Piezoelectric differential fast swing mirror, its pre-tightening device and pre-tightening assembly method

Abstract

This invention relates to the field of precision optomechanical structures and their assembly technology, specifically to a piezoelectric differential fast swing mirror and its pre-tightening device and pre-tightening assembly method. The piezoelectric differential fast swing mirror includes a base, a swing base, two sets of piezoelectric drive components, and a differential amplifier controller. The swing base and the base are coaxially arranged and connected by a flexible hinge. A reflector is installed on the side of the swing base away from the base. The two sets of piezoelectric drive components are symmetrically arranged about the axis of the swing base and are configured to drive the swing base to swing relative to the base. The differential amplifier controller is configured to provide drive signals with opposite phases to the two sets of piezoelectric drive components for differential operation. This invention solves the problem of deviation in the swing angle of the fast swing mirror caused by inconsistent pre-tightening force or other asymmetrical factors, ensuring the working accuracy and stability of the fast swing mirror.

Description

Technical Field

[0001] This invention relates to the field of precision optomechanical structures and their assembly technology, specifically to a piezoelectric differential fast swing mirror and its pre-tightening device and pre-tightening assembly method. Background Technology

[0002] As a precision device integrating optical, mechanical, and electrical engineering technologies, the fast-spinning mirror is used between a light source and a receiver to achieve precise control of the beam direction, and is an indispensable key component in photoelectric precision tracking systems. With the rapid development of modern optical technology, the application range of fast-spinning mirrors is constantly expanding, especially in aerospace, large laser weapons, astronomical telescopes, and space communications, where fast-spinning mirrors occupy a core position due to their superior performance.

[0003] Piezoelectric actuators are a common driving method for fast-swinging mirrors. Their core materials include piezoelectric crystals, piezoelectric ceramics, and organic piezoelectric materials. Piezoelectric actuators operate through the inverse piezoelectric effect of piezoelectric materials; under the influence of an applied electric field, the piezoelectric material undergoes corresponding deformation, and the amount of deformation is linearly related to the applied voltage. These devices also feature nanometer-level resolution, high output force, fast response, and miniaturization. Furthermore, due to their resistance to electromagnetic interference and ease of proportional control, they are particularly suitable for applications requiring extremely high response speed and positioning accuracy.

[0004] In certain specific applications (such as in astronomical telescopes), the stable output of the fast pendulum mirror is extremely important. However, due to inconsistent preload or other asymmetric factors, the pendulum mirror's swing angle may deviate, thus affecting its working accuracy and stability. Summary of the Invention

[0005] The purpose of this invention is to solve the problem in the prior art where the swing angle of a fast swing mirror deviates due to inconsistent preload or other asymmetrical factors, thus affecting the working accuracy and stability of the fast swing mirror. The invention provides a piezoelectric differential fast swing mirror with the advantages of high working accuracy and high stability.

[0006] To achieve the above objectives, the present invention employs the following technical solution:

[0007] A piezoelectric differential fast swing mirror, comprising:

[0008] Base;

[0009] A pendulum base is coaxially arranged with the base and connected by a flexible hinge. A reflector is installed on the side of the pendulum base away from the base.

[0010] Two sets of piezoelectric drive components are symmetrically arranged about the axis of the pendulum base and configured to drive the pendulum base to oscillate relative to the base; and

[0011] A differential amplifier controller is configured to provide drive signals of opposite phase to the two sets of piezoelectric drive components for driving the two sets of piezoelectric drive components to operate differentially.

[0012] Preferably, the base has a first mounting cavity extending through it along its axial direction, and the swing seat has a second mounting cavity extending along its axial direction, the second mounting cavity being concentrically arranged with the first mounting cavity; the piezoelectric drive assembly includes a piezoelectric actuator and a push rod, the piezoelectric actuator is installed in the second mounting cavity, one end of the push rod is in contact with the piezoelectric actuator, and the other end is fixed in the first mounting cavity by a tensioning assembly, the tensioning assembly being configured to adjust the position of the push rod in the first mounting cavity to adjust the preload of the piezoelectric actuator.

[0013] Preferably, the piezoelectric drive assembly further includes a retainer with an elastic tab on its outer side for mounting it in the second mounting cavity. The retainer has a through-hole extending along its length, the through-hole being configured to allow the piezoelectric drive and the push rod to move axially.

