chemicals in semiconductor manufacturing, printing plate making, and photolithography. Their concentration, activity, and other quality parameters directly determine the quality of the developing effect, thus affecting the precision and performance of the final product. Therefore, it is crucial to conduct rapid and accurate quality testing of developers before use and during mass production.

[0003] Traditional developer quality testing often relies on manual methods. Workers hold the test piece, immersing it in the developer for a certain time before removing it. Then, another standard test piece is immersed in the standard developer. Finally, the quality of the developer is determined by visually comparing the clarity of lines and other indicators on the two sets of test pieces. However, developers are often highly corrosive and irritating; direct contact can easily cause damage to the skin and respiratory tract, posing serious safety hazards. Furthermore, in manual operation, parameters such as immersion time, removal speed, and rinsing degree are difficult to maintain consistently, leading to subjective errors in the test results and affecting the accuracy of the assessment.

[0004] Therefore, semi-automated developer testing equipment has gradually emerged in existing technologies. This equipment uses mechanical structures to simulate manual operation processes, eliminating the need for workers to directly contact the developer and thus avoiding the risk of corrosive damage. However, the processing of the test piece and the standard sample requires two independent operations, or direct comparison with the existing standard sample. But the developing effect of the developer is easily affected by environmental changes, or differences in operating parameters can lead to inconsistent comparison benchmarks, affecting the reliability of the test results. Furthermore, existing test pieces and standard samples use different carriers, requiring frequent switching during comparison, further increasing operational complexity and the probability of error. Summary of the Invention

[0005] To address the problems existing in the prior art, the present invention provides an automatic developer detection device and method. By integrating a detection unit and a standard unit on the test piece, the same test piece undergoes two consecutive treatments with different developers within a short period of time. This ensures that the environmental parameters, such as temperature, are basically the same during the immersion process of the standard test piece and the test piece. Furthermore, the comparison can be completed without replacing the test piece, reducing detection errors caused by individual differences in the test pieces and facilitating subsequent comparative observation by staff.

[0006] The specific technical solution adopted in this invention is as follows: The application discloses a developer automatic detection device, which comprises a to-be-tested developer storage tank, a washing tank and a standard developer storage tank arranged on a workbench, a mechanical claw and a moving mechanism arranged on the workbench, a detection part and a standard part arranged on a test sheet, the mechanical claw clamps the test sheet and has the freedom to reciprocate between the to-be-tested developer storage tank, the washing tank and the standard developer storage tank by means of the moving mechanism, the detection part of the test sheet is moved into the to-be-tested developer storage tank by means of the mechanical claw, and the standard part of the test sheet is moved into the standard developer storage tank by means of the mechanical claw.

[0007] The test sheet further comprises a main body part, the detection part and the standard part are arranged at adjacent edges of the main body part and jointly form an L-shaped structure, and a sample test tube is further arranged on the main body part, the sample test tube is filled with the to-be-tested developer, and the sample test tube is in plug-in cooperation with the main body part by means of a mounting hole on the main body part.

[0008] The sample test tube comprises a tube body and a tube cover, a sealing gasket is arranged between the tube body and the tube cover, and a liquid taking hole is arranged on the tube cover.

[0009] The workbench is further provided with a liquid taking needle cylinder and a push-pull assembly, the liquid taking needle cylinder is connected with the moving mechanism by means of the push-pull assembly, the needle tip of the liquid taking needle cylinder is moved to the liquid taking hole of the sample test tube by means of the moving mechanism and extends into the tube body through the sealing gasket, and the liquid taking needle cylinder draws the to-be-tested developer in the tube body by means of the pulling of the push-pull assembly.

[0010] The push-pull assembly comprises a support base, a lead screw, a guide rod, a pulling block and a driving motor arranged on the support base, the lead screw passes through one end of the pulling block and is in screw cooperation with the pulling block, the guide rod passes through the other end of the pulling block and is in sliding cooperation with the pulling block, the driving motor drives the lead screw to rotate and drives the pulling block to reciprocate along the guide rod, the needle cylinder of the liquid taking needle cylinder is fixedly connected with the support base, and the piston of the liquid taking needle cylinder is fixedly connected with the pulling block and reciprocates by means of the pulling block.

[0011] The mechanical claw is rotationally connected with the moving mechanism by means of a rotating disc, and the detection part and the standard part of the test sheet have the freedom to vertically downwardly move by means of the rotation of the mechanical claw.