[0014] Preferably, the base has a socket on its side, one end of which is connected to the first mounting cavity and the other end extends to the outside of the base. An aviation plug is provided in the socket, the inner end of which is electrically connected to the piezoelectric actuator via a cable, and the outer end of which is electrically connected to the differential amplifier controller via a cable.

[0015] Preferably, the flexible hinge is a straight-circular single-axis symmetrical flexible hinge with a straight-circular cut structure symmetrically distributed along the swing axis of the piezoelectric differential fast swing mirror.

[0016] Preferably, the base and the swing seat are respectively provided with coaxial through holes in the middle part.

[0017] The present invention also provides a pre-tightening device for a piezoelectric differential fast swing mirror, used for pre-tightening the aforementioned piezoelectric differential fast swing mirror, the pre-tightening device comprising:

[0018] Pre-tightening frame;

[0019] A force-applying panel, fixed to the middle of the pre-tensioning frame, and fixedly connected to the base of the piezoelectric differential fast-swing mirror; and

[0020] Two sets of linear actuators are disposed on top of the preload frame to apply the same axial preload to the two sets of piezoelectric drive assemblies.

[0021] Preferably, the pre-tightening frame includes a chuck, a mounting panel, and a base panel arranged in parallel and spaced apart from top to bottom. The chuck and the mounting panel, as well as the mounting panel and the base panel, are fixedly connected by support rods. The force-applying panel is mounted on the mounting panel, and the base passes through the mounting panel and is fixedly connected to the force-applying panel.

[0022] Preferably, the pre-tightening device further includes two sets of pressure sensors, which are used to monitor the output force values ​​of the two sets of linear actuators respectively.

[0023] The present invention also provides a pre-tightening assembly method for a piezoelectric differential fast swing mirror, wherein the piezoelectric differential fast swing mirror is pre-tightened using the aforementioned pre-tightening device, and the pre-tightening assembly method includes the following steps:

[0024] The base of the piezoelectric differential fast swing mirror is fixedly installed on the force application panel;

[0025] Two linear actuators are controlled to apply the same axial force to two sets of piezoelectric drive components simultaneously. When the two sets of piezoelectric drive components are within a preset preload range, the tensioning components of the piezoelectric drive components are adjusted to maintain the piezoelectric drive components in a predetermined preload state.

[0026] Through the above technical solution, a larger swing angle can be achieved without increasing the size of the piezoelectric drive components by providing a drive signal through a differential amplifier controller. In addition, by setting the two sets of piezoelectric drive components to be symmetrically arranged about the axis of the pendulum seat, combined with the opposite phase drive mode provided by the differential amplifier controller, linearity error is offset to a certain extent, common-mode interference is effectively suppressed, and the problem of deviation in the swing angle of the fast pendulum mirror caused by inconsistent preload or other asymmetrical factors in the prior art is effectively solved, ensuring the working accuracy and stability of the fast pendulum mirror.

[0027] Other features and advantages of the present invention will be described in detail in the following specific embodiments. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of a piezoelectric differential fast swing mirror provided by the present invention;

[0029] Figure 2 This is a cross-sectional view of a piezoelectric differential fast swing mirror provided by the present invention;

[0030] Figure 3 This is a schematic diagram of the structure of a piezoelectric drive assembly provided by the present invention;

[0031] Figure 4 yes Figure 3 Exploded view of medium-voltage electric drive assembly;

[0032] Figure 5 This is a schematic diagram of the geometric dimensions of a flexible hinge provided by the present invention;

[0033] Figure 6 This is a schematic diagram of the working principle of a differential amplifier controller provided by the present invention;

[0034] Figure 7 This is a schematic diagram of the structure of a pre-tightening device provided by the present invention;

[0035] Figure 8 This is a cross-sectional view of a pre-tightening device provided by the present invention in use.

[0036] Explanation of reference numerals in the attached figures

[0037] 100. Piezoelectric differential fast swing mirror; 110. Base; 111. First mounting cavity; 112. Insertion hole; 113. Seat hole; 120. Swing seat; 121. Second mounting cavity; 130. Flexible hinge; 140. Piezoelectric drive assembly; 141. Piezoelectric actuator; 142. Push rod; 143. Tensioning assembly; 144. Cage; 1441. Through part; 145. Elastic sheet; 200. Preload frame; 210. Chuck; 220. Mounting panel; 230. Base panel; 240. Support rod; 300. Force application panel; 400. Linear actuator; 410. Force application rod. Detailed Implementation

[0038] To make the technical means, creative features, objectives, and effects of this invention readily understandable, the invention is further illustrated below with reference to specific embodiments. It should be understood that the specific embodiments described herein are for illustrative and explanatory purposes only and are not intended to limit the invention.

[0039] As mentioned above, please refer to Figure 1 and Figure 2 The present invention provides a piezoelectric differential fast swing mirror 100, including a base 110, a swing stand 120, two sets of piezoelectric drive components 140, and a differential amplifier controller.

[0040] The swing base 120 is coaxially arranged with the base 110 and connected by a flexible hinge 130. A reflector is installed on the side of the swing base 120 away from the base 110. Specifically, threaded holes evenly distributed around its axis are provided on the end face of the swing base 120 for mounting the reflector. Regarding the machining of the base 110 and the swing base 120, it is preferable to use precision machining technology to manufacture the base 110 and the swing base 120 in accordance with the design drawings, ensuring that their surface finish and flatness meet the requirements of subsequent assembly.

[0041] The two sets of piezoelectric drive components 140 are symmetrically arranged about the axis of the pendulum seat 120 and are configured to drive the pendulum seat 120 to swing relative to the base 110; the differential amplifier controller is configured to provide drive signals of opposite phase to the two sets of piezoelectric drive components 140 for driving the two sets of piezoelectric drive components 140 to work differentially.

[0042] In the technical solution provided by this invention, compared with direct drive, the drive signal provided by the differential amplifier controller can achieve a larger swing angle without increasing the size of the piezoelectric drive assembly 140. In addition, by setting the two sets of piezoelectric drive assemblies 140 to be symmetrically arranged about the axis of the pendulum seat 120, combined with the opposite phase drive mode provided by the differential amplifier controller, linearity error is offset to a certain extent, common mode interference is effectively suppressed, and the problem of deviation in the swing angle of the fast pendulum mirror caused by inconsistent preload or other asymmetrical factors in the prior art is effectively solved, thus ensuring the working accuracy and stability of the fast pendulum mirror.

[0043] Please see Figure 6 Differential amplifier controllers, as existing technology, have been widely recognized and applied in the field of electronic engineering due to their basic principles and general structure. Typical differential amplifiers are usually composed of operational amplifiers, used to amplify differential signals and suppress common-mode noise, and are commonly found in sensor signal conditioning, medical instruments, and data acquisition systems. In the technical solution provided by this invention, the differential amplifier controller is electrically connected to two sets of piezoelectric drive components 140, splitting the single initial input signal into two output signals amplified by N times, biased by X volts, and with a phase difference of 180°, enabling the two sets of piezoelectric drive components 140 to operate differentially. It is understood that in this invention, the specific amplification factor and bias degree can be determined according to actual conditions, and will not be elaborated upon here.

[0044] In this invention, the piezoelectric drive assembly 140 is used to provide piezoelectric driving force to drive the pendulum 120 to swing relative to the base 110, thereby causing the reflector mounted on the pendulum 120 to swing.

[0045] In one specific embodiment of the present invention, combined with Figure 2As shown, the base 110 has a first mounting cavity 111 extending through it along its axial direction, and the swing seat 120 has a second mounting cavity 121 extending along its axial direction. The second mounting cavity 121 is concentrically arranged with the first mounting cavity 111. The piezoelectric drive assembly 140 includes a piezoelectric actuator 141 and a push rod 142. The piezoelectric actuator 141 is installed in the second mounting cavity 121. One end of the push rod 142 is in contact with the piezoelectric actuator 141, and the other end is fixed in the first mounting cavity 111 by a tensioning assembly 143. The tensioning assembly 143 is configured to adjust the position of the push rod 142 in the first mounting cavity 111 to adjust the preload of the piezoelectric actuator 141.

[0046] With the above-mentioned structural design, the position of the top rod 142 is adjusted by the tensioning component 143, thereby achieving adjustable and precise control of the preload. Furthermore, the above structure has the advantage of being compact, which facilitates high-precision preload within a limited space and improves the working performance and service life of the piezoelectric drive component 140.