[0012] The moving mechanism comprises longitudinal guide rails, a transverse guide rail and a vertical guide rail, the longitudinal guide rails are symmetrically arranged on both sides of the workbench by means of supports, the transverse guide rail is horizontally arranged on the longitudinal guide rails on both sides, the two ends of the transverse guide rail are in sliding cooperation with the longitudinal guide rails by means of first sliding seats and have the freedom to move along the X-axis direction, the vertical guide rail is in sliding cooperation with the transverse guide rail by means of a second sliding seat and has the freedom to move along the Y-axis direction, the mechanical claw is in sliding cooperation with the vertical guide rail by means of a third sliding seat and has the freedom to move along the Z-axis direction, and the mechanical claw has the freedom to reciprocate along the X, Y and Z three axes by means of the moving mechanism.

[0013] The sewage tank is arranged below the workbench, and the to-be-tested developer storage tank, the washing tank and the standard developer storage tank are connected with the sewage tank through sewage pipes.

[0014] An automatic developer testing method comprises the following steps: S1, a label with to-be-tested developer information is pasted on a sample test tube containing corresponding to-be-tested developer, and then the sample test tube is inserted into a test sheet; S2, the standard developer is poured into a standard developer storage tank; S3, a mechanical claw holds the test sheet and moves above the to-be-tested developer storage tank, a liquid taking syringe draws the to-be-tested developer in the sample test tube through a moving mechanism and a push-pull assembly, and then the to-be-tested developer is transferred to the to-be-tested developer storage tank, the mechanical claw rotates and makes the detection part of the test sheet face downward, the detection part of the test sheet is lowered in the to-be-tested developer through the mechanical claw and is soaked in the to-be-tested developer; S4, after the test sheet is soaked in the to-be-tested developer, the liquid taking syringe and the mechanical claw holding the test sheet are moved into a washing tank, the liquid taking syringe draws and discharges clean water in the washing tank, and the to-be-tested developer residual liquid in the liquid taking syringe is cleaned, and then the mechanical claw holds the test sheet and washes and dries the detection part in the washing tank; S5, the mechanical claw holds the cleaned test sheet and moves above the standard developer storage tank, the mechanical claw rotates and makes the standard part of the test sheet face downward, and the standard part of the test sheet is lowered in the standard developer through the mechanical claw and is soaked in the standard developer; S6, after the test sheet is soaked in the standard developer, the mechanical claw holds the test sheet and is separated from the standard developer storage tank, and then the test sheet is moved into the washing tank to wash and dry the standard part of the test sheet, and the test sheet is placed in a discharging area for standby; S7, the to-be-tested developer in the to-be-tested developer storage tank of the previous group is discharged, the to-be-tested developer storage tank is cleaned, and then steps S3-S6 are repeated; S8, after all the to-be-tested developers are tested, a worker uniformly observes the test sheets corresponding to the to-be-tested developers, and determines the quality of the to-be-tested developer by comparing the line clarity of the detection part and the standard part on the test sheet.

[0015] The soaking time of the detection part of the test sheet in the to-be-tested developer is the same as the soaking time of the standard part in the standard developer.

[0016] The beneficial effects of the present application are: 1. The detection part and the standard part are integrated on the test sheet in the application, the detection part is moved to the test developer tank for immersion, the standard part is moved to the standard developer tank for immersion, so that the same test sheet is subjected to two developer treatments in succession in a short time, the temperature and other environmental parameters during the immersion of the standard test sheet and the test sheet are basically the same, the comparison can be completed without replacing the test sheet, the detection error caused by the individual difference of the test sheet is reduced, and the subsequent workers are facilitated to observe and compare.

[0017] Meanwhile, through mechanical operation by the mechanical claw, through standard 90° rotation, the immersion angle and other operation parameters of the detection part and the standard part in the respective developer can be standardized, and the mechanical detection process does not require manual intervention, and is suitable for batch detection requirements.

[0018] 2. In the application, the space region on the main part is used, the sample test tube containing the test developer is directly inserted and fixed to the test sheet, since the sample test tube is pasted with information corresponding to the test developer, the subsequent workers are facilitated to check and record the detection information, the detection efficiency is further improved, and the problem of confusion of information of different batches of test developers is not easy to occur, which is suitable for batch detection requirements.