[0047] It should be noted that the tensioning assembly 143 can be of any suitable structural form, as long as it allows for convenient adjustment of the position of the push rod 142 within the first mounting cavity 111, thereby adjusting the preload of the piezoelectric actuator 141. For example, the tensioning assembly 143 includes a tensioning sleeve and a bolt locking device that cooperates with it. During installation, the preload of the piezoelectric actuator 141 is adjusted by changing the length of the push rod 142 extending into the tensioning sleeve. Once the desired preload is reached, the bolt locking device, in conjunction with the tensioning sleeve, locks the relative position of the push rod 142. It is understood that in this invention, the above structure allows for convenient and precise setting of the preload of the piezoelectric actuator 141, thereby optimizing its performance.

[0048] In this invention, the tensioning sleeve, as a conventional mechanical connection component, is sleeved outside the push rod 142 and forms a friction pair with the push rod 142. Bolts are evenly distributed circumferentially on the tensioning sleeve, generating radial pressure when the bolts are tightened. Furthermore, when the tensioning sleeve is fixed using a matching bolt locking device, it provides a dual fixing effect: the inner diameter of the tensioning sleeve contracts, gripping the push rod 142, while the outer diameter expands, forming a tight fit with the cavity wall of the first mounting cavity 111, thus fixing the relative position of the push rod 142 within the first mounting cavity 111 and applying a preset axial preload to the piezoelectric actuator 141. In actual operation, the magnitude of the preload applied to the piezoelectric actuator 141 can be precisely controlled by adjusting the length of the push rod 142 extending into the tensioning sleeve.

[0049] In the technical solution provided by the present invention, preferably, the piezoelectric actuator 141 in the piezoelectric drive assembly 140 is selected from piezoelectric ceramic materials with high precision and fast response characteristics, specifically a multilayer stacked piezoelectric ceramic material actuator, to ensure that it can provide sufficient displacement output when working.

[0050] Based on the characteristics of piezoelectric ceramic materials, a large displacement is generated when a positive voltage is applied to the piezoelectric actuator 141, while the displacement is relatively small when a reverse voltage is applied, far from reaching the value level of the positive displacement. Therefore, a bias voltage of 50% of the positive voltage is usually used as the differential working reference point.

[0051] Furthermore, the piezoelectric drive assembly 140 also includes a retainer 144, the outer side of which is provided with an elastic piece 145 for mounting it in the second mounting cavity 121. The retainer 144 has a through portion 1441 extending along its length direction, the through portion 1441 being configured to allow the piezoelectric actuator 141 and the push rod 142 to move axially.

[0052] In this invention, the elastic sheet 145 serves to mount the retainer 144 within the second mounting cavity 121. The design of the elastic sheet 145 facilitates the installation of the retainer 144 and provides cushioning and self-adjusting capabilities. Figure 3 and Figure 4 As shown, multiple elastic plates 145 are provided, spaced apart circumferentially along the retainer 144. When the retainer 144 is installed into the second mounting cavity 121, the elastic plates 145 deform, with one end away from the retainer 144 abutting against the cavity wall of the second mounting cavity 121, thereby achieving relative fixation of the retainer 144 within the second mounting cavity 121. The retainer 144 can pre-fix the push rod 142 and related wires, and also prevent the piezoelectric actuator 141 from overturning due to radial force during assembly.

[0053] In this invention, the retainer 144 can be made of any suitable material, such as a high-temperature resistant resin material, and is manufactured by 3D printing.

[0054] In this invention, the base 110 has a socket 112 on its side. One end of the socket 112 is connected to the first mounting cavity 111, and the other end extends to the outside of the base 110. An aviation plug is provided in the socket 112. The inner end of the aviation plug is electrically connected to the piezoelectric actuator 141 via a cable, and the outer end of the aviation plug is electrically connected to the differential amplifier controller via a cable.

[0055] In this invention, the aviation plug can carry the high-voltage signal output by the differential amplifier controller, and its metal shell can suppress external interference and can be quickly plugged in and out, thus simplifying system maintenance.

[0056] In this invention, the flexible hinge is a key component of the fast-swinging mirror. Under the action of piezoelectric driving force, the flexible hinge can undergo controllable flexible deformation, thereby achieving precise swing control of the mirror. This characteristic is particularly important for applications requiring high-precision and high-stability beam pointing. Compared to traditional rigid bearing structures, the flexible hinge has many advantages, such as higher precision, no need for lubrication, and simplified assembly process. These advantages make the flexible hinge the preferred solution in the design of fast-swinging mirrors, effectively improving the overall performance and reliability of the system.

[0057] In this invention, the flexible hinge 130 is a straight-circular single-axis symmetrical flexible hinge with a straight-circular cutout structure symmetrically distributed along the swing axis of the piezoelectric differential fast pendulum mirror. The structural design of the straight-circular single-axis symmetrical flexible hinge, with its unique continuous curvature characteristics, ensures uniform distribution of strain energy, improves the motion accuracy and stiffness consistency between the connecting parts, and meets the requirements of the fast pendulum mirror for motion accuracy, dynamic response, and long-term reliability. Preferably, in this invention, the flexible hinge 130 is integrally formed with the base 110 and the pendulum seat 120.

[0058] like Figure 5 This invention provides a schematic diagram of the geometric dimensions of a flexible hinge 130, wherein geometric dimension I represents the thickness of the flexible hinge 130, geometric dimension II represents the width of the flexible hinge 130, and geometric dimension III represents the slit length of the flexible hinge 130. The stiffness of the flexible hinge 130 can be adjusted by changing the sizes of geometric dimensions I, II, and III: when geometric dimensions II and III remain constant, the larger the geometric dimension I, the greater the stiffness of the flexible hinge 130; conversely, when the geometric dimension I is small, the stiffness of the flexible hinge 130 is small, making it prone to plastic deformation. Furthermore, if the geometric dimension I is too small, the flexible hinge 130 will lose its flexibility. Therefore, it is necessary to constrain the geometric dimension I within a specified range. With geometric dimensions I and III remaining constant, the larger the geometric dimension II, the greater the stiffness of the flexible hinge 130, and vice versa. With geometric dimensions I and II remaining constant, the larger the geometric dimension III, the smaller the stiffness of the flexible hinge 130, and vice versa.

[0059] In this invention, the base 110 and the pendulum base 120 are respectively provided with coaxial through holes 113 in their middle portions. By providing the holes 113, the overall weight reduction of the piezoelectric differential fast pendulum mirror 100 can be achieved. Furthermore, since the two sets of piezoelectric drive components 140 are symmetrically arranged about the axis of the pendulum base 120, in a preferred embodiment of this invention, symmetrically arranging the two sets of piezoelectric drive components 140 on both sides of the holes 113 can reduce mutual interference between the two sets of piezoelectric drive components 140 during movement and improve drive accuracy. Based on this, it is preferable to set the holes 113 in a dumbbell shape, which can further enhance the weight reduction of the entire piezoelectric differential fast pendulum mirror 100.

[0060] It should be noted that the piezoelectric actuators 141 of the two sets of piezoelectric drive components 140 need to operate differentially under the same preload. The main reasons are as follows: First, in terms of mechanical symmetry, equal preload can ensure that the initial stiffness of both sides of the flexible hinge 130 is consistent, avoiding bias error and resonant frequency splitting; second, in terms of differential control efficiency, equal preload allows the differential signal to completely cancel common-mode interference, eliminate static deviation caused by preload difference, and reduce nonlinear error; finally, in terms of consistent dynamic performance, equal preload makes the differential operation response fast and accurate.

[0061] To enable the two sets of piezoelectric drive components 140 to operate differentially under the same preload, such as Figure 7 and Figure 8 As shown, the present invention also provides a pre-tightening device for a piezoelectric differential fast-swing mirror 100, used for pre-tightening the aforementioned piezoelectric differential fast-swing mirror 100. The pre-tightening device includes a pre-tightening frame 200, a force-applying panel 300, and two sets of linear actuators 400. The force-applying panel 300 is fixed to the middle of the pre-tightening frame 200 and is fixedly connected to the base 110 of the piezoelectric differential fast-swing mirror 100. The two sets of linear actuators 400 are disposed on the top of the pre-tightening frame 200 and are used to apply the same axial pre-tightening force to the two sets of piezoelectric drive assemblies 140.