[0019] When taking the liquid, the moving mechanism cooperates with the mechanical claw to grab the preset grabbing point of the test sheet, then through a series of operations such as rotation, swinging and movement, the liquid taking hole of the sample test tube is aligned with the needle tip of the liquid taking syringe, at this time the push-pull assembly pulls the piston of the liquid taking syringe outward, so that the liquid taking syringe extracts the test developer in the sample test tube, then the liquid taking syringe is separated from the sample test tube and moves above the test developer tank, at this time the push-pull assembly pushes the piston of the liquid taking syringe inward, so that the extracted test developer is discharged into the test developer tank, then the mechanical claw is rotated, swung and moved to immerse the detection part of the test sheet in the test developer in the test developer tank. Through the method, the matching consistency of the label information and the test developer is ensured, the detection result confusion is avoided, and manual participation in the addition process of the test developer is not required. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a side view structural schematic diagram of the developer automatic detection device; Figure 2 It is a structural schematic diagram of the mechanical claw; Figure 3 It is a structural schematic diagram of the push-pull assembly; Figure 4 It is a structural schematic diagram of the test sheet; Figure 5 It is a schematic diagram of the test sheet immersed in the test developer and the standard developer; In the attached diagram, 1 is the workbench, 2 is the developer tank, 3 is the rinsing tank, 4 is the standard developer tank, 5 is the mechanical gripper, 6 is the moving mechanism, 601 is the longitudinal guide rail, 602 is the transverse guide rail, 603 is the vertical guide rail, 604 is the first slide, 605 is the second slide, 606 is the third slide, 7 is the test piece, 701 is the main body, 702 is the detection section, 703 is the standard section, 8 is the sample tube, 9 is the liquid collection syringe, 10 is the push-pull assembly, 1001 is the support base, 1002 is the lead screw, 1003 is the guide rod, 1004 is the pull block, 1005 is the drive motor, 11 is the turntable, and 12 is the wastewater tank. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments: Specific embodiments, such as Figures 1-5 As shown, the present invention provides an automatic developer detection device, including a developer storage tank 2, a rinsing tank 3, and a standard developer storage tank 4 disposed on a workbench 1. The workbench 1 is also provided with a mechanical gripper 5 and a moving mechanism 6. The test piece 7 is provided with a detection part 702 and a standard part 703. The mechanical gripper 5 clamps the test piece 7 and has the freedom to reciprocate between the developer storage tank 2, the rinsing tank 3, and the standard developer storage tank 4 by means of the moving mechanism 6. The detection part 702 of the test piece 7 is moved to the developer storage tank 2 for immersion by means of the mechanical gripper 5, and the standard part 703 of the test piece 7 is moved to the standard developer storage tank 4 for immersion by means of the mechanical gripper 5.

[0022] Existing semi-automated developer testing equipment uses mechanical structures to simulate manual operation processes, eliminating the need for workers to directly contact the developer and thus avoiding the risk of corrosion damage. However, the processing of the test piece 7 and the standard test piece requires two independent operations, or the existing standard test piece can be directly compared with the test piece 7. However, the developing effect of the developer is easily affected by environmental changes (such as temperature and humidity), or the difference in operating parameters may lead to inconsistencies in the comparison benchmark, affecting the reliability of the test results. In addition, the existing test piece 7 and the standard test piece are on different carriers, requiring frequent switching during comparison, further increasing the operational complexity and the probability of error.

[0023] Therefore, in this invention, a detection unit 702 and a standard unit 703 are integrated on the test piece 7. The detection unit 702 is moved separately to the test developer tank 2 for immersion, and the standard unit 703 is moved separately to the standard developer tank 4 for immersion. This allows the same test piece to undergo two types of developer treatment in a short period of time, ensuring that the environmental parameters such as temperature are basically the same during the immersion process of the standard test piece and the test piece 7. Furthermore, the comparison can be completed without replacing the test piece, reducing detection errors caused by individual differences in the test pieces and facilitating subsequent comparative observation by staff.

[0024] At the same time, due to the mechanical operation by the mechanical claw 5, the detection part 702 and the standard part 703 can be standardized in the immersion angle and other operation parameters in the developing solution by a standard 90° rotation, and the mechanical detection process does not require manual intervention and is suitable for batch detection requirements.

[0025] The to-be-tested sheet 7 further comprises a main body part 701, and the detection part 702 and the standard part 703 are respectively adjacent to the main body part 701 and jointly form an L-shaped structure, and a sample test tube 8 is further arranged on the main body part 701, the sample test tube 8 is filled with a to-be-tested developing solution, and the sample test tube 8 is in plug-in cooperation with the main body part 701 through a mounting hole on the main body part 701.

[0026] The L-shaped structure of the to-be-tested sheet 7 makes the detection part 702 and the standard part 703 independent of each other, and the two do not interfere with each other when being immersed in the corresponding developing solution, and the mechanical claw 5 has a simple movement track when switching the positions of the detection part 702 and the standard part 703, and only needs to be rotated by 90°, without complex operation.

[0027] In addition, in the present application, the space region on the main body part 701 is used to directly plug and fix the sample test tube 8 filled with the to-be-tested developing solution to the to-be-tested sheet 7, since the sample test tube 8 is pasted with information corresponding to the to-be-tested developing solution, the subsequent staff can check and record the detection information, further improving the detection efficiency, and the problem of confusion of information of different batches of to-be-tested developing solutions is less likely to occur, which is suitable for batch detection requirements.

[0028] The sample test tube 8 comprises a tube body and a tube cover, and a sealing gasket is arranged between the tube body and the tube cover, and a liquid taking hole is arranged on the tube cover.

[0029] The sealing gasket seals the to-be-tested developing solution in the tube body, avoids the to-be-tested developing solution from dripping along the tube opening and polluting the experimental environment during the transfer process, and also prevents the performance of the to-be-tested developing solution from changing due to air oxidation.

[0030] The workbench 1 is further provided with a liquid taking needle cylinder 9 and a push-pull assembly 10, the liquid taking needle cylinder 9 is connected with the moving mechanism 6 through the push-pull assembly 10, the needle tip of the liquid taking needle cylinder 9 is moved to the liquid taking hole of the sample test tube 8 by the moving mechanism 6 and extends into the tube body through the sealing gasket, and the to-be-tested developing solution in the tube body is extracted by the liquid taking needle cylinder 9 through the pulling of the push-pull assembly 10.

[0031] When taking liquid, first, the mechanism 6 cooperates with the mechanical claw 5 to grab the preset grabbing point of the test piece 7, and then through a series of operations such as rotation, swinging, moving, etc., the liquid taking hole of the sample test tube 8 is aligned with the needle tip of the liquid taking needle cylinder 9, at this time, the push-pull assembly 10 pulls the piston of the liquid taking needle cylinder 9 outward, so that the liquid taking needle cylinder 9 extracts the test developing liquid in the sample test tube 8, and then the liquid taking needle cylinder 9 is separated from the sample test tube 8 and moves to above the test developing liquid storage tank 2, at this time, the push-pull assembly 10 pushes the piston of the liquid taking needle cylinder 9 inward, so that the extracted test developing liquid is discharged into the test developing liquid storage tank 2, and then the mechanical claw 5 performs a series of operations such as rotation, swinging, moving, etc., so that the detection part 702 of the test piece 7 is immersed in the test developing liquid in the test developing liquid storage tank 2. Through this method, the matching consistency of the label information and the test developing liquid is ensured, the detection result is avoided to be confused, and the manual participation in the adding process of the test developing liquid is avoided.

[0032] The push-pull assembly 10 comprises a support seat 1001, a lead screw 1002, a guide rod 1003, a pulling block 1004 and a driving motor 1005 arranged on the support seat 1001, the lead screw 1002 passes through one end of the pulling block 1004 and is threadedly connected with the pulling block 1004, the guide rod 1003 passes through the other end of the pulling block 1004 and is slidably connected with the pulling block 1004, the driving motor 1005 drives the lead screw 1002 to rotate and drives the pulling block 1004 to reciprocatingly move along the guide rod 1003, the needle cylinder of the liquid taking needle cylinder 9 is fixedly connected with the support seat 1001, and the piston of the liquid taking needle cylinder 9 is fixedly connected with the pulling block 1004 and reciprocatingly moves by means of the pulling block 1004.

[0033] The present application utilizes the lead screw 1002 to accurately control the moving distance of the piston of the liquid taking needle cylinder 9, ensures that the extraction amount of the test developing liquid in each liquid taking needle cylinder 9 is consistent, and makes the developing liquid consumption parameter in the detection process controllable.

[0034] The mechanical claw 5 is rotationally connected with the moving mechanism 6 by means of the rotating disc 11, and the detection part 702 and the standard part 703 of the test piece 7 have vertical downward freedom degrees by means of the rotation of the mechanical claw 5.