[0062] In this invention, the linear actuator 400 applies an axial force to the piezoelectric drive assembly 140. The linear actuator 400 can adopt any suitable structure, such as an electric push rod or a servo electric cylinder. The power output end of the linear actuator 400 contacts the end of the push rod 142 that is away from the piezoelectric drive 141. The push rod 142 applies an axial force to the piezoelectric drive 141. When the output pressure of the linear actuator 400 is stable within a preset preload range, the tensioning assembly 143 can fix the relative position of the push rod 142, thereby completing the preload operation of the piezoelectric drive 141.

[0063] In this invention, the pre-tension frame 200 mainly serves a supporting and fixing function, used to fix the piezoelectric differential fast swing mirror 100, the force application panel 300, and two sets of linear actuators 400. In a specific embodiment of this invention, the pre-tension frame 200 includes a chuck 210, a mounting panel 220, and a base panel 230 arranged in parallel and spaced order from top to bottom. The chuck 210 and the mounting panel 220, as well as the mounting panel 220 and the base panel 230, are respectively fixedly connected by support rods 240. The force application panel 300 is mounted on the mounting panel 220, and the base 110 passes through the mounting panel 220 and is fixedly connected to the force application panel 300.

[0064] It is understood that in this invention, by setting the preload frame 200 as a three-level frame structure including the chuck 210, the mounting panel 220 and the base panel 230, the through-mount design of the base 110 can effectively reduce the axial deviation of the linear actuator 400 and meet the stringent requirements of high-precision optical systems for symmetrical control of preload force.

[0065] In this invention, the pre-tightening device further includes two sets of pressure sensors, which are used to monitor the output force values ​​of the two sets of linear actuators 400 respectively.

[0066] In a specific implementation, the pressure sensor can be selected as a force sensor. The power output end of the linear actuator 400 is connected to the upper end of the force-applying rod 410 through the force sensor. The lower end of the force-applying rod 410 is in contact with the top rod 142. It should be noted that in order to ensure a balanced distribution of the applied pressure, the bottom end face of the force-applying rod 410 needs to be vertically positioned directly above the top rod 142.

[0067] The present invention also provides a pre-tightening assembly method for a piezoelectric differential fast swing mirror, wherein the piezoelectric differential fast swing mirror is pre-tightened using the aforementioned pre-tightening device, and the pre-tightening assembly method includes the following steps:

[0068] The base 110 of the piezoelectric differential fast swing mirror 100 is fixedly installed on the force application panel 300;

[0069] Two linear actuators 400 are controlled to apply the same axial force to two piezoelectric drive assemblies 140 simultaneously. When the two piezoelectric drive assemblies 140 are within a preset preload range, the tensioning assembly 143 of the piezoelectric drive assembly 140 is adjusted to keep the piezoelectric drive assembly 140 in a predetermined preload state.

[0070] More specifically, in one embodiment of the present invention, the pre-tightening assembly method includes the following steps:

[0071] S1. Pass the base 110 of the piezoelectric differential fast swing mirror 100 through the mounting panel 220 and lock it to the force application panel 300 with bolts;

[0072] S2. Connect the power output end of the linear actuator 400 to the upper end of the force rod 410 through a force gauge. The lower end of the force rod 410 contacts the push rod 142. Here, it is necessary to ensure that the bottom end face of the force rod 410 is vertically located directly above the push rod 142 to ensure a balanced distribution of the applied pressure.

[0073] S3. Start the linear actuator 400. The power output end of the linear actuator 400 moves downward in the vertical direction and applies axial force to the push rod 142 through the force bar 410 until the output pressure is detected by the pressure sensor to be stable within the preset preload range. The pressure can be adjusted according to the value of the pressure sensor to ensure that the two sets of piezoelectric actuators 141 are subjected to the same preload.

[0074] S4. Under the stabilizing condition provided by the linear actuator 400, the relative position of the push rod 142 is fixed by the tensioning component 143, thereby realizing the pre-tightening operation of the piezoelectric actuator 141. At this time, the input signal is divided into two output signals by the differential amplifier, which are amplified by N times, biased by X volts, and have a phase difference of 180 degrees. These output signals drive the two sets of piezoelectric actuators 140 to work differentially under the same pre-tightening force, thereby realizing the precise swing of the reflector.