[0035] When the detection part 702 needs to be immersed, the rotating disc 11 is rotated to make the detection part 702 vertically downward, and when the standard part 703 needs to be immersed, the rotating disc 11 is rotated by 90° to make the standard part 703 vertically downward, so that the immersion switching of the two functional parts can be realized without adjusting the position of the moving mechanism 6, and the operation time is shortened.

[0036] Meanwhile, the clamping point of the mechanical claw 5 is arranged at the right angle of the to-be-tested sheet 7, so as to ensure that the distance between the rotating center and the detection part 702 and the standard part 703 is consistent, and the vertical height of the standard part 703 is consistent with the vertical height of the detection part 702 before rotation after the to-be-tested sheet 7 rotates 90°.

[0037] The moving mechanism 6 comprises longitudinal rails 601, a transverse rail 602 and a vertical rail 603. The longitudinal rails 601 are symmetrically arranged on both sides of the workbench 1 by means of supports. The transverse rail 602 is horizontally arranged on the longitudinal rails 601 on both sides. The two ends of the transverse rail 602 are respectively slidably connected with the longitudinal rails 601 by means of first sliding seats 604 and have the freedom of moving along the X-axis direction. The vertical rail 603 is slidably connected with the transverse rail 602 by means of second sliding seats 605 and has the freedom of moving along the Y-axis direction. The mechanical claw 5 is slidably connected with the vertical rail 603 by means of third sliding seats 606 and has the freedom of moving along the Z-axis direction. The mechanical claw 5 has the freedom of reciprocating along the X, Y and Z axes by means of the moving mechanism 6.

[0038] The moving mechanism 6 comprises a three-dimensional rail system composed of the longitudinal rails 601, the transverse rail 602 and the vertical rail 603, so as to realize the accurate movement of the mechanical claw 5 in the three-dimensional space and accurately reach the position above any tank on the workbench 1, thereby ensuring that the to-be-tested sheet 7 can be accurately immersed in the tank or moved to the washing tank 3 for processing.

[0039] The workbench 1 is further provided with a sewage tank 12. The to-be-tested developer tank 2, the washing tank 3 and the standard developer tank 4 are respectively connected with the sewage tank 12 by means of sewage discharge pipes.

[0040] When the developer is replaced or the tank is cleaned, the sewage valves of the tanks are opened, and the waste liquid directly flows into the sewage tank 12 through the sewage discharge pipes for centralized storage, so as to realize the centralized collection and treatment of the waste developer liquid and meet the environmental protection requirements.

[0041] An automatic developer detection method comprises the following steps: S1, a label written with information of to-be-tested developer is pasted on a sample test tube 8 containing the corresponding to-be-tested developer, and then the sample test tube 8 is inserted into a to-be-tested sheet 7; S2, standard developer is poured into a standard developer tank 4; S3, the mechanical claw 5 clamps the to-be-tested sheet 7 and moves to above a to-be-tested developer tank 2, a liquid taking syringe 9 draws the to-be-tested developer in the sample test tube 8 by means of the moving mechanism 6 and a push-pull assembly 10, and then the to-be-tested developer is transferred to the to-be-tested developer tank 2. The mechanical claw 5 rotates and makes the detection part 702 of the to-be-tested sheet 7 face downward. The detection part 702 of the to-be-tested sheet 7 is lowered in the to-be-tested developer by means of the mechanical claw 5. S4, after the test piece 7 is soaked in the developer to be tested, the liquid taking syringe 9 and the mechanical claw 5 clamping the test piece 7 are moved to the rinsing tank 3 respectively, the liquid taking syringe 9 draws the water in the rinsing tank 3 and discharges, the residual developer in the liquid taking syringe 9 is cleaned, and then the mechanical claw 5 clamps the test piece 7 in the rinsing tank 3 to rinse and dry the detection part 702 of the test piece 7; S5, the mechanical claw 5 clamps the test piece 7 after cleaning and moves to above the standard developer tank 4, the mechanical claw 5 rotates and makes the standard part 703 of the test piece 7 face downward, and the standard part 703 of the test piece 7 is lowered and soaked in the standard developer by the mechanical claw 5; S6, after the test piece 7 is soaked in the standard developer, the mechanical claw 5 clamps the test piece 7 and moves to the rinsing tank 3 to rinse and dry the standard part 703 of the test piece 7, and then the test piece 7 is placed in the discharging area for standby; S7, the developer to be tested in the last group of developer tanks 2 is discharged, and after the developer tank 2 is cleaned, steps S3-S6 are repeated; S8, after all the developers to be tested are detected, the workers uniformly observe the test pieces 7 corresponding to the developers to be tested, and determine the quality of the developer to be tested by comparing the line clarity of the detection part 702 and the standard part 703 of the test piece 7.

[0042] The detection method in the application is realized based on the above-mentioned detection device, the movement and rotation of the mechanical claw 5 cooperate with the structure of the test piece 7, a standardized developer detection process is formed, the influence of human operation difference on the detection result is reduced, continuous detection of multiple groups of developers is realized, batch detection efficiency is improved, and the same test piece comparison ensures that the detection result is accurate and reliable.

[0043] In step S1, the information tracing (such as batch, detection date, etc.) of the developer to be tested can be realized by pasting labels, so that the confusion of multiple sample detections is avoided; In step S4, the rinsing step can remove the developer remaining on the surface of the test piece and in the liquid taking syringe 9, so as to avoid cross contamination with the standard developer or the next group of developer to be tested, and the rinsing tank 3 is provided with a rinsing nozzle for spraying water on the test piece 7 and forming cleaning; The tank bottom of the developer tank 2 to be tested is provided with a sewage valve, when the developer to be tested is added, the sewage valve is closed in advance, when the developer needs to be replaced, the sewage valve is opened first to discharge the last group of developer to be tested, then the sewage valve is closed, the cleaning liquid is added to the developer tank 2 to be tested for flushing, and then the sewage valve is opened and closed to discharge the cleaning liquid.

[0044] In addition, in step S8, the unified comparison is carried out, the batch detection efficiency is improved, and the subjective judgment error of the workers can be reduced in a short time range.

[0045] The detection part 702 of the to-be-tested sheet 7 is immersed in the to-be-tested developer for the same time as the standard part 703 is immersed in the standard developer.

[0046] The immersion time is 60s, which ensures that the developing conditions of the detection part 702 and the standard part 703 are consistent, eliminates the influence of the immersion time difference on the developing effect, and further improves the accuracy and comparability of the detection result.

Claims

1. An automatic developer detection device, comprising a developer storage tank (2), a rinsing tank (3), and a standard developer storage tank (4) disposed on a workbench (1), characterized in that, The workbench (1) is also provided with a mechanical gripper (5) and a moving mechanism (6). The test piece (7) is provided with a detection part (702) and a standard part (703). The mechanical gripper (5) holds the test piece (7) and has the freedom to move back and forth between the test developer tank (2), the rinsing tank (3) and the standard developer tank (4) with the help of the moving mechanism (6). The detection part (702) of the test piece (7) is moved to the test developer tank (2) for immersion with the help of the mechanical gripper (5), and the standard part (703) of the test piece (7) is moved to the standard developer tank (4) for immersion with the help of the mechanical gripper (5).

2. The automatic developer detection device according to claim 1, characterized in that, The test piece (7) also includes a main body (701), the detection part (702) and the standard part (703) are respectively located on the adjacent side of the main body (701) and together form an L-shaped structure. The main body (701) is also provided with a sample tube (8), which contains a developing solution to be tested. The sample tube (8) is inserted into the main body (701) through the mounting hole on the main body (701).

3. The automatic developer detection device according to claim 1, characterized in that, The sample tube (8) includes a tube body and a tube cap, with a sealing gasket between the tube body and the tube cap, and a liquid extraction hole provided on the tube cap.

4. The automatic developer detection device according to claim 3, characterized in that, The workbench (1) is also equipped with a liquid collection syringe (9) and a push-pull assembly (10). The liquid collection syringe (9) is connected to the moving mechanism (6) by means of the push-pull assembly (10). The needle tip of the liquid collection syringe (9) is moved to the liquid collection hole of the sample tube (8) by means of the moving mechanism (6) and extends into the tube body through the sealing gasket. The liquid collection syringe (9) extracts the test developing solution in the tube body by means of the pull of the push-pull assembly (10).