[0075] The foregoing has shown and described the basic principles, main features, and characteristics of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A piezoelectric differential fast steering mirror (100) characterized by, The piezoelectric differential fast swing mirror (100) comprises: a base (110); a swing base (120) coaxially arranged with the base (110) and connected through a flexible hinge (130), a side of the swing base (120) away from the base (110) being provided with a reflecting mirror; two groups of piezoelectric driving assemblies (140) symmetrically arranged about the axis of the swing base (120) and capable of driving the swing base (120) to swing relative to the base (110); and a differential amplification controller capable of providing driving signals of opposite phases to the two groups of piezoelectric driving assemblies (140) for driving the two groups of piezoelectric driving assemblies (140) to work differentially. The base (110) is provided with a first mounting cavity (111) extending through the base (110) along the axial direction, and the swing base (120) is provided with a second mounting cavity (121) extending through the swing base (120) along the axial direction, the second mounting cavity (121) being coaxially arranged with the first mounting cavity (111). The piezoelectric driving assembly (140) comprises a piezoelectric driver (141) and a top rod (142), the piezoelectric driver (141) being mounted in the second mounting cavity (121), one end of the top rod (142) being in contact with the piezoelectric driver (141), and the other end being fixed in the first mounting cavity (111) through a tensioning assembly (143), the tensioning assembly (143) being capable of adjusting the position of the top rod (142) in the first mounting cavity (111) for adjusting the pre-tightening force of the piezoelectric driver (141).

2. The piezoelectric differential fast steering mirror (100) of claim 1, wherein, The piezoelectric driving assembly (140) further comprises a retainer (144), the outer side of the retainer (144) being provided with an elastic sheet (145) for mounting the retainer (144) in the second mounting cavity (121), the retainer (144) having a through portion (1441) extending along the length direction of the retainer (144), the through portion (1441) being capable of allowing the piezoelectric driver (141) and the top rod (142) to move axially.

3. The piezoelectric differential fast steering mirror (100) of claim 1, wherein, The side of the base (110) is provided with a jack (112), one end of the jack (112) being communicated with the first mounting cavity (111), and the other end extending to the outside of the base (110), the jack (112) being provided with an aviation plug, the inner end of the aviation plug being electrically connected with the piezoelectric driver (141) through a cable, and the outer end of the aviation plug being electrically connected with the differential amplification controller through a cable.

4. The piezoelectric differential fast steering mirror (100) of claim 1, wherein, The flexible hinge (130) is a straight circular single-axis symmetric flexible hinge having a straight circular cut structure symmetrically distributed along the swing axis of the piezoelectric differential fast swing mirror (100).

5. The piezoelectric differential fast steering mirror (100) according to any one of claims 1-4, characterized in that, The middle parts of the base (110) and the swing base (120) are respectively provided with seat holes (113) coaxially extending through the middle parts.

6. A pre-tensioning device for a piezoelectric differential fast steering mirror (100) according to any one of claims 1 to 5, characterized in that The pre-tightening device comprises: a pre-tightening frame (200); The pre-tightening frame (200) includes a chuck (210), a mounting panel (220) and a base panel (230) arranged in sequence from top to bottom and in parallel and spaced apart, the chuck (210) and the mounting panel (220) are fixedly connected by a support rod (240), the mounting panel (220) and the base panel (230) are fixedly connected by a support rod (240), the force panel (300) is installed on the mounting panel (220), and the base (110) penetrates through the mounting panel (220) and is fixedly connected with the force panel (300).

7. The pre-tensioning device of a piezoelectric differential fast steering mirror according to claim 6, characterized in that, The pre-tightening device further comprises two groups of pressure sensors for monitoring the output force values of the two groups of linear actuators (400) respectively.

8. The pre-tensioning device of a piezoelectric differential fast steering mirror according to claim 6, wherein, The pre-tightening assembly method comprises the following steps:

9. A pre-tightening assembly method of a piezoelectric differential fast steering mirror, using the pre-tightening device of any one of claims 6-8 to pre-tighten the piezoelectric differential fast steering mirror, characterized in that, The base (110) of the piezoelectric differential fast swing mirror (100) is fixedly installed on the force panel (300); The two groups of linear actuators (400) are controlled to synchronously apply the same axial force to the two groups of piezoelectric driving assemblies (140), when the two groups of piezoelectric driving assemblies (140) are in a preset pre-tightening force range, the tensioning assembly (143) of the piezoelectric driving assembly (140) is adjusted, and the piezoelectric driving assembly (140) remains in a predetermined pre-tightening force state. ​

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