5. The automatic developer detection device according to claim 4, characterized in that, The push-pull assembly (10) includes a support base (1001) and a lead screw (1002), a guide rod (1003), a pull block (1004), and a drive motor (1005) disposed on the support base (1001). The lead screw (1002) passes through one end of the pull block (1004) and is threadedly engaged with the pull block (1004). The guide rod (1003) passes through the other end of the pull block (1004) and is slidably engaged with the pull block (1004). The drive motor (1005) drives the lead screw (1002) to rotate and drives the pull block (1004) to reciprocate along the guide rod (1003). The syringe of the liquid collection syringe (9) is fixedly connected to the support base (1001). The piston of the liquid collection syringe (9) is fixedly connected to the pull block (1004) and reciprocates with the help of the pull block (1004).

6. The automatic developer detection device according to claim 1, characterized in that, The mechanical gripper (5) is rotatably connected to the moving mechanism (6) via a turntable (11), and the detection part (702) and standard part (703) of the test piece (7) have vertically downward degrees of freedom by means of the rotation of the mechanical gripper (5).

7. The automatic developer detection device according to claim 1, characterized in that, The moving mechanism (6) includes a longitudinal guide rail (601), a transverse guide rail (602), and a vertical guide rail (603). The longitudinal guide rail (601) is symmetrically arranged on both sides of the worktable (1) by means of a bracket. The transverse guide rail (602) is mounted on the longitudinal guide rail (601) on both sides. The two ends of the transverse guide rail (602) are respectively slidably engaged with the longitudinal guide rail (601) by means of a first slide block (604) and have a degree of freedom to move along the X-axis. The vertical guide rail (603) is slidably engaged with the transverse guide rail (602) by means of a second slide block (605) and has a degree of freedom to move along the Y-axis. The mechanical claw (5) is slidably engaged with the vertical guide rail (603) by means of a third slide block (606) and has a degree of freedom to move along the Z-axis. The mechanical claw (5) has a degree of freedom to reciprocate along the X, Y, and Z axes by means of the moving mechanism (6).

8. The automatic developer detection device according to claim 1, characterized in that, A sewage tank (12) is also provided below the workbench (1). The test developer storage tank (2), rinsing tank (3) and standard developer storage tank (4) are respectively connected to the sewage tank (12) via a drain pipe.

9. An automatic developer detection method, implemented based on the automatic developer detection device described in claim 4, characterized in that, Includes the following steps: S1. Paste the label with the information of the developer to be tested onto the sample tube (8) containing the corresponding developer to be tested, and then insert the sample tube (8) into the test piece (7). S2. Pour the standard developer into the standard developer storage tank (4); S3. The mechanical gripper (5) holds the test piece (7) and moves it above the test developer tank (2). The liquid extraction syringe (9) draws the test developer from the sample tube (8) with the help of the moving mechanism (6) and the push-pull assembly (10). Then the test developer is transferred to the test developer tank (2). The mechanical gripper (5) rotates and makes the detection part (702) of the test piece (7) face downward. The detection part (702) of the test piece (7) is lowered with the help of the mechanical gripper (5) and immersed in the test developer. S4. After the test piece (7) is soaked in the test developing solution, the liquid taking syringe (9) and the mechanical claw (5) holding the test piece (7) are moved to the rinsing tank (3) respectively. The liquid taking syringe (9) draws out the clean water in the rinsing tank (3) and discharges it. The residual test developing solution in the liquid taking syringe (9) is cleaned. Then the mechanical claw (5) holds the test piece (7) in the rinsing tank (3) to rinse and dry the detection part (702). S5. The mechanical gripper (5) holds the cleaned test piece (7) and moves it above the standard developer tank (4). The mechanical gripper (5) rotates and makes the standard part (703) of the test piece (7) face downward. The standard part (703) of the test piece (7) is lowered by the mechanical gripper (5) and immersed in the standard developer. S6. After the test piece (7) is soaked in the standard developer solution, the mechanical claw (5) holds the test piece (7) and removes it from the standard developer solution storage tank (4), and moves it to the rinsing tank (3) to rinse and dry the standard part (703) of the test piece (7). Then the test piece (7) is placed in the unloading area for later use. S7. Drain the developer solution in the previous test developer solution storage tank (2), clean the test developer solution storage tank (2), and repeat steps S3-S6. S8. After all the developing solutions to be tested have been tested, the staff will observe the test pieces (7) corresponding to each group of developing solutions to be tested. By comparing the clarity of the lines on the testing section (702) and the standard section (703) on the test piece (7), the quality of the developing solution to be tested will be determined.

10. The automatic detection method for developer according to claim 8, characterized in that, The immersion time of the detection section (702) of the test piece (7) in the test developer solution is the same as the immersion time of the standard section (703) in the standard developer solution.

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